CN105068245A - Improved illumination light control method - Google Patents
Improved illumination light control method Download PDFInfo
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- CN105068245A CN105068245A CN201510528385.3A CN201510528385A CN105068245A CN 105068245 A CN105068245 A CN 105068245A CN 201510528385 A CN201510528385 A CN 201510528385A CN 105068245 A CN105068245 A CN 105068245A
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- laser
- condition
- focal point
- light modulator
- spatial light
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Provided in the invention is an improved illumination light control method. The method comprises: an irradiation condition obtaining step; to be specific, obtaining and using an incident pattern of laser to a spatial light modulator, a first refractive index n1 of a first propagation medium on a propagation path of the laser from the spatial light modulator to a focus point, and a second refractive index n2, different from the first refractive index, of a second propagation medium closer to the focus point side than the first propagation medium as laser irradiation conditions; and a light condensation condition setting steps; to be specific, setting the number st of condensation points for condensed irradiation on the laser from the spatial light modulator as well as respective condensation positions and condensation strength of the st condensation points as the condensation conditions of the laser. The st is an integer larger than 1.
Description
Technical field
The present invention is specifically related to a kind of improvement type illumination light control method.
Background technology
In recent years, prevailing in the research of the optic integrated circuit of the waveguide of inside glass d-making, optical splitter device, directional coupler etc.As one of the method for making of such optic integrated circuit, there is the method using femtosecond laser.In the method, such as, impact is brought out at the focal point of femtosecond laser by two-photon absorption etc., thereby, it is possible to carry out the processing of the refractive index localized variation making glass.In addition, such laser is to the focus irradiation of irradiation object thing, except the making of optic integrated circuit, also be widely used in various laser processing devices or observe in the scattering of laser, the laser microscope of reflection etc., here, carry out sharp light-struck situation of the processing of complicated three-dimensional structure etc. from a laser beam of LASER Light Source outgoing in use, there is the problem needing the time extremely grown in this manufacturing procedure.As the method for reducing of the process time in this situation, consider the method carrying out utilizing the multiple spot of multiple focal point simultaneously to process.The simplest structure realizing such method is the structure using the multi-stripe laser bundle provided from multiple LASER Light Source.But such structure if consider the cost, installation space etc. that prepare multiple LASER Light Source, is then unpractical; So need a kind of improvement type illumination light control method badly to solve the problem.
Summary of the invention
The object of the invention is to for the deficiencies in the prior art, provide a kind of improvement type illumination light control method, this improvement type illumination light control method can solve the problem well.
For reaching above-mentioned requirements, the technical scheme that the present invention takes is: provide a kind of improvement type illumination light control method, this improvement type illumination light control method comprises illuminate condition and obtains step, its obtain incident pattern from laser to spatial light modulator, be positioned at laser from spatial light modulator the 1st refractive index n to the 1st propagation medium the travel path of focal point
1, and to be positioned at than the 1st propagation medium more by the 2nd refractive index n different from the 1st refractive index of the 2nd propagation medium at focal point side place
2as the illuminate condition of laser; Optically focused condition setting procedure, its setting focus irradiation is from the number s of the focal point of the laser of spatial light modulator
t, and about s
tindividual focal point s each spot position, optically focused intensity as the optically focused condition of laser, wherein, s
tit is the integer of more than 1; Aberration condition derives step, and it is derived laser is from spatial light modulator to the propagation of focal point s, the aberration condition that 1st propagation medium mutually different by refractive index and the 2nd propagation medium produce; And modulation pattern design procedure, it considers that the aberration condition derived by aberration condition derivation step carrys out the modulation pattern presented in the photomodulator of design space; By pushing button, input data; From when pushing button, the metering specification time; And during backlight lightening, when detecting that button is pressed, make backlight extinguish the stipulated time; Modulation pattern design treatment, makes described laser be A to the incident amplitude of the described pixel j of described spatial light modulator
j-in, phase place is
the phase value of described pixel j is
pass through following formula
try to achieve the complex amplitude U of the described spot condition representing described focal point s
s.
Compared with prior art, this improvement type illumination light control method can solve the problem of existing photocontrol program high cost and spatial design aspect well.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present application, form a application's part, use identical reference number to represent same or analogous part in the drawings, the schematic description and description of the application, for explaining the application, does not form the improper restriction to the application.In the accompanying drawings:
Fig. 1 is schematic flow sheet of the present invention.
Embodiment
For making the object of the application, technical scheme and advantage clearly, below in conjunction with drawings and the specific embodiments, the application is described in further detail.
In the following description, quoting of " embodiment ", " embodiment ", " example ", " example " etc. is shown that the embodiment of so description or example can comprise special characteristic, structure, characteristic, character, element or limit, but not each embodiment or example must comprise special characteristic, structure, characteristic, character, element or limit.In addition, reuse phrase " embodiment according to the application " although be likely refer to identical embodiment, and not necessarily refers to identical embodiment.
For the sake of simplicity, eliminate in below describing and well known to a person skilled in the art some technical characteristic.
