CN105163476B - Plasma discharge device - Google Patents
Plasma discharge device Download PDFInfo
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- CN105163476B CN105163476B CN201510516330.0A CN201510516330A CN105163476B CN 105163476 B CN105163476 B CN 105163476B CN 201510516330 A CN201510516330 A CN 201510516330A CN 105163476 B CN105163476 B CN 105163476B
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Abstract
The invention discloses a plasma discharge device, and relates to a discharge device. The plasma discharge device comprises an alternating-current power supply, an inner electrode, a high-voltage electrode, an outer electrode, a support post, a variable capacitor, an airflow baffle plate, a high-voltage electrode through hole, a vibration device and a suspension device, wherein the support post is arranged in the middle of the bottom of a flue; the inner electrode is arranged above the outer electrode; the high-voltage electrode sleeves outside the inner electrode; the variable comparator is arranged between the inner electrode and the ground; the upper end of the high-voltage electrode is connected with the vibration device; two ends of the vibration device are connected with a high-voltage electrode lead and the suspension device respectively; the suspension device is fixed on the wall of the flue; the outer electrode is located at the bottom of the flue and is suspended on the inner wall of the flue; an outer electrode lead can be connected with a ground electrode by the variable capacitor; and the airflow baffle plate introduces the gas which is treated by the high-voltage electrode and the outer electrode into a gap between the high-voltage electrode and the inner electrode through the high-voltage electrode through hole. The plasma discharge device has the effects of low energy consumption, high NOx removal rate, no secondary pollution and the like, and is simple in structure, easy to operate, easy to maintain and applicable to application in the field of high-temperature combustion of fuel.
Description
Technical field
The present invention relates to electric discharge device, more particularly, to can be applicable to eliminate nitric oxide under atmospheric conditions, titanium dioxide three
The toxic components such as nitrogen, mercury metal, increase a kind of plasma discharge apparatus of the oxygen radical content in gas.
Background technology
Nitrogen oxide, mercury metal is the important pollutant for affecting air quality, mainly by the burning of fossil fuel, cylinder
Reaction under the conditions of interior spark discharge and coal high-temp combustion etc. is generated, the method for removal generally have high energy electron oxidizing process,
Solid phase absorption and regeneration method, flue gas circulating fluidized bed, organic calcium desulphurization denitration technology etc..But in processing procedure inevitably
There is shortcoming, such as high energy consumption, introduce new impurity, it is big to original old factory rehabilitation quantities the shortcomings of.At atmospheric pressure plasma
Reason device is simple, energy consumption is low, it is easy to transform on original factory building foundation, purifies thorough, non-secondary pollution, can enter under normal temperature and pressure
The advantages of row, makes it be with a wide range of applications in industrialized production and daily life.Although atmosphere low-temperature plasma is used
Place is very extensive, but with the dynamic high-pressure electrode discharge of certain frequency vibration and with reference to inside and outside ground electrode circular treatment nitric oxide
Mode Deng gas does not occur.In order to internal and external electrode simultaneously Uniform Discharge by inner and outer electrodes it is each one in parallel can power transformation
Hold, according to different discharge gas, adjust electric capacity and realize Uniform Discharge.Discharge process belongs to cold atmospheric plasma field,
Temperature in discharge gas pipeline is not affected substantially.Additionally, except eliminating NO, NO in discharge processxAnd mercury metal is same
When, the clearance of sulfur dioxide can also be improved and the peculiar smell in discharge gas and bacterium is eliminated, beneficial to the good of environmental protection industry
Good development.
The plasma that the device is produced belongs to nonthermal plasma, although electron temperature it is very high (10000 degree with
On), but ion temperature is far below electron temperature so that and gas temperature tends to normal temperature, and nonthermal plasma is extensive
For fields such as plated film, surface treatment, biological cleaning, medical science.
The various devices of electric discharge ask for an interview Anthony R Martin et al. " Modelling of non-thermal
plasma aftertreatment of exhaust gas streams”J.Phys.D:Appl.Phys.37,42-49
, and Wei Tian et al. " Atmospheric pressure dielectric barrier discharges (2004)
interacting with liquid covered tissue”J.Phys.D:Appl.Phys.47,165201 more than (2014)
Although electric discharge is mainly so that based on dielectric barrier discharge, clearance is low, and structure is complex, limits its application prospect.
