CN105136011B - The detection device of film thickness - Google Patents
The detection device of film thickness Download PDFInfo
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- CN105136011B CN105136011B CN201510639939.7A CN201510639939A CN105136011B CN 105136011 B CN105136011 B CN 105136011B CN 201510639939 A CN201510639939 A CN 201510639939A CN 105136011 B CN105136011 B CN 105136011B
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Abstract
This application provides a kind of detection devices of film thickness.The detection device includes：Public electrode, multiple detecting electrode groups and detection circuit.Wherein, each detecting electrode group is opposite in a first direction with public electrode and interval is arranged, and the first surface of public electrode is opposite with each first surface of detecting electrode group, multiple detecting electrode groups are spaced setting in a second direction, each detecting electrode group includes at least one detecting electrode, first direction is vertical with the first plane, and second direction is vertical with the moving direction of film to be measured, and the first plane is parallel with second direction；Detection circuit is electrically connected with multiple detecting electrode groups, and detection circuit includes displacement control unit, and displacement control unit is used to control the output sequence of the electrical signal of reaction of multiple detecting electrode groups.The detection device can more accurately detect the thickness of film to be measured.
Description
Technical field
This application involves the technical fields of film thickness detection, in particular to a kind of detection device of film thickness.
Background technology
Laminar article, such as paper, bill, plastic film, textile fabric on-line continuous thickness measure, in its product
Production, detection, processing, recycling etc. during in increasingly consequence.Currently, the detection technique of film thickness will wrap
Include the technologies such as ultrasonic, the induction, eddy current type of Hall, reflection-type ultrasonic wave, transmission-type.But the corresponding detection dress of these technologies
It is larger to set volume, cost is higher, is unfavorable for the application of these technologies.
In recent years, by the detection technique of interelectrode electrostatic induction progress film thickness among continuous research and probe,
Such as a kind of capacitive paper thickness sensor of the patent disclosure of publication number CN210302446Y, mainly by the appearance of capacitor
Amount variation is converted to the variation of frequency of oscillation, then the variation of frequency is converted into the variation of voltage by frequency pressure conversion module.It is public
The number of opening be CN103363887A patent also disclose that a kind of detection method of material thickness, using the pole plate of capacity plate antenna as
The Sensitive Apparatus of Thickness sensitivity surveys capacitance movable polar plate caused by the thickness change of object and generates displacement, leads to capacity plate antenna
The capacity of device changes.
Above-mentioned these reduce inspection to a certain extent by the technology of the detection film thickness of interelectrode electrostatic induction
The volume of device is surveyed, but there is still a need for transmission mechanisms, therefore is not consistent also with the miniaturization of detection device.
In addition, detection device in the prior art cannot accurately measure the thickness of each position of film, it is unfavorable for film production
The uniformity of product thickness.
Invention content
The application is intended to provide a kind of detection device of film thickness, cannot accurately be surveyed with solving detection device in the prior art
The problem of measuring the thickness of each position of film.
To achieve the goals above, according to the one side of the application, a kind of detection device of film thickness, the detection are provided
Device includes：Public electrode, multiple detecting electrode groups and detection circuit.Wherein, each detecting electrode group exists with above-mentioned public electrode
Opposite and interval setting on first direction, and the first table of the first surface of above-mentioned public electrode and each above-mentioned detecting electrode group
Face is opposite, and multiple above-mentioned detecting electrode groups are spaced setting in a second direction, and each above-mentioned detecting electrode group includes at least one detection
Electrode, above-mentioned first direction is vertical with the first plane, and above-mentioned second direction is vertical with the moving direction of film to be measured, and above-mentioned first is flat
Face is parallel with above-mentioned second direction；Detection circuit is electrically connected with multiple above-mentioned detecting electrode groups, and above-mentioned detection circuit includes displacement
Control unit, above-mentioned displacement control unit are used to control the output sequence of the electrical signal of reaction of multiple above-mentioned detecting electrode groups.
Further, above-mentioned displacement control unit includes switch module and switch control module.
Further, in above-mentioned switch module include multiple switch, each detecting electrode group one above-mentioned switch of correspondence.
Further, above-mentioned switch control module includes shift register, the outside that above-mentioned shift register will receive
In control signal transmission to above-mentioned switch module, each above-mentioned switch is opened one by one.
Further, said external control signal is driven by clock signal.
