CN105093512A - Height-difference-adjustable microscope combined object table - Google Patents
Height-difference-adjustable microscope combined object table Download PDFInfo
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- CN105093512A CN105093512A CN201510602051.6A CN201510602051A CN105093512A CN 105093512 A CN105093512 A CN 105093512A CN 201510602051 A CN201510602051 A CN 201510602051A CN 105093512 A CN105093512 A CN 105093512A
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Abstract
The invention discloses a height-difference-adjustable microscope combined object table comprising a sleeve which is internally provided with a fixed sample table and a moving sample table. The sleeve and the fixed sample table are connected via a screw. The sleeve and the moving sampling table are connected via threads. Internal threads are formed are on the internal wall of the sleeve, a counter hole is formed at the bottom part, an internal boss is formed on the internal bottom surface, and a groove is formed in the middle part of the internal boss. The fixed sampling table is formed by a semi-cylindrical upper part and a cylindrical lower part. The lower part is downward to form a boss, an installing screw hole is formed in the middle of the boss, and multiple sample grooves are formed on the upper part. The moving sample table is cylindrical, external threads are formed at the external circumferential surface, flanges are formed at the upper end and a special-shaped hole is formed in the middle. The height-difference-adjustable microscope combined object table is simple in structure and convenient to operate, and multiple samples which are relatively high in height difference can be detected simultaneously so that problems that the samples are repeatedly reloaded and the lens of a microscope is bumped due to height difference of the samples can be avoided, the number of the samples of single time of detection can be effectively increased and detection efficiency can be enhanced.
Description
Technical field
The invention belongs to a kind of microscope stage, be specifically related to a kind of microscope combination objective table of adjustment height difference.
Background technology
Optical microscope, scanning electron microscope are the experimental facilitiess that failure analysis and detection field are conventional.Limitting by image-forming principle, microscope is difficult to more than one piece sample differing heights simultaneously being detected.Especially when sample observation face height difference is very large, when high power observes below sample, microscope camera lens easily and top sample collide with and even damage.For avoiding the generation of this situation, must to sample according to highly classifying, it is one group that the sample of close height is compiled, and the sample sets that height difference is larger can only batching tracking.The microscopical sample chamber of conventional scanning electron needs to run under vacuum, and the process needing repetition vacuum breaker when changing sample sets, vacuumize, because this process time is relatively long, greatly reduces detection efficiency.The more than one piece sample how simultaneously to detect sightingpiston height difference larger is this technical field problem demanding prompt solution.
Summary of the invention
The present invention proposes to overcome the shortcoming existed in prior art, its objective is the microscope combination objective table providing a kind of adjustment height difference.
Technical scheme of the present invention is:
A microscope combination objective table for adjustment height difference, comprise sleeve, install fixed sample platform and mobile example platform in sleeve, sleeve and fixed sample platform are connected by screw, and sleeve and mobile example platform are threaded connection;
Described sleeve lining forms internal thread, and counterbore is formed on bottom, and inner bottom surface raises up formation inner convex platform, forms groove in the middle part of inner convex platform;
Described fixed sample platform is formed by semicircle column type top and column type bottom, and bottom forms boss downwards, and form installation screw in the middle of boss, multiple fixed station sample cell is formed at top;
Described mobile example platform is column type, and outer circumference surface forms external thread, and upper end forms flange, middle formation profile hole, profile hole longitudinal section is backward L-shaped, and epimere is semicircle orifice, hypomere is circular hole, and the position that mobile example platform does not form profile hole forms multiple transfer table sample cell;
Described sleeve, fixed sample platform, mobile example platform and screw are coaxial.
The aperture of described semicircle orifice and hole depth match with the upper dimension of fixed sample platform, and the aperture of circular hole and hole depth match with the lower dimension of fixed sample platform.
The lower outer diameter of described fixed sample platform is identical with inner convex platform external diameter.
The shape of cross section of described fixed station sample cell and transfer table sample cell be circular or oval or polygonal any one.
The shape of described boss is any one of circular platform type or frustum type or dome-type or ball crown type.
The invention has the beneficial effects as follows:
Structure of the present invention is simple, easy to operate, the more than one piece sample that difference in height is larger can be detected simultaneously, avoid the sample that repeatedly changes the outfit because height of specimen difference band comes, collide with microscope mirror first order issue, effectively increase the sample size that single detects, improve detection efficiency.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention;
Fig. 2 is vertical view of the present invention;
Fig. 3 be in Fig. 2 along A-A to sectional view;
Fig. 4 is the sectional view of middle sleeve of the present invention;
Fig. 5 is the vertical view of middle sleeve of the present invention;
Fig. 6 is the vertical view of fixed sample platform in the present invention;
Fig. 7 be in Fig. 6 along B-B to sectional view;
Fig. 8 is the vertical view of mobile example platform in the present invention;
Fig. 9 be in Fig. 8 along C-C to sectional view.
