CN105227233B - The interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel - Google Patents

The interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel Download PDF

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CN105227233B
CN105227233B CN201410240090.1A CN201410240090A CN105227233B CN 105227233 B CN105227233 B CN 105227233B CN 201410240090 A CN201410240090 A CN 201410240090A CN 105227233 B CN105227233 B CN 105227233B
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mach
noise ratio
optical signal
parallel
zehnder interferometer
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CN105227233A (en
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邱吉芳
袁博
伍剑
李岩
洪小斌
郭宏翔
林金桐
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Beijing University of Posts and Telecommunications
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/07Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems
    • H04B10/075Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal
    • H04B10/079Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal using measurements of the data signal
    • H04B10/0795Performance monitoring; Measurement of transmission parameters
    • H04B10/07953Monitoring or measuring OSNR, BER or Q

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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The present invention relates to technical field of photo communication, the interior optical signal-to-noise ratio monitoring method of specially a kind of band based on asymmetric Mach-Zehnder interferometer in parallel.The present invention proposes a kind of new structure, and the structure is made up of a pair of parallel Mach-Zehnder interferometer by delay value of not sharing the same light, and realizes with interior optical signal-to-noise ratio monitoring.The present invention maintains the advantage of the optical signal-to-noise ratio monitoring based on Mach-Zehnder interferometer, i.e., do not influenceed by dispersion, polarization mode dispersion and polarization noise, therefore this programme is easily achieved in the application of following high speed optical networks.The present invention inherits the advantage in bibliography [13], i.e., need not remove the coherence that noise carrys out measurement signal.In contrast to [13], by simulating, verifying, the present invention can realize integration by semiconductor devices, with huge practical application potentiality.New with two asymmetric Mach-Zehnder interferometers in parallel make semiconductor integrated devices the invention discloses a kind of and monitor the method with interior OSNR.Simulation result, which shows in error to be less than in the range of ± 0.5dB, measures OSNR value of the different patterns from 10 to 28dB.

Description

The interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel
Technical field
The present invention relates to technical field of photo communication, in specially a kind of band based on asymmetric Mach-Zehnder interferometer in parallel Optical signal-to-noise ratio monitoring method.
Background technology
Influence due to OSNR to the optical signal bit error rate, it is a Main Diagnosis factor of signal health, in ripple It is an important diagnostic tool that OSNR is measured in division multiplexing system.Traditionally, the OSNR value of a certain channel passes through Measure the noise level of two interchannels and in order to determine that the noise figure on channel frequency performs linear interpolation method, i.e., believe with outer light Make an uproar than monitoring.And the application of light bifurcated multiplexer causes each wavelength division multiplexed channel parameter to be accumulated not due to the difference of transmission link Deng damage cause these invalid with outer OSNR Monitoring Method.For example, as shown in figure 1, Fig. 1 (a):Reflection is due to process The different noise level of interchannel caused by the difference of transmission link;Fig. 1 (b) optical filters or multiplex/demultiplex can be filtered Except out-of-band noise, but in-band noise can not be filtered out.Each channel OSNR after different link transmissions is different, and band It is interior, very big with outer OSNR difference.Therefore, many technologies of the monitoring with interior OSNR are suggested, including polarization zero Method, waveform sampling method, signal Zymography and the method based on non-linear Kerr effect.
