CN105258798B - Photo detector spectral response test system and its measuring method - Google Patents
Photo detector spectral response test system and its measuring method Download PDFInfo
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Abstract
Photo detector spectral response test system and its measuring method, belong to optical radiation calibration measuring instrument and method, the problem of solving existing cost of testing system costliness and be difficult to ensure that measurement accuracy, to realize the high-acruracy survey of spectral response.The test system of the present invention, including Sine Modulated light source, collector lens, monochromator, optical filter wheel, camera bellows, motor-drive circuit, microprocessor control circuit, pre-amplification circuit, sinusoidal lock phase amplifying circuit, data collecting card and computer, the Sine Modulated light source is incandescent lamp, halogen tungsten lamp or the LED/light source of Sine Modulated.The present invention uses Sine Modulated light source, by the way of programming device realizes that sinusoidal lock mutually amplifies, and measures and is plotted in the response of the photo detector spectral in the range of 300~900nm, while realizing high-acruracy survey, reduces equipment cost and design difficulty.
Description
Technical field
Surveyed the invention belongs to optical radiation calibration measuring instrument and method, more particularly to a kind of response of photo detector spectral
Test system and its measuring method.
Background technology
Spectral response is the Specifeca tion speeification of photodetector, by testing this parameter, and actual electro-optical system is set
All tools such as raising and improvement of meter and photodetector device preparation technology are of great significance.
Open (bulletin) number CN102305905A Chinese invention patent is adopted there is provided a kind of wide spectrum photoelectric test system
With stable broad spectrum light source measure spectrum responsiveness, during measure spectrum responsiveness, due to by after opto-electronic conversion, electric signal
For DC quantity, the ambient noise and circuit random noise of photodetector, which are mixed into, to be wherein difficult to eliminate, and can cause the error of measurement.
In order to improve measurement accuracy, it is proposed that the mode of relevant detection, by the way of modulated light source (chopper is modulated into square wave), match somebody with somebody
Close lock-in amplifier to be detected, can largely eliminate ambient noise and circuit random noise, improve the survey of system
Accuracy of measurement.
Conventional chopper modulation system (square-wave signal is made in investigation mission outside the city or town), it is necessary to the expensive lock-in amplifier of supporting purchase,
And square wave or triangular wave etc. also contain countless higher hamonic waves in addition to fundamental wave, arbitrary electric signal transmission and processing path all have
Standby certain distribution capacity, inductance or interference, even preferably square wave or triangular wave can only also be obtained after being transmitted through oversampling circuit
Approximate square wave or triangular wave.So conventional chopping modulation mode can also produce certain mistake due to the influence of distorted signals
Difference.
The content of the invention
The present invention provides a kind of photo detector spectral response test system, while providing its measuring method, solves existing
Cost of testing system is expensive and the problem of being difficult to ensure that measurement accuracy, to realize the high-acruracy survey of spectral response.
