CN105129743B - One kind is used for SF6The de-watering apparatus of gas concentration unit - Google Patents
One kind is used for SF6The de-watering apparatus of gas concentration unit Download PDFInfo
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- CN105129743B CN105129743B CN201510580922.9A CN201510580922A CN105129743B CN 105129743 B CN105129743 B CN 105129743B CN 201510580922 A CN201510580922 A CN 201510580922A CN 105129743 B CN105129743 B CN 105129743B
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- drainage arrangement
- gas concentration
- watering apparatus
- switch valve
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 27
- 238000010438 heat treatment Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 8
- 238000005057 refrigeration Methods 0.000 claims description 7
- 239000003507 refrigerant Substances 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 4
- 238000004064 recycling Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012279 drainage procedure Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
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- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Degasification And Air Bubble Elimination (AREA)
Abstract
The present invention relates to one kind to be used for SF6The de-watering apparatus of gas concentration unit, the pressure control device for storing up drainage arrangement, controlling pressure in storage drainage arrangement being connected including condensing unit, with condensing unit, it is equipped with the top of storage drainage arrangement and is used for the air inlet/outlet being connected with pressure control device, the water inlet being connected with condensing unit, storage drainage arrangement bottom is equipped with the discharge outlet controlled by first switch valve, second switch valve is provided between storage drainage arrangement and condensing unit, storage drainage arrangement is arranged on the lower section of condensing unit.De-watering apparatus of the present invention can work normally under positive and negative pressure condition, and store up remaining a small amount of SF in drainage arrangement after the switch valve closed between condensing unit and storage drainage arrangement is only leaked during draining6Gas, solves and current is used for SF6The de-watering apparatus of gas concentration unit can only under positive pressure work, have a large amount of SF in removal process6The problem of leakage.
Description
Technical field
It is more particularly to a kind of to be used for SF the present invention relates to gas concentration unit field6The de-watering apparatus of gas concentration unit.
Background technology
Need to utilize SF after the water pressure test is finished in the product such as cylinder and bellows6Gas is hunted leak, and examination of hunting leak
SF after testing6Contain substantial amounts of vapor, such a SF containing a large amount of vapor in gas6If gas is without dehydration
Directly recycle, vapor will condense into liquid water under the effect of compressor end high pressure, it is possible to cause equipment badly damaged, make
There is pipeline ice and the failure such as blocks up in equipment.
Currently used for SF6The de-watering apparatus of gas concentration unit is usually the water removal principle system using air compressor system
It is standby to form, but the equipment of this water removal can only all work under positive pressure, and substantial amounts of SF is had in drainage procedure6Gas
Body, which is discharged into air, pollutes environment.
The content of the invention
The object of the present invention is to provide one kind to be used for SF6The de-watering apparatus of gas concentration unit, it is current to solve the problems, such as
Be used for SF6The de-watering apparatus of gas concentration unit can only under positive pressure work, have a large amount of SF in removal process6The problem of leakage.
The technical scheme is that：One kind is used for SF6The de-watering apparatus of gas concentration unit, including condensing unit, with
The storage drainage arrangement of condensing unit connection, described is used for SF6The de-watering apparatus of gas concentration unit further includes control storage draining
The pressure control device of pressure in device, storage drainage arrangement at the top of be equipped be used for be connected with pressure control device air inlet/outlet,
The water inlet being connected with condensing unit, storage drainage arrangement bottom are equipped with the discharge outlet of first switch valve control, storage drainage arrangement with
Second switch valve is provided between condensing unit, storage drainage arrangement is arranged on the lower section of condensing unit.
The pressure control device includes vacuum extractor, compressed air feedway and stores up drainage arrangement for detecting
Interior pressure and control is arranged between storage drainage arrangement and compressed air feedway, storage drainage arrangement and vacuum extractor
The pressure control switch that switch valve opens and closes.
The air inlet/outlet has two, and one is connected with vacuum extractor, another connects with compressed air feedway
Connect, the 3rd switch valve is provided between the storage drainage arrangement and vacuum extractor, storage drainage arrangement is supplied with compressed air
The 4th switch valve is provided between device.
