CN105173129B - Triaxial air bearing table leveling method - Google Patents

Triaxial air bearing table leveling method Download PDF

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CN105173129B
CN105173129B CN201510601014.3A CN201510601014A CN105173129B CN 105173129 B CN105173129 B CN 105173129B CN 201510601014 A CN201510601014 A CN 201510601014A CN 105173129 B CN105173129 B CN 105173129B
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air bearing
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康国华
潘俊帆
范凯
周琼峰
陈雪芬
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Nanjing University of Aeronautics and Astronautics
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Abstract

本发明公开了一种三轴气浮台调平系统及方法,其中,三轴气浮台调平系统包含三组飞轮模块、三组砝码平衡模块以及四组喷气模块,飞轮模块与砝码平衡模块均对应X,Y,Z轴,两两正交布置,四组喷气模块设置在三轴气浮台的边缘上的正X轴、负X轴、正Y轴和负Y轴方向;飞轮模块用于维持气浮台的姿态,喷气模块用于飞轮模块的卸载。砝码平衡模块用于调整气浮台的重心,根据飞轮模块加速度的大小及方向,自动进行方向和移动量的选择,实现快速、准确的自动重心配平。本发明结构简单、操作方便、成本低廉,可以实现快速准确平衡,并且突破了以往重心调节仅仅局限于X,Y平面内的限制。

The invention discloses a three-axis air bearing platform leveling system and method, wherein the three-axis air bearing platform leveling system includes three sets of flywheel modules, three sets of weight balance modules and four sets of air injection modules, the flywheel module and the weight The balance modules are all corresponding to the X, Y, and Z axes, and are arranged orthogonally in pairs. Four sets of jet modules are set on the edge of the three-axis air bearing table in the directions of the positive X axis, negative X axis, positive Y axis and negative Y axis; the flywheel The module is used to maintain the attitude of the air bearing platform, and the jet module is used to unload the flywheel module. The weight balance module is used to adjust the center of gravity of the air bearing platform. According to the magnitude and direction of the acceleration of the flywheel module, the direction and the amount of movement are automatically selected to achieve fast and accurate automatic center of gravity balance. The invention has the advantages of simple structure, convenient operation and low cost, can realize rapid and accurate balance, and breaks through the previous limitation that center of gravity adjustment is only limited to X and Y planes.

Description

一种三轴气浮台调平方法A method for leveling a three-axis air bearing table

技术领域technical field

本发明涉及测量技术,尤其涉及一种三轴气浮台调平系统及方法。The invention relates to measurement technology, in particular to a leveling system and method for a three-axis air bearing platform.

背景技术Background technique

气浮台依靠压缩空气在气浮轴承与轴承座之间形成气膜,使实验台面浮起,从而实现近似无摩擦的相对运动条件,由此来模拟卫星在太空中所受干扰力矩很小的力学环境。作为卫星运动模拟器,采用球面气浮轴承支持的三轴气浮台,不但能模拟三轴方向所需要的姿态运动,还能模拟卫星三轴姿态耦合动力学。通过气浮台进行全物理仿真具有重要作用,它是方案论证和功能验证不可缺少的工具。仿真实践证明,利用气浮台进行仿真不仅对卫星姿态控制系统验证有着重要作用,而且能够显著提高卫星的效费比,降低风险,缩短研发周期。The air-floating table relies on compressed air to form an air film between the air-floating bearing and the bearing seat, so that the experimental table is floated, so as to achieve a relatively frictionless relative motion condition, thereby simulating the satellite in space with a small disturbance moment. Mechanics environment. As a satellite motion simulator, the three-axis air bearing platform supported by spherical air bearings can not only simulate the attitude movement required in the three-axis direction, but also simulate the three-axis attitude coupling dynamics of the satellite. The full physical simulation through the air bearing table plays an important role, and it is an indispensable tool for program demonstration and functional verification. Simulation practice has proved that the use of air bearing platform for simulation not only plays an important role in the verification of satellite attitude control system, but also can significantly improve the cost-effectiveness of satellites, reduce risks, and shorten the development cycle.

为了在地面模拟卫星的姿态运动,三轴气浮台的旋转中心应该与台体的质心重合,否则将会产生不平衡力矩,影响仿真试验的效果。目前气浮台的配平方式主要有自动和手动两种。中国发明专利号:200610009797,7,专利名称为:气浮台外加载荷质心调整装置,通过调整安装在气浮台上的螺栓螺母机构调整转台的质心,有手动和电动两种工作方式,该发明只给出了一种调整装置,没有涉及具体的平衡方法。李延斌、包钢、王祖温、吕彦东等在论文“三自由度气浮台自动平衡系统动力学建模”(见《中国惯性技术学报》,2005年,13卷第5期,页码83-87)中,从理论上给出了三轴气浮台自动平衡装置,也没有给出具体的实施方法,难以工程实用。中国发明专利号200910071536.1,专利名称为:三轴气浮台平衡方法及其装置。通过动量轮,电机以及质量滑块实现了重心的调平,但是仅仅局限于x,y轴,并不适用于z轴的调平。In order to simulate the attitude movement of the satellite on the ground, the rotation center of the three-axis air bearing should coincide with the center of mass of the platform body, otherwise, an unbalanced moment will be generated, which will affect the effect of the simulation test. At present, there are mainly two ways of trimming the air bearing table: automatic and manual. China Invention Patent No.: 200610009797,7, the patent name is: the center of mass adjustment device for the external load of the air flotation table, which adjusts the center of mass of the turntable by adjusting the bolt and nut mechanism installed on the air flotation table. There are two working modes: manual and electric. This invention Only one adjustment device is given, no specific balancing method is involved. Li Yanbin, Baotou Steel, Wang Zuwen, Lu Yandong, etc. in the paper "Dynamic Modeling of Automatic Balance System of Three-DOF Air Bearing Platform" (see "Chinese Journal of Inertial Technology", 2005, Volume 13, Issue 5, Pages 83-87) , the automatic balancing device of the three-axis air bearing table is given theoretically, and the specific implementation method is not given, which is difficult to be practical in engineering. China Invention Patent No. 200910071536.1, the patent name is: three-axis air bearing balancing method and its device. The leveling of the center of gravity is achieved through the momentum wheel, the motor and the mass slider, but it is only limited to the x and y axes, and it is not suitable for the leveling of the z axis.

