CN105182597A - Manufacture method for COA type array substrate and manufacture method for color film substrate - Google Patents
Manufacture method for COA type array substrate and manufacture method for color film substrate Download PDFInfo
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- CN105182597A CN105182597A CN201510654244.6A CN201510654244A CN105182597A CN 105182597 A CN105182597 A CN 105182597A CN 201510654244 A CN201510654244 A CN 201510654244A CN 105182597 A CN105182597 A CN 105182597A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
Abstract
The invention provides a manufacture method for a COA type array substrate and a manufacture method for a color film substrate. According to the manufacture method for the COA type array substrate, an electrochemical deposit method is adopted, electrical signals are provided by a TFT circuit on a TFT substrate to directly deposit a first color resisting material molecular, a second color resisting material molecular and a third color resisting material molecular on a first pixel electrode, a second pixel electrode and a third pixel electrode respectively in a pixel electrode layer, and the color resisting material molecules are subjected to crosslinking polymerization to form a first color polymer thin film, a second color polymer thin film and a third color polymer thin film so as to form a color light-filtering layer, so that a manufacture process of the color light-filtering layer is simplified. The manufacture method for the color film substrate comprises the following steps: firstly, forming a patterned electrode layer on a substrate; secondly, depositing a first color resisting material molecular, a second color resisting material molecular and a third color resisting material molecular on a first electrode, a second electrode and a third electrode respectively in the electrode layer through the electrochemical deposit method; finally, performing crosslinking polymerization on the color resisting material molecules to form the first color polymer thin film, the second color polymer thin film and the third color polymer thin film, so as to form the color light-filtering layer. Through the adoption of the methods, the manufacture process of the color light-filtering layer is simplified.
Description
Technical field
The present invention relates to display technique field, particularly relate to a kind of method for making of COA type array base palte and the method for making of color membrane substrates.
Background technology
Liquid crystal indicator (LiquidCrystalDisplay, LCD) has that fuselage is thin, power saving, the many merits such as radiationless, be widely used.As: LCD TV, mobile phone, personal digital assistant (PDA), digital camera, computer screen or notebook computer screen etc.
Usual liquid crystal indicator comprises housing, is located at the liquid crystal panel in housing and is located at the backlight module (Backlightmodule) in housing.Wherein, the structure of liquid crystal panel is mainly by a thin-film transistor array base-plate (ThinFilmTransistorArraySubstrate, TFTArraySubstrate), a colored filter substrate (ColorFilterSubstrate, CFSubstrate) and the liquid crystal layer (LiquidCrystalLayer) be configured between two substrates formed, its principle of work is by applying the rotation that driving voltage controls the liquid crystal molecule of liquid crystal layer on two panels glass substrate, the light refraction of backlight module out being produced picture.
Colored filter is the key realizing liquid crystal display true color.The preparation of current colored filter mainly prepares R, G, B tri-coloured light resistance by photoetching process, complex process, cost are higher, and in order to avoid color blocking colour mixture, need prepare black matrix" (BlackMatrix, BM) separate assorted photoresist layer, the reduction of pixel aperture ratio can be caused like this.
Electrochemical deposition technique is the oxidation or reductive coupling reaction that utilize the organic molecule with electrochemical activity to occur at the contact interface of electrode and solution, thus on electrode, form the method for thin polymer film, is characterized in that technique is simple, with low cost; The character such as pattern, thickness, aggregated structure of film can by carrying out accuracy controlling to the selection of electrochemical deposition method and condition; The more important thing is, electrochemical deposition technique a step can complete synthesis and the orientated deposition film forming of organic molecule.
Summary of the invention
The object of the present invention is to provide a kind of method for making of COA type array base palte, utilize the method for electrochemical deposition to form chromatic filter layer, simplify the manufacturing process of chromatic filter layer.
The present invention also aims to the method for making that a kind of color membrane substrates is provided, utilize the method for electrochemical deposition to form chromatic filter layer, simplify the manufacturing process of chromatic filter layer.
