CN105036064A - Device and method for polarizing electrets with high-aspect-ratio structures based on rays - Google Patents
Device and method for polarizing electrets with high-aspect-ratio structures based on rays Download PDFInfo
- Publication number
- CN105036064A CN105036064A CN201510409014.3A CN201510409014A CN105036064A CN 105036064 A CN105036064 A CN 105036064A CN 201510409014 A CN201510409014 A CN 201510409014A CN 105036064 A CN105036064 A CN 105036064A
- Authority
- CN
- China
- Prior art keywords
- ray
- electret
- polarization
- polarized
- aspect ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Measurement Of Radiation (AREA)
Abstract
The invention discloses a device and method for polarizing electrets with high-aspect-ratio structures based on rays. The device comprises a protection box, a ray generator, a probe station module and a high-voltage bias power supply, wherein a space between the surfaces of two electrets to be polarized in a ray covering area is filled with high-density plasma; a high-voltage bias electric field is formed between the surfaces, connected to a high voltage end and a grounded end, of the two electrets to be polarized; and positive charges and negative charges in the plasma are separated under the action of the bias high-voltage electric field and move along opposite directions, so that charges of specific electric properties are adsorbed on the surfaces of the two electrets to be polarized. Through adoption of the device and method for polarizing the electrets with high-aspect-ratio structures based on rays, a vacuum environment is not needed; the structure is simple; rapidness and high efficiency are realized; and polarization for the electrets with the high-aspect-ratio structures is realized. Meanwhile, rays can penetrate through a conventional packaging housing, so that the polarization method is not influenced by a packaging process, and the polarization time can be shortened from 5-20 minutes of conventional corona poling to the magnitude of 10 seconds.
Description
Technical field
The present invention relates to electret polarization, be specifically related to a kind of ray polarization device and polarization method thereof of high aspect ratio structure electret.
Background technology
Electret comprises the polarization charge on electret matrix and surface thereof.Polarization technique realizes the only resource that electret obtains High Density Charge, and the performance for electret-type MEMS plays decisive role, is the primary key technology of carrying out the research of electret MEMS.Domestic and international experts and scholars have carried out for the Polarization technique of electret and have studied widely.The electret polarization mode of existing classics is corona polarizing, and it utilizes air high pressure arc discharge mechanism, but the ion that corona discharge produces has the electret of high aspect ratio structure because electric charge " gathering " effect cannot polarize; Corona polarizing can not there is penetrated with the solid dielectric of stop simultaneously, therefore cannot polarize for the electret after encapsulation.
Summary of the invention
For above problems of the prior art, the present invention proposes a kind of ray polarization device and polarization method thereof of high aspect ratio structure electret, the polarization of high aspect ratio structure electret rapidly and efficiently can be realized, without the need to vacuum environment, do not affect by package casing.
One object of the present invention is the ray polarization device providing a kind of high aspect ratio structure electret.
The ray polarization device of high aspect ratio structure electret of the present invention comprises: protection cabinet, ray generator, probe station assembly and HVB high voltage bias power supply; Wherein, protection cabinet is the metal cabinet structure with radiation protection function; Ray generator comprises the ray electric supply installation and the coupled ray generating device being arranged on the top in protection cabinet and beam exposure apparatus that are placed on protection cabinet outside; Probe station assembly comprises the probe base of insulation, the objective table of insulation and position tuning probe, and probe base is arranged on the bottom in protection cabinet and just to beam exposure apparatus, two position tuning probes are equipped with on the top of probe base respectively; In the middle of probe base, place objective table, objective table is placed high aspect ratio structure electret sample to be polarized, the sidewall that two of high aspect ratio structure electret sample are relative is two electret surfaces to be polarized, and opposing is respective back electrode; Two position tuning probes contact two back electrodes respectively, and are connected to high-pressure side and the earth terminal of the HVB high voltage bias power supply outside protection cabinet respectively by wire.
Protection cabinet comprises the cabinet shell of metal and the plastic insulating material of wall attachment within it; The metal shell thickness of protection cabinet is greater than 5mm, for protecting x radiation x; The thickness of plastic insulating material between 2 ~ 5cm, for the electrical insulation of the high-tension electricity and protection cabinet that prevent polarization process.The side of protection cabinet arranges the door with observation window, position a little more than the upper surface of sample fixation kit, to be observed the polarization process of electret sample by observation window.
Ray generator is the one in the adjustable alpha ray source of intensity, beta ray source, gamma ray projector and x-ray source.Ray generating device excites wherein a kind of radioactive source then by the ray of beam exposure apparatus radiation high energy, air molecule to be ionized, thus produces such as CO
3 -, (H
2o)
2h
+, O
2 -, H
3o
+deng the positive and negative electric charge of high density.