发明内容Contents of the invention

本发明所要解决的技术问题是针对背景技术中所涉及到的缺陷,提供一种结构简单、操作方便、全程自动、成本低廉的三轴气浮台调平系统及方法。The technical problem to be solved by the present invention is to provide a three-axis air bearing leveling system and method with simple structure, convenient operation, full automatic and low cost for the defects involved in the background technology.

本发明为解决上述技术问题采用以下技术方案:The present invention adopts the following technical solutions for solving the problems of the technologies described above:

一种三轴气浮台调平系统,包含三轴气浮台、第一至第三飞轮模块、第一至第三砝码平衡模块、第一至第四喷气模块、陀螺、倾角传感器和控制模块;A three-axis air bearing platform leveling system, including a three-axis air bearing platform, first to third flywheel modules, first to third weight balance modules, first to fourth air jet modules, gyro, inclination sensor and control module;

所述第一至第三飞轮模块呈两两正交设置在所述三轴气浮台上,分别用于调整所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴的姿态;The first to third flywheel modules are arranged in pairs on the three-axis air bearing platform, and are used to adjust the X-axis, Y-axis, and Z-axis of the three-axis air bearing platform with the rotation center as the origin. axis attitude;

所述第一至第三砝码平衡模块呈两两正交设置在所述三轴气浮台上,分别用于调整所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴的平衡;The first to third weight balance modules are arranged in pairs on the three-axis air-floating platform in twos and orthogonally, and are used to adjust the X-axis and Y-axis of the three-axis air-floating platform with the center of rotation as the origin respectively. , Z-axis balance;

所述第一至第四喷气模块对应设置在所述三轴气浮台的边缘上的正X轴、负X轴、正Y轴和负Y轴,分别用于卸载所述第一至第三飞轮模块;The first to fourth air injection modules correspond to the positive X axis, negative X axis, positive Y axis and negative Y axis arranged on the edge of the three-axis air bearing table, and are used to unload the first to third air bearing modules respectively. flywheel module;

所述陀螺用于测量所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴方向的角速度;The gyroscope is used to measure the angular velocity of the three-axis air bearing table in the directions of the X-axis, Y-axis and Z-axis with the center of rotation as the origin;

所述倾角传感器用于测量所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴方向的倾角;The inclination sensor is used to measure the inclination angles of the three-axis air bearing table in the X-axis, Y-axis, and Z-axis directions with the center of rotation as the origin;

所述控制模块用于根据陀螺和倾角传感器的测量结果控制第一至第三飞轮模块、第一至第三砝码平衡模块以及第一至第四喷气模块工作。The control module is used to control the first to third flywheel modules, the first to third weight balance modules and the first to fourth air jet modules to work according to the measurement results of the gyro and the inclination sensor.

作为本发明一种三轴气浮台调平系统进一步的优化方案,所述砝码平衡模块包含滑轨、滑块、丝杠、质量块、减速装置和电机;As a further optimization scheme of the three-axis air bearing platform leveling system of the present invention, the weight balance module includes a slide rail, a slider, a lead screw, a mass block, a reduction device and a motor;

所述滑块上设有与所述丝杠相配合的螺母,由丝杠旋转控制其在所述滑轨上滑动;The slider is provided with a nut matched with the lead screw, which is controlled to slide on the slide rail by the rotation of the lead screw;

所述质量块设置在所述滑块上;The mass block is arranged on the slider;

所述电机的输出端通过减速装置和所述丝杠相连,用于控制所述丝杠正向或反向转动。The output end of the motor is connected to the lead screw through a reduction gear, and is used to control the forward or reverse rotation of the lead screw.

作为本发明一种三轴气浮台调平系统进一步的优化方案,所述第一至第四喷气模块均包含第一至第四喷气单元;As a further optimization scheme of the three-axis air bearing platform leveling system of the present invention, the first to fourth air injection modules all include first to fourth air injection units;

所述第一至第二喷气模块中的第一喷气单元、第二喷气单元沿Y轴设置,喷气方向分别为正Y轴、负Y轴;第三喷气单元、第四喷气单元沿Z轴设置,喷气方向分别为正Z轴、负Z轴;The first air injection unit and the second air injection unit in the first to second air injection modules are arranged along the Y axis, and the air injection directions are respectively the positive Y axis and the negative Y axis; the third air injection unit and the fourth air injection unit are arranged along the Z axis , and the jet directions are positive Z axis and negative Z axis respectively;

所述第三至第四喷气模块中的第一喷气单元、第二喷气单元沿X轴设置,喷气方向分别为正X轴、负X轴;第三喷气单元、第四喷气单元沿Z轴设置,喷气方向分别为正Z轴、负Z轴。The first air injection unit and the second air injection unit in the third to fourth air injection modules are arranged along the X axis, and the air injection directions are respectively the positive X axis and the negative X axis; the third air injection unit and the fourth air injection unit are arranged along the Z axis , and the jet directions are positive Z-axis and negative Z-axis respectively.

