CN105180969B - A kind of microthrust test batch dynamic testing method towards closed loop detection - Google Patents

A kind of microthrust test batch dynamic testing method towards closed loop detection Download PDF

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CN105180969B
CN105180969B CN201510725131.0A CN201510725131A CN105180969B CN 105180969 B CN105180969 B CN 105180969B CN 201510725131 A CN201510725131 A CN 201510725131A CN 105180969 B CN105180969 B CN 105180969B
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output signal
resistance
closed loop
multipliers
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CN105180969A (en
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刘俊
曹慧亮
石云波
申冲
唐军
马宗敏
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North University of China
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Abstract

The present invention relates to the dynamic calibration technology of silicon micromechanical gyroscope, specifically a kind of microthrust test batch dynamic testing method towards closed loop detection.The present invention solves the problems, such as that existing silicon micromechanical gyroscope dynamic calibrating method calibration result is inaccurate, calibration process wastes time and energy, it is low to demarcate efficiency.A kind of microthrust test batch dynamic testing method towards closed loop detection, this method are realized using following steps：1) each silicon micromechanical gyroscope is using individually driving closed loop；2) each silicon micromechanical gyroscope is equipped with an outer signal source jointly；Each silicon micromechanical gyroscope is equipped with single closed loop coriolis force equivalent signal generating means；3) each silicon micromechanical gyroscope is using individually detection closed loop；4) each silicon micromechanical gyroscope is equipped with single collecting device.The present invention is applied to the dynamic calibration of silicon micromechanical gyroscope.

Description

A kind of microthrust test batch dynamic testing method towards closed loop detection
Technical field
The present invention relates to the dynamic calibration technology of silicon micromechanical gyroscope, specifically a kind of microthrust test towards closed loop detection Batch dynamic testing method.
Background technology
Silicon micromechanical gyroscope is a kind of sensor using Coriolis effect principle sensitive carrier input angle speed information, its There is small volume, low in energy consumption, in light weight, cost is low, overload-resistant characteristic is strong, being easily integrated and produces in batches, and extensively It is general to be applied to numerous areas (such as inertial navigation, automotive safety, Industry Control, consumer electronics etc.).As shown in Figure 1-Figure 3, work The silicon micromechanical gyroscope made under closed loop detection state includes gyroscope structure, gyro telemetry circuit.The gyroscope structure includes Driving axial structure, detection axial arrangement.The detection axial arrangement includes detection force feedback structure, Ge Shi mass, detecting position Move extraction structure.The gyro telemetry circuit includes driving closed loop, detection closed loop.The driving closed loop includes Drive prime amplification interface, the secondary amplifier of driving, 90 ° of phase shifters, rectifier, driving low pass filter, drive displacement work Point sets device, driving comparator, drive displacement controller, driving modulator, driving direct current signal stacking apparatus.The detection Closed loop includes detection prime amplification interface, the secondary amplifier of detection, demodulator, the first low pass filter, detection closed loop control Device processed.The operation mode of silicon micromechanical gyroscope includes driven-mode and sensed-mode.During work, to silicon micromechanical gyroscope Ge Shi mass applies input angle speed signal, then the detection closed loop of silicon micromechanical gyroscope produces output signal.
The kinetic equation for the silicon micromechanical gyroscope being operated under closed loop detection state is：
Fdx=Fd sin(ωdt)
ωd=ωx
In formula (A1)：X is the displacement of driving axial structure；ωxFor the resonance angular frequency of silicon micromechanical gyroscope driven-mode Rate；QxFor the quality factor of silicon micromechanical gyroscope driven-mode；FdxFor the driving force suffered by driving axial structure；mxFor driving The equivalent mass of axial arrangement；kxFor driven-mode equivalent stiffness；cxFor driven-mode equivalent damping；FdDriven for driven-mode Power amplitude；ωdAngular frequency for driven-mode driving force (generally has ωd=ωx)；Y is the displacement of detection axial arrangement；ωyFor The resonance angular frequency of silicon micromechanical gyroscope sensed-mode；QyFor the quality factor of silicon micromechanical gyroscope sensed-mode；ΩzFor The input angle speed of silicon micromechanical gyroscope；kyFor sensed-mode equivalent stiffness；myTo detect the equivalent mass of axial arrangement；cy For sensed-mode equivalent damping；FcFor coriolis force；FfTo detect feedback force.
Due to silicon micromechanical gyroscope generally use Vacuum Package, cause the quality of silicon micromechanical gyroscope sensed-mode because Number is very big (more than 2000), therefore formula (A1) is further solved and can obtained：
X (t)=Ax cos(ωdt)
In formula (A2)-(A3)：X is the displacement of driving axial structure；AxFor the motion amplitude of driving axial structure；ωdTo drive The angular frequency of dynamic model state driving force；FdFor driven-mode driving force amplitude；mxFor the equivalent mass of driving axial structure；ωxFor silicon The resonance angular frequency of micro-mechanical gyroscope driven-mode；QxFor the quality factor of silicon micromechanical gyroscope driven-mode；Y is detection The displacement of axial arrangement；ΩzFor the input angle speed of silicon micromechanical gyroscope；ωyFor the humorous of silicon micromechanical gyroscope sensed-mode Shake angular frequency；QyFor the quality factor of silicon micromechanical gyroscope sensed-mode.Understood according to formula (A1)-(A3), the phase of coriolis force Position depends on the derivative of the displacement of driving axial structure, i.e. the phase of coriolis force differs with the phase of the displacement of driving axial structure 90 °, and the phase of the driving force suffered by driving axial structure differs 90 ° with the phase of the displacement of driving axial structure.