Using the OSNR Value Operations for polarizing split pole method measurement signal are simple, cost is low, and not by speed and pattern Limitation, is a kind of very effective OSNR Monitoring Method.Its critical defect is that it assumes the data-signal of measured signal It is complete inclined, and noise is unbiased;But in practice, increase because the birefringence effect of optical fiber, polarization are related in transmission link The extraneous uncertain factor such as benefit, loss, data-signal meeting " going partially " or noise can be partly polarized, and in this case, polarize split pole Method will be unable to distinguish signal and noise, lose measurement accuracy, in addition it is also necessary to further to improve to meet actual demand.Waveform Sampling method is a kind of method that waveform to measured signal is analyzed, and it includes synchronized sampling method, asynchronous-sampling method and delay Sampling method.Wherein, synchronized sampling method is very ripe, can be while signal to noise ratio, time jitter, quality factor, the eye pattern of monitoring signals The information such as quality, but due to needing to carry out Clock Extraction to measured signal to keep sampling and the synchronism of signal, when signal speed When rate is higher, cost exponentially increases, it is difficult to applied to following express network.Asynchronous-sampling method is directly by total power signal Carry out statistical analysis and carry out signal Analysis performance, do not limited by signal rate, cost it is low, and avoid signal clock carried Take, but source information is deteriorated as cost using victim signal.Delay sampling method is not required to extract clock signal, and a variety of damages can be monitored simultaneously Wound, such as dispersion, polarization mode dispersion and OSNR, it has also become one of method of current most study;But the problem of its is maximum exists It is relevant with speed, it is necessary to which accurate set in the sampling time delay of two paths of signals;That is this method is opaque to speed, it is necessary to enter The research and improvement of one step.Monitoring to high speed signal is dexterously converted into the monitoring to low speed signal by Spectral Analysis Method, keeps away Exempt from the limitation using high speed device, reduce cost;But there is also obvious shortcoming:
(i) because low frequency radio frequency signal and wavelength division multiplexed data signal spectrum are overlapped, low frequency signal can be produced with data-signal Raw interference and interact, the requirement to low frequency signal power is stricter, sufficiently large with distinguishing signal and noise, but can not It is too big in order to avoid the transmission and reception of influence data-signal;
(ii) complexity of system is added due to being loaded with low frequency signal to channel.Non-linear Kerr effect method includes Using semiconductor optical amplifier, the four-wave mixing effect of highly nonlinear optical fiber and some other nonlinear waveguide devices, intersect The optical signal-to-noise ratio monitoring that the nonlinear effects such as phase-modulation effect, parameter amplification, interferometric method and two-photon absorption are carried out.Based on non- The maximum feature of the method for linear effect is exactly that full light is operated, speed is high, simple in construction, cost is low;Based on its above-mentioned advantage, base The interest of more and more people is caused in the signal performance monitoring of nonlinear effect, substantial amounts of research is expanded.Wherein, based on horse The conspicuous optical signal-to-noise ratio monitoring for increasing Deccan interferometer has attracted many concerns.
Due to the incoherence of the coherence of signal and noise in measured signal, signal can phase in Mach-Zehnder interferometer Dry mutually length/coherent subtraction, and noise will not;The signal and noise of measured signal are then separated using the characteristic.Mach increases Deccan Interferometer structure two three-dB couplers and two interfere arms as shown in Fig. 2 be made up of.
Optical signal-to-noise ratio monitoring based on Mach-Zehnder interferometer calculates light noise using the coherence of signal and noise Ratio.But this method needs to obtain the auto-correlation function of signal, this must be calibrated to each modulator.Its is usual Need to turn off the noise in channel, this is impossible in practice.This problem can have not co-extensive by using a pair The michelson interferometer of duration is solved.And the scenario-frame of double Michelson interferometer modes is huge, stability is relatively low, and deposits Can not it is integrated, by the high limitation of external environmental interference and input optical power.Just because of based on fiber nonlinear effect Scheme the problem of there is integration and stability it is (wherein integrated as realizing high speed, low-power consumption, low cost and move towards it That applies is crucial and particularly important), it was recognized that the developing direction of All-optical signal performance monitoring must be based on small volume, Ke Ji Into semiconductor devices, its main cause is can be by ripe semiconductor fabrication and processing technology, not only can be with Many new functional structures, and the distant view with large-scale integrated are realized, is the following direction most possibly made a breakthrough.
The content of the invention
(1) technical problem to be solved
The present invention proposes a kind of new structure, and the structure increases moral by a pair of parallel Mach for having delay value of not sharing the same light Interferometer is constituted, so as to realize with interior optical signal-to-noise ratio monitoring.The present invention maintains the OSNR based on Mach-Zehnder interferometer The advantage of monitoring, i.e., not by dispersion, polarization mode dispersion and the influence of polarization noise, hence in so that the program is in following high-speed light net Realized in network application.Secondly, it inherits the advantage in bibliography [13], i.e., need not remove the phase that noise carrys out measurement signal Dry characteristic.Finally, in contrast to [13], by simulating, verifying, the present invention can be fabricated to semiconductor integrated device.
