CN104977198A - Nuclear pore membrane small sample etching apparatus - Google Patents

Nuclear pore membrane small sample etching apparatus Download PDF

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Publication number
CN104977198A
CN104977198A CN201510241134.7A CN201510241134A CN104977198A CN 104977198 A CN104977198 A CN 104977198A CN 201510241134 A CN201510241134 A CN 201510241134A CN 104977198 A CN104977198 A CN 104977198A
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CN
China
Prior art keywords
etching
cup
inner cap
small sample
nucleopore membranes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510241134.7A
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Chinese (zh)
Inventor
莫丹
袁平
刘杰
曹殿亮
刘建德
张胜霞
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Institute of Modern Physics of CAS
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Institute of Modern Physics of CAS
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Priority to CN201510241134.7A priority Critical patent/CN104977198A/en
Publication of CN104977198A publication Critical patent/CN104977198A/en
Pending legal-status Critical Current

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Abstract

The present invention relates to a nuclear pore membrane small sample etching apparatus, which is mainly characterized by comprising an etching cup, wherein a sealed upper cup cover is arranged above the etching cup, an inner cover performing secondary sealing on the etching cup is arranged below the upper cup cover, a membrane bracket is arranged below the inner cover, a thermal-sensitive probe is arranged inside the etching cup, the etching cup has the double-layer hollow cup wall, the upper side and the lower side are respectively provided with a water inlet and a water outlet, the water inlet and the water outlet are respectively communicated with the water outlet end and the water inlet end of a constant temperature circulation system, and magnetic transmission stirring comprising a magneton and a magnetic stirring device is arranged below the etching cup. According to the present invention, with the magnetic stirring, the etching liquid maintains the uniform state; with the circulating water heating of the etching cup interlayer, the etching liquid temperature is uniform; the built-in thermal-sensitive probe and the etching liquid are connected, such that the etching liquid temperature can be accurately controlled; the whole etching cup maintains the sealed state, such that the solution evaporation can be reduced; and the sample is fixed through the sample clamp, such that the sample maintains the flat state, the sample taking is convenient, and the cleaning and air-drying are easy.

