CN105068381A - Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine - Google Patents
Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine Download PDFInfo
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- CN105068381A CN105068381A CN201510448406.0A CN201510448406A CN105068381A CN 105068381 A CN105068381 A CN 105068381A CN 201510448406 A CN201510448406 A CN 201510448406A CN 105068381 A CN105068381 A CN 105068381A
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- diaphragm
- exposure machine
- diaphragms
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- carrying
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Abstract
The invention discloses a diaphragm carrying structure of an exposure machine and a diaphragm replacing method of the exposure machine. The diaphragm carrying structure comprises a suction cup base plate (2) and a carrying strip (3), which are arranged on a work bench (1), wherein a plurality of diaphragms (4) are arranged on the carrying strip at intervals. The diaphragm replacing method comprises the following specific steps: disassembling an original suction cup base plate; taking down an original carrying strip; installing a new carrying strip with new replacing diaphragms on the work bench; and installing the new suction cup base plate on the work bench. According to the diaphragm carrying structure of the exposure machine and the diaphragm replacing method of the exposure machine, in a manner of installing the carrying strip, the plurality of diaphragms are arranged on the carrying strip, so that independent diaphragms are centrally carried; replacement of the diaphragms is facilitated; the height consistency after the diaphragms are replaced can be effectively ensured; and the exposure quality of a printed circuit board (PCB) and the overall production efficiency are significantly improved.
Description
Technical field
The present invention relates to a kind of exposure machine diaphragm, specifically a kind of exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options.
Background technology
At present in the production run using exposure machine, particularly write-through exposure machine, pcb board for the different thickness of slab of exposure needs to reach exposure focal plane by replacing sucker backing plate and diaphragm, expose the pcb board of different thickness of slab, in existing this diaphragm bearing structure, each diaphragm is independent installation on the table, need to change one by one when changing diaphragm, this independently diaphragm bearing structure and change the method for diaphragm easily occur diaphragm change after highly inconsistent situation, have a strong impact on the exposure quality to pcb board, and then the production efficiency that impact is overall.
Summary of the invention
For above-mentioned prior art Problems existing, the invention provides a kind of exposure machine diaphragm bearing structure, each independently diaphragm is concentrated and carries, facilitate the replacing of diaphragm, effectively can ensure that the height after diaphragm replacing is consistent, significantly improve the exposure quality of pcb board and overall production efficiency.
To achieve these goals, this exposure machine diaphragm bearing structure comprises installation sucker backing plate on the table and carrier strip; In described carrier strip, multiple diaphragm is installed at interval.
Further, described sucker backing plate and be detachable installing structure between carrier strip and described worktable.Facilitate the replacing of sucker backing plate and carrier strip, enhance productivity.
Meanwhile, present invention also offers a kind of exposure machine diaphragm replacing options, described method is based on above-mentioned exposure machine diaphragm bearing structure; Specifically comprise the following steps:
1) the lower former sucker backing plate of dismounting;
2) former carrier strip is taken off;
3) the new bearer bar more finishing changing new diaphragm is installed on the table;
4) new sucker backing plate is arranged on worktable.
Compared with prior art, this exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options are by installing the mode of carrier strip, multiple diaphragm is arranged in carrier strip, each independently diaphragm is concentrated carry, facilitate the replacing of diaphragm, effectively can ensure that the height after diaphragm replacing is consistent, significantly improve the exposure quality of pcb board and overall production efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is diaphragm magnified partial view in Fig. 1;
In figure: 1, worktable, 2, sucker backing plate, 3, carrier strip, 4, diaphragm.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
As depicted in figs. 1 and 2, this exposure machine diaphragm bearing structure comprises and is arranged on sucker backing plate 2 on worktable 1 and carrier strip 3; In described carrier strip 3, multiple diaphragm 4 is installed at interval.
Further, described sucker backing plate 2 and be detachable installing structure between carrier strip 3 and described worktable 1.
Meanwhile, present embodiment additionally provides a kind of exposure machine diaphragm replacing options, and described method is based on above-mentioned exposure machine diaphragm bearing structure; Specifically comprise the following steps:
1) the lower former sucker backing plate 2 of dismounting;
2) former carrier strip 3 is taken off;
3) the new bearer bar 3 more finishing changing new diaphragm 4 is arranged on worktable 1;
4) new sucker backing plate 2 is arranged on worktable 1.
In sum, this exposure machine diaphragm bearing structure and exposure machine diaphragm replacing options are by installing the mode of carrier strip, multiple diaphragm is arranged in carrier strip, each independently diaphragm is concentrated carry, facilitate the replacing of diaphragm, effectively can ensure that the height after diaphragm replacing is consistent, significantly improve the exposure quality of pcb board and overall production efficiency.
Claims (3)
1. an exposure machine diaphragm bearing structure, is characterized in that,
Comprise and be arranged on sucker backing plate (2) on worktable (1) and carrier strip (3);
Multiple diaphragm (4) is installed at the upper interval of described carrier strip (3).
2. a kind of exposure machine diaphragm bearing structure according to claim 1, is characterized in that,
Described sucker backing plate (2) and be detachable installing structure between carrier strip (3) and described worktable (1).
3. an exposure machine diaphragm replacing options, is characterized in that,
Described method is based on a kind of exposure machine diaphragm bearing structure described in claim 1 or 2 any one;
Specifically comprise the following steps:
1) the lower former sucker backing plate (2) of dismounting;
2) former carrier strip (3) is taken off;
3) the new bearer bar (3) more finishing changing new diaphragm (4) is arranged on worktable (1);
4) new sucker backing plate (2) is arranged on worktable (1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510448406.0A CN105068381A (en) | 2015-07-27 | 2015-07-27 | Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510448406.0A CN105068381A (en) | 2015-07-27 | 2015-07-27 | Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine |
Publications (1)
Publication Number | Publication Date |
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CN105068381A true CN105068381A (en) | 2015-11-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510448406.0A Pending CN105068381A (en) | 2015-07-27 | 2015-07-27 | Diaphragm carrying structure of exposure machine and diaphragm replacing method of exposure machine |
Country Status (1)
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090052073A1 (en) * | 2006-04-07 | 2009-02-26 | Carl Zeiss Smt Ag | Microlithography projection optical system and method for manufacturing a device |
CN101821678A (en) * | 2007-10-09 | 2010-09-01 | 卡尔蔡司Smt股份公司 | Microlithographic projection exposure apparatus |
CN102998914A (en) * | 2012-12-31 | 2013-03-27 | 苏州大学 | Write-through lithography processing system and lithography method |
CN104656378A (en) * | 2013-11-22 | 2015-05-27 | 卡尔蔡司Smt有限责任公司 | Illumination system of a microlithographic projection exposure apparatus |
-
2015
- 2015-07-27 CN CN201510448406.0A patent/CN105068381A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090052073A1 (en) * | 2006-04-07 | 2009-02-26 | Carl Zeiss Smt Ag | Microlithography projection optical system and method for manufacturing a device |
CN101821678A (en) * | 2007-10-09 | 2010-09-01 | 卡尔蔡司Smt股份公司 | Microlithographic projection exposure apparatus |
CN102998914A (en) * | 2012-12-31 | 2013-03-27 | 苏州大学 | Write-through lithography processing system and lithography method |
CN104656378A (en) * | 2013-11-22 | 2015-05-27 | 卡尔蔡司Smt有限责任公司 | Illumination system of a microlithographic projection exposure apparatus |
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Application publication date: 20151118 |