CN105092036A - 在旋转器件型光谱椭偏仪中的同步触发定标方法及装置 - Google Patents
在旋转器件型光谱椭偏仪中的同步触发定标方法及装置 Download PDFInfo
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109030861A (zh) * | 2018-08-25 | 2018-12-18 | 西北工业大学 | 一种用于流体力学试验中粒子图像测速仪测量旋转部件的同步装置及方法 |
CN111220543A (zh) * | 2019-12-26 | 2020-06-02 | 武汉颐光科技有限公司 | 一种单旋转补偿器光谱型椭偏仪系统控制方法 |
CN116625506A (zh) * | 2023-05-05 | 2023-08-22 | 晶诺微(上海)科技有限公司 | 一种椭偏光路中光谱采集方法、系统和电子设备 |
Citations (5)
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US5416588A (en) * | 1992-12-21 | 1995-05-16 | The Board Of Regents Of The University Of Nebraska | Small modulation ellipsometry |
KR100870132B1 (ko) * | 2007-05-21 | 2008-11-25 | 한국과학기술원 | 음향광학 변조 필터를 이용한 분광타원해석기 및 이를이용한 타원 해석방법 |
CN102183466A (zh) * | 2011-02-22 | 2011-09-14 | 复旦大学 | 一种时间分辨椭圆偏振光谱测量系统 |
CN102589697A (zh) * | 2012-03-09 | 2012-07-18 | 杭州远方光电信息股份有限公司 | 一种空间光谱辐射测量方法 |
CN103217988A (zh) * | 2013-03-20 | 2013-07-24 | 华中科技大学 | 一种广义椭偏仪的同步控制系统 |
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2014
- 2014-05-04 CN CN201410182879.6A patent/CN105092036B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5416588A (en) * | 1992-12-21 | 1995-05-16 | The Board Of Regents Of The University Of Nebraska | Small modulation ellipsometry |
KR100870132B1 (ko) * | 2007-05-21 | 2008-11-25 | 한국과학기술원 | 음향광학 변조 필터를 이용한 분광타원해석기 및 이를이용한 타원 해석방법 |
CN102183466A (zh) * | 2011-02-22 | 2011-09-14 | 复旦大学 | 一种时间分辨椭圆偏振光谱测量系统 |
CN102589697A (zh) * | 2012-03-09 | 2012-07-18 | 杭州远方光电信息股份有限公司 | 一种空间光谱辐射测量方法 |
CN103217988A (zh) * | 2013-03-20 | 2013-07-24 | 华中科技大学 | 一种广义椭偏仪的同步控制系统 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109030861A (zh) * | 2018-08-25 | 2018-12-18 | 西北工业大学 | 一种用于流体力学试验中粒子图像测速仪测量旋转部件的同步装置及方法 |
CN109030861B (zh) * | 2018-08-25 | 2024-01-16 | 西北工业大学 | 一种用于流体力学试验中粒子图像测速仪测量旋转部件的同步装置及方法 |
CN111220543A (zh) * | 2019-12-26 | 2020-06-02 | 武汉颐光科技有限公司 | 一种单旋转补偿器光谱型椭偏仪系统控制方法 |
CN111220543B (zh) * | 2019-12-26 | 2022-08-26 | 武汉颐光科技有限公司 | 一种单旋转补偿器光谱型椭偏仪系统控制方法 |
CN116625506A (zh) * | 2023-05-05 | 2023-08-22 | 晶诺微(上海)科技有限公司 | 一种椭偏光路中光谱采集方法、系统和电子设备 |
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