CN105223974A - The method and system of processes gas circuit flow control - Google Patents
The method and system of processes gas circuit flow control Download PDFInfo
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- CN105223974A CN105223974A CN201410309056.5A CN201410309056A CN105223974A CN 105223974 A CN105223974 A CN 105223974A CN 201410309056 A CN201410309056 A CN 201410309056A CN 105223974 A CN105223974 A CN 105223974A
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Abstract
The invention discloses the method and system of a kind of processes gas circuit flow control.Wherein method comprises the steps: the flow value of the every road gas according to current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculates flow slope and the temperature regulations speed of every road gas; According to the temperature of the processing chamber of temperature regulations speed regulating and controlling current process step; The flow of each road gas of current process step is regulated according to the flow slop control of every road gas.Its gas flow to every road gas regulates the flow slope according to calculating progressively to regulate, temperature is changed relatively slowly by the temperature regulations speed calculated, the adjustment of gas circuit flow and the regulable control of temperature are all more flexible, improve the stability of processes simultaneously.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to the method and system of a kind of processes gas circuit flow control.
Background technology
In semiconductor technology processing, in epitaxial process, needing to control major parameter has underlayer temperature, source gas flow and carrier gas flow etc.Thickness, doping content and component uniformity are one of important indicators of film preparation.Substrate temperature is to the completing property of crystal of epitaxial loayer and growth rate; Source gas flow externally prolongs the homogeneity etc. of layer thickness to the speed of growth, carrier gas flow, has a great impact all respectively.Thus the accuracy requirement controlled CVD (ChemicalVaporDeposition, chemical vapor deposition) equipment is very high, also has higher requirement to the accuracy of sound field technique, controllability.
At present, software, in process, according to gas circuit target flow and the target temperature of user's setting, is directly issued to hardware, then technique timing, after the current step time arrives, automatically switches to next step; Until all technique steps are finished.
But use software directly to issue gas target flow, if target flow is excessive, easily causes cavity indoor pressure to change, affect process results; Software takes certain interval of time to carry out temperature control in the mode issuing target temperature, if this just causes the time interval too small, temperature is smoother, software execution efficiency reduces, the time interval is too large, easily causes temperature fluctuation excessive, can affect process results equally.
In sum, how to provide one temperature control method and gas circuit configuration mode flexibly, thus the stability improving semiconducter process is a problem demanding prompt solution.
Summary of the invention
Based on this, be necessary to provide a kind of method and system can carrying out the processes gas circuit flow control of flexible temperature control and gas circuit configuration.
For realizing the method for a kind of processes gas circuit flow control that the object of the invention provides, comprise the following steps:
According to the flow value of every road gas of current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculate flow slope and the temperature regulations speed of every road gas;
According to the temperature of the processing chamber of described temperature regulations speed regulating and controlling current process step;
The flow of each road gas of current process step is regulated according to the flow slop control of described every road gas.
As the embodiment of the method for a kind of processes gas circuit flow control, the flow value of described every road gas according to current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculate flow slope and the temperature regulations speed of every road gas, comprise the following steps:
Read the flow value L of every road gas of current process step in described technique list
1, set temperature value T
1, flow lifting time Tl
1and gradient of temperature time Tt
1;
Read the flow value L of every road gas of last processing step in described technique list
0and set temperature value T
0;
According to formula, flow slope=(gas flow values of the gas flow values-last processing step of current process step)/flow lifting time;
Obtain the flow slope of every road gas of current process step
According to formula, temperature regulations speed=(the set temperature value of the set temperature value-last processing step of current process step)/gradient of temperature time;
Obtain the temperature regulations speed of current process step
As the embodiment of the method for a kind of processes gas circuit flow control, the described flow slop control according to described every road gas regulates the flow of each road gas of current process step, comprises the following steps:
Arranging initial adjustment time Time is 0;
The gas flow values controlling every road gas of current process step is the product of the flow slope of described every road gas of described regulating time and current process step;
Described regulating time is increased Preset Time, and after waiting for described Preset Time, returns the step of the gas flow values performing the every road gas controlling current process step, until described regulating time reaches the described flow lifting time of current process step.
As the embodiment of the method for a kind of processes gas circuit flow control, described Preset Time is 1 second.
As the embodiment of the method for a kind of processes gas circuit flow control, further comprising the steps of:
After the described flow lifting time arrival of current process step, processes is carried out according to the processes time in technique list, and after the processes completing current process step, return flow slope and the temperature regulations speed of the every road gas calculating next processing step.