A kind of photo detector spectral response test system provided by the present invention, including Sine Modulated light source, optically focused are saturating
Mirror, monochromator, optical filter wheel, camera bellows, motor-drive circuit, microprocessor control circuit, pre-amplification circuit, data collecting card
And computer；
Collimating optical system, spectroscope, the first electrical turntable and the second electrical turntable, the first electricity are equiped with the camera bellows
It is provided with standard Si photodetectors, the second electrical turntable and is provided with reference to Si photodetectors on dynamic turntable,
The light that Sine Modulated light source is sent passes through collector lens, and light splitting is carried out into monochromator, and filtered wheel filters out height
Rank spectrum, output monochromatic light enters camera bellows, then collimated optical system collimation is directional light, is projected on spectroscope, carries out 1：1
Light splitting, transmitted light is by standard Si photodetectors, and reflected light is referenced the reception of Si photodetectors；Standard Si photodetectors are defeated
Go out electric signal and amplified with reference to Si photodetectors output electric signal by pre-amplification circuit, put by sinusoidal lock-in amplifier
DC quantity that is big and exporting measurement, delivers to computer by data collecting card afterwards and carries out data processing；Computer is loaded with monochrome
Instrument control module, optical filter wheel control module, motor control module and data acquisition module, computer pass through motor control module
Send and instruct to microprocessor control circuit, controlled motor drive circuit drives the first electrical turntable and the second electrical turntable, lead to
Cross monochromator control module, optical filter wheel control module and data acquisition module complete monochromator control, optical filter wheel control and
Data acquisition function；
It is characterized in that：
The Sine Modulated light source is incandescent lamp, halogen tungsten lamp or the LED/light source of Sine Modulated；
Sinusoidal lock phase amplifying circuit is connected between the pre-amplification circuit and data collecting card, sine lock mutually amplifies electricity
Road input connection pre-amplification circuit, sine lock phase amplification circuit output end connection data collecting card, sine lock mutually amplifies electricity
The sinusoidal signal that pre-amplification circuit is exported is entered horizontal lock amplification and output DC quantity by road, and computer is delivered to by data collecting card
Data processing is carried out, the spectral responsivity of photodetector to be measured is calculated.
Described photo detector spectral response test system, it is further characterized by：
The spectroscope is point lattice spectroscope, and spectral region is 300~900nm wave bands；
The microprocessor control circuit is made up of chip of micro-computer and its peripheral circuit, is responsible for carrying out with computer
Serial communication, receives the instruction that computer is sent, controlled motor drive circuit and pre-amplification circuit；
The sinusoidal lock phase amplifying circuit is followed in series to form by A/D converter circuit, main body circuit and DA change-over circuits, its
Middle main body circuit includes the first multiplier, the second multiplier, the first low pass filter, loop filter, digital controlled oscillator, the 3rd
Multiplier, the 4th multiplier, the 5th multiplier, the second low pass filter, the 3rd low pass filter, the 6th multiplier, the 7th multiply
Musical instruments used in a Buddhist or Taoist mass, adder and root circuit；
First multiplier, the second multiplier, the first low pass filter, loop filter, digital controlled oscillator are gone here and there successively
Connection, sinusoidal modulation signal input the first multiplier, digital controlled oscillator output with input signal with frequently with phase sinusoidal signal and
The cosine signal of with same frequency and reversed-phase is sent into the 3rd multiplier and is multiplied, and multiplied result sends into the second multiplier, forms closed loop feedback lock phase
Loop circuit；Exported by digital controlled oscillator with input signal with sinusoidal signal and the cosine signal of with same frequency and reversed-phase of the frequency with phase；
The sinusoidal signal of digital controlled oscillator output is multiplied with input modulating signal in the 5th multiplier, and it is low that product enters the 3rd
Bandpass filter, filter result enters the 7th multiplier and carries out square operation；The cosine signal of digital controlled oscillator output is adjusted with input
Signal processed is multiplied in the 4th multiplier, and product enters the second low pass filter, and filter result enters the progress square of the 6th multiplier
Computing；The two-way square operation result of 6th multiplier and the 7th multiplier, into adder summation, summing value feeding evolution electricity
Road carries out extracting operation, and extracting operation result is the sinusoidal final output for locking phase amplifying circuit.
The present invention is for the process of measure spectrum responsiveness：
Photodetector to be measured is put on the first electrical turntable；Start monochromator control module, the optical filter of computer
Control module, motor control module and data acquisition module are taken turns, monochromator output wavelength range lambda is set1~λjWith wavelength interval Δ
λ；Complete after aforesaid operations, resulting photodetector data to be measured, after sine lock phase enhanced processing, by data acquisition
Card delivers to computer and carries out data processing, calculates the spectral responsivity of photodetector to be measured；, can be by calculating after the completion of calculating
Machine such as is browsed, drawn, being printed at the processing to obtained data.