For achieving the above object, the invention provides a kind of method for making of COA type array base palte, comprise the steps:
Step 1, provide a TFT substrate, the pixel electrode layer that described TFT substrate comprises underlay substrate, is located at the TFT layer on underlay substrate and is located on described TFT layer; Described pixel electrode layer comprises multiple first, second, third pixel electrodes in matrix distribution;
Step 2, utilize described first, second, third pixel electrode, electrochemical deposition method is adopted to deposit first, second, third chromogen bonded polymer film respectively on described first, second, third pixel electrode, the multiple first, second, third chromogen bonded polymer films be located on described pixel electrode layer form chromatic filter layer jointly, thus an obtained COA type array base palte.
In described step 2, the concrete steps that described first pixel electrode deposits the first chromogen bonded polymer film comprise:
Step 21, provide an electrode base board and electric supply installation, described TFT substrate is connected electric supply installation respectively with electrode base board, and described TFT substrate and electrode base board are immersed in the container being loaded with the first electrolyte solution, containing the first charged color blocking material molecule in described first electrolyte solution;
Step 22, apply opposite polarity voltage by described electric supply installation respectively on the first pixel electrode and electrode base board, the voltage that wherein said first pixel electrode applies is contrary with the described first charged polarity of color blocking material molecule institute, described first color blocking material molecule carries out depositing and cross-linked polymeric on described first pixel electrode, forms the first chromogen bonded polymer film;
Step 23, described TFT substrate cleaned and dries, the solution that removing is residual.
In described step 2, the concrete steps that described second pixel electrode deposits the second chromogen bonded polymer film comprise:
Step 24, provide an electrode base board and electric supply installation, the TFT substrate that deposited the first chromogen bonded polymer film is connected electric supply installation respectively with electrode base board, and TFT substrate and electrode base board are immersed in the container being loaded with the second electrolyte solution, containing the second charged color blocking material molecule in described second electrolyte solution;
Step 25, apply opposite polarity voltage by described electric supply installation respectively on the second pixel electrode and electrode base board, the voltage that wherein said second pixel electrode applies is contrary with the described second charged polarity of color blocking material molecule institute, described second color blocking material molecule carries out depositing and cross-linked polymeric on described second pixel electrode, forms the second chromogen bonded polymer film;
Step 26, described TFT substrate cleaned and dries, the solution that removing is residual.
In described step 2, the concrete steps that described 3rd pixel electrode deposits the 3rd chromogen bonded polymer film comprise:
Step 27, provide an electrode base board and electric supply installation, the TFT substrate that deposited first and second chromogen bonded polymer film is connected electric supply installation respectively with electrode base board, and TFT substrate and electrode base board are immersed in the container being loaded with the 3rd electrolyte solution, containing the 3rd charged color blocking material molecule in described 3rd electrolyte solution;
Step 28, apply opposite polarity voltage by described electric supply installation respectively on the 3rd pixel electrode and electrode base board, the voltage that wherein said 3rd pixel electrode applies is contrary with the described 3rd charged polarity of color blocking material molecule institute, described 3rd color blocking material molecule carries out depositing and cross-linked polymeric on described 3rd pixel electrode, forms the 3rd chromogen bonded polymer film;
Step 29, described TFT substrate cleaned and dries, the solution that removing is residual.
The color of described first, second, third chromogen bonded polymer film is respectively the permutation and combination of red, green, blue look according to random order.
The present invention also provides a kind of method for making of color membrane substrates, comprises the steps:
Step 10, provide a underlay substrate, described underlay substrate forms electrode layer; Described electrode layer comprises multiple first, second, third electrodes in matrix distribution;
Step 20, utilize described first, second, third electrode, electrochemical deposition method is adopted to deposit first, second, third chromogen bonded polymer film respectively on described first, second, third electrode, the multiple first, second, third chromogen bonded polymer films be located on described electrode layer form chromatic filter layer jointly, thus an obtained color membrane substrates.
In described step 20, the concrete steps depositing the first chromogen bonded polymer film on the first electrode comprise:
Step 210, provide an electrode base board and electric supply installation, described underlay substrate is connected electric supply installation respectively with electrode base board, and described underlay substrate and electrode base board are immersed in the container being loaded with the first electrolyte solution, containing the first charged color blocking material molecule in described first electrolyte solution;
Step 220, apply opposite polarity voltage by described electric supply installation respectively on the first electrode and electrode base board, the voltage that wherein said first electrode applies is contrary with the described first charged polarity of color blocking material molecule institute, described first color blocking material molecule carries out depositing and cross-linked polymeric on the first electrode, forms the first chromogen bonded polymer film;
Step 230, described underlay substrate cleaned and dries, the solution that removing is residual.