Based on the system of a kind of processes gas circuit flow control of same design, comprise speed control computing module, temperature control modules, and flow-control module, wherein:
Described speed control computing module, for the flow value of the every road gas according to current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculates flow slope and the temperature regulations speed of every road gas;
Described temperature control modules, for the temperature of the processing chamber according to described temperature regulations speed regulating and controlling current process step;
Described flow-control module, for regulating the flow of each road gas of current process step according to the flow slop control of described every road gas.
As the embodiment of the system of a kind of processes gas circuit flow control, described speed control computing module comprises current procedures parameter reading submodule, previous step parameter reading submodule, flow slope meter operator module, and temperature rate's calculating sub module, wherein:
Described current procedures parameter reading submodule, for reading the flow value L of every road gas of current process step in described technique list
1, set temperature value T
1, flow lifting time Tl
1and gradient of temperature time Tt
1;
Described previous step parameter reading submodule, for reading the flow value L of every road gas of last processing step in described technique list
0and set temperature value T
0;
Described flow slope meter operator module, for according to formula, flow slope=(gas flow values of the gas flow values-last processing step of current process step)/flow lifting time;
Obtain the flow slope of every road gas of current process step
Described temperature rate's calculating sub module, for according to formula, temperature regulations speed=(the set temperature value of the set temperature value-last processing step of current process step)/gradient of temperature time;
Obtain the temperature regulations speed of current process step
As the embodiment of the system of a kind of processes gas circuit flow control, described flow-control module comprises initial setting up submodule, flow set submodule, and time controling submodule, wherein:
Described initial setting up submodule is 0 for arranging initial adjustment time Time;
Described flow set submodule, for controlling the product that the gas flow values of every road gas of current process step is the flow slope of described every road gas of described regulating time and current process step;
Described time controling submodule, for described regulating time is increased Preset Time, and after waiting for described Preset Time, return the step of the gas flow values performing the every road gas controlling current process step, until described regulating time reaches the described flow lifting time of current process step.
As the embodiment of the system of a kind of processes gas circuit flow control, described Preset Time is 1 second.
As the embodiment of the system of a kind of processes gas circuit flow control, also comprise technique execution module, after the described flow lifting time arrival of current process step, processes is carried out according to the processes time in technique list, and after the processes completing current process step, return flow slope and the temperature regulations speed of the every road gas calculating next processing step.
Beneficial effect of the present invention comprises:
The method and system of a kind of processes gas circuit provided by the invention flow control, the gas flow of every road gas regulates the flow slope according to calculating progressively to regulate, and temperature is changed relatively slowly by the temperature regulations speed calculated.Relative to the gas flow directly flow controller being reached the requirement of current process step in conventional art, and temperature controls rapidly, and the adjustment of its gas circuit flow and the regulable control of temperature are all more flexible, can improve the stability of processes simultaneously.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of a specific embodiment of the method for a kind of processes gas circuit of the present invention flow control;
Fig. 2 is the process flow diagram of another specific embodiment of the method for a kind of processes gas circuit of the present invention flow control;
Fig. 3 is the system architecture schematic diagram of a specific embodiment of the system of a kind of processes gas circuit of the present invention flow control.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, be described below in conjunction with the embodiment of accompanying drawing to the method and system of processes gas circuit of the present invention flow control.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The method of the processes gas circuit flow control of the embodiment of the present invention, as shown in Figure 1, comprises the following steps:
S100, according to the flow value of every road gas of current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculates flow slope and the temperature regulations speed of every road gas.
S200, according to the temperature of the processing chamber of described temperature regulations speed regulating and controlling current process step.
S300, regulates the flow of each road gas of current process step according to the flow slop control of described every road gas.
In the embodiment of the present invention, in amendment traditional handicraft form templat, increase gradient of temperature time (TempRamp) and flow lifting time (MFCRampTime) configuration parameter.When edit process list, to the traditional parameters in technique list, as the gas flow of every road gas, the processes time etc. arranges described gradient of temperature time and flow lifting time while carrying out arranging.Make, when carrying out processes step and switching, in gradient of temperature time range, to carry out regulating and controlling by temperature controller to temperature; Flow lifting time Nei Shimei road gas flow from the flow of a processing step be adjusted to the gas flow of current process step.