Description

Nucleopore membranes small sample Etaching device
Technical field
The present invention relates to a kind of nucleopore membranes small sample Etaching device.This device is mainly used in the etching test of the small sample of nucleopore membranes, and main application fields comprises nucleopore membranes experimental study, the inspection of nucleopore membranes production run etc.
Background technology
Nucleopore membranes, also known as making nuclear pore membrane or heavy ion microporous membrane, it utilizes heavy ion then chemical etching reaming of punching on megohmite insulant film to form.Under certain etching condition (temperature, concentration etc.), nucleopore membranes etching keeps identical speed, pore size and etching period linear.Nucleopore membranes pore size is one of main performance index of nucleopore membranes, accurately controls mainly through etching period.
In order to accurate etching control aperture, the following condition of etching machines demand fulfillment:
(1) mobility of etching solution:
Etching solution keeps fully flowing, and the concentration of etching liquid is kept evenly.
(2) corrosion resistance of material:
Can resistance to alkali corrosion with etching liquid contact portion.
(3) etch temperature homogeneity:
Etching liquid has a narrow range of temperature, and etching solution temperature keeps evenly.
(4) heating-up temperature accuracy
Temperature control is accurate, and temperature hold-time is long, fluctuates little.
(5) closure of vessel is etched
Reduce etching solution volatilization, keep etchant concentration.
(6) convenience sampled
In etching process, sample needs to keep smooth, and sampling is convenient.
At present, the etching of nucleopore membranes small sample adopts water-bath or warm table to carry out usually.Generally heat by etching solution is directly poured in water-bath, or etching solution is put into beaker, then beaker is put on water-bath and warm table and heat.The first scheme directly heats due to etching solution, adopts the water-bath of band magnetic agitation can ensure the homogeneity of etching solution, temperature, but is difficult to meet the demands in the corrosion resistance, sampling convenience etc. of closure, material.First scheme is all difficult to meet the demands in the homogeneity, closure, sampling convenience etc. of the accuracy of heating-up temperature, etch temperature.
Summary of the invention
The object of the invention is to avoid the deficiencies in the prior art part and a kind of nucleopore membranes small sample Etaching device is provided.Make nucleopore membranes etch aperture precisely controlled, whole sample pore size is even.
For achieving the above object, the technical scheme that the present invention takes is: a kind of nucleopore membranes small sample Etaching device, its principal feature is to include etching cup, etching cup above establish Packed on bowl cover, be provided with and the inner cap etching glass secondary seal in the below of upper bowl cover, be provided with membrane support in the below of inner cap, in etching cup, be provided with thermosensitive probe; The wall of cup of etching cup is that Double-layer clamp is empty, and its upper and lower both sides are respectively equipped with water inlet and water delivering orifice, and water inlet and water delivering orifice are connected with water inlet end with the water side of constant temperature circulating system respectively; Be provided with magneton and magnetic stirring apparatus to form Magnetic drive stir in the below of etching cup.
Described nucleopore membranes small sample Etaching device, described thermosensitive probe is inserted in etching cup by the through hole at upper bowl cover edge, is connected by the sensor socket of transmission line with constant temperature circulating system.Thermosensitive probe measures fluid temperature in etching cup, controlled circulation coolant-temperature gage.
Described nucleopore membranes small sample Etaching device, the upper surface of described inner cap be provided with inner cap mentioned in cover hook, lower surface is provided with inner cap lower draw-bar; By the interior hook that covers, inner cap is mentioned, inner cap is separated with etching cup; Membrane support is connected with inner cap lower draw-bar by a hanger.
Described nucleopore membranes small sample Etaching device, described etching cup cup diameter is 10-30 centimetre, is highly 10-30 centimetre, and material is glass or stainless steel.
Described nucleopore membranes small sample Etaching device, in the form of a ring, edge has the clear opening placing thermosensitive probe to described upper bowl cover, and material is teflon or stainless steel.
Described nucleopore membranes small sample Etaching device, the material of described inner cap is teflon or stainless steel.
Described nucleopore membranes small sample Etaching device, described membrane support is border structure, which is provided with hook, and the fixing slide block that frame is provided with movement presss from both sides; Material is teflon or stainless steel.Sample is fixed on membrane support with slide block folder by fixing.
The invention has the beneficial effects as follows: magnetic agitation makes etching liquid keep evenly; Glass and teflon can resistance to alkali corrosions; By etching cup interlayer circulating water heating, make etching solution homogeneous temperature; Built-in thermosensitive probe is connected with etching solution, makes the temperature of etching liquid can be precisely controlled; Whole etching cup keeps closing, and can reduce the volatilization of solution; Sample is fixed by specimen holder, and sample keeps smooth, and sampling is convenient, is convenient to cleaning and dries.Adopt this Etaching device, etching solution can be reused, and the repeatability of Sample Etch and controllability are all fine.
Accompanying drawing illustrates:
Fig. 1 nucleopore membranes small sample Etaching device schematic front view;
Bowl cover schematic diagram on Fig. 2 Etaching device;
Fig. 3 Etaching device membrane support schematic diagram.
Embodiment
Be described principle of the present invention and feature below in conjunction with embodiment, example, only for explaining the present invention, is not intended to limit scope of the present invention.Below content of the present invention is described in detail.