In described step 20, the concrete steps that described second electrode deposits the second chromogen bonded polymer film comprise:
Step 240, provide an electrode base board and electric supply installation, the underlay substrate that deposited the first chromogen bonded polymer film is connected electric supply installation respectively with electrode base board, and underlay substrate and electrode base board are immersed in the container being loaded with the second electrolyte solution, containing the second charged color blocking material molecule in described second electrolyte solution;
Step 250, apply opposite polarity voltage by described electric supply installation respectively on the second electrode and electrode base board, the voltage that wherein said second electrode applies is contrary with the described second charged polarity of color blocking material molecule institute, described second color blocking material molecule carries out depositing and cross-linked polymeric on described second electrode, forms the second chromogen bonded polymer film;
Step 260, described underlay substrate cleaned and dries, the solution that removing is residual.
In described step 20, the concrete steps that described 3rd electrode deposits the 3rd chromogen bonded polymer film comprise:
Step 270, provide an electrode base board and electric supply installation, the underlay substrate that deposited first and second chromogen bonded polymer film is connected electric supply installation respectively with electrode base board, and underlay substrate and electrode base board are immersed in the container being loaded with the 3rd electrolyte solution, containing the 3rd charged color blocking material molecule in described 3rd electrolyte solution;
Step 280, apply opposite polarity voltage by described electric supply installation respectively on the 3rd electrode and electrode base board, the voltage that wherein said 3rd electrode applies is contrary with the described 3rd charged polarity of color blocking material molecule institute, described 3rd color blocking material molecule carries out depositing and cross-linked polymeric on described 3rd electrode, forms the 3rd chromogen bonded polymer film;
Step 290, described underlay substrate cleaned and dries, the solution that removing is residual.
The color of described first, second, third chromogen bonded polymer film is respectively the permutation and combination of red, green, blue look according to random order.
Beneficial effect of the present invention: the invention provides a kind of method for making of COA type array base palte and the method for making of color membrane substrates.The method for making of COA type array base palte of the present invention, utilize the method for electrochemical deposition, thered is provided by the TFT circuit in TFT substrate and first, second, third pixel electrode of electric signal directly in pixel electrode layer deposit first, second, third color blocking material molecule respectively and makes its cross-linked polymeric, form first, second, third chromogen bonded polymer film, thus formation chromatic filter layer, simplify the manufacturing process of chromatic filter layer.The method for making of color membrane substrates of the present invention, first a underlay substrate is formed the electrode layer of a patterning, then the method for electrochemical deposition is utilized, first, second, third electrode in this electrode layer deposit respectively first, second, third color blocking material molecule and make its cross-linked polymeric, form first, second, third chromogen bonded polymer film, thus formation chromatic filter layer, simplify the manufacturing process of chromatic filter layer.
Accompanying drawing explanation
In order to further understand feature of the present invention and technology contents, refer to following detailed description for the present invention and accompanying drawing, but accompanying drawing only provides reference and explanation use, is not used for being limited the present invention.
