CN203697271U - Mortar cooling and supply system of silicon wafer multi-wire cutting equipment - Google Patents
Mortar cooling and supply system of silicon wafer multi-wire cutting equipment Download PDFInfo
- Publication number
- CN203697271U CN203697271U CN201320841537.1U CN201320841537U CN203697271U CN 203697271 U CN203697271 U CN 203697271U CN 201320841537 U CN201320841537 U CN 201320841537U CN 203697271 U CN203697271 U CN 203697271U
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- China
- Prior art keywords
- mortar
- cooling tower
- road
- cooling
- home roll
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004570 mortar (masonry) Substances 0.000 title claims abstract description 92
- 238000001816 cooling Methods 0.000 title claims abstract description 87
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 32
- 239000010703 silicon Substances 0.000 title claims abstract description 32
- 238000005520 cutting process Methods 0.000 title claims abstract description 26
- 239000000498 cooling water Substances 0.000 claims abstract description 11
- 238000010992 reflux Methods 0.000 claims description 14
- 239000011440 grout Substances 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 abstract 5
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000004576 sand Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
The utility model discloses a mortar cooling and supply system of silicon wafer multi-wire cutting equipment. A mortar supply tank is respectively connected with a cooling tower A and a cooling tower B through motor pumps and pipes; the cooling tower A is respectively connected with a left mortar supply system at the top and a right mortar supply system at the bottom through pipes; the cooling tower B is respectively connected with middle mortar supply systems at the top and the bottom through pipes; electromagnetic valves and flow meters are respectively installed on the cooling water inlet pipes of the cooling towers and the supply pipes of the mortar supply systems, and the signal input ends of the electromagnetic valves and the flow meters are connected with a control system. By adopting the mortar cooling and supply system of the silicon wafer multi-wire cutting equipment, the temperature of cutting wires and mortar at silicon wafer cutting positions can be guaranteed to be low, the cutting quality of silicon rods is guaranteed to be the best, the phenomena that silicon wafers are stuck, the cutting wires do not have enough mortar carrying capacity and the like due to the reason that the temperature of the silicon rods is too high are avoided, the yield of the silicon wafers is improved by approximate one percent, the energy is saved and the service life is prolonged.
Description
Technical field
The utility model belongs to silicon chip cutting technique field, relates to a kind of cooling feed system of mortar of Multi-wire wafer cutting equipment.
Background technology
Silicon chip is the main production material in semiconductor and photovoltaic field.Multi-wire saw equipment is the equipment for cutting silicon wafer, and it is to move back and forth by the high speed of intensive metal wire, drives mortar that silico briquette material is once cut into hundreds of or thousands of plate sheets simultaneously.Mortar plays the effect of wearing and tearing silicon material and cooling home roll and line of cut, and its performance temperature influence is larger.Multi-wire saw equipment is generally two systems, comprise diced system and mortar feed system, wherein diced system comprises paying out reel, Wire winding shaft and four home rolls, and wherein mortar feed system comprises a mortar service tank, reflux and filter case, two cooling towers and connecting pipe, the mortar of mortar service tank uses electric-motor pump to flow to the cooling tower corresponding with it by pipeline, the left side above the cooling mortar of cooling tower is supplied with respectively by pipeline again, in, You San road mortar feed system and a left side below, in, You San road mortar feed system, cooled mortar cuts silicon rod through cutting chamber, and the mortar after cutting flows into reflux and filter case, enters cooling tower again and carry out tentatively coolingly after filtering, and finally gets back to mortar service tank, forms closed cycle, a left side above, in, You San road mortar feed system lays respectively at the line of cut upper end of home roll A upper right, on upper table, the line of cut upper end of home roll B upper left, a left side below, in, You San road feed system lays respectively at the line of cut upper end of home roll C bottom right, on lower table, the line of cut upper end of home roll D lower-left, due to a left side above, in, You San road mortar feed system is by the cooling supply mortar of one of them cooling tower, a left side below, in, You San road feed system is by the cooling supply mortar of another cooling tower, the mortar uniform distribution in six road feed systems, and cooling capacity is identical.Multi-wire saw equipment is being placed respectively two silicon rods between home roll A and home roll B, on the workbench between home roll C and home roll D, according to the direction of rotation of line of cut, silicon rod near home roll A and home roll D is first cut, the heat that line of cut produces in cutting process is many, and spacing distance between two silicon rods is short, although the mortar that line of cut is supplied with by Road mortar feed system is cooling, but because the temperature that six road mortars are supplied with is identical with mortar amount, temperature when line of cut also has little time to drop to cutting the first silicon rod just removes again to cut second silicon rod near home roll B and home roll C, cause the temperature drift of second silicon rod, and then cause its mortar suspending power poor, reduced viscosity, cause carborundum to be trapped between silicon chip on the one hand, thereby generation bonding die, be difficult to clean, fragment rate is high, incur loss through delay the problems such as man-hour, the opposing party, because the rising cutting tape sand ability of temperature reduces, can cause silicon chip TTV larger, and stria increases, thereby affects yield rate.
