CN1051073A - Micro-pump - Google Patents

Abstract

This specification is disclosed to be that a kind of cycle on schedule is continuously or off and on the pocket micro-pump of small speed pumping liquid.This pump be by: with pottery or the organic material control voltage piezoelectric element that will be out of shape of making, feed; And the vibrating diaphragm that described piezoelectric element is adhered thereon, also can as one man be out of shape with the distortion of described piezoelectric element constitutes.Along with vibrating diaphragm is flexible, make the micro-pump distortion or suck liquid from suction port, maybe will emit to its radiation mouthful outside from the liquid that suction port sucks.

Description

Micro-pump

The cycle on schedule of the present invention relates to is continuously or off and on the pocket trace radiological unit of small speed radiation liquid.

In the prior art, for example, at day disclosure special permission communique 54(1979)-No. 12191 and Japan special permission communique 61(1986) this micro-radiological unit was disclosed in-No. 22599.In disclosed micro-radiological unit, a kind of electromagnetic actuators is used as prime mover, and is coupled on the driving mechanism with variable-sized Gear combination, thereby an injector can directly be promoted with an arm.

Yet, because this device uses electromagnetic actuators, so anti-electromagnetic noise ability is weak and current sinking is big.Moreover, because use gear drive, because backlash increases and complex structure this device exit dose residual quantity.In addition, also increased overall dimension for wanting pushing syringe, thereby limited portability.

An object of the present invention is to provide a kind of micro-pump, that is, a kind of anti-electromagnetic noise ability is strong, have so little current loss is easy to carry to use small cell, and has the small portable trace radiological unit of good radiation precision.

Another object of the present invention provides a kind of in fault that suppresses to form owing to leakage and product cost increase, the small-sized micro-pump that is easy to assemble and have versatility.

According to an aspect of the present invention, provide a kind of micro-pump with pump assembly, this pump assembly comprises: made and one added the control voltage piezoelectric element that will be out of shape by pottery or organic material; The vibrating diaphragm that has described piezoelectric element to adhere thereon, also can as one man be out of shape with the distortion of described piezoelectric element; Make its suction port discharge its closed condition, suck the liquid inlet pipe check valve of liquid from suction port by the distortion of predetermined direction according to described vibrating diaphragm; And make the discharge opeing check valve that its radiation hole discharges its closed condition, the liquid that will suck from suction port radiates from the radiation mouth by described radiation hole by above-mentioned rightabout distortion according to described vibrating diaphragm.

If will control voltage is added on the piezoelectric element, piezoelectric element is just radially flexible.Along with these expanding-contracting actions make the vibrating diaphragm up-down vibration that is bonded on the piezoelectric element, thereby liquid in containers suction pump assembly and from radiating mouth with its discharge.

Because the pump that will adopt piezoelectric element as micro-pump, constitutes so compare the parts of available lesser amt with the radiological unit that adopts electromagnetic actuators, thereby can make it miniaturization and reduce product cost.In addition,, make the shape of radiological unit that the more freedom degree can be arranged, and since piezoelectric element is the actuator that a kind of voltage drives, little the arriving of its consumed current is the order of magnitude of μ A only because the shape of container can be unrestricted.Therefore, promptly use lithium cell also can obtain the pocket micro-pump of the battery of long life.

On the other hand, adopt the micro-pump of electromagnetic actuators can not pursue the adjusting flow.But, in the present invention, use piezoelectric element thereby can control displacement according to voltage, that is, and exit dose.As a result, can be according to the FREQUENCY CONTROL exit dose, and, like this, just can finely tune exit dose according to Control of Voltage flow velocitys at different levels.Moreover the may command piezoelectric element does not cause possible backlash and resemble with the radiological unit of electromagnetic actuators by gear drive less than the displacement of 1 μ m.For example, if used pressurizing chamber diameter is 10mm, then described discharge capacity control can be accurate to very small amount 0.02 little litre.And, because piezoelectric element is not affected by magnetic fields, so, even be under the magnetic field environment, can not resemble yet and cause misoperation the electromagnetic actuator, thereby, good Security can be obtained.

In addition, according to a further aspect in the invention, the pump assembly of micro-pump has integral body (valve) member, and wherein, this integrated member has made up at least one check valve and constituted the member of channel part.Owing to adopt such valve member, might solve existing problem, that is, when the molten weldering of ultrasound, cause the problem of leakage by ultrasonic energy.In prior art,, each annex of two valves and valve is broken down even have only a valve to be out of order.Yet,, before assembling, just can aspect the reliability of leaking, test valve member itself according to this aspect of the present invention.As a result, can give eliminating if having the words of defective member, and only good member be put in the pump reliably.This has reduced disqualification rate.In addition, the valve that was difficult in the past assemble is divided into valve member, makes the defective of a member can not involve integral body.Like this, although increased by a step operation, valve is become be easy to assembling.As a whole, increase substantially reliability and Security, and can significantly reduce product cost.Thereby the present invention can provide significant practical effect.

On the other hand, if when preparing each valve member put into suction side and discharge side, their can be put arbitrarily and need not consider which side they are set in.

In addition, owing to can adopt different valve members with the discharge side in the suction side, so they can be according to exchanging accordingly.For the control of a kind of thread amount, the valve member that can adopt the ceramic valve by micro-cutting processing to constitute.If if when allowing little adverse current or wishing low product cost, valve member can be made of plastic valve.Like this, just might consider application target and best valve member is provided.This had got rid of quality or had owed quality.In addition, the parts except that valve member can be used for providing the cost figure of merit usually.

In the design of prior art, design entire pump according to its kind.But, among the present invention, because valve member is incorporated, so valve design member rather than whole just enough only.Therefore, thus having simplified design work significantly reduces cost.

On the other hand, if to be improved the existing valve that is just using, so because described valve member can use this valve member up to being improved continuously.When improving end, can use other parts usually by changing this valve member.The advantage of this smooth replacing existing apparatus not only obviously provides cost savings aspect processing, but and at the existing valve of customer-side interference-free replacing.And then this advantage has improved trust to the producer with significant superiority.

According to a further aspect of the invention, micro-pump is that piezoelectric element with multi-disc pottery or organic material is bonded on the vibrating diaphragm and constitutes.