In accompanying drawing,
The cross-sectional view of the TFT substrate that the method for making step 1 that Fig. 1 is COA type array base palte of the present invention provides;
Fig. 2 is the schematic top plan view of the TFT substrate of Fig. 1;
Fig. 3 is the schematic diagram of the method for making step 21 of COA type array base palte of the present invention;
Fig. 4 is the cross-sectional view of the substrate that the method for making step 22 of COA type array base palte of the present invention obtains;
Fig. 5 is the schematic top plan view of the substrate that the method for making step 22 of COA type array base palte of the present invention obtains;
Fig. 6 is the schematic diagram of the method for making step 24 of COA type array base palte of the present invention;
Fig. 7 is the cross-sectional view of the substrate that the method for making step 25 of COA type array base palte of the present invention obtains;
Fig. 8 is the schematic top plan view of the substrate that the method for making step 25 of COA type array base palte of the present invention obtains;
Fig. 9 is the schematic diagram of the method for making step 27 of COA type array base palte of the present invention;
Figure 10 is the cross-sectional view of the substrate that the method for making step 28 of COA type array base palte of the present invention obtains;
Figure 11 is the schematic top plan view of the substrate that the method for making step 28 of COA type array base palte of the present invention obtains;
Figure 12 is the cross-sectional view of the substrate that the method for making step 10 of color membrane substrates of the present invention obtains;
Figure 13 is the schematic top plan view of the substrate of Figure 12;
Figure 14 is the schematic diagram of the method for making step 210 of color membrane substrates of the present invention;
Figure 15 is the cross-sectional view of the substrate that the method for making step 220 of color membrane substrates of the present invention obtains;
Figure 16 is the schematic top plan view of the substrate that the method for making step 220 of color membrane substrates of the present invention obtains;
Figure 17 is the schematic diagram of the method for making step 240 of color membrane substrates of the present invention;
Figure 18 is the cross-sectional view of the substrate that the method for making step 250 of color membrane substrates of the present invention obtains;
Figure 19 is the schematic top plan view of the substrate that the method for making step 250 of color membrane substrates of the present invention obtains;
Figure 20 is the schematic diagram of the method for making step 270 of color membrane substrates of the present invention;
Figure 21 is the cross-sectional view of the substrate that the method for making step 280 of color membrane substrates of the present invention obtains;
Figure 22 is the schematic top plan view of the substrate that the method for making step 280 of color membrane substrates of the present invention obtains.
Embodiment
For further setting forth the technological means and effect thereof that the present invention takes, be described in detail below in conjunction with the preferred embodiments of the present invention and accompanying drawing thereof.
Refer to Fig. 1-11, the invention provides a kind of method for making of COA type array base palte, comprise the steps:
Step 1, refer to Fig. 1-2, provide a TFT substrate 1, the pixel electrode layer 10 that described TFT substrate 1 comprises underlay substrate 101, is located at the TFT layer 102 on underlay substrate 101 and is located on described TFT layer 102; Described pixel electrode layer 10 comprises multiple first, second, third pixel electrodes 11,12,13 in matrix distribution;
Concrete, described TFT substrate 1 comprises underlay substrate 101 and the TFT layer 102 be located on underlay substrate 101.
Step 2, refer to Fig. 3-11, utilize described first, second, third pixel electrode 11,12,13, electrochemical deposition method is adopted to deposit first, second, third chromogen bonded polymer film 21,22,23 respectively on described first, second, third pixel electrode 11,12,13, the multiple first, second, third chromogen bonded polymer films 21,22,23 be located on described pixel electrode layer 10 form chromatic filter layer 20 jointly, thus an obtained COA type array base palte.
Concrete, the color of described first, second, third chromogen bonded polymer film 21,22,23 is respectively red, green, the blue permutation and combination according to random order.
Refer to Fig. 3-5, in described step 2, the concrete steps that described first pixel electrode 11 deposits the first chromogen bonded polymer film 21 comprise:
Step 21, as shown in Figure 3, one electrode base board 9 and electric supply installation 2 are provided, described TFT substrate 1 is connected electric supply installation 2 respectively with electrode base board 9, and described TFT substrate 1 is immersed in the container 4 being loaded with the first electrolyte solution 41 with electrode base board 9, containing the first charged color blocking material molecule in described first electrolyte solution 41;
Step 22, as illustrated in figures 4-5, opposite polarity voltage is applied respectively on the first pixel electrode 11 and electrode base board 9 by described electric supply installation 2, the voltage that wherein said first pixel electrode 11 applies is contrary with the described first charged polarity of color blocking material molecule institute, described first color blocking material molecule carries out depositing and cross-linked polymeric on described first pixel electrode 11, forms the first chromogen bonded polymer film 21;
Step 23, described TFT substrate 1 is cleaned and dried, the solution that removing is residual.
