CN105204115B - A kind of middle infrared band adjustable light delay based on symmetric metal cladding waveguide - Google Patents

A kind of middle infrared band adjustable light delay based on symmetric metal cladding waveguide Download PDF

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Publication number
CN105204115B
CN105204115B CN201510651312.3A CN201510651312A CN105204115B CN 105204115 B CN105204115 B CN 105204115B CN 201510651312 A CN201510651312 A CN 201510651312A CN 105204115 B CN105204115 B CN 105204115B
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infrared
light
gain media
displacement
infrared band
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CN105204115A (en
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江晓清
叶乔波
秦晨
李燕
姜建飞
余辉
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1223Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention discloses a kind of middle infrared band adjustable light delay based on symmetric metal cladding waveguide.Waveguide face is coated using two same metals to place, infrared gain media in being filled between two clads, infrared incident light from the infrared laser in air incide in infrared gain media, then pass through a series of reflections among two symmetrical waveguides, by infrared emergent light returning air.The displacement enhancement effect of high-order mode is incorporated into middle infrared band by the present invention, and displacement magnitude is increased into centimetres, and is generated in the no reverse displacement of visible ray and near infrared band;Utilize Cr2+Infrared gain media during zinc chalcogenide material is used as is adulterated, the loss of a reflection circulation can be reduced to 2.7dB from 3.1dB;Ducting layer is chalcogenide infrared glass, high in 2 10 mu m waveband penetrances, and the property such as refractive index is stable;Simple in construction, delay adjustable extent reaches 0 ~ 52.89ns, and relative delay amount is big.

