CN105058366A - Four-degree-of freedom piezoelectric micro-clamp - Google Patents
Four-degree-of freedom piezoelectric micro-clamp Download PDFInfo
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- CN105058366A CN105058366A CN201510513950.9A CN201510513950A CN105058366A CN 105058366 A CN105058366 A CN 105058366A CN 201510513950 A CN201510513950 A CN 201510513950A CN 105058366 A CN105058366 A CN 105058366A
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Abstract
The invention discloses a four-degree-of-freedom piezoelectric micro-clamp. The four-degree-of-freedom piezoelectric micro-clamp has the following advantages: the piezoelectric micro-clamp can enable each clamp finger to realize actions in a clamping direction and a direction perpendicular to the clamping direction, that is, each clamp finger has degrees of freedom in two directions; and the whole piezoelectric micro-clamp has four degrees of freedom, so that part front end execution mechanisms of micro-assembly and micro-operation systems can be saved, the design difficulty and complexity of the system are reduced, the mass and the volume of the system are decreased, and the system cost is reduced.
Description
Technical field
The present invention relates to micro-/ nano field of locating technology, belong to the end effector in the micro-/ nano navigation systems such as micro-Assembly of the parts, cellular micromanipulation, particularly relate to a kind of four-degree-of-freedom piezoelectric microgripper.
Background technology
Micro-clamp is the end effector that can produce micron or nanometer-scale motions precision and Motion Resolution rate, and it can be applicable in the cutting edge technology such as MEMS, bioengineering field.In MEMS, the operations such as micro-clamp can pick up micro-part such as micro-axle, micro-cell electron capture detector and the microcomponent such as micro motor, Micropump, carrying; In bioengineering, micro-clamp is used for catching and release cells, also can combine with microshock probe, realizes injecting in cell or extracting a certain composition from cell.
The each pincers of current micro-clamp refer to the free degree only with a clamping direction, whole micro-clamp only has two frees degree, only can realize the action clamping direction, the action in other direction must be realized by the executing agency of its front end, this just makes the complexity of whole micro assemby and micro OS and design difficulty strengthen, and cost improves.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of free degree making each pincers refer to realize both direction, whole micro-clamp is made to have four frees degree, to reduce complexity and the design difficulty of micro assemby and micro OS, the four-degree-of-freedom piezoelectric microgripper reduced costs.
The present invention solves the problems of the technologies described above adopted technical scheme: a kind of four-degree-of-freedom piezoelectric microgripper, comprise piezoelectric ceramic wafer and lower piezoelectric ceramic wafers, described upper piezoelectric ceramic wafer and described lower piezoelectric ceramic wafers bond up and down and fix and mutually insulated, described upper piezoelectric ceramic wafer comprises support portion and is integrally connected to pincers finger, upper left and the upper right pincers finger of described upper support portion, it is symmetrical along the center line of described upper support portion that described pincers finger, upper left and described upper right clamp finger, the free end of the free end of described pincers finger, upper left and described upper right pincers finger is wholely set the upper extension that can be used for installing different clamping head respectively, described lower piezoelectric ceramic wafers comprises lower support portion and is integrally connected to pincers finger, lower-left and the pincers finger, bottom right in described lower support portion, described pincers finger, lower-left and described pincers finger, bottom right are symmetrical along the center line in described lower support portion, the free end of described pincers finger, lower-left and the free end of described pincers finger, bottom right are wholely set the lower extension that can be used for installing different clamping head respectively, described upper support portion and described lower support portion, described pincers finger, upper left and described pincers finger, lower-left, described upper right pincers finger and described pincers finger, bottom right, align respectively with described lower extension in described upper extension, the non-adhering side of described pincers finger, upper left is fixed with separate and the first upper left electrode be arranged side by side, second upper left electrode and the 3rd upper left electrode, the first described upper left electrode, the second described upper left electrode and the 3rd described upper left electrode respectively correspondence are connected with the first upper left electrode lead-out pins, second upper left electrode lead-out pins and the 3rd upper left electrode lead-out pins, the non-adhering side of described upper right pincers finger is fixed with separate and the first upper right electrode be arranged side by side, second upper right electrode and the 3rd upper right electrode, the first described upper right electrode, the second described upper right electrode and the 3rd described upper right electrode respectively correspondence are connected with the first upper