Embodiment 1: see Fig. 1, a kind of nucleopore membranes small sample Etaching device, include etching cup 1, etching cup 1 above establish Packed on bowl cover 2, be provided with and the inner cap 4 etching cup 1 secondary seal in the below of upper bowl cover 2, be provided with membrane support 5 in the below of inner cap 4, in etching cup 1, be provided with thermosensitive probe 3; The wall of cup of etching cup 1 is that Double-layer clamp is empty, and its upper and lower both sides are respectively equipped with water inlet 1-1 and water delivering orifice 1-2, and water inlet 1-1 and water delivering orifice 1-2 are connected with water inlet end 8-2 with the water side 8-1 of constant temperature circulating system 8 respectively; Be provided with magneton 6 to form Magnetic drive with magnetic stirring apparatus 7 stir in the below of etching cup 1.
See Fig. 2, described nucleopore membranes small sample Etaching device, described thermosensitive probe 3 is inserted in etching cup 1 by the through hole 2-1 at upper bowl cover 2 edge, is connected by the sensor socket 8-3 of transmission line with constant temperature circulating system 8.
The upper surface of described inner cap 4 be provided with inner cap mentioned in cover hook 4-1, lower surface is provided with inner cap lower draw-bar 4-2; By the interior hook 4-1 that covers, inner cap 4 is mentioned, inner cap 4 is separated with etching cup 1; Membrane support 5 is connected with inner cap lower draw-bar 4-2 by a hanger 5-1.
Described etching cup 1 cup diameter 10 centimetres, height 10 centimetres, material is stainless steel.
In the form of a ring, edge has the clear opening placing thermosensitive probe 3 to described upper bowl cover 2, and material is stainless steel.
The material of described inner cap 4 is stainless steel.
See Fig. 3, described membrane support 5 is border structure, and which is provided with hook 5-1, the fixing slide block that frame is provided with movement presss from both sides 5-2; Material is stainless steel.Sample to be fixed on membrane support 5 by fixing with slide block folder 5-2.
There is provided recirculated water by constant temperature circulating system 8 during etching, inject etching cup 1 wall of cup, realize the heating to etching solution and insulation effect.Sample film is cut into suitable size, uses fixing slide block folder 5-2 to be fixed on membrane support 5; By dress film membrane support 5 by inner cap hook be suspended on below inner cap, and together put into etching cup build.After having etched, mention inner cap and take off membrane support 5, put into washed with de-ionized water.After cleaning, membrane support 5 is hung room temperature and dries.
Embodiment 2: a kind of nucleopore membranes small sample Etaching device.
The cup of described etching cup 1 is diameter 30 centimetres, and height 30 centimetres, material is glass.
Described upper bowl cover 2, edge has clear opening 2-1, and place thermosensitive probe, material is teflon.
Described inner cap 4, upper hook 4-1 is used for carrying extension inner cap, and lower draw-bar 4-2 links up with membrane support and is connected, and material is teflon.
Described membrane support 5, in border structure, above with hook 5-1, frame presss from both sides 5-2 with transportable fixing slide block.Material is teflon.
Described magnetic stirring apparatus 7, supports the use in groups with etching cup.
Described constant temperature circulating water system 8, water inlet 8-1 is connected with etching cup 1 with water delivering orifice 8-2, measures fluid temperature in etching cup by thermosensitive probe 3.
All the other structures are identical with embodiment 1.
Embodiment: 3: see Fig. 1, a kind of nucleopore membranes small sample Etaching device.
The cup diameter of described etching cup 1 20 centimetres, height 20 centimetres, material is stainless steel.
Described upper bowl cover 2, edge has clear opening 2-1, and place thermosensitive probe, material is stainless steel.
Described inner cap 4, upper hook 4-1 is used for carrying extension inner cap, and lower draw-bar 4-2 links up with membrane support and is connected, and material is stainless steel.
Described membrane support 5, in border structure, above with hook 5-1, frame presss from both sides 5-2 with transportable fixing slide block.Material is stainless steel.
Described magnetic stirring apparatus 7, is detachably used alone.
Described constant temperature circulating water system 8, water inlet 8-1 is connected with etching cup 1 with water delivering orifice 8-2, measures fluid temperature in etching cup, controlled circulation coolant-temperature gage by thermosensitive probe 3.
All the other structures are identical with embodiment 1.
During etching, by the membrane material after irradiation, be immersed in the etching liquid of alkalescence.Akaline liquid adopts the sodium hydroxide solution of 2-8 mol/L, and etch temperature is at 50-80 DEG C.
There is provided recirculated water by constant temperature circulating system 8, inject etching cup 1 wall of cup, realize the heating to etching solution and insulation effect.Sample film is cut into suitable size, is fixed on membrane support 5 with slide block 5-2; By membrane support 5 by inner cap hook be suspended on below inner cap, and together put into etching cup 1 build.After having etched, mention inner cap and take off membrane support 5, put into washed with de-ionized water.After cleaning, membrane support is hung room temperature and dries.During whole Etaching device etching, keep sealing condition, can solution evaporation be prevented; The concentration of etching solution is realized and temperature keeps evenly by magnetic agitation.Inner cap and hook design realize membrane sample and take simple and easy, and make film surface in etching, cleaning and dry process keep smooth.
Above-described embodiment is the present invention's preferably embodiment; but embodiments of the present invention are not restricted to the described embodiments; change, the modification done under other any does not deviate from Spirit Essence of the present invention and principle, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.

