CN105173129B - Triaxial air bearing table leveling method - Google Patents

Triaxial air bearing table leveling method Download PDF

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CN105173129B
CN105173129B CN201510601014.3A CN201510601014A CN105173129B CN 105173129 B CN105173129 B CN 105173129B CN 201510601014 A CN201510601014 A CN 201510601014A CN 105173129 B CN105173129 B CN 105173129B
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axis
module
air
bearing table
flywheel
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CN105173129A (en
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康国华
潘俊帆
范凯
周琼峰
陈雪芬
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Abstract

The invention discloses a triaxial air bearing table leveling system and method. The triaxial air bearing table leveling system comprises three groups of flywheel modules, three groups of weight balancing modules and four groups of air injection modules, wherein both the flywheel modules and the weight balancing modules correspond to an X axis, a Y axis and a Z axis and are orthogonal pairwise; the four groups of air injection modules are arranged on the positive X axis direction, the negative X axis direction, the positive Y axis direction and the negative Y axis direction on the edge of a triaxial air bearing table; the flywheel modules are used for maintaining the posture of the air bearing table, and the air injection modules are used for disassembling the flywheel modules; the weight balancing modules are used for adjusting the center of gravity of the air bearing table; according to the magnitude and direction of accelerated speed of the flywheel modules, the weight balancing modules automatically select the direction and the amount of movement, and realize fast and accurate automatic center of gravity balancing. The triaxial air bearing table leveling system has the advantages of being simple in structure, convenient to operate and low in cost, can realize fast and accurate balancing, and breaks through the limitation that the center of gravity adjustment is confined to the X and Y plane in the past.

Description

A kind of three-axis air-bearing table leveling method
Technical field
The present invention relates to e measurement technology, more particularly to a kind of three-axis air-bearing table leveling system and method.
Background technology
Air floating table forms air film by compressed air between air-bearing and bearing block, plays laboratory table edema over the face, so as to Approximate friction free relative motion condition is realized, thus carrys out the mechanical ring of analog satellite suffered disturbance torque very little in space Border.As satellite motion simulator, the three-axis air-bearing table supported using sphere air-bearing, not only can simulate needed for three direction of principal axis The attitude motion wanted, moreover it is possible to analog satellite three-axis attitude Coupled Dynamics.By air floating table carry out full physical simulation have it is important Effect, it is demonstration and the indispensable instrument of functional verification.Emulation using air floating table it was verified that emulated not only Important role is verified to satellite attitude control system, and the efficiency-cost ratio of satellite can be significantly improved, reduce risk shortens R&D cycle.
In order to should be with the barycenter weight of stage body in the center of rotation of the attitude motion of ground simulation satellite, three-axis air-bearing table Close, will otherwise produce unbalanced moments, affect the effect of l-G simulation test.At present the trim mode of air floating table mainly have automatically and Manual two kinds.Chinese invention patent number:200610009797,7, patent name is:Air floating table plus load barycenter adjusting apparatus, The barycenter of turntable is adjusted by bolt-nut mechanism of the adjustment on air floating table, there are manual and electronic two kinds of working methods, The invention only gives a kind of adjusting apparatus, without reference to specific balance method.Li Yanbin, Baogang, Wang Zuwen, Lv Yandong etc. At paper " Dynamic Modeling for Automatic Balancing System of 3-DOF Air-bearing Test-bed "(See《Chinese inertial technology journal》, 2005, volume 13 5th phase, page number 83-87)In, three-axis air-bearing table automatic balancing arrangement is theoretically given, do not provide specific enforcement yet Method, it is difficult to Practical.Chinese invention patent number 200910071536.1, patent name is:Triaxial air bearing table balance method And its device.By momenttum wheel, motor and quality slide block realize the leveling of center of gravity, but are limited only to x, y-axis, not Suitable for the leveling of z-axis.
The content of the invention
The technical problem to be solved is for defect involved in background technology, there is provided a kind of structure letter Three-axis air-bearing table leveling system single, easy to operate, whole-process automatic, with low cost and method.