Further, above-mentioned detection circuit further includes sampling unit, impedance matching unit and amplifying unit.Wherein, it samples
The input terminal of unit is electrically connected with above-mentioned detecting electrode group；Impedance matching unit one end and the output end of above-mentioned sampling unit are electrically connected
It connects, the other end is electrically connected with above-mentioned displacement control unit；Amplifying unit one end is electrically connected with above-mentioned displacement control unit.
Further, above-mentioned detection circuit further includes reset unit, the setting of above-mentioned reset unit above-mentioned sampling unit with
Between above-mentioned impedance matching unit, before the sampling of above-mentioned sampling unit, above-mentioned reset unit is by the signal of above-mentioned detecting electrode
It is resetted.
Further, above-mentioned reset unit implements above-mentioned reset, the valid interval of above-mentioned reset signal using reset signal
The invalid interval of the corresponding electric signal being applied on above-mentioned public electrode.
Further, above-mentioned detection device further includes first substrate and second substrate, second substrate and above-mentioned first substrate
Be spaced setting on above-mentioned first direction, the first surface of above-mentioned first substrate towards above-mentioned second substrate first surface, and
The first surface of the first surface of above-mentioned first substrate and above-mentioned second substrate is each parallel to above-mentioned first plane, above-mentioned common electrical
Pole is arranged on the first surface of above-mentioned first substrate, and above-mentioned detecting electrode is arranged on the first surface of above-mentioned second substrate,
The second surface in above-mentioned second substrate is arranged in above-mentioned detection circuit.
Further, above-mentioned detection device further includes the first bucking electrode and secondary shielding electrode, wherein the first shielding electricity
Pole is arranged on the first surface of above-mentioned first substrate, and is arranged around above-mentioned public electrode；The setting of secondary shielding electrode exists
On the first surface of above-mentioned second substrate, and it is arranged around above-mentioned detecting electrode.
Using the detection device of the application, detection device includes multiple detecting electrode groups, when film to be measured is logical by transmission
When road, each detecting electrode induces charge, because different detecting electrode groups corresponds to the different location of film to be measured, no
The how much differences for the charge that same detecting electrode induces, also, the displacement control unit in the detection device can will detect
The electrical signal of reaction of electrode group exports in sequence, can be obtained by the thickness at film different location to be measured in this way.Also, the inspection
Surveying device can measure to obtain the thickness of film to be measured without the generation displacement of mechanical device leading electrode, lighter, conveniently make
With being applicable in many fields.
Description of the drawings
The accompanying drawings which form a part of this application are used for providing further understanding of the present application, and the application's shows
Meaning property embodiment and its explanation do not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：
Fig. 1 shows the side view of the detection device for the film thickness that a kind of exemplary embodiment of the application proposes；
Fig. 2 shows a kind of structure charts for the detection circuit that embodiment provides；
Fig. 3 shows a kind of circuit theory schematic diagram of the detection device for the film thickness that embodiment provides；
Fig. 4 shows a kind of work schedule schematic diagram of the detection device for the film thickness that embodiment provides；
Fig. 5 shows a kind of vertical view of the first surface for the public electrode that embodiment provides；
Fig. 6 shows a kind of vertical view of the first surface for the detecting electrode that embodiment provides；
Fig. 7 shows a kind of cross-sectional view of the detection device for the film thickness that embodiment provides；
Fig. 8 shows the cross-sectional view of the detection device for the film thickness that another embodiment provides；And
The sequence diagram that Fig. 9 shows a kind of output signal SIG in embodiment, controls signal SP and clock signal clk.
Specific implementation mode
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the application.Unless another
It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific implementation mode, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or combination thereof.
As background technology is introduced, existing detection device cannot be accurately detected the thickness of film different location to be measured
Degree, as above in order to solve the problems, such as, present applicant proposes a kind of detection devices of film thickness.
One kind of the application is typically in embodiment, provides a kind of detection device of film thickness, the inspection as shown in Figure 1
It includes public electrode 12, multiple detecting electrode groups 2 and detection circuit 25 to survey device.Wherein, each detecting electrode group 2 with it is above-mentioned public
Electrode 12 is opposite in a first direction and interval is arranged, and the first surface of above-mentioned public electrode 12 and each above-mentioned detecting electrode
The first surface of group 2 is opposite, and multiple above-mentioned detecting electrode groups 2 are spaced setting in a second direction, and each above-mentioned detecting electrode group 2 includes
At least one detecting electrode 22, above-mentioned first direction is vertical with the first plane, the movement of above-mentioned second direction and above-mentioned film to be measured
Direction is vertical, and above-mentioned first plane is parallel with above-mentioned second direction.Detection circuit 25 is electrically connected with multiple above-mentioned detecting electrode groups 2
It connects, above-mentioned detection circuit 25 includes displacement control unit 253, as shown in Fig. 2, above-mentioned displacement control unit 253 is more for controlling
The output sequence of the electrical signal of reaction of a above-mentioned detecting electrode group 2.