Like this, might provide a kind of and have high flow capacity and the pump assembly that influenced by back-pressure in one-level.On the other hand, existing bimorph vibrating diaphragm all has piezoelectric element on its two sides, can make its short circuit in the liquid or its surface of contact is corroded because it has a piezoelectric element to be immersed in, so can not be used in the environment of corrosion or conduction.But, because piezoelectric element of the present invention is to be adhered on the face of vibrating diaphragm, it keep clear of with pressurizing chamber in the contacting of liquid.Therefore, even pressurizing chamber is in the environment of corrosion or conduction, still can be with pump assembly structure Cheng Buhui by short circuit or come in contact corrosion phenomenon, thus improve the reliability of pump assembly and prolonged its working life.

Another aspect according to the present invention in the pump assembly of micro-pump, sucks valve pocket and discharges valve pocket by keeping the vibrating diaphragm of plane contact to close with board member placed in the middle.As a result, though more or less there is leakage can get rid of adverse current.And by means of the displacement with board member constrained vibration diaphragm, can constitute has micro-pump than low correlation to back-pressure.On the other hand, the occasion prepare to eliminate foam from the pump assembly if carry out, can help to eliminate foam for higher flow velocity under vacuum or pressurization situation.Foam can easily be eliminated with the acceleration flow velocity in space by setting up the specific size that is formed by vibrating diaphragm.

According to a further aspect of the invention,, liquid can be injected in the pump and container that has formed vacuum and sealing from the outside in addition.Soup directly is injected into the occasion of human body being used for medical purpose, can prevents fully that gas from slipping into soup to guarantee significant tight security.

In addition, if will be with soup or alcohol as radiation liquid, used pump assembly must be made with the height chemically resistant material resemble the polypropylene.In this case, can not stick with glue agent adhesion electrode metal plate and polypropylene flat board.Therefore in the present invention, it is embedded moulding that the electrode metal plate of cone shape hole is arranged, so that make they and vibrating diaphragm integrator.Like this, just can obtain can not peeling off, reusable good durability arranged, make the as a whole pump assembly that height reliability is provided.And, if constitute vibrating diaphragm, it easily can be welded on the main body, and need not can guarantee and intersubjective water proofing property by any liner with the solvent welded projection.So, under low-cost condition, just can prepare the good pump assembly of installing.

According to a further aspect of the invention, advance in order to first valve member of closing suction port with in order to close second valve member in radiation hole, can freely set the elastic force of each spring with independent holddown spring.This makes might freely set the valve cracking pressure.Therefore, if in that this pump of use under the occasion of many external vibrations is arranged, can set holddown spring and have the elastic force that overcomes described vibration, so that make pump can obtain the valve arrangement of safety.And, if use valve arrangement of the present invention, because excellent contact and sealing characteristics can significantly improve the energy level of anti back-flow, and do not increase the adverse current flow, thereby can make reliability bring up to a higher level.

Above-mentioned and other purposes and advantage feature of the present invention, by following introduction together with becoming clearer and more definite with reference to the accompanying drawings.

Fig. 1 and 2 represents respectively according to the analysing and observe and top plan view of the micro-pump of one embodiment of the invention,

Fig. 3 is the sectional view of pump modular construction one example of presentation graphs 1,

Fig. 4 is the circuit block diagram of expression according to the micro-pump of one embodiment of the invention,

Fig. 5 is expression booster circuit one embodiment's circuit diagram,

Fig. 6 is the circuit diagram that expression level shifter one is implemented,

Fig. 7 is the circuit diagram of expression driver one example,

Fig. 8 (a) and 8(b) be the sectional view of the pump assembly operation of explanatory drawing 3,

Fig. 9 is the time diagram that shows each drive signal of pump assembly,

Figure 10 and 11 is respectively analysing and observe and top plan view of expression valve member one embodiment,

Figure 12 is the sectional view of expression with the micro-pump of the valve member formation of Figure 10,

Figure 13 (a) and 13(b) be the sectional view of the micro-pump operation of explanation Figure 12,

Figure 14 and 15 is respectively analysing and observe and top plan view of another embodiment of expression valve member,

Figure 16 is the sectional view of expression with the micro-pump of the valve member formation of Figure 14,

Figure 17 and 18 is respectively analysing and observe and top plan view of another embodiment of expression valve member,

Figure 19 is the sectional view of expression with the micro-pump of the valve member formation of Figure 17,

Figure 20 is another embodiment's of expression pump modular construction a sectional view,

Figure 21 is that explanation is being used under bimorph piezoelectric element and the single piezoelectric chip piezoelectric element situation, the performance diagram that concerns between back-pressure and the flow,

Figure 22 is another embodiment's of expression pump modular construction a sectional view,

Figure 23 (a) and 23(b) be the sectional view of the pump assembly action of explanation Figure 22,

Figure 24 is the performance diagram that concerns between the flow of explanation Figure 22 pump modular construction and the back-pressure,

Figure 25 is another embodiment's of expression pump modular construction a sectional view,

Figure 26 and 27 is respectively the top plan view and the sectional view of expression top pressure closure,

Figure 28 is illustrated in container to be connected to sectional view under the pump component states,

Figure 29 (a) and 29(b) be the sectional view of the pump assembly action of explanation Figure 25,

Figure 30 is another embodiment's of expression pump modular construction a sectional view,

Figure 31 and 32 is respectively the top plan view and the sectional view of the vibrating diaphragm of expression Figure 30,

Figure 33 (a) and 33(b) be the sectional view of the pump assembly action of explanation Figure 30,

Figure 34 is another embodiment's of expression pump modular construction a sectional view,

Figure 35 (a) and 35(b) be the sectional view of the pump assembly action of explanation Figure 34,

Figure 36 is another embodiment's of expression pump modular construction a sectional view,

Figure 37 (a) and 37(b) be respectively explanation sucking side triple valve and the sectional view of discharging the action of side valve,

Figure 38 (a) and 38(b) be respectively explanation valve arrangement another embodiment's the structure and the sectional view of action,

Figure 39 (a) and 39(b) be respectively explanation valve arrangement another embodiment's the structure and the sectional view of action,

Figure 40 is the wherein side elevation view that combines of fixed plate and check valve flapper of expression one embodiment,

Figure 41 is another embodiment's of expression pump modular construction a sectional view,

Figure 42 (a) and 42(b) be respectively explanation sucking side triple valve and the sectional view of discharging the action of side valve,

Figure 43 (a) and 43(b) be respectively the explanation valve arrangement another implement the structure of side and the sectional view of action,

Figure 44 is another embodiment's of expression pump modular construction a sectional view,

Figure 45 (a) and 45(b) be respectively explanation sucking side triple valve and the sectional view of discharging the action of side valve,

Figure 46 (a) and 46(b) be respectively explanation valve arrangement another embodiment's the structure and the sectional view of action,

Figure 47 (a) and 47(b) be respectively explanation valve arrangement another embodiment's the structure and the sectional view of action,

Figure 48 (a) and 48(b) be respectively explanation valve arrangement another embodiment's the structure and the sectional view of action.