Because silicon micromechanical gyroscope has the characteristics of mass production, its dynamic calibration turns into the weight in its application process Want link.The dynamic calibration mainly includes：The demarcation of constant multiplier, the demarcation of bandwidth, the demarcation of constant multiplier symmetry, mark Spend demarcation, the demarcation of constant multiplier repeatability of factor nonlinearity.At present, the dynamic calibration of silicon micromechanical gyroscope is generally adopted Carried out with turntable or angle vibration table.Practice have shown that there are the following problems for such a scaling method：First, turntable or angle vibration table exist Caused error and interference can cause influence directly or indirectly to calibration result in operation, thus cause calibration result to be forbidden Really.Second, thus led in calibration process, it is necessary to the installation and removal between silicon micromechanical gyroscope and table top are repeated Calibration process is caused to waste time and energy.Moved third, such a scaling method can not carry out mass to multiple silicon micromechanical gyroscopes simultaneously State is demarcated, and thus causes demarcation efficiency low.
Based on this, it is necessary to invent a kind of brand-new silicon for the silicon micromechanical gyroscope being operated under closed loop detection state Micro-mechanical gyroscope dynamic calibrating method, to solve above mentioned problem existing for existing silicon micromechanical gyroscope dynamic calibrating method.
The content of the invention
Existing silicon micromechanical gyroscope dynamic calibrating method calibration result is inaccurate, calibration process expense in order to solve by the present invention When it is laborious, demarcation efficiency is low the problem of, there is provided a kind of microthrust test batch dynamic testing method towards closed loop detection.
The present invention adopts the following technical scheme that realization：A kind of microthrust test batch dynamic test side towards closed loop detection Method, this method are realized using following steps：
1) each silicon micromechanical gyroscope is using individually driving closed loop；Driving axial structure produces drive displacement Signal, and by drive displacement signal output to driving closed loop；Closed loop is driven to produce driving according to drive displacement signal Modal excitation signal, and driven-mode pumping signal is exported to driving axial structure so that the frequency of drive displacement signal with The resonance angular frequency of driven-mode is equal, and causes the amplitude remaining constant of drive displacement signal；Driven-mode pumping signal Specific generation step is as follows：
Driving prime amplification interface carries out extraction and preliminary amplification to drive displacement signal；
Secondary amplifier is driven further to amplify the output signal of driving prime amplification interface；
90 ° of phase shifters are changed to the output signal for driving secondary amplifier；Specific conversion formula is as follows：
XDEM=Vdac sin(ωdt) (A4)；
In formula (A4)：XDEM is the output signal of 90 ° of phase shifters；VdacTo drive the output signal of secondary amplifier；ωd For the angular frequency of driven-mode driving force；
Rectifier carries out rectification to the output signal of 90 ° of phase shifters；
Driving low pass filter extracts to the amplitude signal of the output signal of rectifier；
Comparator is driven to set the output of device to believe the output signal and drive displacement operating point that drive low pass filter Number it is compared；
Drive displacement controller produces control signal according to the output signal of driving comparator；
Modulator is driven on the basis of the output signal of 90 ° of phase shifters, the output signal of drive displacement controller is carried out Modulation；
Driving direct current signal stacking apparatus is overlapped to the output signal for driving modulator；
The output signal of direct current signal stacking apparatus is driven as driven-mode pumping signal；
2) each silicon micromechanical gyroscope is equipped with an outer signal source jointly；Each silicon micromechanical gyroscope is equipped with list Only closed loop coriolis force equivalent signal generating means；
The closed loop coriolis force equivalent signal generating means includes modulator, detects direct current signal stacking apparatus, be anti-phase Device, anti-phase adder；
The modulator includes AD633 multipliers, first resistor, second resistance；
The detection direct current signal stacking apparatus includes the first electric capacity, the 5th resistance；
The phase inverter includes the first operational amplifier, the 7th resistance, the 8th resistance；
The anti-phase adder includes the second operational amplifier, the 9th resistance, the tenth resistance, the 11st resistance；
No. 1 pin of AD633 multipliers is connected with the output end of 90 ° of phase shifters；No. 2 pins ground connection of AD633 multipliers； No. 3 pins of AD633 multipliers are connected with negative supply voltage；No. 4 pins of AD633 multipliers are grounded by first resistor； No. 5 pins of AD633 multipliers pass sequentially through second resistance, first resistor ground connection；No. 5 pins of AD633 multipliers pass through One electric capacity is connected with detecting the input of force feedback structure；No. 5 pins of AD633 multipliers pass sequentially through the first electric capacity, the 5th Resistance and DC voltage reference connection；No. 6 pins of AD633 multipliers are connected with positive supply voltage；No. 7 of AD633 multipliers Pin passes sequentially through the 11st resistance, the 9th resistance, the 8th resistance, the 7th resistance and is connected with the output end in outer signal source； No. 7 pins of AD633 multipliers pass sequentially through the negative of the 11st resistance, the 9th resistance, the 8th resistance and the first operational amplifier Input connects；No. 7 pins of AD633 multipliers pass sequentially through the 11st resistance, the 9th resistance and the first operational amplifier Output end connects；The positive input terminal ground connection of first operational amplifier；No. 7 pins of AD633 multipliers pass sequentially through the 11st electricity Resistance, the tenth resistance are connected with detecting the output end of closed loop controller；No. 7 pins of AD633 multipliers by the 11st resistance with The negative input end connection of second operational amplifier；No. 7 pins of AD633 multipliers and the output end of the second operational amplifier connect Connect；The positive input terminal ground connection of second operational amplifier；No. 8 pins ground connection of AD633 multipliers；
