CN105044204B - A kind of sulfur hexafluoride gas concentration detecting system and method based on ultrasound examination - Google Patents

A kind of sulfur hexafluoride gas concentration detecting system and method based on ultrasound examination Download PDF

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CN105044204B
CN105044204B CN201510289331.6A CN201510289331A CN105044204B CN 105044204 B CN105044204 B CN 105044204B CN 201510289331 A CN201510289331 A CN 201510289331A CN 105044204 B CN105044204 B CN 105044204B
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刘强
孙志周
何军田
刘序军
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Shandong luruan Digital Technology Co.,Ltd. smart energy branch
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Shandong Luneng Intelligence Technology Co Ltd
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Abstract

The invention discloses a kind of sulfur hexafluoride gas concentration detecting system and method based on ultrasound examination, including:SF6Supervising device by communication bus respectively with SF6And O2Concentration detection module connects with fan control module;Power transfer module by power bus respectively with SF6And O2Concentration detection module connects with fan control module, SF6Supervising device is provided with control panel.Beneficial effect of the present invention:Environmental factor in measurement process, human factor and measurement error caused by hardware product qualitative factor are avoided, by solidifying ultrasonic measurement parameter and introducing compensating parameter so that measurement result is more accurate.

Description

A kind of sulfur hexafluoride gas concentration detecting system and method based on ultrasound examination
Technical field
The present invention relates to concentration of sulfur hexafluoride detection technique field, more particularly to it is a kind of based on the lithium of ultrasound examination Sulphur gas concentration detection system and method.
Background technology
SF6Gas is obtained a wide range of applications with its excellent insulation and arc quenching characteristic in power system.But in electric power SF in equipment running process6Gas leakage can damage to human body, therefore accurately detect SF6Gas concentration is power equipment peace The guarantee of full reliability service.
Detection in world wide to sulfur hexafluoride has gas chromatography, thermal conductivity factor method, electronics drift method, the interference of light Method, electrion process, infrared absorption, electrochemical process, thermal conductivity method, ultrasonic method etc..But gas chromatography, thermal conductivity factor method, Electronics drift method, optical interferometry not only need the instrument and equipment of costliness, and require that operator has at a relatively high operation level, Hinder its popularization in GIS room sulfur hexafluoride leak detections field.And electrion process, infrared absorption, electrochemistry Although method thermal conductivity method etc. can form system and be detected, exist in various degree short life, stability are poor, have secondary pollution or Accuracy of detection is low or the deficiencies of the intellectual property of coreless.Ultrasonic method is that have not simultaneous interpretation in different medium using ultrasound The characteristic of speed is broadcast to detect the content of sulfur hexafluoride, precision is high, and stability is good, and secondary pollution is not present.And easily The On-line sampling system of system is realized, is adapted to use in industrial environment.
At present, there is following deficiency in existing ultrasonic method sulfur hexafluoride gas concentration monitoring system and detection method:
First, the calculating in the parameter needed for actual production manufacturing process, confirmation condition can not provide phase in engineering Parameter, which calculates, in the parameter answered, such as theory need to provide two different temperatures environment, and this environment can not be steady when converting actual product It is fixed to provide.
Secondly, the human error that existing method have ignored among production product is present, such as:It is poor that sensor installation is present It is different, if can not be removed with this artificial difference of the method disposal solidifying parameter, if single product individually tests cure parameter, the One test environment can not provide, and second greatly increases the production time;And this error can directly result in the inclined of final result Difference is huge.
Again, existing equipment need to provide two ultrasonic wave passages and be contrasted, an inspection passage, a contrast passage, Contrast passage needs to seal, and equipment is cumbersome and can not ensure to contrast the reliability of passage.
Finally, because different using sensor in actual production, sensor itself error is also different, and existing method can not be gone Except this error, if as sensor clipping room is necessarily up to away from reaching, the energy that receiving portion receives is very weak, it is weak to loss detection most First multiple signals, the parameter that the method calculates in the case where losing this signal is wrong value.
The content of the invention
The purpose of the present invention is to overcome above-mentioned the deficiencies in the prior art, there is provided a kind of hexafluoro based on ultrasound examination Change sulphur gas concentration detection system and method, the system and method, which eliminates human factor, hardware factor etc. in product conversion, to be caused Measurement error, obtain accurately sulfur hexafluoride gas concentration testing result.
