CN105119132B - A kind of floating type radio frequency electrical feedthrough of laser - Google Patents

A kind of floating type radio frequency electrical feedthrough of laser Download PDF

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Publication number
CN105119132B
CN105119132B CN201510609028.XA CN201510609028A CN105119132B CN 105119132 B CN105119132 B CN 105119132B CN 201510609028 A CN201510609028 A CN 201510609028A CN 105119132 B CN105119132 B CN 105119132B
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floating
positioning element
hole
floating member
laser
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CN201510609028.XA
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CN105119132A (en
Inventor
万胜文
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Jiangsu Zhuoyuan Laser Technology Co Ltd
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Jiangsu Zhuoyuan Laser Technology Co Ltd
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Abstract

The invention discloses a kind of floating type radio frequency electrical feedthrough of laser, including positioning element, floating member, Floating bolt, dead ring;Positioning element is in ∩ shape structures, and the top of positioning element is provided with floating hole;The elongated structure of floating member, the longitudinal cross-section of floating member upper end is in terraced structure, floating member is provided with internal thread hole, internal thread hole extends to the inside of floating member from the upper end of floating member with one heart, floating member is arranged in positioning element, lower surface at the top of step surface and positioning element fits, and step end passes through the floating hole of positioning element;The floating distance in step end and floating hole is 0.8~1mm;Described Floating bolt connects with floating member threaded upper ends;Described dead ring is arranged on the outside of Floating bolt.The present invention devises a kind of novel floating type radio frequency electrical feedthrough of laser of structure, simple in construction, easily manufactured, cost is low, and the extension that can obtain the life-span of whole laser, greatly reduces spoilage.

Description

A kind of floating type radio frequency electrical feedthrough of laser
Technical field
The present invention relates to the radio frequency electrical feed through structures of laser, more particularly to laser.
Background technology
Gas laser generator is mixed in proportion using a certain amount of Co2 gases, oxygen, nitrogen and other inert gases Afterwards, it is filled with the pre- aluminium alloy laser cavity for having taken out ultrahigh vacuum degree, is put by cross RF excited source feed-in optimization design Glow discharge occurs for electroplax bar, Co2 mixed laser gas, and discharge process is the transmittance process of an energy, and this process can produce The laser of raw high light beam quality.At present, in laser to use cermet soldering electricity feedthrough, this electric feedthrough vacuum sealing is made more With difference, vapor and pernicious gas is caused to enter in laser chamber body, and manufacturing cost is high, is not durable, and is not easy to batch Production.The electric feedthrough of this mode is all integrally fixed above electrode, because electrode has heat generation when electric discharge, so Electrode will be made to produce benefit of expanding with heat and contract with cold, because the length of electrode is long, be easily deformed electrode, so as to drive electric feedthrough Displacement is produced, electric feedthrough movement can cause to contact with cavity, so as to which short circuit occur, cause whole laser circuit to be burnt, can not Normal operation.
The content of the invention
For in place of above-mentioned the deficiencies in the prior art, the present invention solve the problems, such as be:A kind of quality height, service life are provided Long, low cost radio frequency electrical feedthrough.
To solve the above problems, the technical scheme that the present invention takes is as follows:
A kind of floating type radio frequency electrical feedthrough of laser, including positioning element, floating member, Floating bolt, dead ring;Institute The positioning element stated is in ∩ shape structures, and the top of positioning element is provided with floating hole;The elongated structure of described floating member, float The longitudinal cross-section of dynamic component upper end is in terraced structure, and floating member is provided with internal thread hole, and internal thread hole is from floating member Upper end extends to the inside of floating member with one heart, and floating member installs the ∩ shape intracavitary into positioning element, floating member upper end Lower surface at the top of step surface and positioning element fits, and the step end of the upper end of floating member passes through the floating of positioning element Hole;Described step end and the floating distance in floating hole are 0.8~1mm;Described Floating bolt and floating member threaded upper ends Connection;Described dead ring is arranged on the outside of Floating bolt.
Further, the floating hole at the top of the positioning element is in rounded shape, and the step end of described floating member is in cylinder Shape structure.
Further, the two bottom sides of described positioning element have extended vertically fixed feet;Described fixed feet is provided with fixed Position hole.
Further, the floating distance in described step end and floating hole is 0.9mm.
Beneficial effects of the present invention
The present invention devises a kind of novel floating type radio frequency electrical feedthrough of laser of structure, and positioning element and floating member are The main composition part of electric feedthrough, can produce the floating of 0.8~1mm distances, positioning element between positioning element and floating member It is integrally fixed on battery lead plate, because battery lead plate has heat generation when electric discharge, battery lead plate is produced heat expansion Shrinkage effect, because the length of battery lead plate is long, electrode is easily deformed, and the deformation of battery lead plate easily drives the shifting of positioning element It is dynamic, when positioning element is moved, due to the floating of 0.8~1mm distances can be produced between floating member and positioning element, So floating member will not follow the movement of positioning element and move, so as to the contact for avoiding Floating bolt with launching chamber enclosure And short circuit is produced, cause whole laser to break down.It is whole that electric feedthrough is not only simple in construction, easily manufactured, cost is low, and The extension that the life-span of whole laser obtains can be made, greatly reduce spoilage.
Brief description of the drawings
Fig. 1 is the fractionation structural representation of the present invention.
Fig. 2 is the mounting structure schematic diagram of the present invention.
Embodiment
Present invention is described in further detail below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of floating type radio frequency electrical feedthrough of laser, including positioning element 3, floating member 4, floating spiral shell Bolt 1, dead ring 2.The positioning element 3 of the present invention is in ∩ shape structures, and the top of positioning element 3 is provided with floating hole 33.Floating member 4 Elongated structure, the longitudinal cross-section of the upper end of floating member 4 is in terraced structure, and floating member 4 is provided with internal thread hole 43, interior Screwed hole 43 extends to the inside of floating member 4 from the upper end of floating member 4 with one heart, and floating member 4 is installed into positioning element 3 In ∩ shapes chamber 31, the lower surface at the step surface 41 of the upper end of floating member 4 and the top of positioning element 3 fits, floating member 4 it is upper The step end 42 at end passes through the floating hole 33 of positioning element 3.The floating distance in step end 42 and floating hole 33 is 0.8~1mm, this The floating distance in the preferred step end 42 of embodiment and floating hole 33 is 0.9mm.The lower half of Floating bolt 1 is provided with threaded portion 11, Floating bolt 1 connects with the threaded upper ends of floating member 4.Dead ring 2 is arranged on the outside of Floating bolt 1.Further preferably, The floating hole 33 at the top of positioning element 3 is in rounded shape, and the step end 42 of floating member 4 is in cylindrical structural.Further preferably, it is fixed The two bottom sides of position part 3 have extended vertically fixed feet 32, and fixed feet 32 is provided with positioning hole 321, setting fixed feet 32 and Positioning hole 321 is easy to positioning element 3 being fixed on battery lead plate.
As shown in Fig. 2 positioning element 3 is fixed on battery lead plate 6 by screw 7, floating member 4 is installed into positioning element 3 ∩ shape intracavitary, Floating bolt 1 through transmitting chamber enclosure 5 on enter hole and floating member 4 is threadedly coupled, floating member 4 and hair The setting dead ring 2 between entering hole penetrated on chamber enclosure 5, dead ring 2 can play a part of sealed insulation.
The positioning element 3 of the present invention is integrally fixed on battery lead plate 6, because battery lead plate 6 has heat production when electric discharge It is raw, it battery lead plate 6 is produced effect of expanding with heat and contract with cold, because the length of battery lead plate 6 is long, battery lead plate 6 is easily deformed, The deformation of battery lead plate 6 easily drives the movement of positioning element 3, when positioning element 3 is moved, due to floating member 4 and determines Can produce the floatings of 0.8~1mm distances between the part 3 of position, thus floating member 3 will not follow the movement of positioning element 4 and It is mobile, short circuit is produced so as to avoid the contact with chamber enclosure 5 is launched of Floating bolt 1, causes whole laser to break down. Entirely the structure of electric feedthrough is simple, easily manufactured, cost is low, and the extension that can obtain the life-span of whole laser, pole Big reduces spoilage.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention God any modification, equivalent substitution and improvements made etc., should be included in the scope of the protection with principle.