The air inlet/outlet only has one, and air inlet/outlet is with that can realize that storage drainage arrangement is supplied with compressed air respectively
The 5th switch valve connection individually turned between device, vacuum extractor.
The pressure control switch includes first pressure controlling switch and the control the 4th that the 3rd switch valve of control opens and closes
The second pressure controlling switch that switch valve opens and closes.
Described is used for SF6The de-watering apparatus of gas concentration unit starts to recycle SF6During gas, second switch valve is opened, the
First, three, four switch valves are closed, and the condensed device of vapor enters storage drainage arrangement after becoming liquid water；When SF is recycled in stopping6Gas
During body, pressure in first pressure controlling switch detection storage drainage arrangement, when confirming that pressure is negative pressure in detection storage drainage arrangement, the
Two switch valves are closed, and the 4th switch valve is opened is filled with compressed air into storage drainage arrangement, until first pressure controlling switch is examined
Measure after pressure reaches setting value, first pressure controlling switch controls the 4th switch valve to close, and then first switch valve is opened, storage
Drainage arrangement draining；Pressure is that zero draining is completed in second pressure controlling switch detection storage drainage arrangement, and first switch valve closes
Close, then second pressure controlling switch controls the 3rd switch valve to open, and vacuum pumping is carried out to storage drainage arrangement.
The SF6The de-watering apparatus of gas concentration unit further includes electric control system, in the switch valve extremely
Few one is the electric switching valve controlled by electric control system.
The condensing unit includes refrigeration unit and drainer, and the refrigerant being connected with refrigeration unit is provided with drainer
Circulation pipe.
Described is used for SF6The de-watering apparatus of gas concentration unit further includes heating unit, sets and needs on condensing unit
Recycle SF6The SF to be recycled of air inlet, heating unit and condensing unit6Air inlet connects.
Described is used for SF6The de-watering apparatus of gas concentration unit, which further includes, to be used for and SF6Signal fills in gas concentration unit
Putting connection makes SF6Pressure in gas concentration unit is not less than the pressure monitor of setting value.
Beneficial effects of the present invention are：Described is used for SF6The de-watering apparatus of gas concentration unit, including condensing unit,
The pressure control device for storing up drainage arrangement, controlling pressure in storage drainage arrangement being connected with condensing unit, storage drainage arrangement top
Equipped with the air inlet/outlet for being connected with pressure control device, the water inlet being connected with condensing unit, storage drainage arrangement bottom is set
There is the discharge outlet controlled by first switch valve, store up and second switch valve is provided between drainage arrangement and condensing unit, storage draining dress
The lower section for being arranged on condensing unit is put, is starting to recycle SF6During gas, the pressure in storage drainage arrangement is made by pressure control device
Power is in negative pressure, SF to be recycled6Vapor in gas is arranged after condensing unit becomes liquid water by condensing unit and storage
Second switch valve between water installations flows into storage drainage arrangement, it is necessary to close during draining between condensing unit and storage drainage arrangement
Second switch valve, makes the pressure in storage drainage arrangement be in positive pressure by pressure control device, opens storage drainage arrangement bottom
First switch valve realizes draining, and the first switch valve of storage drainage arrangement bottom is closed after draining, passes through pressure control device
Pressure in storage drainage arrangement is set to be in negative pressure, the second switch valve opened condensing unit and stored up between drainage arrangement continues to recycle
SF6Gas.With there is a large amount of SF during draining6Gas leaks and what can only be worked under positive pressure is traditionally used for SF6Gas concentration unit
De-watering apparatus compare, de-watering apparatus of the present invention can work normally under positive and negative pressure condition, and only be leaked during draining
Remaining a small amount of SF in drainage arrangement is stored up after the switch valve closed between condensing unit and storage drainage arrangement6Gas.