本发明还公开了一种基于该三轴气浮台调平系统的调平方法,包括以下步骤:The present invention also discloses a leveling method based on the three-axis air bearing leveling system, comprising the following steps:

步骤1),将三轴气浮台水平静止;Step 1), the three-axis air bearing table is stationary horizontally;

步骤2),释放三轴气浮台,测量出此时三轴气浮台绕X,Y轴的角加速度;Step 2), release the three-axis air bearing, and measure the angular acceleration of the three-axis air bearing around the X and Y axes at this time;

步骤3),根据三轴气浮台台面惯量和飞轮模块飞轮惯量的比值以及步骤2)中测量出的角加速度计算出第一飞轮模块、第二飞轮模块进行加速转动的加速度;Step 3), calculate the acceleration of the first flywheel module and the second flywheel module according to the ratio of the inertia of the three-axis air bearing table surface to the flywheel inertia of the flywheel module and the angular acceleration measured in step 2);

步骤4),控制第一飞轮模块、第二飞轮模块朝三轴气浮台台体绕X,Y轴转动相同的方向加速转动;Step 4), control the first flywheel module and the second flywheel module to accelerate the rotation in the same direction as the three-axis air bearing platform rotates around the X and Y axes;

步骤5),当第一飞轮模块或第二飞轮模块的转速超过预设的转速阈值时,控制其对应的喷气模块产生与其力矩方向相同的力矩,以卸载该飞轮模块,确保当前的三轴气浮台保持水平姿态不变;Step 5), when the speed of the first flywheel module or the second flywheel module exceeds the preset speed threshold, control its corresponding air injection module to generate torque in the same direction as its torque, so as to unload the flywheel module and ensure that the current three-axis air The floating platform maintains a horizontal attitude;

步骤6),测量出第一飞轮模块、第二飞轮模块产生的力矩大小以及方向,并根据测量的结果调节第一砝码平衡模块和第二砝码平和模块中砝码的位置,使得第一飞轮模块、第二飞轮模块不再产生角加速度;Step 6), measure the magnitude and direction of the torque generated by the first flywheel module and the second flywheel module, and adjust the position of the weights in the first weight balance module and the second weight balance module according to the measurement results, so that the first The flywheel module and the second flywheel module no longer generate angular acceleration;

步骤7),控制第一至第四喷气模块对第一至第三飞轮模块进行卸载;Step 7), controlling the first to fourth jet modules to unload the first to third flywheel modules;

步骤8),控制第一飞轮模块,第二飞轮模块中的任意一组飞轮模块以预设的加速度进行转动,使三轴气浮台台面倾斜;Step 8), control the first flywheel module, and any group of flywheel modules in the second flywheel module rotates at a preset acceleration to make the three-axis air bearing table tilt;

步骤9),测出三轴气浮台台面的角加速度;Step 9), measure the angular acceleration of the three-axis air bearing table;

步骤10),根据步骤9)中测得的台面的角加速度与预设的角加速度阈值之间的差值调节第三砝码平衡模块中砝码的位置,使得气浮台可以在各个飞轮模块停转或者匀速运转时以任意姿态平衡。Step 10), adjust the position of the weights in the third weight balance module according to the difference between the angular acceleration of the table top measured in step 9) and the preset angular acceleration threshold, so that the air bearing table can be in each flywheel module Balance in any posture when it is stopped or running at a constant speed.

本发明采用以上技术方案与现有技术相比,具有以下技术效果:Compared with the prior art, the present invention adopts the above technical scheme and has the following technical effects:

1. 结构简单、操作方便、成本低廉;1. Simple structure, convenient operation and low cost;

2. 可以实现在线测量、调节,实现快速、准确自动平衡;2. It can realize online measurement and adjustment, and realize fast and accurate automatic balance;

3. 突破了以往重心调节仅仅局限于X,Y平面内的限制,真正实现了三轴气浮台重心的三轴调平。3. It breaks through the limitation that the adjustment of the center of gravity in the past is only limited to the X and Y planes, and truly realizes the three-axis leveling of the center of gravity of the three-axis air bearing table.

附图说明Description of drawings

图1为砝码系统;Fig. 1 is a weight system;

图2为气浮台台面布置俯视图(传感器以及砝码系统布置布置);Figure 2 is a top view of the table top layout of the air bearing table (sensor and weight system layout);

图3为气浮台台面布置仰视图(飞轮模块布置);Figure 3 is a bottom view of the air bearing table layout (flywheel module layout);

图4为本发明中第一至第四喷气模块的结构示意图。Fig. 4 is a schematic structural view of the first to fourth air injection modules in the present invention.

图中,1、滑块支架,2、质量块,3、滑轨,4、丝杠,5、滑块,6、减速装置,7、电机,8、第一砝码平衡模块,9、第一喷气模块,10、第三喷气模块,11、第二砝码平衡模块,12、倾角传感器,13、第三砝码平衡模块,14、第二喷气模块,15、陀螺仪组合,16、第四喷气模块,17、第一飞轮模块,18、第二飞轮模块,19、第三飞轮模块,20、电机驱动器,21、第二喷气单元,22、第三喷气单元,23、喷气模块支架,24、第一喷气单元,25、第四喷气单元。In the figure, 1. slider bracket, 2. quality block, 3. slide rail, 4. lead screw, 5. slider, 6. deceleration device, 7. motor, 8. first weight balance module, 9. One jet module, 10, the third jet module, 11, the second weight balance module, 12, the inclination sensor, 13, the third weight balance module, 14, the second jet module, 15, the gyroscope combination, 16, the first Four jet modules, 17, first flywheel module, 18, second flywheel module, 19, third flywheel module, 20, motor driver, 21, second jet unit, 22, third jet unit, 23, jet module support, 24, the first jet unit, 25, the fourth jet unit.

