CN105110609A - Preparation method of quartz tube, quartz plate or quartz rod - Google Patents
Preparation method of quartz tube, quartz plate or quartz rod Download PDFInfo
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Abstract
Belonging to the technical field of inorganic material preparation methods, the invention discloses a preparation method of a quartz tube, quartz plate or quartz rod. The preparation method of the quartz tube, quartz plate or quartz rod disclosed in the invention specifically includes the steps of: quartz raw ore crushing, electromagnetic roasting, water cooling, grinding, magnetic separation, static and flotation for impurity removal, microwave complexation for impurity removal, deionized water cleaning, drying, and smelting furnace treatment, thus obtaining the quartz tube, quartz plate or quartz rod. The technological process involved in the invention has reasonable structure, advanced, efficient and easily controllable impurity removal technology, and also has pertinence, high quality index and good stability. Finally, the obtained quartz tube, quartz plate or quartz rod has an SiO2 content up to 99.990-99.99990% and an impurity content of less than 10ppm.
Description
Technical field
The present invention relates to the preparation method of a kind of silica tube, quartz plate or quartz pushrod, belong to the technical field of inorganics preparation method.
Background technology
Quartz, geology technical term, refers generally to low quartz (alpha-quartz), is the mineral distributing the widest in quartzy race mineral.The quartz of broad sense also comprises high quartz (β-quartz), coesite etc.Its main component is SiO
2, water white transparency, normal containing a small amount of impurity component, and become translucent or opaque crystal, quality is hard.Quartz is the Mineral resources that a kind of physical properties and chemical property are all very stable, and crystal belongs to the oxide mineral of trigonal system.Quartz wedge has another name called silica, mainly produces the raw material of quartz sand (also known as silica sand), is also silica refractory and the raw material firing ferrosilicon.
, because containing micro-pigment ion or finely divided inclusion, or there is colour center and be shades of colour, and transparency is reduced in pure quartzy water white transparency.Quartz is adapted at glass, casting, pottery, metallurgy, building, chemical industry, plastics, rubber, abrasive material.Quartz is one of the widest mineral of earth surface distribution, and its purposes is also quite extensive.In crystal clock, electronics, piezoid is used as standard frequency; The glass made after melting, can be used for making opticinstrument, glasses, Glass tubing and other products; The industrial raw material such as the bearing of precision instrument, abrasive substance, glass-ceramic can also be done.
Quartz sand is a kind of nonmetallic mineral, and be a kind of silicate minerals of hard, wear-resisting, stable chemical performance, its main mineral constituent is SiO
2the color of quartz sand is oyster white or semi-transparent clear shape, hardness 7, quartz sand is important industrial mineral raw material, non-chemically hazardous substance, are widely used in the industry such as glass, casting, pottery and refractory materials, smelting duriron, flux for metallurgy, metallurgy, building, chemical industry, plastics, rubber, abrasive material.
The Wuli-Shili-Renli system approach of the uniqueness that high purity quartz material has, the silicate minerals of hard, wear-resisting, stable chemical performance, hardness 7, property is crisp without cleavage, conchoidal fracture, and density is 2.65, its calorifics and mechanical property have obvious anisotropy, be insoluble to acid, be slightly soluble in KOH solution, fusing point is 1750 DEG C; Particularly its inherent molecular chain structure, crystal shape and lattice variations rule, make it have high temperature resistant, thermal expansivity is little, high-insulation, corrosion-resistant, piezoelectric effect, resonance effect and its uniqueness optical characteristics, in many high-tech products, play more and more important effect.
The method of existing purity quartzite is mainly pickling, but only carries out pickling, is difficult to remove the impurity contained in quartz sand, causes product defective.Adopt the mixing acid such as nitric acid, concentrated hydrochloric acid, de-iron reaction is carried out to quartz sand under certain condition, quartz sand iron-holder can be made obviously to reduce.Or make finished product quartz sand after desliming, scouring, classification are carried out to quartz sand.Or quartz sand ore after broken, scouring, classification, is carried out gravity treatment, desliming, oven dry, obtains quartz sand product by the method for employing Physical purifying quartz sand ore.Floatation process of quartz sand disclosed in prior art, is quartz sand is carried out in mixing vessels pH regulator and after reacting with flotation reagent, then enters flotation in flotation machine, removes related impurities in quartz sand.Although all for quartz sand removal of impurities, have plenty of and carry out chemistry removing for the irony in quartz sand specially; What have only carries out simple fragmentation, scouring, classification to quartz sand, obtains ordinary window glass quartz raw material; What have only carries out for a certain operation (as flotation) of quartz sand physics removal of impurities; What also have takes the operation such as roasting, shrend in production technique, takes such technique substantially not consider the characteristic of quartz mine and mineral association thereof, is unfavorable for that follow-up glass sand is produced, can only uses as general high-quality quartz sand.