Further, the pressure control device includes vacuum extractor, compressed air feedway and for examining
It is true with taking out with compressed air feedway, storage drainage arrangement that the pressure and control surveyed in storage drainage arrangement are arranged on storage drainage arrangement
The pressure control switch that switch valve between empty device opens and closes, is taken out the compressed air stored up in drainage arrangement by vacuum extractor
SF to be recycled can be ensured by going out6The purity of gas.
Further, it is described to be used for SF6The de-watering apparatus of gas concentration unit further includes electric control system, described
Switch valve be by electric control system control electric switching valve, can be realized by electric control system and entirely be used for SF6
The automation mechanized operation of the de-watering apparatus of gas concentration unit.
Further, the de-watering apparatus of the gas concentration unit further includes heating unit, is set on condensing unit
There is SF to be recycled6The SF to be recycled of air inlet, heating unit and condensing unit6Air inlet connects, and passes through the heating unit pair of setting
SF to be recycled6Gas is heated, the SF to be recycled after heating6The steam temperature rise mixed in gas, follow-up cold
Condensed in solidifying device more abundant.
Brief description of the drawings
One kind that Fig. 1 is the present invention is used for SF6The schematic diagram of the embodiment 1 of the de-watering apparatus of gas concentration unit；
One kind that Fig. 2 is the present invention is used for SF6The removal process signal of the embodiment 1 of the de-watering apparatus of gas concentration unit
Figure；
One kind that Fig. 3 is the present invention is used for SF6The drainage procedure signal of the embodiment 1 of the de-watering apparatus of gas concentration unit
Figure；
One kind that Fig. 4 is the present invention is used for SF6The vacuum of the embodiment 1 of the de-watering apparatus of gas concentration unit is shown
It is intended to.
Embodiment
One kind of the present invention is used for SF6The embodiment 1 of the de-watering apparatus of gas concentration unit：As Figure 1-Figure 4, it is described
Be used for SF6The de-watering apparatus of gas concentration unit includes heating unit 1, condensing unit, storage drainage arrangement 6, pressure control dress
Put and electric control system, wherein pressure control device include vacuum extractor 7, compressed air feedway 4 and pressure control
Switch 51, pressure control switch 52 and it is used for and SF6Recoil simulator connection makes SF in gas concentration unit6In gas concentration unit
Pressure be not less than setting value pressure monitor, when pressure monitor detects SF6Pressure in gas concentration unit is less than
During the pressure value of setting, SF6Recoil simulator in gas concentration unit can be used for SF to described6The water removal of gas concentration unit
Device sends the signal that recycling terminates.Heating unit 1 is connected with condensing unit, and is set between heating unit 1 and condensing unit
It is equipped with motor-driven valve MV1；Condensing unit includes refrigeration unit 2 and drainer 3, is provided with what is be connected with refrigeration unit 2 in drainer 3
Refrigerant circulation pipe 31, drainer 3 are provided with the SF being connected with heating unit 1 at the top of 3 one end of drainer6Gas feed, use
In with SF6SF of the connection of gas concentration unit 8 at the top of 3 other end of drainer6Gas vent, positioned at 3 bottom of drainer with
The water outlet that drainage arrangement 6 connects is stored up, motor-driven valve MV3, drainer 3 and SF are provided between drainer 3 and storage drainage arrangement 66
Motor-driven valve MV2 is provided between gas concentration unit 8；Storage drainage arrangement 6 is arranged on the lower section of drainer 3, and storage drainage arrangement 6 is set
It is equipped with and the water inlet positioned at 6 top of storage drainage arrangement is connected with drainer 3, is connected with compressed air feedway 4 positioned at storage row
The air inlet at the top of water installations 6, be connected with vacuum extractor 7 positioned at the gas outlet at 6 top of storage drainage arrangement, fill positioned at storing up draining
The discharge outlet of 6 bottoms is put, stores up and motor-driven valve MV4, storage drainage arrangement 6 is provided between drainage arrangement 6 and compressed air feedway 4
Motor-driven valve MV5 is provided between vacuum extractor 7, is provided with motor-driven valve MV6 at discharge outlet.The detection storage of pressure control switch 51
Pressure in drainage arrangement 6 simultaneously controls motor-driven valve MV4, pressure and control in the detection storage drainage arrangement 6 of pressure control switch 52
Motor-driven valve MV5.For SF6The motor-driven valve and pressure control switch of the de-watering apparatus of gas concentration unit are by electric control system
Control.