The present invention makes semiconductor integrated device with double Mach-Zehnder interferometers, and realization carries out OSNR prison with the program During survey, it was demonstrated that asymmetric Mach-Zehnder interferometer in parallel manufactures the feasibility of semiconductor integrated device.Firstly evaluate Mach Increase Deccan interferometer in influence of the coupler degree of unbalancedness to optical signal-to-noise ratio monitoring, then study Mach-Zehnder interferometer two-arm between Influence of the length variation produced in manufacturing process to measurement result.
[13]E.Flood et al.,“Interferometer Based In-Band OSNR Monitoring of Single and Dual Polarisation QPSK Signals,”Proc.ECOC,Th.9.C.6,Italy(2010).
(2) technical scheme
In order to solve the above-mentioned technical problem, the invention provides the interior light of band based on asymmetric Mach-Zehnder interferometer in parallel Signal to noise ratio monitoring method, methods described is divided into following steps:
Introduce corresponding signal source to be monitored;
Signal forms noise signal with noise by three-dB coupler;
The optical band pass filter that will act as channel model is inserted in before optical signal-to-noise ratio monitoring instrument;
The noise signal filtered out is sent into OSNR value is calculated in optical signal-to-noise ratio monitoring device;The optical signal-to-noise ratio monitoring of proposition Two Mach-Zehnder interferometers in parallel that scheme is made up of 1 × 3 coupler and the three-dB coupler of three 1 × 2;
Two Mach-Zehnder interferometer delay arms in parallel set different delayed time value respectively;The delay value is:Upper delay 3ps, Be delayed arm 10ps under arm;
The phase value of two Mach-Zehnder interferometer common arms is adjusted, power output is respectively reached maximum and minimum Value, with the power meter record data of terminal;
The maximum and minimum value recorded with power meter calculates the visibility of Mach-Zehnder interferometer;
Measure noise normalized autocorrelation functions value;
OSNR is calculated by the visual scale value calculated and the noise normalized autocorrelation functions value measured;
The OSNR calculated is compareed with OSNR reference value, and assesses the performance of the monitoring method.
In order to solve the above-mentioned technical problem, the invention provides the integrated band based on asymmetric Mach-Zehnder interferometer in parallel Interior optical signal-to-noise ratio monitoring method, methods described is divided into following steps:
Introduce corresponding signal source to be monitored;
Signal forms noise signal with noise by three-dB coupler;
The optical band pass filter that will act as channel model is inserted in before optical signal-to-noise ratio monitoring instrument;
The noise signal filtered out is sent into OSNR value is calculated in optical signal-to-noise ratio monitoring device;The optical signal-to-noise ratio monitoring of proposition Two Mach-Zehnder interferometers in parallel that scheme is made up of 1 × 3 coupler and the three-dB coupler of three 1 × 2;
Two Mach-Zehnder interferometer delay arms in parallel set different delayed time value respectively;The delay value is:Upper delay 3ps, Be delayed arm 10ps under arm;
The phase value of two Mach-Zehnder interferometer common arms is adjusted, power output is respectively reached maximum and minimum Value, with the power meter record data of terminal;
The maximum and minimum value recorded with power meter calculates the visibility of Mach-Zehnder interferometer;
Measure noise normalized autocorrelation functions value;
OSNR is calculated by the visual scale value calculated and the noise normalized autocorrelation functions value measured;
The OSNR calculated is compareed with OSNR reference value, and assesses the performance of the monitoring method;
The integrated interior optical signal-to-noise ratio monitoring scheme of band based on asymmetric Mach-Zehnder interferometer in parallel.
