CN105068381A - Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine - Google Patents

Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine Download PDF

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Publication number
CN105068381A
CN105068381A CN201510448406.0A CN201510448406A CN105068381A CN 105068381 A CN105068381 A CN 105068381A CN 201510448406 A CN201510448406 A CN 201510448406A CN 105068381 A CN105068381 A CN 105068381A
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CN
China
Prior art keywords
diaphragm
exposure machine
diaphragms
new
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510448406.0A
Other languages
Chinese (zh)
Inventor
徐锦白
钱聪
张伟
赵华
陈旻峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd
Original Assignee
JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd filed Critical JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority to CN201510448406.0A priority Critical patent/CN105068381A/en
Publication of CN105068381A publication Critical patent/CN105068381A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a diaphragm carrying structure of an exposure machine and a diaphragm replacing method of the exposure machine. The diaphragm carrying structure comprises a suction cup base plate (2) and a carrying strip (3), which are arranged on a work bench (1), wherein a plurality of diaphragms (4) are arranged on the carrying strip at intervals. The diaphragm replacing method comprises the following specific steps: disassembling an original suction cup base plate; taking down an original carrying strip; installing a new carrying strip with new replacing diaphragms on the work bench; and installing the new suction cup base plate on the work bench. According to the diaphragm carrying structure of the exposure machine and the diaphragm replacing method of the exposure machine, in a manner of installing the carrying strip, the plurality of diaphragms are arranged on the carrying strip, so that independent diaphragms are centrally carried; replacement of the diaphragms is facilitated; the height consistency after the diaphragms are replaced can be effectively ensured; and the exposure quality of a printed circuit board (PCB) and the overall production efficiency are significantly improved.

Description

A kind of exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options
Technical field
The present invention relates to a kind of exposure machine diaphragm, specifically a kind of exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options.
Background technology
At present in the production run using exposure machine, particularly write-through exposure machine, pcb board for the different thickness of slab of exposure needs to reach exposure focal plane by replacing sucker backing plate and diaphragm, expose the pcb board of different thickness of slab, in existing this diaphragm bearing structure, each diaphragm is independent installation on the table, need to change one by one when changing diaphragm, this independently diaphragm bearing structure and change the method for diaphragm easily occur diaphragm change after highly inconsistent situation, have a strong impact on the exposure quality to pcb board, and then the production efficiency that impact is overall.
Summary of the invention
For above-mentioned prior art Problems existing, the invention provides a kind of exposure machine diaphragm bearing structure, each independently diaphragm is concentrated and carries, facilitate the replacing of diaphragm, effectively can ensure that the height after diaphragm replacing is consistent, significantly improve the exposure quality of pcb board and overall production efficiency.
To achieve these goals, this exposure machine diaphragm bearing structure comprises installation sucker backing plate on the table and carrier strip; In described carrier strip, multiple diaphragm is installed at interval.
Further, described sucker backing plate and be detachable installing structure between carrier strip and described worktable.Facilitate the replacing of sucker backing plate and carrier strip, enhance productivity.
Meanwhile, present invention also offers a kind of exposure machine diaphragm replacing options, described method is based on above-mentioned exposure machine diaphragm bearing structure; Specifically comprise the following steps:
1) the lower former sucker backing plate of dismounting;
2) former carrier strip is taken off;
3) the new bearer bar more finishing changing new diaphragm is installed on the table;
4) new sucker backing plate is arranged on worktable.
Compared with prior art, this exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options are by installing the mode of carrier strip, multiple diaphragm is arranged in carrier strip, each independently diaphragm is concentrated carry, facilitate the replacing of diaphragm, effectively can ensure that the height after diaphragm replacing is consistent, significantly improve the exposure quality of pcb board and overall production efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is diaphragm magnified partial view in Fig. 1;
In figure: 1, worktable, 2, sucker backing plate, 3, carrier strip, 4, diaphragm.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
As depicted in figs. 1 and 2, this exposure machine diaphragm bearing structure comprises and is arranged on sucker backing plate 2 on worktable 1 and carrier strip 3; In described carrier strip 3, multiple diaphragm 4 is installed at interval.
Further, described sucker backing plate 2 and be detachable installing structure between carrier strip 3 and described worktable 1.
Meanwhile, present embodiment additionally provides a kind of exposure machine diaphragm replacing options, and described method is based on above-mentioned exposure machine diaphragm bearing structure; Specifically comprise the following steps:
1) the lower former sucker backing plate 2 of dismounting;
2) former carrier strip 3 is taken off;
3) the new bearer bar 3 more finishing changing new diaphragm 4 is arranged on worktable 1;
4) new sucker backing plate 2 is arranged on worktable 1.
In sum, this exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options are by installing the mode of carrier strip, multiple diaphragm is arranged in carrier strip, each independently diaphragm is concentrated carry, facilitate the replacing of diaphragm, effectively can ensure that the height after diaphragm replacing is consistent, significantly improve the exposure quality of pcb board and overall production efficiency.

Claims (3)

1. an exposure machine diaphragm bearing structure, is characterized in that,
Comprise and be arranged on sucker backing plate (2) on worktable (1) and carrier strip (3);
Multiple diaphragm (4) is installed at the upper interval of described carrier strip (3).
2. a kind of exposure machine diaphragm bearing structure according to claim 1, is characterized in that,
Described sucker backing plate (2) and be detachable installing structure between carrier strip (3) and described worktable (1).
3. an exposure machine diaphragm replacing options, is characterized in that,
Described method is based on a kind of exposure machine diaphragm bearing structure described in claim 1 or 2 any one;
Specifically comprise the following steps:
1) the lower former sucker backing plate (2) of dismounting;
2) former carrier strip (3) is taken off;
3) the new bearer bar (3) more finishing changing new diaphragm (4) is arranged on worktable (1);
4) new sucker backing plate (2) is arranged on worktable (1).
CN201510448406.0A 2015-07-27 2015-07-27 Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine Pending CN105068381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510448406.0A CN105068381A (en) 2015-07-27 2015-07-27 Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510448406.0A CN105068381A (en) 2015-07-27 2015-07-27 Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine

Publications (1)

Publication Number Publication Date
CN105068381A true CN105068381A (en) 2015-11-18

Family

ID=54497780

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510448406.0A Pending CN105068381A (en) 2015-07-27 2015-07-27 Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine

Country Status (1)

Country Link
CN (1) CN105068381A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090052073A1 (en) * 2006-04-07 2009-02-26 Carl Zeiss Smt Ag Microlithography projection optical system and method for manufacturing a device
CN101821678A (en) * 2007-10-09 2010-09-01 卡尔蔡司Smt股份公司 Microlithographic projection exposure apparatus
CN102998914A (en) * 2012-12-31 2013-03-27 苏州大学 Write-through lithography processing system and lithography method
CN104656378A (en) * 2013-11-22 2015-05-27 卡尔蔡司Smt有限责任公司 Illumination system of a microlithographic projection exposure apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090052073A1 (en) * 2006-04-07 2009-02-26 Carl Zeiss Smt Ag Microlithography projection optical system and method for manufacturing a device
CN101821678A (en) * 2007-10-09 2010-09-01 卡尔蔡司Smt股份公司 Microlithographic projection exposure apparatus
CN102998914A (en) * 2012-12-31 2013-03-27 苏州大学 Write-through lithography processing system and lithography method
CN104656378A (en) * 2013-11-22 2015-05-27 卡尔蔡司Smt有限责任公司 Illumination system of a microlithographic projection exposure apparatus

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Application publication date: 20151118