CN105058985A - Inkjet nozzle assembly controlling directivity of ink droplet through chamber roof paddle-shaped object capable of actuating independently - Google Patents

Abstract

The invention discloses an inkjet nozzle assembly, which comprises a nozzle chamber for containing ink, and a plurality of moveable paddle-shaped objects. The nozzle chamber comprises a chamber floor and a chamber roof which has a nozzle opening defined therein. The plurality of moveable paddle-shaped objects define a part of the chamber roof. The plurality of paddle-shaped objects are actuable to cause ejection of an ink droplet from the nozzle opening. Each paddle-shaped object comprises a thermal bend actuator, and each actuator is independently controllable via respective drive circuit system such that a direction of the ink droplet ejected from the nozzle opening is controllable by independent movement of each paddle-shaped object.

Description

By top, the chamber oar of independent actuation the inkjet nozzle assembly of ink droplet directionality can be controlled

The application is application number 201080070167.5, the divisional application being called the patent application of " having the ink jet-print head of public strip conductor on the nozzle plate " in October 1 2010 applying date.

Technical field

The present invention relates to printer field, and particularly relate to inkjet printhead arts.The present invention mainly develops print quality for improvement of high resolution print head and printing head performance.

Background technology

Invented many different printing types, a large amount of types wherein use at present.Known print form have multiple for mark of correlation medium to mark the method for this print media.Conventional print form comprises hectograph printing, laser printing and copy device, dot matrix type impact printer, heat-sensitive paper printer, film recorder, thermal wax printer, dye-sublimation printer and ink-jet printer, has drippage and continuous-flow two kinds of forms as required.When considering cost, speed, quality, reliability, the simplicity of structure and operation etc., the printer of each type has himself advantage and problem.

In recent years, inkjet printing (wherein the ink of each independent pixel derives from one or more ink nozzle) field increased popularity, this is mainly because it is cheap and multiduty character.

The many different technologies about inkjet printing are invented.About the investigation to this field, article with reference to JMoore: " non-back-strike print: introduce and history prospect (Non-ImpactPrinting:IntroductionandHistoricalPerspective) ", hard copy output device (OutputHardCopyDevices), editor Du Beike (Dubeck) and S Xie Er (Sherr), the 207 to 220 page (1988).

Ink-jet printer itself dissimilarly to present with many.In inkjet printing, utilize continuous ink stream to seem to trace back at least nineteen twenty-nine, wherein the Continuous Flow electrostatic inkjet of No. 1941001 of Hassell (Hansell) a kind of simple form disclosed in U.S. Patent prints.

The United States Patent (USP) 3596275 of this Witter (Sweet) also discloses the process of a kind of continous inkjet printing, comprises and adjusts this ink jet stream with the step causing ink droplet to be separated by high-frequency electrostatic field.This technology is still used by some manufacturers, comprises Ai Ermu Ztel (Elmjet) and match angel (Scitex) (also see No. 3373437 United States Patent (USP) of the people such as Si Weite).

Piezoelectric ink jet printer is also a kind of inkjet-printing device of common type.The people such as Kai Se (Kyser) are in No. 3946398 United States Patent (USP) (1970) (this patent uses diaphragm operator scheme), Zuo Ertan (Zolten) is in United States Patent (USP) 3683212 (1970) (which disclosing the extrusion operation pattern of piezo-electric crystal), Si Dimu (Stemme) is in No. 3747120 United States Patent (USP) (1972) (which disclosing piezoelectric operated beam mode), Huo Jinsi (Howkins) is in No. 4459601 United States Patent (USP) (which disclosing the actuating of the piezoelectric push dynamic model formula of ink jet stream), and luxuriant and rich with fragrance thatch Bake (Fischbeck) is in United States Patent (USP) 4584590 (which disclosing the type of shear mode of piezoelectric transducer element), disclose piezoelectric system.

Recently, thermal inkjet-printing has become extremely popular inkjet printing form.Inkjet technology comprises those technology disclosed in United States Patent (USP) 4490728 people such as GB2007162 (1979) neutralizations special (Vaught) difficult to understand by people such as rattans far away (Endo).The inkjet technology that upper two reference papers disclose all depends on the activation of electrothermal actuator, this activation causes forming bubble in small space (as nozzle), thus causes ink to be ejected on relevant print media from the hole be connected to this small space.As the manufacturers such as Canon (Canon) and Hewlett-Packard (HewlettPackard) have manufactured the printing equipment utilizing electrothermal actuator.

As from foregoing teachings, many dissimilar printing techniques are available.Ideally, a kind of printing technique should have the attribute of multiple hope.These comprise cheap structure and operation, high-speed cruising, safety and continuous print longtime running etc.Every technology may use at cost, speed, quality, reliability, power, have himself advantage and shortcoming in the simplicity of structure, running, durability and consumption.

The applicant has disclosed too much page width printing head design.When comparing with more traditional cross sliding type ink jet-print head, the fixed page width printing head crossing over page width extension presents the design challenge of multiple uniqueness.Such as, page width printing head is typically built by multiple independent printhead ic (IC), and these integrated circuits must carry out seamless link to provide high print quality.The applicant has described the multiple printhead of the nozzle cross-section had through displacement so far, this cross section makes multiple nozzle arrange can to cross over page width between adjacent printhead ic to carry out seamless printing (see the 7th, 390, No. 071 and 7,290, No. 852 United States Patent (USP)s, the content of these patents is combined in this by reference).The additive method that page width prints is (as HPEdgeline ^tMtechnology) use staggered printhead module, this inevitably increases the size of print zone and need media feeding mechanism extraly to maintain the proper alignment with print zone.Desirable to provide a kind of alternative designs of nozzles, this designs of nozzles allows a kind of new method for constructing page width printing head.

Typically, page width printing head comprise multiple " redundancy " nozzle row, these nozzles row can be used for dead nozzle compensate or for adjust printhead peak power requirements (see the 7th, 465,017 and 7,252, No. 353 United States Patent (USP)s, the content of these patents is combined in this by reference).Contrary with landscape orientation head, it is specific question in fixed page width printing head that dead nozzle compensates, because each nozzle of dielectric substrate during printing only in once-through printhead.Redundancy inevitably increases cost and the complexity of page width printing head, and desirably while the suitable mechanism being still provided for the compensation of dead nozzle, farthest reduces one or more redundam nozzle row.

Desirably provide more multiplex page width printing head further, these page width printing heads can control layout and/or the point resolution of (such as) ink droplet.

The alternative integrated printhead with MEMS and cmos layer is desirably provided further.Especially the overall electrical efficiency that undesirable " ground bounce " phenomenon also improves printhead thus is desirably farthest reduced.

Summary of the invention

In first aspect, provide a kind of inkjet nozzle assembly, this inkjet nozzle assembly comprises:

For holding a nozzle chambers of ink, this nozzle chambers comprises at the bottom of a chamber and top, a chamber, and this chamber is pushed up to have and is defined in one of them nozzle opening; And

Multiple removable oar, these removable oars define top, this chamber at least partially, the plurality of oar is activatable to cause ink droplet to eject from this nozzle opening, and each oar comprises a hot bending musical form actuator, and this hot bending musical form actuator comprises:

A top thermoelasticity crossbeam, this top thermoelasticity crossbeam is connected on drive circuit system; And

A passive crossbeam in bottom, the passive crossbeam in this bottom is molten on this thermoelasticity crossbeam, and make like this when electric current is by this thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus cause a corresponding oar bending at the bottom of the chamber of this nozzle chambers

Wherein each actuator is controllable independently by the drive circuit system of correspondence, makes the direction that ink droplet ejects from this nozzle opening be controllable by independently moving of each oar like this.

Term as used herein " nozzle assembly " and " nozzle " are used interchangeably.Therefore, " nozzle assembly " or " nozzle " refers to a kind of device ejecting ink droplet when activating." nozzle assembly " or " nozzle " generally includes nozzle chambers and at least one actuator that has nozzle opening.

Optionally, this nozzle assembly is arranged on one substrate, and wherein a passivation layer of this substrate defines at the bottom of the chamber of this nozzle chambers.

Optionally, be separated and multiple sidewall at the bottom of top, this chamber and this chamber this chamber push up and at the bottom of this chamber between extend to limit this nozzle chambers.

Optionally, this nozzle assembly comprises a pair relative oar, and these oars are positioned on the either side of this nozzle opening.

Optionally, this nozzle assembly comprises two to relative oar, and these oars position relative to this nozzle opening.

Optionally, these oars are moveable relative to this nozzle opening.

Optionally, each oar defines a sections of this nozzle opening, makes this nozzle opening and these oars be relative to moveable at the bottom of this chamber like this.

Optionally, this thermoelasticity crossbeam is made up of a kind of vananum.

Optionally, the material that this passive crossbeam is selected from lower group by least one is formed, and this group is made up of the following: silica, silicon nitride and silicon oxynitride.

Optionally, this passive crossbeam comprises the first passive crossbeam in top be made up of silica and the second passive crossbeam in bottom be made up of silicon nitride.

Optionally, top, this chamber is applied a kind of polymeric material.This polymeric material can be configured to provide a kind of mechanical seal between a standing part pushing up at each oar and this chamber, thus the ink between the period of energization farthest reducing these oars is leaked.Alternately, this polymeric material can have the multiple openings be limited to wherein, makes like this to there is a kind of Fluid Sealing between a standing part pushing up at each oar and this chamber.

Optionally, this polymeric material is made up of a kind of polymer siloxane.

Optionally, this polymer siloxane is selected from the group of polysilsesquioxane and dimethyl silicone polymer composition.

Optionally, these actuators are by controlling following at least one item and controllable independently:

Lead to the timing (timing) of multiple drive singal of each actuator, to provide the coordination of the plurality of oar to move; And

Lead to the power of multiple drive singal of each actuator.

Optionally, the power of drive singal is by following at least one control:

The voltage of these drive singal; And

The pulse width of these drive singal.