right electrode lead-out pins, second upper right electrode lead-out pins and the 3rd upper right electrode lead-out pins, the first described upper left electrode lead-out pins, the second described upper left electrode lead-out pins, the 3rd described upper left electrode lead-out pins, the first described upper right electrode lead-out pins, the second described upper right electrode lead-out pins and the 3rd described upper right electrode lead-out pins are independently fixedly installed in the non-adhering side of described upper support portion, the non-adhering side of described pincers finger, lower-left is fixed with separate and the first lower-left electrode be arranged side by side, second lower-left electrode and the 3rd lower-left electrode, the first described lower-left electrode, the second described lower-left electrode and the 3rd described lower-left electrode respectively correspondence are connected with the first lower-left electrode lead-out pins, second lower-left electrode lead-out pins and the 3rd lower-left electrode lead-out pins, the non-adhering side of described pincers finger, bottom right is fixed with separate and the first bottom right electrode be arranged side by side, second bottom right electrode and the 3rd bottom right electrode, the first described bottom right electrode, the second described bottom right electrode and the 3rd described bottom right electrode respectively correspondence are connected with the first bottom right electrode lead-out pins, second bottom right electrode lead-out pins and the 3rd bottom right electrode lead-out pins, the first described lower-left electrode lead-out pins, the second described lower-left electrode lead-out pins, the 3rd described lower-left electrode lead-out pins, the first described bottom right electrode lead-out pins, the second described bottom right electrode lead-out pins and the 3rd described bottom right electrode lead-out pins are independently fixedly installed in the non-adhering side in described lower support portion, the first described upper left electrode and the first described lower-left electrode, the second described upper left electrode and the second described lower-left electrode, the 3rd described upper left electrode and the 3rd described lower-left electrode, the first described upper right electrode and the first described bottom right electrode, the second described upper right electrode and the second described bottom right electrode, the 3rd described upper right electrode and described the 3rd bottom right electrode consistency from top to bottom respectively, the first described upper left electrode lead-out pins is electrically connected with the 3rd described lower-left electrode lead-out pins, the second described upper left electrode lead-out pins is electrically connected with the second described lower-left electrode lead-out pins, the 3rd described upper left electrode lead-out pins is electrically connected with the first described lower-left electrode lead-out pins, the first described upper right electrode lead-out pins is electrically connected with the 3rd described bottom right electrode lead-out pins, the second described upper right electrode lead-out pins is electrically connected with the second described bottom right electrode lead-out pins, the 3rd described upper right electrode lead-out pins is electrically connected with the first described bottom right electrode lead-out pins, the adhesive surface of described pincers finger, lower-left is fixed with the 4th lower-left electrode, the 4th described lower-left electrode and the second described upper left electrode, the second described lower-left electrode consistency from top to bottom, the adhesive surface of described pincers finger, bottom right is fixed with the 4th bottom right electrode, the 4th described bottom right electrode and the second described upper right electrode, the second described bottom right electrode consistency from top to bottom, the 4th described lower-left electrode is connected with the 4th lower-left electrode lead-out pins, the 4th described bottom right electrode is connected with the 4th bottom right electrode lead-out pins, the 4th described lower-left electrode lead-out pins and the 4th described bottom right electrode lead-out pins are independently fixed on the adhesive surface in described lower support portion.
The first described upper left electrode lead-out pins and the first described lower-left electrode lead-out pins, the second described upper left electrode lead-out pins and the second described lower-left electrode lead-out pins, the 3rd described upper left electrode lead-out pins and the 3rd described lower-left electrode lead-out pins, the first described upper right electrode lead-out pins and the first described bottom right electrode lead-out pins, the second described upper right electrode lead-out pins and the second described bottom right electrode lead-out pins, the 3rd described upper right electrode lead-out pins and described the 3rd bottom right electrode lead-out pins consistency from top to bottom respectively.
The position of the end of described the 4th lower-left electrode lead-out pins described in the correspondence of upper support portion and the end of the 4th described bottom right electrode lead-out pins is provided with breach, to facilitate the wiring of the 4th lower-left electrode lead-out pins and the 4th bottom right electrode lead-out pins, also make the appearance looks elegant of whole piezoelectric microgripper.