Traditional tube shape electric discharge removes nitrogen oxides bibliography:Moo Been Chang et al.“Gas-Phase
Removal of NO from Gas Streams via Dielectric Barrier Discharges”
Environ.Sci.Technol.1992:26,777-781.
The content of the invention
It is an object of the invention to provide being directed to existing plasma discharge apparatus above shortcomings, there is provided have
Consume energy low, NOxClearance is high, non-secondary pollution and other effects, simple structure, processing ease, easy care, is adapted to be fired in fuel high-temperature
A kind of plasma discharge apparatus of burning field application.
The present invention is provided with AC power, interior electrode, high-field electrode, external electrode, support column, variable capacitance, blast fence, height
Piezoelectricity pole through hole, vibrating device, suspension arrangement;
Support column is placed in the middle of stack base, for supporting interior electrode, interior electrode located at the top of external electrode, external electrode,
On same axis, high-field electrode is enclosed within interior electrode exterior, stays between interior electrode and high-field electrode for high-field electrode and interior electrode
Have gap, variable capacitance is located between interior electrode and ground, and high-field electrode upper end is connected with vibrating device, vibrating device one end with
High-field electrode lead is connected, and the vibrating device other end is connected with suspension arrangement, and suspension arrangement is fixed on walling of flue;Dispatch from foreign news agency
Pole is located at and stack base and is suspended in flue inner wall, the position of external electrode higher than support column and slightly below high-field electrode, dispatch from foreign news agency
Connected by variable capacitance between pole lead and ground electrode;Gas after blast fence processes high-field electrode and external electrode passes through high pressure
Electrode through hole is incorporated into the gap of high-field electrode and interior electrode, so that gas can be processed again in uphill process;Alternating current
Source electrically connects with high-field electrode;
The external electrode is made up of insulating materials, metal bar, wire, external electrode lead, and metal bar is embedded in insulating materials
In, after metal bar is connected by wire, is drawn with external electrode lead and be connected with variable capacitance;
The high-field electrode is made up of high-field electrode lead, insulating materials, wire, metal bar, and metal bar is embedded in insulation
In material, after metal bar is connected by wire, is drawn with external electrode lead and be connected with variable capacitance, high-field electrode through hole is located at high pressure
Electrode centre position, high-field electrode through hole is used to be located between electrode and high-field electrode in the gas introducing after first time process
Reason.
The voltage peak adjustable range of the AC power can be 0~30kV, and frequency-tuning range can be 1~150kHz.
The material of the external electrode can adopt the one kind in ceramics, corundum, quartz, polytetrafluoroethylene (PTFE) etc., outside external electrode
Diameter can be 7.5~12.5mm, and the interior diameter of external electrode can be 1.5~2.5mm;The metal bar can be using the expansion such as tungsten bar system
The little resistant to elevated temperatures metal bar of number, metal bar can adopt 3~4, and the internal diameter of every metal bar can be 1~2mm, and length can be 500
~1000mm, the spacing of adjacent metal rod can be 2mm.
The length of the high-field electrode can be 1200~2200mm, and its extraction wire is located at the top of electrode, with alternating current
The high-pressure side in source is connected, and opens the high-field electrode through hole of two 200mm in center.
The vibrating device can be using slider oscillation or electric and magnetic oscillation, and the frequency of the vibration can be 0.1~10kHz, shake
Dynamic amplitude can be 0.2mm.
The length of the interior electrode can be 500~1000mm, the extraction wire of interior electrode be located at the top of interior electrode and with
Ground is connected.
The material of the support column can adopt the one kind in ceramics, corundum, quartz, polytetrafluoroethylene (PTFE) etc., support column to be used for
Electrode in supporting, and in causing electrode and high-field electrode be in on the same axis of flue.
The variable capacitance can set 2, wherein the variable capacitance connected with interior electrode can adopt 100 μ F~1mF, with dispatch from foreign news agency
The variable capacitance of pole series connection can adopt 500 μ F~2mF.