Quartz sand ore is the block aggregate be made up of quartz and a large amount of impure mineral, remove these impure mineral matter, these impure minerals just must be made to be separated with quartz, become monomer, conventional violating the law is exactly use broken and disintegrating apparatus, quartz mine is ground into quartz sand, then removes impure mineral from quartz sand.Because quartz sand ore hardness is large, at broken, shredding stage, the wearing and tearing of equipment are more serious.Therefore domestic a lot of quartz sand factory all adopts roasting, shrend method, short texture after quartz mine is expanded with heat and contract with cold, and is reduced in the degree of wear of equipment in sand process processed.But when this kind of mode is because of quartz mineral and the mineral paragenesis such as feldspar, mica, there will be so-called eutectic phenomenon, the initial melt temperature of mixed system can be down to about 700 DEG C, and the current maturing temperature to quartz mine is generally at about 900 DEG C, ore like this after roasting creates partial melting, the glassiness that melting is formed very firmly will cover quartz surfaces, be difficult to remove, due in these glassiness containing a large amount of elementary metal impurities, thus bring very scabrous problem for the production of glass sand.
Because vein quartz is because environmental influence must have lot of trace detrimental impurity and other associated minerals at Cheng Kuang.Mainly contain the impurity such as nonmetalliferous ore potassium, albite, aluminium, mica etc., metallic ore rhombohedral iron ore, limonite, spathic iron ore and pyrite, so the shortcoming adopting the method to produce adapts to inherent inclusion impurity and effectively do not removed; Rhombohedral iron ore, limonite, spathic iron ore and pyrite etc. are effectively inaccurate to be removed; Effectively accurate removal is not obtained to the nonmetalliferous ore impurity being insoluble in acid; It is poor that whole Production Flow Chart controls constant product quality, unstable product quality.The SiO finally obtained
2content is 99.9%, is difficult to meet high-tech product application requiring.
Summary of the invention
The invention provides a kind of method preparing high-purity quartz tube, quartz plate or quartz pushrod, it is specifically realized by following technical scheme.
The step that vein quartz of the present invention prepares high purity quartz pipe, quartz plate or quartz pushrod is as follows:
Quartz crushing raw ore-electromagnetism roasting-water cooling-abrasive dust-magnetic separation-electrostatic, flotation removal of impurities-microwave complexometry removal of impurities-washed with de-ionized water-oven dry-smelting furnace obtain silica tube, quartz plate or quartz pushrod.
Particularly, laser fracturing carried out to quartzy raw ore, its associated mineral is separated with quartz, meet the requirement of roasting granularity and quartz particles is punctured and become countless small hole; And then quartz particles is broken into quartz sand, wherein the particle diameter of quartz sand is 0.1 ~ 1cm.
Particularly, adopt electromagnetism roasting, make to become ferromagnetic magnetite containing weakly magnetic iron ore thing such as rhombohedral iron ore, limonite, spathic iron ore and pyrite etc. in its quartz mine.
Particularly, above-mentioned quartz sand after electromagnetism roasting is placed in water cool fast, the inclusion of its mineral inherence, steam bubble, water wave are burst by quenching, hardness of minerals is reduced while shrend, further increase the hardness of quartz sand and then facilitate follow-up pulverising step, making the particle diameter of quartz sand be 200-1000 order.
Particularly, employing magnetic strength is the magnetic plant of 50-15000 Gauss, and the magnetic contrast according to vein quartz and impure mineral carries out physics removal of impurities, effectively removes the impurity of iron ore, titanium ore class ferromagnetism and weak magnetic.
Further, silica powder after above-mentioned Ultrafine Grinding classification rotates along chute face, downslide, utilizes gravity to carry out being separated of different specific weight material with centrifugal force, then experiences the magnetic separation of twice different magnetic field intensity, first magneticstrength is 500 ~ 2000 Gausses, and action time is 20 ~ 30min; The magneticstrength of second time magnetic separation is 5000 ~ 12000 Gausses, and action time is 5 ~ 15min.