Sinusoidal response signal is entered in the present invention horizontal lock amplification process be：
Photodetector to be measured is put on the first electrical turntable；Start monochromator control module, the optical filter of computer
Control module, motor control module, data acquisition module and test function module are taken turns, by monochromator control module, control is single
Color instrument exports photodetector operation wavelength λ to be measured, and the light of light source is electroencephalogram, and the response current signal of detector is just
String signal, by pre-amplification circuit, into sinusoidal lock-in amplifier, lock phase computing obtains being proportional to the direct current letter of sinusoidal magnitude value
Number；Direct current signal calculates responsiveness by data collecting card collection feeding PC；
The measuring method of the photo detector spectral response test system, comprises the steps successively：
A. first, second electrical turntable is driven：
Photodetector to be measured is placed on the first electrical turntable, instruction, micro-control are sent to microprocessor control circuit
Device control circuit controlled motor drive circuit processed drives the first electrical turntable and the second electrical turntable so that standard Si photodetections
The optical axis of device and the optical axis of reference Si photodetectors are orthogonal；
B. output light-wave：Optical filter wheel control module is controlled, the start wavelength λ for making optical filter wheel be tested needed for going to1With
Cutoff wavelength λjIn the wave-length coverage limited, 300nm≤λ1＜ λj≤ 900nm, with wavelength interval Δ λ controls monochromator successively
Output wavelength λiLight wave, i=1 ..., j；Δ λ=5nm or 10nm；
C. I is gatheredMark(λi) and IGinseng(λi)：Control data acquisition module, make pre-amplification circuit, sinusoidal lock phase amplifying circuit,
The wavelength that data collecting card is exported to standard Si photodetectors-current signal IMark(λi) and with reference to the output of Si photodetectors
Wavelength-current signal IGinseng(λi) be acquired successively；
D. I is judgedMark(λi) and IGinseng(λi) whether exceed range：Judge IMark(λi) and IGinseng(λi) size whether exceed range, be
Step E is then carried out, step F is otherwise carried out；
E. data acquisition amplifying circuit gear shift：Control pre-amplification circuit to carry out gear shift, go to step C；
F. I is storedMark(λi) and IGinseng(λi)：By the I of collectionMark(λi) and IGinseng(λi) computer storage is transferred to, C is gone to step, directly
To reaching cutoff wavelength λj；
G. the first electrical turntable is driven：Instruction is sent to microprocessor control circuit, is controlled by microprocessor control circuit
Motor-drive circuit drives the first electrical turntable so that the optical axis of photodetector to be measured is directed at spectroscopical transmitted light；
H. output light-wave：Wavelength X is sequentially output with wavelength interval Δ λ control monochromatorsiLight wave, i=1 ..., j；Δλ
=5nm or 10nm；
I. I is gatheredTreat(λi) and I 'Ginseng(λi)：Photodetector to be measured and the sinusoidal response signal with reference to photodetector, warp
By pre-amplification circuit, the amplifying circuit output of lock phase, I is respectively becomeTreat(λi) and I 'Ginseng(λi), control data acquisition module makes number
Wavelength-current signal I of light-metering electric explorer output is treated according to capture cardTreat(λi) and with reference to the second wheel output of photodetector
Wavelength-current signal I 'Ginseng(λi) be acquired successively；
J. I is judgedTreat(λi) and I 'Ginseng(λi) whether exceed range：Judge the I collectedTreat(λi) and I 'Ginseng(λi) size whether
More than range, it is then to carry out step K, otherwise carries out step L；
K. data acquisition amplifying circuit gear shift：Send and instruct to microprocessor control circuit, control pre-amplification circuit enters
Row gear shift, goes to step I；
L. I is storedTreat(λi) and I 'Ginseng(λi)：By the I of collectionTreat(λi) and I 'Ginseng(λi) computer storage is transferred to, I is gone to step,
Until reaching cutoff wavelength λj；
M. spectral responsivity is calculated：Calculate spectral responsivity R of the photodetector to be measured to each wavelengthTreat(λi)：
In formula, RMark(λi) it is known standard photodetector to λiResponsiveness, STreatFor photodetector photosurface to be measured
Area, SMarkFor standard photodetector photosurface area, i=1 ..., j；
According to RTreat(λi), draw out spectral response curve of the photodetector to be measured in entirely measurement wave band.