Relevant with this first aspect further in, provide a kind of ink jet-print head integrated circuit, this integrated circuit comprises:

A substrate comprising drive circuit system; And

Arrange multiple inkjet nozzle assemblies over the substrate, each inkjet nozzle assembly comprises:

For holding a nozzle chambers of ink, this nozzle chambers comprises at the bottom of the chamber limited by the upper surface of this substrate and top, a chamber, and this chamber defines a nozzle opening in top; And

Multiple removable oar, these oars define top, this chamber at least partially, the plurality of oar is activatable to cause ink droplet to eject from this nozzle opening, and each oar comprises a hot bending musical form actuator, and this hot bending musical form actuator comprises:

Be connected to a top thermoelasticity crossbeam on this drive circuit system; And

A passive crossbeam in bottom, the passive crossbeam in this bottom is molten to this thermoelasticity crossbeam, and make like this when electric current is by this thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus cause a corresponding oar bending at the bottom of the chamber of this nozzle chambers

Wherein each actuator is controllable independently by corresponding drive circuit system, makes the direction that ink droplet ejects from this nozzle opening be controllable by independently moving of each oar like this.

Optionally, the upper surface of this substrate is limited by a passivation layer, and this passivation layer is disposed on a drive circuit system layer.

In second aspect, provide a kind of fixed page width ink jet printhead, this printhead is made up of the multiple printhead ics docked end-to-end on page width, one or more nozzles rows that this printhead longitudinal axis comprised along this printhead extends, multiple nozzle is drawn together in each nozzle package, and one or more being configured to separately wherein in these nozzles launches ink droplet along this longitudinal axis on multiple predetermined difference position.

Optionally, this one or more nozzle can be configured on 2,3,4,5,6 or 7 difference positions, launch ink droplet along this longitudinal axis separately.

Optionally, each nozzle can be configured on multiple predetermined difference position, launch ink droplet in a two-dimentional district with preliminary dimension.

Optionally, this district is circular or oval haply haply, and wherein the barycenter in this district and the barycenter of this nozzle corresponding.

Optionally, ink droplet is launched at least one secondary point position that this one or more nozzle can be configured on the either side of a main point position and this main point position.

Optionally, each nozzle in one first group is configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, each nozzle wherein in this first group is positioned within two nozzle pitches of a dead nozzle in this printhead, and one of them nozzle pitch is defined as the minimum fore-and-aft distance between a pair nozzle in same nozzle row.

Optionally, each nozzle in a nozzle row is configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, makes print point density exceed the spray nozzle density of this printhead like this.

Optionally, often pair of printhead ic of docking defines an attachment areas, and the nozzle pitch of wherein crossing over this attachment areas has exceeded a nozzle pitch, nozzle pitch has been defined as the minimum fore-and-aft distance between a pair nozzle in same nozzle row.

Optionally, each nozzle in one of them second group is configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, and the plurality of predetermined point position is included at least one the some position in this attachment areas.

In the third aspect, provide a kind of fixed page width ink jet printhead, one or more nozzles rows that this printhead longitudinal axis comprised along this printhead extends, wherein each nozzle is configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, makes print point density exceed the spray nozzle density of this printhead like this.

Optionally, each nozzle can be configured on 2,3,4,5,6 or 7 difference positions, launch ink droplet along this longitudinal axis.

Optionally, each nozzle can be configured on multiple predetermined difference position, launch ink droplet along the axis of pitch of this printhead.

Optionally, this print point density is at least twice of the spray nozzle density of this printhead.

Optionally, each nozzle is configured to launch in a line time (line-time) once, and one of them line time is defined as print media and advances through the time that first row of this printing spends.

In fourth aspect, provide a kind of fixed page width ink jet printhead, one or more nozzles rows that this printhead longitudinal axis comprised along this printhead extends, wherein each nozzle can be configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, each nozzle has a main point position associated with it, wherein this printhead is configured to compensate this dead nozzle by carrying out printing from the nozzle worked selected with a dead nozzle one of being arranged in that same nozzle arranges, this selected nozzle worked is configured on the main point position be associated with this dead nozzle, launch at least some ink droplet and launch at least some ink droplet on the main point position of himself.

Optionally, this selected nozzle worked is positioned at this that dead nozzle is at a distance of the distance of one, two, three or four nozzle pitch, and one of them nozzle pitch is defined as the minimum fore-and-aft distance between a pair nozzle in same nozzle row.

Optionally, this printhead is configured to compensate this dead nozzle by following steps:

Identify this dead nozzle;

Select a nozzle worked to compensate this dead nozzle; And

.

Optionally, this selected nozzle worked is configured within the period of a line time, launch the first ink droplet in the main point position be associated with this dead nozzle and launch the second ink droplet on the main point position of himself, and one of them line time is defined as print media and advances through the time that first row of this printing spends.

Optionally, each nozzle can be configured on multiple predetermined difference position, launch ink droplet along the axis of pitch of this printhead further.

Optionally, this selected nozzle worked is configured on the main point position be associated with this dead nozzle, launch the first ink droplet and launch the second ink droplet on the main point position of himself being less than in the period of five line times more than a line time.

Optionally, each ink droplet ejected perpendicular to the ink jet face of this printhead causes this ink droplet to drop on a corresponding main point position.

Optionally, this printhead is configured to compensate multiple dead nozzle by carrying out printing from the multiple selected nozzle worked of correspondence.

Optionally, this printhead does not have the nozzle row of redundancy.

In further at relevant with this fourth aspect one, provide a kind of printhead ic for fixed page width ink jet printhead, this printhead ic comprises the one or more nozzle rows extended along its longitudinal axis, wherein each nozzle is configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, each nozzle has a main point position associated with it, wherein this printhead ic be configured to by from a dead nozzle be positioned same nozzle arrange in a selected nozzle worked carry out printing and compensate this dead nozzle, this selected nozzle worked is configured on the main point position be associated with this dead nozzle, launch at least some ink droplet and launch at least some ink droplet on the main point position of himself.

In the 5th, provide a kind of fixed page width ink jet printhead, one or more nozzles rows that this printhead longitudinal axis comprised along this printhead extends, this printhead is made up of multiple printhead module, these printhead modules have leap page width and dock, the first and second contrary ends, often pair of printhead module of docking limits a public attachment areas, the nozzle pitch of wherein crossing over this attachment areas has exceeded a nozzle pitch, nozzle pitch is defined as the minimum fore-and-aft distance between a pair nozzle in same nozzle row, and at least one first jet at first end place being wherein positioned at the first printhead module of a docking centering is configured to ink droplet to be transmitted among a corresponding attachment areas.

Optionally, at least one second nozzle being arranged in the second end place of the second printhead module of this docking centering is configured to attachment areas ink droplet being transmitted into this correspondence, makes like this to be transmitted among this public attachment areas by ink droplet from the first and second nozzles in the relative first end of multiple adjacent printhead module and the second end.

Optionally, each first jet is configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, and the plurality of predetermined difference position is included at least one the some position in this attachment areas.

Optionally, each first and second nozzles are configured on the multiple predetermined difference position of correspondence, launch corresponding ink droplet along this longitudinal axis, and corresponding multiple predetermined difference position is included at least one the some position in this attachment areas separately.

Optionally, the point in this attachment areas is apart from roughly the same with a nozzle pitch.

Optionally, first and second nozzle each is configured to launch within the period of a line time once, and one of them line time is defined as the time that print media is spent by first row of this printing.

Optionally, multiple nozzles of locating towards this first end are configured to be partial to this first end transmitting ink droplet, and are configured to be partial to this second end transmitting ink droplet towards multiple nozzles of the second end location.

Optionally, deflection depends on the distance at each nozzle and the center of corresponding printhead module, makes multiple nozzles closer to this centralized positioning to be less than deflection further from multiple nozzles of this centralized positioning to launch ink droplet like this.

Optionally, equalization point is apart from being greater than a nozzle pitch.

Optionally, equalization point is apart from having gone out greatly less than 1% than a nozzle pitch.

Optionally, unless compensated a dead nozzle, otherwise each nozzle in this printhead is configured to launch ink droplet on an only some position.

In the 6th, provide a kind of printhead ic (IC), this printhead ic comprises the one or more nozzle rows extended along its longitudinal axis, this printhead IC has for engage ground connection with other printhead IC thus limit first end and the second end of page width printing head, each nozzle has a main point position associated with it, at least one first jet being wherein positioned at this first end place is configured to except launching except at least some ink droplet on the main point position of himself, also be partial to this first end and launch at least some ink droplet.

Optionally, at least one second first jet being positioned at this second end place is configured to be partial to this second end transmitting at least some ink droplet except launching on the main point position of himself except at least some ink droplet, also.

Optionally, this first jet is configured at a line time or is partial to this first end in less period and launches an ink droplet and launch an ink droplet on the main point position of himself, and one of them line time is defined as print media and advances through the time that this printhead IC row spends.

Optionally, each second nozzle be configured to a line time or be partial in less period this second end launch an ink droplet and on the main point position of himself launch an ink droplet.

Optionally, the nozzle pitch of this printhead IC and the point of print point are apart from identical, wherein the nozzle pitch of this printhead IC is defined as in same nozzle row between a pair nozzle fore-and-aft distance, and point is apart from the fore-and-aft distance between a pair that is defined as in same print line.

Optionally, this first jet is configured to be emitted to fewer ink droplets when this first end of deflection is the distance between 1 nozzle pitch and 3 nozzle pitches.

Optionally, each nozzle comes between first attachment areas at this first end place and second attachment areas at this second end place and extends.

Optionally, the width that this first attachment areas and this second attachment areas have is defined as the minimum range between an edge and a nozzle of this printhead IC.

Optionally, the width that this first attachment areas has is between 0.5 nozzle pitch and 3.5 nozzle pitches, and the width that this second attachment areas has is between 0.5 nozzle pitch and 3.5 nozzle pitches

Optionally, when this printhead IC is for time fixing, the printable area of at least one nozzle row is the longitudinal extent being longer than this nozzle row.

In the 7th, provide a kind of printhead ic for fixed page width printing head (IC), this printhead IC comprises at least one nozzle row extended along its longitudinal axis, and the length wherein corresponding to the printable area of this nozzle row is the length of being longer than this nozzle row.

Optionally, the length that the length of this printable area is arranged than this nozzle has grown at least one nozzle pitch, and one of them nozzle pitch is defined as the minimum fore-and-aft distance between a pair nozzle in this nozzle row.

Optionally, this printable area is until go out eight nozzle pitches than this nozzle platoon leader.

Optionally, this printable area corresponds to and arranges by this nozzle a line point printed.

Optionally, this printhead comprises multiple nozzle row, and the length wherein corresponding to the printable area of respective nozzle row is the length of being longer than each nozzle row.