To achieve the above object, the present invention uses following technical proposals:
A kind of sulfur hexafluoride gas concentration detecting system based on ultrasound examination, including:SF6Supervising device, power supply turn Change the mold block, some SF6And O2Concentration detection module and fan control module;
The SF6Supervising device by communication bus respectively with SF6And O2Concentration detection module and fan control module connect Connect;Power transfer module by power bus respectively with SF6And O2Concentration detection module connects with fan control module, the SF6 Supervising device is provided with control panel.
The SF6Supervising device includes:Microcontroller and the voice module being connected with microcontroller, infrared detector, Alarm module and communication interface;When the infrared detector detects that personnel pass through, start voice module and carry out voice message.
The SF6Display screen, indicator lamp, Cao Zuoanjian, blower fan is respectively equipped with the control panel of supervising device to force to open Dynamic button and instantaneous speech power;The SF6Supervising device is connected with host computer and display screen respectively by communication interface.
The SF6And O2Concentration detection module includes:Single-chip microcomputer, ultrasound detection circuit, oxygen detection circuit, humidity inspection Slowdown monitoring circuit, temperature sensing circuit and communication module;The ultrasound detection circuit, oxygen detection circuit, humidity measuring circuit, temperature Degree detection circuit and communication module are connected with single-chip microcomputer respectively;The communication module passes through communication bus and SF6Supervising device connects Connect.
The ultrasound detection circuit includes:Ultrasonic wave sends circuit and ultrasonic wave receiving circuit;Electricity is sent in ultrasonic wave Connected between the ultrasonic probe of road and ultrasonic wave receiving circuit with the insulation tube with air admission hole;
The ultrasonic wave sends circuit and ultrasonic wave receiving circuit is connected with single-chip microcomputer respectively;Single-chip microcomputer sends fixed frequency Pulse, circuit conversion is sent by ultrasonic wave and detected into ultrasonic wave, ultrasonic wave by detection medium by ultrasonic wave receiving circuit, and It is converted into pulse signal and is transmitted to single-chip microcomputer.
Some SF6And O2Connected between concentration detection module by way of cascade.
A kind of sulfur hexafluoride gas concentration detection method based on ultrasound examination, comprises the following steps:
(1) ultrasonic wave error calculation experiment is carried out, considers the number n of lossing signal ripple in ultrasonic wave difference calculation process runs, Calculate actual ultrasonic wave sound path L and actual error teParameter;
(2) above-mentioned two parameter is solidified;
(3) square wave is produced, starts timing, judges whether to capture the trigger signal of ultrasonic probe, ultrasonic receiver, if it is, stopping Square wave is only produced, reads clocking value i, and be saved in array Timer [i];Otherwise, timing is restarted;
(4) judge whether clocking value i exceedes maximum set value, if it is, being filtered to array Timer [i] data Processing, and ask for time t of the ultrasonic wave by detection mediumc;Otherwise, return to step (3) restarts timing;
(5) judge whether that needs carry out calibration compensation, if it is, calculating compensation sound path value L ", determine current environment hexafluoro Change sulphur gas concentration calibration value, calculate sulfur hexafluoride gas concentration value under current environment;Otherwise, directly calculated according to cure parameter Sulfur hexafluoride gas concentration value.
The specific method of the step (1) is:
1) square wave is produced, starts timing;
2) when ultrasonic probe, ultrasonic receiver receives ultrasonic signal, terminate timing, stop square wave and produce;
3) timing time t is readxAnd current environmental temperature T, THE VELOCITY OF SOUND IN AIR C under Current Temperatures is calculated, and preserve;
4) sound path L is measured1, measurement hardware circuit error te1And soft-error te2
5) according to sound path, time of measuring, the velocity of sound and error relationship formula:
Wherein, te=te1+te2+te3;T=tx-n·TUltrasound;0≤te3< TUltrasound
It is determined that losing sound wave number n, and preserve this value;
Wherein, L is measurement sound path, and C is the velocity of sound under Current Temperatures, and t is time of measuring, teFor overall error, te3For ultrasonic wave Probe error time, TUltrasoundFor the cycle time of ultrasonic frequency;
6) timing time t is read1And current environmental temperature T1, and preserve;
7) change environment temperature, re-read timing time t2And current environmental temperature T2, and preserve;
8) according to sound path, time of measuring, the velocity of sound and error relationship formula:
tn=n*TUltrasound
Finally give ultrasonic wave actual sound path L and actual error teParameter;
Wherein, L is actual sound path, and C is the velocity of sound under Current Temperatures, and t is time of measuring, teFor overall error, tnTo lose ultrasound The time of ripple signal.