Bondd by insulating cement between the adhesive surface of described upper piezoelectric ceramic wafer and the adhesive surface of described lower piezoelectric ceramic wafers fixing, both the quantity of driving power can have been reduced, the output characteristics of piezoelectric microgripper can be improved again, otherwise, if to bond two plates with conducting resinl, so as shown in Fig. 9 (a), pincers refer to when producing the displacement in clamping direction, just need pincers to refer to that the ground electrode (representing with " 0 " in figure) of both sides changes drive motors "-U into
y", and the 4th lower-left electrode clamped lower-left on finger or pincers finger, bottom right adhesive surface or the 4th bottom right electrode are as electrode publicly, this publicly electrode not only make each pincers refer to increase by exports "-U
y" driving power of voltage, and likely make generation clamp direction with perpendicular to the mutual crosstalk of the driving voltage clamping direction displacement, thus affect the output characteristics of piezoelectric microgripper.
Compared with prior art, advantage of the present invention is that this piezoelectric microgripper can make each pincers refer to can realize clamping direction and the action perpendicular to clamping direction, namely each pincers refer to the free degree with both direction, whole piezoelectric microgripper has four frees degree, thus the part front end executing agency of micro assemby and micro OS can be saved, reduce design difficulty and the complexity of system, reduce quality and the volume of system, also reduce the cost of system; In addition, due to the adhesive surface of the adhesive surface of pincers finger, upper left and upper right pincers finger all not having electrode, the adhesive surface of the adhesive surface of pincers finger, upper left and pincers finger, lower-left can be avoided, the adhesive surface of adhesive surface that upper right clamps finger and pincers finger, bottom right causes because electrode does not line up when boning to clamp and refer to clamping direction and intercoupling perpendicular to the output displacement clamped on direction.
Accompanying drawing explanation
Fig. 1 is top view of the present invention;
Fig. 2 is upward view of the present invention;
Fig. 3 is the A-A sectional view that in Fig. 1, left pincers refer to;
Fig. 4 is the A-A sectional view that in Fig. 1, right pincers refer to;
Fig. 5 is the structural representation of the non-adhering side of upper piezoelectric ceramic wafer of the present invention;
Fig. 6 is the structural representation of the adhesive surface of upper piezoelectric ceramic wafer of the present invention;
Fig. 7 is the structural representation of the non-adhering side of lower piezoelectric ceramic wafers of the present invention;
Fig. 8 is the structural representation of the adhesive surface of lower piezoelectric ceramic wafers of the present invention;
Fig. 9 (a), (b), (c) are respectively the principle key diagram that pincers of the present invention refer to realize different action.
Detailed description of the invention
Below in conjunction with accompanying drawing embodiment, the present invention is described in further detail.
Embodiment one: as shown in the figure, a kind of four-degree-of-freedom piezoelectric microgripper, comprise piezoelectric ceramic wafer 1 and lower piezoelectric ceramic wafers 2, bondd by insulating cement 3 between the adhesive surface of upper piezoelectric ceramic wafer 1 and the adhesive surface of lower piezoelectric ceramic wafers 2 fixing, upper piezoelectric ceramic wafer 1 comprises support portion 11 and is integrally connected to pincers finger, upper left 12 and the upper right pincers finger 13 of support portion 11, it is symmetrical along the center line of upper support portion 11 that pincers finger, upper left 12 and upper right clamp finger 13, the free end of the free end of pincers finger, upper left 12 and upper right pincers finger 13 is wholely set the upper extension 14 that can be used for installing different clamping head respectively, lower piezoelectric ceramic wafers 2 comprises lower support portion 21 and is integrally connected to pincers finger, lower-left 22 and the pincers finger, bottom right 23 in lower support portion 21, pincers finger, lower-left 22 and pincers finger, bottom right 23 are symmetrical along the center line in lower support portion 21, the free end of pincers finger, lower-left 22 and the free end of pincers finger, bottom right 23 are wholely set the lower extension 24 that can be used for installing different clamping head respectively, upper support portion 11 and lower support portion 21, pincers finger, upper left 12 and pincers finger, lower-left 22, upper right pincers finger 13 and pincers finger, bottom right 23, align respectively with lower extension 24 in upper extension 14, the non-adhering side of pincers finger, upper left 12 is fixed with separate and the first upper left electrode 12-1 be arranged side by side, second