In the detection device, public electrode 12 and each detecting electrode 22 are all plane electrode, public electrode 12 and detection electricity
Pole 22 is opposite in a first direction and interval setting, public electrode 12 form similar capacity plate antenna knot with each detecting electrode 22
Structure, and without fixed media filler but form a transmission channel therebetween.After electrically charged on public electrode 12,
Charge can be induced on each detecting electrode 22.
Induced on detecting electrode 22 charge number depend on area, two electrodes in two electrodes being oppositely arranged
Dielectric constant between the quantity of electric charge and two electrodes separated by a distance, entrained on public electrode 12.Certain in structure
In the case of, only the dielectric constant between two electrodes is related for the charge induced on detecting electrode 22.When film to be measured is by transmitting
When channel, the dielectric constant of two interelectrode media is changed, makes the quantity of the charge incuded on detecting electrode 22 also therewith
It changing, the thickness of film to be measured is different, and two interelectrode dielectric constants also differ, and then incude on detecting electrode 22
Charge also differs, therefore the thickness of film to be measured can be calculated by the number of electrical signal of reaction on Detection electrode.
Detection device in the application includes multiple detecting electrode groups 2, when film to be measured passes through transmission channel, Mei Gejian
It surveys electrode 22 and induces charge, because different detecting electrode groups 2 corresponds to the different location of film to be measured, different detections
The how much differences for the charge that electrode 22 induces, also, the displacement control unit 253 in the detection device can be by detecting electrode
The electrical signal of reaction of group 2 exports in sequence, can be obtained by the thickness at film different location to be measured in this way.Also, the detection
Device generates displacement without mechanical device leading electrode and can measure to obtain the thickness of film to be measured, lighter, easy to use,
It is applicable in many fields.
In a kind of embodiment of the application, further includes the power supply being electrically connected with public electrode 12 in the detection device, be used for
Electric signal is provided, and public electrode 12 and detecting electrode 22 are conductive electrode, are formed by conductive material.
In a kind of embodiment of the application, displacement control unit 253 is by switch module 253a and switch control module 253b two
Part is constituted, and Fig. 3 is the circuit theory schematic diagram of the detection device of the film thickness of the application, and switch control module 253b will be received
External control signal SP signals after, it is gradually transferred to corresponding to switch module 253a each detecting electrode group 2 (as
Element) switch on, so that the switch corresponding to each pixel is opened successively, after switch corresponding to each pixel is opened, corresponding picture
Electrical signal of reaction on element will be transferred on signal bus, be formed corresponding to one-row pixels according to sequential in signal general line
Signal.
Include multiple switch, each detecting electrode in another embodiment of the application, in above-mentioned switch module 253a
Group 2 corresponds to an above-mentioned switch.
In order to more rapidly and accurately by the external control signal SP signal transmissions to switch module 253a received, on
It includes shift register to state switch control module 253b, and above-mentioned shift register passes the external control signal SP signals received
It transports in above-mentioned switch module 253a, opens each above-mentioned switch one by one.
In another embodiment of the application, as shown in figure 3, said external controls signal SP signals in clock signal clk
Under signal driving, the switch of each pixel corresponding to switch module 253a is gradually transferred to by internal shift register
On, and respective pixel is opened successively.
In the another embodiment of the application, as shown in Fig. 2, above-mentioned detection circuit 25 includes sampling unit 251, impedance
With unit 252 and amplifying unit 254.Wherein, the input terminal of sampling unit 251 is electrically connected with above-mentioned detecting electrode group 2；Impedance
It is electrically connected with the output end of above-mentioned sampling unit 251 with 252 one end of unit, the other end is electrically connected with above-mentioned displacement control unit 253
It connects；254 one end of amplifying unit is electrically connected with the other end of above-mentioned displacement control unit 253.