It is determined that the specific method for losing sound wave number n is:
According to formula:
Obtain:
According to above-mentioned formula, with reference to 0≤te3< TUltrasound, ultrasonic probe error time t can be obtained simultaneouslye3With loss sound Ripple number n.
The specific method of the step (5) is:
Assuming that sulfur hexafluoride gas concentration is 0 under current environment, compensation for acoustic distance value L " now is calculated, according to the sound path Offset L " calculates the sulfur hexafluoride gas concentration calibration value under current environment;On the basis of calibration value, according in step (1) Actual the ultrasonic wave sound path L and actual error t asked foreParameter, determine the sulfur hexafluoride gas concentration value under current environment.
The beneficial effects of the invention are as follows:
Detecting system of the present invention can detect the concentration of sulfur hexafluoride gas, can detect the content of oxygen in environment again; Communication has display lamp intuitively to show communication link integrity.Double loop power supply cascaded design, duplex communication cascaded design, convenient dress Cascaded between putting, save wire rod materials.
Detection method avoids environmental factor in measurement process, human factor and hardware product qualitative factor and led The measurement error of cause, by solidifying ultrasonic measurement parameter and introducing compensating parameter so that measurement result is more accurate.
Brief description of the drawings
Fig. 1 is sulfur hexafluoride gas concentration detecting system structural representation of the present invention;
Fig. 2 is SF of the present invention6Supervising device control panel schematic diagram;
Fig. 3 is sulfur hexafluoride of the present invention and oxygen concentration detection module cascade schematic diagram;
Fig. 4 is that ultrasonic wave of the present invention sends circuit;
Fig. 5 is ultrasonic wave receiving circuit of the present invention;
Fig. 6 is that oxygen concentration of the present invention detects circuit;
Fig. 7 is humidity measuring circuit of the present invention;
Fig. 8 is temperature sensing circuit of the present invention.
Fig. 9 is sulfur hexafluoride gas concentration detection method flow chart of the present invention;
Figure 10 is ultrasonic wave error calculation flow chart of the present invention.
Wherein, 1.SF6Supervising device, 2.SF6And O2Concentration detection module.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
A kind of sulfur hexafluoride gas concentration monitoring system, as shown in figure 1, including:SF6Supervising device 1, Power convert mould Block, some SF6And O2Concentration detection module 2 and fan control module;SF6Supervising device 1 is distinguished by RS485 communication buses With SF6And O2Concentration detection module 2 connects with fan control module;Power transfer module by power bus respectively with SF6And O2 Concentration detection module 2 connects with fan control module, SF6Supervising device 1 is provided with control panel, SF6Supervising device 1 passes through RS485/RS232 communication interfaces are connected with host computer and bar-type display screen respectively, can be by SF6Concentration and O2Concentration passes through LED bar graph Display screen is shown.SF6Supervising device 1 is that 2 tunnels are opened into 4 roads are outputed.
SF6Supervising device 1 includes:Microcontroller and the voice module being connected with microcontroller, infrared detector, alarm Module and communication interface;When infrared detector detects that personnel pass through, start voice module and carry out voice message SF6、O2Concentration It is whether normal.Work as SF6、O2When concentration exceedes setting range, alarm module sends alarm signal;SF6The control panel of supervising device On be respectively equipped with display screen, indicator lamp, Cao Zuoanjian, blower fan force start button and loudspeaker, as shown in Figure 2.SF6Monitoring dress Put including two 24V public intakes driven and the amount of outputing with three air-blower controls is outputed with alarm signal driving. Device is provided with "+" "-" " confirmations " " cancellation " " on " " under " " left side " " right side " " forced ventilation " totally nine buttons, " is reported provided with " RUN " It is alert " " divulging information " totally three indicator lamps.