Refer to Fig. 6-8, in described step 2, the concrete steps that described second pixel electrode 12 deposits the second chromogen bonded polymer film 22 comprise:
Step 24, as shown in Figure 6, one electrode base board 9 and electric supply installation 2 are provided, the TFT substrate 1 that deposited the first chromogen bonded polymer film 21 is connected electric supply installation 2 respectively with electrode base board 9, and TFT substrate 1 and electrode base board 9 are immersed in the container 4 being loaded with the second electrolyte solution 42, containing the second charged color blocking material molecule in described second electrolyte solution 42;
Step 25, as Figure 7-8, opposite polarity voltage is applied respectively on the second pixel electrode 12 and electrode base board 9 by described electric supply installation 2, the voltage that wherein said second pixel electrode 12 applies is contrary with the described second charged polarity of color blocking material molecule institute, described second color blocking material molecule carries out depositing and cross-linked polymeric on described second pixel electrode 12, forms the second chromogen bonded polymer film 22;
Step 26, described TFT substrate 1 is cleaned and dried, the solution that removing is residual.
Refer to Fig. 9-11, in described step 2, the concrete steps that described 3rd pixel electrode 13 deposits the 3rd chromogen bonded polymer film 23 comprise:
Step 27, as shown in Figure 9, one electrode base board 9 and electric supply installation 2 are provided, the TFT substrate 1 that deposited first and second chromogen bonded polymer film 21,22 is connected electric supply installation 2 respectively with electrode base board 9, and TFT substrate 1 and electrode base board 9 are immersed in the container 4 being loaded with the 3rd electrolyte solution 43, containing the 3rd charged color blocking material molecule in described 3rd electrolyte solution 43;
Step 28, as shown in figs. 10-11, opposite polarity voltage is applied respectively on the 3rd pixel electrode 13 and electrode base board 9 by described electric supply installation 2, the voltage that wherein said 3rd pixel electrode 13 applies is contrary with the described 3rd charged polarity of color blocking material molecule institute, described 3rd color blocking material molecule carries out depositing and cross-linked polymeric on described 3rd pixel electrode 13, forms the 3rd chromogen bonded polymer film 23;
Step 29, described TFT substrate 1 is cleaned and dried, the solution that removing is residual.
Concrete, described first, second, third color blocking material molecule is respectively the permutation and combination of red, green, blue look photoresist according to random order.
Concrete, by regulating the electrochemical parameter (as current potential, the scanning number of turns, reaction velocity) of electrochemical deposition, thickness and the shape of described first, second, third chromogen bonded polymer film 21,22,23 can be regulated.
Concrete, in the method for making of above-mentioned COA type array base palte, described electric supply installation 2 is connected with the TFT circuit in TFT substrate 1, the voltage that described electric supply installation 2 applies in described TFT substrate 1 is passed to pixel electrode layer 10 by the TFT circuit in described TFT substrate 1, thus realizes the deposition of described chromatic filter layer 20.
The method for making of COA type array base palte of the present invention, utilize pixel electrode layer 10 to deposit described chromatic filter layer 20, due to described pixel electrode layer 10 parts as TFT substrate, therefore do not need to make separately one electrode layer again, save cost of manufacture, technique is simple, when obtained COA type array base palte is applied to display panels, can improve the pixel aperture ratio of display panels.
Refer to Figure 12-22, the present invention also provides a kind of method for making of color membrane substrates, comprises the steps:
Step 10, refer to Figure 12-13, a underlay substrate 101 is provided, described underlay substrate 101 forms electrode layer 30; Described electrode layer 30 comprises multiple first, second, third electrodes 31,32,33 in matrix distribution;
Step 20, refer to Figure 14-22, utilize described first, second, third electrode 31,32,33, electrochemical deposition method is adopted to deposit first, second, third chromogen bonded polymer film 21,22,23 respectively on described first, second, third electrode 31,32,33, the multiple first, second, third chromogen bonded polymer films 21,22,23 be located on described electrode layer 30 form chromatic filter layer 20 jointly, thus an obtained color membrane substrates.
Concrete, the color of described first, second, third chromogen bonded polymer film 21,22,23 is respectively red, green, the blue permutation and combination according to random order.