upper left electrode 12-2 and the 3rd upper left electrode 12-3, first upper left electrode 12-1, second upper left electrode 12-2 and the 3rd upper left electrode 12-3 respectively correspondence is connected with the first upper left electrode lead-out pins 12-1-1, second upper left electrode lead-out pins 12-2-1 and the 3rd upper left electrode lead-out pins 12-3-1, the non-adhering side of upper right pincers finger 13 is fixed with separate and the first upper right electrode 13-1 be arranged side by side, second upper right electrode 13-2 and the 3rd upper right electrode 13-3, first upper right electrode 13-1, second upper right electrode 13-2 and the 3rd upper right electrode 13-3 respectively correspondence is connected with the first upper right electrode lead-out pins 13-1-1, second upper right electrode lead-out pins 13-2-1 and the 3rd upper right electrode lead-out pins 13-3-1, first upper left electrode lead-out pins 12-1-1, second upper left electrode lead-out pins 12-2-1, 3rd upper left electrode lead-out pins 12-3-1, first upper right electrode lead-out pins 13-1-1, second upper right electrode lead-out pins 13-2-1 and the 3rd upper right electrode lead-out pins 13-3-1 is independently fixedly installed in the non-adhering side of support portion 11, the non-adhering side of pincers finger, lower-left 22 is fixed with separate and the first lower-left electrode 22-1 be arranged side by side, second lower-left electrode 22-2 and the 3rd lower-left electrode 22-3, first lower-left electrode 22-1, second lower-left electrode 22-2 and the 3rd lower-left electrode 22-3 respectively correspondence is connected with the first lower-left electrode lead-out pins 22-1-1, second lower-left electrode lead-out pins 22-2-1 and the 3rd lower-left electrode lead-out pins 22-3-1, the non-adhering side of pincers finger, bottom right 23 is fixed with separate and the first bottom right electrode 23-1 be arranged side by side, second bottom right electrode 23-2 and the 3rd bottom right electrode 23-3, first bottom right electrode 23-1, second bottom right electrode 23-2 and the 3rd bottom right electrode 23-3 respectively correspondence is connected with the first bottom right electrode lead-out pins 23-1-1, second bottom right electrode lead-out pins 23-2-1 and the 3rd bottom right electrode lead-out pins 23-3-1, first lower-left electrode lead-out pins 22-1-1, second lower-left electrode lead-out pins 22-2-1, 3rd lower-left electrode lead-out pins 22-3-1, first bottom right electrode lead-out pins 23-1-1, second bottom right electrode lead-out pins 23-2-1 and the 3rd bottom right electrode lead-out pins 23-3-1 is independently fixedly installed in the non-adhering side in lower support portion 21, first upper left electrode 12-1 and the first lower-left electrode 22-1, second upper left electrode 12-2 and the second lower-left electrode 22-2, 3rd upper left electrode 12-3 and the 3rd lower-left electrode 22-3, first upper right electrode 13-1 and the first bottom right electrode 23-1, second upper right electrode 13-2 and the second bottom right electrode 23-2, 3rd upper right electrode 13-3 and the 3rd bottom right electrode 23-3 is consistency from top to bottom respectively, first upper left electrode lead-out pins 12-1-1 is electrically connected with the 3rd lower-left electrode lead-out pins 22-3-1, second upper left electrode lead-out pins 12-2-1 is electrically connected with the second lower-left electrode lead-out pins 22-2-1, 3rd upper left electrode lead-out pins 12-3-1 is electrically connected with the first lower-left electrode lead-out pins 22-1-1, first upper right electrode lead-out pins 13-1-1 is electrically connected with the 3rd bottom right electrode lead-out pins 23-3-1, second upper right electrode lead-out pins 13-2-1 is electrically connected with the second bottom right electrode lead-out pins 23-2-1, 3rd upper right electrode lead-out pins 13-3-1 is electrically connected with the first bottom right electrode lead-out pins 23-1-1, the adhesive surface of pincers finger, lower-left 22 is fixed with the 4th lower-left electrode 22-4, 4th lower-left electrode 22-4 and the second upper left electrode 12-2, second lower-left electrode 22-2 consistency from top to bottom, the adhesive surface of pincers finger, bottom right 23 is fixed with the 4th bottom right electrode 23-4, 4th bottom right electrode 23-4 and the second upper right electrode 13-2, second bottom right electrode 23-2 consistency from top to bottom, 4th lower-left electrode 22-4 is connected with the 4th lower-left electrode lead-out pins 22-4-1, 4th bottom right electrode 23-4 is connected with the 4th bottom right electrode lead-out pins 23-4-1, 4th lower-left electrode lead-out pins 22-4-1 and the 4th bottom right electrode lead-out pins 23-4-1 is independently fixed on the adhesive surface in lower support portion 21, the position of the corresponding end of the 4th lower-left electrode lead-out pins 22-4-1, upper support portion 11 and the end of the 4th bottom right electrode lead-out pins 23-4-1 is provided with breach 15.