Optionally, this printable area has extended beyond each end of this nozzle row.

Optionally, at least one first jet being positioned a first end place of this printhead IC is configured to be partial to this first end and launches ink droplet.

Optionally, deflection depends on the distance of each nozzle and this first end, makes multiple nozzles of closely locating with this first end launch ink droplet when being more partial to this first end compared with multiple nozzles of this first end more far orientation like this.

Optionally, at least one second nozzle being positioned the contrary the second end place of of this printhead IC is configured to be partial to this second end and launches ink droplet.

Optionally, deflection depends on the distance at the center of each nozzle and this printhead IC, make so multiple nozzles of more locating near this center with more away from the Comparatively speaking less deflection of multiple nozzles of this centralized positioning to launch ink droplet.

Optionally, the multiple nozzles being arranged in the central area of this printhead IC be configured to haply perpendicular to the ink jet face of this printhead IC to launch ink droplet.

Optionally, the equalization point in this printable area is apart from being greater than a nozzle pitch.

Optionally, this equalization point is apart from having gone out greatly less than 1% than a nozzle pitch.

Optionally, unless compensated a dead nozzle, otherwise each nozzle in this printhead is configured to launch ink droplet on an only some position.

In eighth aspect, provide a kind of method for controlling the direction that ink droplet ejects from inkjet nozzle, this inkjet nozzle comprises: a nozzle chambers, and this nozzle chambers has top, a chamber, and a nozzle opening is limited at wherein; And multiple removable oar, these removable oars define top, this chamber at least partially, and each oar comprises a hot bending musical form actuator, and the method comprises the following steps:

Activate a first hot bending musical form actuator by the first drive circuit system of correspondence, make corresponding first oar bending at the bottom of a chamber of this nozzle chambers like this;

Activate a second hot bending musical form actuator by the second drive circuit system of correspondence, make corresponding second oar bending at the bottom of a chamber of this nozzle chambers like this; And

Ink droplet is ejected thus from this nozzle opening,

Wherein the actuating of this first hot bending musical form actuator and this second hot bending musical form actuator is controlled independently by this first drive circuit system and this second drive circuit system, to control the direction that ink droplet ejects from this nozzle opening.

Optionally, this first actuator and this second actuator control independently by controlling following at least one item:

Lead to the timing of the multiple drive singal of each in the first actuator and this second actuator, to provide the coordination of the plurality of oar to move; And

Lead to the power of the multiple drive singal of each in these actuators, to cause the asymmetric movement of the plurality of oar.

Optionally, before this second actuator, activate this first actuator to provide ink droplet to spray in a first direction, or before this first actuator, activate this second actuator to provide ink droplet to spray in a second direction.

Optionally, be supplied to the power of this first actuator to be greater than the power being supplied to this second actuator, or be supplied to the power of this second actuator to be greater than the power being supplied to this first actuator.

Optionally, the power of drive singal is by following at least one control:

The voltage of these drive singal; And

The pulse width of these drive singal.

Optionally, two relative oar is located relative to this nozzle opening.

Optionally, the method comprises following further step further:

Activate a 3rd hot bending musical form actuator by the first drive circuit system of correspondence, make corresponding the 3rd oar bending at the bottom of a chamber of this nozzle chambers like this;

Activate a 4th hot bending musical form actuator by the second drive circuit system of correspondence, make corresponding second oar bending at the bottom of a chamber of this nozzle chambers like this,

Wherein this first, second, third and the 4th the actuating of hot bending musical form actuator be controlled independently by first, second, third and four-wheel drive Circuits System of correspondence, to control the direction that ink droplet ejects from this nozzle opening.

Optionally, these oars are moveable relative to this nozzle opening.

Optionally, each oar defines a sections of this nozzle opening, makes this nozzle opening and these oars be relative to moveable at the bottom of this chamber like this.

In the 9th, provide a kind of to the method that dead nozzle compensates of in fixed page width printing head, one or more nozzles rows that this printhead longitudinal axis had along this printhead extends, each nozzle comprises the oar that multiple hot bending musical form activates, these oars can be configured on multiple predetermined difference position, launch ink droplet along this longitudinal axis, each nozzle has a main point position associated with it, and the method comprises the following steps:

Identify this dead nozzle;

Selection and this dead nozzle are arranged in the nozzle worked that same nozzle is arranged; And

At least some ink droplet is launched in the main point position that the nozzle that work with this dead nozzle be associated selected from this.

Optionally, the method is further comprising the steps:

The nozzle that work selected from this launches at least some ink droplet in the main point position of himself.

Optionally, this selected nozzle worked is positioned in this that dead nozzle is at a distance of the distance of one, two, three or four nozzle pitch, and one of them nozzle pitch is defined as the minimum fore-and-aft distance between a pair nozzle in same nozzle row.

Optionally, the method is further comprising the steps:

Make print media within the period of a line time to be laterally advanced past this fixing printing head row;

The first ink droplet is launched in the main point position that the nozzle that work with this dead nozzle be associated selected from this; And

The nozzle that work selected from this launches the second ink droplet in the main point position of himself,

Wherein this selected nozzle worked launches this first ink droplet and this second ink droplet within the period of a line time.

Optionally, this selected nozzle worked launches this first ink droplet and this second ink droplet with random order.

Optionally, each nozzle can be configured on multiple predetermined difference position, launch ink droplet along the axis of pitch of this printhead further.

Optionally, the method is further comprising the steps:

A print media is made laterally to be advanced past this fixed printhead with the speed of each line time row;

The first ink droplet is launched in the main point position that the nozzle that work with this dead nozzle be associated selected from this; And

Second ink droplet is launched in the main point position of himself from this selected nozzle worked,

Wherein this selected nozzle worked launches this first ink droplet and this second ink droplet within the period more than a line time less than five line times.

Optionally, the resistance by detecting the one or more actuators corresponding to this dead nozzle identifies this dead nozzle.

In the tenth, provide a kind of method of carrying out printing in fixed page width printing head with the dot density having exceeded spray nozzle density, multiple printhead ics that this fixed page width printing head docks end-to-end by crossing over page width are formed, this printhead has at least one nozzle row extended along its longitudinal axis, and the method comprises the following steps:

A kind of print media is made laterally to be advanced past this fixed printhead with the speed of each line time row;

Ink droplet is launched to form multiple continuous print print line from the multiple predetermined nozzle this nozzle row,

On multiple predetermined difference position, launch ink droplet along this longitudinal axis in the period of each comfortable line time of at least some wherein in these predetermined nozzle, make the print point density in each print line exceed spray nozzle density like this.

In the 11, provide a kind of ink jet-print head, this ink jet-print head comprises:

A substrate, this substrate comprises a drive circuit system layer;

Multiple nozzle assembly, the upper surface that the plurality of nozzle assembly is disposed in this substrate is arranged in along in this printhead one or more nozzles rows extending longitudinally, each nozzle assembly comprises: a nozzle chambers, and this nozzle chambers has at the bottom of the chamber limited by this upper surface; Push up with a chamber separated at the bottom of this chamber; And an actuator, this actuator is used for spraying ink from the nozzle opening be limited to top, this chamber;

A nozzle plate, this nozzle plate extends across this printhead, and this nozzle plate at least partially defines top, these chambeies; And

Be disposed at least one strip conductor on this nozzle plate, this strip conductor is extending longitudinally and arrange parallel with these nozzles along this printhead, wherein a common reference plane being connected in this drive circuit system layer via the multiple conductor stake extended between this drive circuit system layer and this strip conductor of this strip conductor.

Optionally, this common reference planes bound ground plane or a power plane.

Optionally, this printhead comprises at least one first strip conductor, and wherein this first strip conductor is directly connected on the multiple actuators at least one nozzle row of this first strip conductor contiguous.

Optionally, this printhead comprises at least one second strip conductor further, and wherein this second strip conductor is not directly connected to any actuator.

Optionally, this first strip conductor extends continuously along this printhead, to provide a common reference plane for each actuator in this nozzle row.

Optionally, this first strip conductor extends discontinuously along this printhead, to provide a common reference plane for one group of actuator in this nozzle row.

Optionally, this first strip conductor is positioned between a pair corresponding nozzle row, and this first strip conductor provides this common reference plane for the multiple actuators in two nozzle rows of this centering.

Optionally, each actuator has second terminal on the first terminal be directly connected on this first strip conductor and the driving transistors be connected in this drive circuit system layer.

Optionally, top, each chamber comprises at least one actuator, and this first terminal of each actuator is connected to this first strip conductor via laterally extending across multiple lateral connector of this nozzle plate relative to this first strip conductor.

Optionally, this second terminal is connected to this driving transistors via the actuator stake extended between this drive circuit system layer and this second terminal.

Optionally, these actuator stakes are perpendicular to the plane of this first strip conductor.

Optionally, top, each chamber comprises at least one removable oar, this removable oar comprises a corresponding hot bending musical form actuator, this oar is moveable at the bottom of the chamber of a corresponding nozzle chambers, to cause ink to eject from this nozzle opening, wherein this hot bending musical form actuator comprises:

A top thermoelasticity crossbeam, this top thermoelasticity crossbeam has first terminal and the second terminal; And

A passive crossbeam in bottom, the passive crossbeam in this bottom is molten on this thermoelasticity crossbeam, make when electric current is by this thermoelasticity crossbeam like this, this thermoelasticity crossbeam relative to this passive beam expansion, thus causes a corresponding oar bending at the bottom of the chamber of this nozzle chambers.

Optionally, this thermoelasticity crossbeam and this strip conductor are coplanar.

Optionally, this thermoelasticity crossbeam is made up of identical material with this strip conductor.

Optionally, this nozzle plate is made up of a kind of ceramic material.

Optionally, this drive circuit system layer comprises one to each actuator and drives field-effect transistor (FET), and each driving FET comprises: a grid, and this grid is for receiving a logical transmission signal; A source electrode, this source electrode and a power plane electrical communication; And a drain electrode, this drain electrode and a ground plane electrical communication, this driving FET is one of following:

PFET, wherein this actuator is connected between its drain electrode and this ground plane; Or

NFET, wherein this actuator is connected between power plane and its source electrode.

Optionally, this driving FET is pFET and this first strip conductor provides this ground plane; And further, wherein this first terminal of this actuator to be connected on this first strip conductor and this second terminal of this actuator is connected in the drain electrode of this pFET.