Refer to Figure 14-16, in described step 20, the concrete steps that described first electrode 31 deposits the first chromogen bonded polymer film 21 comprise:
Step 210, as shown in figure 14, one electrode base board 9 and electric supply installation 2 are provided, described underlay substrate 3 is connected electric supply installation 2 respectively with electrode base board 9, and described underlay substrate 3 is immersed in the container 4 being loaded with the first electrolyte solution 41 with electrode base board 9, containing the first charged color blocking material molecule in described first electrolyte solution 41;
Step 220, as shown in figures 15-16, opposite polarity voltage is applied respectively on the first electrode 31 and electrode base board 9 by described electric supply installation 2, the voltage that wherein said first electrode 31 applies is contrary with the described first charged polarity of color blocking material molecule institute, described first color blocking material molecule carries out depositing and cross-linked polymeric on described first electrode 31, forms the first chromogen bonded polymer film 21;
Step 230, described underlay substrate 101 is cleaned and dried, the solution that removing is residual.
Refer to Figure 17-19, in described step 20, the concrete steps that described second electrode 32 deposits the second chromogen bonded polymer film 22 comprise:
Step 240, as shown in figure 17, one electrode base board 9 and electric supply installation 2 are provided, the underlay substrate 101 that deposited the first chromogen bonded polymer film 21 is connected electric supply installation 2 respectively with electrode base board 9, and underlay substrate 101 and electrode base board 9 are immersed in the container 4 being loaded with the second electrolyte solution 42, containing the second charged color blocking material molecule in described second electrolyte solution 42;
Step 250, as depicted in figs. 18-19, opposite polarity voltage is applied respectively on the second electrode 32 and electrode base board 9 by described electric supply installation 2, the voltage that wherein said second electrode 32 applies is contrary with the described second charged polarity of color blocking material molecule institute, described second color blocking material molecule carries out depositing and cross-linked polymeric on described second electrode 32, forms the second chromogen bonded polymer film 22;
Step 260, described underlay substrate 101 is cleaned and dried, the solution that removing is residual.
Refer to Figure 20-22, in described step 20, the concrete steps that described 3rd electrode 33 deposits the 3rd chromogen bonded polymer film 23 comprise:
Step 270, as shown in figure 20, one electrode base board 9 and electric supply installation 2 are provided, the underlay substrate 101 that deposited first and second chromogen bonded polymer film 21,22 is connected electric supply installation 2 respectively with electrode base board 9, and underlay substrate 101 and electrode base board 9 are immersed in the container 4 being loaded with the 3rd electrolyte solution 43, containing the 3rd charged color blocking material molecule in described 3rd electrolyte solution 43;
Step 280, as shown in fig. 21-22, opposite polarity voltage is applied respectively on the 3rd electrode 33 and electrode base board 9 by described electric supply installation 2, the voltage that wherein said 3rd electrode 33 applies is contrary with the described 3rd charged polarity of color blocking material molecule institute, described 3rd color blocking material molecule carries out depositing and cross-linked polymeric on described 3rd electrode 33, forms the 3rd chromogen bonded polymer film 23;
Step 290, described underlay substrate 101 is cleaned and dried, the solution that removing is residual.
Concrete, by regulating the electrochemical parameter (as current potential, the scanning number of turns, reaction velocity) of electrochemical deposition, thickness and the shape of described first, second, third chromogen bonded polymer film 21,22,23 can be regulated.
Concrete, described first, second, third color blocking material molecule is respectively the permutation and combination of red, green, blue look photoresist according to random order.
In sum, the invention provides a kind of method for making of COA type array base palte and the method for making of color membrane substrates.The method for making of COA type array base palte of the present invention, utilize the method for electrochemical deposition, thered is provided by the TFT circuit in TFT substrate and first, second, third pixel electrode of electric signal directly in pixel electrode layer deposit first, second, third color blocking material molecule respectively and makes its cross-linked polymeric, form first, second, third chromogen bonded polymer film, thus formation chromatic filter layer, simplify the manufacturing process of chromatic filter layer.The method for making of color membrane substrates of the present invention, first a underlay substrate is formed the electrode layer of a patterning, then the method for electrochemical deposition is utilized, first, second, third electrode in this electrode layer deposit respectively first, second, third color blocking material molecule and make its cross-linked polymeric, form first, second, third chromogen bonded polymer film, thus formation chromatic filter layer, simplify the manufacturing process of chromatic filter layer.
The above; for the person of ordinary skill of the art; can make other various corresponding change and distortion according to technical scheme of the present invention and technical conceive, and all these change and be out of shape the protection domain that all should belong to the accompanying claim of the present invention.