The present invention is employed the following technical solutions to solve above-mentioned technical problem:
A kind of three-axis air-bearing table leveling system, comprising three-axis air-bearing table, the first to the 3rd flywheel module, the first to the 3rd weight Code balance module, first to fourth jet module, gyro, obliquity sensor and control module;
Described first to the 3rd flywheel module is arranged on the three-axis air-bearing table in pairwise orthogonal, is respectively used to adjust institute Three-axis air-bearing table is stated in the X-axis with center of rotation as origin, Y-axis, the attitude of Z axis;
Described first to the 3rd counterweight balance module is arranged on the three-axis air-bearing table in pairwise orthogonal, is respectively used to adjust The whole three-axis air-bearing table is in the X-axis with center of rotation as origin, Y-axis, the balance of Z axis;
The first to fourth jet module be correspondingly arranged at the positive X-axis on the edge of the three-axis air-bearing table, negative X-axis, Positive Y-axis and negative Y-axis, are respectively used to unloading first to the 3rd flywheel module;
The gyro be used for measure the three-axis air-bearing table the X-axis with center of rotation as origin, Y-axis, Z-direction angle Speed;
The obliquity sensor is used to measure the three-axis air-bearing table in the X-axis with center of rotation as origin, Y-axis, Z axis side To inclination angle;
The control module be used for according to the measurement result of gyro and obliquity sensor control the first to the 3rd flywheel module, First to the 3rd counterweight balance module and first to fourth jet module work.
Used as a kind of further prioritization scheme of three-axis air-bearing table leveling system of the invention, the counterweight balance module is included Slide rail, slide block, leading screw, mass, deceleration device and motor;
The slide block is provided with the nut being engaged with the leading screw, and by leading screw Spin Control, it is sliding on the slide rail It is dynamic;
The mass is arranged on the slide block;
The outfan of the motor is connected by deceleration device with the leading screw, for controlling the leading screw forward or backwards Rotate.
As a kind of further prioritization scheme of three-axis air-bearing table leveling system of the invention, the first to fourth jet mould Block includes first to fourth air injection unit;
The first air injection unit, the second air injection unit in the first to the second jet module is arranged along Y-axis, jet direction Respectively positive Y-axis, negative Y-axis;3rd air injection unit, the 4th air injection unit are arranged along Z axis, and jet direction is respectively positive Z axis, negative Z Axle;
The first air injection unit, the second air injection unit in 3rd to the 4th jet module is arranged along X-axis, jet direction Respectively positive X-axis, negative X-axis;3rd air injection unit, the 4th air injection unit are arranged along Z axis, and jet direction is respectively positive Z axis, negative Z Axle.
The invention also discloses a kind of leveling method based on the three-axis air-bearing table leveling system, comprises the following steps:
Step 1), by three-axis air-bearing table horizontal stationary;
Step 2), discharge three-axis air-bearing table, measure now three-axis air-bearing table around X, the angular acceleration of Y-axis;
Step 3), according to three-axis air-bearing table table top inertia and the ratio and step 2 of flywheel module flywheel inertia)Middle measurement The angular acceleration for going out calculates the first flywheel module, the second flywheel module and carries out accelerating the acceleration of rotation;
Step 4), towards three-axis air-bearing table stage body around X, Y-axis rotates identical for the first flywheel module of control, the second flywheel module Direction accelerates to rotate;
Step 5), when the rotating speed of the first flywheel module or the second flywheel module exceedes default rotary speed threshold value, control it Corresponding jet module is produced and its torque direction identical torque, to unload the flywheel module, it is ensured that three current axle air supportings Platform keeps horizontal attitude constant;
Step 6), torque size and direction that the first flywheel module, the second flywheel module are produced are measured, and according to survey The result of amount adjusts the position of counterweight in the first counterweight balance module and the gentle module of the second counterweight so that the first flywheel module, Second flywheel module no longer produces angular acceleration;
Step 7), control first to fourth jet module and the first to the 3rd flywheel module unloaded;
Step 8), the first flywheel module is controlled, any one group of flywheel module in the second flywheel module is with default acceleration Degree is rotated, and inclines three-axis air-bearing table table top;
Step 9), measure the angular acceleration of three-axis air-bearing table table top;
Step 10), according to step 9)In difference between the angular acceleration of table top that measures and default angular acceleration threshold value Value adjusts the position of counterweight in the 3rd counterweight balance module so that air floating table can be stalled in each flywheel module or at the uniform velocity transported With any attitude balance when turning.