In order to solve the above-mentioned technical problem, the invention provides one kind proves two Mach-Zehnder interferometer manufactures half in parallel The method of the feasibility checking of conductor integrated device, methods described is divided into following steps:
Assess influence of the coupler degree of unbalancedness to optical signal-to-noise ratio monitoring in Mach-Zehnder interferometer;
Influence of the length variation produced between research Mach-Zehnder interferometer two-arm in manufacturing process to measurement result;
If the length change of result display apparatus is delay time error does not influence the measurement knot of OSNR within the specific limits Fruit then proves that the interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel can be used to be fabricated to partly to lead Body integrated device;
If the length change of display device be to be demonstrate,proved if delay time error influences the measurement result of OSNR within the specific limits The bright interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel cannot be used for being fabricated to semiconductor collection Into device.
Preferably, two parallel Mach-Zehnder interferometers are respectively relative to two noise autocorrelation functions at different delayed time Value, the normalized autocorrelation functions obtained by bringing noise into by bandpass filter, which are composed, to be obtained.
Preferably, in simulations, OSNR reference value is calculated by measuring the OSNR of input.
In order to solve the above-mentioned technical problem, the invention provides a kind of integrated OSNR monitoring device, it is characterised in that The integrated OSNR monitoring device includes:Phase-modulator 1, the 3dB multimodes of 1 × 3 multi-mode interference coupler 2,1 × 2 are done Relate to coupler a3,1 × 2 3dB multi-mode interference couplers b4,1 × 2 3dB multi-mode interference couplers c5 and detector a6 and spy Survey device b7;The 3dB multiple-mode interfences for the silicon delay line A and described 1 × 2 that 1 × 3 multi-mode interference coupler 2 passes through delay value 3ps Coupler a3 connections;1 × 3 multi-mode interference coupler 2 is connected with the phase-modulator 1;The phase-modulator 1 and institute State 1 × 2 the b4 connections of 3dB multi-mode interference couplers;1 × 3 multi-mode interference coupler 2 is delayed by delay value 10ps silicon Line B is connected with described 1 × 2 3dB multi-mode interference couplers c5;Described 1 × 2 3dB multi-mode interference couplers b4 and described 1 × 2 3dB multi-mode interference couplers a3 and 1 × 2 3dB multi-mode interference couplers c5 connections;Described 1 × 2 3dB multiple-mode interfence couplings Clutch a3 is connected with the detector a6;Described 1 × 2 3dB multi-mode interference couplers c5 is connected with the detector b7;It is described Detector a6 and detector b7 are connected and are grounded.
(3) beneficial effect
Structure of the present invention is made up of a pair of parallel Mach-Zehnder interferometer by delay value of not sharing the same light, and realizes band Interior optical signal-to-noise ratio monitoring.The present invention maintains the advantage of the optical signal-to-noise ratio monitoring based on Mach-Zehnder interferometer, i.e., not by dispersion, Polarization mode dispersion and the influence of polarization noise so that the program is achieved in the application of following high speed optical networks.Secondly, it after The advantage in bibliography [13] has been held, i.e., need not remove the coherence that noise carrys out measurement signal.Finally, in contrast to [13], by simulating, verifying, the method for the invention can be used to be fabricated to semiconductor integrated device.
Using the method that provides of the present invention, parallel there is delay value Mach-Zehnder interferometer of not sharing the same light using based on two Optical signal-to-noise ratio monitoring scheme.NRZ-OOK, RZ33-OOK, NRZ-DPSK, the RZ33- of this monitoring scheme for 10Gb/s Dpsk signal and 40Gb/s 16QAM signals accurately measure the OSNR from 10 to 28dB in ± 0.5dB accuracy rating Value.The scheme proposed maintains the advantage of the optical signal-to-noise ratio monitoring based on Mach-Zehnder interferometer, i.e., not by dispersion, polarization mode Dispersion and the influence of polarization noise, hence in so that the program can be realized in the application of following high speed optical networks.The program need not Know the correlation properties for turning off signal under noise situations, the method for the invention need not turn off acoustic survey signal of making an uproar.It is different from existing There is technology, the method for the invention can be used for making semiconductor integrated device.