Wherein:
1 sleeve 2 fixed sample platform
3 mobile example platform 4 screws
11 groove 12 counterbores
13 inner convex platform 21 boss
22 installation screw 23 tops
24 bottom 25 fixed station sample cells
31 flange 32 profile holes
33 transfer table sample cell 321 semicircle orifices
322 circular holes.
Embodiment
Below in conjunction with Figure of description and embodiment, the microscope combination objective table to adjustment height difference of the present invention is described in detail:
As shown in Fig. 1 ~ 3, a kind of microscope combination objective table of adjustment height difference, comprise sleeve 1, in sleeve 1, install fixed sample platform 2 and mobile example platform 3, sleeve 1 is connected by screw 4 with fixed sample platform 2, and sleeve 1 and mobile example platform 3 are threaded connection; Described sleeve 1, fixed sample platform 2, mobile example platform 3 and screw 4 are coaxial.
As shown in Figure 4,5, described sleeve 1 inwall forms internal thread, and counterbore 12 is formed on bottom, and inner bottom surface raises up and forms inner convex platform 13, and form groove 11 in the middle part of inner convex platform 13, counterbore 12 is communicated with groove 11.
As shown in Figure 6,7, described fixed sample platform 2 is formed by semicircle column type top 23 and column type bottom 24, and bottom 24 forms boss 21 downwards, forms installation screw 22 in the middle of boss 21, multiple fixed station sample cell 25 is formed at top, and the present embodiment is 6 Cylindrical Samples grooves;
As shown in Figure 8,9, described mobile example platform 3 is in column type, outer circumference surface forms external thread, upper end forms annular flange flange 31, middle formation profile hole 32, and profile hole 32 longitudinal section is backward L-shaped, epimere is semicircle orifice 321, hypomere is circular hole 322, and the position that mobile example platform 3 does not form profile hole 32 forms multiple transfer table sample cell 33, and the present embodiment is 7 Cylindrical Samples grooves;
Boss 21 is placed in groove 11, and fixed sample platform 2 and sleeve 1 are fixed through counterbore 12 and installation screw 22 by screw 4, and mobile example platform 3 external thread and sleeve 1 screw-internal thread fit, fixed sample platform 2 stretches in profile hole 32.
The aperture of described semicircle orifice 321 and top 23 matching size of hole depth and fixed sample platform 2 close, and bottom 24 matching size of the aperture of circular hole 322 and hole depth and fixed sample platform 2 closes.
Bottom 24 external diameter of described fixed sample platform 2 is identical with inner convex platform 13 external diameter.
Described staple 4 is be threaded, rivet or glued joint with the connected mode between level altitude sample stage 2.
The shape of cross section of described fixed station sample cell 25 and transfer table sample cell 33 be circular or oval or polygonal any one.
The shape of described boss 21 is any one of circular platform type or frustum type or dome-type or ball crown type.
Using method of the present invention:
During use, highly higher sample sets can be put into the fixed station sample cell 25 on fixed sample platform 2 surface, lower sample sets is placed in the transfer table sample cell 33 of mobile example platform 3, rotate the collar flange 31 of mobile example platform 3 upper end, according to the difference in height of two groups of samples, regulate the screw-in depth of screw thread, the sightingpiston of two groups of samples is remained near same viewing plane.
Claims (6)
1. the microscope combination objective table of an adjustment height difference, it is characterized in that: comprise sleeve (1), in sleeve (1), fixed sample platform (2) and mobile example platform (3) are installed, sleeve (1) is connected by screw (4) with fixed sample platform (2), and sleeve (1) and mobile example platform (3) are threaded connection;
Described sleeve (1) inwall forms internal thread, and counterbore (12) is formed on bottom, and inner bottom surface raises up and forms inner convex platform (13), and inner convex platform (13) middle part forms groove (11);
Described fixed sample platform (2) is formed by semicircle column type top (23) and column type bottom (24), and bottom (24) form boss (21) downwards, and form installation screw (22) in the middle of boss (21), multiple fixed station sample cell (25) is formed at top;
Described mobile example platform (3) is in column type, outer circumference surface forms external thread, upper end forms flange (31), middle formation profile hole (32), profile hole (32) longitudinal section is backward L-shaped, epimere is semicircle orifice (321), and hypomere is circular hole (322), and the position that mobile example platform (3) does not form profile hole (32) forms multiple transfer table sample cell (33).