Utility model content
The purpose of this utility model solves the above-mentioned problems in the prior art exactly, a kind of cooling feed system of mortar of Multi-wire wafer cutting equipment is provided, and the line of cut while adopting the Multi-wire wafer cutting equipment of the cooling feed system of this mortar can ensure to cut second silicon rod near home roll B or home roll C and its band slurry temperature and cutting are with near the line of cut of first silicon rod of home roll A or home roll D and its that to starch temperature consistent.
For achieving the above object, technical solution of the present utility model is: a kind of cooling feed system of mortar of Multi-wire wafer cutting equipment, and it comprises mortar service tank, reflux and filter case, cooling tower A, cooling tower B, cooling tower C, pipeline, left, center, right three road mortar feed systems above, left, center, right three road mortar feed system and control systems below; Mortar service tank is connected respectively the stock inlet of cooling tower A and cooling tower B by pipeline by electric-motor pump; Left, center, right three road mortar feed systems above lay respectively on the line of cut upper end, upper table of home roll A upper right, the line of cut upper end of home roll B upper left, and left, center, right three road feed systems below lay respectively on the line of cut upper end, lower table of home roll C bottom right, the line of cut upper end of home roll D lower-left; Above and below Road mortar feed system moves up and down with upper and lower workbench respectively; The grout outlet of cooling tower A connects respectively left and right road mortar feed system above, left and right road mortar feed system below by pipeline; The grout outlet of cooling tower B connects respectively Road mortar feed system above and Road mortar feed system below by pipeline; The mortar refluxing opening of cutting chamber connects the stock inlet of reflux and filter case by pipeline, reflux and filter case grout outlet connects the stock inlet of cooling tower C by pipeline, and the grout outlet of cooling tower C connects mortar service tank by pipeline; Magnetic valve and the flowmeter with temperature sensor are all installed on the cooling water inlet pipe road of cooling tower A and cooling tower B and on the service of mortar feed system, the signal input part of the signal output part connection control system of the flowmeter with temperature sensor, the signal input part of the signal output part connected electromagnetic valve of control system.The temperature signal of the temperature sensor on the flowmeter on the service of mortar feed system is to control system, control system output control signal is to magnetic valve on the cooling water inlet pipe road of cooling tower A and cooling tower B, these solenoid control enter the cooling water inflow of cooling tower A and cooling tower B, make the temperature of cooling tower B lower than the temperature of cooling tower A, to ensure that six road mortar feed systems are in the case of the mortar amount supplied with is identical, consistent with the temperature of first silicon rod of close home roll A or home roll D near the temperature of second silicon rod of home roll B or home roll C.