Closed loop coriolis force equivalent signal generating means is according to the output of the output signal, outer signal source of 90 ° of phase shifters Signal, the output signal generation coriolis force equivalent signal for detecting closed loop controller, and coriolis force equivalent signal is exported to detection Force feedback structure；The specific generation formula of coriolis force equivalent signal is as follows：
Vf=VfAC+VfDC(A5)；
VfAC=XDEM*Vfadd(A6)；
Vfadd=Vftest-Vclose(A7)；
In formula (A5)-(A7)：VfFor coriolis force equivalent signal；VfACFor the output signal of modulator；VfDCFor DC voltage Benchmark；XDEM is the output signal of 90 ° of phase shifters；VfaddFor the output signal of anti-phase adder；VftestFor outer signal source Output signal；VcloseTo detect the output signal of closed loop controller；
Detect force feedback structure and sensed-mode feedback force is produced according to coriolis force equivalent signal, and by sensed-mode feedback force Export to Ge Shi mass；The specific generation formula of sensed-mode feedback force it is following (why the formula represents as follows, be due to In comb structure, electrostatic force size is applied alive product by direct current and exchange and together decided on broach relevant parameter)：
Fyf=VfDCVfACKFBy(A8)；
In formula (A8)：FyfFor sensed-mode feedback force；VfDCFor DC voltage benchmark；VfACFor the output signal of modulator； KFByTo detect voltage-electrostatic force conversion coefficient of force feedback structure；
Ge Shi mass is made a concerted effort according to sensed-mode feedback force generation coriolis force is equivalent, and by the equivalent output with joint efforts of coriolis force extremely Detect displacement extraction structure；The equivalent specific generation formula with joint efforts of coriolis force is as follows：
Fceq=Fc+Fyf(A9)；
Fc=2AxmyωdΩz sin(ωdt) (A10)；
In formula (A9)-(A10)：FceqMake a concerted effort for coriolis force is equivalent；FcFor coriolis force；FyfFor sensed-mode feedback force；AxFor The motion amplitude of driving axial structure；myTo detect the equivalent mass of axial arrangement；ωdFor the angular frequency of driven-mode driving force； ΩzFor the input angle speed of silicon micromechanical gyroscope；
Formula (A4) is substituted into formula (A6), and convolution (A5)-(A10), can be obtained：
Fceq=[2AxmyωdΩz-VfDCVcloseKFByVdac+VfDCVftestKFByVdac]sin(ωdt) (A11)；
In formula (A11)：FceqMake a concerted effort for coriolis force is equivalent；AxFor the motion amplitude of driving axial structure；myFor detection axially The equivalent mass of structure；ωdFor the angular frequency of driven-mode driving force；ΩzFor the input angle speed of silicon micromechanical gyroscope；VfDC For DC voltage benchmark；VcloseTo detect the output signal of closed loop controller；KFByTo detect voltage-electrostatic of force feedback structure Power conversion coefficient；VdacTo drive the output signal of secondary amplifier；VftestFor the output signal in outer signal source；
Understood according to formula (A11), between the input angle speed of silicon micromechanical gyroscope and the output signal in outer signal source Transformational relation be：
In formula (A12)：ΩzFor the input angle speed of silicon micromechanical gyroscope；VfDCFor DC voltage benchmark；KFByFor detection The voltage of force feedback structure-electrostatic force conversion coefficient；VdacTo drive the output signal of secondary amplifier；VftestFor outer signal The output signal in source；AxFor the motion amplitude of driving axial structure；myTo detect the equivalent mass of axial arrangement；ωdTo drive mould The angular frequency of state driving force；
Understood according to formula (A12), by adjusting the output signal in outer signal source, can equally obtain silicon micro mechanical top The input angle speed of spiral shell instrument；
Detect displacement extraction structure to make a concerted effort to produce detection displacement signal according to coriolis force is equivalent, and it is defeated to detect displacement signal Go out to detection closed loop；
3) each silicon micromechanical gyroscope is using individually detection closed loop；Closed loop is detected according to detection displacement Signal produces final output signal；The specific generation step of final output signal is as follows：
Detection prime amplification interface is converted into voltage signal by displacement signal is detected, and voltage signal is tentatively put Greatly；
Secondary amplifier is detected further to amplify the output signal of detection prime amplification interface；
The output signal demodulation for detecting secondary amplifier is two on the basis of the output signal of 90 ° of phase shifters by demodulator Frequency-doubled signal and direct current signal, and two frequency-doubled signals and direct current signal are exported to the first low pass filter；
First low pass filter filters out two frequency-doubled signals, and by DC signal output to detecting closed loop controller；
The output signal of closed loop controller is detected as final output signal；
4) each silicon micromechanical gyroscope is equipped with single collecting device；Collecting device gathers final output signal, and The output signal of final output signal and outer signal source is contrasted, then comparing result analyzed, and according to point Analyse result and carry out the demarcation of constant multiplier, the demarcation of bandwidth, the demarcation of constant multiplier symmetry, the mark of scale factory non-linearity degree Fixed, constant multiplier repeatability demarcation.