Fig. 1 and 2 is respectively sectional view and the top plan view of expression according to one embodiment of the invention micro-pump.

This embodiment's micro-pump comprises: by pump assembly 101, one vibrating diaphragms that piezoelectric element constitutes, and a check valve and main body with inhalation port, discharge port and a passage; Intergrated circuit 102 in order to operating pumps assembly 101; The circuit block of forming by electric elementss such as all intergrated circuit as described 102, step-up coil or capacitor and substrate 103; Play the battery 104 of power supply effect; External control switch 105; Container 106; Cover 107; And display device 108.

Fig. 3 is the sectional view of the details of pump assembly 101.This pump assembly 101 comprises: piezoelectric element 201, electrode metal plate 202, vibrating diaphragm 203, liquid inlet pipe check valve 204, discharge opeing check valve 205, A main body 210 and B main body 214.This A main body 210 has inhalation port 206, discharges port 207, sucks valve pocket 208 and discharge valve pocket 209 to be constituted.This B main body forms with vibrating diaphragm 203 pressurizing chamber 211 and inhalation port 212 and discharge port 213 in order to contact to be provided between described pressurizing chamber 211 and valve pocket 208 and 209 together.Assemble the B main body with the ultrasound solvent welded, or it is adhered on the A main body 210, this A main body has complete betwixt check valve 204 and 205, and diaphragm 203 has adhesion piezoelectric element 201 and electrode metal plate 202 thereon.

Fig. 4 illustrates an embodiment of the circuit block 103 of Fig. 1.This circuit block comprises: such as the such power supply 301 of lithium cell, booster circuit 302, CPU303, in order to low voltage signal is transformed to the level shifter 304 of high voltage signal, driver 305 in order to drive pressure electric device 306, in order to demonstration pump 8 charges or suchlike display device 307, and in order to select flow or suchlike switch 308.When selecting flow, from CPU303 rear pump drive signal by switch 308.In general, the signal of CPU303 is to operate under 3 to the 5V conditions at voltage, and piezoelectric element 306 is for example being operated under the 50V condition of high voltage.So, with 3V voltage, for example, boost to 50V by booster circuit 302, and will become the signal of 50V from the signal conversion of CPU303 by level shifter 304.

Fig. 5 is that expression is the circuit diagram with chopped mode booster circuit one example of booster circuit 302 in the exemplary view 4.Label 401 and a pair of input terminal of 402 expressions, label 403 and a pair of outlet terminal of 404 expressions.Input terminal 401 and outlet terminal 403 provide a common electrode Vdd.Input terminal 402 feed-ins for example-the low voltage Vss1 of 3V, and outlet terminal 405 outputs for example-the high voltage Vssh of 50V.Label 405 expressions one step-up coil, label 406 expressions first switching element, and label 407 expressions are in order to be switched on or switched off the control circuit of first switching element 406.The feeder loop that label 408 expressions are made up of resistance 409 and 410.Label 411 expressions make the smmothing capacitor of output smoothing, label 415 expression adverse current isolation diodes; Label 412 expression direct current inputs; Label 413 expression direct current outputs; And label 414 expressions are in order to the control signal of control switch element 406.

If connected switching element 406 by control signal 414,, make and in step-up coil 405, stored and square energy that is directly proportional that flows through electric current with regard to beginning to flow through step-up coil 405 and switching element 406 and increasing from direct current input 412 electric currents of feeding along with the time.

Then, if disconnect this switching element 406, the energy that is stored in the step-up coil 405 is stored in the smmothing capacitor 411 by adverse current isolation diode 415.Here, this adverse current isolation diode 415 prevents to be stored in electric charge in the smmothing capacitor 411 and discharges and flow through switching element 406 when switching element 406 is connected.

The feeder loop 408 that the voltage of direct current input 413 is made up of resistance 409 and 410 carries out dividing potential drop, and the reference potential in its value and the control circuit 407 is compared.Based on this comparative result, therefore control circuit changeover control signal 414 can make the output 413 of stream stream constant to be switched on or switched off described switching element 406.

Fig. 6 is the circuit diagram of level shifter 304 1 examples in the presentation graphs 3.Number in the figure 421 expression feed-in level are the input signal Vin of the signal of Vdd and Vssl, and 422 expressions are the output signal of the signal of Vdd and Vssh in order to output level.Label 423 expressions one inverter, label 424 expression level Vdd, label 425 expression level Vssh, label 426 and 427 expression P-channel field-effect transistor (PEFT) transistors, and label 428 and 429 expression N slot field-effect transistors.

If input signal Vin 421 makes described transistor 427 and 428 conductings with level Vdd input, and transistor 426 and 429 disconnects.As a result, output signal Vo 422 is transformed into the signal of level Vdd.On the other hand, if with level be the signal input of Vssl as input signal Vin421, make transistor 426 and 429 conductings, and transistor 427 and 428 disconnects.As a result, output signal Vo 422 is transformed into the signal that level is Vssh.

Fig. 7 is the circuit diagram of drive circuit 305 1 examples in the presentation graphs 3.Label 440 expression input signal Vin, label 441 expressions one transducer, label 442 and 443 expression level shifters, label 444 and 446 expression p channel transistors, label 445 and 447 expression N channel transistors, and the electrode of label 450 and 451 expression piezoelectric elements 201.When level is the signal input of Vdd during as input signal Vin 440, transistor 444 and 447 disconnects, and makes transistor 445 and 446 conductings.As a result, level is the voltage of the Vssh electrode 450 of feeding, and level is the voltage of the Vdd electrode 451 of feeding.On the contrary, same when level is the signal input of Vssl during as input signal Vin 440, level is the voltage of the Vdd electrode 450 of feeding, thus and level to be the voltage of Vssh feed electrode 451 drive pressure electric devices 201.

Fig. 8 (a) and 8(b) be the sectional view of pump assembly 101 action in the explanatory drawing 3.Suppose that pressurizing chamber 211 and valve pocket 208 and 209 are equipped with liquid.If if also suppose piezoelectric element 201 overlying electrode 450 feed voltage Vdd and its lower electrodes 451 feed voltage Vssh, then piezoelectric element 201 radial contraction.