The material of the blast fence can adopt the insulation high-temperature-resistants such as ceramic fiber cloth, asbestos, Teflon, polytetrafluoroethylene (PTFE)
Has resilient material, one end of blast fence is fixed on high-field electrode through hole top, to ensure to shake process in high-field electrode
In will not fall off, and can prevent gas from spilling from above, the other end of blast fence is enclosed within the outside of external electrode, to prevent Jing
The gas leakage crossed after external electrode is processed with high-field electrode.
The high-field electrode can adopt the insulating element for having metal bar in cylindrical shape, whole high-field electrode to be suspended on vibration system
Under system, and it is connected with the high-field electrode of AC power.External electrode is being enclosed within the outer layer and internal layer of high-field electrode respectively, fixes
It is motionless, it is connected to the ground after series capacitance, flue gas passes into electric discharge first between external electrode and high-field electrode after dedusting
After process, high-field electrode is then passed through, is risen Jing after high-field electrode with interior electrode gap again discharge process, into absorption cell heel row
Put.Wherein external electrode is suspended on flue inner wall, and interior electrode is placed in bracing frame top, and blast fence is fixed on interior electrode, prevents
Gas is excessive and guides gas to enter high-field electrode.Whole device is placed in flue, and gas enters from below rear by the product that discharges
Liveliness proof oxygen radical and NO, NOxAnd mercury metal generates NO2Absorbed by absorption cell with mercury oxide.
When flue gas enters region of discharge between external electrode and high-field electrode (the first region of discharge), in high-field electrode and dispatch from foreign news agency
Under the voltage effect of 2~30kV of interpolar, and with the vibration of high-field electrode, substantial amounts of oxygen-containing freedom is produced after flue gas is breakdown
Base, it can be with NO, NOxAnd mercury metal generates NO2And mercury oxide, due to flue gas flow it is larger, remaining NO, NOxAnd mercury metal will
Reaction (the second region of discharge) is participated between high-field electrode and interior electrode.For the difference of high-temp combustion degree, oxygen content in flue gas
Also there is bigger difference, respectively in external electrode, interior electrode and a variable capacitance of connecting between ground electrode are allocated, and then are realized
Uniform Discharge.The method treatment effeciency is high, and need not add during process will not in any other chemical substance, and processing procedure
Produce new poisonous and harmful substance.Additionally, present configuration is simple, with low cost, it is convenient to mount and dismount.
The present invention (bibliography on the basis of traditional tube shape electric discharge removes nitrogen oxides:Moo Been Chang
et al.“Gas-Phase Removal of NO from Gas Streams via Dielectric Barrier
Discharges " Environ.Sci.Technol.1992,26,777-781) original interior electrode is changed to into electricity in oscillatory type
Pole, because discharge wire is elongated in vibration in discharge process, so as to generate more oxygen radicals, longer electric discharge in addition
Silk can be effectively increased the collision probability of nitrogen oxide and oxygen radical, be also beneficial to NOxRemoval.When gas flow compared with
(500m greatly3More than) when, the present invention also vibrating electrode inside be set with a ground electrode, gas Jing initial discharge process after from
Vibrating electrode is flowed into, and electric discharge when vibrating electrode and ground electrode produces more oxygen radicals, so as to further remove
NOx, the gas after process ascends into absorption cell, further removes NO2And SO2.Although two region basic structures are similar, put
Diameter when electric due to region of discharge is different, and its equivalent capacity also has larger difference, therefore must divide on ground electrode and external electrode
Do not connect between ground a tunable capacitor, so that it is guaranteed that region of discharge discharges simultaneously.Additionally, when fuel is without fully burning
When, when oxygen content is higher, also the match pattern of adjustable condenser, realizes Uniform Discharge.
Description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is the structural representation of the external electrode of the embodiment of the present invention.
Fig. 3 is the high-field electrode structural representation of the embodiment of the present invention.
Specific embodiment
Referring to Fig. 1~3, the embodiment of the present invention is provided with AC power 1, interior electrode 2, high-field electrode 3, external electrode 4, support column
5th, variable capacitance 6, blast fence 7, high-field electrode through hole 8, vibrating device 9, suspension arrangement 10.