It is of the present invention a kind of towards the micro- of closed loop detection compared with existing silicon micromechanical gyroscope dynamic calibrating method Gyro batch dynamic testing method no longer uses turntable or angle vibration table, but the driven-mode in silicon micromechanical gyroscope is normal On the premise of work, the output signal in outer signal source is modulated by using the output signal of 90 ° of phase shifters, is realized by closing Ring type coriolis force equivalent signal generating means exports coriolis force equivalent signal, thus achieves the dynamic mark of silicon micromechanical gyroscope It is fixed.Therefore, a kind of microthrust test batch dynamic testing method towards closed loop detection of the present invention has the following advantages that：Its One, a kind of microthrust test batch dynamic testing method towards closed loop detection of the present invention thoroughly avoids turntable or angular oscillation The error of platform and the interference influence to caused by calibration result, so that calibration result is more accurate.It is second, of the present invention A kind of microthrust test batch dynamic testing method towards closed loop detection need not carry out the peace between silicon micromechanical gyroscope and table top Assembly and disassembly, so that calibration process is time saving and energy saving.A kind of third, microthrust test batch towards closed loop detection of the present invention Amount dynamic testing method realizes while carries out mass dynamic calibration to multiple silicon micromechanical gyroscopes, thus increases substantially Demarcation efficiency.
The present invention efficiently solves existing silicon micromechanical gyroscope dynamic calibrating method calibration result inaccuracy, calibration process Waste time and energy, demarcate the problem of efficiency is low, suitable for the dynamic calibration of silicon micromechanical gyroscope.
Brief description of the drawings
Fig. 1 is the structural representation for the silicon micromechanical gyroscope being operated under closed loop detection state.
Fig. 2 is the structural representation of the driving closed loop for the silicon micromechanical gyroscope being operated under closed loop detection state.
Fig. 3 is the structural representation of the detection closed loop for the silicon micromechanical gyroscope being operated under closed loop detection state.
Fig. 4 is the structural representation of outer signal source and the closed loop coriolis force equivalent signal generating means of the present invention.
Fig. 5 is the step 2) of the present invention and the schematic diagram of step 3).
Fig. 6 is the first structural representation of the closed loop coriolis force equivalent signal generating means of the present invention.
Fig. 7 is second of structural representation of the closed loop coriolis force equivalent signal generating means of the present invention.
Fig. 8 is the general illustration of the present invention.