Fig. 9 shows the drive waveforms of pump assembly 101.Fig. 9 (a) shows from the drive waveforms of CPU 303 outputs of Fig. 4, and Fig. 9 (b) and 9(c) show respectively and be added to the driving voltage waveform on the electrode 450 and 451 among Fig. 8.Concerning the time cycle 90 of Fig. 9, electrode 450 feedbacks have voltage Vdd, and electrode 451 feedbacks have voltage Vssh, so piezoelectric element 201 carries out radial contraction.Because the result of this radial contraction, vibrating diaphragm 202 protrudes downwards, shown in Fig. 8 (a).So the liquid in the pressurizing chamber 211 is pressurized depresses discharge opeing check valve 205, thereby force flow direction to discharge port 207.At this moment, prevent liquid to flow back to inhalation port 206 by means of the effect of feed liquor check valve 204 from pressurizing chamber 211.

Then, for the time cycle 902 of Fig. 9, electrode 450 feedback has voltage Vssh, and electrode 451 feedbacks have voltage Vdd, makes piezoelectric element 201 circumferentially extendings.Because the result of this stretching, extension makes vibrating diaphragm 202 protruding upward, shown in Fig. 8 (b).So, the liquid in the pressurizing chamber 211 is evacuated the feed liquor check valve pushed to, thereby force liquid to flow to pressurizing chamber 211 from suction port 206.At this moment, prevent liquid to lead to by means of the effect of discharge opeing check valve 205 and discharge port 207 from pressurizing chamber 211.

Therefore, by repeating, liquid can be drawn into from inhalation port 206 and discharge port 207 with reference to Fig. 8 (a) and 8(b) so far described action.

Figure 10 is expression valve member one an embodiment's of the present invention sectional view, and Figure 11 is its top plan view.This valve member is totally by label 220 expression, and it has an access portal 222 and a check valve to lead the D main body of tenon 223 by check valve 221, and in order to fixing E-main body 226 formations of check valve (also playing access portal 225 effects).So the valve member 220 that constitutes is assembled by the following method.At first, check valve 221 is arranged on the leading on the tenon 223 of D main body.So check valve 221 covers access portal 222.Thereafter, with on the molten D of the being soldered to main body 224 of E main body 226 ultrasound to assemble this valve member 220.

Safety check 221 is processed into the top cover shape, and check valve is led tenon 223 and the shape that when molten weldering is operated check valve 221 is not rotated is processed in contrary respective openings tracking of returning valve 221.

Figure 12 is illustrated in to suck and the exhaust end oral-lateral uses the valve member 220 of Figure 10 and 11 and the sectional view of the micro-pump of formation.

In this micro-pump, A main body 250 is processed with inhalation port 206, discharges port 207, sucking side triple valve member holder 220a and discharge side valve member holder 220b.Valve member 220 is placed in the holder 220a of its suction side (making the access portal 222a and 206 alignment of A main body inhalation port of the D main body of valve member as shown in Figure 10 thereon), and valve member 220 is placed and (the discharge port 207 of the access portal 225b of the E main body of valve member and A main body aligns on this) in the suction side is discharged side holder 220b on the contrary.One by one those members be fusion welded to A main body 250 on thereafter.Then, will there be piezoelectric element 201 adhesions electrode metal plate 202 thereon to be bonded at equally on the vibrating diaphragm 203 of organic material, and be fusion welded to equally on the A main body, assemble this micro-pump like this.At this moment, form therebetween with the valve member of the same assembling of A main body and vibrating diaphragm 203 and add voltage-controlled 211.Here, in Figure 12, at the various piece suffix letter a of sucking side triple valve member 220, and at the various piece suffix letter b that discharges side valve member 220.

Figure 13 (a) and 13(b) be the sectional view of action of the micro-pump of explanation Figure 12.

If voltage is added on the piezoelectric element 201, shown in Figure 13 (a), piezoelectric element 201 sticking metal vibrating diaphragm 202 and organic material vibrating diaphragms 203 thereon are out of shape in the direction of arrows.As a result, thereby make the liquid in the pressurizing chamber 211 depress the check valve 221a of sucking side triple valve member 220, flow to the suction side thereby make access portal 222a close block liquid.The check valve 221b that discharges side valve member 220 is pressurized and open fluid openings 222b also, makes liquid be sucked into by discharge opeing valve pocket 209, access portal 222b and access portal 225b and discharges port 207.

Then,, shown in Figure 13 (b), electrode metal plate 202 and organic material vibrating diaphragm 203 are out of shape in the direction of arrows, that is, are out of shape by the opposite direction of situation shown in Figure 13 (a) if backward voltage is added to piezoelectric element 201.As a result, pressurizing chamber 211 is evacuated, has closed access portal 222b thereby make the check valve 221b of liquid discharging valve member 220 suct.And, thereby the check valve 221a that sucts sucking side triple valve member 220 opens access portal 222a, makes liquid pass through inhalation port 206, and access portal 222a, admission chamber 208 and access portal 225a flow to pressurizing chamber 211.

Therefore, by repeating, liquid can be drawn into from inhalation port 206 continuously and discharge port 207 with reference to Figure 13 (a) and 13(b) so far described action.

Figure 14 is another embodiment's of valve member 220 structures a sectional view, and Figure 15 is its top plan view.This valve member 220 is constituted two access portal 234 and 235 of closing by valve 231.Demonstrated by the micro-pump of Figure 16 and to have used the micro-pump structure of this valve member in the discharge opeing side of Figure 12.In this way, can make the micro-pump of another kind of type by changing valve member.

Adopt a kind ofly, can dream up another kind of structure by the valve that uses and the etching pottery is made by existing micro-cutting processing technique.This structure shown in Figure 17 and 18, among the figure, a kind of ceramic valve that label 241 expressions are shaped by micro-cutting.In addition, this valve member constitutes by the base that a passage 242 is arranged is installed on the ceramic valve 241.As above-mentioned valve member, realize moving of this valve to open or close passage 242 by vertical movement part 241a.

Figure 19 is the sectional view of expression with the micro-pump of the valve member formation of Figure 17 and 18.

This embodiment is equipped with a base 244, and this base is used for the bottom surface 243 of discharge opeing side valve is remained on A main body 250.This base 244 be processed with one with passage 242 corresponding passages 245.And, in this embodiment, the 208 double effects of playing pressurizing chamber of feed liquor valve pocket.