The gas flow of embodiment of the present invention Zhong Mei road gas regulates the flow slope according to calculating progressively to regulate, and temperature is changed relatively slowly by the temperature regulations speed calculated.Relative to the gas flow directly flow controller being reached the requirement of current process step in conventional art, and temperature controls rapidly, the adjustment of the method gas circuit flow of the processes gas circuit flow control of the embodiment of the present invention and the regulable control of temperature are all more flexible, can improve the stability of technique simultaneously.
In the embodiment of the method for processes gas circuit flow control wherein, step S100, according to the flow value of every road gas of current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculate flow slope and the temperature regulations speed of every road gas, comprise the following steps:
S110, reads the flow value L of every road gas of current process step in described technique list
1, set temperature value T
1, flow lifting time Tl
1and gradient of temperature time Tt
1.When processes starts, first read each parameter value in technique list.In the embodiment of the present invention, need when each processes step starts to use each parameter value of current process step and each parameter value of last processing step.
S120, reads the flow value L of every road gas of last processing step in described technique list
0and set temperature value T0.
S130, according to formula, flow slope=(gas flow values of the gas flow values-last processing step of current process step)/flow lifting time, obtains the flow slope of every road gas of current process step
described flow lifting time can be processed fluctuations in discharge situation between situation and two processes steps when edit process list according to actual process and be arranged, as being set to 5S etc.So arrange the time controllable flow rate that flow control regulates progressively to convert, avoiding the unexpected increase of flow to cause the pressure in processing chamber to change excessively affects processes stability.
S140, according to formula, temperature regulations speed=(the set temperature value of the set temperature value-last processing step of current process step)/gradient of temperature time, obtains the temperature regulations speed of current process step
It should be noted that, when performing first step processes step, each parameter value of the last processes step of its correspondence is defaulted as 0 herein.
The method of the processes gas circuit flow control of the embodiment of the present invention, each parameter value in conjunction with last processing step arranges flux change velocity and the temperature changing speed of current process step, the chamber pressure steady change making temperature in processing chamber and affect by gas fluctuations in discharge, improves the stability of technique.
In the embodiment of the method for processes gas circuit flow control wherein, step S300, regulates the flow of each road gas of current process step, as shown in Figure 2, comprises the following steps according to the flow slop control of described every road gas:
S310, arranging initial adjustment time Time is 0.
S320, the gas flow values controlling every road gas of current process step is the product of the flow slope of described every road gas of described regulating time and current process step.Issuing road gas flow is regulating time to the product of the flow slope of every road gas of current process step to corresponding flow controller.The gas flow being passed into processing chamber Zhong Ge road gas is controlled by described flow controller.
S330, increases Preset Time by described regulating time, and after waiting for described Preset Time, returns the step of the gas flow values performing the every road gas controlling current process step, until described regulating time reaches the described flow lifting time of current process step.
In the embodiment of the present invention, increased the regulating time carrying out gas flow adjustment by circulation, the time interval of flow regulation is clearly controlled, and it is more accurate to control.The restriction being subject to optimum configurations in technique list T.T. of flow control simultaneously, the T.T. of flow adjustment is constant, controls gas circuit flow so more flexibly.
The method of processes gas circuit flow control wherein, described Preset Time is 1 second.The flow intervals 1S of every road gas once adjusts.Also can be set to 2 seconds in other embodiments, now the adjustment interval of gas circuit flow becomes large.
In the embodiment of the method for processes gas circuit flow control wherein, further comprising the steps of:
S400, after the described flow lifting time arrival of current process step, carry out processes according to the processes time in technique list, and after the processes completing current process step, return flow slope and the temperature regulations speed of the every road gas calculating next processing step.
As shown in Figure 2, after flow adjustment terminates, carry out processes, after technique completes, technique step number parameter StepNum is increased 1 and carry out next processing step, until complete all processes steps in technique list, established technology step number StepNum is greater than technique total step number TotalNum.Technique total step number is the step summation will carrying out processes in technique list.Processes is from the first processing step.
Based on same inventive concept, the embodiment of the present invention provides the system of a kind of processes gas circuit flow control, the principle of dealing with problems due to this system is similar to the method for aforementioned a kind of processes gas circuit flow control, therefore, the enforcement of this system can realize according to the concrete steps of preceding method, repeats part and repeats no more.