Influence of the coupler degree of unbalancedness to optical signal-to-noise ratio monitoring is expired in the method for the invention practical devices manufacturing process Foot is required.The length variation produced between the method for the invention Mach-Zehnder interferometer two-arm during actual fabrication is to measurement As a result influence, which is met, to be required.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is according to interior one reality of optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Apply example each channel OSNR after different link transmissions and with it is interior, with outer OSNR difference schematic diagram;
Fig. 2 is according to interior one reality of optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Apply the Mach-Zehnder interferometer schematic diagram of example;
Fig. 3 is according to interior one reality of optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Apply the optical signal-to-noise ratio monitoring scheme schematic diagram based on two asymmetric Mach-Zehnder interferometers in parallel of example;
Fig. 4 is according to interior one reality of optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Apply the OSNR value measured in example by signal and monitoring error result schematic diagram;
Fig. 5 is according to interior one reality of optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Apply and the influence schematic diagram of dispersion and polarization mode dispersion in optical signal-to-noise ratio monitoring performance is assessed in example.
Fig. 6 is according to interior one reality of optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Apply the error amount schematic diagram of the OSNR measured in example;
Fig. 7 is according to one implementation of the interior optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel Prolonged in example with unlike signal in the case of the manufacturing deviation of two Mach-Zehnder interferometers in parallel for 3ps delay values and 10ps The optical signal-to-noise ratio monitoring error schematic diagram of duration.
Fig. 8 makes according to the interior optical signal-to-noise ratio monitoring method of band of the present invention based on asymmetric Mach-Zehnder interferometer in parallel and partly led The structural representation of body integrated device.
Embodiment
With reference to Figure of description and embodiment, the embodiment to the present invention is described in further detail.With Lower embodiment is merely to illustrate the present invention, but can not be used for limiting the scope of the present invention.
Monitoring scheme is as shown in figure 3, signal generator produces different signal patterns, such as NRZ-OOK/RZ33-OOK/ NRZ-DPSK/RZ33-DPSK signals.It is added to erbium-doped fiber amplifier generation noise in input signal and forms noise signal. Attenuator after erbium-doped fiber amplifier is used for controlling the amount of noise to obtain different OSNR values.Optical band pass filter quilt It is inserted into before Mach-Zehnder interferometer as channel model.Finally, the noise signal filtered out is admitted to optical signal-to-noise ratio monitoring device Middle calculating OSNR value.
The optical signal-to-noise ratio monitoring scheme of proposition be made up of 1 × 3 coupler and the three-dB coupler of three 1 × 2 two Individual Mach-Zehnder interferometer in parallel.There is a fixed light delay on a wherein arm for each Mach-Zehnder interferometer, it is another Arm is shared by two Mach-Zehnder interferometers in parallel, and has a variable phase element.Each Mach increases Deccan and related to There is a power meter behind instrument.When changing phase with π integral multiple, maximum and minimum value (P are recorded with power metermaxWith Pmin).Then we can calculate visibility μ=(P of Mach-Zehnder interferometermax-Pmin)/(Pmax+Pmin).Visibility and letter of making an uproar It is more relevant than r, i.e.,
R=Pn/Ps=(γs(Δτ)-μ)/(μ-γn(Δτ)) (1)
Wherein PsAnd PnIt is signal power and noise power respectively;Δ τ is delay value.γs(Δ τ) is the normalization of signal Auto-correlation function;γn(Δ τ) is the normalized autocorrelation functions of noise.Equation (1) is brought into, Work as i=1, and Δ τ j are when being selected in Δ τ 1 and Δ τ 2, can obtain two equations (2) (3).
According to the two equations, unknown number r and c can be solved.Finally, OSNR value is calculated with equation (4).
In simulations, the reference value of the OSNR for assessing the OSNR precision measured is direct by inputting noise Than calculating, i.e.,Wherein NEB is the noise equivalent band of optical band pass filter It is wide.