The valve of this micro-cutting processing can be subminiaturized, to realize the micro-flow control of the sub-micro litre order of magnitude.And by employing micro-cutting processing technique, but etched silicon substrate is so that valve, diaphragm and main body integration.With they plastic mouldings, can dream up other various valve and valve members by partly.

Figure 20 is expression pump assembly 101 another embodiments' a sectional view.The dissimilarity of the pump assembly of this embodiment and Fig. 3 is that it also is equipped with second piezoelectric element 215 except first piezoelectric element 201.Adhere to these two piezoelectric elements and have different polarised directions.In addition, second piezoelectric element electrode 452 that superposes, setting this electrode is common potential, gives electrode 450 and 451(wherein and add driving power, for example electrode 452 is set to 0V, gives electrode 450 and 451 and add 50V).

The action of the pump assembly of Figure 20 is similar with Fig. 8 (a) and action 8(b) basically, thereby has omitted the explanation to them.

Figure 21 shows the performance diagram that concerns between the flow of pump assembly of Figure 20 and the back-pressure.The curve of flow to back-pressure draws among Figure 21.Curve 801 is expressed the characteristic curve of only using (according to the embodiment of Fig. 3) pump assembly under a slice piezoelectric element list piezoelectric chip piezoelectric element situation, and characteristic curve 802 is expressed the characteristic curve of the pump assembly of Figure 20.

In general, because the displacement of vibrating diaphragm becomes less under higher back-pressure situation, so flow is less.By adopting the bimorph piezoelectric element of two piezoelectric elements because the thickness of every piezoelectric element of bimorph as for single piezoelectric chip piezoelectric chip thickness half, then displacement doubles.In addition, because two bimorph piezoelectric elements are to arrange side by side, displacement is that single piezoelectric chip piezoelectric element is to arrange side by side, and displacement is that four times of single piezoelectric chip are big.As a result, flow becomes and is higher than single piezoelectric chip occasion.If increase the thickness of bimorph, described shake unit makes the influence of suffered back-pressure less because of its rigidity strengthens.

Figure 22 is expression pump assembly 101 another embodiments' of structure a sectional view.This pump assembly is not equivalent to the parts of the pressurizing chamber 211 of Fig. 3, and B main body 214a and vibrating diaphragm 203 are only fixed at their periphery.

Figure 23 (a) and 23(b) be the sectional view of explanation pump assembly action.For example, if give the electricity level 450 supplying voltage Vssh, and give electrode 451 supplying voltage Vdd, piezoelectric element 201 makes it protruding upward with regard to circumferentially extending, shown in Figure 23 (b).So vacuum is pumped in the gap between vibrating diaphragm 203 and the B main body 214a makes them be separated from each other formation one space 211a.As a result, thus the liquid in the admission chamber 208 is evacuated and sucts feed liquor check valve 204.Thereby liquid is drawn into aforesaid space 211a from inhalation port 206.Then, if give electrode 450 supplying voltage Vdd, and give electrode 451 supplying voltage Vssh, piezoelectric element 201 makes vibrating diaphragm 203 to protrude on the contrary downwards with regard to radial contraction, but its displacement is limited by B main body 214a, shown in Figure 23 (a), thereby eliminated space 211a.So the liquid pressurized among the 211a of space and depress discharge opeing check valve 205 impels flow direction bleed port 207.Therefore, by repeating liquid can be drawn into bleed port 207 from inhalation port 206 with reference to Figure 23 (a) and 23(b) so far described action.In addition, during the action of feed liquor check valve 204 during the discharge opeing and feed liquor the action of discharge opeing check valve 205 be similar to Fig. 8 (a) and 8(b) shown in action.

Figure 24 shows the performance diagram that concerns between the flow of pump assembly of Figure 22 and the back-pressure.The curve of flow to back-pressure draws among Figure 24.Curve 803 is expressed the characteristic curve that constitutes between (in the embodiments of figure 3) B main body 214 and the vibrating diaphragm 203 under the pressurizing chamber situation, and curve 804 is expressed the characteristic curve of Figure 22 pump assembly.In general, because the displacement of vibrating diaphragm becomes less under higher back-pressure situation, so flow is less.But, because B main body 214a has played baffle plate, so might obtain discharging the pump assembly of constant flow rate up to certain back-pressure.

Figure 25 is expression pump assembly 101 another embodiments' of structure a sectional view.This embodiment is equipped with in order to seal the rubber top cover 255 and 256 of inhalation port 206 and bleed port 207 respectively. Top cover 255 and 256 is equipped with and runs through the spring 257 and 258 that this top cover extends.

Figure 26 and 27 is respectively the top plan view and the sectional view of expression top pressure closure 255 or 256.Label 259 expressions are by the molded top cover of the such rubber of for example silicone.There is the top cover 260 in a hole 261 to make, when preparation is injected into liquid from the outside by it, can be used to guide injector by metal or plastics.

Figure 28 illustrates another embodiment, and in this embodiment, the inhalation port of pump assembly 206 links to each other with a container 263 by a pipe 262, and is equipped with rubber top cover 255 in container 263 parts.Explanation in passing, label 264 expressions are in order to remain on rubber top cover 255 plastic hoop in the container 263.

If for therapeutic purposes will directly be injected into human body with soup with this micro-pump, for example, it is essential changing that pump and container purify.Therefore, will be found time and in advance with sealed rubber top cover good seal in addition in the inside of pump assembly and container.Then, by injector 257 is inserted pump assembly or container rubber top cover injectable liquids from described side, thereby only fill up the inside of pump or container with liquid.Can liquid be emitted to the outside by injector 258.

Figure 29 (a) and 29(b) be the sectional view of the pump assembly action of explanation Figure 25.If with feed electrode 450 and with the voltage Vssh electrode 451 of feeding, piezoelectric element 201 carries out radial contraction, and vibrating diaphragm 203 is protruded downwards, shown in Figure 29 (a) of voltage Vdd.So, the liquid pressurized in the pressurizing chamber 211 and depress discharge opeing check valve 205, thereby force flow direction to discharge port 207.Then,, and, make piezoelectric element 201 circumferentially extendings, so vibrating diaphragm 203 protrudes downwards, shown in Figure 29 (b) with the voltage Vdd electrode 451 of feeding if with the voltage Vssh electrode 450 of feeding.So, the liquid in the pressurizing chamber 211 is evacuated with promotion feed liquor check valve 204 upwards, thereby forces liquid to flow to pressurizing chamber 211 from inhalation port 206.Like this, by repeating, liquid can be drawn into from inhalation port 206 and discharge port 207 with reference to Figure 29 (a) and 29(b) so far described action.