Optionally, this second strip conductor provides this power plane and is connected on the source electrode of this pFET.

Optionally, this driving FET is nFET and this first strip conductor provides power plane; And further, wherein this first terminal of this actuator to be connected on this first strip conductor and this second terminal of this actuator is connected on the source electrode of this nFET.

Optionally, this second strip conductor provides this ground plane and is connected in the drain electrode of this nFET.

In the 12, provide a kind of printhead ic for ink jet-print head (IC), this printhead ic comprises:

A substrate, this substrate comprises a drive circuit system layer;

Multiple nozzle assembly, the upper surface that the plurality of nozzle assembly is disposed in this substrate is arranged at along in this printhead IC one or more nozzles rows extending longitudinally, each nozzle assembly comprises: a nozzle chambers, and this nozzle chambers has at the bottom of the chamber limited by this upper surface; At the bottom of a chamber of separating at the bottom of this chamber; And an actuator, this actuator is used for spraying ink from the nozzle opening be limited to top, this chamber;

A nozzle plate, this nozzle plate extends across this printhead IC, and this nozzle plate at least partially defines top, these chambeies; And

Be molten at least one strip conductor on this nozzle plate, this strip conductor is extending longitudinally and arrange parallel with these nozzles along this printhead, and wherein this strip conductor is connected to a common reference plane in this drive circuit system layer via the multiple conductor stake extended between this drive circuit system layer and this strip conductor.

Optionally, this common reference planes bound ground plane or a power plane.

Optionally, this strip conductor is disposed on or below this nozzle plate.

Accompanying drawing explanation

Only multiple optional embodiment of the present invention is described by way of example with reference to accompanying drawing, in the accompanying drawings:

Fig. 1 is the side cross-sectional view of the inkjet nozzle assembly that a part after the first step sequence forming nozzle chambers sidewall is made;

The perspective view of the inkjet nozzle assembly that Fig. 2 makes for the part shown in Fig. 4;

Fig. 3 is the side cross-sectional view of the inkjet nozzle assembly that a part after the second step sequence to nozzle chambers filled polyimide is made;

The perspective view of the inkjet nozzle assembly that Fig. 4 makes for the part shown in Fig. 3;

Fig. 5 be form connector stake until top, chamber, chamber third step sequence after the side cross-sectional view of inkjet nozzle assembly made of a part;

The perspective view of the inkjet nozzle assembly that Fig. 6 makes for the part shown in Fig. 5;

Fig. 7 is the side cross-sectional view of the inkjet nozzle assembly that a part after the 4th sequence of steps forming conductive metal sheet is made;

The perspective view of the inkjet nozzle assembly that Fig. 8 makes for the part shown in Fig. 7;

Fig. 9 is the side cross-sectional view of the inkjet nozzle assembly that a part after the 5th sequence of steps of the active beam member forming hot bending musical form actuator is made;

The perspective view of the inkjet nozzle assembly that Figure 10 makes for the part shown in Fig. 9;

Figure 11 is the side cross-sectional view of the inkjet nozzle assembly that a part after formation one comprises the 6th sequence of steps of the mobile cavity top portion of this hot bending musical form actuator is made;

The perspective view of the inkjet nozzle assembly that Figure 12 makes for the part shown in Figure 11;

Figure 13 is for be deposited and the side cross-sectional view of the inkjet nozzle assembly made by a part after the 7th sequence of steps of optical patterning (photopattern) at hydrophobic polymer layer;

The perspective view of the inkjet nozzle assembly that Figure 14 makes for the part shown in Figure 13;

Figure 15 is the side cross-sectional view of the inkjet nozzle assembly be fully formed;

Figure 16 is the fragmentary, perspective view of the inkjet nozzle assembly shown in Figure 15;

Figure 17 is the plane of an inkjet nozzle with relative removable chamber top oar and a movable sprinklers opening;

Figure 18 is the plane of an inkjet nozzle with top, moveable multiple relative chamber oar for a fixed nozzle opening;

Figure 19 is the simplified electrical circuit diagram for these two actuators in inkjet nozzle shown in control Figure 17 independently;

Figure 20 is the plane of a part for the printhead comprising multiple inkjet nozzles with top, four moveable chambeies oar;

Figure 21 shows the two-dimentional printable area for one of inkjet nozzle shown in Figure 20;

Figure 22 is the side view of a part for an ink jet-print head of the spray nozzle density being configured to make print point density higher than printhead;

Figure 23 is the side view of the part being configured for the ink jet-print head that dead nozzle compensates;

Figure 24 is the plane of the ink jet-print head be made up of the printhead IC of five docking;

Figure 25 is the plane of an independent printhead IC;

Figure 26 is the perspective view of the end regions of printhead IC shown in Figure 25;

Figure 27 is the perspective view of the attachment areas between a pair printhead IC as shown in figure 25;

Figure 28 is the perspective view of the attachment areas of a pair printhead IC, and this comprises the nozzle being configured for and printing in attachment areas to printhead IC;

Figure 29 is the side view of a printhead IC, and wherein printable area is longer than corresponding nozzle row;

Figure 30 is the side view of a printhead IC, and wherein multiple end nozzle is configured for and prints in corresponding attachment areas;

Figure 31 is the plane of a part for a printhead IC with layout strip conductor on the nozzle plate;

Figure 32 is the simplified electrical circuit diagram being connected to the actuator driven on pFET;

Figure 33 is the simplified electrical circuit diagram being connected to the actuator driven on nFET; And

Figure 34 is the plane of a part with the alternative printhead IC of of the strip conductor be arranged on the nozzle plate.

Detailed description of the invention

comprise the manufacture process of the inkjet nozzle assembly of top, removable chamber oar

For the sake of completeness and according to background, now use description to manufacture a kind of process comprising the inkjet nozzle assembly (or " nozzle ") of top, removable chamber oar, top, this chamber oar has a hot bending musical form actuator.Completed inkjet nozzle assembly 100 shown in Figure 15 and Figure 16 uses hot bending musical form brake function, and a removable oar 4 wherein in top, nozzle chambers chamber bends towards substrate 1, thus causes ink to be sprayed.This manufacture process is described in the applicant comparatively early No. US2008/0309728 and US2008/0225077 U.S. publication, and the content of these publication is combined in this by reference.But will be appreciated that, corresponding manufacture process may be used for manufacturing any inkjet nozzle assembly described here and even manufactures printhead and printhead ic (IC).

The starting point that MEMS manufactures is the standard CMOS wafer with CMOS drive circuit system, and this drive circuit system is arranged among one or more upper stratas of a passivation of silicon wafers.At the end of MEMS manufacture process, this wafer is cut into multiple independent printhead ic (IC), and wherein each IC comprises a CMOS drive circuit system layer and multiple nozzle assembly.

In the sequence of steps shown in Fig. 1 and Fig. 2, at first the silicon oxide layer of 8 microns is deposited on the upper surface of substrate 1.The degree of depth of silica defines the degree of depth of a nozzle chambers 5 for inkjet nozzle.At this SiO ₂after layer deposition, carried out being etched with the multiple wall 4 of restriction, be clearly shown that in fig. 2, these walls will become the sidewall of nozzle chambers 5.

As shown in Figure 3 and Figure 4, then fill this nozzle chambers 5 with photoresist or polyimides 6, this photoresist or polyimides serve as the sacrificial support for subsequent deposition process.Polyimides 6 is rotated on wafer by standard technique, carried out UV solidification and/or roasting firmly and then carry out chemical-mechanical planarization (CMP), this chemical-mechanical planarization is at this SiO ₂the top surface place of wall 4 stops.

In fig. 5 and fig., form the top, chamber 7 of this nozzle chambers 5 and extend downwardly into multiple high conductivity actuator stake 8 of multiple electrode 2.At first, by the SiO of 1.7 microns ₂layer is deposited on polyimides 6 and wall 4.This SiO ₂layer defines the top, chamber 7 of nozzle chambers 5.Next, by using the anisotropy DRIE of standard, in wall 4, forming a pair via hole, arriving these electrodes 2 downwards.This etching makes this pair of electrodes 2 be exposed by respective via hole.Next, by using chemical plating, with high-conductive metal as copper fills these via holes.CMP is carried out, at this SiO to the copper stake 8 of deposition ₂top, chamber component 7 stops, to provide planar structure.Visible, the copper actuator stake 8 formed during electroless copper is met with corresponding electrode 2, thus provides the linear conductance path to top, chamber 7.

In figures 7 and 8, by depositing and etching the aluminium lamination of 0.3 micron and form multiple metal gasket 9.Any high-conductive metal (as aluminium, titanium etc.) can be used and should deposit with about 0.5 micron or less thickness, not cause too serious impact to the global flatness of nozzle assembly.These metal gaskets 9 be limit by etching to be positioned in actuator stake 8 and on the component 7 of top, chamber, in predetermined " bending area " of thermoelasticity initiatively beam member.Certainly, will be appreciated that, these metal gaskets 9 are not strictly necessary, and the sequence of steps shown in Fig. 7 and Fig. 8 can be eliminated from manufacture process.

In figure 9 and in figure 10, a thermoelasticity active beam member 10 is formed at SiO ₂on top, chamber 7.By being molten on this active beam member 10, SiO ₂the part on top, chamber 7 serves as the passive beam member 16 in bottom of a mechanical thermal bending-type actuator, and this mechanical thermal bending-type actuator is limited by active crossbeam 10 and passive crossbeam 16.Thermoelasticity initiatively beam member 10 can be made up of any applicable thermoelastic material (as titanium nitride, TiAlN and aluminium alloy).As the applicant of submitting on December 4th, 2002 comparatively early the 11/607th, (content of this application is combined in this by reference) that illustrate in No. 976 U. S. applications, vananum is preferred material, because vananum is combined with these favourable character of high thermal expansion, low-density and high Young's modulus.

In order to form initiatively beam member 10, deposited the active beam section bed of material of 1.5 microns at first by standard P ECVD.Subsequently, by using standard metal etching to etch this crossbeam material to limit this active thermal Spring beams component 10.After completing this metal etch, and as shown in Figure 9 and Figure 10, initiatively beam member 10 comprises the transverse beam elements 12 of a portion nozzle opening 11 and a distortion, and this transverse beam elements is connected electrically on power supply and earth electrode 2 via these actuator stakes 8 in each end.This plane transverse beam elements 12 extends from the top of first (power supply) actuator stake and bends 180 degree and return to the top of second (ground connection) actuator stake.