Sampling unit 251 is by the electric signal transmission incuded on detecting electrode 22 to impedance matching unit 252, impedance
Carry out shaping, raising stability with unit 252 to electrical signal of reaction waveform.The signal of sampling is analog signal, impedance matching
Unit 252 is usually made of transistor circuit.Displacement control unit 253 is used to control the induction of the output of impedance matching unit 252
The sequence of electric signal.Signal detected by multiple pixels is transferred in a certain order in signal general line, total in signal
On route the signal corresponding to one-row pixels is formed according to sequential.Also, electrical signal of reaction is a kind of fainter signal, is needed
By the signal on signal bus after amplifying unit 254 is amplified processing, number could be carried out preferably in subsequent conditioning circuit
Change and calculation process.Therefore, amplifying unit 254 according to each pixel of ordered pair corresponding signal when certain on signal bus one by one
It is amplified, those skilled in the art can select suitable amplifying unit 254 according to specific circumstances, such as can select difference
Divide amplifying unit 254.The thickness of each position of film to be measured can be more accurately detected in this way.
The signal that amplifying unit 254 exports can both be directly transferred to subsequent conditioning circuit and carry out THICKNESS CALCULATION.Of the invention real
It applies in example, the calculation of film thickness to be measured is calculated with specific reference to electrical signal of reaction, may be used in the prior art any
The mode of thickness is carried out according to charge inducing or induced voltage, details are not described herein again.
Further include output unit 255 in a kind of embodiment of the application, in above-mentioned detection circuit 25, output unit 255
One end is electrically connected with the other end of above-mentioned amplifying unit 254.The signal that amplifying unit 254 exports can also pass through output unit
255, which are transmitted to subsequent conditioning circuit, carries out THICKNESS CALCULATION.
Output unit 255 is unit whether being controlled system conducting, if output unit 255 is connected, by amplifying unit
254 output signal is transmitted to subsequent conditioning circuit and carries out THICKNESS CALCULATION, if control output unit 255 disconnects, stops to current
The signal that amplifying unit 254 is exported carries out THICKNESS CALCULATION.By the way that output unit 255 is arranged, realizes and selectively carry out thickness
Degree calculates.
In a kind of embodiment of the application, above-mentioned detection circuit 25 further includes reset unit 256, above-mentioned reset unit 256
It is arranged between above-mentioned sampling unit 251 and above-mentioned impedance matching unit 252, is resetted before the sampling of above-mentioned sampling unit 251
The reset signal that unit 256 is sent out resets the signal on above-mentioned detecting electrode 22.
In another preferred embodiment of the application, in order to can be realized as to sampling unit using simple method
The reset of signal in 251, above-mentioned reset unit 256 implement above-mentioned reset using reset signal RESET signal, as shown in figure 4, on
The valid interval for stating reset signal RESET signal corresponds to the invalid interval for being applied to the electric signal POP on above-mentioned public electrode 12.
In another embodiment of the application, as shown in Figure 1, above-mentioned detection device further includes：First substrate 11 and second
Substrate 21.Wherein second substrate 21 and first substrate 11 is spaced setting on above-mentioned first direction, and the of above-mentioned first substrate 11
One surface is towards the first surface of above-mentioned second substrate 21, and the first surface of above-mentioned first substrate 11 and above-mentioned second substrate 21
First surface each parallel to above-mentioned first plane, the first surface in above-mentioned first substrate 11 is arranged in above-mentioned public electrode 12
On, above-mentioned detecting electrode 22 is arranged on the first surface of above-mentioned second substrate 21, and the setting of above-mentioned detection circuit 25 is above-mentioned the
The second surface of two substrates 21.
First substrate 11 is the carrier of public electrode 12, and second substrate 21 is the carrier of detecting electrode 22, and the first base
Plate 11 and second substrate 21 are staggered relatively to facilitate composition transmission channel.It is smoothly passed between two pole plates for the ease of film to be measured
Defeated, according to the difference of the size of film product to be measured, the distance between two pole plates is between 1mm to 10mm.But the distance of the two is simultaneously
It is not limited to the range, the distance of the two can be arranged in suitable range according to specific circumstances by those skilled in the art.
In a kind of embodiment of the application, above-mentioned public electrode 12 includes spaced multiple public electrode portions, ability
The public electrode portion of certain amount can be arranged in field technique personnel according to actual conditions.
First substrate 11 can be glass substrate, PCB substrate, metal substrate sheet or ceramic wafer substrate, second substrate 21
It can be one kind in aforesaid substrate.The material of two substrates can it is identical can not also be identical.
First substrate 11 is PCB substrate in a kind of embodiment of the application, and required figure is designed in PCB substrate
Public electrode 12 is arranged in picture, and by power supply to 12 input electrical signal of public electrode, it is made to carry charge.And the implementation
In example, second substrate 21 is also PCB substrate.