Embodiment two: a kind of four-degree-of-freedom piezoelectric microgripper, comprise piezoelectric ceramic wafer 1 and lower piezoelectric ceramic wafers 2, bondd by insulating cement 3 between the adhesive surface of upper piezoelectric ceramic wafer 1 and the adhesive surface of lower piezoelectric ceramic wafers 2 fixing, upper piezoelectric ceramic wafer 1 comprises support portion 11 and is integrally connected to pincers finger, upper left 12 and the upper right pincers finger 13 of support portion 11, it is symmetrical along the center line of upper support portion 11 that pincers finger, upper left 12 and upper right clamp finger 13, the free end of the free end of pincers finger, upper left 12 and upper right pincers finger 13 is wholely set the upper extension 14 that can be used for installing different clamping head respectively, lower piezoelectric ceramic wafers 2 comprises lower support portion 21 and is integrally connected to pincers finger, lower-left 22 and the pincers finger, bottom right 23 in lower support portion 21, pincers finger, lower-left 22 and pincers finger, bottom right 23 are symmetrical along the center line in lower support portion 21, the free end of pincers finger, lower-left 22 and the free end of pincers finger, bottom right 23 are wholely set the lower extension 24 that can be used for installing different clamping head respectively, upper support portion 11 and lower support portion 21, pincers finger, upper left 12 and pincers finger, lower-left 22, upper right pincers finger 13 and pincers finger, bottom right 23, align respectively with lower extension 24 in upper extension 14, the non-adhering side of pincers finger, upper left 12 is fixed with separate and the first upper left electrode 12-1 be arranged side by side, second upper left electrode 12-2 and the 3rd upper left electrode 12-3, first upper left electrode 12-1, second upper left electrode 12-2 and the 3rd upper left electrode 12-3 respectively correspondence is connected with the first upper left electrode lead-out pins 12-1-1, second upper left electrode lead-out pins 12-2-1 and the 3rd upper left electrode lead-out pins 12-3-1, the non-adhering side of upper right pincers finger 13 is fixed with separate and the first upper right electrode 13-1 be arranged side by side, second upper right electrode 13-2 and the 3rd upper right electrode 13-3, first upper right electrode 13-1, second upper right electrode 13-2 and the 3rd upper right electrode 13-3 respectively correspondence is connected with the first upper right electrode lead-out pins 13-1-1, second upper right electrode lead-out pins 13-2-1 and the 3rd upper right electrode lead-out pins 13-3-1, first upper left electrode lead-out pins 12-1-1, second upper left electrode lead-out pins 12-2-1, 3rd upper left electrode lead-out pins 12-3-1, first upper right electrode lead-out pins 13-1-1, second upper right electrode lead-out pins 13-2-1 and the 3rd upper right electrode lead-out pins 13-3-1 is independently fixedly installed in the non-adhering side of support portion 11, the non-adhering side of pincers finger, lower-left 22 is fixed with separate and the first lower-left electrode 22-1 be arranged side by side, second lower-left electrode 22-2 and the 3rd lower-left electrode 22-3, first lower-left electrode 22-1, second lower-left electrode 22-2 and the 3rd lower-left electrode 22-3 respectively correspondence is connected with the first lower-left electrode lead-out pins 22-1-1, second lower-left electrode lead-out pins 22-2-1 and the 3rd lower-left electrode lead-out pins 22-3-1, the non-adhering side of pincers finger, bottom right 23 is fixed with separate and the first bottom right electrode 23-1 be arranged side by side, second bottom right electrode 23-2 and