We demonstrate the program with emulation.Input signal is 40Gb/s 16QAM signals and 10Gb/s NRZ-OOK/ RZ33-OOK/NRZ-DPSK/RZ33-DPSK signals.Signal light power is maintained at 1mW.OBPF filters for bandwidth 1nm eight rank Gausses Ripple device.The delay value of two Mach-Zehnder interferometers is fixed on Δ τ 1=3ps (for MZI above) and Δ τ 2=10ps are (right In following Mach-Zehnder interferometer).First, it is not added with the light letter of any crosstalk (dispersion or polarization mode dispersion) measurement noise signal Make an uproar and compare, as a result as shown in Figure 4.Wherein Fig. 4 (a) is that 10Gb/s NRZ-OOK/RZ33-OOK/NRZ-DPSK/RZ33-DPSK are believed Number experimental result, and Fig. 4 (b) is the experimental result to 10Gb/s and 40Gb/s 16QAM signals.As can be seen from Figure 4 for OOK and dpsk signal can measure the OSNR value from 10 to 30dB in the range of error is less than ± 0.5dB, believe for QAM Number it can measure OSNR value from 10 to 28dB in the range of error is less than ± 0.5dB.Due to most concerned OSNR Scope is 10 to 30dB, therefore our scheme is effective for optical signal-to-noise ratio monitoring.
Secondly, our 16QAM signals to 40Gb/s and 10Gb/s NRZ-OOK/RZ33-OOK/NRZ-DPSK/RZ33- Dpsk signal assesses the influence of dispersion and polarization mode dispersion in optical signal-to-noise ratio monitoring performance, as a result as shown in Figure 5.Fig. 5 (a) shows The OSNR value measured when showing dispersion values from 0 to 1000ps/nm.Fig. 5 (b) is shown when Differential Group Delay changes to 50ps from 0 Differential Group Delay time SNR measurement and monitoring error.Fig. 5 (c) displays work as noise for 40Gb/s 16QAM signals Measurement result when being unbiased noise and full noise partially.Fig. 5 (d) displays are equal to 600ps/nm when dispersion, and Differential Group Delay is equal to The monitoring result of OSNR when 50ps and simultaneously addition polarization noise.It can be seen that dispersion, polarization mode dispersion and polarization noise Influence to optical signal-to-noise ratio monitoring can be ignored.
Finally, in order to prove that two Mach-Zehnder interferometers in parallel manufacture the feasibility of semiconductor integrated devices.We are first Influence of the coupler degree of unbalancedness to optical signal-to-noise ratio monitoring in Mach-Zehnder interferometer is assessed, because coupler degree of unbalancedness is horse A conspicuous most important parameters for increasing Deccan interferometer.We change the uneven angle value of coupler (be defined as 10log10 (P1/P2), its Middle P1 is a power output of coupler, and P2 is another power output of coupler) in two Mach in parallel Increase these three 1 × 2 three-dB couplers in Deccan interferometer, as shown in figure 3, and observing the error amount of OSNR measured.For 40Gb/s 16QAM signals and 10Gb/s NRZ-OOK/RZ33-OOK/NRZ-DPSK/RZ33-DPSK signals, as a result such as Fig. 6 institutes Show, wherein:(a) coupler one, (b) coupler two, (c) coupler three.From Fig. 6, we can be found out for all flashlights Signal to noise ratio monitoring result error is all higher than ± 0.3dB less than the tolerance limit of degree of unbalancedness in the case of ± 0.5dB.Because coupler makes The degree of unbalancedness reported is less than being equal to ± 0.2dB [14], therefore our double parallel Mach-Zehnder interferometer semiconductor collection It can be realized into device.
Then we study the length variation produced between Mach-Zehnder interferometer two-arm in manufacturing process to measurement result Influence.These length changes can cause the delay time error in Mach-Zehnder interferometer.Generally, the manufacture deviation of semiconductor equipment It can be controlled in and be less than or equal to ± 0.5 μm (Δ L≤± 0.5 μm) [15].