In the another embodiment of the application, the voltage applied on public electrode 12 is between 10~50V, art technology
Personnel can apply properly public electrode 12 according to board structure and the distance between public electrode 12 and detecting electrode 22
Voltage.
It is 24V to the voltage that public electrode 12 applies in more specifically a kind of embodiment.And the voltage signal is pulse
Voltage signal, such as the POP signals in Fig. 4, duty ratio can be determined according to the sequential of the signal of the output of detecting electrode 22, this
The duty ratio 50% of POP pulse voltage signals in a kind of embodiment of invention.
In order to reduce interference of the noise signal to the signal on public electrode 12, as shown in Figure 1, simultaneously in order to reduce noise
Interference of the signal to the signal on detecting electrode 22, preferably above-mentioned detection device further include the first bucking electrode 13 and secondary shielding
Electrode 23.Wherein, it as shown in figure 5, the first bucking electrode 13 is arranged on the first surface of above-mentioned first substrate 11, and surrounds
Above-mentioned public electrode 12 is arranged；Secondary shielding electrode 23 is arranged on the first surface of above-mentioned second substrate 21, and around upper
State the setting of detecting electrode 22.
In a kind of embodiment of the application, as shown in fig. 6, detection device includes multiple detecting electrode groups 2, and it is multiple on
It states detecting electrode group 2 and is spaced setting in a second direction, above-mentioned second direction is vertical with the above-mentioned moving direction of film to be measured, and each
Above-mentioned detecting electrode group 2 includes along spaced 2 detecting electrodes 22 of third direction, above-mentioned third direction and above-mentioned first party
To vertical, and above-mentioned third direction is vertical with above-mentioned second direction.
In the above embodiments, multiple detecting electrode groups 2 constitute multiple pixels, can by the way that multiple detecting electrode groups 2 are arranged
To measure the thickness at film different location to be measured, the accuracy of detection of detection device can be further increased in this way.Art technology
The number of pixel can be arranged according to the requirement of specific film to be measured and accuracy of detection in personnel.
In order to enable detecting electrode 22 covers film to be measured as far as possible, the gap between adjacent pixel is as small as possible, also
It is to say that the area of each detecting electrode 22 wants as big as possible, the accuracy of detection device can be further increased in this way.
In another embodiment of the application, adjacent 2 above-mentioned detecting electrodes 22 in each above-mentioned detecting electrode group 2
Interval is less than each length of the above-mentioned detecting electrode 22 on above-mentioned third direction.Two adjacent detection electricity in one pixel
Interval between pole 22 is related to the response speed of signal with the movement velocity of film to be measured and detection device, for the ease of brighter
Signal intensity on two adjacent detecting electrodes 22 of true differentiation, the interval between two detecting electrodes 22 in a pixel can
With larger, but interval is excessive, dropout can be caused, so the interval of the two is still less than each above-mentioned detecting electrode 22
Length on above-mentioned third direction.
In a kind of embodiment of the application, length of the detecting electrode 22 on third direction is 4mm, two in a pixel
Being spaced between 1~3mm between a detecting electrode 22.
In another embodiment of the application, as shown in Figure 1, above-mentioned detection device further includes input unit 14 and input and output
Portion 24.Wherein, input unit 14 is used to the electric signal of above-mentioned power supply being input to above-mentioned public electrode 12, and above-mentioned input unit 14 is arranged
In the second surface of above-mentioned first substrate 11, input and output portion 24 is used to provide voltage to above-mentioned detection circuit 25, and will be above-mentioned
The second surface in above-mentioned second substrate 21 is arranged in the electric signal output of detection circuit 25, above-mentioned input and output portion 24.
Further include power supply in a kind of embodiment of the application, in the detection device, power supply is electrically connected with public electrode 12, and one
In kind embodiment, power supply is electrically connected with by input unit 14 with public electrode 12, and power supply provides electric signal to public electrode 12.
In order to which further accurate detection obtains the thickness of each position of film to be measured, preferably all above-mentioned detection electricity of the application
The region that pole 22 surrounds is less than or equal to the area of the first surface of above-mentioned public electrode 12 in the projected area of the first plane.More into
One step explanation, that is to say, that the region that all above-mentioned detecting electrodes 22 surround is first area in the view field of the first plane,
The first surface of public electrode 12 is second area in the view field of the first plane, and first area is in second area.