Embodiment
A kind of microthrust test batch dynamic testing method towards closed loop detection, this method are realized using following steps：
1) each silicon micromechanical gyroscope is using individually driving closed loop；Driving axial structure produces drive displacement Signal XV, and drive displacement signal XV is exported to driving closed loop；Closed loop is driven to be produced according to drive displacement signal XV Raw driven-mode pumping signal XS, and driven-mode pumping signal XS is exported to driving axial structure so that drive displacement is believed Number XV frequency is equal with the resonance angular frequency of driven-mode, and causes drive displacement signal XV amplitude remaining constant；Driving Modal excitation signal XS specific generation step is as follows：
Driving prime amplification interface carries out extraction and preliminary amplification to drive displacement signal XV；
Secondary amplifier is driven further to amplify the output signal of driving prime amplification interface；
90 ° of phase shifters are changed to the output signal for driving secondary amplifier；Specific conversion formula is as follows：
XDEM=Vdac sin(ωdt) (A4)；
In formula (A4)：XDEM is the output signal of 90 ° of phase shifters；VdacTo drive the output signal of secondary amplifier；ωd For the angular frequency of driven-mode driving force；
Rectifier carries out rectification to the output signal XDEM of 90 ° of phase shifters；
Driving low pass filter extracts to the amplitude signal of the output signal of rectifier；
Comparator is driven to set the output of device to believe the output signal and drive displacement operating point that drive low pass filter Number it is compared；
Drive displacement controller produces control signal according to the output signal of driving comparator；
Modulator is driven on the basis of the output signal of 90 ° of phase shifters, the output signal of drive displacement controller is carried out Modulation；
Driving direct current signal stacking apparatus is overlapped to the output signal for driving modulator；
The output signal of direct current signal stacking apparatus is driven as driven-mode pumping signal XS；
2) each silicon micromechanical gyroscope is equipped with an outer signal source jointly；Each silicon micromechanical gyroscope is equipped with list Only closed loop coriolis force equivalent signal generating means；
The closed loop coriolis force equivalent signal generating means includes modulator, detects direct current signal stacking apparatus, be anti-phase Device, anti-phase adder；
The modulator includes AD633 multipliers N, first resistor R1, second resistance R2；
The detection direct current signal stacking apparatus includes the first electric capacity C1, the 5th resistance R5；
The phase inverter includes the first operational amplifier T1, the 7th resistance R7, the 8th resistance R8；
The anti-phase adder includes the second operational amplifier T2, the 9th resistance R9, the tenth resistance R10, the 11st resistance R11；
AD633 multipliers N No. 1 pin is connected with the output end of 90 ° of phase shifters；AD633 multipliers N No. 2 pins connect Ground；AD633 multipliers N No. 3 pins are connected with negative supply voltage-VCC；AD633 multipliers N No. 4 pins pass through the first electricity Hinder R1 ground connection；AD633 multipliers N No. 5 pins pass sequentially through second resistance R2, first resistor R1 ground connection；AD633 multipliers N No. 5 pins by the first electric capacity C1 with detect force feedback structure input be connected；AD633 multipliers N No. 5 pins are successively Pass through the first electric capacity C1, the 5th resistance R5 and DC voltage benchmark VfDCConnection；AD633 multipliers N No. 6 pins and positive power supply Voltage+VCC connections；AD633 multipliers N No. 7 pins pass sequentially through the 11st resistance R11, the 9th resistance R9, the 8th resistance R8, the 7th resistance R7 are connected with the output end in outer signal source；AD633 multipliers N No. 7 pins pass sequentially through the 11st resistance R11, the 9th resistance R9, the 8th resistance R8 are connected with the first operational amplifier T1 negative input end；No. 7 of AD633 multipliers N are drawn Pin passes sequentially through the 11st resistance R11, the 9th resistance R9 is connected with the first operational amplifier T1 output end；First operation amplifier Device T1 positive input terminal ground connection；AD633 multipliers N No. 7 pins pass sequentially through the 11st resistance R11, the tenth resistance R10 and inspection Survey the output end connection of closed loop controller；AD633 multipliers N No. 7 pins pass through the 11st resistance R11 and the second operation amplifier Device T2 negative input end connection；AD633 multipliers N No. 7 pins are connected with the second operational amplifier T2 output end；Second fortune Calculate amplifier T2 positive input terminal ground connection；AD633 multipliers N No. 8 pins ground connection；
Closed loop coriolis force equivalent signal generating means is according to the output signal XDEM of 90 ° of phase shifters, outer signal source Output signal Vftest, detection closed loop controller output signal VcloseProduce coriolis force equivalent signal Vf, and coriolis force is equivalent Signal VfOutput extremely detection force feedback structure；Coriolis force equivalent signal VfSpecific generation formula it is as follows：
Vf=VfAC+VfDC(A5)；
VfAC=XDEM*Vfadd(A6)；
Vfadd=Vftest-Vclose(A7)；
In formula (A5)-(A7)：VfFor coriolis force equivalent signal；VfACFor the output signal of modulator；VfDCFor DC voltage Benchmark；XDEM is the output signal of 90 ° of phase shifters；VfaddFor the output signal of anti-phase adder；VftestFor outer signal source Output signal；VcloseTo detect the output signal of closed loop controller；
