CN105223782B - 基于商空间和知识源融合的光刻工序套刻指标预报方法 - Google Patents
基于商空间和知识源融合的光刻工序套刻指标预报方法 Download PDFInfo
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- CN105223782B CN105223782B CN201410805067.2A CN201410805067A CN105223782B CN 105223782 B CN105223782 B CN 105223782B CN 201410805067 A CN201410805067 A CN 201410805067A CN 105223782 B CN105223782 B CN 105223782B
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Description
OFF_SETX | OFF_SETY | ACT_ORTHO | ACT_ROTATION | |
λ=0.01 | 3.53×10-2 | 3.02×10-2 | 3.94×10-1 | 2.91×10-1 |
λ=0.5 | 3.52×10-2 | 3.01×10-2 | 3.91×10-1 | 2.89×10-1 |
λ=5 | 3.70×10-2 | 3.16×10-2 | 3.93×10-1 | 3.05×10-1 |
λ=10 | 3.71×10-2 | 3.16×10-2 | 4.03×10-1 | 3.04×10-1 |
λ=50 | 3.71×10-2 | 3.17×10-2 | 4.16×10-1 | 3.38×10-1 |
λ=100 | 3.71×10-2 | 3.17×10-2 | 4.19×10-1 | 3.60×10-1 |
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CN108089412B (zh) * | 2017-11-10 | 2020-10-09 | 上海华力微电子有限公司 | 光刻套刻精度量测准确性的评估方法 |
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