CN105158854A - Optical echo wall micro-cavity structure modified by focused ion beam technology and method for modifying same by focused ion beam technology - Google Patents
Optical echo wall micro-cavity structure modified by focused ion beam technology and method for modifying same by focused ion beam technology Download PDFInfo
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- CN105158854A CN105158854A CN201510685118.7A CN201510685118A CN105158854A CN 105158854 A CN105158854 A CN 105158854A CN 201510685118 A CN201510685118 A CN 201510685118A CN 105158854 A CN105158854 A CN 105158854A
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- optical fiber
- annular region
- ion beam
- focused ion
- cavity structure
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/2934—Fibre ring resonators, e.g. fibre coils
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
Abstract
Provided is an optical echo wall micro-cavity structure modified by focused ion beam technology. The optical echo wall micro-cavity structure comprises a fiber. An annular area is disposed in the cladding of the fiber, has a refractive index over that of a fiber core, and is formed by modifying a corresponding area on the fiber by using focused ion beam technology. The annular area forms the optical echo wall micro-cavity structure. The optical echo wall micro-cavity structure has a beneficial effect that the optical echo wall micro-cavity structure is directly formed in the fiber and the surface of the fiber is not damaged.
Description
Technical field
The present invention relates to a kind of at fine type optics Echo Wall micro-cavity structure, particularly relate to optics Echo Wall micro-cavity structure and the method for the processing of a kind of focused ion beam process modification.
Background technology
Different from the resonator cavity that the Fresnel reflection by dielectric interface in conventional dry interferometer is formed, light is limited in resonator cavity by the continuous total reflection on dielectric cavity border by optics Echo Wall microcavity, therefore possess the characteristic of the extra small mode volume of ultrahigh quality Summing Factor, in fields such as nonlinear optics, Eurytrema coelomatium, ultrahigh resolution detection and ultralow threshold value laser instruments, there is important application prospect.
Typical optics Echo Wall microcavity comprises microballoon, micro-dish and micro-ring etc., generally adopts the modes such as mechanical lapping, surface tension or femto-second laser pulse to complete processing and fabricating in the materials such as the silicon dioxide of crystalline material, polymeric material and melting; Wherein, adopt the resonator cavity that mechanical lapping mode is produced, owing to being limited to the process conditions of mechanical lapping, resonant cavity size is comparatively large, is difficult to realize miniaturization, integrated; The smooth surface of the Echo Wall microcavity formed by surface tension, but resonator cavity can only be exposed at material end face, easily damages; The dependence of Echo Wall resonator cavity to material that femto-second laser pulse processes is lower, but its surfaceness reaches tens of even hundreds of nanometer, and its quality factor are not usually higher than 10
3magnitude.
At present, the Whispering-gallery-mode of passive microcavity is generally excited by three kinds of modes: prism, grinding optical fiber and tapered fiber, prism and grinding optical fiber excite the efficiency of Whispering-gallery-mode lower than tapered fiber, but the diametric requirements of tapered fiber is less than 2 microns and tapered fiber vulnerable to pollution and air turbulence impact; In addition in order to realize phase matching, adopting the refractive index of the microcavity of tapered fiber excite optically Whispering-gallery-mode close with the refractive index of conical fiber, therefore to the material of microcavity, there is selectivity.The system of above three kinds of excite optically Whispering-gallery-modes is all be separated, therefore the compactedness of whole system and stability lower.
The integrated research of optics Echo Wall microcavity is its practical inevitable requirement, by at micro optical fiber, the photonic crystal fiber corroded and fill microballoon can realize integrated optics Echo Wall microcavity in the structure such as very thin wall kapillary of excessive erosion, but the microballoon technique of filling very complicated and to the material of ball and size selective, find a kind of Highgrade integration and the simple method of manufacturing process is the major issue faced in current optics Echo Wall microcavity field.