Claims (10)
1. a method for making for COA type array base palte, is characterized in that, comprises the steps:
Step 1, provide a TFT substrate (1), the pixel electrode layer (10) that described TFT substrate (1) comprises underlay substrate (101), is located at the TFT layer (102) on underlay substrate (101) and is located on described TFT layer (102); Described pixel electrode layer (10) comprises multiple first, second, third pixel electrodes (11,12,13) in matrix distribution;
Step 2, utilize described first, second, third pixel electrode (11,12,13), electrochemical deposition method is adopted to deposit first, second, third chromogen bonded polymer film (21,22,23) respectively on described first, second, third pixel electrode (11,12,13), the multiple first, second, third chromogen bonded polymer films (21,22,23) be located on described pixel electrode layer (10) form chromatic filter layer (20) jointly, thus an obtained COA type array base palte.
2. the method for making of COA type array base palte as claimed in claim 1, is characterized in that, in described step 2, comprising in the concrete steps of upper deposition first chromogen bonded polymer film (21) of described first pixel electrode (11):
Step 21, provide an electrode base board (9) and electric supply installation (2), described TFT substrate (1) is connected electric supply installation (2) respectively with electrode base board (9), and described TFT substrate (1) and electrode base board (9) are immersed in the container (4) being loaded with the first electrolyte solution (41), containing the first charged color blocking material molecule in described first electrolyte solution (41);
Step 22, apply opposite polarity voltage by described electric supply installation (2) respectively to the first pixel electrode (11) and electrode base board (9) are upper, the upper voltage applied of wherein said first pixel electrode (11) is contrary with the described first charged polarity of color blocking material molecule institute, described first color blocking material molecule carries out depositing and cross-linked polymeric on described first pixel electrode (11), forms the first chromogen bonded polymer film (21);
Step 23, described TFT substrate (1) is cleaned and dried, the solution that removing is residual.
3. the method for making of COA type array base palte as claimed in claim 1, is characterized in that, in described step 2, comprising in the concrete steps of upper deposition second chromogen bonded polymer film (22) of described second pixel electrode (12):
Step 24, provide an electrode base board (9) and electric supply installation (2), the TFT substrate (1) that deposited the first chromogen bonded polymer film (21) is connected electric supply installation (2) respectively with electrode base board (9), and TFT substrate (1) and electrode base board (9) are immersed in the container (4) being loaded with the second electrolyte solution (42), containing the second charged color blocking material molecule in described second electrolyte solution (42);
Step 25, apply opposite polarity voltage by described electric supply installation (2) respectively to the second pixel electrode (12) and electrode base board (9) are upper, the upper voltage applied of wherein said second pixel electrode (12) is contrary with the described second charged polarity of color blocking material molecule institute, described second color blocking material molecule carries out depositing and cross-linked polymeric on described second pixel electrode (12), forms the second chromogen bonded polymer film (22);
Step 26, described TFT substrate (1) is cleaned and dried, the solution that removing is residual.
4. the method for making of COA type array base palte as claimed in claim 1, is characterized in that, in described step 2, comprising in the concrete steps of the upper deposition the 3rd chromogen bonded polymer film (23) of described 3rd pixel electrode (13):
Step 27, provide an electrode base board (9) and electric supply installation (2), the TFT substrate (1) that deposited first and second chromogen bonded polymer film (21,22) is connected electric supply installation (2) respectively with electrode base board (9), and TFT substrate (1) and electrode base board (9) are immersed in the container (4) being loaded with the 3rd electrolyte solution (43), containing the 3rd charged color blocking material molecule in described 3rd electrolyte solution (43);
Step 28, apply opposite polarity voltage by described electric supply installation (2) respectively to the 3rd pixel electrode (13) and electrode base board (9) are upper, the upper voltage applied of wherein said 3rd pixel electrode (13) is contrary with the described 3rd charged polarity of color blocking material molecule institute, described 3rd color blocking material molecule carries out depositing and cross-linked polymeric on described 3rd pixel electrode (13), forms the 3rd chromogen bonded polymer film (23);
Step 29, described TFT substrate (1) is cleaned and dried, the solution that removing is residual.
5. the method for making of COA type array base palte as claimed in claim 1, it is characterized in that, the color of described first, second, third chromogen bonded polymer film (21,22,23) is respectively the permutation and combination of red, green, blue look according to random order.