the 3rd bottom right electrode 23-3, first bottom right electrode 23-1, second bottom right electrode 23-2 and the 3rd bottom right electrode 23-3 respectively correspondence is connected with the first bottom right electrode lead-out pins 23-1-1, second bottom right electrode lead-out pins 23-2-1 and the 3rd bottom right electrode lead-out pins 23-3-1, first lower-left electrode lead-out pins 22-1-1, second lower-left electrode lead-out pins 22-2-1, 3rd lower-left electrode lead-out pins 22-3-1, first bottom right electrode lead-out pins 23-1-1, second bottom right electrode lead-out pins 23-2-1 and the 3rd bottom right electrode lead-out pins 23-3-1 is independently fixedly installed in the non-adhering side in lower support portion 21, first upper left electrode 12-1 and the first lower-left electrode 22-1, second upper left electrode 12-2 and the second lower-left electrode 22-2, 3rd upper left electrode 12-3 and the 3rd lower-left electrode 22-3, first upper right electrode 13-1 and the first bottom right electrode 23-1, second upper right electrode 13-2 and the second bottom right electrode 23-2, 3rd upper right electrode 13-3 and the 3rd bottom right electrode 23-3 is consistency from top to bottom respectively, first upper left electrode lead-out pins 12-1-1 and the first lower-left electrode lead-out pins 22-1-1, second upper left electrode lead-out pins 12-2-1 and the second lower-left electrode lead-out pins 22-2-1, 3rd upper left electrode lead-out pins 12-3-1 and the 3rd lower-left electrode lead-out pins 22-3-1, first upper right electrode lead-out pins 13-1-1 and the first bottom right electrode lead-out pins 23-1-1, second upper right electrode lead-out pins 13-2-1 and the second bottom right electrode lead-out pins 23-2-1, 3rd upper right electrode lead-out pins 13-3-1 and the 3rd bottom right electrode lead-out pins 23-3-1 is consistency from top to bottom respectively, first upper left electrode lead-out pins 12-1-1 is electrically connected with the 3rd lower-left electrode lead-out pins 22-3-1, second upper left electrode lead-out pins 12-2-1 is electrically connected with the second lower-left electrode lead-out pins 22-2-1, 3rd upper left electrode lead-out pins 12-3-1 is electrically connected with the first lower-left electrode lead-out pins 22-1-1, first upper right electrode lead-out pins 13-1-1 is electrically connected with the 3rd bottom right electrode lead-out pins 23-3-1, second upper right electrode lead-out pins 13-2-1 is electrically connected with the second bottom right electrode lead-out pins 23-2-1, 3rd upper right electrode lead-out pins 13-3-1 is electrically connected with the first bottom right electrode lead-out pins 23-1-1, the adhesive surface of pincers finger, lower-left 22 is fixed with the 4th lower-left electrode 22-4, 4th lower-left electrode 22-4 and the second upper left electrode 12-2, second lower-left electrode 22-2 consistency from top to bottom, the adhesive surface of pincers finger, bottom right 23 is fixed with the 4th bottom right electrode 23-4, 4th bottom right electrode 23-4 and the second upper right electrode 13-2, second bottom right electrode 23-2 consistency from top to bottom, 4th lower-left electrode 22-4 is connected with the 4th lower-left electrode lead-out pins 22-4-1, 4th bottom right electrode 23-4 is connected with the 4th bottom right electrode lead-out pins 23-4-1, 4th lower-left electrode lead-out pins 22-4-1 and the 4th bottom right electrode lead-out pins 23-4-1 is independently fixed on the adhesive surface in lower support portion 21, the position of the corresponding end of the 4th lower-left electrode lead-out pins 22-4-1, upper support portion 11 and the end of the 4th bottom right electrode lead-out pins 23-4-1 is provided with breach 15.