Shown in Fig. 7, prolonged with unlike signal in the case of the manufacturing deviation of two Mach-Zehnder interferometers in parallel for 3ps Duration one and the optical signal-to-noise ratio monitoring error of 10ps delay values two, wherein (a) is the optical signal-to-noise ratio monitoring error of 3ps delay values; (b) it is the optical signal-to-noise ratio monitoring error of 10ps delay values.We are studied when in two Mach-Zehnder interferometers in parallel in the figure 7 Made during for Mach-Zehnder interferometer Δ τ 1=3ps above and for following Mach-Zehnder interferometer Δ τ 2=10ps inclined Influence of the difference to optical signal-to-noise ratio monitoring.The length change of result display apparatus is that delay time error does not influence light to believe within the specific limits Make an uproar than measurement result, semiconductor integrated device can be fabricated to by further proving our optical signal-to-noise ratio monitoring scheme.
Shown in Fig. 8, a kind of integrated OSNR monitoring device, the integrated OSNR monitoring device includes:Phase is adjusted Device 1 processed, the 3dB multi-mode interference couplers a3 of 1 × 3 multi-mode interference coupler 2,1 × 2,1 × 2 3dB multi-mode interference couplers B4,1 × 2 3dB multi-mode interference couplers c5 and detector a6 and detector b7;1 × 3 multi-mode interference coupler 2 passes through Delay value 3ps silicon delay line A is connected with described 1 × 2 3dB multi-mode interference couplers a3;1 × 3 multiple-mode interfence coupling Device 2 is connected with the phase-modulator 1;The phase-modulator 1 is connected with described 1 × 2 3dB multi-mode interference couplers b4; The 3dB multi-mode interference couplers for the silicon delay line B and described 1 × 2 that 1 × 3 multi-mode interference coupler 2 passes through delay value 10ps C5 connections;Described 1 × 2 3dB multi-mode interference couplers b4 and described 1 × 2 3dB multi-mode interference couplers a3's and 1 × 2 The c5 connections of 3dB multi-mode interference couplers;Described 1 × 2 3dB multi-mode interference couplers a3 is connected with the detector a6;Described 1 × 2 3dB multi-mode interference couplers c5 is connected with the detector b7;The detector a6 and detector b7 are connected and are grounded.
Embodiment of above is merely to illustrate the present invention, rather than limitation of the present invention.Although with reference to embodiment to this hair It is bright to be described in detail, it will be understood by those within the art that, to technical scheme carry out it is various combination, Modification or equivalent substitution, without departure from the spirit and scope of technical solution of the present invention, the right that all should cover in the present invention is wanted Ask among scope.

Claims (7)

1. the interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel, methods described is divided into following steps:
Introduce corresponding signal source to be monitored;
Signal forms noise signal with noise by three-dB coupler;
The optical band pass filter that will act as channel model is inserted in before optical signal-to-noise ratio monitoring scheme;
The noise signal filtered out is sent into OSNR value is calculated in optical signal-to-noise ratio monitoring scheme;The optical signal-to-noise ratio monitoring side of proposition Two Mach-Zehnder interferometers in parallel that case is made up of 1 × 3 coupler and the three-dB coupler of three 1 × 2;
Two Mach-Zehnder interferometer delay arms in parallel set different delayed time value respectively;The delay value is:The 3ps of delay value one, prolongs The 10ps of duration two;
The phase value of two Mach-Zehnder interferometer common arms is adjusted, power output is respectively reached maximum and minimum value, is used The power meter record data of terminal;
OSNR is calculated by the visual scale value calculated and the noise normalized autocorrelation functions value measured;
The OSNR calculated is compareed with OSNR reference value, and assesses the performance of the monitoring method.
2. the interior optical signal-to-noise ratio monitoring method of the integrated band based on asymmetric Mach-Zehnder interferometer in parallel, methods described is divided into following step Suddenly:
Introduce corresponding signal source to be monitored;Signal forms noise signal with noise by three-dB coupler;
The optical band pass filter that will act as channel model is inserted in before optical signal-to-noise ratio monitoring scheme;
The noise signal filtered out is sent into OSNR value is calculated in optical signal-to-noise ratio monitoring scheme;The optical signal-to-noise ratio monitoring side of proposition Two Mach-Zehnder interferometers in parallel that case is made up of 1 × 3 coupler and the three-dB coupler of three 1 × 2;
Two Mach-Zehnder interferometer delay arms in parallel set different delayed time value respectively;The delay value is:The 3ps of delay value one, prolongs The 10ps of duration two;
The phase value of two Mach-Zehnder interferometer common arms is adjusted, power output is respectively reached maximum and minimum value, is used The power meter record data of terminal;
OSNR is calculated by the visual scale value calculated and the noise normalized autocorrelation functions value measured;
The OSNR calculated is compareed with OSNR reference value, and assesses the performance of the monitoring method;
The integrated interior optical signal-to-noise ratio monitoring scheme of band based on asymmetric Mach-Zehnder interferometer in parallel.