具体实施方式detailed description

下面结合附图对本发明的技术方案做进一步的详细说明:Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:

三轴气浮台是在地面对卫星进行全物理仿真的重要手段。由于其近乎无摩擦,用全物理模型代替计算模型的特点,使得其仿真结果有着重要的意义。然而,为了进行准确的仿真,我们必须在仿真实验的开始前保证系统的重心与旋转中心完全重合。只有这样才可以避免因重心而引起的干扰力矩对实验结果造成影响。而在现有的文章和专利中,大多数都只是从理论角度论述了重心调平的可能性,而没有给出一种用于三轴调平的可以工程实践的方案和装置。本发明从这里入手,提出了一种简便的,适用于三轴重心调平的装置以及调整方法。The three-axis air bearing table is an important means to carry out the full physical simulation of the satellite on the ground. Because of its nearly frictionless characteristics, the full physical model is used instead of the calculation model, which makes its simulation results have important significance. However, in order to carry out accurate simulation, we must ensure that the center of gravity of the system coincides with the center of rotation completely before the start of the simulation experiment. Only in this way can the interference torque caused by the center of gravity be avoided from affecting the experimental results. In the existing articles and patents, most of them only discussed the possibility of leveling the center of gravity from a theoretical point of view, but did not provide a practical engineering solution and device for three-axis leveling. Starting from this, the present invention proposes a simple and convenient device and adjustment method suitable for leveling the center of gravity of three axes.

如图2至图3所示, 本发明公开了一种三轴气浮台调平系统,包含三轴气浮台、第一至第三飞轮模块、第一至第三砝码平衡模块、第一至第四喷气模块、陀螺、倾角传感器和控制模块;As shown in Figures 2 to 3, the present invention discloses a three-axis air bearing platform leveling system, which includes a three-axis air bearing platform, first to third flywheel modules, first to third weight balance modules, 1st to 4th jet module, gyroscope, inclination sensor and control module;

所述第一至第三飞轮模块呈两两正交设置在所述三轴气浮台上,分别用于调整所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴的姿态;The first to third flywheel modules are arranged in pairs on the three-axis air bearing platform, and are used to adjust the X-axis, Y-axis, and Z-axis of the three-axis air bearing platform with the rotation center as the origin. axis attitude;

所述第一至第三砝码平衡模块呈两两正交设置在所述三轴气浮台上,分别用于调整所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴的平衡;The first to third weight balance modules are arranged in pairs on the three-axis air-floating platform in twos and orthogonally, and are used to adjust the X-axis and Y-axis of the three-axis air-floating platform with the center of rotation as the origin respectively. , Z-axis balance;

所述第一至第四喷气模块对应设置在所述三轴气浮台的边缘上的正X轴、负X轴、正Y轴和负Y轴,分别用于卸载所述第一至第三飞轮模块;The first to fourth air injection modules correspond to the positive X axis, negative X axis, positive Y axis and negative Y axis arranged on the edge of the three-axis air bearing table, and are used to unload the first to third air bearing modules respectively. flywheel module;

所述陀螺用于测量所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴方向的角速度;The gyroscope is used to measure the angular velocity of the three-axis air bearing table in the directions of the X-axis, Y-axis and Z-axis with the center of rotation as the origin;

所述倾角传感器用于测量所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴方向的倾角;The inclination sensor is used to measure the inclination angles of the three-axis air bearing table in the X-axis, Y-axis, and Z-axis directions with the center of rotation as the origin;

所述控制模块用于根据陀螺和倾角传感器的测量结果控制第一至第三飞轮模块、第一至第三砝码平衡模块以及第一至第四喷气模块工作。The control module is used to control the first to third flywheel modules, the first to third weight balance modules and the first to fourth air jet modules to work according to the measurement results of the gyro and the inclination sensor.

如图1所示,所述砝码平衡模块包含滑轨、滑块、丝杠、质量块、减速装置和电机;As shown in Figure 1, the weight balance module includes a slide rail, a slide block, a leading screw, a quality block, a reduction gear and a motor;

所述滑块上设有与所述丝杠相配合的螺母,由丝杠旋转控制其在所述滑轨上滑动;The slider is provided with a nut matched with the lead screw, which is controlled to slide on the slide rail by the rotation of the lead screw;

所述质量块设置在所述滑块上;The mass block is arranged on the slider;

所述电机的输出端通过减速装置和所述丝杠相连,用于控制所述丝杠正向或反向转动。The output end of the motor is connected to the lead screw through a reduction gear, and is used to control the forward or reverse rotation of the lead screw.

如图4所示,所述第一至第四喷气模块均包含第一至第四喷气单元;As shown in Figure 4, the first to fourth air injection modules all include first to fourth air injection units;

所述第一至第二喷气模块中的第一喷气单元、第二喷气单元沿Y轴设置,喷气方向分别为正Y轴、负Y轴;第三喷气单元、第四喷气单元沿Z轴设置,喷气方向分别为正Z轴、负Z轴;The first air injection unit and the second air injection unit in the first to second air injection modules are arranged along the Y axis, and the air injection directions are respectively the positive Y axis and the negative Y axis; the third air injection unit and the fourth air injection unit are arranged along the Z axis , and the jet directions are positive Z axis and negative Z axis respectively;

所述第三至第四喷气模块中的第一喷气单元、第二喷气单元沿X轴设置,喷气方向分别为正X轴、负X轴;第三喷气单元、第四喷气单元沿Z轴设置,喷气方向分别为正Z轴、负Z轴。The first air injection unit and the second air injection unit in the third to fourth air injection modules are arranged along the X axis, and the air injection directions are respectively the positive X axis and the negative X axis; the third air injection unit and the fourth air injection unit are arranged along the Z axis , and the jet directions are positive Z axis and negative Z axis respectively.