In a kind of embodiment of the application, when above-mentioned detection device includes a detecting electrode 22, above-mentioned detecting electrode
22 total length in a second direction is more than or equal to the length of above-mentioned film to be measured；When above-mentioned detection device includes along above-mentioned second party
When to the N number of above-mentioned detecting electrode group 2 set gradually, the above-mentioned detecting electrode group of first above-mentioned detecting electrode group 2 and n-th 2
Distance between above-mentioned second direction is more than or equal to the length of above-mentioned film to be measured, the shifting of above-mentioned second direction and above-mentioned film to be measured
Dynamic direction is vertical.Accurate testing result can be further obtained in this way, wherein N >=2.
In another embodiment of the application, as shown in fig. 7, the first surface of above-mentioned first substrate 11 and above-mentioned second base
The first spacing board 32 and the second spacing board 52, above-mentioned first spacing board 32 and above-mentioned first substrate 11 are provided in the interval of plate 21
And second substrate 21 is vertical, above-mentioned first spacing board 32 is parallel with above-mentioned second spacing board 52.Between first spacing board 32 and second
Partition board 52 is for adjusting the size of transmission channel in a second direction.
Have in a kind of embodiment, as shown in figure 8, above-mentioned detection device further includes the first connecting plate 31 and the second connecting plate
51, above-mentioned first connecting plate 31 is arranged on the second surface of above-mentioned first substrate 11, and above-mentioned second connecting plate 52 is arranged upper
On the second surface for stating second substrate 21, it is provided in the interval between above-mentioned first connecting plate 31 and above-mentioned second connecting plate 51
First spacing board 32 and the second spacing board 52, and above-mentioned first spacing board 32 hangs down with above-mentioned first substrate 11 and second substrate 21
Directly, above-mentioned first spacing board 32 is parallel with above-mentioned second spacing board 52.The first spacing board 32 and second interval in the embodiment
Plate 52 is for adjusting the size of transmission channel in a second direction.
In order to enable those skilled in the art can clearly understand the scheme of the application, below with reference to specific
Embodiment illustrates.
In a kind of specific embodiment of the application, as shown in Figure 1, detection device includes power supply, first substrate 11, the second base
Plate 21, the first bucking electrode 13,23, one, the secondary shielding electrode detecting electrode group 2 of public electrode 12,40 (40 pixels),
Input unit 14, input and output portion 24 and detection circuit 25.
Wherein, first substrate 11 and second substrate 21 are PCB substrate, between detecting electrode 22 and public electrode 12 away from
From for 2mm.Between adjacent pixel in a second direction between be divided into 0.4mm, the length of each pixel in a second direction is
4.6mm, the detection total length of detection device in a second direction are 200mm.Each pixel includes 2 above-mentioned detecting electrodes
22, also, 2 above-mentioned detecting electrodes 22 on above-mentioned third direction between be divided into 2mm, each detecting electrode 22 is in third direction
On length be 4mm.
Also, as shown in Fig. 2, detection circuit 25 includes sampling unit 251, reset unit 256, impedance matching unit
252, displacement control unit 253, amplifying unit 254 and output unit 255.And displacement control unit 253 includes switch module
253a and switch control module 253b, wherein amplifying unit 254 is differential amplification unit, 251 input terminal of sampling unit with it is above-mentioned
Detecting electrode 22 is electrically connected, and sampling unit 251, impedance matching unit 252, displacement control unit 253, amplifying unit 254, defeated
Go out unit 255 to be sequentially connected electrically, and output unit 255 is electrically connected with one end of input and output portion 24, it will be after testing at circuit 25
It manages obtained inductive signal to be delivered in subsequent circuit, converts electrical signals to thickness.
Power supply applies public electrode 12 by input unit 14 voltage signal of 24V, when film to be measured passes through transmission channel,
40 pixels in the first surface of second substrate 21 are set, electric signal is induced.A detecting electrode 22 in each pixel
Electrical signal of reaction be transmitted to an input terminal of sampling unit 251, the electrical signal of reaction of another detecting electrode 22 is transmitted to
Another input terminal of sampling unit 251.
The electrical signal of reaction of detecting electrode 22 is required for before being input to sampling unit 251 every time through reset unit 256
Reset is zeroed out to the data in detecting electrode 22, to ensure that the signal in sampling unit 251 is accurate.Reset unit 256 by
Reset signal RESET is controlled.
After sampling unit 251 resets, the electrical signal of reaction of detecting electrode 22 is input in sampling unit 251, and through resistance
After the processing of anti-matching unit 252, handled by displacement control unit 253.Signal in sampling unit 251 is analog signal,
Impedance matching unit 252 is made of transistor circuit, and shaping can be carried out to signal waveform, improves stability.