The system of the processes gas circuit flow control of the embodiment of the present invention, as shown in Figure 3, comprises speed control computing module 100, temperature control modules 200, and flow-control module 300.Wherein: described speed control computing module 100, for the flow value of the every road gas according to current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, flow slope and the temperature regulations speed of every road gas is calculated; Described temperature control modules 200, for the temperature of the processing chamber according to described temperature regulations speed regulating and controlling current process step; Described flow-control module 300, for regulating the flow of each road gas of current process step according to the flow slop control of described every road gas.
In the embodiment of the present invention, in amendment traditional handicraft form templat, increase gradient of temperature time (TempRamp) and flow lifting time (MFCRampTime) configuration parameter.When edit process list, to the traditional parameters in technique list, as the gas flow of every road gas, the processes time etc. arranges described gradient of temperature time and flow lifting time while carrying out arranging.Make, when carrying out processes step and switching, in gradient of temperature time range, to carry out regulating and controlling by temperature controller to temperature; Flow lifting time Nei Shimei road gas flow from the flow of a processing step be adjusted to the gas flow of current process step.
The gas flow of embodiment of the present invention Zhong Mei road gas regulates the flow slope according to calculating progressively to regulate, and temperature is changed relatively slowly by the temperature regulations speed calculated.Relative to the gas flow directly flow controller being reached the requirement of current process step in conventional art, and temperature controls rapidly, the adjustment of the system gas circuit flow of the processes gas circuit flow control of the embodiment of the present invention and the regulable control of temperature are all more flexible, can improve the stability of technique simultaneously.
In the embodiment of the system of processes gas circuit flow control wherein, described speed control computing module 100 comprises current procedures parameter reading submodule 110, previous step parameter reading submodule 120, flow slope meter operator module 130, and temperature rate's calculating sub module 140.Wherein: described current procedures parameter reading submodule 110, for reading the flow value L of every road gas of current process step in described technique list
1, set temperature value T
1, flow lifting time Tl
1and gradient of temperature time Tt
1; Described previous step parameter reading submodule 120, for reading the flow value L of every road gas of last processing step in described technique list
0and set temperature value T
0; Described flow slope meter operator module 130, for according to formula, flow slope=(gas flow values of the gas flow values-last processing step of current process step)/flow lifting time, obtains the flow slope of every road gas of current process step
described temperature rate's calculating sub module 140, for according to formula, temperature regulations speed=(the set temperature value of the set temperature value-last processing step of current process step)/gradient of temperature time, obtains the temperature regulations speed of current process step
The system of the processes gas circuit flow control of the embodiment of the present invention, each parameter value in conjunction with last processing step arranges flux change velocity and the temperature changing speed of current process step, the chamber pressure steady change making temperature in processing chamber and affect by gas fluctuations in discharge, improves the stability of technique.
In the embodiment of the system of processes gas circuit flow control wherein, described flow-control module 300 comprises initial setting up submodule 310, flow set submodule 320, and time controling submodule 330.Wherein: described initial setting up submodule 310, be 0 for arranging initial adjustment time Time; Described flow set submodule 320, for controlling the product that the gas flow values of every road gas of current process step is the flow slope of described every road gas of described regulating time and current process step; Described time controling submodule 330, for described regulating time is increased Preset Time, and after waiting for described Preset Time, return the step of the gas flow values performing the every road gas controlling current process step, until described regulating time reaches the described flow lifting time of current process step.
In the embodiment of the present invention, increased the regulating time carrying out gas flow adjustment by circulation, the time interval of flow regulation is clearly controlled, and it is more accurate to control.The restriction being subject to optimum configurations in technique list T.T. of flow control simultaneously, the T.T. of flow adjustment is constant, controls gas circuit flow so more flexibly.
In the embodiment of the system of processes gas circuit flow control wherein, described Preset Time is 1 second.
In the embodiment of the system of processes gas circuit flow control wherein, also comprise technique execution module 400, after the described flow lifting time arrival of current process step, processes is carried out according to the processes time in technique list, and after the processes completing current process step, return flow slope and the temperature regulations speed of the every road gas calculating next processing step.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a method for processes gas circuit flow control, is characterized in that, comprises the following steps:
According to the flow value of every road gas of current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculate flow slope and the temperature regulations speed of every road gas;
According to the temperature of the processing chamber of described temperature regulations speed regulating and controlling current process step;
The flow of each road gas of current process step is regulated according to the flow slop control of described every road gas.