Support column 5 is placed in the middle of stack base, and for supporting interior electrode 2, interior electrode 2 is located at the top of external electrode 4, dispatch from foreign news agency
On the same axis, high-field electrode 3 is enclosed within outside interior electrode 2 for pole 4, high-field electrode 3 and interior electrode 2, interior electrode 2 and high-tension electricity
Gap is left between pole 3, variable capacitance 6 is located between interior electrode 2 and ground, and the upper end of high-field electrode 3 is connected with vibrating device 9,
The one end of vibrating device 9 is connected with high-field electrode lead 31, and the other end of vibrating device 9 is connected with suspension arrangement 10, hangs dress
Put 10 to be fixed on walling of flue;External electrode 4 is located at stack base and is suspended in flue inner wall, and the position of external electrode 4 is higher than to prop up
Dagger 5 and slightly below high-field electrode 3, are connected between external electrode lead 44 and ground electrode by variable capacitance 6;Blast fence 7 is by high pressure
Gas after electrode 3 and external electrode 4 are processed passes through the gap that high-field electrode through hole 8 is incorporated into high-field electrode 4 and interior electrode 2, from
And gas is processed again in uphill process;AC power 1 is electrically connected with high-field electrode 3.
The external electrode 4 is made up of insulating materials 41, metal bar 42, wire 43, external electrode lead 44, and metal bar 42 is embedded
In insulating materials 41, after metal bar 42 is connected by wire 43, is drawn with external electrode lead 44 and be connected with variable capacitance 6.
The high-field electrode 3 is made up of high-field electrode lead 31, insulating materials 32, wire 33, metal bar 34, metal bar 34
In being embedded in insulating materials 31, after metal bar 34 is connected by wire 33, is drawn with external electrode lead 31 and be connected with variable capacitance 6,
High-field electrode through hole 8 is located at the centre position of high-field electrode 3, and the gas that high-field electrode through hole 8 is used for after first time is processed is introduced
Processed between interior electrode 2 and high-field electrode 3.
The voltage peak adjustable range of the AC power 1 can be 0~30kV, and frequency-tuning range can be 1~150kHz.
The material of the external electrode 4 can adopt the one kind in ceramics, corundum, quartz, polytetrafluoroethylene (PTFE) etc., outside external electrode
Diameter can be 7.5~12.5mm, and the interior diameter of external electrode can be 1.5~2.5mm;The metal bar can be using the expansion such as tungsten bar system
The little resistant to elevated temperatures metal bar of number, metal bar can adopt 3~4, and the internal diameter of every metal bar can be 1~2mm, and length can be 500
~1000mm, the spacing of adjacent metal rod can be 2mm.
The length of the high-field electrode 3 can be 1200~2200mm, and its extraction wire is located at the top of electrode, with alternating current
The high-pressure side in source 1 is connected, and opens the high-field electrode through hole 8 of two 200mm in center.
The vibrating device can be using slider oscillation or electric and magnetic oscillation, and the frequency of the vibration can be 0.1~10kHz, shake
Dynamic amplitude can be 0.2mm.
The length of the interior electrode can be 500~1000mm, the extraction wire of interior electrode be located at the top of interior electrode and with
Ground is connected.
The material of the support column 5 can adopt the one kind in ceramics, corundum, quartz, polytetrafluoroethylene (PTFE) etc., support column 5 to use
The electrode 2 in supporting, and in causing electrode 2 and high-field electrode 3 be in on the same axis of flue.
The variable capacitance can set 2, wherein the variable capacitance connected with interior electrode 2 can adopt 100 μ F~1mF, it is and outer
The variable capacitance of the series connection of electrode 4 can adopt 500 μ F~2mF.
The material of the blast fence 7 can adopt the resistance to height of the insulation such as ceramic fiber cloth, asbestos, Teflon, polytetrafluoroethylene (PTFE)
The resilient material of temperature tool, one end of blast fence 7 is fixed on the top of high-field electrode through hole 8, to ensure to be shaken in high-field electrode 3
During will not fall off, and can prevent gas from spilling from above, the other end of blast fence 7 is enclosed within the outside of external electrode 4, with
Prevent the gas leakage after external electrode and high-field electrode process.
Due to various places fuel difference, NO in flue gas, NO after burningxAnd the content of mercury metal is also different, when putting through first
NO, NO are measured after electric room (high-field electrode 3 and the gap of external electrode 4)xAnd the content of mercury metal meets international standard time, flue gas enters
Enter to the variable capacitance that can pass through when the second arc chamber (high-field electrode 3 and interior electrode 2) in regulation between electrode and ground electrode
6, stop the electric discharge between high-field electrode 3 and interior electrode 2, gas is directly by so as to save energy consumption.