Sine wave comprises only a kind of frequency content, and form is simple, is easy to produce and receives, sine curve fidelity is other
The property that signal does not have：After one sinusoidal signal input, output is still that sine curve, only amplitude and phase may become
Change, but frequency and the shape of ripple are still just the same, are not distorted.Compared to other modulation waveforms, sine wave can be without mistake
It is true or distortion by circuit, the circuit transmission of signal can be avoided to handle error, so as to obtain higher measurement accuracy.
Compared with existing spectral responsivity measuring system, the present invention uses Sine Modulated light source, takes full advantage of sinusoidal letter
Number fidelity characteristic, it is to avoid signal distortion of multiple-harmonic (square wave etc.) signal in transmission and processing procedure, light splitting is used a little
Lattice spectroscope, by the analog signal of explorer response through AD conversion, carries out sinusoidal lock in numeric field and mutually amplifies, eliminate measurement background
The influence that noise and modulation waveform distortion are brought, accurate measurement sinusoidal signal amplitude, then changed through DA, gathered data to computer
Spectral response is calculated, while improving measurement of spectral response precision, equipment cost and design difficulty is reduced.
Brief description of the drawings
Fig. 1 is the structured flowchart of the present invention；
Fig. 2 is the block diagram of the sinusoidal lock-in amplifier of the present invention；
Fig. 3 is the cut-away view of the sinusoidal lock-in amplifier of the present invention；
Fig. 4 is the workflow diagram using the present invention；
Fig. 5 is method of testing FB(flow block) of the present invention.
Embodiment
Below in conjunction with drawings and examples, the present invention is further described.
As shown in figure 1, the present invention include Sine Modulated light source 1, collector lens 2, monochromator 3, optical filter wheel 4, camera bellows 12,
Motor-drive circuit 13, microprocessor control circuit 14, pre-amplification circuit 15, data collecting card 17 and computer 18；
Collimating optical system 5, spectroscope 6, the first electrical turntable 10 and the second electrical turntable are equiped with the camera bellows 12
11, it is provided with standard Si photodetectors 7, the second electrical turntable 11 on the first electrical turntable 10 to be provided with and is visited with reference to Si photoelectricity
Survey device 9；
The light that Sine Modulated light source 1 is sent passes through collector lens 2, and light splitting is carried out into monochromator 3, and filtered wheel 4 is filtered
Except high-order spectrum, output monochromatic light enters camera bellows 12, then the collimation of collimated optical system 5 is directional light, projects spectroscope 6
On, carry out 1：1 light splitting, transmitted light is received by standard Si photodetectors 7, and reflected light is referenced Si photodetectors 9 and received；Mark
Quasi- the output electric signal of Si photodetectors 7 and reference Si photodetectors 9 export electric signal and amplified by pre-amplification circuit 15,
Amplify by sinusoidal lock-in amplifier 16 and export the DC quantity of measurement, delivering to computer 18 by data collecting card 17 afterwards is carried out
Data processing；Computer 18 is loaded with monochromator control module, optical filter wheel control module, motor control module and data acquisition
Module, computer 18 is sent to microprocessor control circuit 14 by motor control module and instructed, controlled motor drive circuit 13
The first electrical turntable 10 and the second electrical turntable 11 are driven, passes through monochromator control module, optical filter wheel control module and data
Acquisition module completes monochromator control, optical filter wheel Control ＆ data acquisition function；
Sinusoidal lock phase amplifying circuit 16, sine lock phase are connected between the pre-amplification circuit 15 and data collecting card 17
The input of amplifying circuit 16 connects pre-amplification circuit 15, and the output end of sine lock phase amplifying circuit 16 connects data collecting card, just
String locks phase amplifying circuit and the sinusoidal signal that pre-amplification circuit 15 is exported is entered into horizontal lock amplification and output DC quantity, is adopted by data
Truck 17 delivers to computer 18 and carries out data processing, calculates the spectral responsivity of photodetector to be measured.
