CN105093847A - Exposure machine - Google Patents
Exposure machine Download PDFInfo
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- CN105093847A CN105093847A CN201510470557.6A CN201510470557A CN105093847A CN 105093847 A CN105093847 A CN 105093847A CN 201510470557 A CN201510470557 A CN 201510470557A CN 105093847 A CN105093847 A CN 105093847A
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- light
- optical fiber
- exposure machine
- converter unit
- output terminal
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Abstract
The invention provides an exposure machine which comprises a light source, a lens group, a fly eye, an optical fiber conversion unit, an access switch, a light flux slit and an amplification light path, wherein incident light emitted from the light source sequentially passes through the lens group and the fly eye, reaches the optical fiber conversion unit, and is converted into arbitrarily-shaped emergent light required for exposure through the optical fiber conversion unit. Through the above mode, the incident light of the exposure machine is converted into the arbitrarily-shaped emergent light required for exposure through the optical fiber conversion unit, thus, the illuminance during exposure can be substantially improved, temperature rise caused by light irradiated to a non-effective region of the light flux slit is reduced, moreover, the illuminance can also be adjusted by adjusting the width of the light flux slit, and the application efficiency of the light source of a machine table is improved.
Description
Technical field
The present invention relates to exposure device, particularly relate to a kind of exposure machine that can improve illumination.
Background technology
Exposure machine blocks camber light when exposing for keeping each point light path unanimously to need to make to use up logical slit by script square light, and wherein light leads to slit is arc.In traditional exposure machine, the incident light that light source is launched forms uniform square light after light integrators, after flat mirror reflects, lead to blocking of slit by light form arc light, its light being blocked part can be wasted, thus illumination when affecting exposure machine exposure, and this part light be blocked can be radiated in non-active area that light leads to slit and produce heat, causes burden to the temperature control system of exposure machine.
Summary of the invention
The technical matters that the present invention mainly solves is to provide a kind of energy and improves illumination when exposing and reduce the exposure machine of board temperature control burden.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: provide a kind of exposure machine, comprise a light source, lens combination, one fly's eye, one optical fiber converter unit, one channel selector, one light leads to slit and and amplifies light path, the incident light that light source sends is successively through lens combination, fly's eye arrives light conversion unit, the receiving end of optical fiber converter unit towards fly's eye to receive incident light, the output terminal of optical fiber converter unit is towards channel selector, incident light converts the emergent light of the arbitrary shape that exposure needs to through optical fiber converter unit, emergent light is through channel selector, light leads to slit injection to amplifying light path.
Wherein, the receiving end of optical fiber converter unit is square, and the output terminal of optical fiber converter unit is arc.
Wherein, amplify light path and comprise the first concave mirror, the second concave mirror and catoptron, enter amplify light path emergent light successively after the first concave mirror, catoptron and the second concave mirror from amplification light path outgoing, the curvature of the arc of the output terminal of optical fiber converter unit is consistent with the curvature of the first concave mirror.
Wherein, the arc width of the output terminal of optical fiber change unit is greater than the width that light leads to slit.
Wherein, exposure machine also comprises an illuminance transducer, and illuminance transducer is between the output terminal and channel selector of optical fiber converter unit, and illuminance transducer monitors the light intensity of the output terminal of optical fiber change unit.
Wherein, exposure machine also comprises collimator and the collimating lens of the output terminal being located at optical fiber converter unit, the depth of parallelism of collimating apparatus and collimation lens monitoring emergent light.
Wherein, lens combination comprises a spaced optical filtering, a delay lens and the first condenser successively.
Wherein, a second condenser lens is also provided with between the receiving end of fly's eye and optical fiber converter unit.
Wherein, exposure machine also comprises the optical filter and a catoptron of being located at light source front, and the incident light that light source sends is incident to catoptron through optical filter, catoptron by light reflection to lens combination.
Wherein, incident light is square, and emergent light is arc.
The invention has the beneficial effects as follows: the situation being different from prior art, the incident light of exposure machine provided by the invention converts the emergent light of the arbitrary shape that exposure needs to through optical fiber converter unit, illumination when can increase substantially exposure and reduce the temperature rising that illumination causes to the non-active area that light leads to slit, illumination can also be regulated by regulating the width that light leads to slit in addition, improving the service efficiency of board light source.
Accompanying drawing explanation
Fig. 1 is the inner structure rough schematic view of exposure machine of the present invention;
Fig. 2 is the light path schematic diagram of the amplification light path of exposure machine of the present invention;
Fig. 3 is the stereographic map of the optical fiber converter unit of exposure machine of the present invention;
Fig. 4 is the receiving end of optical fiber converter unit and the fiber distribution figure of output terminal of exposure machine of the present invention.
Embodiment
Below in conjunction with drawings and embodiments, the present invention is described in detail.