Still with reference to Fig. 9 and Figure 10, these metal gaskets 9 are oriented to for promoting the electric current in the region of potential high electrical resistance.Metal gasket 9 for be positioned in this transverse beam elements 12 bending area on and be sandwiched in initiatively between beam member 10 and passive beam member 16.Another metal gasket 9 is positioned between the top of actuator stake 8 and the end of transverse beam elements 12.

With reference to Figure 11 and Figure 12, then etch SiO ₂top, chamber 7 to limit a nozzle opening 13 and a moveable cantilever oar 14 completely in top, chamber.Oar 14 comprises a hot bending musical form actuator 15, and this hot bending musical form actuator itself is made up of the passive beam member 16 of this active thermal Spring beams component 10 and lower floor.Nozzle opening 13 is limited in the oar 14 on top, chamber, makes this nozzle opening be moved by this actuator between period of energization like this.As the 11/607th of the applicant, described in No. 976 U. S. applications (being combined in this by reference), nozzle opening 13 is fixing configuration relative to oar 14 is possible equally.

The standing part 18 that this oar and chamber push up by the peripheral space around this removable oar 14 or gap 17 is separated.This gap 17 allows this removable oar 14 to bend to when actuator 15 activates in nozzle chambers 5 and bends towards substrate 1.

With reference to Figure 13 and Figure 14, then on whole nozzle assembly, deposit a polymeric layer 19 and it etched again to limit this nozzle opening 13.As described in US2008/0225077 (its content is combined in this by reference), before etching this nozzle opening 13, this polymeric layer 19 can be protected with a removable thin metal layer (not shown).

Polymeric layer 19 performs some functions.First, this polymeric layer is filled with gap 17 to provide mechanical seal between the standing part 18 pushing up 7 at oar 14 and chamber.If this polymer has enough low Young's modulus, then while preventing ink from being overflowed by gap 17 between period of energization, this actuator still can bend towards substrate 1.Secondly, this polymer has high hydrophobicity, thus farthest reduction ink is gushed out and floods the tendency of the ink jet face 21 of this printhead from the nozzle chambers of relative hydropathic.3rd, this polymer serves as protective layer, thus promotes the maintenance of printhead.

As the 12/508th, described in No. 564 U. S. applications (its content is combined in this by reference), polymeric layer 19 (can be made up of as dimethyl silicone polymer (PDMS) or from any polymer of polysilsesquioxane series the siloxanes be polymerized.Polysilsesquioxane has empirical formula (RSiO usually _1.5) _n, wherein R is hydrogen or organic group, and n is the integer of the length representing polymer chain.This organic group can be C _1-12alkyl (such as methyl), C _1-10aryl (such as phenyl) or C _1-16aralkyl (such as benzyl).This polymer chain can have any length as known in the art (such as, n is from 2 to 10,000,10 to 5000 or 50 to 1000).The instantiation of suitable polysilsesquioxane is poly-(methyl silsesquioxane) and poly-(phenyl silsesquioxane).

Get back to last manufacturing step, and as shown in Figure 15 and Figure 16, etch an ink service duct 20 from the rear side of substrate 1 through to nozzle chambers 5.Align with the nozzle opening 13 in Figure 15 and Figure 16 although this ink service duct 20 is shown as, this ink service duct can be positioned to depart from this nozzle opening certainly.

After the etching of ink service duct, by using (such as) O ₂plasma carries out ashing (front side ashing or rear side ashing) and removes this polyimides 6 being filled with nozzle chambers 5, to provide nozzle assembly 100.

there is the inkjet nozzle assembly of relative top, a pair removable chamber oar

As best image in Figure 12, the inkjet nozzle assembly previously described by the applicant comprises a removable oar 14 and ejects for making ink pass nozzle opening 13.

Schematically show the inkjet nozzle assembly 200 comprising a pair relative chamber top oar 14A and 14B with plane with reference to Figure 17, this figure.For the sake of clarity, top polymeric layer 19 from described here, to remove all inkjet nozzles shown in plane.In addition, for the sake of clarity, the feature that all inkjet nozzle assemblies described here have is given similar reference number.

Oar 14A and 14B has corresponding hot bending musical form actuator 15A and 15B separately, and these hot bending musical form actuators are limited by a top thermoelasticity crossbeam and a passive crossbeam in bottom in the mode identical with above-mentioned inkjet nozzle 100.In addition, each hot bending musical form actuator (and therefore each oar) is controllable independently by drive circuit system corresponding in the CMOS drive circuit system layer of substrate 1.This allows the first actuator 15A (with therefore the first oar 14A) to be controlled independent of the second actuator 15B (with therefore the second oar 14B).

Figure 17 shows a nozzle assembly 200 with relative oar 14A and 14B, and wherein each oar limits a sections of this nozzle opening 13.Therefore, between period of energization, nozzle opening 13 will move along with these oars.

Figure 18 shows the alternative nozzle assembly 210 with relative oar 14A and 14B, and wherein each oar is moveable relative to nozzle opening 13.In other words, nozzle opening 13 is limited among the standing part on top, chamber 7.Certainly, will be appreciated that, two kinds of nozzle assemblies 200 and 210 as shown in figs. 17 and 18 all within the scope of the present invention.

Figure 19 shows the ball bearing made figure of the relative power amount of each actuator 15A and 15B for controlling to be supplied to nozzle assembly 200.When using potentiometer 202 to change the quantity of power being supplied to actuator 15B, actuator 15A receives total power.

Use the experimental measurement of one group of different potentials meter resistance to prove, different maximum oar speed is by reducing to be supplied to the quantity of power of actuator 15B and attainable.Such as, when quantity of power is equal, maximum oar speed is approximately identical.But when increasing this potentiometer resistance, the maximum oar speed of oar 14B significantly reduces relative to oar 14A.Such as, the maximum oar speed of oar 14B can be reduced to less than 75%, less than 50% or less than 25% of the maximum oar speed of oar 14A.

This species diversity of maximum oar speed and then have ink droplet directionality affects very significantly.Therefore, by controlling the relative power amount being supplied to each actuator 15A and 15B, the direction of ejecting in drops out from nozzles opening 13 can be controlled.In an experiment, ink droplet direction can upper extremely about 4 the some distances of deflection on printer page.Therefore, can be embodied as the point of-4 ,-3 ,-2 ,-1,0 ,+1 ,+2 ,+3 and+4 from a nozzle apart from (and all intervenient non-integer point positions), wherein " 0 " is defined as spraying by the ink droplet perpendicular to ink jet face the main point position produced.As will be discussed in more detail below, this result has important derivative impact for the design of page width ink jet printhead.

Certainly, for experiment purpose, use potentiometer 202 to make it possible to the scope easily investigating power parameter.But, sprayed by the ink droplet that also can realize deflection as the timing controlling to be supplied to the alternative of the power of each actuator or additional ways and control brake function.Such as, actuator 15A can receive its actuated signal before or after actuator 15B receives its actuated signal, thus cause asymmetric oar to move and deflection ink droplet spray.

In addition, the power being fed to each actuator can be controlled by the pulse width changing drive singal.In fact, the method that this change is supplied to the power of each actuator may be the most feasible when using CMOS drive circuit system, especially when hope changes " aloft (on-the-fly) " ink droplet direction.

there is the inkjet nozzle assembly of top, four removable chambeies oar

Nozzle assembly 200 and 210 shown in Figure 17 and Figure 18 makes it possible to control along an axis the direction that ink droplet sprays.Typically (and the most usefully), the longitudinal axis that this axis will be elongated page width printing head, multiple nozzle row is along this Axis Extension.But, by using the further control that can realize ink droplet directionality relative to the plural oar of nozzle opening arrangement.

Figure 20 shows a part for the printhead comprising multiple inkjet nozzle assembly 220, and each nozzle assembly 220 comprises four removable oar 14A, 14B, 14C and 14D arranging relative to this fixed nozzle opening 13.The multiple damping columns 221 stretched out from the sidewall of nozzle chambers are auxiliary controls the recharging, especially when one of actuator lost efficacy of ink droplet injection characteristics and chamber.

In the oar of four shown in Figure 20 arranges, ink droplet is sprayed and can be moved by the coordination of these four oars and along one or two axis (longitudinal axis and axis of pitch) deflections.Therefore, ink droplet can be ejected on any position in the two-dimentional district of print media, and this position has the circle or area elliptica of launching nozzle typically at its barycenter place.

Figure 21 shows the part of nozzle row with multiple nozzle 220, and these nozzles are spaced apart from each other along the longitudinal axis that this nozzle is arranged the distance of a nozzle pitch.The oval district 222 of print media shows such region: ink droplet can be emitted on this region by transmitting nozzle (" 0 ") being positioned the barycenter place in this oval district.As shown in figure 21, this transmitting nozzle (" 0 ") can be transmitted on any some position in this two-dimensional elliptic shape district 222.

The ability that transversely axis (namely perpendicular to nozzle row longitudinal axis) launches ink droplet means, from nozzle assembly 220 spray ink droplet do not need to arrange with same nozzle other nozzles strictly synchronously occur.Typically, all transmitting nozzles in a page width printing head must be launched within the period of a line time, and this line time is the time that the horizontal distance advancing through first row of printing of print media spends.But a transmitting nozzle with the ability of the axis of pitch injection ink droplet along printhead can be configured to launched ink droplet a print line before or after this nozzle and still make this ink droplet aim at this same print line.Therefore, nozzle assembly 220 makes page width printing head design can have than nozzle assembly 200 and 210 greater flexibility.

In addition, top, multiple chamber oar adds total injection power that can supply each nozzle.Therefore, the designs of nozzles of four oars is more suitable for the injection of viscous fluid than the design of two oars or an oar.Similarly, the designs of nozzles of two oars is more effective than the design of an oar.