The present invention adopts above technical scheme compared with prior art, with following technique effect:
1. simple structure, easy to operate, with low cost;
2. on-line measurement can be realized, adjusted, realize quick, accurate autobalance;
3. breach conventional center of gravity regulation and be limited only to X, the restriction in Y plane is truly realized three-axis air-bearing table weight Three axle leveling of the heart.
Description of the drawings
Fig. 1 is poise system;
Fig. 2 is that air floating table table top arranges top view(Sensor and poise system arrangement arrangement);
Fig. 3 is that air floating table table top arranges upward view(Flywheel module is arranged);
Fig. 4 is the structural representation of first to fourth jet module in the present invention.
In figure, 1, slider bracket, 2, mass, 3, slide rail, 4, leading screw, 5, slide block, 6, deceleration device, 7, motor, 8, One counterweight balance module, the 9, first jet module, the 10, the 3rd jet module, the 11, second counterweight balance module, 12, inclination angle sensing Device, the 13, the 3rd counterweight balance module, the 14, second jet module, 15, gyroscope combination, the 16, the 4th jet module, 17, first Flywheel module, the 18, second flywheel module, the 19, the 3rd flywheel module, 20, motor driver, the 21, second air injection unit, 22, Three air injection units, 23, jet module carrier, the 24, first air injection unit, the 25, the 4th air injection unit.
Specific embodiment
Technical scheme is described in further detail below in conjunction with the accompanying drawings:
Three-axis air-bearing table is that the important means of full physical simulation is carried out in the face of satellite on ground.Because it is almost without friction, use The characteristics of full physical model replaces computation model so that its simulation result has great significance.However, in order to carry out accurately Emulation, we must ensure that the center of gravity of system is completely superposed with center of rotation before the beginning of emulation experiment.Only in this way just may be used To avoid the disturbance torque caused because of center of gravity from impacting experimental result.And in existing article and patent, great majority The probability of center of gravity leveling is all simply discussed from point of theory, without be given it is a kind of be used for three axle leveling can be with engineering reality The scheme trampled and device.The present invention starts with from here, it is proposed that a kind of easy, it is adaptable to the device of three axle center of gravity leveling and Method of adjustment.
As shown in Figure 2 to Figure 3, the invention discloses a kind of three-axis air-bearing table leveling system, comprising three-axis air-bearing table, One to the 3rd flywheel module, the first to the 3rd counterweight balance module, first to fourth jet module, gyro, obliquity sensor and Control module;
Described first to the 3rd flywheel module is arranged on the three-axis air-bearing table in pairwise orthogonal, is respectively used to adjust institute Three-axis air-bearing table is stated in the X-axis with center of rotation as origin, Y-axis, the attitude of Z axis;
Described first to the 3rd counterweight balance module is arranged on the three-axis air-bearing table in pairwise orthogonal, is respectively used to adjust The whole three-axis air-bearing table is in the X-axis with center of rotation as origin, Y-axis, the balance of Z axis;
The first to fourth jet module be correspondingly arranged at the positive X-axis on the edge of the three-axis air-bearing table, negative X-axis, Positive Y-axis and negative Y-axis, are respectively used to unloading first to the 3rd flywheel module;
The gyro be used for measure the three-axis air-bearing table the X-axis with center of rotation as origin, Y-axis, Z-direction angle Speed;
The obliquity sensor is used to measure the three-axis air-bearing table in the X-axis with center of rotation as origin, Y-axis, Z axis side To inclination angle;
The control module be used for according to the measurement result of gyro and obliquity sensor control the first to the 3rd flywheel module, First to the 3rd counterweight balance module and first to fourth jet module work.
As shown in figure 1, the counterweight balance module includes slide rail, slide block, leading screw, mass, deceleration device and motor;
The slide block is provided with the nut being engaged with the leading screw, and by leading screw Spin Control, it is sliding on the slide rail It is dynamic;
The mass is arranged on the slide block;
The outfan of the motor is connected by deceleration device with the leading screw, for controlling the leading screw forward or backwards Rotate.