Figure 30 is another embodiment's of expression pump assembly 101 structures a sectional view.In this embodiment, vibrating diaphragm 203 is made by a slice plastic flat diaphragm 274.

Figure 31 and 32 is respectively the top plan view and the sectional view of expression vibrating diaphragm 203.Because electrode metal plate 202 is processed with cone shape hole 270, so by fill up aforementioned each hole with plastics, can be securely fixed in plastic flat diaphragm 274 on the electrode metal dish 202.Label 271 is illustrated in a location plastic hoop that will use when preparing sticking piezoelectric element.Label 272 expressions are in order to an end connector of welding electrode.Label 273 expression is fixing and liquid can not flow through the protruding part for the molten weldering usefulness of ultrasound of B main body 214.

Figure 33 (a) and 33(b) be the sectional view of the pump assembly action of explanation Figure 30.

If with the voltage Vdd electrode 450 of feeding, and, then make piezoelectric element 201 radial contraction, thereby vibrating diaphragm 203 protrudes downwards, shown in Figure 33 (a) with the voltage Vssh electrode 451 of feeding.So, the liquid pressurized in the pressurizing chamber 211 and depress discharge opeing check valve 205, thereby force flow direction to discharge port 207.Then, if with the voltage Vssh electrode 450 of feeding, and with the voltage Vdd electrode 451 of feeding, then piezoelectric element 201 circumferentially extendings make that vibrating diaphragm 203 is protruding upward, shown in Figure 33 (b).So, the liquid in the pressurizing chamber 211 is evacuated with promotion feed liquor check valve 204 upwards, thereby, force liquid to flow to pressurizing chamber 211 from inhalation port 206.Like this, by repeating, liquid can be drawn into from inhalation port 206 and discharge port 207 with reference to Figure 33 (a) and 33(b) so far described action.

Figure 34 is another embodiment's of expression pump assembly 101 structures a sectional view.This pump assembly is made of piezoelectric element 201, electrode metal plate 202, vibrating diaphragm 203 and B main body 214.F main body 290 and G main body 291 install to the downside of B main body.Described F main body is processed with liquid feeding side valve pocket 208, the elastic baffle 284, liquid feeding side check valve stage clip 285 of feed liquor check valve is housed and for making the stage clip 285 clamping elastic baffles 284 straight pressing plates of installing 286 in this valve pocket.On the other hand, described G main body 291 is processed with discharge opeing side valve chamber 209, and the elastic baffle 287, discharge opeing that discharge opeing side check valve is housed in this valve pocket surveyed check valve stage clip 288 and for making the stage clip 288 clamping elastic baffles 287 straight pressing plates of installing 289.The H main body 292 that is processed with inhalation port 206 and discharge port 207 installs to the downside of F main body 290 and G main body 291.

The method of assembling then, will be described below.At first, elastic baffle 284 and pressing plate 286 are placed in the inhalation port 206 of H main body 292, with F main body 290 with G main body 291 ultrasound are molten is soldered on the H main body 292., stage clip 285 put into liquid feeding side valve pocket 208, and stage clip 288 is put into discharge opeing side valve chamber 209 thereafter.Put pressing plate 289 and elastic baffle 287 into discharge opeing side valve chamber 209 thereafter.So, B main body 214 is fusion welded to F main body 290 and G main body 291 downwards with ultrasound.Thereafter, the vibrating diaphragm 203 same ultrasonic waves with piezoelectric element 201 and electrode metal plate 202 are soldered to the B main body, assemble this pump assembly with this sample loading mode.

In this embodiment, elastic baffle 284 and 287 is plain disk shapes.Pressing plate 286 and 289 also is a plain disk shape.Stage clip 285 and 288 further is processed into common solenoid coil shape.Elastic baffle 284 and 287 is to be made by silicone rubber or Neoprene herein, but also available another kind of elastic material is made. Pressing plate 286 and 289 is made by the metallic material of the organic material resemble plastics or stainless steel and so on. Stage clip 285 and 288 material should not be limited to metal, also can be organic materials.

On the other hand, in this embodiment, stage clip 285 and 288 plays clamping elastic baffle 284 and 287 by pressing plate 286 and 289, makes elastic baffle 284 and 287 close liquid feeding side inhalation port 212 or (discharge opeing side) discharges port 213, prevents adverse current thus and plays valve.Herein, with inhalation port 212(or discharge port 213) elastic baffle 284(or 287) the surface of contact place, if can be to discharge port 213 at inhalation port 212() circumference on evenly afterburning pattern clamping elastic baffle 284(287), then very naturally, can not pass through pressing plate 286(or 289), and directly by stage clip 285(or 288) clamping elastic baffle 284(or 287).

Figure 35 (a) and 35(b) be the sectional view of the pump assembly action of explanation Figure 34.

If with feed electrode 450 and with the voltage Vssh electrode 451 of feeding, piezoelectric element 201 carries out radial contraction, makes vibrating diaphragm 203 protrude downwards, shown in Figure 35 (a) of voltage Vdd.So the liquid in the pressurizing chamber 211 is with regard to pressurized, thereby surpass the power of setting by stage clip 288.Then, this pressure is depressed the elastic baffle 287 of discharge opeing side check valve, pressing plate 289 and stage clip 288, thereby force liquid to flow to discharge port 207 by valve pocket 209 from outage 213.On the contrary, at liquid feeding side, the elastic baffle 284 of promotion liquid feeding side check valve compresses inhalation port 206 by the effect of stage clip 285 by pressing plate 286, makes the no liquid adverse current flow to inhalation port 206 from pressurizing chamber 211.

Then, if feed electrode 450 and with voltage Vdd feed voltage 451, piezoelectric element 201 carries out circumferentially extending makes vibrating diaphragm 203 protruding upward, shown in Figure 35 (b) with voltage Vssh.So the liquid in the pressurizing chamber 211 is pumped into vacuum, surpass the power of setting by stage clip 285.Then, liquid upwards promotes elastic baffle 284, pressing plate 286 and the stage clip 285 of liquid feeding side check valve, thereby, force liquid to flow to valve pocket 208 and flow to pressurizing chamber 211 via inlet opening H2 by inhalation port 206.In contrast, in the discharge opeing side, promote the elastic baffle 287 of discharge opeing side check valve, compress outage 213 by pressing plate 289 by the effect of stage clip 288, make that both no liquid flowed to discharge port 207 from pressurizing chamber 211, also aneroid stream flows to pressurizing chamber 211 from discharging port 207.

