CN105135050A - Vacuum pressure regulating system - Google Patents
Vacuum pressure regulating system Download PDFInfo
- Publication number
- CN105135050A CN105135050A CN201510605585.4A CN201510605585A CN105135050A CN 105135050 A CN105135050 A CN 105135050A CN 201510605585 A CN201510605585 A CN 201510605585A CN 105135050 A CN105135050 A CN 105135050A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- regulating system
- pressure regulating
- controller
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
The invention discloses a vacuum pressure regulating system. The vacuum pressure regulating system comprises a controller, a vacuum valve, a pressure sensor, potentiometers, a motor and a control panel. The controller is in communication with the pressure sensor through the vacuum valve. The motor is connected with the vacuum valve. The pressure sensor is in communication with the potentiometers. The control panel is connected with the controller. By means of the mode, according to the vacuum pressure regulating system, the vacuum valve is rapidly and automatically regulated in the whole process, accuracy is high, and meanwhile the vacuum pressure regulating system is economical and practical due to the fact that the motor serves as a power source. The whole valve is compact in structure, small in size and suitable for wide popularization.
Description
Technical field
The present invention relates to the field of vacuum technique, particularly relate to a kind of vacuum pressure regulating system.
Background technique
Vacuum pressure regulator is requisite parts on vacuum equipment, is used for regulating the pressure of vacuum equipment, and the controllability of its operation and stability directly affect the usability of vacuum equipment.Vacuum pressure regulator is generally by regulating valve port conductance size to regulate reaction chamber degree of vacuum, and conductance is the ability of the element transmission gases such as vacuum pipe, hole, baffle plate, trap and valve.The minimum controlled conductance of general valve is less, the sensitivity of valve is higher, therefore need in vacuum pressure design of Regulator process to increase spool thickness as far as possible, rotate freely in valve pocket with respect to spool again simultaneously, gap can not be too small, therefore require that valve pocket, spool and valve rod have higher precision, this just brings difficulty to Design and manufacture.
Summary of the invention
The technical problem that the present invention mainly solves is to provide a kind of vacuum pressure regulating system, and the fast automatic realization of whole process is to the adjustment of vacuum valve, and precision is higher, adopts motor to be used as power source simultaneously, economic, practical.Whole valve arrangement is compact, and volume is little, is applicable to extensively promoting.
For solving the problems of the technologies described above, the technological scheme that the present invention adopts is: provide a kind of vacuum pressure regulating system, comprise controller, vacuum valve, pressure transducer, potentiometer, motor and control panel, described controller is communicated by vacuum valve and pressure transducer, described motor is connected with vacuum valve, described pressure transducer communicates with multiple described potentiometer respectively, and described control panel is connected with controller.
In a preferred embodiment of the present invention, described controller adopts frequency-variable controller.
In a preferred embodiment of the present invention, the quantity of described potentiometer is three.
The invention has the beneficial effects as follows: vacuum pressure regulating system of the present invention, the fast automatic realization of whole process is to the adjustment of vacuum valve, and precision is higher, adopts motor to be used as power source simultaneously, economic, practical.Whole valve arrangement is compact, and volume is little, is applicable to extensively promoting.
Accompanying drawing explanation
In order to be illustrated more clearly in the technological scheme in the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings, wherein:
Fig. 1 is the structural representation of a preferred embodiment of vacuum pressure regulating system of the present invention;
Being labeled as in accompanying drawing: 1, housing, 2, filter cleaner, 3, filter, 4, pressure changes and turn device, 5, vacuum chamber, 6, silicon chip, 7, electrical connection terminal.
Embodiment
Be clearly and completely described to the technological scheme in the embodiment of the present invention below, obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making other embodiments all obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1, the embodiment of the present invention comprises:
A kind of vacuum pressure regulating system, comprise controller, vacuum valve, pressure transducer, potentiometer, motor and control panel, described controller is communicated by vacuum valve and pressure transducer, described motor is connected with vacuum valve, described pressure transducer communicates with multiple described potentiometer respectively, and described control panel is connected with controller.