Description

A kind of middle infrared band adjustable light delay based on symmetric metal cladding waveguide
Technical field
The present invention relates to middle infrared band optical time delay unit, more particularly, to red in a kind of cladding waveguide based on symmetric metal Wave section adjustable light delay.
Background technology
From the displacement of nineteen forty-seven Gu Sihanxin by it is found that since, how to strengthen Gu Sihanxin displacements is always research-on-research The study hotspot of persons.And since 21 century, the development of integrated optical device is very rapid, and various new optics are continuous It is reported out, therefore the optics of the Gu Sihanxin displacements based on enhancing also arises at the historic moment.Existing research shows metal The high-order mode that excites of cladding waveguide can greatly improve the skin depth of light, can be with so as to produce larger displacement in reflecting surface Gu Sihanxin displacements are improved into hundreds of wavelength by tens conventional wavelength.When incident light is visible ray, displacement can reach To millimeter magnitude, this structural manufacturing process is simple, and can be combined with circuit system, forms multi-functional photoelectricity mixing module And system, it will widely be applied in the various fields such as filtering, sensing, biology, there is very bright prospect.
Middle infrared band(2μm ~ 20μm), it is an important wave band in solar radiation light, it is in each science and technology neck There are highly important application, including sensing, environmental monitoring, biomedical applications, thermal imaging etc. in domain.At present, to metal bag The research for covering the waveguide high-order theory of modules is all confined to visible ray and near infrared band, and this is bigger than normal to metal loss by infrared light, Invisibility and the therefore influence of caused experimental implementation difficulty factor.But middle infrared device is compared to near-infrared device Part size is bigger, and technique is relatively more convenient, and Gu Sihanxin displacements enhancement effect can be entered into one applied to middle infrared band Displacement magnitude is expanded to centimetres by step, while infrared gain material in being introduced into, and is compensated due to Mode Coupling and metal sheet The loss of body.
The existing research to adjustable light delay is mainly with following scheme:
1. the method for free space, change the method for optical path difference to obtain adjustable delay, this is also of the invention main uses Method.
2. the method for fiber grating, and circulator coordinate, realized by changing the local center wavelength of Bragg grating Light reaches the adjustable purpose of delay in the reflection of diverse location.
3. using the temperature characterisitic of optical fiber, the temperature of optical fiber is controlled to change the refractive index of optical fiber, linearly changes light path.
The content of the invention
It is an object of the invention to provide it is a kind of based on symmetric metal cladding waveguide middle infrared band adjustable light delay, Gu Sihanxin displacement enhancement effects based on metal-cladding waveguide higher order mode, obtain adjustable negative sense Gu Sihanxin displacements, adopt Increase the traveling light path of actual light beam with the ray trajectory of the figure of eight, and by changing the thickness and incident angle of metallic film Fine setting control optical path difference, realize light delay function and controllable, while infrared gain media makes up pattern coupling in introducing Close loss.
The technical solution adopted by the present invention is as follows:
The present invention coats waveguide face using two same metals and placed, and infrared gain is situated between in filling between two clads Matter, infrared incident light from the infrared laser in air incide in infrared gain media, then in two symmetrical waveguides Between pass through a series of reflections, by infrared emergent light returning air.
Described two same metal cladding waveguides form by three-decker;Clad is thickness 10-50nm Ag films, Ducting layer is thickness 3-5mm chalcogenide infrared glass, and substrate layer is 200nm Ag films.
Infrared gain media is Cr in described2+Adulterate zinc chalcogenide material.
The invention has the advantages that:
1st, the displacement enhancement effect of high-order mode is incorporated into middle infrared band, displacement magnitude is increased into centimetres, and And the reverse displacement in visible ray and near infrared band not is generated, to realize that light delay provides possibility.
2nd, Cr is utilized2+Infrared gain media during zinc chalcogenide material is used as is adulterated, has preferable gain to imitate at 2.5 ~ 4 μm Fruit, by theoretical validation, the loss of a reflection circulation can be reduced to 2.7dB from 3.1dB.
3rd, the ducting layer that the present invention uses is chalcogenide infrared glass, high in 2-10 mu m wavebands penetrance, the property such as refractive index Stable, deposited by electron beam evaporation carries out metallic film evaporation process, and precision is higher.
4th, the more conventional delayer of the present invention, relatively simple for structure, delay adjustable extent can also reach 0 ~ 52.89ns, Relative delay amount is big.
Brief description of the drawings
Fig. 1 is middle infrared band metal-cladding waveguide structural representation.
Fig. 2 is middle infrared band adjustable light delay structure and 8-shaped optical track mark schematic diagram.
Fig. 3 is pip displacement and thickness of metal film graph of a relation.
In figure:In figure:1st, substrate layer, 2, ducting layer, 3, clad, 4, in infrared gain media, 5, air, 6, infrared swash Light device, 7, an infrared incident light, 8, infrared emergent light, 9, infrared primary event light, 10, infrared second incident light, 11, infrared Secondary reflection light, 12, the light transverse direction direction of propagation.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
As shown in Fig. 2 the present invention coats waveguide using two same metals(MCW)Face is placed, between two clads Infrared gain media 4 in filling, infrared incident light 7 from the infrared laser 6 in air 5 incide in infrared gain media 4, so Pass through a series of reflections among two symmetrical waveguides afterwards, by the infrared returning air 5 of emergent light 8.
As shown in figure 1, described two same metal cladding waveguides form by three-decker;Clad 3 is thickness 10- 50nm Ag films, ducting layer 2 are thickness 3-5mm chalcogenide infrared glass, and substrate layer 1 is 200nm Ag films.Ducting layer 2 When thickness is grade, clad 3 and substrate layer 1 allow the mode step number of guided mode to reach thousands of for the structure of metal.
Infrared gain media 4 is the medium for having in middle infrared band gain in described, and Cr2+ adulterates zinc chalcogenide material.
Because substrate layer 1 and the refractive index of clad 3 are the characteristic of plural number, infrared light can direct therefrom infrared gain media 4 It is coupled in waveguide, excites high-order mode, and reverse displacement is produced on incidence point, light path is advanced along the figure of eight, increase greatly Optical path difference is added.
Change the thickness or adjustment incident angle of the Ag films of clad 3, thus it is possible to vary the size of negative sense displacement, so as to change Become optical path difference, reach the purpose of control amount of delay.
The operation principle of the present invention is as follows:
As shown in Fig. 2 infrared gain media 4 incides the upper table of lower floor's MCW structures in an infrared incident light 7 process Face, occurs reverse displacement, and infrared primary event light 9 reflexes to the following table of upper strata MCW structures from the upper surface of lower floor's MCW structures Face.An infrared incident light 7 and infrared primary event light 9 are considered as primary event circulation.Equally, under the MCW structures of upper strata Reverse displacement occurs for surface, and infrared second incident light 10 incides the upper table of lower floor's MCW structures from the lower surface of upper strata MCW structures Simultaneously direction displacement occurs for face, is reflected by infrared secondary reflection light 11, by infrared second incident light 10 and infrared secondary reflection light 11 are considered as secondary reflection circulation.Because the lateral shift of each reflection circulation is more than reverse displacement, therefore light laterally passes along light Broadcast direction 12 to propagate to the right, until by the infrared returning air 5 of emergent light 8.
Ducting layer 2 can at most accommodate individual pattern more than 5000 using 3mm chalcogenide infrared glass material.Clad 3 uses Silver metal film within 50nm.Two mutually isostructural MCW structures faces are placed, and light goes out from the infrared laser 6 of air 5 Penetrate, incide Cr2+In doping after infrared gain media 4, the upper surface of lower floor's MCW structures is refracted to, penetrates metal film, in ripple When conducting shell 2 meets oscillating condition, oscillating field i.e. high-order mode are formed, phase place change peak can be produced at incidence point, this is also solved The displacement increased between incidence point and pip is released, light can not penetrate when reaching lower surface because substrate layer 1 is thicker.Coating Incidence point produces reverse displacement, negative side of the pip in the incidence point direction of propagation nearby due to the influence of high-order mode on layer 3 To, therefore light is propagated to the right in the direction of the arrow along " 8 " font light path, is finally returned in MCW structures low order end by infrared emergent light 8 Make the return trip empty gas.As shown in figure 3, once incident and primary event it will be considered as a reflection circulation, by the thickness for changing clad silverskin Degree, to control SnWith ZsBetween relation, light also changes therewith in the cycle-index needed for reflection process, therefore delay time is just It is adjusted.In Fig. 3, it is most high-order mode and time high-order mode coupling angle respectively that wavelength, which is 3 μm, 0.86 ° and 2.95 °,.
Device architecture preparation method of the present invention:
First pass through glass cutting machine and original sheet glass is cut into the thick rectangular body plate shapes of 3mm, and both sides finish of polishing, lead to After crossing ultrasonic wave cleaning slice, thin piece, the metal film of different-thickness is deposited by electron beam evaporation instrument respectively on two surfaces of glass.Steam Adhesive tape is sticked when plating a surface to another surface to protect, to ensure thickness accuracy.After completing two MCW structures, In central filler zinc sulfur materials, it is positioned on the optics indexing platform in free space, adjustment incident angle puts satisfaction coupling bar Part.