喷气模块中的喷气单元均由喷气模块支架固定。The jet units in the jet module are all fixed by the jet module bracket.

本发明还公开了基于上述三轴气浮台的调平方法,包括以下步骤:The present invention also discloses a leveling method based on the above-mentioned three-axis air bearing platform, comprising the following steps:

步骤1),将三轴气浮台水平静止;Step 1), the three-axis air bearing table is stationary horizontally;

步骤2),释放三轴气浮台,测量出此时三轴气浮台绕X,Y轴的角加速度;Step 2), release the three-axis air bearing, and measure the angular acceleration of the three-axis air bearing around the X and Y axes at this time;

步骤3),根据三轴气浮台台面惯量和飞轮模块飞轮惯量的比值以及步骤2)中测量出的角加速度计算出第一飞轮模块、第二飞轮模块进行加速转动的加速度;Step 3), calculate the acceleration of the first flywheel module and the second flywheel module according to the ratio of the inertia of the three-axis air bearing table surface to the flywheel inertia of the flywheel module and the angular acceleration measured in step 2);

步骤4),控制第一飞轮模块、第二飞轮模块朝三轴气浮台台体绕X,Y轴转动相同的方向加速转动;Step 4), control the first flywheel module and the second flywheel module to accelerate the rotation in the same direction as the three-axis air bearing platform rotates around the X and Y axes;

步骤5),当第一飞轮模块或第二飞轮模块的转速超过预设的转速阈值时,控制其对应的喷气模块产生与其力矩方向相同的力矩,以卸载该飞轮模块,确保当前的三轴气浮台保持水平姿态不变;Step 5), when the speed of the first flywheel module or the second flywheel module exceeds the preset speed threshold, control its corresponding air injection module to generate torque in the same direction as its torque, so as to unload the flywheel module and ensure that the current three-axis air The floating platform maintains a horizontal attitude;

步骤6),测量出第一飞轮模块、第二飞轮模块产生的力矩大小以及方向,并根据测量的结果调节第一砝码平衡模块和第二砝码平和模块中砝码的位置,使得第一飞轮模块、第二飞轮模块不再产生角加速度;Step 6), measure the magnitude and direction of the torque generated by the first flywheel module and the second flywheel module, and adjust the position of the weights in the first weight balance module and the second weight balance module according to the measurement results, so that the first The flywheel module and the second flywheel module no longer generate angular acceleration;

步骤7),控制第一至第四喷气模块对第一至第三飞轮模块进行卸载;Step 7), controlling the first to fourth jet modules to unload the first to third flywheel modules;

步骤8),控制第一飞轮模块,第二飞轮模块中的任意一组飞轮模块以预设的加速度进行转动,使三轴气浮台台面倾斜;Step 8), control the first flywheel module, and any group of flywheel modules in the second flywheel module rotates at a preset acceleration to make the three-axis air bearing table tilt;

步骤9),测出三轴气浮台台面的角加速度;Step 9), measure the angular acceleration of the three-axis air bearing table;

步骤10),根据步骤9)中测得的台面的角加速度与预设的角加速度阈值之间的差值调节第三砝码平衡模块中砝码的位置,使得气浮台可以在各个飞轮模块停转或者匀速运转时以任意姿态平衡。Step 10), adjust the position of the weights in the third weight balance module according to the difference between the angular acceleration of the table top measured in step 9) and the preset angular acceleration threshold, so that the air bearing table can be in each flywheel module Balance in any posture when it is stopped or running at a constant speed.

在调平过程中,第三飞轮模块主要用于抵消外界的干扰力矩,以保证调平过程的有效实施。During the leveling process, the third flywheel module is mainly used to offset the external disturbance torque to ensure the effective implementation of the leveling process.

本发明的工作原理如下所述:The working principle of the present invention is as follows:

三轴气浮台已经完成粗配平(或者三轴气浮台配平之后由于喷气等原因引起的质心的微小变化导致三轴气浮台存在微小的不平衡)后,通过控制各个飞轮模块产生大小不同的加速度来产生不同大小的力矩。通过水平倾角可以读取整个台面的倾角,这些姿态信息通过算法作用于相应的飞轮模块来产生相应的力矩,使得三轴气浮台姿态的维持水平不变。然后通过调整第一砝码平衡模块和第二砝码平衡模块中砝码的位置实现整个三轴气浮台质心在x,y面的调整。完成X,Y面的质心调整之后,再给飞轮施加一个给定的加速度,由于台体的转动惯量已知,因此将可以得到台体转动速度的理论值。通过对比实际值和理论值的差别,我们就可以判明Z轴的砝码应该移动的方向,调整砝码的位置直至气浮台稳定在一个非水平位置。至此,我们就实现了三轴气浮台质心的自动在线调整。After the three-axis air-floor table has been roughly trimmed (or there is a slight unbalance in the three-axis air-floor table due to the slight change in the center of mass caused by air injection and other reasons after the three-axis air-floor table is trimmed), the size of the three-axis air-floor table is different by controlling each flywheel module. Acceleration to generate torque of different magnitudes. The inclination angle of the entire platform can be read through the horizontal inclination angle, and the attitude information acts on the corresponding flywheel module through an algorithm to generate a corresponding moment, so that the attitude of the three-axis air bearing platform remains unchanged. Then, the adjustment of the center of mass of the entire three-axis air bearing table on the x and y planes is realized by adjusting the positions of the weights in the first weight balance module and the second weight balance module. After the adjustment of the center of mass of the X and Y planes is completed, a given acceleration is applied to the flywheel. Since the moment of inertia of the table is known, the theoretical value of the rotation speed of the table can be obtained. By comparing the difference between the actual value and the theoretical value, we can determine the direction in which the Z-axis weight should move, and adjust the position of the weight until the air bearing table is stable in a non-horizontal position. So far, we have realized the automatic online adjustment of the center of mass of the three-axis air bearing table.