Can also by increasing the length of actuator crossbeam and/or providing the serpentine shaped actuator crossbeam with multiple turnover to increase the power of each individual actuators.Described by serpentine shaped actuator crossbeam has in the 7th of the applicant the, 611, No. 225 United States Patent (USP), the content of this patent is combined in this by reference.Therefore, the present invention also provides and is suitable for the high power inkjet nozzle that injection has the fluid of relative high viscosity (such as, high than water viscosity).

there is the ink jet-print head of high dot density

In typical page width printing head, each transmitting nozzle (that is, being selected for carrying out the nozzle launched by the print data received by printhead) is launched once in a line time.In addition, each nozzle ejects ink droplet, the main point position making ink droplet drop on like this to be associated with this nozzle.When a nozzle is injected on its main point position be associated, ink droplet sprays normally perpendicular to the ink jet face of printhead.Therefore, in traditional page width printing head, the spray nozzle density of printhead is corresponding with the dot density of printer page.Such as, page width nozzle row with nozzle pitch n will print a line point had apart from n, and wherein nozzle pitch and point are apart from the distance between the Distance geometry neighbor point between the barycenter being defined as adjacent nozzles respectively.

But inkjet nozzle assembly 200,210 and 220 makes printhead to be designed such that, print point is apart from the nozzle pitch being less than printhead, and therefore print point density has exceeded the spray nozzle density of printhead.

Figure 22 shows a part for page width printing head 230, and wherein print point distance is the nozzle pitch being less than printhead.Show three nozzles 231 in same nozzle row, these nozzles are spaced apart with nozzle pitch n.These nozzles can be made up of (such as) nozzle assembly 210 (as shown in Figure 18) separately.Ink droplet from each nozzle can be ejected on multiple difference positions of on print media 235 along the longitudinal axis represented by arrow 236.As shown in Figure 22, Figure 23, Figure 29 and Figure 30, print media 235 is fed out paper (that is, be horizontal towards observer and relative to the longitudinal axis of printhead or printhead IC).

Still with reference to Figure 22, each nozzle 231 was configured on two difference positions, spray ink within the period of a line time: some position is sprayed by the ink of deflection to produce for being sprayed the main point position 232, another position 234 that produce by the ink droplet perpendicular to printhead plane, and the ink of this deflection is sprayed and made ink droplet drop on the centre of these main point positions.Therefore, the point of generation is less than nozzle pitch n apart from d, makes print point density exceed the spray nozzle density of printhead like this.

In example shown in Figure 22, nozzle pitch n is a twice of distance d, but it is to be understood that nozzle pitch n is configurable to make n>d with any ratio of some distance d for printhead.Such as, if each nozzle prints in its main point position and two other positions (such as, on the either side of main point position) in a line time, so realization is printed with the point of n=3d distance.

Attainable actual point is apart from only recharging by ink chamber speed to be fed through the speed of printhead restriction relative to print media.The modeling of the applicant shows, and 60 pages per minute time, ink chamber can be recharged at least twice in a line time, to allow the twice of the dot density usually realized with typical fixed page width printing head to print.Certainly, the speed (such as, to 30ppm) of the print media that slows down feeding will allow higher dot density.

Like this, fixing page width printing head can realize the versatility similar with scan-type printhead.In scan-type printhead, it is well known that print point density can increase by printing with comparatively low velocity, because scan-type printhead strides across the line scanning and have an opportunity according to sweep speed to print on many difference positions of often advancing.Fixing page width printing head 230 shown in Figure 22 has similar versatility, although and print speed is more faster than traditional scan-type printhead, but still can realize printing with very high dot density (such as, 3200dpi).

dead nozzle compensates

The applicant is described previously the mechanism compensated for the dead nozzle in fixed page width printing head.As used herein, " dead nozzle " represents the nozzle not spraying any ink or the nozzle spraying ink when controlling not enough to drop speeds or ink droplet directionality.Usually " dead nozzle " is caused (this fault is the Nozzle failures reason the most easily identified via detection circuitry) by actuator fault, but also may be caused by the non-removable tamper in nozzle opening or the non-removable chip on ink jet face, these blockings or fragment hide or part overlaid nozzle opening.

Typically, the dead nozzle in fixed page width printing head compensates to be needed to be arranged by the nozzle of redundancy and carries out printing (as at the the 7th, 465, No. 017 and the 7th, describe in 252, No. 353 United States Patent (USP)s, the content of these patents is combined in this by reference).This shortcoming had is, this printhead needs one or more nozzle rows of redundancy, thus inevitably increases printhead cost.

Alternately, the visual effect of dead nozzle can be compensated by making a nozzle of contiguous dead nozzle launch (preferably " excessive exercise ") (as the 6th, describe in 575, No. 549 United States Patent (USP)s, the content of this patent is combined in this by reference).In fact, this relates to printing the amendment of mask farthest to reduce the overall visual impact of dead nozzle.

Inkjet nozzle assembly 200,210 and 220 makes it possible to carry out dead nozzle compensation when not needing redundam nozzle to arrange or changing and print mask.Figure 23 shows a part for a page width printing head 240, is wherein compensated a dead nozzle 242 by the nozzle 243 worked of a vicinity in same nozzle row.

Show three nozzles in same nozzle row, each free nozzle assembly 210 of these nozzles is formed (as shown in figure 18).Central nozzle 242 is dead or otherwise breaks down, and the adjacent nozzles 243 and 244 on the either side of central nozzle 242 normally works.

From each nozzle 243 and 244 worked ink droplet longitudinally axis 236 can be injected on print media 235 (towards observer's feeding, multiple difference positions as shown in Figure 23).On the main point position 247 that ink droplet is injected in himself by nozzle 243 within the period of a line time and the main point position 248 that is associated with dead nozzle 242.Therefore, nozzle 243 compensates the dead nozzle 242 in same nozzle row by printing two points within the period of a line time.Certainly, in follow-up line time, nozzle 244 can replace nozzle 243 to compensate dead nozzle 242, makes nozzle 243 share compensation work amount to dead nozzle like this together with 244.In addition, depend on that attainable deflection ink droplet sprays degree, this one or more compensating jet does not need directly to be close to dead nozzle.Such as, this one or more compensating jet can be positioned to and dead nozzle at a distance of-4 ,-3 ,-2 ,-1 ,+1 ,+2 ,+3 or+4 nozzle pitches, thus make many different spray nozzles can share compensation work amount to a dead nozzle.

Figure 23 shows needs nozzle 243 on the main point position 248 be associated with dead nozzle 242, to launch the sight of ink droplet in the main point position 247 of himself in a line time.Certainly, printing mask mainly indicates and needs which nozzle to launch within the period of a line time.Need dead nozzle to launch in specific line time if print mask, then an applicable nozzle worked can preferentially compensate when needs are not launched within the period of this specific line time on the main point position of himself.Like this, the selection of compensating jet farthest reduces the needs to the multiple nozzles that work adjacent with dead nozzle further.In fact, in many examples, according to this printing mask, needs compensating jet is likely avoided to launch twice in a line time.

Alternately, the printhead be made up of multiple nozzle assembly 220 can realize dead nozzle and compensate when not necessarily making compensating jet launch in the identical line time distributing to this dead nozzle.Because nozzle assembly 220 can be transmitted into have on any some position in two-dimentional district (comprise the some position of the axis of pitch along printhead), so can be deferred to a rear line time to the compensation of dead nozzle or advance to previous line time.This allows to realize better versatility in the selection and timing of compensating jet.

Dead nozzle identifies typically by the resistance detecting the one or more actuators corresponding to this dead nozzle.The method advantageously can carry out dynamic dead nozzle identification and compensation.But, possible for identifying the additive method optical technology of predetermined print patterns (such as, use) of dead nozzle yes.

there is the page width printing head of connection

Except the monoblock type page width printing head suffering the impact of low-down wafer yield, the page width printing head of the applicant is usually docking together end-to-end by multiple printhead IC is crossed over a page width and constructs.

Figure 24 shows the arrangement of five printhead IC 251A to 251E, and these printheads dock end-to-end and form a photograph width printhead (photowidthprinthead) 250, and Figure 25 shows single printhead IC 251.To be appreciated that, longer page width printing head (such as, A4 printhead and wide format print head) can by will being more docking together and manufacturing by multiple print head IC251.The advantage had that multiple printhead IC is docking together in this way farthest reduces print zone width, this so that eliminate requirement of aliging point-device between print media with printhead.But, and with reference to Figure 26 and Figure 27, the shortcoming that the printhead IC be docking together has be the printhead IC that is difficult to cross over docking between attachment areas 257 print.This is because nozzle 255 can not be fabricated onto until the outermost edge 258 of each printhead IC, because " dead space " 259 inevitably measured must be maintained in edge, be docking together for realizing structural soundness and allowing to beat multiple print head IC.Therefore, the actual nozzle pitch between the IC of docking is inevitably greater than a nozzle pitch in the nozzle row of printhead IC.

Therefore, page width printing head must be designed to cross over attachment areas seamlessly print a little.Referring again to Figure 24 to Figure 27, the applicant described so far for by the printhead IC adjoined to construct the solution of the problem of page width printing head.As best image in Figure 27, the gap between the nozzle triangle 253 of displacement is filled with effectively from the nozzle of contiguous docking printhead IC.The timing (that is, by making these nozzles than the more late transmitting of nozzle row of its correspondence) of the nozzle 255 launched in the triangle 253 through displacement by adjustment, can be crossed over this attachment areas 257 and seamlessly print a little.This function through the nozzle triangle 253 of displacement is at the the 7th, 390, No. 071 and the 7th, and at large described in 290, No. 852 United States Patent (USP)s, the content of these patents is combined in this by reference.

Figure 27 also show multiple adhesive pad 75 along longitudinal edge location of printhead IC and multiple alignment primary standard substance 76.Adhesive pad 75 connects via lead-in wire bonding (not shown), to provide power and logical signal to the CMOS drive circuit system in printhead IC.Alignment primary standard substance 76 allows to use the optical alignment instrument (not shown) be applicable to that the printhead IC of docking is in alignment with each other during printhead configuration.

Although the nozzle triangle 253 through displacement provides the abundant solution of carrying out the problem printed for leap attachment areas, but still there is some problem.First, the nozzle triangle 253 through displacement must be supplied ink, and sharp-pointed kink in rear side ink service duct extending longitudinally may cause adverse effect to ink to the supply of the nozzle in triangle 253.The second, the nozzle triangle 253 through displacement reduces wafer yield, because this nozzle triangle through displacement adds the width of each printhead IC 251; Effectively, each printhead IC must have the width being large enough to hold r+2 nozzle row, even if this printhead IC only has r nozzle row.