Therefore, by repeating, can force liquid to flow to and discharge port 207 from inhalation port 206 with reference to Figure 35 (a) and 35(b) so far described action.

Figure 36 is another embodiment's of explanation pump assembly 101 structures a sectional view.In this embodiment, will there be a slice resilient member 293 in a hole 294 to be clipped between the elastic baffle 284 and water sucting port 206 of liquid feeding side check valve.In addition, resilient member 293 is to be made of the stepped shaft disk that silicone rubber is made, and is clipped in the F main body 290 of valve pocket 208 regularly and has between the H main body 292 of inhalation port 206.

In the embodiment of Figure 34, it is to be made of plastics that the H main body of inhalation port 206 is arranged, and by contacting face-to-face and constructed to stop up adverse current with the elastic baffle 284 of liquid feeding side check valve.On the other hand, in the embodiment of Figure 36, this surface of contact is that rubber is made.As a result, can strengthen contact so that stop up adverse current more reliably.Adopted similar structure in the discharge opeing side.

Figure 37 (a) is the sectional view of the effect of expression pump feed liquor side valve.As shown in FIG., force liquid to flow to inlet opening 212 by valve pocket 208 from inhalation port 206.By the mutual maintenance of acting on of piezoelectric element 201 closely contact set up a gap between the elastic baffle 284 of feed liquor check valve and the resilient member 293 so that liquid by therebetween.Figure 37 (b) is the sectional view that expression resembles the action of the same discharge opeing side valve of feed liquor side valve.

Figure 38 (a) is another embodiment's of expression valve arrangement a sectional view.In this embodiment's valve arrangement, form a carinate part 295 of projection around the inhalation port 206 in the contact segment of the baffle plate 284 of liquid feeding side check valve and inhalation port 206.Become line with the contacting of baffle plate 284 of liquid feeding side check valve from face, thereby, even time face contact precision also can stop up adverse current.

Figure 38 (b) is the sectional view of this valve events of expression.For liquid is passed through therebetween, between the baffle plate 284 of carinate part 295 and liquid feeding side check valve, form an interval.Above-mentioned liquid feeding side valve arrangement is used for the discharge opeing side equally.

Figure 39 is another embodiment's of valve arrangement a sectional view.Figure 39 (a) illustrates the structure of the carinate part 296 of giving prominence to around liquid feeding side check valve baffle plate 284 inhalation ports 206.Figure 39 (b) illustrates the action of the valve of such formation.Just allow the flow of liquid mistake if between carinate part 296 and inhalation port 206, be formed with the gap.

In the aforementioned embodiment, pressing plate 286(or 289) and check valve baffle plate 284(or 287) be such dish type, promptly they can a superposition on another.Yet, as shown in figure 40,, can realize stable check valve baffle plate if pressing plate 297 and check valve baffle plate 298 formations are bitten mutually.

Figure 41 is another embodiment's of expression pump modular construction 101 a sectional view.This embodiment is structurally except that with a ball 501(and 502) compress inhalation port 206 and outage 213 to replace check valve baffle plate 284(or 287 among Figure 34), basically with the similar of having been described with reference to Figure 34.Preparing to use the ball here is to use such as inorganic material such as steel, pottery or glass, or organic material is made such as plastics or rubber.To insert pressing plate 286(or 289 as follows), be that an available uniform force promotes inhalation port 206(or outage 213), and, if leave inhalation port 206(or outage 213), the time still can make ball 501(or 502) turn back to fixed position (to close inhalation port 206 or outage 213).For this reason, be to use to have the plate of little friction factor to make used pressing plate 286(or 289) to ball.

Figure 42 (a) illustrates the action of feed liquor side valve of the pump assembly of Figure 41.Liquid flows through via the gap of inhalation port 206 and 501 formation of ball.Figure 42 (b) illustrates the action of discharge opeing side valve of the pump assembly of Figure 41.Flow of liquid is crossed the gap between outage 213 and the ball 502.Under any circumstance, the whole action of pump with reference to Figure 35 (a) with 35(b) described those are similar.

Figure 43 (a) is another embodiment's of expression valve arrangement a sectional view.Inhalation port 206 parts become the circular cone table with ball 501 contacts, as showing in 503 places with falling in.Owing to come the position (that is, will be guided inhalation port) of stability ball by this structure, therefore can obtain valve arrangement more reliably as long as ball rolls.

Figure 43 (b) illustrates the mobile action of valve arrangement.If form the gap between ball 501 and cone-shaped section 503, liquid also passes through via this gap.Embodiment's structure among Figure 43 can be applicable to the discharge opeing side valve equally.

Figure 44 is another embodiment's of expression pump assembly 101 structures a sectional view.This embodiment basically with the structure similar of Figure 36, just with ball 501(or 502) replace check valve baffle plate 284(or 287).According to this configuration, the effect by means of cascade dish type resilient member 293 can obtain valve highly reliably.Because because the elasticity of this resilient member, even ball 501(or 502) there are bad circularity or high hardness and rough surface, this resilient member also can make ball closely contact with it.

Figure 45 (a) and 45(b) ball 501 and 502 actions in feed liquor and discharge opeing side are shown, shown in action be and 37(b) or Figure 42 (a) and 42(b) similar with Figure 37 (a).

Figure 46 (a) is another embodiment's of expression valve arrangement a sectional view.This structure is made and is made inlet opening 206 and ball 501 contact segments be processed with a circular trough 508 around its edge, fixes an O type ring 509 in this groove.The elastic material of these O type ring 509 usefulness such as silicon or Neoprene made.Therefore, can provide in order to stop up a kind of structure of adverse current by means of tight contact the between ball 501 and the O type ring 509.

Figure 46 (b) is the sectional view of explanation ball valve 501 actions.As long as have any gap between O type ring 509 and ball 501, liquid will flow through described gap.The valve arrangement of Figure 46 can be applicable to discharge opeing side valve structure equally.