砝码平衡模块的结构设计如图1所示,电机通过驱动丝杠来控制砝码的移动,砝码平衡模块采用丝杠驱动方式,通过丝杠的旋转带动砝码的前后移动,其中滑块底座起到固定砝码的作用,从而使丝杠的转动能够带动砝码前后移动,电机通过减速器和丝杠相连驱动丝杠转动。砝码平衡模块安装在三轴气浮台的水平面上,分别平行于X,Y轴正交放置。The structural design of the weight balance module is shown in Figure 1. The motor controls the movement of the weight by driving the lead screw. The base plays the role of fixing the weight, so that the rotation of the lead screw can drive the weight to move back and forth, and the motor is connected with the lead screw through the reducer to drive the lead screw to rotate. The weight balance module is installed on the horizontal plane of the three-axis air bearing table, and placed parallel to the X and Y axes respectively.

飞轮模块有三组,其中两组旋转轴平行于三轴气浮台的X,Y轴,另一组的旋转轴平行于Z轴,并且都安装在三轴气浮台的水平面上,正交放置。需要调整重心时,停止其他试验,保持飞轮模块对三轴气浮台的控制。其第一阶段的控制目标是保持三轴气浮台水平姿态不变。将三轴气浮台静止,如果三轴气浮台重心和三轴气浮台的旋转中心不重合,三轴气浮台将向一个方向倾抖,飞轮模块要保持三轴气浮台的静止姿态,其转速会向同一个方向增加。修正气浮台的水平姿态时,由于重心与旋转中心的偏差所造成的气浮台的倾斜在X,Y轴上是解耦的。因此我们可以通过两个分别放置于X轴和Y轴上的砝码平衡模块来修正重心。飞轮的旋转方向以及砝码的移动方向均是基于传感器所获得的姿态数据。Z轴的飞轮模块主要用于抵消外界的干扰力矩,以保证调平过程的有效实施。There are three groups of flywheel modules, two groups of rotation axes are parallel to the X and Y axes of the three-axis air bearing table, and the rotation axis of the other group is parallel to the Z axis, and they are all installed on the horizontal plane of the three-axis air bearing table, placed orthogonally . When the center of gravity needs to be adjusted, stop other tests and keep the control of the flywheel module on the three-axis air bearing table. The control goal of the first stage is to keep the horizontal attitude of the three-axis air bearing platform unchanged. Keep the three-axis air bearing table static, if the center of gravity of the three-axis air bearing table does not coincide with the rotation center of the three-axis air bearing table, the three-axis air bearing table will shake in one direction, and the flywheel module should keep the three-axis air bearing table stationary Attitude, its speed will increase in the same direction. When correcting the horizontal attitude of the air bearing table, the tilt of the air bearing table caused by the deviation between the center of gravity and the center of rotation is decoupled on the X and Y axes. Therefore, we can correct the center of gravity through two weight balance modules placed on the X-axis and Y-axis respectively. The direction of rotation of the flywheel and the direction of movement of the weights are based on the attitude data obtained by the sensors. The flywheel module of the Z axis is mainly used to offset the external disturbance torque to ensure the effective implementation of the leveling process.