Consult Fig. 1, the invention provides a kind of exposure machine 100, described exposure machine 100 comprises a light source 10, optical filter 20, level crossing 30, lens combination 40, fly's eye 50, optical fiber converter unit 60, channel selector 70, light leads to slit 80 and and amplify light path 90.Wherein, lens combination 40 comprises spaced optical filtering 42, delay lens 44 and first condenser 46 successively, and this exposure machine 100 also comprises a second condenser lens 55 between fly's eye 50 and optical fiber converter unit 60.Said lens group 40 and second condenser lens 55 are this area known techniques, do not repeat them here.
This light source 10 comprises the mercury lamp (not shown) and a light-gathering concave-surface mirror 12 that a power is 8kw.After the optical filter 20 of the incident light that light source 10 sends through being positioned at light source 10 front filters, extreme ultraviolet light is incident to level crossing 30, reflected incident light is injected fly's eye 50 to lens combination 40 by level crossing 30.Shown in Fig. 4, incident light forms through fly's eye 50 receiving end 62 penetrated after uniform square light to optical fiber change unit 60, and incident light exports the emergent light of arc through the output terminal 64 of this optical fiber converter unit 60.Emergent light leads to slit 80 penetrate to amplifying light path output after 90s through channel selector 70, light successively.
Please refer to Fig. 2, this amplification light path 90 comprises the first concave mirror 92, second concave mirror 94 and two catoptrons 96, and this first concave mirror 92 is identical with the second concave mirror 94 curvature, and the radius of the first concave mirror 92 is less than the radius of this second concave mirror 94.The curvature of the arc of the output terminal 64 of this optical fiber converter unit 60 is consistent with the curvature of the first concave mirror 92.The width of the emergent light leading to slit 80 through light is put and is twice by this amplification light path 90, forms backlight.Such as, in the present embodiment, the width that light leads to slit 80 is 7mm, and the emergent light width after 90s through this amplification light path is 14mm.
Please refer to Fig. 3 and Fig. 4, the receiving end 62 of optical fiber change unit 60 is square, for receiving the optical fiber arrangement mode of incident light as illustrated by 602 in receiving end 62.Should be understood that the receiving end 62 of optical fiber change unit 60 is not limited to square, it can design according to the size of light and scope, to ensure that all light can enter the fiber entrance of receiving end 62.The output terminal 64 of optical fiber converter unit 60 is arc, and the optical fiber arrangement mode of this output terminal 64 as indicated at 604.The arc width of the output terminal 64 of this optical fiber change unit 60 is greater than the width that light leads to slit 80.The output terminal 64 of this optical fiber converter unit is provided with collimator 66 and collimating lens 68 to ensure that emergent light is for directional light.In other embodiments, the output terminal 64 of optical fiber change unit 60 can also be other shapes, as circle etc.
An illuminance transducer 65 is also provided with, the light intensity of the emergent light that this illuminance transducer 65 exports for the output terminal 64 of monitoring optical fiber change unit 60 between the output terminal 64 of this optical fiber converter unit 60 and channel selector 70.
Compared with prior art, the incident light of exposure machine provided by the invention converts the emergent light of the arbitrary shape that exposure needs to through optical fiber converter unit, illumination when can increase substantially exposure and reduce the temperature rising that illumination causes to the non-active area that light leads to slit, illumination can also be regulated by regulating the width that light leads to slit in addition, improving the service efficiency of board light source.
The foregoing is only embodiments of the present invention; not thereby the scope of the claims of the present invention is limited; every utilize instructions of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (10)
1. an exposure machine, comprise a light source, lens combination, one fly's eye, one optical fiber converter unit, one channel selector, one light leads to slit and and amplifies light path, the incident light that described light source sends is successively through described lens combination, described fly's eye arrives described light conversion unit, the receiving end of described optical fiber converter unit towards described fly's eye to receive described incident light, the output terminal of described optical fiber converter unit is towards described channel selector, described incident light converts the emergent light of the arbitrary shape that exposure needs to through optical fiber converter unit, channel selector is opened, described emergent light leads to slit injection to described amplification light path through described light.
2. exposure machine according to claim 1, is characterized in that: the receiving end of described optical fiber converter unit is square, and the output terminal of described optical fiber converter unit is arc.
3. exposure machine according to claim 2, it is characterized in that: described amplification light path comprises the first concave mirror, the second concave mirror and catoptron, the described emergent light entering described amplification light path successively after described first concave mirror, described catoptron and described second concave mirror from the outgoing of described amplification light path, the curvature of the arc of the output terminal of described optical fiber converter unit is consistent with the curvature of described first concave mirror.
4. exposure machine according to claim 2, is characterized in that: the arc width of the output terminal of described optical fiber change unit is greater than the width that described light leads to slit.