2. the method for processes gas circuit according to claim 1 flow control, it is characterized in that, the flow value of described every road gas according to current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculate flow slope and the temperature regulations speed of every road gas, comprise the following steps:
Read the flow value L of every road gas of current process step in described technique list
1, set temperature value T
1, flow lifting time Tl
1and gradient of temperature time Tt
1;
Read the flow value L of every road gas of last processing step in described technique list
0and set temperature value T
0;
According to formula, flow slope=(gas flow values of the gas flow values-last processing step of current process step)/flow lifting time;
Obtain the flow slope of every road gas of current process step
According to formula, temperature regulations speed=(the set temperature value of the set temperature value-last processing step of current process step)/gradient of temperature time;
Obtain the temperature regulations speed of current process step
3. the method for processes gas circuit according to claim 1 flow control, is characterized in that, the described flow slop control according to described every road gas regulates the flow of each road gas of current process step, comprises the following steps:
Arranging initial adjustment time Time is 0;
The gas flow values controlling every road gas of current process step is the product of the flow slope of described every road gas of described regulating time and current process step;
Described regulating time is increased Preset Time, and after waiting for described Preset Time, returns the step of the gas flow values performing the every road gas controlling current process step, until described regulating time reaches the described flow lifting time of current process step.
4. the method for processes gas circuit according to claim 3 flow control, is characterized in that, described Preset Time is 1 second.
5. the method for the processes gas circuit flow control according to any one of Claims 1-4, is characterized in that, further comprising the steps of:
After the described flow lifting time arrival of current process step, processes is carried out according to the processes time in technique list, and after the processes completing current process step, return flow slope and the temperature regulations speed of the every road gas calculating next processing step.
6. a system for processes gas circuit flow control, is characterized in that, comprises speed control computing module, temperature control modules, and flow-control module, wherein:
Described speed control computing module, for the flow value of the every road gas according to current process step in technique list, set temperature value, flow lifting time and gradient of temperature time, calculates flow slope and the temperature regulations speed of every road gas;
Described temperature control modules, for the temperature of the processing chamber according to described temperature regulations speed regulating and controlling current process step;
Described flow-control module, for regulating the flow of each road gas of current process step according to the flow slop control of described every road gas.
7. the system of processes gas circuit according to claim 6 flow control, is characterized in that, described speed control computing module comprises current procedures parameter reading submodule, previous step parameter reading submodule, flow slope meter operator module, and temperature rate's calculating sub module, wherein:
Described current procedures parameter reading submodule, for reading the flow value L of every road gas of current process step in described technique list
1, set temperature value T
1, flow lifting time Tl
1and gradient of temperature time Tt
1;
Described previous step parameter reading submodule, for reading the flow value L of every road gas of last processing step in described technique list
0and set temperature value T
0;
Described flow slope meter operator module, for according to formula, flow slope=(gas flow values of the gas flow values-last processing step of current process step)/flow lifting time;
Obtain the flow slope of every road gas of current process step
Described temperature rate's calculating sub module, for according to formula, temperature regulations speed=(the set temperature value of the set temperature value-last processing step of current process step)/gradient of temperature time;
Obtain the temperature regulations speed of current process step
8. the system of processes gas circuit according to claim 6 flow control, is characterized in that, described flow-control module comprises initial setting up submodule, flow set submodule, and time controling submodule, wherein:
Described initial setting up submodule is 0 for arranging initial adjustment time Time;
Described flow set submodule, for controlling the product that the gas flow values of every road gas of current process step is the flow slope of described every road gas of described regulating time and current process step;
Described time controling submodule, for described regulating time is increased Preset Time, and after waiting for described Preset Time, return the step of the gas flow values performing the every road gas controlling current process step, until described regulating time reaches the described flow lifting time of current process step.
9. the system of processes gas circuit according to claim 8 flow control, is characterized in that, described Preset Time is 1 second.
10. the system of the processes gas circuit flow control according to any one of claim 6 to 9, it is characterized in that, also comprise technique execution module, after the described flow lifting time arrival of current process step, processes is carried out according to the processes time in technique list, and after the processes completing current process step, return flow slope and the temperature regulations speed of the every road gas calculating next processing step.
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| CN110016657A (en) * | 2018-01-08 | 2019-07-16 | 北京北方华创微电子装备有限公司 | Flow control methods and device, reaction chamber |
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