Experimental study is verified, utilizes femto-second laser pulse can process optical ring Echo Wall microcavity in a fiber, but its rough surface.For improving the quality factor of Echo Wall microcavity, needing to carry out aftertreatment to microcavity surface, comprising the modes such as carbon dioxide laser heating, hydrofluorite corrosion and arc discharge.In order to improve the surface flatness (nanometer scale) of Echo Wall microcavity, adopt the mode of focused-ion-beam lithography can make the higher optics Echo Wall microcavity of quality factor in fibre cladding.Above two kinds of modes all need to arrange machined surface on optical fiber, and then on machined surface, arrange ring groove to form optics Echo Wall microcavity, destroy the structure of optical fiber itself, reduce its physical strength.
Summary of the invention
For the problem in background technology, the present invention proposes the optics Echo Wall micro-cavity structure of a kind of focused ion beam process modification processing, comprise optical fiber, its innovation is: be provided with an annular region in the covering of described optical fiber, the axial direction of described annular region is parallel with the radial direction of optical fiber, the axial width of annular region is greater than the core diameter of optical fiber, and the radial width of annular region is less than core diameter; Annular region crossing with fibre core (concrete crossing mode, can be that fibre core passes annular region and forms structure as alphabetical, also can be that fibre core and annular region are tangent; When intersecting in the mode of letter, light signal can enter in optics Echo Wall micro-cavity structure more efficiently, and when intersecting in tangent mode, the efficiency that light signal enters optics Echo Wall micro-cavity structure is more relatively low); The position of described fibre core on annular region axial direction is positioned at the axial span scope of annular region; The refractive index of described annular region is greater than fiber core refractive index; Described annular region is carried out modification by focused ion beam technique to the respective regions on optical fiber and obtains; Namely described annular region forms optics Echo Wall micro-cavity structure.
When adopting focused ion beam technique to carry out modification to fiber optic materials, due to the energy size of focused ion beam and fiber optic materials index increment relation also indefinite (but the positive correlation of the energy size of focused ion beam and fiber optic materials index increment is determined), therefore temporarily can't by directly setting concrete energy values to obtain the refractive index needed, those skilled in the art are when implementing of the present invention, first the energy size of focused ion beam can be set to a concrete numerical value, after element manufacturing is good, device is tested, if the refractive index of annular region does not meet the demands, after then heightening the energy of focused ion beam further, again making devices,
The principle of work of optics Echo Wall micro-cavity structure of the present invention is similar to existing optics Echo Wall micro-cavity structure, therefore does not repeat them here; Difference with the prior art of the present invention is: the optical fiber that addition of optics Echo Wall micro-cavity structure in the present invention, by the modifying function of focused ion beam technique to fiber optic materials, the annular region of high index of refraction is directly formed to play the effect of optics Echo Wall microcavity at inside of optical fibre, optical fiber surface stands intact, and the physical strength of optical fiber is better; And in prior art, on optical fiber during processing optical Echo Wall micro-cavity structure, need to carry out local failure to form the loop configuration needed for optics Echo Wall microcavity to optical fiber, the physical strength of optical fiber is poor.
Preferably, when adopting focused ion beam technique to carry out modification to the respective regions on optical fiber, with H
+as ion gun.
A method for focused ion beam process modification processing optical Echo Wall micro-cavity structure, as previously mentioned, concrete job operation is described optics Echo Wall micro-cavity structure:
1) regulate the relative position in optical fiber and A direction, make A direction parallel with the radial direction of optical fiber, and A direction is crossing with optical fiber;
2) with H
+(hydrogen ion), as ion gun, adopts focused ion beam technique along A direction by H
+focus in the axially end face place plane of annular region;
3) transmission optical fiber translation in a circumferential direction, the plane at described circumferencial direction place is vertical with A direction; During optical fiber translation, the circular trace that A direction is formed on optical fiber is positioned at fiber optic scope, and circular trace is crossing with the fibre core of optical fiber; During concrete enforcement, optical fiber with the clamping of three-D displacement platform, can carry out transmission optical fiber by three-D displacement platform and makes accurate circular motion;
4) after optical fiber translation in a circumferential direction multi-turn, control optical fiber parked, then transmission optical fiber is to the direction translation certain distance near focused ion beam transmitting terminal, then continues transmission optical fiber along described circumferencial direction translation;
5) operate repeatedly by mode in step 4), until optics Echo Wall micro-cavity structure machines.