The high-field electrode can adopt the insulating element for having metal bar in cylindrical shape, whole high-field electrode to be suspended on vibration system
Under system, and it is connected with the high-field electrode of AC power.External electrode is being enclosed within the outer layer and internal layer of high-field electrode respectively, fixes
It is motionless, it is connected to the ground after series capacitance, flue gas passes into electric discharge first between external electrode and high-field electrode after dedusting
After process, high-field electrode is then passed through, is risen Jing after high-field electrode with interior electrode gap again discharge process, into absorption cell heel row
Put.Wherein external electrode is suspended on flue inner wall, and interior electrode is placed in bracing frame top, and blast fence is fixed on interior electrode, prevents
Gas is excessive and guides gas to enter high-field electrode.Whole device is placed in flue, and gas enters from below rear by the product that discharges
Liveliness proof oxygen radical and NO, NOxAnd mercury metal generates NO2Absorbed by absorption cell with mercury oxide.
When flue gas enters region of discharge between external electrode and high-field electrode (the first region of discharge), in high-field electrode and dispatch from foreign news agency
Under the voltage effect of 2~30kV of interpolar, and with the vibration of high-field electrode, substantial amounts of oxygen-containing freedom is produced after flue gas is breakdown
Base, it can be with NO, NOxAnd mercury metal generates NO2And mercury oxide, due to flue gas flow it is larger, remaining NO, NOxAnd mercury metal will
Reaction (the second region of discharge) is participated between high-field electrode and interior electrode.For the difference of high-temp combustion degree, oxygen content in flue gas
Also there is bigger difference, respectively in external electrode, interior electrode and a variable capacitance of connecting between ground electrode are allocated, and then are realized
Uniform Discharge.The method treatment effeciency is high, and need not add during process will not in any other chemical substance, and processing procedure
Produce new poisonous and harmful substance.Additionally, present configuration is simple, with low cost, it is convenient to mount and dismount.
The present invention can discharge under atmospheric conditions generation low temperature plasma, to eliminate nitric oxide, titanium dioxide three
The toxic components such as nitrogen, mercury metal, the device have simple to operate, power consumption less, purification thoroughly, non-secondary pollution, be easy to miniaturization
Or scale amplify, it is easily portable the advantages of.Pending gas rises from bottom, can sequentially pass through at two region of discharges
Reason, due to the vibration of high-field electrode, can improve the clearance of the pollutants such as NO.
Claims (10)
1. a kind of plasma discharge apparatus, it is characterised in that be provided with AC power, interior electrode, high-field electrode, external electrode, support
Post, variable capacitance, blast fence, high-field electrode through hole, vibrating device, suspension arrangement;
Support column is placed in the middle of stack base, and for supporting interior electrode, interior electrode is located at the top of external electrode, external electrode, high pressure
On same axis, high-field electrode is enclosed within interior electrode exterior, between leaving between interior electrode and high-field electrode for electrode and interior electrode
Gap, variable capacitance is located between interior electrode and ground, and high-field electrode upper end is connected with vibrating device, vibrating device one end and high pressure
Contact conductor is connected, and the vibrating device other end is connected with suspension arrangement, and suspension arrangement is fixed on walling of flue;External electrode position
In stack base and it is suspended in flue inner wall, the position of external electrode higher than support column and slightly below high-field electrode, external electrode draws
Connected by variable capacitance between line and ground electrode;Gas after blast fence processes high-field electrode and external electrode passes through high-field electrode
Through hole is incorporated into the gap of high-field electrode and interior electrode, and gas is processed again in uphill process;AC power and high-field electrode electricity
Connection.
2. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the external electrode is by insulating materials, metal
Rod, wire, external electrode lead composition, metal bar is embedded in insulating materials, after metal bar is connected by wire, uses external electrode lead
Extraction is connected with variable capacitance;
The material of the external electrode can adopt the one kind in ceramics, corundum, quartz, polytetrafluoroethylene (PTFE);
The overall diameter of the external electrode can be 7.5~12.5mm, and the interior diameter of external electrode can be 1.5~2.5mm.