Fig. 2-Fig. 3 is used for SF to be of the present invention6The schematic diagram of the workflow of the de-watering apparatus of gas concentration unit,
Wherein thick lines part represents device and is in starting state.For SF6The de-watering apparatus of gas concentration unit receives SF6Gas
Retracting device 8 recycles SF6After gas signal, electric control system automatically controls motor-driven valve MV1, MV2, MV3 opening, heating unit
1st, refrigeration unit 2 starts, store up negative pressure of the reset pressure in drainage arrangement 6 for setting, to be recycled containing a large amount of vapor
SF6Gas is from SF to be recycled6After the heated device 1 of gas tank 9 heats, enter drainer 3 through motor-driven valve MV1, pass through adding for setting
Thermal 1 is to SF to be recycled6Gas is heated, the SF to be recycled after heating6The steam temperature rise mixed in gas,
Condensed in follow-up condensing unit more abundant.By 3 Water vapor condensation after cooling of drainer into liquid water, liquid water is through electricity
Dynamic valve MV3 is stored in the storage drainage arrangement 6 of the lower section of drainer 3, by the SF of water removal6Gas enters SF through motor-driven valve MV26Gas
Body retracting device 8, after de-watering apparatus is receiving retracting device recycling end signal, the detection storage draining of pressure control switch 51
Pressure value in device 6, confirms that pressure is that electric control system automatically controls electricity when being in negative pressure state in storage drainage arrangement 6
Dynamic valve MV1, MV2, MV3 are closed, while are opened motor-driven valve MV4 and be filled with dry compressed air, after pressure balance, are closed electronic
Valve MV4 opens motor-driven valve MV6 and discharges liquid water at the same time；After the completion of Auto-drainage operation, the detection storage row of pressure control switch 52
6 pressure value of water installations, after the completion of confirming to be in zero-pressure state, that is, drain operation in storage drainage arrangement 6, motor-driven valve MV6 is closed automatically
Close, while open vacuum extractor 7 and motor-driven valve MV5, vacuumize process is carried out to storage drainage arrangement 6, passes through vacuum extractor 7
The compressed air extraction stored up in drainage arrangement 6 can be ensured into SF to be recycled6The purity of gas.When pressure control switch 52 detects
After vacuum reaches requirement in storage drainage arrangement 6, motor-driven valve MV5 is automatically closed, and after motor-driven valve MV5 is closed in place, vacuumizes
Device 7 stops, whole water removal, draining, the equal automation mechanized operation of vacuum.It is of the present invention to be used for SF6Gas recycling dress
The de-watering apparatus put can work normally under positive and negative pressure condition, and only leaked during draining and close condensing unit and storage drainage arrangement
Between switch valve after store up drainage arrangement in remaining a small amount of SF6Gas, and it is exhausted that general technology, which requires recycling to stop pressure value,
To pressure 1330Pa, far below standard atmospheric pressure force value, so remaining SF in actual storage drainage arrangement6Gas flow is considerably less.
It is higher than standard atmospheric pressure force value in addition, the positive pressure described in the present embodiment is finger pressure, negative pressure is that pressure is less than standard atmospheric pressure
Force value.