Advantageous Effects of the present invention is: the optics Echo Wall micro-cavity structure providing a kind of new construction, and this optics Echo Wall micro-cavity structure is directly formed in optical fiber, optical fiber surface not damaged.
Accompanying drawing explanation
Fig. 1, process principle schematic diagram of the present invention;
Fig. 2, structural representation of the present invention;
In figure each mark corresponding to title be respectively: optical fiber 1, annular region 2, focused ion beam 3.
Embodiment
A kind of optics Echo Wall micro-cavity structure of focused ion beam process modification processing, comprise optical fiber 1, its innovation is: be provided with an annular region 2 in the covering of described optical fiber 1, the axial direction of described annular region 2 is parallel with the radial direction of optical fiber 1, the axial width of annular region 2 is greater than the core diameter of optical fiber 1, and the radial width of annular region 2 is less than core diameter; Annular region 2 is crossing with fibre core; The position of described fibre core on annular region 2 axial direction is positioned at the axial span scope of annular region 2; The refractive index of described annular region 2 is greater than fiber core refractive index; Described annular region 2 is carried out modification by focused ion beam technique to the respective regions on optical fiber 1 and obtains; Namely described annular region 2 forms optics Echo Wall micro-cavity structure.
Further, when adopting focused ion beam technique to carry out modification to the respective regions on optical fiber 1, with H
+as ion gun.
A kind of method of focused ion beam process modification processing optical Echo Wall micro-cavity structure, described optics Echo Wall micro-cavity structure comprises optical fiber 1, an annular region 2 is provided with in the covering of described optical fiber 1, the axial direction of described annular region 2 is parallel with the radial direction of optical fiber 1, the axial width of annular region 2 is greater than the core diameter of optical fiber 1, and the radial width of annular region 2 is less than core diameter; Annular region 2 is crossing with fibre core; The position of described fibre core on annular region 2 axial direction is positioned at the axial span scope of annular region 2; The refractive index of described annular region 2 is greater than fiber core refractive index; Described annular region 2 is carried out modification by focused ion beam technique to the respective regions on optical fiber 1 and obtains; Namely described annular region 2 forms optics Echo Wall micro-cavity structure;
Its innovation is: on optical fiber 1, process aforementioned optical Echo Wall micro-cavity structure as follows:
1) regulate optical fiber 1 and the relative position in A direction, make A direction parallel with the radial direction of optical fiber 1, and A direction is crossing with optical fiber 1;
2) with H
+as ion gun, adopt focused ion beam technique along A direction by H
+focus in the axially end face place plane of annular region 2;
3) transmission optical fiber 1 translation in a circumferential direction, the plane at described circumferencial direction place is vertical with A direction; During optical fiber 1 translation, the circular trace that A direction is formed on optical fiber 1 is positioned at optical fiber 1 scope, and circular trace is crossing with the fibre core of optical fiber 1;
4) after optical fiber 1 translation in a circumferential direction multi-turn, control optical fiber 1 parked, then transmission optical fiber 1 is to the direction translation certain distance near focused ion beam transmitting terminal, then continues transmission optical fiber 1 along described circumferencial direction translation;
5) operate repeatedly by mode in step 4), until optics Echo Wall micro-cavity structure machines.