As shown in figure 4, the first to fourth jet module includes first to fourth air injection unit;
The first air injection unit, the second air injection unit in the first to the second jet module is arranged along Y-axis, jet direction Respectively positive Y-axis, negative Y-axis;3rd air injection unit, the 4th air injection unit are arranged along Z axis, and jet direction is respectively positive Z axis, negative Z Axle;
The first air injection unit, the second air injection unit in 3rd to the 4th jet module is arranged along X-axis, jet direction Respectively positive X-axis, negative X-axis;3rd air injection unit, the 4th air injection unit are arranged along Z axis, and jet direction is respectively positive Z axis, negative Z Axle.
Air injection unit in jet module is fixed by jet module carrier.
The invention also discloses the leveling method based on above-mentioned three-axis air-bearing table, comprises the following steps:
Step 1), by three-axis air-bearing table horizontal stationary;
Step 2), discharge three-axis air-bearing table, measure now three-axis air-bearing table around X, the angular acceleration of Y-axis;
Step 3), according to three-axis air-bearing table table top inertia and the ratio and step 2 of flywheel module flywheel inertia)Middle measurement The angular acceleration for going out calculates the first flywheel module, the second flywheel module and carries out accelerating the acceleration of rotation;
Step 4), towards three-axis air-bearing table stage body around X, Y-axis rotates identical for the first flywheel module of control, the second flywheel module Direction accelerates to rotate;
Step 5), when the rotating speed of the first flywheel module or the second flywheel module exceedes default rotary speed threshold value, control it Corresponding jet module is produced and its torque direction identical torque, to unload the flywheel module, it is ensured that three current axle air supportings Platform keeps horizontal attitude constant;
Step 6), torque size and direction that the first flywheel module, the second flywheel module are produced are measured, and according to survey The result of amount adjusts the position of counterweight in the first counterweight balance module and the gentle module of the second counterweight so that the first flywheel module, Second flywheel module no longer produces angular acceleration;
Step 7), control first to fourth jet module and the first to the 3rd flywheel module unloaded;
Step 8), the first flywheel module is controlled, any one group of flywheel module in the second flywheel module is with default acceleration Degree is rotated, and inclines three-axis air-bearing table table top;
Step 9), measure the angular acceleration of three-axis air-bearing table table top;
Step 10), according to step 9)In difference between the angular acceleration of table top that measures and default angular acceleration threshold value Value adjusts the position of counterweight in the 3rd counterweight balance module so that air floating table can be stalled in each flywheel module or at the uniform velocity transported With any attitude balance when turning.
During leveling, the 3rd flywheel module is mainly used in offsetting extraneous disturbance torque, to ensure leveling process Effectively implement.
The operation principle of the present invention is as described below:
Three-axis air-bearing table has completed thick trim(Or due to matter that the reasons such as jet cause after three-axis air-bearing table trim The minor variations of the heart cause three-axis air-bearing table to there is small imbalance)Afterwards, size is produced not by controlling each flywheel module With acceleration producing different size of torque.The inclination angle of whole table top can be read by level inclination, these attitude letters Breath acts on corresponding flywheel module to produce corresponding torque by algorithm so that the maintenance level of three-axis air-bearing table attitude is not Become.Then whole three axles air supporting is realized by the position of counterweight in the first counterweight balance module of adjustment and the second counterweight balance module Platform barycenter is in x, the adjustment in y faces.X is completed, after the barycenter adjustment in Y faces, then applies a given acceleration to flywheel, due to The rotary inertia of stage body is, it is known that therefore will can obtain the theoretical value of stage body velocity of rotation.By contrasting actual value and theoretical value Difference, we can just distinguish the direction that the counterweight of Z axis should be moved, and adjust the position of counterweight until air floating table is stable one Individual non-horizontal position.So far, we are achieved that the automatic on-line adjustment of three-axis air-bearing table barycenter.
The structure design of counterweight balance module is as shown in figure 1, motor controls the movement of counterweight, counterweight by driving leading screw Balance module adopts leading screw type of drive, and by leading screw the movable of counterweight is rotarily driven, and wherein slide block base plays solid Determine the effect of counterweight, so that the rotation of leading screw can drive counterweight to move forward and backward, motor is connected drive by decelerator with leading screw Dynamic leading screw is rotated.Counterweight balance module is arranged on the horizontal plane of three-axis air-bearing table, is respectively parallel to X, and Y-axis is orthogonally located.