Nozzle assembly 200,210 and 220 described here due to its longitudinally axis to spray the ability of ink droplet in multiple predetermined difference position, provide and cross over each attachment areas for printhead IC being linked together simultaneously and maintain the solution of consistent point apart from this problem.In addition, and as shown in figure 28, the printhead IC 260 with continual nozzle row (that is, not having the nozzle triangle 253 through displacement shown in Figure 27) can be docking together.The design of this printhead IC not only facilitates the supply that ink is arranged along each nozzle, and improves wafer yield.Substantially, there is the possible method that two kinds may be used for compensating " absence " nozzle crossing over this attachment areas 257.

In first method, multiple nozzles that the either end towards printhead IC 260 is located are configured to be partial to corresponding end to spray ink droplet, and the nozzle simultaneously towards the centralized positioning of printhead IC 260 sprays ink droplet perpendicular to ink jet face.With reference to Figure 29, show printhead IC 260, the nozzle 264 wherein towards right hand edge location is configured to deflection right hand edge injection ink droplet.Similarly, towards the nozzle 262 of left hand edge local be configured to inclined left on hand edge to spray ink droplet.Nozzle 266 towards the centralized positioning of printhead IC is configured to spray ink droplet perpendicular to ink jet face.Although nozzle 262,264 and 266 has different ink droplet injection characteristics, certainly, they be all Figure 18,19 or 20 shown types, have control ink droplet direction capability nozzle meaning on, these nozzles are all identical.

The degree of deflection depends on the distance at specific nozzle and printhead IC 260 center.Be positioned those nozzles that printhead IC extremely locates to be configured to spray ink droplet more on the bias than those nozzles towards printhead IC centralized positioning.It is this that from the center of printhead IC 260, outside opening gradually makes it possible to cross over the length of printhead IC and maintains consistent some distance.

Although show turgidly in Figure 29 " opening " that ink droplet sprays, will be appreciated that, as this result of opening, the equalization point distance of the ink droplet of injection can slightly larger than the nozzle pitch of printhead IC 260.But when there being hundreds of or thousands of nozzles in each nozzle row, the dot density caused will be insignificant relative to the minimizing of spray nozzle density.Typically, open although ink droplet sprays, equalization point is apart from going out greatly the nozzle pitch than printhead less than 1%.

Because the ink droplet of the deflection on printhead IC 260 edge sprays, the actual printable area of specific nozzle row is the length of being longer than this nozzle row.This printable area can than nozzle platoon leader's 1 to 8 nozzle pitch.This printable area extended allows printhead IC to print in the attachment areas 257 between adjacent printhead IC 260, thus eliminates the nozzle triangle 253 through displacement shown in Figure 27.

Certainly, possible is equally that the ink droplet only having the nozzle being positioned printhead IC one end place to have deflection sprays.But the width of typical attachment areas 257 (that is, in the printhead IC of a pair docking, from the width between the nozzle in same nozzle row) gives timing, and this arrangement that the ink droplet that having typically shown in Figure 29 is opened sprays is preferred.This farthest adds the degree that adjacent multipair printhead IC can compensate " absence " nozzle in attachment areas 257.

The advantage that the printhead IC 260 that the ink droplet that having shown in Figure 29 is opened sprays has is: when there is not dead nozzle and compensating or need with higher point density prints, each nozzle is only launched once in a line time, the length of the nozzle row that to have made the length of printable area extend beyond corresponding simultaneously.In an alternative, printhead IC 270 can be configured to the selected nozzle at the extreme place of arranging at each nozzle is launched once in a line time, to compensate " absence " nozzle in this attachment areas.

With reference to Figure 30, show printhead IC 270, wherein most of nozzle sprays ink droplet perpendicular to the ink jet face of this printhead IC.But, be configured on main point position 274, spray ink droplet (that is, perpendicular to ink jet face) at least one nozzle 272 at the extreme place of a nozzle row and spray ink droplet on the secondary point position 276 of the corresponding end of deflection printhead IC.In other words, nozzle 272 is configured in the mode similar with the nozzle 231 in high density printing head 230, in a line time, sprays two ink droplets.But these nozzles 272 maintain consistent point apart from d, nozzle pitch n is made typically to equal the point of the whole printable area crossing over printhead IC 270 apart from d like this.

Although printhead IC 270 has the advantage of not sacrificing a distance relative to nozzle pitch, this printhead also has following shortcoming: need the nozzle 272 at the two ends place of arranging at each nozzle with the twice of the frequency of other nozzles 271 to spray ink.Therefore, more easily there is wear-out failure in nozzle 272, and therefore printhead IC 260 is more general preferred as solution printhead IC be docking together.

the MEMS/CMOS improved is integrated

An importance of MEMS print head design is the integrated of MEMS actuator and lower floor CMOS drive circuit system.Occur to make the brake function of nozzle, electric current from a driving transistors in CMOS drive circuit system layer upwards must flow in MEMS layer, through this actuator and also get back to CMOS drive circuit system layer (such as, arriving the ground plane in cmos layer) downwards.When having thousands of actuator in a printhead IC, the efficiency of current flow path should maximize the loss farthest reducing overall print head efficiency.

Up to now, the applicant has described the nozzle assembly with a pair linear stake extended between MEMS actuator (being positioned in top, nozzle chambers chamber) and lower floor CMOS drive circuit system layer.In fact, show the manufacture of these parallel actuator stakes in fig. 5 and fig., and be described at this.Contrary with more tortuous current channel, the linear copper stake extending up to MEMS layer has shown and has improved printhead efficiency.But, still exist and room for improvement is carried out to the electrical efficiency of the MEMS printhead (and printhead IC) of the applicant.

Be called as " ground bounce " with the problem controlling to be associated from the thousands of brake functions of public CMOS power plane and ground plane.Ground bounce is commonly known problem in IC design, and this problem especially worsens owing to there being a large amount of device to be powered between public power plane and ground plane.Ground bounce describes undesirable voltage drop of crossing over power plane or ground plane usually, and this undesirable voltage drop can produce from many different sources.The Typical sources of ground bounce comprises: series resistance (" IR pressure drop "), self-induction and the mutual inductance between ground plane and power plane.These phenomenons can promote ground bounce by the electrical potential difference undesirably reduced between power plane and ground plane separately.The electrical potential difference reduced inevitably causes the electrical efficiency of integrated circuit to reduce, and is more particularly cause the electrical efficiency of printhead IC to reduce in this case.But will be appreciated that, the arrangement of power plane and ground plane and configuration and fundamentally may affect the gross efficiency of ground bounce and printhead with its connection.

With reference to Figure 31, show in plan view a part for printhead IC 300, this part has extending longitudinally and is parallel to multiple strip conductors of nozzle row.For the sake of clarity, uppermost polymeric layer 19 has been removed in Figure 31.

Among multiple nozzles rows that multiple nozzle 210 (being described in detail in conjunction with Figure 18) longitudinal axis be arranged at along printhead IC 300 extends.Figure 31 shows a pair nozzle row 302A and 302B, but printhead IC 300 can comprise more multiinjector row certainly.Nozzle row 302A and 302B is paired and departs from each other, and one of them nozzle row 302A is responsible for printing " even number " point and another nozzle row 302B is responsible for printing " odd number " point.In these printheads of the applicant, nozzle row is typically paired in this way, as more clearly visible in such as Figure 28.

First strip conductor 303 is positioned between nozzle row 302A and 302B.First strip conductor 303 is deposited on the nozzle plate 304 of printhead IC 300, and this nozzle plate defines top, nozzle chambers chamber 7 (see Figure 10).Therefore, the first strip conductor 303 thermoelasticity crossbeam 10 that is usual and these actuators 15 is coplanar and can be formed by jointly depositing with this thermoelasticity crossbeam material (as vananum) during MEMS manufactures.The electric conductivity of strip conductor 303 can be improved further by the deposition of another conductive metal layer (as copper, titanium, aluminium etc.) during MEMS manufacture.Such as, but will be appreciated that, metal level can deposit (as the metal gasket 9 shown in Fig. 8 deposits jointly) before the deposition of this thermoelasticity crossbeam material.Can use the simple modification of the etching mask for metal gasket 9 to limit strip conductor 303.Therefore, strip conductor 303 can comprise multiple metal level to optimize electric conductivity.

Each actuator 15 has first terminal, and this first terminal is connected directly to the first strip conductor 303 via a lateral connector 305.As will be visible in Figure 31, each actuator from two nozzles row 302A and 302B has the first terminal being connected to the first strip conductor 303.The common reference plane that first strip conductor 303 is connected in lower floor CMOS drive circuit system layer via multiple conductor stake 307, these conductor stakes 307 manufacture similarly with the actuator stake 8 that composition graphs 6 describes above.Therefore, strip conductor 303 can extend continuously along printhead IC 300, to provide common reference plane for each actuator in this pair nozzle row.To discuss more in detail as following, depend on and use nFET or pFET in CMOS drive circuit system, the common reference plane between nozzle row 302A and 302B can be power plane or ground plane.

Alternately, strip conductor 303 can extend discontinuously along printhead IC 300, and wherein each part of strip conductor provides common reference plane for one group of actuator.Strip conductor separate into problem time, discontinuous strip conductor 303 may be preferred, but strip conductor still works in the same manner as described above.

Second terminal of each actuator 15 is connected this via the actuator stake 8 extended between actuator with CMOS drive circuit system layer and drives on FET to the lower floor in CMOS drive circuit system layer.Each actuator stake 8 is with actuator stake 8 all fours shown in Fig. 6 and formed in the same manner during MEMS manufactures.Therefore, each actuator 15 can be controlled individually by the driving FET of correspondence.

In Figure 31, a pair second strip conductor 310A and 310B are also extending longitudinally and be in the both sides of this pair nozzle row 302A and 302B along printhead IC 300.Second strip conductor 310A and 310B supplements this first strip conductor 303.In other words, if the first strip conductor 303 is a power plane, then these second strip conductors are ground plane.On the contrary, if the first strip conductor 303 is ground plane, then these second strip conductors are power plane.Second strip conductor 310A and 310B is not directly connected on actuator 15; But they are connected to the corresponding reference planes (power supply or ground) in CMOS drive circuit system layer via multiple conductor stake 307.

But will be appreciated that, these second strip conductors 310 can be formed during MEMS manufactures according to the mode being quite analogous to above-mentioned first strip conductor 303.Therefore, these second strip conductors 310 are usually made up of thermoelasticity crossbeam material and can are that multilayer is to strengthen electric conductivity.