Force feedback structure is detected according to coriolis force equivalent signal VfProduce sensed-mode feedback force Fyf, and sensed-mode is anti- Present power FyfExport to Ge Shi mass；Sensed-mode feedback force FyfSpecific generation formula it is as follows：
Fyf=VfDCVfACKFBy(A8)；
In formula (A8)：FyfFor sensed-mode feedback force；VfDCFor DC voltage benchmark；VfACFor the output signal of modulator； KFByTo detect voltage-electrostatic force conversion coefficient of force feedback structure；
Ge Shi mass is according to sensed-mode feedback force FyfProduce the equivalent F that makes a concerted effort of coriolis forceceq, and coriolis force is equivalent with joint efforts FceqStructure is extracted in output to detection displacement；The equivalent F that makes a concerted effort of coriolis forceceqSpecific generation formula it is as follows：
Fceq=Fc+Fyf(A9)；
Fc=2AxmyωdΩzsin(ωdt) (A10)；
In formula (A9)-(A10)：FceqMake a concerted effort for coriolis force is equivalent；FcFor coriolis force；FyfFor sensed-mode feedback force；AxFor The motion amplitude of driving axial structure；myTo detect the equivalent mass of axial arrangement；ωdFor the angular frequency of driven-mode driving force； ΩzFor the input angle speed of silicon micromechanical gyroscope；
Formula (A4) is substituted into formula (A6), and convolution (A5)-(A10), can be obtained：
Fceq=[2AxmyωdΩz-VfDCVcloseKFByVdac+VfDCVftestKFByVdac]sin(ωdt) (A11)；
In formula (A11)：FceqMake a concerted effort for coriolis force is equivalent；AxFor the motion amplitude of driving axial structure；myFor detection axially The equivalent mass of structure；ωdFor the angular frequency of driven-mode driving force；ΩzFor the input angle speed of silicon micromechanical gyroscope；VfDC For DC voltage benchmark；VcloseTo detect the output signal of closed loop controller；KFByTo detect voltage-electrostatic of force feedback structure Power conversion coefficient；VdacTo drive the output signal of secondary amplifier；VftestFor the output signal in outer signal source；
Understood according to formula (A11), between the input angle speed of silicon micromechanical gyroscope and the output signal in outer signal source Transformational relation be：
In formula (A12)：ΩzFor the input angle speed of silicon micromechanical gyroscope；VfDCFor DC voltage benchmark；KFByFor detection The voltage of force feedback structure-electrostatic force conversion coefficient；VdacTo drive the output signal of secondary amplifier；VftestFor outer signal The output signal in source；AxFor the motion amplitude of driving axial structure；myTo detect the equivalent mass of axial arrangement；ωdTo drive mould The angular frequency of state driving force；
Understood according to formula (A12), by adjusting the output signal in outer signal source, can equally obtain silicon micro mechanical top The input angle speed of spiral shell instrument；
Displacement extraction structure is detected according to the equivalent F that makes a concerted effort of coriolis forceceqDetection displacement signal YV is produced, and displacement will be detected Signal YV is exported to detection closed loop；
3) each silicon micromechanical gyroscope is using individually detection closed loop；Closed loop is detected according to detection displacement Signal YV produces final output signal；The specific generation step of final output signal is as follows：
Detection prime amplification interface is converted into voltage signal by displacement signal YV is detected, and voltage signal is tentatively put Greatly；
Secondary amplifier is detected further to amplify the output signal of detection prime amplification interface；
The output signal demodulation for detecting secondary amplifier is two on the basis of the output signal of 90 ° of phase shifters by demodulator Frequency-doubled signal and direct current signal, and two frequency-doubled signals and direct current signal are exported to the first low pass filter；
First low pass filter filters out two frequency-doubled signals, and by DC signal output to detecting closed loop controller；
Detect the output signal V of closed loop controllercloseAs final output signal；
4) each silicon micromechanical gyroscope is equipped with single collecting device；Collecting device gathers final output signal, and The output signal of final output signal and outer signal source is contrasted, then comparing result analyzed, and according to point Analyse result and carry out the demarcation of constant multiplier, the demarcation of bandwidth, the demarcation of constant multiplier symmetry, the mark of scale factory non-linearity degree Fixed, constant multiplier repeatability demarcation.
When it is implemented, as shown in fig. 7, the modulator also includes the 3rd operational amplifier T3,3rd resistor R3, the 4th Resistance R4；The detection direct current signal stacking apparatus also includes the second electric capacity C2, the 6th resistance R6；No. 5 of AD633 multipliers N Pin passes sequentially through 3rd resistor R3, the 4th resistance R4, the second electric capacity C2, the 6th resistance R6 and DC voltage benchmark VfDCConnection； AD633 multipliers N No. 5 pins pass sequentially through 3rd resistor R3, the 4th resistance R4, the second electric capacity C2 and detection force feedback structure Input connection；AD633 multipliers N No. 5 pins pass sequentially through 3rd resistor R3, the 4th resistance R4 and the 3rd operation amplifier Device T3 output end connection；AD633 multipliers N No. 5 pins pass through the negative defeated of 3rd resistor R3 and the 3rd operational amplifier T3 Enter end connection；3rd operational amplifier T3 positive input terminal ground connection.Closed loop coriolis force equivalent signal generating means shown in Fig. 7 For push-pull type structure, it is applied to the silicon micromechanical gyroscope using push-pull type structure.