As shown in Fig. 2 the sinusoidal lock phase amplifying circuit 16 by A/D converter circuit, main body circuit and DA change-over circuits successively
It is in series, as shown in figure 3, the main body circuit includes the first multiplier, the second multiplier, the first low pass filter, loop
Wave filter, digital controlled oscillator, the 3rd multiplier, the 4th multiplier, the 5th multiplier, the second low pass filter, the 3rd low pass filtered
Ripple device, the 6th multiplier, the 7th multiplier, adder and root circuit；
First multiplier, the second multiplier, the first low pass filter, loop filter, digital controlled oscillator are gone here and there successively
Connection, sinusoidal modulation signal input the first multiplier, digital controlled oscillator output with input signal with frequently with phase sinusoidal signal and
The cosine signal of with same frequency and reversed-phase is sent into the 3rd multiplier and is multiplied, and multiplied result sends into the second multiplier, forms closed loop feedback lock phase
Loop circuit；Exported by digital controlled oscillator with input signal with sinusoidal signal and the cosine signal of with same frequency and reversed-phase of the frequency with phase；
The sinusoidal signal of digital controlled oscillator output is multiplied with input modulating signal in the 5th multiplier, and it is low that product enters the 3rd
Bandpass filter, filter result enters the 7th multiplier and carries out square operation；The cosine signal of digital controlled oscillator output is adjusted with input
Signal processed is multiplied in the 4th multiplier, and product enters the second low pass filter, and filter result enters the progress square of the 6th multiplier
Computing；The two-way square operation result of 6th multiplier and the 7th multiplier, into adder summation, summing value feeding evolution electricity
Road carries out extracting operation, and extracting operation result is the sinusoidal final output for locking phase amplifying circuit.
As one embodiment, in the present invention：
Sine Modulated light source 1 uses 500W illumination incandescent lamp；
Collector lens 2 is diameter 13cm convex lens；
Monochromator 3 uses the type monochromators of Omni- λ 5007 of Beijing Zolix Instrument Co., Ltd.；
Optical filter wheel 4 uses Beijing Zolix Instrument Co., Ltd. model SD-IR3 six grades of optical filter wheels；
Camera bellows 12 uses Beijing Zolix Instrument Co., Ltd. model DZDarkBox-DR01 camera bellows；
Collimating optical system 5 uses focal length for 100~150mm lens group；
Spectroscope 6 uses the BS POLKA-DOT25.4MMDIA point lattice light splitting of edmond optics (Shenzhen) Co., Ltd
Mirror, spectral region is 300~900nm wave bands.
First electrical turntable 10, the second electrical turntable 11 use the WN02RA100M of Beijing micro-nano Guang Ke Instrument Ltd.