First strip conductor 303 and the second strip conductor 310 mainly work the series resistance of the reference planes of the correspondence reduced in CMOS drive circuit system layer.Therefore, by providing the multiple strip conductors connected with the corresponding reference planes parallel coupled electrical in this cmos layer in MEMS layer, by the simple application of Ohm's law, the all-in resistance of these reference planes is significantly reduced.Usually, these strip conductors are configured for the resistance farthest reducing them, such as, by maximizing its width or the degree of depth as much as possible.

The series resistance of ground plane or power plane can be reduced by least 25%, at least 50%, at least 75% or at least 90% due to these strip conductors in MEMS layer.Similarly, the self-induction of ground plane or power plane can be reduced similarly.This remarkable reduction of ground plane and the series resistance both power plane and self-induction contributes to the ground bounce farthest reducing printhead IC 300, thus improves printhead efficiency.The present inventor understands, and in printhead IC 300 shown in Figure 31, the mutual inductance between power plane and ground plane is also reduced, but the quantitative analysis of mutual inductance needs complicated modeling, that is out the scope of this disclosure.

Figure 32 and Figure 33 provides the simplification cmos circuit figure of pFET and nFET driving transistors.As shown in figure 31, this driving transistors (nFET or pFET) is connected directly to the second terminal of each actuator 15 via actuator stake 8.

In Figure 32, actuator 15 is connected between the drain electrode of a pFET and ground plane (" Vss ").Power plane (" Vpos ") is connected to the source electrode of this pFET, and grid RL transmits.When pFET receives low-voltage at grid place (due to NAND grid), electric current flows through this pFET and actuator 15 is activated.In this pFET circuit, the first terminal of this actuator is connected to the ground plane provided by the first strip conductor 303, and the second terminal of this actuator is connected to this pFET simultaneously.Therefore, these second strip conductors provide power plane.

In fig. 33, actuator 15 is connected between power plane (" Vpos ") and the source electrode of a nFET.Ground plane (" Vss ") is connected to the drain electrode of this nFET, and grid RL transmits.When this nFET receives high voltage at grid place (due to AND grid), electric current flows through this nFET and actuator 15 is activated.In this nFET circuit, the first terminal of this actuator is connected to the power plane provided by the first strip conductor 303, and the second terminal of this actuator is connected to this nFET simultaneously.Therefore, these second strip conductors provide ground plane.

But will be appreciated that, according to Figure 32 and Figure 33, the first strip conductor 303 and the second strip conductor 310 are compatible with pFET or nFET.

Certainly, as described above, the advantage of strip conductor is used never to be limited to the nozzle 210 shown in Figure 31.Any printhead IC with the actuator of any type can be benefited in principle from above-mentioned strip conductor.

Figure 34 shows printhead IC 400, and this printhead comprises multiple nozzle 100 (adopt with in conjunction with the similar type of the nozzle described in Figure 16), and the plurality of nozzle is arranged among a pair nozzle row 302A and 302B extending longitudinally.First strip conductor 303 extends between this pair nozzle row 302A and 302B, and these second strip conductors 310A and 310B is positioned at this pair nozzle row both sides.Each actuator 15 of corresponding nozzle 100 has: the first last terminal, and it is connected on the first strip conductor 303 via a lateral connector 305; And the second last terminal, it is connected on lower floor FET via an actuator stake 8.Therefore, will be appreciated that, and provide in the meaning of common reference plane at strip conductor 303 and 310 owing to being connected in the corresponding reference planes in lower floor CMOS drive circuit system, printhead IC 400 and printhead IC 300 work similarly.In addition, the first strip conductor 303 is connected directly in a terminal of each actuator, so as nozzle row 302A and 302B in each actuator common reference plane is provided.

Those of ordinary skill in the art will be appreciated that, when not deviating from when broadly described the spirit or scope of the present invention, can make many changes and/or amendment to the present invention illustrated in a particular embodiment.Therefore, these embodiments of the present invention all should think illustrative in all respects and nonrestrictive.

Claims (20)

1. an inkjet nozzle assembly, this inkjet nozzle assembly comprises:

For holding a nozzle chambers of ink, this nozzle chambers comprises at the bottom of a chamber and top, a chamber, and this chamber is pushed up to have and is defined in one of them nozzle opening; And

Multiple removable oar, described removable oar defines top, this chamber at least partially, the plurality of oar is activatable to cause ink droplet to eject from this nozzle opening, and each oar comprises a hot bending musical form actuator, and this hot bending musical form actuator comprises:

A top thermoelasticity crossbeam, this top thermoelasticity crossbeam is connected on drive circuit system; And

A passive crossbeam in bottom, the passive crossbeam in this bottom is molten on this thermoelasticity crossbeam, and make like this when electric current is by this thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus cause a corresponding oar bending at the bottom of the chamber of this nozzle chambers

Wherein each actuator is controllable independently by the drive circuit system of correspondence, makes the direction that ink droplet ejects from this nozzle opening be controllable by independently moving of each oar like this.

2. inkjet nozzle assembly as claimed in claim 1, wherein, this nozzle assembly is arranged on one substrate, and wherein a passivation layer of this substrate defines at the bottom of the chamber of this nozzle chambers.

3. inkjet nozzle assembly as claimed in claim 1, wherein, be separated and multiple sidewall at the bottom of top, this chamber and this chamber this chamber push up and at the bottom of this chamber between extend to limit this nozzle chambers.

4. inkjet nozzle assembly as claimed in claim 1, wherein, this inkjet nozzle assembly comprises a pair relative oar, and described oar is positioned on the either side of this nozzle opening.

5. inkjet nozzle assembly as claimed in claim 1, wherein, this inkjet nozzle assembly comprises two to relative oar, and described oar positions relative to this nozzle opening.

6. inkjet nozzle assembly as claimed in claim 1, wherein, described oar is moveable relative to this nozzle opening.

7. inkjet nozzle assembly as claimed in claim 1, wherein, each oar defines a sections of this nozzle opening, makes this nozzle opening and described oar be relative to moveable at the bottom of this chamber like this.

8. inkjet nozzle assembly as claimed in claim 1, wherein, this thermoelasticity crossbeam is made up of a kind of aluminium alloy.

9. inkjet nozzle assembly as claimed in claim 1, wherein, the material that this passive crossbeam is selected from lower group by least one is formed, and this group is made up of the following: silica, silicon nitride and silicon oxynitride.

10. inkjet nozzle assembly as claimed in claim 1, wherein, this passive crossbeam comprises the first passive crossbeam in top be made up of silica and the second passive crossbeam in bottom be made up of silicon nitride.

11. inkjet nozzle assemblies as claimed in claim 1, wherein, top, this chamber is applied a kind of polymeric material.

12. inkjet nozzle assemblies as claimed in claim 1, wherein, described actuator is by controlling following at least one item and controllable independently:

Lead to the timing of multiple drive singal of each in described actuator, to provide the coordination of the plurality of oar to move; And

Lead to the power of multiple drive singal of each in described actuator.

13. inkjet nozzle assemblies as claimed in claim 12, wherein, the power of drive singal is by following at least one control:

The voltage of described drive singal; And

The pulse width of described drive singal.

14. 1 kinds of ink jet-print head integrated circuits, this ink jet-print head integrated circuit comprises:

A substrate comprising drive circuit system; And

Arrange multiple inkjet nozzle assemblies over the substrate, each inkjet nozzle assembly comprises:

For holding a nozzle chambers of ink, this nozzle chambers comprises at the bottom of the chamber limited by the upper surface of this substrate and top, a chamber, and this chamber defines a nozzle opening in top; And

Multiple removable oar, described oar defines top, this chamber at least partially, the plurality of oar is activatable to cause ink droplet to eject from this nozzle opening, and each oar comprises a hot bending musical form actuator, and this hot bending musical form actuator comprises:

Be connected to a top thermoelasticity crossbeam on this drive circuit system; And

A passive crossbeam in bottom, the passive crossbeam in this bottom is molten to this thermoelasticity crossbeam, and make like this when electric current is by this thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus cause a corresponding oar bending at the bottom of the chamber of this nozzle chambers

Wherein each actuator is controllable independently by corresponding drive circuit system, makes the direction that ink droplet ejects from this nozzle opening be controllable by independently moving of each oar like this.

15. ink jet-print head integrated circuits as claimed in claim 16, wherein, the upper surface of this substrate is limited by a passivation layer, and this passivation layer is disposed on a drive circuit system layer.

16. 1 kinds for controlling the method in the direction that ink droplet ejects from inkjet nozzle assembly, this inkjet nozzle assembly is the inkjet nozzle assembly according to any one of claim 1-13, and the method comprises the following steps:

Activate a first hot bending musical form actuator by the first drive circuit system of correspondence, make corresponding first oar bending at the bottom of a chamber of this nozzle chambers like this;

Activate a second hot bending musical form actuator by the second drive circuit system of correspondence, make corresponding second oar bending at the bottom of a chamber of this nozzle chambers like this; And

Ink droplet is ejected thus from this nozzle opening,

Wherein the actuating of this first hot bending musical form actuator and this second hot bending musical form actuator is controlled independently by this first drive circuit system and this second drive circuit system, to control the direction that ink droplet ejects from this nozzle opening.

17. methods as claimed in claim 16, wherein, this first actuator and this second actuator control independently by controlling following at least one item:

Lead to the timing of the multiple drive singal of each in the first actuator and this second actuator, to provide the coordination of the plurality of oar to move; And

Lead to the power of the multiple drive singal of each in described actuator, to cause the asymmetric movement of the plurality of oar.

18. methods as claimed in claim 17, wherein, before this second actuator, activate this first actuator to provide ink droplet to spray in a first direction, or before this first actuator, activate this second actuator to provide ink droplet to spray in a second direction.

19. methods as claimed in claim 17, wherein, are supplied to the power of this first actuator to be greater than the power being supplied to this second actuator, or are supplied to the power of this second actuator to be greater than the power being supplied to this first actuator.

20. methods as claimed in claim 16, wherein, the method is used for following at least one item:

Compensate the dead nozzle in printhead;

Increase the print point density of printhead to exceed spray nozzle density;

The print zone of printhead extending longitudinally; And

Print in the attachment areas of adjacent printhead ic.