假设气浮台的重心位于旋转中心的X轴的正方向,Y轴的正方向。以X轴的调平为例。设目前重心位于旋转中心的X轴正方向,整个台体会向X轴的正方向倾斜。为了消除这一倾斜趋势,飞轮将会根据台体向X轴正方向转动的加速度来向同一方向转动,而与此同时,砝码将会根据飞轮加速度来以某一速度向反方向移动来调整重心。由于重心在X正方向的偏移量减小了,因此台体向X正方向倾斜的趋势也会减小,同时飞轮的转动加速度与砝码的移动速度也会减小,并最终达到平衡。Y轴的调平的方式与之同理。Z轴的调平需要建立在X,Y轴调平的基础上。当X,Y轴调平后,台体将可以在水平位置上保持静止。此时给飞轮一个给定的加速度,由于台体惯量已知,因此台体也会产生一个特定的加速度,并脱离水平状态。此时,若质心高于旋转中心,则会产生一个力矩来使台体的倾斜加剧。此时台面上的传感器将会检测到一个更大的角速度和角加速度。此时飞轮将根据台体的角加速度输出相应的力矩,以此控制台体稳定在一个非水平的状态下,并且向-Z方向调整Z轴的砝码机构,减小质心在+Z方向的偏移。若质心低于旋转中心,则会产生一个力矩减小台体的倾斜趋势。此时传感器将会检测到比理论值更小的角速度和角加速度。此时飞轮将根据台体的角加速度输出相应的力矩,以此控制台体稳定在一个非水平的状态下,并且向+Z方向调整Z轴的砝码机构,减小质心在-Z方向的偏移。重复以上步骤,最终,台体将可以在飞轮模块停转或者匀速转动的情况下静止在一个非水平位置。至此,气浮台质心在三轴上的调整完成。Assume that the center of gravity of the air bearing is located in the positive direction of the X-axis and the positive direction of the Y-axis of the rotation center. Take the leveling of the X axis as an example. Assuming that the current center of gravity is located in the positive direction of the X-axis of the rotation center, the whole platform will tilt in the positive direction of the X-axis. In order to eliminate this tilting tendency, the flywheel will rotate in the same direction according to the acceleration of the table body to the positive direction of the X-axis, and at the same time, the weight will be adjusted by moving in the opposite direction at a certain speed according to the acceleration of the flywheel center of gravity. Since the offset of the center of gravity in the positive X direction is reduced, the tendency of the table body to incline to the positive X direction will also be reduced, and at the same time the rotational acceleration of the flywheel and the moving speed of the weight will also be reduced, and eventually balance will be reached. The way of leveling the Y axis is the same. The leveling of the Z axis needs to be based on the leveling of the X and Y axes. When the X and Y axes are leveled, the platform will remain stationary in a horizontal position. At this time, a given acceleration is given to the flywheel, and since the inertia of the platform body is known, the platform body will also produce a specific acceleration and leave the horizontal state. At this time, if the center of mass is higher than the center of rotation, a moment will be generated to intensify the inclination of the table body. At this time, the sensor on the table will detect a larger angular velocity and angular acceleration. At this time, the flywheel will output the corresponding torque according to the angular acceleration of the table body, so as to stabilize the control body in a non-horizontal state, and adjust the weight mechanism of the Z axis in the -Z direction to reduce the center of mass in the +Z direction. offset. If the center of mass is lower than the center of rotation, there will be a tendency to tilt the body with a reduced moment. At this time, the sensor will detect angular velocity and angular acceleration smaller than the theoretical value. At this time, the flywheel will output the corresponding torque according to the angular acceleration of the table body, so as to stabilize the control body in a non-horizontal state, and adjust the weight mechanism of the Z axis in the +Z direction to reduce the center of mass in the -Z direction. offset. Repeat the above steps, and finally, the table body will be able to rest in a non-horizontal position when the flywheel module stops or rotates at a constant speed. So far, the adjustment of the center of mass of the air bearing table on the three axes is completed.

本技术领域技术人员可以理解的是,除非另外定义,这里使用的所有术语(包括技术术语和科学术语)具有与本发明所属领域中的普通技术人员的一般理解相同的意义。还应该理解的是,诸如通用字典中定义的那些术语应该被理解为具有与现有技术的上下文中的意义一致的意义,并且除非像这里一样定义,不会用理想化或过于正式的含义来解释。Those skilled in the art can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which this invention belongs. It should also be understood that terms such as those defined in commonly used dictionaries should be understood to have a meaning consistent with the meaning in the context of the prior art, and will not be interpreted in an idealized or overly formal sense unless defined as herein Explanation.

以上所述的具体实施方式,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施方式而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (3)