3. as claimed in claim 2 a kind of plasma discharge apparatus, it is characterised in that the metal bar adopts tungsten bar, metal bar
Using 3~4, the internal diameter of every metal bar is 1~2mm, and length is 500~1000mm, and the spacing of adjacent metal rod is 2mm.
4. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the high-field electrode is drawn by high-field electrode
Line, insulating materials, wire, metal bar composition, metal bar is embedded in insulating materials, after metal bar is connected by wire, uses dispatch from foreign news agency
Pole lead is drawn and is connected with variable capacitance, and high-field electrode through hole is located at high-field electrode centre position, and high-field electrode through hole is used for will
Gas after processing for the first time is processed in introducing between electrode and high-field electrode;
The length of the high-field electrode can be 1200~2200mm, and its extraction wire is located at the top of electrode, with AC power
High-pressure side is connected, and opens the high-field electrode through hole of two 200mm in center;
The voltage peak adjustable range of the AC power can be 0~30kV, and frequency-tuning range can be 1~150kHz.
5. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the high-field electrode is using in cylindric
There is the insulating element of metal bar, whole high-field electrode is suspended under vibrational system, and is connected with the high-field electrode of AC power.
6. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the vibrating device adopts slider oscillation
Or electric and magnetic oscillation, the frequency of the vibration can be 0.1~10kHz, and the amplitude of vibration can be 0.2mm.
7. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the length of the interior electrode is 500~
1000mm, the extraction wire of interior electrode is located at the top of interior electrode and is connected to the ground.
8. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the material of the support column using ceramics,
One kind in corundum, quartz, polytetrafluoroethylene (PTFE), support column is used to support interior electrode, and electrode and high-field electrode are in causing
On the same axis of flue.
9. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the variable capacitance sets 2, wherein with
The variable capacitance of interior electrode series connection adopts 100 μ F~1mF, the variable capacitance connected with external electrode to adopt 500 μ F~2mF.
10. as claimed in claim 1 a kind of plasma discharge apparatus, it is characterised in that the material of the blast fence is using pottery
Porcelain fiber cloth, asbestos, Teflon, polytetrafluoroethylene (PTFE), one end of blast fence is fixed on high-field electrode through hole top, to ensure
Will not fall off during high-field electrode vibrations, and can prevent gas from spilling from above, the other end of blast fence is enclosed within dispatch from foreign news agency
The outside of pole, to prevent the gas leakage after external electrode and high-field electrode process.
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CN201510516330.0A CN105163476B (en) | 2015-08-21 | 2015-08-21 | Plasma discharge device |
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CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
JP2005237954A (en) * | 2004-01-27 | 2005-09-08 | I'm Pact World:Kk | Plasma chemical reactor and purifying/deodorizing equipment using plasma chemical reactor |
CN101181752A (en) * | 2007-12-14 | 2008-05-21 | 华南理工大学 | Method for preparing WC-Co series nano composite hard alloy powder |
CN101773780A (en) * | 2010-03-23 | 2010-07-14 | 昆明理工大学 | Method for depriving nitric oxide by plasma cooperating with low-temperature catalytic oxidation NO |
CN103681197A (en) * | 2013-12-11 | 2014-03-26 | 苏州市奥普斯等离子体科技有限公司 | Device for treating plasmas on inner wall of capillary glass tube |
CN204891559U (en) * | 2015-08-21 | 2015-12-23 | 厦门大学 | Atmospheric pressure plasma discharge handles waste gas device |
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2015
- 2015-08-21 CN CN201510516330.0A patent/CN105163476B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
JP2005237954A (en) * | 2004-01-27 | 2005-09-08 | I'm Pact World:Kk | Plasma chemical reactor and purifying/deodorizing equipment using plasma chemical reactor |
CN101181752A (en) * | 2007-12-14 | 2008-05-21 | 华南理工大学 | Method for preparing WC-Co series nano composite hard alloy powder |
CN101773780A (en) * | 2010-03-23 | 2010-07-14 | 昆明理工大学 | Method for depriving nitric oxide by plasma cooperating with low-temperature catalytic oxidation NO |
CN103681197A (en) * | 2013-12-11 | 2014-03-26 | 苏州市奥普斯等离子体科技有限公司 | Device for treating plasmas on inner wall of capillary glass tube |
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