Because cooling tower A of the present utility model supplies with above and below left and right four road mortar feed systems, and cooling tower B only supplies with above and below two-way Road sand road slurry feed system, like this, just can design as required the cooling capacity of cooling tower A and cooling tower B, needn't ensure again that the cooling capacity of the two is identical.So, in the case of cooling tower A and cooling tower B go out mortar amount identical, regulate cooling water flow to make the temperature of cooling tower B lower by magnetic valve, thereby ensure that the mortar temperature that Road two-way is supplied with is lower above and below, greatly increase above and the mortar cooling capacity of Road mortar feed system below, the temperature of the line of cut of this position can be lowered the temperature very soon, thereby make the temperature of the second silicon rod and the temperature of the first silicon rod of cutting after it basic identical, avoid the generation of the phenomenon such as bonding die and cutting tape sand scarce capacity producing because of the second silicon rod excess Temperature, improve silicon chip yield approximately 1%, single silicon-chip is produced and is reduced costs 0.05 yuan.
Brief description of the drawings
Fig. 1 is the diced system of multi-wire saw equipment and the structural relation figure of left, center, right three road mortar feed systems above and below;
Fig. 2 is structural representation of the present utility model.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the utility model is described further.
As depicted in figs. 1 and 2, the present embodiment comprises mortar service tank, reflux and filter case, cooling tower A, cooling tower B, cooling tower C, pipeline, left, center, right above three road mortar feed systems 12,10,11, left, center, right three road mortar feed system 15,14,13 and control systems below.Mortar service tank is connected respectively the stock inlet of cooling tower A and cooling tower B by pipeline with magnetic valve 5,6 by electric-motor pump 3,4.Left, center, right three road mortar feed systems 12,10,11 above lay respectively on the line of cut upper end, upper table 22 of home roll A 17 upper rights, the line of cut upper end of home roll B 18 upper lefts, and left, center, right three road feed systems 15,14,13 below lay respectively on the line of cut upper end, lower table 26 of home roll C 20 bottom rights, the line of cut upper end of home roll D 19 lower-lefts.Above and below Road mortar feed system 10,14 moves up and down with upper and lower workbench 22,26 respectively.The grout outlet of cooling tower A connects respectively left and right road mortar feed system above 12,11, left and right road mortar feed system 15,13 below by the flowmeter 7 with temperature sensor by pipeline.The grout outlet of cooling tower B connects respectively Road mortar feed system 10 above and Road mortar feed system 14. below by the flowmeter 8 with temperature sensor by pipeline.The mortar refluxing opening of cutting chamber connects the stock inlet of reflux and filter case by pipeline, reflux and filter case grout outlet is connected the stock inlet of cooling tower C by pipeline by electric-motor pump 16, and the grout outlet of cooling tower C connects mortar service tank by pipeline.On the cooling water inlet pipe road of cooling tower A and cooling tower B, be separately installed with magnetic valve 1, magnetic valve 27 and the flowmeter with temperature sensor 2 and flowmeter 28.The signal input part of the signal output part connection control system of the flowmeter 2,28,7,8 with temperature sensor, the signal input part of the signal output part connected electromagnetic valve 1,27,5,6 of control system.Flowmeter 7 with temperature sensor, the temperature signal of the temperature sensor on 8 is to control system, control system output control signal is to magnetic valve 1 on the cooling water inlet pipe road of cooling tower A and cooling tower B, 27, magnetic valve 1, 27 control the cooling water inflow that enters cooling tower A and cooling tower B, make the temperature of cooling tower B lower than the temperature of cooling tower A, to ensure six road mortar feed systems 12, 10, 11 and 15, 14, the 13 mortar amounts in supply are identical, near second silicon rod 23 of home roll B 18 or home roll C 20, first silicon rod 21 of 24 temperature and close home roll A 17 or home roll D 19, 25 temperature is consistent.On the pipeline of the spray nozzle front end of Liu road mortar feed system 12,10,11 and 15,14,13, manually-operated gate 9 can be installed.