SF6Supervising device 1 has four communication interfaces, as follows respectively:
Type Function
Port 1 RS232/RS485 ISP functions/host computer communication
Port 2 RS485 Module
Port 3 RS485 Module
Port 4 RS232/RS485 Bar screen
Work as O2Or SF6During more than alarming value, warning message is produced, and record, upload;Can be according to gas concentration according to configuration Value starts blower fan.Record blower fan and start time and dwell time;Blower fan force start button is set, it is believed that active control blower fan Start;Provided with infrared detection module, fingerprint identification module and voice module, when personnel pass through, start voice message;Exterior arrangement Switching Power Supply, can Powered simultaneously to supervising device and gas detection module;80 history alarm loggings can be stored.
SF6And O2Concentration detection module 2 includes:Single-chip microcomputer, ultrasound detection circuit, oxygen detection circuit, Humidity Detection electricity Road, temperature sensing circuit and communication module;Ultrasound detection circuit, oxygen detection circuit, humidity measuring circuit, temperature detection electricity Road and communication module are connected with single-chip microcomputer respectively;Communication module is RS485 interfaces, passes through communication bus and SF6Supervising device 1 connects Connect.
Ultrasound detection circuit includes:Ultrasonic wave sends circuit and ultrasonic wave receiving circuit;Ultrasonic wave send circuit and Connected between the ultrasonic probe of ultrasonic wave receiving circuit with the tubular conduit with air admission hole, the propagation of stable sound wave.
The ultrasonic wave sends circuit and ultrasonic wave receiving circuit is connected with single-chip microcomputer respectively;Single-chip microcomputer sends fixed frequency Pulse, circuit conversion is sent by ultrasonic wave and detected into ultrasonic wave, ultrasonic wave by detection medium by ultrasonic wave receiving circuit, and It is converted into pulse signal and is transmitted to single-chip microcomputer.
Include as shown in figure 4, ultrasonic wave sends circuit:
Amplifier U1 input is connected with single-chip microcomputer, and amplifier U1 output end is respectively connected to amplifier U2, amplifier U3 and amplifier U4 input, the amplifier U2 connect with amplifier U3 output end, amplifier U2 output end series connection Resistance R1 is followed by+5V power supplys;Amplifier U4 is sequentially connected in series amplifier U6 and resistance R2 is followed by+5V power supplys;Amplifier U5 is attempted by Amplifier U6 both ends;Ultrasonic probe LS1 and electricity are connected in series between the amplifier U2 and amplifier U6 output end Hold C2.
As shown in figure 5, ultrasonic wave receiving circuit includes:
Ultrasonic probe LS2 accesses single-chip microcomputer after being sequentially connected in series electric capacity C6, amplifier U13, amplifier U14;Resistance R12 mono- terminates+5V power supplys, another terminated between electric capacity C6 and amplifier U13;The ends of resistance R15 mono- are connected on electric capacity C6 and amplification Between device U13, the other end ground connection;Resistance R37 is connected in series between amplifier U13 inverting input and output end;Amplifier U14 reverse input end connects resistance R8 and resistance R10, amplifier U14 output end access single-chip microcomputer performance 8 (containing) respectively Above single-chip microcomputer, such as 8051, ATMEGA series, TMS370 series, RS08 series, SST89 series STM32 series.
Ultrasonic probe LS1 and LS2 use TCT40 series sensors.
Temperature survey uses DS18B20 digital temperature sensors, and moisture measurement uses humidity sensor.
As shown in figure 3, some SF6And O2Carried out between concentration detection module by way of cascade communication bus connection with And power bus connection, save wire rod materials.
Such as figure6Shown, oxygen detection circuit includes oxygen cell+signal amplification circuit, and particular circuit configurations are:
Gas sensor LS3, amplifier U11B, resistance R29, amplifier U11A are sequentially connected in series, amplifier U11A's Output end is connected with single-chip microcomputer;Resistance R33 and electric capacity C21 shunt circuit are serially connected in gas sensor LS3 and amplifier U11B Between, resistance R36 and electric capacity C22 shunt circuit are serially connected in amplifier U11A output end, amplifier U11A reverse input End is grounded by resistance R35, and resistance R32 is serially connected between amplifier U11A reverse input end and output end.
Gas sensor LS3 uses oxygen cell such as KE-25, KE-50, MAX-250 etc..
As shown in Figure 7 and Figure 8, humidity measuring circuit is mainly connected using DHT11 digital hygro sensors with single-chip microcomputer, Temperature sensing circuit is mainly connected using DS18B20 sensors with single-chip microcomputer.