Particularly, electrostatic interaction and flotation removal of impurities in above-mentioned steps, carry out electrostatic separation to the mineral after the terraced magnetic magnetic separation of height, for the non magnetic ore deposit in mineral electrical property difference removing mineral and potassium, albite, aluminium, this kind of impurity of mica; Then under weak acid environment, in quartz mortar, add pore forming material, bubble after reaction 5-15min, material is sucked into flotation machine, floatingly selects mica mineral; Finally under weakly alkaline environment, in quartz mortar, add collecting agent, after reaction 5-15min, material is sucked into flotation machine, floatingly selects feldspathoid.
Further, above-mentioned pore forming material is oxy-compound class, ether and ether alcohol class, pyridines and ketone tensio-active agent, and wherein the pH of weakly acidic condition is 5.0 ~ 6.5; Described collecting agent is lipid acid and soda soap, alkylsulfonate, alkyl-sulphate, phosphoric acid ester, arsenate, aliphatic amide and salt thereof, rosin Amine D, quaternary ammonium salt or diamines and polyamine compounds, and wherein the pH of mild alkaline conditions is 8.5 ~ 10.0.
Particularly, adopt microwave extracting to go out metallic impurity ion in quartz sand, utilize the heat of microwave to accelerate complexation agent and the rapid reaction of metallic impurity ion, harmful micro impurity element in effective fast precise removing mineral.
Further, microwave power is 200 ~ 500w, microwave extracting 2 ~ 3 times, and each action time is 20 ~ 40min, and water-bath ratio is 1 ︰ 20 ~ 30, bath temperature 40 ~ 80 DEG C.
Concrete, mixing acid is added in above-mentioned microwave treatment, wherein mixing acid consist of 40 ~ 50% (wt%) nitric acid, 20 ~ 25% (wt%) hydrochloric acid, 50 ~ 80% (wt%) sulfuric acid and 20 ~ 30% (wt%) hydrofluoric acid, the weight part ratio of wherein various acid is Xiao Suan ︰ Yan Suan ︰ Liu Suan ︰ hydrofluoric acid=1 ~ 6 ︰ 1 ~ 3 ︰ 2 ~ 5 ︰ 1 ~ 11.
Under the acting in conjunction of mixing acid, microwave, utilize the powerful penetrance of microwave, make quartz crystal, inclusion, steam bubble, water wave, crack, the interpore metal ion in small hole and be dissolved in sour impurity to shake fast, off normal, actively to improve, under microwave heat promotes, carry out effective fast precise complex reaction with the iron in quartz, sodium, lead, calcium, aluminium, magnesium plasma simultaneously, produce water-soluble stable comple, reach removal of impurities object by solid-liquid separation, total impurities is down to and is less than 10ppm.
Particularly, highly purified quartz sand is obtained finally by washing also drying; The highly purified quartz sand obtained is made silica tube, quartz plate or quartz pushrod, quartz plate or quartz pushrod through smelting furnace.
Further, the temperature of above-mentioned smelting furnace is 1750 ~ 3000 DEG C.
Take into full account the physics and chemistry nature difference between quartz mineral and the impure mineral coexisted, avoid quartz mine impurity parsing technique and be unfavorable for the operation that glass sand is produced.Utilize physical method, effectively remove the impure mineral in quartz sand.The quartz mine of natural output, resolve technique through impurity and obtain the qualified raw material quartz sand of particle diameter, raw material quartz sand obtains quartz sand product through ore dressing impurity removal process again, completely eliminated all impure minerals of Individual existence in this product, and the impure mineral of part and quartzy adhesion.
Present invention process reasonable flowsheet structure, impurity removing technology advanced person is efficient, easy to control, pointed, quality index is high, good stability.
The silica tube that the present invention finally prepares, quartz plate or quartz pushrod, due to its inherent molecular chain structure, crystal shape and lattice variations rule, make it have high temperature resistant, thermal expansivity is little, high-insulation, corrosion-resistant, piezoelectric effect, resonance and its uniqueness optical characteristics.And be applied to Aeronautics and Astronautics field.High purity quartz pipe, quartz plate or quartz pushrod that the present invention prepares are applied to Novel electric light source, the sealing-in of high insulation, aero-space instrument, military industrial technology product, microelectronics, high-grade opticglass, quartz crucible major ingredient.