According to an embodiment of the application, a kind of improvement type illumination light control method is provided, as shown in Figure 1, comprise illuminate condition and obtain step, its obtain incident pattern from laser to spatial light modulator, be positioned at laser from spatial light modulator the 1st refractive index n to the 1st propagation medium the travel path of focal point
1, and to be positioned at than the 1st propagation medium more by the 2nd refractive index n different from the 1st refractive index of the 2nd propagation medium at focal point side place
2as the illuminate condition of laser; Optically focused condition setting procedure, its setting focus irradiation is from the number s of the focal point of the laser of spatial light modulator
t, and about s
tindividual focal point s each spot position, optically focused intensity as the optically focused condition of laser, wherein, s
tit is the integer of more than 1; Aberration condition derives step, and it is derived laser is from spatial light modulator to the propagation of focal point s, the aberration condition that 1st propagation medium mutually different by refractive index and the 2nd propagation medium produce; And modulation pattern design procedure, it considers that the aberration condition derived by aberration condition derivation step carrys out the modulation pattern presented in the photomodulator of design space; By pushing button, input data; From when pushing button, the metering specification time; And during backlight lightening, when detecting that button is pressed, make backlight extinguish the stipulated time;
Modulation pattern design treatment, makes described laser be A to the incident amplitude of the described pixel j of described spatial light modulator
j-in, phase place is
the phase value of described pixel j is
pass through following formula
try to achieve the complex amplitude U of the described spot condition representing described focal point s
s.
According to an embodiment of the application, there is provided a kind of modulation pattern design procedure of this improvement type illumination light control method of improvement type illumination light control method by multiple pixels of supposition two-dimensional arrangements in spatial light modulator, the impact that the spot condition of change on the laser of focal point being conceived to the phase value of 1 pixel of the modulation pattern presented in multiple pixel causes, phase value is changed close to the mode of desired state to make this spot condition, and the alter operation of such phase value is carried out for whole pixels of modulation pattern, thus design modulation pattern, and when evaluating the spot condition of focal point, for light from the pixel j the modulation pattern of spatial light modulator to the propagation of focal point s.
Above embodiment only represents several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not be interpreted as limitation of the scope of the invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to scope.Therefore protection scope of the present invention should be as the criterion with claim.
Claims (2)
1. an improvement type illumination light control method, it is characterized in that, comprise: illuminate condition obtains step, its obtain incident pattern from laser to spatial light modulator, be positioned at laser from spatial light modulator the 1st refractive index n to the 1st propagation medium the travel path of focal point
1, and to be positioned at than the 1st propagation medium more by the 2nd refractive index n different from the 1st refractive index of the 2nd propagation medium at focal point side place
2as the illuminate condition of laser; Optically focused condition setting procedure, its setting focus irradiation is from the number s of the focal point of the laser of spatial light modulator
t, and about s
tindividual focal point s each spot position, optically focused intensity as the optically focused condition of laser, wherein, s
tit is the integer of more than 1; Aberration condition derives step, and it is derived laser is from spatial light modulator to the propagation of focal point s, the aberration condition that 1st propagation medium mutually different by refractive index and the 2nd propagation medium produce; And modulation pattern design procedure, it considers that the aberration condition derived by aberration condition derivation step carrys out the modulation pattern presented in the photomodulator of design space; By pushing button, input data; From when pushing button, the metering specification time; And during backlight lightening, when detecting that button is pressed, make backlight extinguish the stipulated time; Modulation pattern design treatment, makes described laser be A to the incident amplitude of the described pixel j of described spatial light modulator
j-in, phase place is
the phase value of described pixel j is
pass through following formula
try to achieve the complex amplitude U of the described spot condition representing described focal point s
s.
2. improvement type illumination light control method as claimed in claim 1, it is characterized in that: modulation pattern design procedure is by multiple pixels of supposition two-dimensional arrangements in spatial light modulator, the impact that the spot condition of change on the laser of focal point being conceived to the phase value of 1 pixel of the modulation pattern presented in multiple pixel causes, phase value is changed close to the mode of desired state to make this spot condition, and the alter operation of such phase value is carried out for whole pixels of modulation pattern, thus design modulation pattern, and when evaluating the spot condition of focal point, for light from the pixel j the modulation pattern of spatial light modulator to the propagation of focal point s.
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|---|---|---|---|
| CN201510528385.3A CN105068245A (en) | 2015-08-26 | 2015-08-26 | Improved illumination light control method |
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| CN201510528385.3A CN105068245A (en) | 2015-08-26 | 2015-08-26 | Improved illumination light control method |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011180290A (en) * | 2010-02-26 | 2011-09-15 | Hamamatsu Photonics Kk | Aberration correcting method, microscopic observation method using the aberration correcting method, laser radiation method using the aberration correcting method, aberration correcting device, and aberration correction program |
| CN103907048A (en) * | 2011-10-26 | 2014-07-02 | 浜松光子学株式会社 | Light modulation control method, control program, control device and laser beam irradiation device |
| CN104620163A (en) * | 2012-09-13 | 2015-05-13 | 浜松光子学株式会社 | Optical modulation control method, control program, control device, and laser light irradiation device |
-
2015
- 2015-08-26 CN CN201510528385.3A patent/CN105068245A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011180290A (en) * | 2010-02-26 | 2011-09-15 | Hamamatsu Photonics Kk | Aberration correcting method, microscopic observation method using the aberration correcting method, laser radiation method using the aberration correcting method, aberration correcting device, and aberration correction program |
| CN103907048A (en) * | 2011-10-26 | 2014-07-02 | 浜松光子学株式会社 | Light modulation control method, control program, control device and laser beam irradiation device |
| CN104620163A (en) * | 2012-09-13 | 2015-05-13 | 浜松光子学株式会社 | Optical modulation control method, control program, control device, and laser light irradiation device |
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Application publication date: 20151118 |
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