Refer to for one of them pincers of piezoelectric microgripper of the present invention below, the principle that it realizes different action be specifically described:
In Fig. 9,
represent perpendicular to paper and the direction of sensing paper outside, i.e. x forward;
represent perpendicular to paper and the direction of sensing paper inside, i.e. x negative sense.
As shown in Fig. 9 (a), by one group of inverse piezoelectric effect make pincers refer to produce clamping direction action principle by: given wafer electric polarization (electric polarization P represents) direction under, when size is U
ydriving voltage act on when clamping arranged on left and right sides (Fig. 9 (a) in dotted line frame shown in) of referring to simultaneously, because pincers refer to that electric field (the electric field strength E y represents) direction in left side is contrary with electric polarization direction, this part is extended along x forward; And refer to that the direction of an electric field on right side is identical with electric polarization direction owing to clamping, and this part then shortens along x negative sense, so whole pincers refer to just produce bending micrometric displacement along y-axis forward, i.e. and the action in generation clamping direction.
As shown in Fig. 9 (b), the principle produced perpendicular to the action in clamping direction is by another group inverse piezoelectric effect, pincers to be referred to: under same wafer electric polarised direction, when size is U
zdriving voltage act on pincers when referring to upper lower wafer (Fig. 9 (b) in dotted line frame shown in) of mid portion simultaneously, because electric field (the electric field strength E z represents) direction of upper wafer is contrary with electric polarization direction, this Partial wafer extends along x forward; And due to the direction of an electric field of lower wafer identical with electric polarization direction, this Partial wafer then shortens along x negative sense, so whole pincers refer to just produce bending micrometric displacement along z-axis negative sense, namely produces the action perpendicular to clamping direction.
As shown in Fig. 9 (c), the principle with two frees degree is by the inverse piezoelectric effect of two groups of spatial vertical intersections, pincers to be referred to: as driving voltage U
y, U
zact on pincers when referring to, whole pincers refer to just produce two-dimensional micro-displacement along y-axis forward and z-axis negative sense simultaneously simultaneously.
Claims (4)
1. a four-degree-of-freedom piezoelectric microgripper, comprise piezoelectric ceramic wafer and lower piezoelectric ceramic wafers, described upper piezoelectric ceramic wafer and described lower piezoelectric ceramic wafers bond up and down and fix and mutually insulated, described upper piezoelectric ceramic wafer comprises support portion and is integrally connected to pincers finger, upper left and the upper right pincers finger of described upper support portion, it is symmetrical along the center line of described upper support portion that described pincers finger, upper left and described upper right clamp finger, the free end of the free end of described pincers finger, upper left and described upper right pincers finger is wholely set the upper extension that can be used for installing different clamping head respectively, described lower piezoelectric ceramic wafers comprises lower support portion and is integrally connected to pincers finger, lower-left and the pincers finger, bottom right in described lower support portion, described pincers finger, lower-left and described pincers finger, bottom right are symmetrical along the center line in described lower support portion, the free end of described pincers finger, lower-left and the free end of described pincers finger, bottom right are wholely set the lower extension that can be used for installing different clamping head respectively, described upper support portion and described lower support portion, described pincers finger, upper left and described pincers finger, lower-left, described upper right pincers finger and described pincers finger, bottom right, align respectively with described lower extension in described upper extension, the non-adhering side that it is characterized in that described pincers finger, upper left is fixed with separate and the first upper left electrode be arranged side by side, second upper left electrode and the 3rd upper left electrode, the first described upper left electrode, the second described upper left electrode and the 3rd described upper left electrode respectively correspondence are connected with the first upper left electrode lead-out pins, second upper left electrode lead-out pins and the 3rd upper left electrode lead-out pins, the non-adhering side of described upper right pincers finger is fixed with separate and the first upper right electrode be arranged side by side, second upper right electrode and the 3rd upper right electrode, the first described upper right electrode, the second described upper right electrode and the 3rd described upper right electrode respectively correspondence are connected with the first upper right electrode lead-out pins, second upper right electrode lead-out pins and the 3rd upper right electrode lead-out pins, the first described upper left electrode lead-out pins, the second described upper left electrode lead-out pins, the 3rd described upper left electrode lead-out pins, the first described upper right electrode lead-out pins, the