Electric rotary table；
Standard Si photodetectors 7 use Beijing Zolix Instrument Co., Ltd. model DZDSi200-DR01 silicon
Photodetector；
With reference to silicon of the Si photodetectors 9 using Beijing Zolix Instrument Co., Ltd. model DZDSi200-DR01
Photodetector；
Motor-drive circuit 13 is made up of motor driving special chip TA8435H plus corresponding peripheral circuit；
The microprocessor control circuit 14 is made up of chip of micro-computer STC89C52RD and its peripheral circuit；
Pre-amplification circuit 15 coordinates OmRon companies using the LM393D operational amplifiers of National Semiconductor
G5V-2-HE relay groups into, amplification gear it is optional, one grade be 100 Ω, two grades be 10K Ω, third gear be 1M Ω, can by nA~
MA grades of electric current is converted to mV~V voltages for rear class processing；
Main body circuit in the sinusoidal lock phase amplifying circuit 16 is realized using Digital Way in programming device, is adopted
The DE2-115FPGA development platforms for carrying Cyclone IV E programming devices with ALTERA companies are designed, Cyclone
IV E programming devices, which are matched somebody with somebody, constitutes sinusoidal lock phase amplifying circuit 16 after AD/DA subcards；
Data collecting card 17 uses the FCFR-USB2066 data collecting cards of Beijing Xing Shuohuachuan Science and Technology Ltd.s；
Computer 18 uses Pentium (R) Dual-core E5300 processors, uses WindowsXP systems；
The work general flow chart of the present invention is as shown in figure 4, open system switching, and system reset is initialized；Carry out hard
Part is set and debugging：Computer 18 sends to microprocessor control circuit 14 and instructed, the driving of controlled motor drive circuit 13 first
Electrical turntable 10, makes standard Si photodetectors 7 and spectroscope transmit optical registration, by standard Si photodetectors 7 now where
Position P1It is saved into computer；The first electrical turntable 10 is driven, Si photodetectors to be measured is transmitted optical registration with spectroscope, will
Photodetector to be measured now position P2It is saved into computer；The second electrical turntable 11 is driven, makes to refer to Si photodetections
Device 9 and dichroic mirror optical registration, the now position P of photodetector 9 is referred to by Si3It is saved into computer；Select spectrum
Responsiveness is tested：Spectral responsivity test then needs to set wave-length coverage, wavelength interval, measuring method, selection detector；Then enter
Enter spectral responsivity test module, system starts to be tested automatically；After the completion of test by data be transported to computer carry out it is clear
The processing such as look at, draw, printing.
As shown in figure 5, using the measuring method of the photo detector spectral response test system, successively including following steps
Suddenly：
A. first, second electrical turntable is driven：
B. output light-wave：
C. I is gatheredMark(λi) and IGinseng(λi)：
D. I is judgedMark(λi) and IGinseng(λi) whether exceed range：
E. data acquisition amplifying circuit gear shift：
F. I is storedMark(λi) and IGinseng(λi)：
G. the first electrical turntable is driven：
H. output light-wave：
I. I is gatheredTreat(λi) and I 'Ginseng(λi)：
J. I is judgedTreat(λi) and I 'Ginseng(λi) whether exceed range；
K. data acquisition amplifying circuit gear shift；
L. I is storedTreat(λi) and I 'Ginseng(λi)；
M. spectral responsivity is calculated.
Claims (3)
1. a kind of photo detector spectral response test system, including Sine Modulated light source (1), collector lens (2), monochromator
(3), optical filter wheel (4), camera bellows (12), motor-drive circuit (13), microprocessor control circuit (14), pre-amplification circuit
(15), data collecting card (17) and computer (18)；
It is electronic that collimating optical system (5), spectroscope (6), the first electrical turntable (10) and second are equiped with the camera bellows (12)
Standard Si photodetectors (7) are installed, the second electrical turntable is provided with (11) on turntable (11), the first electrical turntable (10)
With reference to Si photodetectors (9)；
The light that Sine Modulated light source (1) is sent passes through collector lens (2), and light splitting, filtered wheel are carried out into monochromator (3)
(4) high-order spectrum is filtered out, output monochromatic light enters camera bellows (12), then collimated optical system (5) collimation is directional light, is projected
