CN105235082A - Cutting fluid cooling device for silicon wafer cutting machine - Google Patents
Cutting fluid cooling device for silicon wafer cutting machine Download PDFInfo
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- CN105235082A CN105235082A CN201510639725.XA CN201510639725A CN105235082A CN 105235082 A CN105235082 A CN 105235082A CN 201510639725 A CN201510639725 A CN 201510639725A CN 105235082 A CN105235082 A CN 105235082A
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Abstract
The invention relates to a cutting fluid cooling device for a silicon wafer cutting machine. By the adoption of the cutting fluid cooling device for the silicon wafer cutting machine, the defect that in the prior art, a cutting fluid cooling system for a silicon wafer cutting device is low in cooling efficiency is overcome. According to the cutting fluid cooling device for the silicon wafer cutting machine, a flow divider valve is arranged on a water inlet pipeline, and at least two water cooling machines are connected between the flow divider valve and a water cooling tower in parallel; during work, water in the water inlet pipeline is divided into multiple branches after passing through the flow divider valve firstly, then water in each branch is cooled independently through the corresponding water cooling machine, and thus the cooling efficiency of the water cooling machines is greatly improved; in addition, a water temperature detector is arranged between the water cooling tower and a water storage bucket, a reversing valve is connected between the water temperature detector and the water storage bucket, the water temperature detector is used for detecting the temperature of water discharged out of the water cooling tower, the water is discharged into the water storage bucket when the temperature of the water meets the requirement, the water is discharged into the water inlet pipeline to be re-cooled when the temperature of the water does not meet the requirement, and thus the stability of the temperature of the water in the water storage bucket is greatly improved.
Description
Technical field
The present invention relates to silicon chip cutter accessory, particularly relate to a kind of silicon chip cutter cutting fluid cooling device.
Background technology
What adopt before the production of silicon chip is that steel wire carries mortar cutting, now is directly with a kind of special golden steel wire band Water Cutting, this technology not only substantially reduces the production and processing time, and the total quality of product is stepped a stage, and production cost significantly declines simultaneously.And diamond wire cutting technique is higher for the requirement of water quality, such as, need glassware for drinking water to have necessarily low temperature, can normally carry out to make cutting work.
Cutting fluid cooling system structure for silicon chip cutter in prior art is unreasonable, causes that the temperature fluctuation range of cutting fluid is large, the cooling effectiveness of cooling system is low.
Summary of the invention
A kind of silicon chip cutter cutting fluid cooling device provided by the invention, is intended to overcome the deficiency that cooling effectiveness is low, cutting fluid temperature fluctuation is large of silicon chip cutter cutting fluid cooling device in prior art.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme: a kind of silicon chip cutter cutting fluid cooling device, comprise inlet channel, outlet conduit, cooling-water machine, cooling column and water butt, described cooling-water machine serial connection is between inlet channel and cooling column, described water butt serial connection is between cooling column and outlet conduit, flow divider is serially connected with between described inlet channel and cooling-water machine, at least two cooling-water machines are provided with between described flow divider and cooling column, at least two cooling-water machines are parallel between flow divider and cooling column, temperature detector is provided with between described cooling column and water butt, reversal valve is provided with between described temperature detector and water butt, described reversal valve is fixed with the controller controlling reversal valve action, described controller and temperature detector communication, described reversal valve respectively with water butt, inlet channel communicates, when water temperature meets the requirements, current enter water butt through reversal valve, when water temperature is undesirable, current enter inlet channel through reversal valve.
In above-mentioned formation, inlet channel is serially connected with flow divider, and between flow divider and cooling column, is parallel with at least two cooling-water machines, in specific works process, water after being shunted flow divider by least two cooling-water machines cools, and substantially increases the cooling effectiveness of cooling device;
In addition, temperature detector is provided with between cooling column and water butt, be serially connected with reversal valve between temperature detector and water butt, detected the water of discharging in cooling column by temperature detector, when water temperature meets the requirements, directly water is drained into water butt, when water temperature is undesirable, water is drained into inlet channel and again cool through each cooling device successively, finally again detecting, guarantee that the coolant-temperature gage entered in water butt meets the requirements, and reduces the fluctuating range of water temperature.
A kind of optional scheme, described water butt is provided with water inlet, described water inlet communicates with reversal valve, the first check valve is provided with in described water inlet, the mixed conduit communicated with water inlet is provided with in described water butt, described mixed conduit offers several osculums, described mixed conduit is coiled in water butt.Mixed conduit is offered several osculums, the water being positioned at mixed conduit is discharged by several osculums, make to be mixed with water original in water butt by the water of discharging in osculum, thus make the temperature of the water of discharging through outlet conduit have less fluctuating range.