Sulfur hexafluoride gas concentration detection method based on ultrasound examination, as shown in figs. 9-10, comprises the following steps:
(1) ultrasonic wave error calculation experiment is carried out first, considers of lossing signal ripple in ultrasonic wave difference calculation process runs Number n, calculates actual ultrasonic wave sound path L and actual error teParameter;Specific method is:
1) square wave is produced, starts timing;
2) when ultrasonic probe, ultrasonic receiver receives ultrasonic signal, terminate timing, stop square wave and produce;
3) timing time t is readxAnd current environmental temperature T, THE VELOCITY OF SOUND IN AIR C under Current Temperatures is calculated, and preserve;
4) sound path L is measured1, measurement hardware circuit error te1And soft-error te2
5) according to sound path, time of measuring, the velocity of sound and error relationship formula:
Wherein, te=te1+te2+te3;T=tx-n·TUltrasound;0≤te3< TUltrasound
According to formula:
Obtain:
According to above-mentioned formula, the equation left side adds ultrasonic probe error time t for the transmission time of n ultrasonic wavee3, because For 0≤te3< TUltrasound, therefore the known quantity on the right of equation can obtain ultrasonic probe error time t simultaneouslye3And loss Sound wave number n.
It is determined that losing sound wave number n, and preserve this value;
Wherein, L1To measure sound path, C is the velocity of sound under Current Temperatures, and t is time of measuring, teFor overall error, te3For ultrasonic wave Probe error time, TUltrasoundFor the cycle time of ultrasonic frequency;
6) timing time t is read1And current environmental temperature T1, and preserve;
7) change environment temperature, re-read timing time t2And current environmental temperature T2, and preserve;
8) according to sound path, time of measuring, the velocity of sound and error relationship formula:
tn=n*TUltrasound
Finally give ultrasonic wave actual sound path L and actual error teParameter;
Wherein, L is actual sound path, and C is the velocity of sound under Current Temperatures, and t is time of measuring, teFor overall error, tnTo lose ultrasound The time of ripple signal.
(2) above-mentioned two parameter is solidified;
(3) square wave is produced, starts timing, judges whether to capture the trigger signal of ultrasonic probe, ultrasonic receiver, if it is, stopping Square wave is only produced, reads clocking value i, and be saved in array Timer [i];Otherwise, timing is restarted;
(4) judge whether clocking value i exceedes maximum set value, if it is, being filtered to array Timer [i] data Processing, and ask for time t of the ultrasonic wave by detection mediumc;Otherwise, return to step (3) restarts timing;
(5) judge whether that needs carry out calibration compensation, if it is, calculating compensation sound path value L ", determine current environment hexafluoro Change sulphur gas concentration calibration value, calculate sulfur hexafluoride gas concentration value under current environment;Otherwise, directly calculated according to cure parameter Sulfur hexafluoride gas concentration value.
The specific method of step (5) is:
Assuming that sulfur hexafluoride gas concentration is 0 under current environment, compensation for acoustic distance value L " now is calculated, according to compensation for acoustic distance Value L " calculates the sulfur hexafluoride gas concentration calibration value under current environment;On the basis of calibration value, asked for according in step (1) Actual ultrasonic wave sound path L and actual error teParameter, determine the sulfur hexafluoride gas concentration value under current environment.
Calculating process uses following formula:
Wherein, CR(m/s) it is the aerial spread speed of sound wave under Current Temperatures.
tCPass through the time of gaseous mixture for ultrasonic wave;tc=t-tn-te
L is the distance that sound wave is propagated in gaseous mixture, i.e. sound path.
MSF6For SF6Molal weight (fixed value 146.06).
MRFor air molal weight (fixed value 29).
χ (PPm) is SF6Concentration.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, model not is protected to the present invention The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not Need to pay various modifications or deformation that creative work can make still within protection scope of the present invention.