On spectroscope (6), 1 is carried out：1 light splitting, transmitted light is received by standard Si photodetectors (7), and reflected light is referenced the spy of Si photoelectricity
Device (9) is surveyed to receive；Standard Si photodetectors (7) export electric signal and passed through with reference to Si photodetectors (9) output electric signal
Pre-amplification circuit (15) amplifies, and amplifies and export the DC quantity of measurement by sinusoidal lock-in amplifier (16), afterwards by data
Capture card (17) delivers to computer (18) and carries out data processing；Computer (18) is loaded with monochromator control module, optical filter wheel
Control module, motor control module and data acquisition module, computer (18) is by motor control module to microprocessor control
Circuit (14) sends instruction, and controlled motor drive circuit (13) drives the first electrical turntable (10) and the second electrical turntable (11),
Monochromator control, optical filter wheel are completed by monochromator control module, optical filter wheel control module and data acquisition module to control
And data acquisition function；
The Sine Modulated light source (1) is incandescent lamp, halogen tungsten lamp or the LED/light source of Sine Modulated；
Sinusoidal lock phase amplifying circuit (16), sine lock are connected between the pre-amplification circuit (15) and data collecting card (17)
Phase input amplifier connection pre-amplification circuit (15), sine lock phase amplification circuit output end connection data collecting card
(17), the sinusoidal signal that pre-amplification circuit (15) is exported is entered horizontal lock and amplifies and export direct current by sinusoidal lock phase amplifying circuit
Amount, delivers to computer (18) by data collecting card (17) and carries out data processing, calculate the spectral responsivity of photodetector to be measured；
It is characterized in that：
The spectroscope (6) is point lattice spectroscope, and spectral region is 300~900nm wave bands；
The microprocessor control circuit (14) is made up of chip of micro-computer and its peripheral circuit, is responsible for carrying out with computer
Serial communication, receives the instruction that computer is sent, controlled motor drive circuit and pre-amplification circuit；
The sinusoidal lock phase amplifying circuit (16) is followed in series to form by A/D converter circuit, main body circuit and DA change-over circuits, its
Middle main body circuit includes the first multiplier, the second multiplier, the first low pass filter, loop filter, digital controlled oscillator, the 3rd
Multiplier, the 4th multiplier, the 5th multiplier, the second low pass filter, the 3rd low pass filter, the 6th multiplier, the 7th multiply
Musical instruments used in a Buddhist or Taoist mass, adder and root circuit；
First multiplier, the second multiplier, the first low pass filter, loop filter, digital controlled oscillator are sequentially connected in series, just
String modulated signal inputs the first multiplier, and digital controlled oscillator output is with the sinusoidal signal of phase and anti-with frequency with frequency with input signal
The cosine signal of phase is sent into the 3rd multiplier and is multiplied, and multiplied result sends into the second multiplier, forms closed loop feedback phase-locked loop circuit；
Exported by digital controlled oscillator with input signal with sinusoidal signal and the cosine signal of with same frequency and reversed-phase of the frequency with phase；
The sinusoidal signal of digital controlled oscillator output is multiplied with input modulating signal in the 5th multiplier, and product enters the 3rd low pass filtered
Ripple device, filter result enters the 7th multiplier and carries out square operation；The cosine signal of digital controlled oscillator output and input modulation letter
Number the 4th multiplier be multiplied, product enter the second low pass filter, filter result enter the 6th multiplier carry out square operation；
The two-way square operation result of 6th multiplier and the 7th multiplier, into adder summation, summing value feeding root circuit enters
Row extracting operation, extracting operation result is the sinusoidal final output for locking phase amplifying circuit.
2. photo detector spectral response test system as claimed in claim 1, it is characterised in that：
Main body circuit in the sinusoidal lock phase amplifying circuit is realized using Digital Way in programming device.