A kind of optional scheme, be provided with temperature detector in described water butt, in described water butt, be also provided with refrigerating plant, described refrigerating plant is fixed with the control device controlling refrigerating plant work, described control device and temperature detector communication, described mixed conduit is coiled on refrigerating plant.Water butt is for storing the qualified water of water temperature, but due to the impact of environment temperature, the water water temperature of longer-term storage in water butt may change, refrigerating plant can carry out forced cooling to the water in water butt, thus guarantees that the temperature of the water of discharging through outlet conduit has less fluctuation range.
Described reversal valve is communicated with inlet channel by return duct, is provided with the second check valve in described return duct.In return duct, arrange the second check valve can avoid the water in inlet channel to enter return duct, reduces water loss in the duct.
Described water butt is enclosed with at least one deck thermal insulation layer, described outlet conduit is enclosed with at least one deck thermal insulation layer.By wrapping up at least one deck thermal insulation layer on water butt and outlet conduit, reduce environment temperature to being positioned at water butt, outlet conduit water mitigation.
Compared with prior art, a kind of silicon chip cutter cutting fluid cooling device provided by the invention, tool has the following advantages: by arranging flow divider on inlet channel, and be parallel with at least two cooling-water machines between flow divider and cooling column, the water being positioned at inlet channel in the course of work first separates some tributaries through flow divider, and then cooled separately by the water of cooling-water machine to each tributary, substantially increase the cooling effectiveness of cooling-water machine;
In addition, temperature detector is provided with between cooling column and water butt, reversal valve is serially connected with between temperature detector and water butt, temperature detector carries out thermometric to the water of discharging in cooling column, water butt is drained into when temperature meets the requirements, drain into inlet channel when temperature is undesirable again to cool, substantially increase the stability of water temperature in water butt;
Set temperature detector and refrigerating plant in water butt, guarantee the stability of water temperature in water butt further; And by all wrapping up thermal insulation layer on water butt, outlet conduit, reducing the impact of environment temperature on water temperature, further increasing the stability of water temperature.
Accompanying drawing explanation
Accompanying drawing 1 is the schematic diagram of a kind of silicon chip cutter cutting fluid of the present invention cooling device.
Detailed description of the invention
Below in conjunction with accompanying drawing, a kind of silicon chip cutter cutting fluid cooling device of the present invention is described further.As shown in Figure 1, a kind of silicon chip cutter cutting fluid cooling device, comprises inlet channel 1, and the cutting machine waste liquid that some participate in cutting is gathered together by this inlet channel 1, so that unified cooling; Outlet conduit 2, the water in water butt 5 is supplied to the cutting machine that some participate in cutting by this outlet conduit 2; Cooling-water machine 3, for carrying out first time cooling to water; Cooling column 4, for carrying out second time cooling to water; Water butt 5, for storing cooled water;
See Fig. 1, described cooling-water machine 3 is connected in series between inlet channel 1 and cooling column 4, described water butt 5 is connected in series between cooling column 4 and outlet conduit 2, flow divider 6 is serially connected with between described inlet channel 1 and cooling-water machine 3, at least two cooling-water machines 3 are provided with between described flow divider 6 and cooling column 4, at least two cooling-water machines 3 are parallel between flow divider 6 and cooling column 4, first the water entered in inlet channel 1 separated some tributaries by flow divider 6, then respectively the water on some tributaries is cooled by least two cooling-water machines 3, in order to improve the cooling effectiveness of cooling-water machine 3, every bar tributary should be cooled by independent cooling-water machine 3, current are concentrated in cooling column 4 again and carry out second time cooling after cooling-water machine 3 first time cooling, then discharge by cooling column 4,
See Fig. 1, in actual use, the temperature of the water of being discharged by cooling column 4 differs, and to establish a capital be satisfactory, as certain cooling-water machine 3 damages, cause the factors such as cooling-water machine 3 cannot cool, so the water temperature of the water of discharging in cooling column 4 should be detected, to improve the stability of water temperature in water butt 5, as: as described in be provided with temperature detector 7 between cooling column 4 and water butt 5, reversal valve 8 is provided with between described temperature detector 7 and water butt 5, described reversal valve 8 is fixed with the controller 9 controlling reversal valve 8 action, described controller 9 and temperature detector 7 communication, controller 9 and temperature detector 7 can by wired or wireless mode communications, described reversal valve 8 respectively with water butt 5, inlet channel 1 communicates, when water temperature meets the requirements, current enter water butt 5 through reversal valve 8, when water temperature is undesirable, current enter inlet channel 1 through reversal valve 8, described reversal valve 8 is communicated with inlet channel 1 by return duct 17, the second check valve 18 is provided with in described return duct 17, this second check valve 18 should be arranged on the position that return pipe connects with inlet channel 1, return pipe is entered to avoid the water in inlet channel 1, this reversal valve 8 can adopt magnetic valve, so that control,
See Fig. 1, the satisfactory water of temperature enters water butt 5, and is stored by water butt 5, uses for cutting machine.Water butt 5 communicates with outlet conduit 2, and the satisfactory water of temperature causes cleavable site by outlet conduit 2, is supplied to some cutting machines respectively.