3. the interior smooth noise of the band based on asymmetric Mach-Zehnder interferometer in parallel according to any one of claim 1~2 Compare monitoring method, it is characterised in that the visual scale value of two Mach-Zehnder interferometers in parallel, the maximum measured by power meter and most Small value, which is calculated, to be obtained.
4. the interior optical signal-to-noise ratio monitoring method of the band according to claim 3 based on asymmetric Mach-Zehnder interferometer in parallel, its It is characterised by, two Mach-Zehnder interferometers in parallel are respectively relative to two noise autocorrelation function values at different delayed time, by band Enter the normalized autocorrelation functions spectrum acquisition that noise is obtained by bandpass filter.
5. the interior optical signal-to-noise ratio monitoring method of the band according to claim 4 based on asymmetric Mach-Zehnder interferometer in parallel, its It is characterised by, in simulations, OSNR reference value is calculated by the OSNR for measuring input.
6. a kind of method for the feasibility checking for proving two Mach-Zehnder interferometer manufacture semiconductor integrated devices in parallel, the side Method is divided into following steps:
Assess influence of the coupler degree of unbalancedness to optical signal-to-noise ratio monitoring in Mach-Zehnder interferometer;
Influence of the length variation produced between research Mach-Zehnder interferometer two-arm in manufacturing process to measurement result;
If the length change of result display apparatus be if delay time error does not influence the measurement result of OSNR within the specific limits The interior optical signal-to-noise ratio monitoring method of band based on asymmetric Mach-Zehnder interferometer in parallel of proof can be used to be fabricated to semiconductor integrator Part;
If the length change of display device be to prove base if delay time error influences the measurement result of OSNR within the specific limits It cannot be used for being fabricated to semiconductor integrated device in the interior optical signal-to-noise ratio monitoring method of the band of asymmetric Mach-Zehnder interferometer in parallel.
7. the integrated interior optical signal-to-noise ratio monitoring of band based on asymmetric Mach-Zehnder interferometer in parallel described in a kind of application claim 2 The integrated OSNR monitoring device that method is made, it is characterised in that the integrated OSNR monitoring device includes:Phase-modulation Device (1), 1 × 3 multi-mode interference coupler (2), 1 × 2 3dB multi-mode interference couplers a (3), the coupling of 1 × 2 3dB multiple-mode interfences Device b (4), 1 × 2 3dB multi-mode interference couplers c (5) and detector a (6) and detector b (7);1 × 3 multiple-mode interfence coupling Clutch (2) is connected by delay value 3ps silicon delay line A with described 1 × 2 3dB multi-mode interference couplers a (3);Described 1 × 3 Multi-mode interference coupler (2) is connected with the phase-modulator (1);The phase-modulator (1) and described 1 × 2 3dB multimodes Interference coupler b (4) connections;The silicon delay line B and described 1 that 1 × 3 multi-mode interference coupler (2) passes through delay value 10ps × 2 3dB multi-mode interference couplers c (5) connections;Described 1 × 2 3dB multi-mode interference couplers b (4) and described 1 × 2 3dB Multi-mode interference coupler a (3) and 1 × 2 3dB multi-mode interference couplers c (5) connections;Described 1 × 2 3dB multiple-mode interfences coupling Device a (3) is connected with the detector a (6);Described 1 × 2 3dB multi-mode interference couplers c (5) connects with the detector b (7) Connect;The detector a (6) and detector b (7) connections are simultaneously grounded.
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