6. a method for making for color membrane substrates, is characterized in that, comprises the steps:
Step 10, provide a underlay substrate (101), described underlay substrate (101) is formed electrode layer (30); Described electrode layer (30) comprises multiple first, second, third electrodes (31,32,33) in matrix distribution;
Step 20, utilize described first, second, third electrode (31,32,33), electrochemical deposition method is adopted to deposit first, second, third chromogen bonded polymer film (21,22,23) respectively on described first, second, third electrode (31,32,33), the multiple first, second, third chromogen bonded polymer films (21,22,23) be located on described electrode layer (30) form chromatic filter layer (20) jointly, thus an obtained color membrane substrates.
7. the method for making of color membrane substrates as claimed in claim 6, is characterized in that, in described step 20, comprising in the concrete steps of upper deposition first chromogen bonded polymer film (21) of described first electrode (31):
Step 210, provide an electrode base board (9) and electric supply installation (2), described underlay substrate (101) is connected electric supply installation (2) respectively with electrode base board (9), and described underlay substrate (101) and electrode base board (9) are immersed in the container (4) being loaded with the first electrolyte solution (41), containing the first charged color blocking material molecule in described first electrolyte solution (41);
Step 220, apply opposite polarity voltage by described electric supply installation (2) respectively to the first electrode (31) and electrode base board (9) are upper, the upper voltage applied of wherein said first electrode (31) is contrary with the described first charged polarity of color blocking material molecule institute, described first color blocking material molecule carries out depositing and cross-linked polymeric on described first electrode (41), forms the first chromogen bonded polymer film (21);
Step 230, described underlay substrate (101) is cleaned and dried, the solution that removing is residual.
8. the method for making of color membrane substrates as claimed in claim 6, is characterized in that, in described step 20, comprising in the concrete steps of upper deposition second chromogen bonded polymer film (22) of described second electrode (32):
Step 240, provide an electrode base board (9) and electric supply installation (2), the underlay substrate (101) that deposited the first chromogen bonded polymer film (21) is connected electric supply installation (2) respectively with electrode base board (9), and underlay substrate (101) and electrode base board (9) are immersed in the container (4) being loaded with the second electrolyte solution (42), containing the second charged color blocking material molecule in described second electrolyte solution (42);
Step 250, apply opposite polarity voltage by described electric supply installation (2) respectively to the second electrode (32) and electrode base board (9) are upper, the upper voltage applied of wherein said second electrode (32) is contrary with the described second charged polarity of color blocking material molecule institute, described second color blocking material molecule carries out depositing and cross-linked polymeric on described second electrode (32), forms the second chromogen bonded polymer film (22);
Step 260, described underlay substrate (101) is cleaned and dried, the solution that removing is residual.
9. the method for making of color membrane substrates as claimed in claim 6, is characterized in that, in described step 20, comprising in the concrete steps of the upper deposition the 3rd chromogen bonded polymer film (23) of described 3rd electrode (33):
Step 270, provide an electrode base board (9) and electric supply installation (2), the underlay substrate (101) that deposited first and second chromogen bonded polymer film (21,22) is connected electric supply installation (2) respectively with electrode base board (9), and underlay substrate (101) and electrode base board (9) are immersed in the container (4) being loaded with the 3rd electrolyte solution (43), containing the 3rd charged color blocking material molecule in described 3rd electrolyte solution (43);
Step 280, apply opposite polarity voltage by described electric supply installation (2) respectively to the 3rd electrode (33) and electrode base board (9) are upper, the upper voltage applied of wherein said 3rd electrode (33) is contrary with the described 3rd charged polarity of color blocking material molecule institute, described 3rd color blocking material molecule carries out depositing and cross-linked polymeric on described 3rd electrode (33), forms the 3rd chromogen bonded polymer film (23);
Step 290, described underlay substrate (101) is cleaned and dried, the solution that removing is residual.
10. the method for making of color membrane substrates as claimed in claim 6, it is characterized in that, the color of described first, second, third chromogen bonded polymer film (21,22,23) is respectively the permutation and combination of red, green, blue look according to random order.
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| CN105182597B (en) | 2019-01-22 |
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