In above-mentioned, described controller adopts frequency-variable controller.Remote controller for converter is that one realizes the remote-operated intelligent instrument of frequency variator, controls the startup of frequency variator, stopping, acceleration, deceleration, clockwise and anticlockwise by RS485 network remote, and the running state information such as frequency of okperation, rotating speed of display frequency variator in real time.Unit communication distance can reach 1200M (9600bps), effectively reduces the interference of frequency variator.
In the present embodiment, the quantity of described potentiometer is three.Potentiometer is (English: Potentiometer) to be the one of variable resistor.Normally be made up of resistance body and rotation or sliding system, namely move on resistance body by a movable contact, obtaining portion component voltage exports.The resistance body of potentiometer has two fixed ends, manually regulates rotating shaft or sliding handle, changes the position of movable contact on resistance body, then changes the resistance value between movable contact and any one fixed end, thus change the size of voltage and electric current.
In sum, vacuum pressure regulating system of the present invention, the fast automatic realization of whole process is to the adjustment of vacuum valve, and precision is higher, adopts motor to be used as power source simultaneously, economic, practical.Whole valve arrangement is compact, and volume is little, is applicable to extensively promoting.
The foregoing is only embodiments of the invention; not thereby the scope of the claims of the present invention is limited; every utilize description of the present invention to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical field, be all in like manner included in scope of patent protection of the present invention.
Claims (3)
1. a vacuum pressure regulating system, it is characterized in that, comprise controller, vacuum valve, pressure transducer, potentiometer, motor and control panel, described controller is communicated by vacuum valve and pressure transducer, described motor is connected with vacuum valve, described pressure transducer communicates with multiple described potentiometer respectively, and described control panel is connected with controller.
2. vacuum pressure regulating system according to claim 1, is characterized in that, described controller adopts frequency-variable controller.
3. vacuum pressure regulating system according to claim 1, is characterized in that, the quantity of described potentiometer is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510605585.4A CN105135050A (en) | 2015-09-22 | 2015-09-22 | Vacuum pressure regulating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510605585.4A CN105135050A (en) | 2015-09-22 | 2015-09-22 | Vacuum pressure regulating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105135050A true CN105135050A (en) | 2015-12-09 |
Family
ID=54720518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510605585.4A Pending CN105135050A (en) | 2015-09-22 | 2015-09-22 | Vacuum pressure regulating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105135050A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040159354A1 (en) * | 2000-12-15 | 2004-08-19 | Per Cederstav | Applications for closed-loop motor control |
| JP2011039824A (en) * | 2009-08-12 | 2011-02-24 | Kitz Sct:Kk | Vacuum pressure control system |
| JP2011134183A (en) * | 2009-12-25 | 2011-07-07 | Ckd Corp | Vacuum control valve with slow exhausting function |
| CN202746762U (en) * | 2012-07-03 | 2013-02-20 | 天津市金佳同达科技有限公司 | Vacuum pressure regulating valve |
| CN103912720A (en) * | 2010-01-15 | 2014-07-09 | Ckd株式会社 | Vacuum Control System And Vacuum Control Valve |
-
2015
- 2015-09-22 CN CN201510605585.4A patent/CN105135050A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040159354A1 (en) * | 2000-12-15 | 2004-08-19 | Per Cederstav | Applications for closed-loop motor control |
| JP2011039824A (en) * | 2009-08-12 | 2011-02-24 | Kitz Sct:Kk | Vacuum pressure control system |
| JP2011134183A (en) * | 2009-12-25 | 2011-07-07 | Ckd Corp | Vacuum control valve with slow exhausting function |
| CN103912720A (en) * | 2010-01-15 | 2014-07-09 | Ckd株式会社 | Vacuum Control System And Vacuum Control Valve |
| CN202746762U (en) * | 2012-07-03 | 2013-02-20 | 天津市金佳同达科技有限公司 | Vacuum pressure regulating valve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151209 |