One kind of the present invention is used for SF6The embodiment 2 of the de-watering apparatus of gas concentration unit：The present embodiment and embodiment 1
Differ only in：The air inlet/outlet of storage drainage arrangement only has one, and pressure control switch only has one, and vacuum extractor is with pressing
Contracting air feeder is connected by electric three-way valve with storing up the air inlet/outlet of drainage arrangement, pressure control switch detection storage draining
Pressure in device simultaneously controls electric three-way valve.Pressure control switch control three-way magnetic valve is closed during water storage device water storage, is made
Storage drainage arrangement and compressed air feedway, vacuum extractor are all disconnected；When storage drainage arrangement needs to be filled with compressed air,
Pressure control switch control three-way magnetic valve connects storage drainage arrangement and compressed air feedway；Storing up drainage arrangement needs to take out very
When empty, pressure control switch control three-way magnetic valve connects storage drainage arrangement and vacuum extractor.Other parts embodiment and reality
It is identical to apply example 1, repeats no more.
In other embodiments of the invention, heating unit can also be not provided with；Pressure control switch described in embodiment 1
It can also be one, and control solenoid valve MV4 and MV5 at the same time.
Claims (10)
1. one kind is used for SF6The de-watering apparatus of gas concentration unit, including condensing unit, be connected with condensing unit storage draining dress
Put, it is characterised in that：Described is used for SF6The de-watering apparatus of gas concentration unit further includes pressure in control storage drainage arrangement
Pressure control device, storage drainage arrangement top is equipped with the air inlet/outlet for being used for being connected with pressure control device and condensing unit connects
The water inlet connect, storage drainage arrangement bottom are equipped with the discharge outlet of first switch valve control, store up between drainage arrangement and condensing unit
Second switch valve is provided with, storage drainage arrangement is arranged on the lower section of condensing unit, is starting to recycle SF6During gas, pass through pressure
Control device makes the pressure in storage drainage arrangement be in negative pressure, SF to be recycled6Vapor in gas becomes by condensing unit
Storage drainage arrangement is flowed into after into liquid water, it is necessary to close second switch valve during draining, fills storage draining by pressure control device
Pressure in putting is in positive pressure, opens first switch valve and realizes draining.
2. one kind according to claim 1 is used for SF6The de-watering apparatus of gas concentration unit, it is characterised in that：The pressure
Force control device includes vacuum extractor, compressed air feedway and is set for the pressure in detection storage drainage arrangement and control
Put the pressure that the switch valve between storage drainage arrangement and compressed air feedway, storage drainage arrangement and vacuum extractor opens and closes
Controlling switch.
3. one kind according to claim 2 is used for SF6The de-watering apparatus of gas concentration unit, it is characterised in that：It is described into
Gas outlet has two, and one is connected with vacuum extractor, another is connected with compressed air feedway, storage draining dress
Put and the 3rd switch valve is provided between vacuum extractor, store up and be provided with the 4th between drainage arrangement and compressed air feedway
Switch valve.
4. one kind according to claim 2 is used for SF6The de-watering apparatus of gas concentration unit, it is characterised in that：It is described into
Gas outlet only has one, air inlet/outlet and can realize storage drainage arrangement respectively with compressed air feedway, vacuum extractor
Between individually turn on the 5th switch valve connection.
5. one kind according to claim 3 is used for SF6The de-watering apparatus of gas concentration unit, it is characterised in that：The pressure
Power controlling switch includes second that the first pressure controlling switch that the 3rd switch valve of control opens and closes is opened and closed with the 4th switch valve of control
Pressure control switch.
6. one kind according to claim 5 is used for SF6The de-watering apparatus of gas concentration unit, it is characterised in that：The use
In SF6The de-watering apparatus of gas concentration unit starts to recycle SF6During gas, second switch valve is opened, and first and third, four switch valves close
Close, the condensed device of vapor enters storage drainage arrangement after becoming liquid water；When SF is recycled in stopping6During gas, first pressure control
Pressure in system switch detection storage drainage arrangement, when confirming that pressure is negative pressure in detection storage drainage arrangement, second switch valve is closed, the
Four switch valves are opened is filled with compressed air into storage drainage arrangement, until first pressure controlling switch detects that pressure reaches setting
After value, first pressure controlling switch controls the 4th switch valve to close, and then first switch valve is opened, and stores up drainage arrangement draining；The
Pressure is that zero draining is completed in two pressure control switch detection storage drainage arrangement, and first switch valve is closed, then second pressure
Controlling switch controls the 3rd switch valve to open, and vacuum pumping is carried out to storage drainage arrangement.
