CN202353000U - Preionization electrode and ceramic tube combined structure - Google Patents
Preionization electrode and ceramic tube combined structure Download PDFInfo
- Publication number
- CN202353000U CN202353000U CN 201120400409 CN201120400409U CN202353000U CN 202353000 U CN202353000 U CN 202353000U CN 201120400409 CN201120400409 CN 201120400409 CN 201120400409 U CN201120400409 U CN 201120400409U CN 202353000 U CN202353000 U CN 202353000U
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- earthenware
- preionization
- piece
- combined structure
- utility
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Abstract
The utility model discloses a preionization electrode and ceramic tube combined structure which is formed by combining a plurality of sections of shorter ceramic tubes, thus a role of a glow discharge insulation medium is played, sintering difficulty and production cost of the ceramic tubes can be reduced, sintering quality and yield rate of the ceramic tubes are ensured, defects in the ceramic tubes are decreased, therefore, reliability of an excimer laser is improved.
Description
Technical field
The utility model relates to a kind of earthenware structure of multisection type high pressure pre-ionization electrode, is specially the earthenware of a kind of excimer laser with multisection type high pressure pre-ionization electrode.
Background technology
Corona preionization is a kind of preionization mode common in the gas excimer laser.Pre-ionization electrode adopts earthenware as dielectric usually, so that near region of discharge, produce the better free electron crowd of density uniformity, thereby improves the discharge performance of main electrode.1 to 4 single tube porcelain bushing of many at present employings is as dielectric.
Fig. 1 is the structural representation of known excimer laser discharge system, comprising main electrode (negative electrode 3 and anode 7), preionization structure (preionization earthenware 2 and pre-ionization electrode 5), ceramic baffle 1, ceramic flow deflector 6 and negative electrode ceramic wafer 4 etc.Preionization earthenware 2,5 wherein all adopts the earthenware of single structure.
Be to improve the laser output energy of excimer laser, need to increase the length of electrode, this just cause firing long (600～700mm), thin (external diameter 6～8mm, the earthenware of internal diameter 3～5mm).And difficulty is fired in long and thinner earthenware existence, rate of finished products is low, and problems such as production cost height are easy to generate internal flaw simultaneously, are difficult to guarantee to fire precision.And inside exists defective earthenware when preionization, and is breakdown easily, forms arc discharge, destroys the uniformity of glow discharge, finally causes the laser discharge and go out photo-labile even normally bright dipping.
The utility model content
The purpose of the utility model is to provide a kind of preionization earthenware, can reduce the difficulty of burning paper as sacrificial offerings, improves rate of finished products, reduce production costs, reduces internal flaw, guarantees to fire precision.
Be to realize above-mentioned purpose, the preionization earthenware that the utility model provides is connected each other by the two ends of more piece earthenware and forms.
Described preionization earthenware wherein, adopts screw thread to be connected between the two ends of more piece earthenware.
Described preionization earthenware, wherein, an end of every joint earthenware is an internal thread, the other end is an external screw thread.
Described preionization earthenware wherein, adopts tapering to be connected between the two ends of more piece earthenware.
Described preionization earthenware, wherein, bonding connection between the two ends of more piece earthenware.
Described preionization earthenware wherein, is the insulating cement bonding connection between the two ends of more piece earthenware.
The multisection type earthenware structure that the utility model provides can reduce the difficulty of burning paper as sacrificial offerings, improves rate of finished products, reduce production costs, reduces internal flaw, guarantees to fire precision.
Description of drawings
Fig. 1 is the structural representation of known excimer laser discharge system.
Fig. 2 is the earthenware interface shape that the utility model tapering is connected.
Fig. 3 is the earthenware interface shape that the utility model screw thread is connected.
Fig. 4 is the earthenware structural representation after the utility model combination.
Embodiment
The multisection type pre-ionization electrode earthenware that the utility model proposes; Promptly long earthenware is to be combined by the short earthenware of multistage; Can play the effect that forms the glow discharge dielectric, that can reduce earthenware again fires difficulty and production cost, and what guaranteed earthenware simultaneously fires quality and rate of finished products; Reduce the defective in the earthenware, thereby improve the reliability of excimer laser.
See also Fig. 2 and shown in Figure 3; Connected mode between the shorter earthenware of the utility model more piece can adopt multiple connected modes such as screw thread, taper fit, insulating cement be bonding; With the tight contact that guarantees to cooperate, guarantee the electrical insulation capability of preionization earthenware simultaneously.
Fig. 2 shows is that an end of every joint earthenware is the tapering end 10 that has tapering, and the other end is the shrinkage pool 20 that has tapering, and the tapering end 10 of a joint earthenware is inserted in shrinkage pool 20 of another joint earthenware, is connected to become the length of needs each other by some joint earthenwares.Earthenware after the combination is as shown in Figure 4.
Fig. 3 shows is that an end of every joint earthenware has external screw thread 30, and the other end has internal thread 40, and the external screw thread 30 of the joint earthenware internal thread 40 with another joint earthenware is screwed togather, and is screwed togather the length that becomes to need each other by some joint earthenwares.Earthenware after the combination is as shown in Figure 4.Whole earthenware two ends to assembling during use are fixed, guarantee that earthenware does not move at axial direction.
Claims (6)
1. an excimer laser is characterized in that with pre-ionization electrode earthenware combining structure, is connected each other by the two ends of more piece earthenware and forms.
2. preionization earthenware combining structure according to claim 1 wherein, is connected for screw thread between the two ends of more piece earthenware.
3. according to claim 1 or 2 described preionization earthenware combining structures, wherein, an end of every joint earthenware is an internal thread, and the other end is an external screw thread.
4. preionization earthenware combining structure according to claim 1 wherein, is connected for tapering between the two ends of more piece earthenware.
5. preionization earthenware combining structure according to claim 1, wherein, bonding connection between the two ends of more piece earthenware.
6. preionization earthenware combining structure according to claim 5 wherein, is the insulating cement bonding connection between the two ends of more piece earthenware.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120400409 CN202353000U (en) | 2011-10-20 | 2011-10-20 | Preionization electrode and ceramic tube combined structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120400409 CN202353000U (en) | 2011-10-20 | 2011-10-20 | Preionization electrode and ceramic tube combined structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202353000U true CN202353000U (en) | 2012-07-25 |
Family
ID=46541967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120400409 Expired - Lifetime CN202353000U (en) | 2011-10-20 | 2011-10-20 | Preionization electrode and ceramic tube combined structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202353000U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI703109B (en) * | 2019-03-20 | 2020-09-01 | 法藍瓷股份有限公司 | Joining method of ceramic parts |
-
2011
- 2011-10-20 CN CN 201120400409 patent/CN202353000U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI703109B (en) * | 2019-03-20 | 2020-09-01 | 法藍瓷股份有限公司 | Joining method of ceramic parts |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200908 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences Effective date of registration: 20200908 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120725 |
|
| CX01 | Expiry of patent term |