second described upper right electrode lead-out pins and the 3rd described upper right electrode lead-out pins are independently fixedly installed in the non-adhering side of described upper support portion, the non-adhering side of described pincers finger, lower-left is fixed with separate and the first lower-left electrode be arranged side by side, second lower-left electrode and the 3rd lower-left electrode, the first described lower-left electrode, the second described lower-left electrode and the 3rd described lower-left electrode respectively correspondence are connected with the first lower-left electrode lead-out pins, second lower-left electrode lead-out pins and the 3rd lower-left electrode lead-out pins, the non-adhering side of described pincers finger, bottom right is fixed with separate and the first bottom right electrode be arranged side by side, second bottom right electrode and the 3rd bottom right electrode, the first described bottom right electrode, the second described bottom right electrode and the 3rd described bottom right electrode respectively correspondence are connected with the first bottom right electrode lead-out pins, second bottom right electrode lead-out pins and the 3rd bottom right electrode lead-out pins, the first described lower-left electrode lead-out pins, the second described lower-left electrode lead-out pins, the 3rd described lower-left electrode lead-out pins, the first described bottom right electrode lead-out pins, the second described bottom right electrode lead-out pins and the 3rd described bottom right electrode lead-out pins are independently fixedly installed in the non-adhering side in described lower support portion, the first described upper left electrode and the first described lower-left electrode, the second described upper left electrode and the second described lower-left electrode, the 3rd described upper left electrode and the 3rd described lower-left electrode, the first described upper right electrode and the first described bottom right electrode, the second described upper right electrode and the second described bottom right electrode, the 3rd described upper right electrode and described the 3rd bottom right electrode consistency from top to bottom respectively, the first described upper left electrode lead-out pins is electrically connected with the 3rd described lower-left electrode lead-out pins, the second described upper left electrode lead-out pins is electrically connected with the second described lower-left electrode lead-out pins, the 3rd described upper left electrode lead-out pins is electrically connected with the first described lower-left electrode lead-out pins, the first described upper right electrode lead-out pins is electrically connected with the 3rd described bottom right electrode lead-out pins, the second described upper right electrode lead-out pins is electrically connected with the second described bottom right electrode lead-out pins, the 3rd described upper right electrode lead-out pins is electrically connected with the first described bottom right electrode lead-out pins, the adhesive surface of described pincers finger, lower-left is fixed with the 4th lower-left electrode, the 4th described lower-left electrode and the second described upper left electrode, the second described lower-left electrode consistency from top to bottom, the adhesive surface of described pincers finger, bottom right is fixed with the 4th bottom right electrode, the 4th described bottom right electrode and the second described upper right electrode, the second described bottom right electrode consistency from top to bottom, the 4th described lower-left electrode is connected with the 4th lower-left electrode lead-out pins, the 4th described bottom right electrode is connected with the 4th bottom right electrode lead-out pins, the 4th described lower-left electrode lead-out pins and the 4th described bottom right electrode lead-out pins are independently fixed on the adhesive surface in described lower support portion.
2. a kind of four-degree-of-freedom piezoelectric microgripper as claimed in claim 1, it is characterized in that the first described upper left electrode lead-out pins and the first described lower-left electrode lead-out pins, the second described upper left electrode lead-out pins and the second described lower-left electrode lead-out pins, the 3rd described upper left electrode lead-out pins and the 3rd described lower-left electrode lead-out pins, the first described upper right electrode lead-out pins and the first described bottom right electrode lead-out pins, the second described upper right electrode lead-out pins and the second described bottom right electrode lead-out pins, the 3rd described upper right electrode lead-out pins and described the 3rd bottom right electrode lead-out pins consistency from top to bottom respectively.
3. a kind of four-degree-of-freedom piezoelectric microgripper as claimed in claim 1, is characterized in that the position of the end of described the 4th lower-left electrode lead-out pins described in the correspondence of upper support portion and the end of the 4th described bottom right electrode lead-out pins is provided with breach.
4. a kind of four-degree-of-freedom piezoelectric microgripper as claimed in claim 1, it is characterized in that is bondd by insulating cement between the adhesive surface of described upper piezoelectric ceramic wafer and the adhesive surface of described lower piezoelectric ceramic wafers fixes.
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