Flywheel module has three groups, wherein X of two groups of rotary shafts parallel to three-axis air-bearing table, Y-axis, another group of rotary shaft is put down Row is all arranged on the horizontal plane of three-axis air-bearing table in Z axis, orthogonally located.When needing to adjust center of gravity, stop other examinations Test, keep control of the flywheel module to three-axis air-bearing table.The control targe of its first stage is to maintain the horizontal appearance of three-axis air-bearing table State is constant.Three-axis air-bearing table is static, if the center of rotation of three-axis air-bearing table center of gravity and three-axis air-bearing table is misaligned, three axle gas Floating platform will incline to a direction and tremble, and flywheel module will keep the stationary posture of three-axis air-bearing table, and its rotating speed can be to same direction Increase.During the horizontal attitude of amendment air floating table, due to center of gravity and center of rotation deviation caused by air floating table be tilted in X, Y It is decoupling on axle.Therefore we can correct weight by the counterweight balance module that two are respectively placed in X-axis and Y-axis The heart.The direction of rotation of flywheel and the moving direction of counterweight are all based on the attitude data that sensor is obtained.The flywheel mould of Z axis Block is mainly used in offsetting extraneous disturbance torque, to ensure effective enforcement of leveling process.
The center of gravity for assuming air floating table is located at the positive direction of the X-axis of center of rotation, the positive direction of Y-axis.Leveling with X-axis is Example.If at present center of gravity is located at the X-axis positive direction of center of rotation, whole stage body can be inclined to the positive direction of X-axis.In order to eliminate this Slope trend, the acceleration that flywheel will be rotated to X-axis positive direction according to stage body rotating to same direction, and at the same time, Counterweight will adjust center of gravity with a certain speed according to flywheel acceleration to opposite direction movement.Because center of gravity is in X positive directions Side-play amount is reduced, therefore stage body also can reduce to the inclined trend of X positive directions, while the rotation acceleration of flywheel and counterweight Translational speed also can reduce, and be finally reached balance.The mode of the leveling of Y-axis is therewith in the same manner.The leveling of Z axis needs to set up in X, On the basis of Y-axis leveling.Work as X, after Y-axis leveling, stage body can on horizontal level remains stationary.Now to flywheel one give Fixed acceleration, due to stage body inertia, it is known that therefore stage body can also produce a specific acceleration, and depart from horizontality. Now, if barycenter is higher than center of rotation, the inclination that can produce a torque to make stage body aggravates.The now sensor on table top Will detect that bigger an angular velocity and angular acceleration.Now flywheel will export corresponding power according to the angular acceleration of stage body Square, controls stage body and stablizes in the state of a non-horizontal with this, and adjusts the counterweight mechanism of Z axis to -Z direction, reduces matter Skew of the heart in +Z direction.If barycenter is less than center of rotation, the slope trend that a torque reduces stage body can be produced.Now pass Sensor will detect that the angular velocity and angular acceleration less than theoretical value.Now flywheel will be exported according to the angular acceleration of stage body Corresponding torque, controls stage body and stablizes in the state of a non-horizontal with this, and adjusts the weight machine of Z axis to +Z direction Structure, reduces skew of the barycenter in -Z direction.Repeat above step, finally, stage body can flywheel module stalling or at the uniform velocity A non-horizontal position is still in the case of rotation.So far, adjustment of the air floating table barycenter on three axles is completed.
Those skilled in the art of the present technique it is understood that unless otherwise defined, all terms used herein(Including skill Art term and scientific terminology)With with art of the present invention in those of ordinary skill general understanding identical meaning.Also It should be understood that those terms defined in such as general dictionary should be understood that with the context of prior art in The consistent meaning of meaning, and unless defined as here, will not be explained with idealization or excessively formal implication.
Above-described specific embodiment, has been carried out further to the purpose of the present invention, technical scheme and beneficial effect Describe in detail, should be understood that the specific embodiment that the foregoing is only the present invention, be not limited to this Bright, all any modification, equivalent substitution and improvements within the spirit and principles in the present invention, done etc. should be included in the present invention Protection domain within.