Claims (1)

  1. A kind of 1. floating type radio frequency electrical feedthrough of laser, it is characterised in that including positioning element, floating member, Floating bolt, Dead ring;Described positioning element is in ∩ shape structures, and the top of positioning element is provided with floating hole;Described floating member is in strip Shape structure, the longitudinal cross-section of floating member upper end are in terraced structure, and floating member is provided with internal thread hole, and internal thread hole is from floating The upper end of dynamic component extends to the inside of floating member with one heart, and floating member installs the ∩ shape intracavitary into positioning element, float portion Lower surface at the top of the step surface and positioning element of part upper end fits, and the step end of the upper end of floating member passes through positioning element Floating hole;Described step end and the floating distance in floating hole are 0.8~1mm;On described Floating bolt and floating member End threaded connection;Described dead ring is arranged on the outside of Floating bolt;Floating hole at the top of the positioning element is in rounded shape, The step end of described floating member is in cylindrical structural;The two bottom sides of described positioning element have extended vertically fixed feet; Described fixed feet is provided with positioning hole;Described step end and the floating distance in floating hole are 0.9mm.
CN201510609028.XA 2015-09-23 2015-09-23 A kind of floating type radio frequency electrical feedthrough of laser Active CN105119132B (en)

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Application Number Priority Date Filing Date Title
CN201510609028.XA CN105119132B (en) 2015-09-23 2015-09-23 A kind of floating type radio frequency electrical feedthrough of laser

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CN105119132B true CN105119132B (en) 2018-03-02

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1808799A (en) * 2006-01-23 2006-07-26 黄建国 Producing method of seal-off carbon dioxide laser
CN101630808A (en) * 2009-04-28 2010-01-20 武汉光谷科威晶激光技术有限公司 Laser resonant cavity structure
CN103229369A (en) * 2010-10-29 2013-07-31 通快公司 Radio frequency-excited laser assembly
CN204966951U (en) * 2015-09-23 2016-01-13 江苏卓远激光科技有限公司 Floating radio frequency electricity feed through of laser instrument

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6661826B2 (en) * 1999-08-31 2003-12-09 Cymer, Inc. Laser chamber insulator with sealed electrode feedthrough
US20040190577A1 (en) * 2003-02-27 2004-09-30 Hans-Stephan Albrecht Fast linear motor for wavelength variation for lithography lasers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1808799A (en) * 2006-01-23 2006-07-26 黄建国 Producing method of seal-off carbon dioxide laser
CN101630808A (en) * 2009-04-28 2010-01-20 武汉光谷科威晶激光技术有限公司 Laser resonant cavity structure
CN103229369A (en) * 2010-10-29 2013-07-31 通快公司 Radio frequency-excited laser assembly
CN204966951U (en) * 2015-09-23 2016-01-13 江苏卓远激光科技有限公司 Floating radio frequency electricity feed through of laser instrument

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