Claims (1)

1. a kind of sulfur hexafluoride gas concentration detection method based on ultrasound examination, it is characterized in that, comprise the following steps:
(1) ultrasonic wave error calculation experiment is carried out, considers the number n of lossing signal ripple in ultrasonic wave difference calculation process runs, is calculated Actual ultrasonic wave sound path L and actual error teParameter;Specifically include:
1) square wave is produced, starts timing;
2) when ultrasonic probe, ultrasonic receiver receives ultrasonic signal, terminate timing, stop square wave and produce;
3) timing time t is readxAnd current environmental temperature T, THE VELOCITY OF SOUND IN AIR C under Current Temperatures is calculated, and preserve;
4) sound path L is measured1, measurement hardware circuit error te1And soft-error te2
5) according to sound path, time of measuring, the velocity of sound and error relationship formula:
<mrow> <mfrac> <msub> <mi>L</mi> <mn>1</mn> </msub> <mi>C</mi> </mfrac> <mo>+</mo> <msub> <mi>t</mi> <mi>e</mi> </msub> <mo>=</mo> <mi>t</mi> <mo>;</mo> </mrow>
Wherein, te=te1+te2+te3;T=tx-n·TUltrasound;0≤te3< TUltrasound
It is determined that losing sound wave number n, and preserve this value;
Wherein, L is measurement sound path, and C is the velocity of sound under Current Temperatures, and t is time of measuring, teFor overall error, te3For ultrasonic probe Error time, TUltrasoundFor the cycle time of ultrasonic frequency;
6) timing time t is read1And current environmental temperature T1, and preserve;
7) change environment temperature, re-read timing time t2And current environmental temperature T2, and preserve;
8) according to sound path, time of measuring, the velocity of sound and error relationship formula:
Finally give ultrasonic wave actual sound path L and actual error teParameter;
Wherein, L is actual sound path, and C is the velocity of sound under Current Temperatures, and t is time of measuring, teFor overall error, tnTo lose ultrasonic wave letter Number time;
It is determined that the specific method for losing sound wave number n is:
According to formula:
Obtain:
According to above-mentioned formula, with reference to 0≤te3< TUltrasound, ultrasonic probe error time t can be obtained simultaneouslye3It is individual with sound wave is lost Number n;
(2) by above-mentioned ultrasonic wave actual sound path L and actual error teParameter is solidified;
(3) square wave is produced, starts timing, judges whether to capture the trigger signal of ultrasonic probe, ultrasonic receiver, if it is, stopping production Raw square wave, reads clocking value i, and be saved in array Timer [i];Otherwise, timing is restarted;
(4) judge whether clocking value i exceedes maximum set value, if it is, processing is filtered to array Timer [i] data, And ask for time t of the ultrasonic wave by detection mediumc;Otherwise, return to step (3) restarts timing;
(5) judge whether that needs carry out calibration compensation, if it is, calculating compensation sound path value L ", determine current environment sulfur hexafluoride Gas concentration calibration value, calculate sulfur hexafluoride gas concentration value under current environment;Otherwise, hexafluoro is directly calculated according to cure parameter Change sulphur gas concentration value;
Assuming that sulfur hexafluoride gas concentration is 0 under current environment, compensation for acoustic distance value L " now is calculated, according to compensation for acoustic distance value L " Calculate the sulfur hexafluoride gas concentration calibration value under current environment;On the basis of calibration value, according to the reality asked in step (1) Border ultrasonic wave sound path L and actual error teParameter, determine the sulfur hexafluoride gas concentration value under current environment;
Calculating process uses following formula:
<mrow> <msub> <mi>t</mi> <mi>c</mi> </msub> <mo>=</mo> <mfrac> <mi>L</mi> <mrow> <mn>2</mn> <msub> <mi>c</mi> <mi>R</mi> </msub> </mrow> </mfrac> <mrow> <mo>(</mo> <mfrac> <msub> <mi>M</mi> <mrow> <mi>S</mi> <mi>F</mi> <mn>6</mn> </mrow> </msub> <msub> <mi>M</mi> <mi>R</mi> </msub> </mfrac> <mo>-</mo> <mn>1</mn> <mo>)</mo> </mrow> <mi>&amp;chi;</mi> <mo>+</mo> <mfrac> <mi>L</mi> <msub> <mi>c</mi> <mi>R</mi> </msub> </mfrac> </mrow>
Wherein, CR, unit m/s, it is the aerial spread speed of sound wave under Current Temperatures.
tCPass through the time of gaseous mixture for ultrasonic wave;tc=t-tn-te
L is the distance that sound wave is propagated in gaseous mixture, i.e. sound path.
MSF6For SF6Molal weight, it is fixed value 146.06.
MRIt is fixed value 29 for air molal weight.
χ, unit PPm, it is SF6Concentration.
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