Claims (3)

1. a kind of leveling method of three-axis air-bearing table leveling system, it is characterised in that the three-axis air-bearing table leveling system is included Three-axis air-bearing table, the first to the 3rd flywheel module, the first to the 3rd counterweight balance module, first to fourth jet module, gyro, Obliquity sensor and control module;
Described first to the 3rd flywheel module is arranged on the three-axis air-bearing table in pairwise orthogonal, is respectively used to adjustment described three Axle air floating table is in the X-axis with center of rotation as origin, Y-axis, the attitude of Z axis;
Described first to the 3rd counterweight balance module is arranged on the three-axis air-bearing table in pairwise orthogonal, is respectively used to adjust institute Three-axis air-bearing table is stated in the X-axis with center of rotation as origin, Y-axis, the balance of Z axis;
The first to fourth jet module is correspondingly arranged at the positive X-axis on the edge of the three-axis air-bearing table, negative X-axis, positive Y-axis With negative Y-axis, unloading first to the 3rd flywheel module is respectively used to;
The gyro is used to measure the three-axis air-bearing table in the X-axis with center of rotation as origin, Y-axis, the angle speed of Z-direction Degree;
The obliquity sensor is used to measure the three-axis air-bearing table in X-axis with center of rotation as origin, Y-axis, Z-direction Inclination angle;
The control module be used for according to the measurement result of gyro and obliquity sensor control the first to the 3rd flywheel module, first Work to the 3rd counterweight balance module and first to fourth jet module;
The leveling method of the three-axis air-bearing table leveling system is comprised the following steps:
Step 1), by three-axis air-bearing table horizontal stationary;
Step 2), discharge three-axis air-bearing table, measure now three-axis air-bearing table around X, the angular acceleration of Y-axis;
Step 3), according to three-axis air-bearing table table top inertia and the ratio and step 2 of flywheel module flywheel inertia)In measure Angular acceleration calculates the first flywheel module, the second flywheel module and carries out accelerating the acceleration of rotation;
Step 4), towards three-axis air-bearing table stage body around X, Y-axis rotates identical direction for the first flywheel module of control, the second flywheel module Accelerate to rotate;
Step 5), when the rotating speed of the first flywheel module or the second flywheel module exceedes default rotary speed threshold value, control its correspondence Jet module produce and its torque direction identical torque, to unload the flywheel module, it is ensured that current three-axis air-bearing table is protected Hold horizontal attitude constant;
Step 6), torque size and direction that the first flywheel module, the second flywheel module are produced are measured, and according to measurement As a result the position of counterweight in the first counterweight balance module and the second counterweight balance module is adjusted so that the first flywheel module, second Flywheel module no longer produces angular acceleration;
Step 7), control first to fourth jet module and the first to the 3rd flywheel module unloaded;
Step 8), the first flywheel module is controlled, any one group of flywheel module in the second flywheel module is entered with default acceleration Row is rotated, and inclines three-axis air-bearing table table top;
Step 9), measure the angular acceleration of three-axis air-bearing table table top;
Step 10), according to step 9)In difference between the angular acceleration of table top that measures and default angular acceleration threshold value adjust Save the position of counterweight in the 3rd counterweight balance module so that air floating table can be in each flywheel module stalling or Running at a constant speed With any attitude balance.
2. the leveling method of three-axis air-bearing table leveling system according to claim 1, it is characterised in that the counterweight balance Module includes slide rail, slide block, leading screw, mass, deceleration device and motor;
The slide block is provided with the nut being engaged with the leading screw, and by leading screw Spin Control, it slides on the slide rail;
The mass is arranged on the slide block;
The outfan of the motor is connected by deceleration device with the leading screw, is turned forward or backwards for controlling the leading screw It is dynamic.
3. the leveling method of three-axis air-bearing table leveling system according to claim 1, it is characterised in that described first to Four jet modules include first to fourth air injection unit;
The first air injection unit, the second air injection unit in the first to the second jet module is arranged along Y-axis, jet direction difference For positive Y-axis, negative Y-axis;3rd air injection unit, the 4th air injection unit are arranged along Z axis, and jet direction is respectively positive Z axis, negative Z axis;
The first air injection unit, the second air injection unit in 3rd to the 4th jet module is arranged along X-axis, jet direction difference For positive X-axis, negative X-axis;3rd air injection unit, the 4th air injection unit are arranged along Z axis, and jet direction is respectively positive Z axis, negative Z axis.
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