Displacement control unit 253 is made of switch module 253a and switch control module 253b two parts, as shown in figure 3,
The external control signal SP received under the driving of clock signal clk, is passed through internal displacement by switch control module 253b
Register is gradually transferred on the switch of each pixel corresponding to switch module 253a, make switch corresponding to each pixel according to
Secondary unlatching, after the switch corresponding to each pixel is opened, the electrical signal of reaction in respective pixel (detecting electrode group 2) will transmit
Onto signal bus, the switch corresponding to each pixel is opened successively, and the signal detected by each pixel will transmit successively
Onto signal general line, the signal corresponding to one-row pixels, the signal on signal bus are formed according to sequential in signal general line
It is transmitted in amplifying unit 254 and is amplified successively, and amplified signal is input to input and output portion through output unit 255
24, then be delivered in subsequent conditioning circuit by input and output portion 24.
Fig. 4 is the work schedule schematic diagram of the detection device of the present invention, and SP signals are external control signal, are started per a line
Scanning, CLK signal is system operating clock signals, and SP signals pass through internal shifting under the driving of clock signal clk signal
Bit register is gradually transferred on the switch of each pixel corresponding to switch module 253a, and opens respective pixel successively.
RESET signal is the control signal of reset unit 256, and useful signal reading is being carried out by each pixel of reset signal
Reset clearing will be carried out before taking, to wait until each pixel accurately true useful signal.RESET signal and POP signals
Action sequence is connected.POP signals are the pulse voltage signal being applied on public electrode 12, in RESET signal term of validity section
Corresponding public electrode 12 is not apply alive section.
Fig. 9 is the sequence diagram between output signal SIG signals, control signal SP signals and CLK signal.Pass through displacement
Control unit 253 obtains signal V1 and V2 on two electrodes of each pixel, 2 detections of each pixel successively on the data bus
Signal on electrode 22 exports outward after carrying out differential amplification by differential amplification unit 254 and output unit 255 again, and rear
It is digitized in continuous circuit and calculation process, forms the image of thickness distribution.
It can be seen from the above description that the application the above embodiments realize following technique effect：
Detection device in the application includes multiple detecting electrode groups, when film to be measured passes through transmission channel, Mei Gejian
It surveys electrode and induces charge, because different detecting electrode groups corresponds to the different location of film to be measured, different detections electricity
The how much differences for the charge that pole induces, also, the displacement control unit in the detection device can be by the sense of detecting electrode group
It answers electric signal to export in sequence, can be obtained by the thickness at film different location to be measured in this way.Also, the detection device is not necessarily to
Mechanical device leading electrode generates displacement and can measure to obtain the thickness of film to be measured, lighter, easy to use, can apply
Into many fields.
The foregoing is merely the preferred embodiments of the application, are not intended to limit this application, for the skill of this field
For art personnel, the application can have various modifications and variations.Within the spirit and principles of this application, any made by repair
Change, equivalent replacement, improvement etc., should be included within the protection domain of the application.
Claims (8)
1. a kind of detection device of film thickness, which is characterized in that the detection device includes：
Public electrode (12)；
Multiple detecting electrode groups (2), and interval setting opposite in a first direction with the public electrode (12), and it is described public
The first surface of electrode (12) is opposite with each first surface of detecting electrode group (2), multiple detecting electrode groups (2)
Interval setting, each detecting electrode group (2) include at least one detecting electrode (22) in a second direction, the first direction with
First plane is vertical, and the second direction is vertical with the moving direction of film to be measured, and first plane is flat with the second direction
Row；And
Detection circuit (25) is electrically connected with multiple detecting electrode groups (2), and the detection circuit (25) includes shift control list
First (253), the displacement control unit (253) are used to control the output of the electrical signal of reaction of multiple detecting electrode groups (2)
Sequentially,
The detection circuit (25) further includes：
Sampling unit (251), input terminal are electrically connected with the detecting electrode group (2)；
Impedance matching unit (252), one end are electrically connected with the output end of the sampling unit (251), the other end and the displacement
Control unit (253) is electrically connected；And
Amplifying unit (254), one end are electrically connected with the displacement control unit (253),
The detection circuit (25) further includes reset unit (256), and the reset unit (256) is arranged in the sampling unit
(251) between the impedance matching unit (252), before the sampling unit (251) sampling, the reset unit
(256) signal of the detecting electrode (22) is resetted.
2. detection device according to claim 1, which is characterized in that the displacement control unit (253) includes switching molding
Block (253a) and switch control module (253b).