Claims (7)

1. a nucleopore membranes small sample Etaching device, it is characterized in that including etching cup, etching cup above establish Packed on bowl cover, be provided with and the inner cap etching glass secondary seal in the below of upper bowl cover, be provided with membrane support in the below of inner cap, in etching cup, be provided with thermosensitive probe; The wall of cup of etching cup is that Double-layer clamp is empty, and its upper and lower both sides are respectively equipped with water inlet and water delivering orifice, and water inlet and water delivering orifice are connected with water inlet end with the water side of constant temperature circulating system respectively; Be provided with magneton and magnetic stirring apparatus to form Magnetic drive stir in the below of etching cup.
2. nucleopore membranes small sample Etaching device as claimed in claim 1, be is characterized in that described thermosensitive probe is inserted in etching cup by the through hole at upper bowl cover edge, is connected by the sensor socket of transmission line with constant temperature circulating system.
3. nucleopore membranes small sample Etaching device as claimed in claim 1, it is characterized in that the upper surface of described inner cap be provided with inner cap mentioned in cover hook, lower surface is provided with inner cap lower draw-bar; Membrane support is connected with inner cap lower draw-bar by a hanger.
4. nucleopore membranes small sample Etaching device as claimed in claim 1, it is characterized in that described etching cup cup diameter is 10-30 centimetre, be highly 10-30 centimetre, material is glass or stainless steel.
5. nucleopore membranes small sample Etaching device as claimed in claim 1, is characterized in that described upper bowl cover in the form of a ring, and edge has the clear opening placing thermosensitive probe, and material is teflon or stainless steel.
6. nucleopore membranes small sample Etaching device as claimed in claim 1, is characterized in that the material of described inner cap is teflon or stainless steel.
7. nucleopore membranes small sample Etaching device as claimed in claim 1, it is characterized in that described membrane support is border structure, which is provided with hook, the fixing slide block that frame is provided with movement presss from both sides; Material is teflon or stainless steel.
CN201510241134.7A 2015-05-12 2015-05-12 Nuclear pore membrane small sample etching apparatus Pending CN104977198A (en)

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CN105277419A (en) * 2015-11-18 2016-01-27 武威科近新发技术有限责任公司 Circulating filtration type nuclear pore membrane etching device
CN105589233A (en) * 2016-03-17 2016-05-18 武汉华星光电技术有限公司 Wet-process processing device and maintenance method thereof

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Publication number Priority date Publication date Assignee Title
CN105277419A (en) * 2015-11-18 2016-01-27 武威科近新发技术有限责任公司 Circulating filtration type nuclear pore membrane etching device
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CN105589233A (en) * 2016-03-17 2016-05-18 武汉华星光电技术有限公司 Wet-process processing device and maintenance method thereof
CN105589233B (en) * 2016-03-17 2018-08-14 武汉华星光电技术有限公司 Wet method process apparatus and its maintaining method

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Application publication date: 20151014