1.一种三轴气浮台调平系统的调平方法,其特征在于,所述三轴气浮台调平系统包含三轴气浮台、第一至第三飞轮模块、第一至第三砝码平衡模块、第一至第四喷气模块、陀螺、倾角传感器和控制模块;1. A leveling method for a three-axis air bearing platform leveling system, characterized in that, the three-axis air bearing platform leveling system comprises a three-axis air bearing platform, first to third flywheel modules, first to third Three-weight balance module, first to fourth jet modules, gyroscope, inclination sensor and control module; 所述第一至第三飞轮模块呈两两正交设置在所述三轴气浮台上,分别用于调整所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴的姿态;The first to third flywheel modules are arranged in pairs on the three-axis air bearing platform, and are used to adjust the X-axis, Y-axis, and Z-axis of the three-axis air bearing platform with the rotation center as the origin. axis attitude; 所述第一至第三砝码平衡模块呈两两正交设置在所述三轴气浮台上,分别用于调整所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴的平衡;The first to third weight balance modules are arranged in pairs on the three-axis air-floating platform in twos and orthogonally, and are used to adjust the X-axis and Y-axis of the three-axis air-floating platform with the center of rotation as the origin respectively. , Z-axis balance; 所述第一至第四喷气模块对应设置在所述三轴气浮台的边缘上的正X轴、负X轴、正Y轴和负Y轴,分别用于卸载所述第一至第三飞轮模块;The first to fourth air injection modules correspond to the positive X axis, negative X axis, positive Y axis and negative Y axis arranged on the edge of the three-axis air bearing table, and are used to unload the first to third air bearing modules respectively. flywheel module; 所述陀螺用于测量所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴方向的角速度;The gyroscope is used to measure the angular velocity of the three-axis air bearing table in the directions of the X-axis, Y-axis and Z-axis with the center of rotation as the origin; 所述倾角传感器用于测量所述三轴气浮台在以旋转中心为原点的X轴、Y轴、Z轴方向的倾角;The inclination sensor is used to measure the inclination angles of the three-axis air bearing table in the X-axis, Y-axis, and Z-axis directions with the center of rotation as the origin; 所述控制模块用于根据陀螺和倾角传感器的测量结果控制第一至第三飞轮模块、第一至第三砝码平衡模块以及第一至第四喷气模块工作;The control module is used to control the first to third flywheel modules, the first to third weight balance modules and the first to fourth air jet modules to work according to the measurement results of the gyro and the inclination sensor; 所述三轴气浮台调平系统的调平方法包括以下步骤:The leveling method of described three-axis air bearing platform leveling system comprises the following steps: 步骤1),将三轴气浮台水平静止;Step 1), the three-axis air bearing table is stationary horizontally; 步骤2),释放三轴气浮台,测量出此时三轴气浮台绕X,Y轴的角加速度;Step 2), release the three-axis air bearing, and measure the angular acceleration of the three-axis air bearing around the X and Y axes at this time; 步骤3),根据三轴气浮台台面惯量和飞轮模块飞轮惯量的比值以及步骤2)中测量出的角加速度计算出第一飞轮模块、第二飞轮模块进行加速转动的加速度;Step 3), calculate the acceleration of the first flywheel module and the second flywheel module according to the ratio of the inertia of the three-axis air bearing table surface to the flywheel inertia of the flywheel module and the angular acceleration measured in step 2); 步骤4),控制第一飞轮模块、第二飞轮模块朝三轴气浮台台体绕X,Y轴转动相同的方向加速转动;Step 4), control the first flywheel module and the second flywheel module to accelerate the rotation in the same direction as the three-axis air bearing platform rotates around the X and Y axes; 步骤5),当第一飞轮模块或第二飞轮模块的转速超过预设的转速阈值时,控制其对应的喷气模块产生与其力矩方向相同的力矩,以卸载该飞轮模块,确保当前的三轴气浮台保持水平姿态不变;Step 5), when the speed of the first flywheel module or the second flywheel module exceeds the preset speed threshold, control its corresponding air injection module to generate torque in the same direction as its torque, so as to unload the flywheel module and ensure that the current three-axis air The floating platform maintains a horizontal attitude; 步骤6),测量出第一飞轮模块、第二飞轮模块产生的力矩大小以及方向,并根据测量的结果调节第一砝码平衡模块和第二砝码平衡模块中砝码的位置,使得第一飞轮模块、第二飞轮模块不再产生角加速度;Step 6), measure the magnitude and direction of the torque generated by the first flywheel module and the second flywheel module, and adjust the positions of the weights in the first weight balance module and the second weight balance module according to the measurement results, so that the first The flywheel module and the second flywheel module no longer generate angular acceleration; 步骤7),控制第一至第四喷气模块对第一至第三飞轮模块进行卸载;Step 7), controlling the first to fourth jet modules to unload the first to third flywheel modules; 步骤8),控制第一飞轮模块,第二飞轮模块中的任意一组飞轮模块以预设的加速度进行转动,使三轴气浮台台面倾斜;Step 8), control the first flywheel module, and any group of flywheel modules in the second flywheel module rotates at a preset acceleration to make the three-axis air bearing table tilt; 步骤9),测出三轴气浮台台面的角加速度;Step 9), measure the angular acceleration of the three-axis air bearing table; 步骤10),根据步骤9)中测得的台面的角加速度与预设的角加速度阈值之间的差值调节第三砝码平衡模块中砝码的位置,使得气浮台可以在各个飞轮模块停转或者匀速运转时以任意姿态平衡。Step 10), adjust the position of the weights in the third weight balance module according to the difference between the angular acceleration of the table top measured in step 9) and the preset angular acceleration threshold, so that the air bearing table can be in each flywheel module Balance in any posture when it is stopped or running at a constant speed. 2.根据权利要求1所述的三轴气浮台调平系统的调平方法,其特征在于,所述砝码平衡模块包含滑轨、滑块、丝杠、质量块、减速装置和电机;2. The leveling method of the three-axis air bearing leveling system according to claim 1, wherein the weight balance module comprises a slide rail, a slider, a screw, a mass, a reduction device and a motor; 所述滑块上设有与所述丝杠相配合的螺母,由丝杠旋转控制其在所述滑轨上滑动;The slider is provided with a nut matched with the lead screw, which is controlled to slide on the slide rail by the rotation of the lead screw; 所述质量块设置在所述滑块上;The mass block is arranged on the slider; 所述电机的输出端通过减速装置和所述丝杠相连,用于控制所述丝杠正向或反向转动。The output end of the motor is connected to the lead screw through a reduction gear, and is used to control the forward or reverse rotation of the lead screw. 3.根据权利要求1所述的三轴气浮台调平系统的调平方法,其特征在于,所述第一至第四喷气模块均包含第一至第四喷气单元;3. The leveling method of the three-axis air bearing platform leveling system according to claim 1, wherein the first to fourth air injection modules all include first to fourth air injection units; 所述第一至第二喷气模块中的第一喷气单元、第二喷气单元沿Y轴设置,喷气方向分别为正Y轴、负Y轴;第三喷气单元、第四喷气单元沿Z轴设置,喷气方向分别为正Z轴、负Z轴;The first air injection unit and the second air injection unit in the first to second air injection modules are arranged along the Y axis, and the air injection directions are respectively the positive Y axis and the negative Y axis; the third air injection unit and the fourth air injection unit are arranged along the Z axis , the air jet directions are positive Z-axis and negative Z-axis respectively; 所述第三至第四喷气模块中的第一喷气单元、第二喷气单元沿X轴设置,喷气方向分别为正X轴、负X轴;第三喷气单元、第四喷气单元沿Z轴设置,喷气方向分别为正Z轴、负Z轴。The first air injection unit and the second air injection unit in the third to fourth air injection modules are arranged along the X axis, and the air injection directions are respectively the positive X axis and the negative X axis; the third air injection unit and the fourth air injection unit are arranged along the Z axis , and the jet directions are positive Z axis and negative Z axis respectively.
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