2. the microscope combination objective table of a kind of adjustment height difference according to claim 1, is characterized in that: described sleeve (1), fixed sample platform (2), mobile example platform (3) and screw (4) are coaxial.
3. the microscope combination objective table of a kind of adjustment height difference according to claim 1, it is characterized in that: top (23) matching size of the aperture of described semicircle orifice (321) and hole depth and fixed sample platform (2) closes, bottom (24) matching size of the aperture of circular hole (322) and hole depth and fixed sample platform (2) closes.
4. the microscope combination objective table of a kind of adjustment height difference according to claim 1, is characterized in that: bottom (24) external diameter of described fixed sample platform (2) is identical with inner convex platform (13) external diameter.
5. the microscope combination objective table of a kind of adjustment height difference according to claim 1, is characterized in that: the shape of cross section of described fixed station sample cell (25) and transfer table sample cell (33) be circular or ellipse or polygonal any one.
6. the microscope combination objective table of a kind of adjustment height difference according to claim 1, is characterized in that: the shape of described boss (21) is any one of circular platform type or frustum type or dome-type or ball crown type.
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CN201510602051.6A CN105093512B (en) | 2015-09-21 | 2015-09-21 | The microscope combination objective table of adjustment height difference |
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CN201510602051.6A CN105093512B (en) | 2015-09-21 | 2015-09-21 | The microscope combination objective table of adjustment height difference |
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CN105093512B CN105093512B (en) | 2017-06-23 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109696403A (en) * | 2017-10-23 | 2019-04-30 | 中国科学院重庆绿色智能技术研究院 | A kind of sample room for immersion micro-imaging |
CN111381074A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院上海微系统与信息技术研究所 | Needle tip transmission support of scanning tunnel microscope |
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US20100033561A1 (en) * | 2007-04-25 | 2010-02-11 | Hersee Stephen D | Solid-state microscope |
US20110090328A1 (en) * | 2009-10-20 | 2011-04-21 | Hung-Chang Chen | Portable microscope |
CN202267778U (en) * | 2011-10-21 | 2012-06-06 | 深圳市爱科学数码科技有限公司 | Compact-structured hand wheel mechanism of microscope object stage |
CN202930353U (en) * | 2012-11-27 | 2013-05-08 | 郑州大学 | SEM sample bench allowing same-plane testing of samples with different thickness |
CN203171388U (en) * | 2013-03-27 | 2013-09-04 | 鞍钢股份有限公司 | Device for preparing transmission electron microscope film sample |
CN204989616U (en) * | 2015-09-21 | 2016-01-20 | 核工业理化工程研究院 | Microscope combination objective table of adjustable difference in height |
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2015
- 2015-09-21 CN CN201510602051.6A patent/CN105093512B/en active Active
Patent Citations (7)
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US20100033561A1 (en) * | 2007-04-25 | 2010-02-11 | Hersee Stephen D | Solid-state microscope |
US20150124076A1 (en) * | 2007-04-25 | 2015-05-07 | Stephen D. Hersee | Solid-state microscope for selectively imaging a sample |
US20110090328A1 (en) * | 2009-10-20 | 2011-04-21 | Hung-Chang Chen | Portable microscope |
CN202267778U (en) * | 2011-10-21 | 2012-06-06 | 深圳市爱科学数码科技有限公司 | Compact-structured hand wheel mechanism of microscope object stage |
CN202930353U (en) * | 2012-11-27 | 2013-05-08 | 郑州大学 | SEM sample bench allowing same-plane testing of samples with different thickness |
CN203171388U (en) * | 2013-03-27 | 2013-09-04 | 鞍钢股份有限公司 | Device for preparing transmission electron microscope film sample |
CN204989616U (en) * | 2015-09-21 | 2016-01-20 | 核工业理化工程研究院 | Microscope combination objective table of adjustable difference in height |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109696403A (en) * | 2017-10-23 | 2019-04-30 | 中国科学院重庆绿色智能技术研究院 | A kind of sample room for immersion micro-imaging |
CN109696403B (en) * | 2017-10-23 | 2021-08-13 | 中国科学院重庆绿色智能技术研究院 | Sample chamber for immersed microscopic imaging |
CN111381074A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院上海微系统与信息技术研究所 | Needle tip transmission support of scanning tunnel microscope |
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Effective date of registration: 20200408 Address after: 100032 Building 9, Huayuan street, Xicheng District, Beijing Patentee after: China Atomic Energy Industry Co., Ltd Address before: 300180, No. 168 Jintang Road, Hedong District, Tianjin Patentee before: RESEARCH INSTITUTE OF PHYSICAL AND CHEMICAL ENGINEERING OF NUCLEAR INDUSTRY |