Claims (1)
1. the cooling feed system of the mortar of Multi-wire wafer cutting equipment, it comprises mortar service tank, reflux and filter case, cooling tower A, cooling tower B, cooling tower C, pipeline, left, center, right three road mortar feed systems above, left, center, right three road mortar feed system and control systems below; Mortar service tank is connected respectively the stock inlet of cooling tower A and cooling tower B by pipeline by electric-motor pump; Left, center, right three road mortar feed systems above lay respectively on the line of cut upper end, upper table of home roll A upper right, the line of cut upper end of home roll B upper left, and left, center, right three road feed systems below lay respectively on the line of cut upper end, lower table of home roll C bottom right, the line of cut upper end of home roll D lower-left; Above and below Road mortar feed system moves up and down with upper and lower workbench respectively; The mortar refluxing opening of cutting chamber connects the stock inlet of reflux and filter case by pipeline, reflux and filter case grout outlet connects the stock inlet of cooling tower C by pipeline, and the grout outlet of cooling tower C connects mortar service tank by pipeline; It is characterized in that: the grout outlet of described cooling tower A connects respectively left and right road mortar feed system above, left and right road mortar feed system below by pipeline; The grout outlet of cooling tower B connects respectively Road mortar feed system above and Road mortar feed system below by pipeline; Magnetic valve and the flowmeter with temperature sensor are all installed on the cooling water inlet pipe road of cooling tower A and cooling tower B and on the service of mortar feed system, the signal input part of the signal output part connection control system of the flowmeter with temperature sensor, the signal input part of the signal output part connected electromagnetic valve of control system; The temperature signal of the temperature sensor on the flowmeter on the service of mortar feed system is to control system, control system output control signal is to magnetic valve on the cooling water inlet pipe road of cooling tower A and cooling tower B, these solenoid control enter the cooling water inflow of cooling tower A and cooling tower B, make the temperature of cooling tower B lower than the temperature of cooling tower A, to ensure that six road mortar feed systems are in the case of the mortar amount supplied with is identical, consistent with the temperature of first silicon rod of close home roll A or home roll D near the temperature of second silicon rod of home roll B or home roll C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320841537.1U CN203697271U (en) | 2013-12-19 | 2013-12-19 | Mortar cooling and supply system of silicon wafer multi-wire cutting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320841537.1U CN203697271U (en) | 2013-12-19 | 2013-12-19 | Mortar cooling and supply system of silicon wafer multi-wire cutting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203697271U true CN203697271U (en) | 2014-07-09 |
Family
ID=51047765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320841537.1U Expired - Fee Related CN203697271U (en) | 2013-12-19 | 2013-12-19 | Mortar cooling and supply system of silicon wafer multi-wire cutting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203697271U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104258992A (en) * | 2014-10-30 | 2015-01-07 | 台州市双辉机械设备有限公司 | Magnetic mud separation system of cutting equipment and separation method |
| CN104924471A (en) * | 2015-06-12 | 2015-09-23 | 苏州德锐朗智能科技有限公司 | Automatic circular heat exchange system of multi-wire sawing machine |
| CN105382950A (en) * | 2015-11-30 | 2016-03-09 | 苏州市宝玛数控设备有限公司 | Mortar-cooling condensation module for multi-wire saw |
-
2013
- 2013-12-19 CN CN201320841537.1U patent/CN203697271U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104258992A (en) * | 2014-10-30 | 2015-01-07 | 台州市双辉机械设备有限公司 | Magnetic mud separation system of cutting equipment and separation method |
| CN104924471A (en) * | 2015-06-12 | 2015-09-23 | 苏州德锐朗智能科技有限公司 | Automatic circular heat exchange system of multi-wire sawing machine |
| CN105382950A (en) * | 2015-11-30 | 2016-03-09 | 苏州市宝玛数控设备有限公司 | Mortar-cooling condensation module for multi-wire saw |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 074000 new industrial zone, Baoding, Hebei, Gaobeidian Patentee after: Green Energy Technology Co., Ltd. Address before: 074000 new industrial zone, Baoding, Hebei, Gaobeidian Patentee before: Lightway Green New Enegy Co., Ltd. |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160711 Address after: 074000, Baoding City, Hebei province Gaobeidian City Road on the north side of the west side of prosperous street Patentee after: Baoding Guangwei Green Energy Technology Co., Ltd. Address before: 074000 new industrial zone, Baoding, Hebei, Gaobeidian Patentee before: Green Energy Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20191219 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |