CN105071692A - Multi-working mode composite-type cantilever multi-leg piezoelectric actuator - Google Patents
Multi-working mode composite-type cantilever multi-leg piezoelectric actuator Download PDFInfo
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Abstract
The invention discloses a multi-working mode composite-type cantilever multi-leg piezoelectric actuator, which belongs to the technical field of piezoelectric actuation, and aims at solving the problems of instable output of the existing piezoelectric actuator, complicated pre-pressing system structure, large vibration amplitude in an elastic supporting link, complicated pre-pressure applying, narrow working frequency range, and inflexible mechanical output feature adjustment. The multi-working mode composite-type cantilever multi-leg piezoelectric actuator comprises a base and a flexible transducer, wherein the flexible transducer comprises two piezoelectric ceramic groups, a stud, a front end cover and actuating legs, the each piezoelectric ceramic group comprises an even number of piezoelectric ceramic plates, an electrode plate is arranged between adjacent two piezoelectric ceramic plates, the adjacent two piezoelectric ceramic plates have opposite polarization directions, the piezoelectric ceramic plates are polarized along the axis direction of the flexible transducer,, the first piezoelectric ceramic plate is uniformly divided into a left region, a first middle region and a right region, the second piezoelectric ceramic plate is uniformly divided into an upper region, a second middle region and a lower region, the left region and the right region have opposite polarization directions, the upper region and the lower region have opposite polarization directions, and the first middle region and the second middle region are not polarized. The multi-working mode composite-type cantilever multi-leg piezoelectric actuator of the invention is used for piezoelectric actuating.
Description
Technical field
The present invention relates to a kind of multi-operation mode compound cantilever polypody piezoelectric actuator, belong to piezoelectric driving technology field.
Background technology
Piezoelectric Driving is that a kind of inverse piezoelectric effect of piezoelectricity functional material that utilizes realizes activating the novel type of drive exported, compared with traditional electrical Magnetic driving, having various structures, positioning precision is high, resolving power is high, cut off self-lock, without electromagnetic interference, fast response time, low-speed high-thrust/moment, be easy to realize the advantage such as straight line and multiple degrees of freedom driving, is commonly use a kind of precision actuation mode at present.
The Piezoelectric Driving of current maturation generally realizes driving gear by the combination of two or more stator intrinsic vibrations or drives the excitation of foot place elliptic vibrations, and then realizes mover actuating by the friction coupling between stator and mover.Had the sufficient formula piezoelectric actuator of a lot of new construction to be suggested at present, but they generally adopt monopodia or biped to realize driving, and owing to driving sufficient limited amount, exist and export unstable, pre-pressing system complex structure and other problems; In addition, the stator vibration that current piezoelectric actuator adopts belongs to the category of free vibration mostly, most isolation adopting thin-walled ring or thin walled beam to realize resiliency supported and vibration, there is high-amplitude vibration in practical work process Elastic link, and the existence of elastic link is also unfavorable for applying large precompression; In addition, piezoelectric actuator is generally operational in some resonance modes, namely only has a frequency optimum traffic, and its operating frequency is generally near resonance frequency, and this makes its operating frequency range narrower, is unfavorable for the flexible adjustment of mechanical output characteristic.
Summary of the invention
The present invention seeks to solve existing piezoelectric actuator existence output instability, pre-pressing system complex structure, resiliency supported link Oscillation Amplitude is large, precompression applies complexity, narrow, the mechanical output characteristic of operating frequency range adjusts inflexible problem, provides a kind of multi-operation mode compound cantilever polypody piezoelectric actuator.
Multi-operation mode of the present invention compound cantilever polypody piezoelectric actuator, comprises pedestal and n flexible transducer, wherein, n be more than or equal to 4 even number, n flexible transducer is symmetrically distributed in the both sides of pedestal; Each flexible transducer comprises the first piezoelectric ceramic group, the second piezoelectric ceramic group, stud, front end housing, driving foot and electrode slice; Front end housing is the tapered block in cross section, drives foot to be arranged on the narrow end of front end housing; First piezoelectric ceramic group and the second piezoelectric ceramic group are fastened between pedestal and the wide end of front end housing by stud successively; N flexible transducer is fixed on the both sides of pedestal by n stud symmetry; First piezoelectric ceramic group comprises m the first piezoelectric ceramic piece, m be more than or equal to 2 even number, be provided with electrode slice between two adjacent the first piezoelectric ceramic pieces; The polarised direction of adjacent two the first piezoelectric ceramic pieces is contrary; M the first piezoelectric ceramic piece polarizes along flexible transducer axis direction; Each first piezoelectric ceramic piece be divided into left district, the first Zhong Qu and You Qu, Zuo Qu and right district polarised direction contrary, in first, district does not polarize; Second piezoelectric ceramic group comprises k the second piezoelectric ceramic piece, k be more than or equal to 2 even number, be provided with electrode slice between two adjacent the second piezoelectric ceramic pieces; The polarised direction of adjacent two the second piezoelectric ceramic pieces is contrary; K the second piezoelectric ceramic piece polarizes along flexible transducer axis direction; Each second piezoelectric ceramic piece is divided into district and inferior segment in district, second, and the polarised direction of upper district and inferior segment is contrary, and in second, district does not polarize.
Advantage of the present invention: multi-operation mode of the present invention compound cantilever polypody piezoelectric actuator structure is simple, be easy to realize integrated and seriation; Adopt the polypody type of drive of imitative polypody biology can realize stable output, and pre-pressing system is simpler; In the course of work, mount pad is fixedly connected with external structure, and transducer is operated in cantilever bending vibrational state, overcomes that the amplitude that thin-wall member resiliency supported brings is large, precompression improves the problems such as limited; In addition, flexible transducer can work based on single order bending vibration modes, also can be operated in other high-order bending vibration modes, and this makes this driver have multiple operating frequency, high degree improve its operating frequency range, also make it can obtain more abundant mechanical output characteristic.Multi-operation mode of the present invention compound cantilever polypody piezoelectric actuator has the outstanding advantages such as structure is simple, flexible design, stable output, operating frequency range are wide.
Accompanying drawing explanation
Fig. 1 is the structural representation of the multi-operation mode compound cantilever polypody piezoelectric actuator as n=4, m=4, k=4;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the polarised direction schematic diagram of the first piezoelectric ceramic group in Fig. 1;
Fig. 4 is the polarised direction schematic diagram of the second piezoelectric ceramic group in Fig. 1;
Fig. 5 is the bending vibation mode picture of the single order horizontal flexural vibration having two symmetric curvature transducers;
Fig. 6 is the bending vibation mode picture having the vertical flexural vibrations of the single order of two symmetric curvature transducers;
Fig. 7 is the bending vibation mode picture of the second order horizontal flexural vibration having two symmetric curvature transducers;
Fig. 8 is the bending vibation mode picture having the vertical flexural vibrations of the second order of two symmetric curvature transducers.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1-Fig. 8, the compound cantilever polypody of multi-operation mode described in present embodiment piezoelectric actuator, comprise pedestal 1 and n flexible transducer 2, wherein, n be more than or equal to 4 even number, n flexible transducer 2 is symmetrically distributed in the both sides of pedestal 1;
Each flexible transducer 2 comprises the first piezoelectric ceramic group 2-1, the second piezoelectric ceramic group 2-2, stud 2-3, front end housing 2-4, drives sufficient 2-5 and electrode slice 2-6; Front end housing 2-4 is the tapered block in cross section, drives sufficient 2-5 to be arranged on the narrow end of front end housing 2-4; First piezoelectric ceramic group 2-1 and the second piezoelectric ceramic group 2-2 is fastened between pedestal 1 and the wide end of front end housing 2-4 by stud successively; N flexible transducer 2 is fixed on the both sides of pedestal 1 by n stud 2-3 symmetry;
First piezoelectric ceramic group 2-1 comprise m the first piezoelectric ceramic piece 2-1-1, m be more than or equal to 2 even number, be provided with electrode slice 2-6 between two adjacent the first piezoelectric ceramic piece 2-1-1; The polarised direction of adjacent two the first piezoelectric ceramic piece 2-1-1 is contrary; M the first piezoelectric ceramic piece 2-1-1 polarizes along flexible transducer 2 axis direction; Each first piezoelectric ceramic piece 2-1-1 is divided into district 2-1-1-2 and right district 2-1-1-3 in left district 2-1-1-1, first, and the polarised direction of left district 2-1-1-1 and right district 2-1-1-3 is contrary, and in first, district 2-1-1-2 does not polarize;
Second piezoelectric ceramic group 2-2 comprise k the second piezoelectric ceramic piece 2-2-1, k be more than or equal to 2 even number, be provided with electrode slice 2-6 between two adjacent the second piezoelectric ceramic piece 2-2-1; The polarised direction of adjacent two the second piezoelectric ceramic piece 2-2-1 is contrary; K two piezoelectric ceramic piece 2-2-1 polarize along flexible transducer 2 axis direction; Each second piezoelectric ceramic piece 2-2-1 is divided into district 2-2-1-2 and inferior segment 2-2-1-3 in district 2-2-1-1, second, and the polarised direction of upper district 2-2-1-1 and inferior segment 2-2-1-3 is contrary, and in second, district 2-2-1-2 does not polarize.
Operation principle of the present invention is: multi-operation mode of the present invention compound cantilever polypody piezoelectric actuator is when applying, need 2n phase pumping signal altogether, pedestal 1, front end housing 2-4, all be connected with the common port (being pumping signal common port) of driving power from side number all even electrode sheets 2-6 from side number all even electrodes sheet 2-6 and the second piezoelectric ceramic group 2-2 in first piezoelectric ceramic group 2-1, be connected from side number all odd electrode sheets 2-6 with a phase drive singal in first piezoelectric ceramic group 2-1, from side number all odd electrode sheets 2-6 in second piezoelectric ceramic group 2-2, be connected with another phase drive singal.
Piezoelectric actuator of the present invention can carry out work based on following two kinds of patterns:
The first pattern: DC switch excitation micro-move device pattern, in this mode, by applying forward or negative sense direct energizing voltages to the first piezoelectric ceramic group 2-1, can cause and drive sufficient 2-5 horizontal direction to bend, thus obtaining the horizontal direction displacement driving sufficient about 2-5; By applying forward or negative sense direct energizing voltages to the second piezoelectric ceramic group 2-2, can cause and drive sufficient 2-5 vertical direction to bend, thus obtaining the vertical direction displacement driving sufficient 2-5 upper and lower; Drive the promotion of displacement realization to mover of sufficient 2-5 horizontal direction, the displacement of vertical direction is then for controlling the contact condition driving foot and mover; The sufficient 2-5 of each driving, to the state of mover be all one periodic process of " press-push away-from-move back ", by controlling the phase difference on each transducer between Piezoelectric Ceramics Excitation signal, can realize polypody and alternately to wriggle driving; By adjustment driving voltage amplitude, can realize the accurate adjustment of single wriggling step pitch, the switching frequency applying pumping signal by adjusting each piezoelectric element can realize the adjustment of output speed;
The second pattern: high-frequency ac excitation resonance mode, in this mode, 2n phase pumping signal is the high frequency alternating signal of same frequency, its frequency can be characteristic frequency (such as single order bending vibration modes characteristic frequency, second order bending vibration modes characteristic frequency, the three rank bending vibration modes characteristic frequencies of any one intrinsic bending vibration modes of transducer ...), thus ensure that all transducers are all operated in resonance state frequently; For single transducer, the two-phase pumping signal that it applies has 90 degree of phase differences in time, thus ensure that its vertical bending vibration and horizontal bending vibration also have 90 degree of phase differences in time, and by the compound of two bending vibrations, the elliptic vibrations driving sufficient 2-5 place to define high frequency; Drive the promotion that the vibration of sufficient 2-5 horizontal direction can realize mover, the vibration of vertical direction then drives precompression between sufficient 2-5 for overcoming mover; The motion state of the sufficient 2-5 of each driving is with elliptic vibrations frequently, by controlling the phase difference on each flexible transducer 2 between Piezoelectric Ceramics Excitation signal, can realize the synchronous or alternate actuation of polypody; This mode of operation, by flexible transducer 2 resonance state, can obtain very high amplitude and vibration velocity at the sufficient 2-5 place of driving, thus can realize fast driving.
Embodiment two: present embodiment is described further execution mode one, the position of the first piezoelectric ceramic group 2-1 and the second piezoelectric ceramic group 2-2 can exchange.
In present embodiment, the location swap of the first piezoelectric ceramic group 2-1 and the second piezoelectric ceramic group 2-2 just have adjusted the setting position of the horizontal bending vibration of flexible transducer 2 and vertical bending vibration exciting element, can not affect it and normally work.
Embodiment three: present embodiment is described further execution mode one, the first piezoelectric ceramic piece 2-1-1 first in the width of district 2-1-1-2 be more than or equal to the thickness of the first piezoelectric ceramic piece 2-1-1.
Embodiment four: present embodiment is described further execution mode one, the second piezoelectric ceramic piece 2-2-1 second in the width of district 2-2-1-2 be more than or equal to the thickness of the second piezoelectric ceramic piece 2-2-1.
In present embodiment, the thickness that in second, the width of district 2-2-1-2 is more than or equal to the second piezoelectric ceramic piece 2-2-1 can simplify the polarization process of piezoelectric ceramic.
Embodiment five: present embodiment is described further execution mode one, the cross section of front end housing 2-4 is symmetrical structure, comprises circle, square and regular polygon.
In present embodiment, the cross section of front end housing 2-4 is the manufacture craft that symmetrical structure can simplify Piezoelectric Driving.
Embodiment six: present embodiment is described further execution mode one, is provided with electrode slice 2-6 between the second piezoelectric ceramic group 2-2 and front end housing 2-4.
In present embodiment, electrode slice 2-6 arranges the connected mode that can simplify driver and pumping signal common port.
Embodiment seven: present embodiment is described further execution mode one, is provided with electrode slice 2-6 between the first piezoelectric ceramic group 2-1 and pedestal 1.
In present embodiment, electrode slice 2-6 arranges the connected mode that can simplify driver and pumping signal common port.
Embodiment eight: present embodiment is described further execution mode one, pedestal 1 and stud 2-3 are integrated part structure.
In present embodiment, one piece configuration can simplify the manufacture craft of Piezoelectric Driving.
Embodiment nine: present embodiment is described further execution mode one, the structural parameters of n flexible transducer 2 are all identical.
In present embodiment, the structure of n flexible transducer 2 is identical can ensure that each drives the consistent of sufficient vibration characteristics.