Figure 47 (a) is another embodiment's of expression valve arrangement a sectional view.In this embodiment, ball is not a complete ball, but with pressing plate 286 contact surfaces be flat, with inlet opening 206 contact surfaces be hemispheric member 510.Another kind method is, pressing plate 286 and hemispherical member 510 can be adhered mutually, makes that can be used as an integral unit is applied.Figure 47 (b) is the sectional view of explanation hemispherical member 510 actions.As long as have any gap between inlet opening 206 and hemispherical member 510, liquid just will flow through from described gap.This valve arrangement of Figure 47 can be applicable to discharge opeing side valve structure equally.

Figure 48 (a) is another embodiment's of expression valve arrangement a sectional view.This embodiment is configured to compress inlet opening 206 with a conical member 511.Also this conical member 511 and pressing plate 286 can be adhered mutually, make that can be used as an integral unit is applied.Figure 48 (b) is the sectional view of the action of explanation conical member 511.As long as have any gap between inlet opening 206 and conical member 511, liquid also will flow through from described gap.The valve arrangement of Figure 48 can be applicable to discharge opeing side valve structure equally.

Claims (22)

1, a kind of micro-pump, it comprises:

A control voltage is a piezoelectric element of deformable if feed,

The vibrating diaphragm that described piezoelectric element is adhered thereto thereby can be out of shape according to the distortion of described piezoelectric element is arranged,

Discharge the closing of suction port, suck a feed liquor check valve of liquid by the distortion of predetermined direction according to described vibrating diaphragm from suction port, and

According to described vibrating diaphragm by above-mentioned rightabout distortion discharge radiation the closing of hole, make the liquid that sucks from suction port by described radiation hole from a radiation mouthful discharge opeing check valve that radiates.

2,, it is characterized in that also comprising in addition according to the micro-pump of claim 1:

First valve pocket that described feed liquor check valve is housed and communicates with described suction port,

Second valve pocket that described discharge opeing check valve is housed and communicates with described radiation mouth, and

The pressurizing chamber of determining and communicating with described first valve pocket and described second valve pocket respectively via described inlet opening and described radiation hole by described vibrating diaphragm.

3,, it is characterized in that also comprising in addition according to the micro-pump of claim 2:

Be bonded at a slice electrode metal plate between described piezoelectric element and the described vibrating diaphragm,

Be attached to first electrode on the described piezoelectric element, and

Be attached to second electrode on the described electrode metal plate.

4, according to the micro-pump of claim 2, it is characterized in that:

The parts of described feed liquor check valve and described first valve pocket of formation are combined in first valve member, and

The parts of described discharge opeing check valve and described second valve pocket of formation are combined in second valve member.

5,, it is characterized in that described first valve member and second valve member are to constitute with different valve arrangements according to the micro-pump of claim 4.

6,, it is characterized in that described check valve is by the etching ceramic material according to the micro-pump of claim 1.

7, according to the micro-pump of claim 1, it is characterized in that, two or the mutual superposition of multi-disc piezoelectric element and stick together more with described vibrating diaphragm.

8, according to the micro-pump of claim 1, also comprise in addition:

First valve pocket that described feed liquor check valve is housed and communicates with described suction port and inlet hole, and

Second valve pocket that described discharge opeing check valve is housed and communicates with described radiation mouth and described radiation hole,

It is characterized in that described vibrating diaphragm is only fixed to close described inlet hole and described radiation hole at its periphery place.

9,, it is characterized in that it also comprises in addition according to the micro-pump of claim 2:

Be assemblied in the first sealed rubber top cover in the described suction port, and

Be assemblied in the second sealed rubber top cover in the described radiation mouth.

10,, it is characterized in that also comprising in addition according to the micro-pump of claim 2:

Directly or the container that links to each other with described suction port by a pipe,

Be assemblied in the first sealed rubber top cover in the described vessel port, and

Be assemblied in the second sealed rubber top cover in the described radiation mouth.

11,, it is characterized in that described vibrating diaphragm comprises according to the micro-pump of claim 2:

Have the electrode metal plate of a cone shape hole at least at its thickness direction, and be fixed on plastic-plate on the described electrode metal plate by filling up described cone shape hole.

12,, it is characterized in that described plastic-plate is processed with an annular protruding portion in order to described piezoelectric element is located according to the micro-pump of claim 11.

13, according to the micro-pump of claim 11, it is characterized in that described electrode metal plate is processed with a welding overhanging element in its part, this overhanging element is not overlapping with described plastic-plate plane.

14,, it is characterized in that the frosting periphery of the another side that described vibrating diaphragm contacts with described electrode metal plate at described plastic-plate is processed with a ultrasound solvent welded overhanging element according to the micro-pump of claim 11.

15,, it is characterized in that also comprising in addition according to the micro-pump of claim 1:

Comprise in order to first elastic baffle of closing described suction port with in order to a feed liquor check valve of first spring component that flexiblely advances described first elastic baffle, and

Comprise in order to second elastic baffle of closing described radiation hole with in order to a feed liquor check valve of second spring component that flexiblely advances described second elastic baffle.

16, according to the micro-pump of claim 1, it is characterized in that:

Described feed liquor check valve comprises: has in order to first member of the curved portion of closing described suction port with in order to flexiblely advancing first spring component of described first member, and

Described discharge opeing check valve comprises: have in order to second member of the curved portion of closing described radiation hole with in order to flexiblely to advance second spring component of described second member.

17,, it is characterized in that also comprising in addition according to the micro-pump of claim 1:

In order to will controlling the intergrated circuit that voltage adds to described piezoelectric element, and

With so that the power supply of described intergrated circuit operation.

18, a kind of micro-radiological unit, it comprises:

According to the displacement of the vibrating diaphragm that is out of shape with piezoelectric element, with a pump assembly of small speed radiation liquid,

In order to operation with control a control circuit unit of described pump assembly, and

Give a power supply unit of described pump assembly and described control circuit unit in order to output power,

It is characterized in that described pump assembly, described control circuit unit and described power supply unit all are contained in the shell.

19, according to the micro-radiological unit of claim 18, it is characterized in that also comprising in addition:

Be arranged on a display device of described micro-radiological unit enclosure.

20, according to the micro-radiological unit of claim 18, it is characterized in that also comprising in addition:

Be arranged on the container of giving described pump assembly in the shell of described micro-radiological unit in order to supply fluid.

21, according to the micro-radiological unit of claim 18, it is characterized in that also comprising in addition:

Be arranged on the outside of described micro-radiological unit shell, a syringe needle that links to each other with the radiation mouth of described pump assembly.

22,, it is characterized in that described power supply unit comprises a battery according to the micro-radiological unit of claim 18.

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