The present invention adopts the modern technique removal of impurities such as laser fracturing, electromagnetism roasting, microwave and mixing acid extraction, abrasive dust classification, high terraced magnetic magnetic separation, electrostatic interaction, microwave complexometry, makes SiO in silica tube, quartz plate or the quartz pushrod prepared
2content reaches 99.990-99.99990%, and impurity level is containing < 10ppm.
The present invention adopts laser fracturing, utilize laser work principle that quartz particles is punctured becomes countless small hole; its most of inclusion is penetrated break, electromagnetism roasting makes to become harmful trace impurity in ferromagnetic magnetite next step high terraced magnetic magnetic separation favourable effective fast precise removing mineral containing weakly magnetic iron ore thing (rhombohedral iron ore, limonite, spathic iron ore and pyrite etc.) in its quartz mine.
Present invention employs electrostatic separation, strive the non magnetic ore deposit in mineral electrical property difference difference removing mineral: this kind of impurity of potassium, albite, aluminium, mica.
The present invention utilizes the powerful penetrance of microwave, make quartz crystal, inclusion, steam bubble, water wave, crack, the interpore metal ion in small hole and be dissolved in sour impurity to shake fast, off normal, actively to improve, under microwave heat promotes, carry out effective fast precise complex reaction with the trace iron in quartz, sodium, lead, calcium, magnesium plasma simultaneously, produce water-soluble stable comple, reach effective fast precise removal of impurities object by solid-liquid separation, deionized water wash.
Process structure rationally, except advanced technology is efficient, easy to control, assorted targetedly, high, the good stability of quality index.
Embodiment
Embodiment 1
Laser fracturing carried out to vein quartz raw ore 100kg, its associated mineral is separated with quartz, meet the requirement of roasting granularity and quartz particles is punctured and become countless small hole; And then be broken into quartz sand through quartz particles, wherein the particle diameter of quartz sand is 0.2 ~ 0.5cm.Then above-mentioned quartz sand after electromagnetism roasting is placed in water to cool fast, the inclusion of its mineral inherence, steam bubble, water wave are burst by quenching, reduce hardness of minerals while shrend, then obtaining particle diameter through pulverizing is 200-500 object quartz sand.Then above-mentioned silica powder rotates along chute face, glides, and utilize gravity to carry out being separated of different specific weight material with centrifugal force, then experience the magnetic separation of twice different magnetic field intensity, the first magneticstrength is 2000 Gausses, and action time is 20min; The magneticstrength of second time magnetic separation is 7000 Gausses, and action time is 15min.Particularly, electrostatic interaction and flotation removal of impurities in above-mentioned steps, carry out electrostatic separation to the mineral after the terraced magnetic magnetic separation of height, for the non magnetic ore deposit in mineral electrical property difference removing mineral and potassium, albite, aluminium, this kind of impurity of mica; Then under weak acid environment, (pH=6.0) adds ether alcohol class pore forming material in quartz mortar, bubbles after reaction 10min, material is sucked into flotation machine, floatingly selects mica mineral; Finally under weakly alkaline environment, (pH=9.0) adds alkylsulfonate collecting agent in quartz mortar, after reaction 12min, material is sucked into flotation machine, floatingly selects feldspathoid.Then be 300w at microwave power, action time is 20min, water-bath ratio is 1 ︰ 20, bath temperature is 75 DEG C, mixing acid consist of 45% (wt%) Xiao Suan ︰ 20% (wt%) Yan Suan ︰ 60% (wt%) Liu Suan ︰ 25% (wt%) hydrofluoric acid=3 ︰ 2 ︰ 3 ︰ 5; The power of second time microwave action is 500w, action time is 15min, water-bath ratio is 1 ︰ 25, bath temperature is 60 DEG C, mixing acid consist of 50% (wt%) Xiao Suan ︰ 25% (wt%) Yan Suan ︰ 80% (wt%) Liu Suan ︰ 20% (wt%) hydrofluoric acid=2 ︰ 3 ︰ 2 ︰ 9.Obtaining highly purified quartz sand finally by washing also drying, wherein adopting the washed with de-ionized water quartz sand of flowing, then making moisture≤0.5% on its surface at 50 ~ 80 DEG C of dry quartz sands; The highly purified quartz sand obtained is made silica tube, quartz plate or quartz pushrod through smelting furnace, and the temperature in smelting furnace is 1750 ~ 2000 DEG C.Obtain SiO in silica tube after testing
2purity is 99.9999%, foreign matter content 3ppm.