A large amount of water is stored in water butt 5 in technique scheme, that is water butt 5 can meet the cutting machine water intaking of more than simultaneously, therefore, this water butt 5 should have larger volume, the larger then environment temperature of volume of water butt 5 is larger to the Water Temperature in water butt 5, in order to reduce the impact of environmental factor on water temperature in water water butt 5, see Fig. 1, described water butt 5 is enclosed with at least one deck thermal insulation layer 19; Certainly, in order to reduce the impact of environmental factor on water temperature in outlet conduit 2, described outlet conduit 2 is enclosed with at least one deck thermal insulation layer 19.
In actual use, the water temperature just having entered the water in water butt 5 may have different temperature from the water temperature of the water stored in water butt 5, in order to reduce the fluctuation of water temperature in outlet pipe, the water just entered in water butt 5 should be made to mix with original water in water butt 5, see Fig. 1, described water butt 5 is provided with water inlet 10, described water inlet 10 communicates with reversal valve 8, the first check valve 11 is provided with in described water inlet 10, the mixed conduit 12 communicated with water inlet 10 is provided with in described water butt 5, described mixed conduit 12 offers several osculums 13, described mixed conduit 12 is coiled in water butt 5.
Technique scheme reduces the impact of environmental factor on water temperature in water butt 5 by thermal insulation layer 19, in concrete use procedure, as the water in water butt 5 do not use for a long time time, may need to carry out pressure cooling to the water in water butt 5, now can adopt following technical scheme: see Fig. 1, temperature detector 14 is provided with in described water butt 5, refrigerating plant 15 is also provided with in described water butt 5, described refrigerating plant 15 is fixed with the control device 16 controlling refrigerating plant 15 and work, described control device 16 and temperature detector 14 communication, control device 16 and temperature detector 14 can by wired or wireless mode communications, described mixed conduit 12 is coiled on refrigerating plant 15.In order to make refrigerating plant 15, there is better cooling effect, described mixed conduit 12 should adopt Heat Conduction Material to make, reduce further to make the water temperature in mixed conduit 12, then the water being positioned at mixed conduit 12 is discharged by outage, and mix with original water in water butt 5, substantially increase the cooling effectiveness of refrigerating plant 15.
In technique scheme, the connected mode of each unit can select pipeline to connect: inlet channel 1 is connected with flow divider 6, flow divider 6 is connected with cooling-water machine 3 by pipeline, cooling-water machine 3 is connected with cooling column 4 by pipeline, cooling column 4 is connected with reversal valve 8 by pipeline, a water route of reversal valve 8 is connected with inlet channel 1 by return pipe, another water route of reversal valve 8 is connected with water butt 5 by pipeline, finally, water butt 5 is connected with outlet conduit 2, in order to reduce the impact of environmental factor on water temperature, the pipeline of each unit of above-mentioned connection all can wrap up thermal insulation layer 19, to reduce the impact of environmental factor on water temperature.
These are only the preferred embodiment of the present invention, being intended to embody outstanding technique effect of the present invention and advantage, is not the restriction to technical scheme of the present invention.Those skilled in the art will appreciate that all amendments made based on the technology of the present invention content, change or substitute technology feature, all should be covered by the technology category of claims of the present invention opinion.
Claims (5)
1. a silicon chip cutter cutting fluid cooling device, it is characterized in that: comprise inlet channel (1), outlet conduit (2), cooling-water machine (3), cooling column (4) and water butt (5), described cooling-water machine (3) serial connection is between inlet channel (1) and cooling column (4), described water butt (5) serial connection is between cooling column (4) and outlet conduit (2), flow divider (6) is serially connected with between described inlet channel (1) and cooling-water machine (3), at least two cooling-water machines (3) are provided with between described flow divider (6) and cooling column (4), at least two cooling-water machines (3) are parallel between flow divider (6) and cooling column (4), temperature detector (7) is provided with between described cooling column (4) and water butt (5), reversal valve (8) is provided with between described temperature detector (7) and water butt (5), described reversal valve (8) is fixed with the controller (9) controlling reversal valve (8) action, described controller (9) and temperature detector (7) communication, described reversal valve (8) respectively with water butt (5), inlet channel (1) communicates, when water temperature meets the requirements, current enter water butt (5) through reversal valve (8), when water temperature is undesirable, current enter inlet channel (1) through reversal valve (8).