5. exposure machine according to claim 1, it is characterized in that: described exposure machine also comprises an illuminance transducer, described illuminance transducer is between the output terminal and described channel selector of described optical fiber converter unit, and described illuminance transducer monitors the light intensity of the output terminal of described optical fiber change unit.
6. exposure machine according to claim 1, is characterized in that: described exposure machine also comprises collimator and the collimating lens of the output terminal being located at described optical fiber converter unit, and the depth of parallelism of described emergent light monitored by described collimating apparatus and collimation lens.
7. exposure machine according to claim 1, is characterized in that: described lens combination comprises a spaced optical filtering, a delay lens and the first condenser successively.
8. exposure machine according to claim 6, is characterized in that: be also provided with a second condenser lens between the receiving end of described fly's eye and described optical fiber converter unit.
9. exposure machine according to claim 1, it is characterized in that: described exposure machine also comprises the optical filter and a catoptron of being located at light source front, the incident light that described light source sends is incident to described catoptron through optical filter, and described catoptron is by described light reflection extremely described lens combination.
10. exposure machine according to claim 1, is characterized in that: described incident light is square, and described emergent light is arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510470557.6A CN105093847B (en) | 2015-08-04 | 2015-08-04 | Exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510470557.6A CN105093847B (en) | 2015-08-04 | 2015-08-04 | Exposure machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105093847A true CN105093847A (en) | 2015-11-25 |
| CN105093847B CN105093847B (en) | 2017-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510470557.6A Active CN105093847B (en) | 2015-08-04 | 2015-08-04 | Exposure machine |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107783383A (en) * | 2016-08-24 | 2018-03-09 | 佳能株式会社 | Exposure device, exposure method and article manufacturing method |
| CN107807494A (en) * | 2016-09-09 | 2018-03-16 | 佳能株式会社 | Lamp optical system, exposure device and article manufacturing method |
| CN108051984A (en) * | 2017-12-11 | 2018-05-18 | 京东方科技集团股份有限公司 | The adjustable exposure device of slit |
Citations (6)
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| JP2002270483A (en) * | 2001-03-07 | 2002-09-20 | Nikon Corp | Exposure method and aligner |
| US20030234854A1 (en) * | 2002-06-19 | 2003-12-25 | Nikon Corporation | Laser beam source control method and unit, exposure method and apparatus, and device manufacturing method |
| CN1774675A (en) * | 2003-04-17 | 2006-05-17 | 卡尔·蔡司Smt股份公司 | Optical element for a lighting system |
| CN101446777A (en) * | 2008-12-30 | 2009-06-03 | 中国科学院光电技术研究所 | Super-resolution i-ray lithography device |
| CN103293874A (en) * | 2012-02-29 | 2013-09-11 | 株式会社日立高科技 | Exposure device, exposure method and manufacturing method for display panel substrate |
| CN104423174A (en) * | 2013-08-27 | 2015-03-18 | 上海微电子装备有限公司 | Illumination system |
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2015
- 2015-08-04 CN CN201510470557.6A patent/CN105093847B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002270483A (en) * | 2001-03-07 | 2002-09-20 | Nikon Corp | Exposure method and aligner |
| US20030234854A1 (en) * | 2002-06-19 | 2003-12-25 | Nikon Corporation | Laser beam source control method and unit, exposure method and apparatus, and device manufacturing method |
| CN1774675A (en) * | 2003-04-17 | 2006-05-17 | 卡尔·蔡司Smt股份公司 | Optical element for a lighting system |
| CN101446777A (en) * | 2008-12-30 | 2009-06-03 | 中国科学院光电技术研究所 | Super-resolution i-ray lithography device |
| CN103293874A (en) * | 2012-02-29 | 2013-09-11 | 株式会社日立高科技 | Exposure device, exposure method and manufacturing method for display panel substrate |
| CN104423174A (en) * | 2013-08-27 | 2015-03-18 | 上海微电子装备有限公司 | Illumination system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107783383A (en) * | 2016-08-24 | 2018-03-09 | 佳能株式会社 | Exposure device, exposure method and article manufacturing method |
| CN107783383B (en) * | 2016-08-24 | 2020-06-09 | 佳能株式会社 | Exposure apparatus, exposure method, and article manufacturing method |
| CN107807494A (en) * | 2016-09-09 | 2018-03-16 | 佳能株式会社 | Lamp optical system, exposure device and article manufacturing method |
| CN108051984A (en) * | 2017-12-11 | 2018-05-18 | 京东方科技集团股份有限公司 | The adjustable exposure device of slit |
| CN108051984B (en) * | 2017-12-11 | 2020-05-01 | 京东方科技集团股份有限公司 | Slit-adjustable exposure device |
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| Publication number | Publication date |
|---|---|
| CN105093847B (en) | 2017-05-10 |
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