Claims (3)
1. the optics Echo Wall micro-cavity structure of a focused ion beam process modification processing, comprise optical fiber (1), it is characterized in that: in the covering of described optical fiber (1), be provided with an annular region (2), the axial direction of described annular region (2) is parallel with the radial direction of optical fiber (1), the axial width of annular region (2) is greater than the core diameter of optical fiber (1), and the radial width of annular region (2) is less than core diameter; Annular region (2) is crossing with fibre core; The position of described fibre core on annular region (2) axial direction is positioned at the axial span scope of annular region (2); The refractive index of described annular region (2) is greater than fiber core refractive index; Described annular region (2) is carried out modification by focused ion beam technique to the respective regions on optical fiber (1) and obtains; Described annular region (2) namely forms optics Echo Wall micro-cavity structure.
2. the optics Echo Wall micro-cavity structure of focused ion beam process modification processing according to claim 1, is characterized in that: when adopting focused ion beam technique to carry out modification to the respective regions on optical fiber (1), with H
+as ion gun.
3. the method for a focused ion beam process modification processing optical Echo Wall micro-cavity structure, described optics Echo Wall micro-cavity structure comprises optical fiber (1), an annular region (2) is provided with in the covering of described optical fiber (1), the axial direction of described annular region (2) is parallel with the radial direction of optical fiber (1), the axial width of annular region (2) is greater than the core diameter of optical fiber (1), and the radial width of annular region (2) is less than core diameter; Annular region (2) is crossing with fibre core; The position of described fibre core on annular region (2) axial direction is positioned at the axial span scope of annular region (2); The refractive index of described annular region (2) is greater than fiber core refractive index; Described annular region (2) is carried out modification by focused ion beam technique to the respective regions on optical fiber (1) and obtains; Described annular region (2) namely forms optics Echo Wall micro-cavity structure;
It is characterized in that: on optical fiber (1), process aforementioned optical Echo Wall micro-cavity structure as follows:
1) regulate optical fiber (1) and the relative position in A direction, make A direction parallel with the radial direction of optical fiber (1), and A direction is crossing with optical fiber (1);
2) with H
+as ion gun, adopt focused ion beam technique along A direction by H
+focus in the axially end face place plane of annular region (2);
3) transmission optical fiber (1) translation in a circumferential direction, the plane at described circumferencial direction place is vertical with A direction; During optical fiber (1) translation, A direction is positioned at optical fiber (1) scope in the upper circular trace formed of optical fiber (1), and circular trace is crossing with the fibre core of optical fiber (1);
4) after optical fiber (1) translation in a circumferential direction multi-turn, control optical fiber (1) parked, then transmission optical fiber (1) is to the direction translation certain distance near focused ion beam transmitting terminal, then continues transmission optical fiber (1) along described circumferencial direction translation;
5) operate repeatedly by mode in step 4), until optics Echo Wall micro-cavity structure machines.
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Cited By (2)
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| CN106226971A (en) * | 2016-10-20 | 2016-12-14 | 重庆大学 | Echo Wall microcavity tuner and method |
| CN110095837A (en) * | 2019-06-03 | 2019-08-06 | 呜啦啦(广州)科技有限公司 | A kind of novel light element and preparation method thereof |
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| WO2015050591A2 (en) * | 2013-06-12 | 2015-04-09 | Washington University | Tunable add-drop filter with an active resonator |
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| US20070237460A1 (en) * | 2006-04-07 | 2007-10-11 | Xudong Fan | Hollow Core Optical Ring Resonator Sensor, Sensing Methods, and Methods of Fabrication |
| WO2015050591A2 (en) * | 2013-06-12 | 2015-04-09 | Washington University | Tunable add-drop filter with an active resonator |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106226971A (en) * | 2016-10-20 | 2016-12-14 | 重庆大学 | Echo Wall microcavity tuner and method |
| CN110095837A (en) * | 2019-06-03 | 2019-08-06 | 呜啦啦(广州)科技有限公司 | A kind of novel light element and preparation method thereof |
| CN110095837B (en) * | 2019-06-03 | 2023-08-29 | 呜啦啦(广州)科技有限公司 | Novel photoconductive element and manufacturing method thereof |
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| CN105158854B (en) | 2018-07-24 |
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