3. the measuring method of photo detector spectral response test system described in a kind of use claim 1 or 2, under including successively
State step：
A. first, second electrical turntable is driven：
Photodetector to be measured (8) is placed on the first electrical turntable (10), finger is sent to microprocessor control circuit (14)
Order, microprocessor control circuit controlled motor drive circuit (13) drives the first electrical turntable (10) and the second electrical turntable
(11) so that the optical axis of standard Si photodetectors (7) and the optical axis of reference Si photodetectors (9) are orthogonal；
B. output light-wave：Optical filter wheel control module is controlled, the start wavelength λ for making optical filter wheel (4) be tested needed for going to1With cut
Only wavelength XjIn the wave-length coverage limited, 300nm≤λ1＜ λj≤ 900nm, with wavelength interval Δ λ control monochromators (3) successively
Output wavelength λiLight wave, i=1 ..., j；Δ λ=5nm or 10nm；
C. I is gatheredMark(λi) and IGinseng(λi)：Control data acquisition module, makes pre-amplification circuit (15), sinusoidal lock phase amplifying circuit
(16), wavelength-current signal I that data collecting card (17) is exported to standard Si photodetectors (7)Mark(λi) and with reference to Si photoelectricity
The output wavelength of detector (9)-current signal IGinseng(λi) be acquired successively；
D. I is judgedMark(λi) and IGinseng(λi) whether exceed range：Judge IMark(λi) and IGinseng(λi) whether size exceedes range, is to enter
Row step E, otherwise carries out step F；
E. data acquisition amplifying circuit gear shift：Control pre-amplification circuit (15) to carry out gear shift, go to step C；
F. I is storedMark(λi) and IGinseng(λi)：By the I of collectionMark(λi) and IGinseng(λi) computer storage is transferred to, C is gone to step, until reaching
To cutoff wavelength λj；
G. the first electrical turntable is driven：Instruction is sent to microprocessor control circuit, by microprocessor control circuit controlled motor
Drive circuit (13) drives the first electrical turntable (10) so that the transmission of the optical axis alignment spectroscope (6) of photodetector to be measured
Light；
H. output light-wave：Wavelength X is sequentially output with wavelength interval Δ λ control monochromators (3)iLight wave, i=1 ..., j；Δ λ=
5nm or 10nm；
I. I is gatheredTreat(λi) and I 'Ginseng(λi)：Photodetector (8) to be measured and the sinusoidal response signal with reference to photodetector (9),
Via pre-amplification circuit (15), sinusoidal lock phase amplifying circuit (16) output, I is respectively becomeTreat(λi) and I 'Ginseng(λi), control data
Acquisition module, makes data collecting card (17) treat wavelength-current signal I of light-metering electric explorer (8) outputTreat(λi) and reference light
Second wheel output wavelength-current signal I ' of electric explorer (9)Ginseng(λi) be acquired successively；
J. I is judgedTreat(λi) and I 'Ginseng(λi) whether exceed range：Judge the I collectedTreat(λi) and I 'Ginseng(λi) size whether exceed amount
Journey, is then to carry out step K, otherwise carries out step L；
K. data acquisition amplifying circuit gear shift：Send and instruct to microprocessor control circuit, control pre-amplification circuit (15) enters
Row gear shift, goes to step I；
L. I is storedTreat(λi) and I 'Ginseng(λi)：By the I of collectionTreat(λi) and I 'Ginseng(λi) computer storage is transferred to, I is gone to step, until
Reach cutoff wavelength λj；
M. spectral responsivity is calculated：Calculate spectral responsivity R of the photodetector to be measured to each wavelengthTreat(λi)：
In formula, RMark(λi) it is known standard photodetector to λiResponsiveness, STreatFor photodetector photosurface face to be measured
Product, SMarkFor standard photodetector photosurface area, i=1 ..., j；
According to RTreat(λi), draw out spectral response curve of the photodetector to be measured in entirely measurement wave band.
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| CN106950037A (en) * | 2017-03-14 | 2017-07-14 | 南京理工大学 | A kind of VUV wave band image intensifier spectral response measurement system |
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| CN109243268B (en) * | 2018-08-28 | 2020-10-20 | 北京空间机电研究所 | Platform and method for testing, demonstrating and verifying visible light image detector for aerospace |
| CN112904171A (en) * | 2021-01-19 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | Four-quadrant photoelectric detector test system and test method |
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