Claims (9)
1. multi-operation mode compound cantilever polypody piezoelectric actuator, it is characterized in that, comprise pedestal (1) and n flexible transducer (2), wherein, n be more than or equal to 4 even number, n flexible transducer (2) is symmetrically distributed in the both sides of pedestal (1);
Each flexible transducer (2) comprises the first piezoelectric ceramic group (2-1), the second piezoelectric ceramic group (2-2), stud (2-3), front end housing (2-4), drives foot (2-5) and electrode slice (2-6); Front end housing (2-4) is the tapered block in cross section, drives foot (2-5) to be arranged on the narrow end of front end housing (2-4); First piezoelectric ceramic group (2-1) and the second piezoelectric ceramic group (2-2) are fastened between the wide end of pedestal (1) and front end housing (2-4) successively by stud; N flexible transducer (2) is fixed on the both sides of pedestal (1) by n stud (2-3) symmetry;
First piezoelectric ceramic group (2-1) comprises m the first piezoelectric ceramic piece (2-1-1), m be more than or equal to 2 even number, be provided with electrode slice (2-6) between two adjacent the first piezoelectric ceramic pieces (2-1-1); The polarised direction of adjacent two the first piezoelectric ceramic pieces (2-1-1) is contrary; M the first piezoelectric ceramic piece (2-1-1) polarizes along flexible transducer (2) axis direction; Each first piezoelectric ceramic piece (2-1-1) is divided into district (2-1-1-2) He Youqu (2-1-1-3) in left district (2-1-1-1), first, the polarised direction of left district (2-1-1-1) He Youqu (2-1-1-3) is contrary, and in first, district (2-1-1-2) does not polarize;
Second piezoelectric ceramic group (2-2) comprises k the second piezoelectric ceramic piece (2-2-1), k be more than or equal to 2 even number, be provided with electrode slice (2-6) between two adjacent the second piezoelectric ceramic pieces (2-2-1); The polarised direction of adjacent two the second piezoelectric ceramic pieces (2-2-1) is contrary; K piezoelectric ceramic piece (2-2-1) is polarized along flexible transducer (2) axis direction; Each second piezoelectric ceramic piece (2-2-1) is divided into district (2-2-1-2) and inferior segment (2-2-1-3) in district (2-2-1-1), second, the polarised direction of upper district (2-2-1-1) and inferior segment (2-2-1-3) is contrary, and in second, district (2-2-1-2) does not polarize.
2. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, it is characterized in that, the position of the first piezoelectric ceramic group (2-1) and the second piezoelectric ceramic group (2-2) can exchange.
3. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, it is characterized in that, the first piezoelectric ceramic piece (2-1-1) first in the width in district (2-1-1-2) be more than or equal to the thickness of the first piezoelectric ceramic piece (2-1-1).
4. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, it is characterized in that, the second piezoelectric ceramic piece (2-2-1) second in the width in district (2-2-1-2) be more than or equal to the thickness of the second piezoelectric ceramic piece (2-2-1).
5. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, it is characterized in that, the cross section of front end housing (2-4) is symmetrical structure, comprises circle, square and regular polygon.
6. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, is characterized in that, be provided with electrode slice (2-6) between the second piezoelectric ceramic group (2-2) and front end housing (2-4).
7. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, is characterized in that, be provided with electrode slice (2-6) between the first piezoelectric ceramic group (2-1) and pedestal (1).
8. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, it is characterized in that, pedestal (1) and stud (2-3) are integrated part structure.
9. multi-operation mode compound cantilever polypody piezoelectric actuator according to claim 1, it is characterized in that, the structural parameters of n flexible transducer (2) are all identical.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109348386A (en) * | 2018-11-30 | 2019-02-15 | 深圳精拓创新科技有限公司 | Driving device and electronic building brick |