7. one kind according to any one of claim 1-6 is used for SF6The de-watering apparatus of gas concentration unit, its feature exist
In：The SF6The de-watering apparatus of gas concentration unit further includes electric control system, at least one in the switch valve
For the electric switching valve controlled by electric control system.
8. one kind according to any one of claim 1-6 is used for SF6The de-watering apparatus of gas concentration unit, its feature exist
In：The condensing unit includes refrigeration unit and drainer, and the refrigerant circulation being connected with refrigeration unit is provided with drainer
Pipe.
9. one kind according to any one of claim 1-6 is used for SF6The de-watering apparatus of gas concentration unit, its feature exist
In：Described is used for SF6The de-watering apparatus of gas concentration unit further includes heating unit, and SF to be recycled is provided with condensing unit6
The SF to be recycled of air inlet, heating unit and condensing unit6Air inlet connects.
10. one kind according to any one of claim 1-6 is used for SF6The de-watering apparatus of gas concentration unit, its feature exist
In：Described is used for SF6The de-watering apparatus of gas concentration unit, which further includes, to be used for and SF6Recoil simulator connects in gas concentration unit
Connecing makes SF6Pressure in gas concentration unit is not less than the pressure monitor of setting value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510580922.9A CN105129743B (en) | 2015-09-14 | 2015-09-14 | One kind is used for SF6The de-watering apparatus of gas concentration unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510580922.9A CN105129743B (en) | 2015-09-14 | 2015-09-14 | One kind is used for SF6The de-watering apparatus of gas concentration unit |
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| Publication Number | Publication Date |
|---|---|
| CN105129743A CN105129743A (en) | 2015-12-09 |
| CN105129743B true CN105129743B (en) | 2018-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510580922.9A Active CN105129743B (en) | 2015-09-14 | 2015-09-14 | One kind is used for SF6The de-watering apparatus of gas concentration unit |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108413258A (en) * | 2018-04-28 | 2018-08-17 | 广东电网有限责任公司 | Air pressure monitor device and the micro- water treatment system of SF6 equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1243022A (en) * | 1998-07-27 | 2000-02-02 | 三菱电机株式会社 | Method for recovering condensed gas from mixed gas, and recovering apparatus thereof |
| CN1307499A (en) * | 1998-05-26 | 2001-08-08 | 艾拉斯科普库空气动力股份有限公司 | Method and device for cool-drying |
| CN101085675A (en) * | 2006-08-11 | 2007-12-12 | 河南省日立信电子有限公司 | SF6 gas reclaiming purifying device and purifying method |
| CN102173392A (en) * | 2011-01-31 | 2011-09-07 | 平高集团有限公司 | Sulfur hexafluoride gas separation and purification device and purification method thereof |
| CN205076805U (en) * | 2015-09-14 | 2016-03-09 | 河南平高电气股份有限公司 | A water trap for SF6 gas recovery device |
-
2015
- 2015-09-14 CN CN201510580922.9A patent/CN105129743B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1307499A (en) * | 1998-05-26 | 2001-08-08 | 艾拉斯科普库空气动力股份有限公司 | Method and device for cool-drying |
| CN1243022A (en) * | 1998-07-27 | 2000-02-02 | 三菱电机株式会社 | Method for recovering condensed gas from mixed gas, and recovering apparatus thereof |
| CN101085675A (en) * | 2006-08-11 | 2007-12-12 | 河南省日立信电子有限公司 | SF6 gas reclaiming purifying device and purifying method |
| CN102173392A (en) * | 2011-01-31 | 2011-09-07 | 平高集团有限公司 | Sulfur hexafluoride gas separation and purification device and purification method thereof |
| CN205076805U (en) * | 2015-09-14 | 2016-03-09 | 河南平高电气股份有限公司 | A water trap for SF6 gas recovery device |
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| CN105129743A (en) | 2015-12-09 |
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