Claims (2)

  1. A kind of 1. middle infrared band adjustable light delay based on symmetric metal cladding waveguide, it is characterised in that:Two identical gold Category cladding waveguide face is placed, infrared gain media in being filled between two clads(4), infrared incident light(7)From air(5) In infrared laser(6)Infrared gain media in inciding(4), then by a series of anti-among two symmetrical waveguides Penetrate, by infrared emergent light(8)Returning air(5);
    Described two same metal cladding waveguides form by three-decker;Clad(3)For thickness 10-50nm Ag films, Ducting layer(2)For thickness 3-5mm chalcogenide infrared glass, substrate layer(1)For 200nm Ag films.
  2. 2. a kind of middle infrared band adjustable light delay based on symmetric metal cladding waveguide according to claim 1, its It is characterised by:Infrared gain media in described(4)For Cr2+Adulterate zinc chalcogenide material.
CN201510651312.3A 2015-10-10 2015-10-10 A kind of middle infrared band adjustable light delay based on symmetric metal cladding waveguide Expired - Fee Related CN105204115B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1420367A (en) * 2001-11-21 2003-05-28 中国科学院光电技术研究所 Metal enhanced reflection film and mfg. method thereof
CN1589513A (en) * 2001-09-20 2005-03-02 阿拉巴玛州立大学伯明翰研究基金会 Mid-ir microchip laser: ZnS:Cr2+ laser with saturable absorber material
CN102147537A (en) * 2010-02-05 2011-08-10 财团法人中央大学校产学协力团 Optical device using negative goos-hanchen shift

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1589513A (en) * 2001-09-20 2005-03-02 阿拉巴玛州立大学伯明翰研究基金会 Mid-ir microchip laser: ZnS:Cr2+ laser with saturable absorber material
CN1420367A (en) * 2001-11-21 2003-05-28 中国科学院光电技术研究所 Metal enhanced reflection film and mfg. method thereof
CN102147537A (en) * 2010-02-05 2011-08-10 财团法人中央大学校产学协力团 Optical device using negative goos-hanchen shift

Non-Patent Citations (5)

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Title
"Free-space coupling of a light beam into a symmetrical metal-cladding optical waveguide";Honggen Li 等;《Applied Physics Letters》;20031006;第83卷(第14期);第2757-2759页 *
"High Power Kerr-Lens Mode-Locked Femtosecond mid-IR Laser with Efficient Second Harmonic Generation in Polycrystalline Cr2+:ZnS and Cr2+:ZnSe";S. Vasilyev 等;《Advanced Solid State Lasers》;20141130;第AM3A.3页 *
"Large positive and negative lateral optical beam shift in prism-waveguide coupling system";Xuanbin Liu 等;《Physical Review E》;20060531;第73卷(第5期);第056617页 *
"Long-range surface modes of metal-clad four-layer waveguides";Fuzi Yang 等;《Applied Optics》;19861101;第25卷(第21期);第3903-3908页 *
"亚毫米尺度双面金属波导的超高阶模及其滤波特性研究";曹庄琪 等;《光学学报》;20060430;第26卷(第4期);第497-500页 *

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