3. detection device according to claim 2, which is characterized in that opened comprising multiple in the switch module (253a)
It closes, each detecting electrode group (2) corresponds to a switch.
4. detection device according to claim 3, which is characterized in that the switch control module (253b) includes that displacement is posted
The external control signal received is transmitted in the switch module (253a), opens one by one by storage, the shift register
Each described switch.
5. detection device according to claim 4, which is characterized in that the external control signal is driven by clock signal.
6. detection device according to claim 1, which is characterized in that the reset unit (256) is real using reset signal
The reset is applied, the valid interval of the reset signal corresponds to the dead space for being applied to the electric signal on the public electrode (12)
Between.
7. detection device according to any one of claim 1 to 6, which is characterized in that the detection device further includes：
First substrate (11)；
Second substrate (21) is spaced setting, the first substrate (11) with the first substrate (11) in said first direction
First surface towards the second substrate (21) first surface,
And the first surface of the first surface of the first substrate (11) and the second substrate (21) is each parallel to described first
Plane, the public electrode (12) are arranged on the first surface of the first substrate (11), detecting electrode (22) setting
On the first surface of the second substrate (21), second table of detection circuit (25) setting in the second substrate (21)
Face.
8. detection device according to claim 7, which is characterized in that the detection device further includes：
First bucking electrode (13) is arranged on the first surface of the first substrate (11), and surrounds the public electrode
(12) it is arranged；And
Secondary shielding electrode (23) is arranged on the first surface of the second substrate (21), and surrounds the detecting electrode
(22) it is arranged.
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| CN105136012A (en) * | 2015-09-30 | 2015-12-09 | 威海华菱光电股份有限公司 | Detection apparatus of film thickness |
| CN105806206B (en) * | 2016-03-25 | 2019-01-08 | 威海华菱光电股份有限公司 | Thickness detection apparatus |
| CN105931360B (en) * | 2016-04-01 | 2019-04-09 | 威海华菱光电股份有限公司 | The detection device of film thickness |
| CN105674871A (en) * | 2016-04-01 | 2016-06-15 | 威海华菱光电股份有限公司 | Film thickness detection device |
| CN106023412B (en) * | 2016-05-23 | 2019-06-04 | 威海华菱光电股份有限公司 | The detection method and detection system of film thickness exception |
| CN106091910B (en) * | 2016-05-26 | 2018-05-25 | 威海华菱光电股份有限公司 | The detection device of film thickness |
| CN106197248B (en) * | 2016-07-21 | 2018-05-29 | 威海华菱光电股份有限公司 | The detection device of film thickness |
| CN106441067B (en) * | 2016-08-31 | 2019-06-04 | 威海华菱光电股份有限公司 | Thickness detection apparatus and method |
| CN107063069A (en) * | 2017-02-28 | 2017-08-18 | 威海华菱光电股份有限公司 | film thickness detecting device and method |
| CN108413881B (en) * | 2017-12-12 | 2020-05-12 | 威海华菱光电股份有限公司 | Thickness detection method and device, and thickness image sensor |
| CN117091489B (en) * | 2023-10-16 | 2023-12-22 | 青禾晶元(天津)半导体材料有限公司 | Device and method for detecting thickness of top film of composite structure |
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| CN205027302U (en) * | 2015-09-30 | 2016-02-10 | 威海华菱光电股份有限公司 | Detection apparatus for membrane is thick |
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| JP2922376B2 (en) * | 1992-12-26 | 1999-07-19 | キヤノン株式会社 | Sheet thickness measuring device |
| JP3775601B2 (en) * | 2003-04-17 | 2006-05-17 | セイコーエプソン株式会社 | Capacitance detection device and driving method thereof, fingerprint sensor, and biometric authentication device |
| JP4755283B2 (en) * | 2007-07-26 | 2011-08-24 | 富士通株式会社 | Paper thickness detector |
| CN203882369U (en) * | 2013-08-12 | 2014-10-15 | 起山电子株式会社 | Bill thickness detecting apparatus |
| CN103925867A (en) * | 2014-04-29 | 2014-07-16 | 威海华菱光电股份有限公司 | Thickness sensor and thickness measuring method |
| CN103971445A (en) * | 2014-05-13 | 2014-08-06 | 威海华菱光电股份有限公司 | Paper money thickness detecting device |
| CN103985189A (en) * | 2014-05-13 | 2014-08-13 | 威海华菱光电股份有限公司 | Device for measuring thickness of banknote |
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