Claims (2)

  1. A kind of 1. microthrust test batch dynamic testing method towards closed loop detection, it is characterised in that：This method is using following step Suddenly realize：
    1) each silicon micromechanical gyroscope is using individually driving closed loop；Driving axial structure produces drive displacement signal XV, and drive displacement signal XV is exported to driving closed loop；Closed loop is driven to produce drive according to drive displacement signal XV Dynamic model state pumping signal XS, and driven-mode pumping signal XS is exported to driving axial structure so that drive displacement signal XV Frequency it is equal with the resonance angular frequency of driven-mode, and cause drive displacement signal XV amplitude remaining constant；Driven-mode Pumping signal XS specific generation step is as follows：
    Driving prime amplification interface carries out extraction and preliminary amplification to drive displacement signal XV；
    Secondary amplifier is driven further to amplify the output signal of driving prime amplification interface；
    90 ° of phase shifters are changed to the output signal for driving secondary amplifier；Specific conversion formula is as follows：
    XDEM=Vdacsin(ωdt) (A4)；
    In formula (A4)：XDEM is the output signal of 90 ° of phase shifters；VdacTo drive the output signal of secondary amplifier；ωdFor driving The angular frequency of mode driving force；
    Rectifier carries out rectification to the output signal XDEM of 90 ° of phase shifters；
    Driving low pass filter extracts to the amplitude signal of the output signal of rectifier；
    Driving comparator sets the output signal of device to enter the output signal and drive displacement operating point that drive low pass filter Row compares；
    Drive displacement controller produces control signal according to the output signal of driving comparator；
    Modulator is driven to be modulated on the basis of the output signal of 90 ° of phase shifters to the output signal of drive displacement controller；
    Driving direct current signal stacking apparatus is overlapped to the output signal for driving modulator；
    The output signal of direct current signal stacking apparatus is driven as driven-mode pumping signal XS；
    2) each silicon micromechanical gyroscope is equipped with an outer signal source jointly；Each silicon micromechanical gyroscope is equipped with individually Closed loop coriolis force equivalent signal generating means；
    The closed loop coriolis force equivalent signal generating means includes modulator, detection direct current signal stacking apparatus, phase inverter, anti- It is added musical instruments used in a Buddhist or Taoist mass；
    The modulator includes AD633 multipliers (N), first resistor (R1), second resistance (R2)；
    The detection direct current signal stacking apparatus includes the first electric capacity (C1), the 5th resistance (R5)；
    The phase inverter includes the first operational amplifier (T1), the 7th resistance (R7), the 8th resistance (R8)；
    The anti-phase adder includes the second operational amplifier (T2), the 9th resistance (R9), the tenth resistance (R10), the 11st electricity Hinder (R11)；
    No. 1 pin of AD633 multipliers (N) is connected with the output end of 90 ° of phase shifters；No. 2 pins of AD633 multipliers (N) connect Ground；No. 3 pins of AD633 multipliers (N) are connected with negative supply voltage (- VCC)；No. 4 pins of AD633 multipliers (N) pass through First resistor (R1) is grounded；No. 5 pins of AD633 multipliers (N) pass sequentially through second resistance (R2), first resistor (R1) connects Ground；No. 5 pins of AD633 multipliers (N) are connected by the first electric capacity (C1) with detecting the input of force feedback structure；AD633 No. 5 pins of multiplier (N) pass sequentially through the first electric capacity (C1), the 5th resistance (R5) and DC voltage benchmark (VfDC) connection； No. 6 pins of AD633 multipliers (N) are connected with positive supply voltage (+VCC)；No. 7 pins of AD633 multipliers (N) pass sequentially through 11st resistance (R11), the 9th resistance (R9), the 8th resistance (R8), the 7th resistance (R7) and the output end in outer signal source connect Connect；No. 7 pins of AD633 multipliers (N) pass sequentially through the 11st resistance (R11), the 9th resistance (R9), the 8th resistance (R8) with The negative input end connection of first operational amplifier (T1)；No. 7 pins of AD633 multipliers (N) pass sequentially through the 11st resistance (R11), the 9th resistance (R9) is connected with the output end of the first operational amplifier (T1)；The positive input of first operational amplifier (T1) End ground connection；No. 7 pins of AD633 multipliers (N) pass sequentially through the 11st resistance (R11), the tenth resistance (R10) and detection closed loop The output end connection of controller；No. 7 pins of AD633 multipliers (N) pass through the 11st resistance (R11) and the second operational amplifier (T2) negative input end connection；No. 7 pins of AD633 multipliers (N) are connected with the output end of the second operational amplifier (T2)；The The positive input terminal ground connection of two operational amplifiers (T2)；No. 8 pins ground connection of AD633 multipliers (N)；
    Closed loop coriolis force equivalent signal generating means is according to the output signal XDEM, outer signal source of 90 ° of phase shifters output Signal Vftest, detection closed loop controller output signal VcloseProduce coriolis force equivalent signal Vf, and by coriolis force equivalent signal VfOutput extremely detection force feedback structure；Coriolis force equivalent signal VfSpecific generation formula it is as follows：
    Vf=VfAC+VfDC(A5)；
    VfAC=XDEM*Vfadd(A6)；
    Vfadd=Vftest-Vclose(A7)；