| CN110639785A (en) * | 2019-09-30 | 2020-01-03 | 程龙 | Ultrasonic transducer and ultrasonic knife handle |
| CN111181435A (en) * | 2020-02-24 | 2020-05-19 | 南京航空航天大学 | Track carrying system based on patch type frame actuator and working method thereof |
| CN112217415A (en) * | 2019-07-09 | 2021-01-12 | 重庆邮电大学 | Frame type three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof |
| CN113472237A (en) * | 2021-08-12 | 2021-10-01 | 吉林农业科技学院 | Buckling combined actuating inchworm type linear piezoelectric driver and excitation method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
| JPH09322571A (en) * | 1996-05-30 | 1997-12-12 | Nikon Corp | Vibration actuator |
| CN101262188A (en) * | 2008-04-29 | 2008-09-10 | 哈尔滨工业大学 | Vertical vibration sandwich energy converter cylinder stator and ultrasonic electromotor using this stator |
| KR20090105683A (en) * | 2008-04-03 | 2009-10-07 | 한국과학기술연구원 | Omni-directional linear piezoelectric ultrasonic motor |
| CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
| CN102437782A (en) * | 2011-12-22 | 2012-05-02 | 哈尔滨工业大学 | Sandwich I-shaped four-footed linear ultrasonic motor vibrator |
| CN102497132A (en) * | 2011-12-22 | 2012-06-13 | 哈尔滨工业大学 | Ceramic embedded I-shaped four-foot linear ultrasonic motor vibrator |
| CN102882423A (en) * | 2012-10-18 | 2013-01-16 | 哈尔滨工业大学 | Double-leg rotating ultrasonic motor oscillator of combined torsional oscillation |
| CN103762886A (en) * | 2014-01-27 | 2014-04-30 | 哈尔滨工业大学 | Sandwich type T type two-foot straight line piezoelectric ultrasonic motor oscillator |
| CN104022683A (en) * | 2014-06-25 | 2014-09-03 | 哈尔滨工业大学 | Driving method of super-precision straight line platform by adopting four-footed piezoelectric actuator |
-
2015
- 2015-07-20 CN CN201510428084.3A patent/CN105071692B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
| JPH09322571A (en) * | 1996-05-30 | 1997-12-12 | Nikon Corp | Vibration actuator |
| KR20090105683A (en) * | 2008-04-03 | 2009-10-07 | 한국과학기술연구원 | Omni-directional linear piezoelectric ultrasonic motor |
| CN101262188A (en) * | 2008-04-29 | 2008-09-10 | 哈尔滨工业大学 | Vertical vibration sandwich energy converter cylinder stator and ultrasonic electromotor using this stator |
| CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
| CN102437782A (en) * | 2011-12-22 | 2012-05-02 | 哈尔滨工业大学 | Sandwich I-shaped four-footed linear ultrasonic motor vibrator |
| CN102497132A (en) * | 2011-12-22 | 2012-06-13 | 哈尔滨工业大学 | Ceramic embedded I-shaped four-foot linear ultrasonic motor vibrator |
| CN102882423A (en) * | 2012-10-18 | 2013-01-16 | 哈尔滨工业大学 | Double-leg rotating ultrasonic motor oscillator of combined torsional oscillation |
| CN103762886A (en) * | 2014-01-27 | 2014-04-30 | 哈尔滨工业大学 | Sandwich type T type two-foot straight line piezoelectric ultrasonic motor oscillator |
| CN104022683A (en) * | 2014-06-25 | 2014-09-03 | 哈尔滨工业大学 | Driving method of super-precision straight line platform by adopting four-footed piezoelectric actuator |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109348386A (en) * | 2018-11-30 | 2019-02-15 | 深圳精拓创新科技有限公司 | Driving device and electronic building brick |
| CN109348386B (en) * | 2018-11-30 | 2024-02-23 | 深圳精拓创新科技有限公司 | Driving device and electronic component |
| CN112217415A (en) * | 2019-07-09 | 2021-01-12 | 重庆邮电大学 | Frame type three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof |
| CN110639785A (en) * | 2019-09-30 | 2020-01-03 | 程龙 | Ultrasonic transducer and ultrasonic knife handle |
| CN111181435A (en) * | 2020-02-24 | 2020-05-19 | 南京航空航天大学 | Track carrying system based on patch type frame actuator and working method thereof |
| CN111181435B (en) * | 2020-02-24 | 2024-05-28 | 南京航空航天大学 | Track carrying system based on patch type frame actuator and working method thereof |
| CN113472237A (en) * | 2021-08-12 | 2021-10-01 | 吉林农业科技学院 | Buckling combined actuating inchworm type linear piezoelectric driver and excitation method thereof |
| CN113472237B (en) * | 2021-08-12 | 2022-11-15 | 吉林农业科技学院 | Buckling combined actuating inchworm type linear piezoelectric driver and excitation method thereof |
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