2. a kind of silicon chip cutter cutting fluid cooling device according to claim 1, it is characterized in that: described water butt (5) is provided with water inlet (10), described water inlet (10) communicates with reversal valve (8), the first check valve (11) is provided with in described water inlet (10), the mixed conduit (12) communicated with water inlet (10) is provided with in described water butt (5), described mixed conduit (12) offers several osculums (13), described mixed conduit (12) is coiled in water butt (5).
3. a kind of silicon chip cutter cutting fluid cooling device according to claim 2, it is characterized in that: in described water butt (5), be provided with temperature detector (14), refrigerating plant (15) is also provided with in described water butt (5), described refrigerating plant (15) is fixed with the control device (16) controlling refrigerating plant (15) and work, described control device (16) and temperature detector (14) communication, described mixed conduit (12) is coiled on refrigerating plant (15).
4. a kind of silicon chip cutter cutting fluid cooling device according to claim 1, it is characterized in that: described reversal valve (8) is communicated with inlet channel (1) by return duct (17), in described return duct (17), be provided with the second check valve (18).
5. a kind of silicon chip cutter cutting fluid cooling device according to Claims 1-4 any one, it is characterized in that: described water butt (5) is enclosed with at least one deck thermal insulation layer (19), described outlet conduit (2) is enclosed with at least one deck thermal insulation layer (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510639725.XA CN105235082B (en) | 2015-09-30 | 2015-09-30 | Cutting fluid cooling device for silicon wafer cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510639725.XA CN105235082B (en) | 2015-09-30 | 2015-09-30 | Cutting fluid cooling device for silicon wafer cutting machine |
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| Publication Number | Publication Date |
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| CN105235082A true CN105235082A (en) | 2016-01-13 |
| CN105235082B CN105235082B (en) | 2017-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510639725.XA Expired - Fee Related CN105235082B (en) | 2015-09-30 | 2015-09-30 | Cutting fluid cooling device for silicon wafer cutting machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108858832A (en) * | 2018-08-27 | 2018-11-23 | 苏州赛森电子科技有限公司 | A kind of silicon chip cutter cutting fluid cooling device and cooling means |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000153443A (en) * | 1998-11-18 | 2000-06-06 | Tokyo Seimitsu Co Ltd | Control device for wire saw and method therefor |
| CN2837766Y (en) * | 2004-03-29 | 2006-11-15 | 福建科瑞时代控制技术有限公司 | Industrial cooling water circulation controller |
| CN202357301U (en) * | 2011-11-08 | 2012-08-01 | 成都青洋电子材料有限公司 | Mortar cooling system of multi-line cutting machines |
| CN202399422U (en) * | 2011-12-31 | 2012-08-29 | 株洲德瑞佳科技有限公司 | Silicon wafer cutting fluid plate-type heat exchange cooling device |
| CN203381050U (en) * | 2013-06-04 | 2014-01-08 | 台州市双辉机械设备有限公司 | Circulation cooling device for multi-wire cutting machine |
| CN204955163U (en) * | 2015-09-30 | 2016-01-13 | 浙江辉弘光电能源有限公司 | Silicon chip is cutting fluid cooling device for cutting machine |
-
2015
- 2015-09-30 CN CN201510639725.XA patent/CN105235082B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000153443A (en) * | 1998-11-18 | 2000-06-06 | Tokyo Seimitsu Co Ltd | Control device for wire saw and method therefor |
| CN2837766Y (en) * | 2004-03-29 | 2006-11-15 | 福建科瑞时代控制技术有限公司 | Industrial cooling water circulation controller |
| CN202357301U (en) * | 2011-11-08 | 2012-08-01 | 成都青洋电子材料有限公司 | Mortar cooling system of multi-line cutting machines |
| CN202399422U (en) * | 2011-12-31 | 2012-08-29 | 株洲德瑞佳科技有限公司 | Silicon wafer cutting fluid plate-type heat exchange cooling device |
| CN203381050U (en) * | 2013-06-04 | 2014-01-08 | 台州市双辉机械设备有限公司 | Circulation cooling device for multi-wire cutting machine |
| CN204955163U (en) * | 2015-09-30 | 2016-01-13 | 浙江辉弘光电能源有限公司 | Silicon chip is cutting fluid cooling device for cutting machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108858832A (en) * | 2018-08-27 | 2018-11-23 | 苏州赛森电子科技有限公司 | A kind of silicon chip cutter cutting fluid cooling device and cooling means |
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| CN105235082B (en) | 2017-03-22 |
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Address after: 314200 No. 899 Xinxing three road, Pinghu economic and Technological Development Zone, Jiaxing, Zhejiang Patentee after: Zhejiang Hui Guang light Limited by Share Ltd Address before: 314200 No. 899 Xinxing three road, Pinghu Economic Development Zone, Jiaxing, Zhejiang Patentee before: ZHEJIANG HUIHONG PHOTOELECTRIC ENERGY CO., LTD. |
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Granted publication date: 20170322 Termination date: 20180930 |
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