    In formula (A5)-(A7)：VfFor coriolis force equivalent signal；VfACFor the output signal of modulator；VfDCFor DC voltage benchmark； VfaddFor the output signal of anti-phase adder；VftestFor the output signal in outer signal source；VcloseFor detection closed loop controller Output signal；
    Force feedback structure is detected according to coriolis force equivalent signal VfProduce sensed-mode feedback force Fyf, and by sensed-mode feedback force FyfExport to Ge Shi mass；Sensed-mode feedback force FyfSpecific generation formula it is as follows：
    Fyf=VfDCVfACKFBy(A8)；
    In formula (A8)：FyfFor sensed-mode feedback force；KFByTo detect voltage-electrostatic force conversion coefficient of force feedback structure；
    Ge Shi mass is according to sensed-mode feedback force FyfProduce the equivalent F that makes a concerted effort of coriolis forceceq, and by coriolis force it is equivalent make a concerted effort FceqIt is defeated Go out to detection displacement extraction structure；The equivalent F that makes a concerted effort of coriolis forceceqSpecific generation formula it is as follows：
    Fceq=Fc+Fyf(A9)；
    Fc=2AxmyωdΩzsin(ωdt) (A10)；
    In formula (A9)-(A10)：FceqMake a concerted effort for coriolis force is equivalent；FcFor coriolis force；AxFor the motion amplitude of driving axial structure； myTo detect the equivalent mass of axial arrangement；ΩzFor the input angle speed of silicon micromechanical gyroscope；
    Formula (A4) is substituted into formula (A6), and convolution (A5)-(A10), can be obtained：
    Fceq=[2AxmyωdΩz-VfDCVcloseKFByVdac+VfDCVftestKFByVdac]sin(ωdt) (A11)；
    Understood according to formula (A11), turned between the input angle speed of silicon micromechanical gyroscope and the output signal in outer signal source The relation of changing is：
    <mrow> <msub> <mi>&amp;Omega;</mi> <mi>z</mi> </msub> <mo>=</mo> <mfrac> <mrow> <msub> <mi>V</mi> <mrow> <mi>f</mi> <mi>D</mi> <mi>C</mi> </mrow> </msub> <msub> <mi>K</mi> <mrow> <mi>F</mi> <mi>B</mi> <mi>y</mi> </mrow> </msub> <msub> <mi>V</mi> <mrow> <mi>d</mi> <mi>a</mi> <mi>c</mi> </mrow> </msub> </mrow> <mrow> <mn>2</mn> <msub> <mi>A</mi> <mi>x</mi> </msub> <msub> <mi>m</mi> <mi>y</mi> </msub> <msub> <mi>&amp;omega;</mi> <mi>d</mi> </msub> </mrow> </mfrac> <msub> <mi>V</mi> <mrow> <mi>f</mi> <mi>t</mi> <mi>e</mi> <mi>s</mi> <mi>t</mi> </mrow> </msub> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mi>A</mi> <mn>12</mn> <mo>)</mo> </mrow> <mo>;</mo> </mrow>
    Understood according to formula (A12), by adjusting the output signal in outer signal source, can equally obtain silicon micromechanical gyroscope Input angle speed；
    Displacement extraction structure is detected according to the equivalent F that makes a concerted effort of coriolis forceceqDetection displacement signal YV is produced, and displacement signal will be detected YV is exported to detection closed loop；
    3) each silicon micromechanical gyroscope is using individually detection closed loop；Closed loop is detected according to detection displacement signal YV produces final output signal；The specific generation step of final output signal is as follows：
    Detection prime amplification interface is converted into voltage signal by displacement signal YV is detected, and voltage signal is tentatively amplified；
    Secondary amplifier is detected further to amplify the output signal of detection prime amplification interface；
    The output signal demodulation for detecting secondary amplifier is two frequencys multiplication on the basis of the output signal of 90 ° of phase shifters by demodulator Signal and direct current signal, and two frequency-doubled signals and direct current signal are exported to the first low pass filter；
    First low pass filter filters out two frequency-doubled signals, and by DC signal output to detecting closed loop controller；
    Detect the output signal V of closed loop controllercloseAs final output signal；
    4) each silicon micromechanical gyroscope is equipped with single collecting device；Collecting device gathers final output signal, and will most Whole output signal and the output signal in outer signal source are contrasted, and then comparing result is analyzed, and are tied according to analysis Fruit carry out the demarcation of constant multiplier, the demarcation of bandwidth, the demarcation of constant multiplier symmetry, the demarcation of scale factory non-linearity degree, The demarcation of constant multiplier repeatability.
  2. A kind of 2. microthrust test batch dynamic testing method towards closed loop detection according to claim 1, it is characterised in that： The modulator also includes the 3rd operational amplifier (T3), 3rd resistor (R3), the 4th resistance (R4)；The detection direct current signal Stacking apparatus also includes the second electric capacity (C2), the 6th resistance (R6)；No. 5 pins of AD633 multipliers (N) pass sequentially through the 3rd electricity Hinder (R3), the 4th resistance (R4), the second electric capacity (C2), the 6th resistance (R6) and DC voltage benchmark (VfDC) connection；AD633 multiplies No. 5 pins of musical instruments used in a Buddhist or Taoist mass (N) pass sequentially through 3rd resistor (R3), the 4th resistance (R4), the second electric capacity (C2) and detection force feedback knot The input connection of structure；No. 5 pins of AD633 multipliers (N) pass sequentially through 3rd resistor (R3), the 4th resistance (R4) and the 3rd The output end connection of operational amplifier (T3)；No. 5 pins of AD633 multipliers (N) pass through 3rd resistor (R3) and the 3rd computing The negative input end connection of amplifier (T3)；The positive input terminal ground connection of 3rd operational amplifier (T3).
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