Embodiment 2
Laser fracturing carried out to vein quartz raw ore 100kg, its associated mineral is separated with quartz, meet the requirement of roasting granularity and quartz particles is punctured and become countless small hole; And then be broken into quartz sand through quartz particles, wherein the particle diameter of quartz sand is 0.1 ~ 0.4cm.Then the quartz sand after electromagnetism roasting is placed in water to cool fast, the inclusion of its mineral inherence, steam bubble, water wave are burst by quenching, reduce hardness of minerals while shrend, then obtaining particle diameter through pulverizing is 500-700 object quartz sand.Then above-mentioned silica powder rotates along chute face, glides, and utilize gravity to carry out being separated of different specific weight material with centrifugal force, then experience the magnetic separation of twice different magnetic field intensity, the first magneticstrength is 2000 Gausses, and action time is 20min; The magneticstrength of second time magnetic separation is 7000 Gausses, and action time is 12min.Particularly, electrostatic interaction and flotation removal of impurities in above-mentioned steps, carry out electrostatic separation to the mineral after the terraced magnetic magnetic separation of height, for the non magnetic ore deposit in mineral electrical property difference removing mineral and potassium, albite, aluminium, this kind of impurity of mica; Then under weak acid environment, (pH=5.5) adds ketone pore forming material in quartz mortar, bubbles after reaction 10min, material is sucked into flotation machine, floatingly selects mica mineral; Finally under weakly alkaline environment, (pH=9.5) adds fatty amines collecting agent in quartz mortar, after reaction 15min, material is sucked into flotation machine, floatingly selects feldspathoid.Then be 300w at microwave power, action time is 20min, water-bath ratio is 1 ︰ 20, bath temperature is 75 DEG C, mixing acid consist of 40% (wt%) Xiao Suan ︰ 25% (wt%) Yan Suan ︰ 70% (wt%) Liu Suan ︰ 20% (wt%) hydrofluoric acid=2 ︰ 2 ︰ 2 ︰ 8; The power of second time microwave action is 500w, action time is 15min, water-bath ratio is 1 ︰ 25, bath temperature is 70 DEG C, mixing acid consist of 45% (wt%) Xiao Suan ︰ 20% (wt%) Yan Suan ︰ 70% (wt%) Liu Suan ︰ 25% (wt%) hydrofluoric acid=1 ︰ 2 ︰ 3 ︰ 7.Obtaining highly purified quartz sand finally by washing also drying, wherein using deionized water rinsing quartz sand, then making quartz sand surface moisture content≤0.5% through cryodrying; Again the highly purified quartz sand obtained is made quartz pushrod through smelting furnace, the temperature in smelting furnace is 2000 ~ 2500 DEG C.Obtain SiO in quartz pushrod after testing
2purity is 99.9999%, foreign matter content 3ppm.
Claims (10)
1. a preparation method for silica tube, quartz plate or quartz pushrod, is characterized in that: the preparation process of described silica tube, quartz plate or quartz pushrod is: quartzy crushing raw ore-electromagnetism roasting-water cooling-abrasive dust-magnetic separation-electrostatic, flotation removal of impurities-microwave complexometry removal of impurities-washed with de-ionized water-oven dry-smelting furnace obtain silica tube, quartz plate or quartz pushrod.
2. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, it is characterized in that: described quartz mine fragmentation carries out laser fracturing to quartzy raw ore, its associated mineral is separated with quartz, and then quartz particles is broken into quartz sand, wherein the particle diameter of quartz sand is 0.1 ~ 1cm.
3. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, it is characterized in that: described electromagnetism roasting-water cooling and abrasive dust the quartz sand after electromagnetism roasting are placed in water cool fast, then making the particle diameter of quartz sand be 200-1000 order by pulverizing.
4. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, it is characterized in that: described magnetic separation step be by abrasive dust after quartz sand powder along chute face rotate, glide, then the magnetic separation of twice different magnetic field intensity is experienced, first magneticstrength is 500 ~ 2000 Gausses, and action time is 20 ~ 30min; The magneticstrength of second time magnetic separation is 5000 ~ 12000 Gausses, and action time is 5 ~ 15min.
5. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, is characterized in that: described electrostatic removal of impurities is by electrostatic and flotation step removing impurity; Adopt the non magnetic ore deposit in electrostatic interaction removing mineral and potassium, albite, aluminium, this kind of impurity of mica; Then under weak acid environment, in quartz sand powder, add pore forming material, bubble after reaction 5-15min, material is sucked into flotation machine, floatingly selects mica mineral; Finally under weakly alkaline environment, in quartz mortar, add collecting agent, after reaction 5-15min, material is sucked into flotation machine, floatingly selects feldspathoid.
6. the preparation method of a kind of silica tube according to claim 5, quartz plate or quartz pushrod, is characterized in that: described pore forming material is oxy-compound class, ether and ether alcohol class, pyridines and ketone tensio-active agent, and wherein the pH of weakly acidic condition is 5.0 ~ 6.5; Described collecting agent is lipid acid and soda soap, alkylsulfonate, alkyl-sulphate, phosphoric acid ester, arsenate, aliphatic amide and salt thereof, rosin Amine D, quaternary ammonium salt or diamines and polyamine compounds, and wherein the pH of mild alkaline conditions is 8.5 ~ 10.0.
7. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, it is characterized in that: the removal of impurities of described microwave complexometry adopts microwave power to be 200 ~ 500w, microwave extracting 2 ~ 3 times, each action time is 20 ~ 40min, water-bath ratio is 1 ︰ 20 ~ 30, bath temperature 40 ~ 80 DEG C; Wherein complexometry adopts metallic element in mixing acid complexing removing quartz sand, mixing acid consist of 40 ~ 50% (wt%) nitric acid, 20 ~ 25% (wt%) hydrochloric acid, 50 ~ 80% (wt%) sulfuric acid and 20 ~ 30% (wt%) hydrofluoric acid, the weight part ratio of wherein various acid is Xiao Suan ︰ Yan Suan ︰ Liu Suan ︰ hydrofluoric acid=1 ~ 6 ︰ 1 ~ 3 ︰ 2 ~ 5 ︰ 1 ~ 11.
8. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, it is characterized in that: described washed with de-ionized water-oven dry and smelting furnace obtain silica tube, quartz plate or quartz pushrod be by the removal of impurities of microwave complexometry after quartz sand through washed with de-ionized water post-drying to surface moisture≤1%, finally obtained silica tube, quartz plate or quartz pushrod in a furnace.
9. the preparation method of a kind of silica tube according to claim 8, quartz plate or quartz pushrod, is characterized in that: the temperature of described smelting furnace is 1750 ~ 3000 DEG C.
10. the preparation method of a kind of silica tube according to claim 1, quartz plate or quartz pushrod, is characterized in that: described in prepare SiO in silica tube, quartz plate or quartz pushrod
2content is 99.99-99.9999%, foreign matter content < 10ppm.
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| CN107824330A (en) * | 2017-09-15 | 2018-03-23 | 江苏闽江矿业有限公司 | A kind of production method of artificial stone quartz sand |
| CN109046746A (en) * | 2018-08-10 | 2018-12-21 | 江苏凯达石英股份有限公司 | Low-grade quartz sand purifying technique |
| CN110734068A (en) * | 2019-11-01 | 2020-01-31 | 四川省青川红源石业有限责任公司 | Preparation method of high-purity quartz sand |
| CN111606553A (en) * | 2020-05-22 | 2020-09-01 | 新沂市东方石英玻璃有限公司 | Preparation method of high-temperature-resistant quartz rod with low expansion coefficient |
| CN112429947A (en) * | 2020-12-02 | 2021-03-02 | 中能半导体(连云港)有限公司 | Novel quartz furnace tube production process |
| CN112441724A (en) * | 2020-12-02 | 2021-03-05 | 中能半导体(连云港)有限公司 | Production process and manufacturing method of quartz furnace tube with good sealing performance |
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| CN112429947A (en) * | 2020-12-02 | 2021-03-02 | 中能半导体(连云港)有限公司 | Novel quartz furnace tube production process |
| CN112441724A (en) * | 2020-12-02 | 2021-03-05 | 中能半导体(连云港)有限公司 | Production process and manufacturing method of quartz furnace tube with good sealing performance |
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Application publication date: 20151202 |