HVB high voltage bias power supply is high voltage direct current potential source, can produce ± 1V ~ ± 10kV DC voltage, and with leakage current test feedback function, prevent electret sample electrical break down.
In addition, electret polarization device also comprises transmitted intensity fountain-pen dosimeter and intelligent alarm, is arranged on the outer wall of protection cabinet respectively, and transmitted intensity fountain-pen dosimeter is connected to intelligent alarm, and intelligent alarm is connected to ray electric supply installation; Transmitted intensity fountain-pen dosimeter measures the transmitted intensity outside protection cabinet, and when transmitted intensity exceedes the human-body safety scope of secure threshold (industry specifies), intelligent alarm is reported to the police and cut off the power supply of ray electric supply installation.
Another object of the present invention is the ray polarization method providing a kind of high aspect ratio structure electret.
The ray polarization method of high aspect ratio structure electret of the present invention, comprises the following steps:
1) high aspect ratio structure electret sample is placed on objective table, and two relative sidewalls are two electret surfaces to be polarized, and opposing is respective back electrode;
2) two position tuning probes contact two back electrodes respectively, and two position tuning probes are connected to the high-pressure side of the HVB high voltage bias power supply outside protection cabinet and ground end respectively by wire simultaneously;
3) ray generating device excites radioactive source, by beam exposure apparatus to high aspect ratio structure electret electromagnetic radiation ray, produces plasma in the region that ray covers;
4) air between the electret surface that two of the high aspect ratio structure electret sample in ray overlay area are to be polarized is ionized, and is full of plasma;
5) HVB high voltage bias power supply is opened, connect between two of HVB high voltage bias power supply electret surface to be polarized and produce HVB high voltage bias electric field, if transmitted intensity fountain-pen dosimeter measures transmitted intensity do not exceed secure threshold, then normal work enters step 6), otherwise, if transmitted intensity exceedes secure threshold, intelligent alarm is reported to the police and is controlled ray electric supply installation immediately and quits work;
6) positive charge in plasma and negative electrical charge are separated and move in the opposite direction under the effect of HVB high voltage bias electric field, thus realize positive charge and negative electrical charge and be attracted to two of high aspect ratio structure electret sample electret surface to be polarized respectively;
7) electric charge of two of high aspect ratio structure electret sample electret adsorptions to be polarized is tending towards saturation state, and polarization terminates.
Wherein, in step 7) in, after being greater than polarization in 10 seconds, the electric charge of two relative electret adsorptions is tending towards saturation state, and polarization terminates; Whether the leakage current test feedback function observation leakage current by HVB high voltage bias power supply is tending towards saturated.
General principle is: ray generating device excites radioactive source, by beam exposure apparatus to high aspect ratio structure electret electromagnetic radiation ray, produces plasma in the region that ray covers; Plasma is full of between two electret surfaces to be polarized in ray overlay area; Connect between high voltage and ground connection two electret surface to be polarized and define HVB high voltage bias electric field; Positive charge in plasma and negative electrical charge are separated and move in the opposite direction under the effect of bias high voltage electric field, thus realize positive charge and negative electrical charge and be attracted to the relative electret surface to be polarized of two of high aspect ratio structure electret sample respectively.
Advantage of the present invention:
The present invention adopts based on the electret polarization device of ray and polarization method thereof, without the need to vacuum environment, structure simply, rapidly and efficiently, achieves the polarization to high aspect ratio structure electret; Simultaneously due to the conventional package casing of radiolucent, therefore this polarization method is not by the impact of packaging technology; Polarization time can shorten to 10 second-times from traditional corona polarizing 5 ~ 20 minutes.
Accompanying drawing explanation
Fig. 1 is the profile of an embodiment of the ray polarization device of high aspect ratio structure electret of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, by embodiment, the present invention will be further described.
As shown in Figure 1, the electret polarization device based on ray of the present embodiment comprises: protection cabinet 1, ray generator, probe station assembly and HVB high voltage bias power supply; Wherein, protection cabinet 1 protection cabinet comprises the cabinet shell 11 of metal and the plastic insulating material 12 of wall attachment within it; Ray generator comprises the ray electric supply installation 21 and the coupled ray generating device 22 being arranged on the top in protection cabinet and beam exposure apparatus 23 that are placed on protection cabinet outside; Probe station assembly comprises the probe base 31 of insulation, the objective table 32 of insulation and position tuning probe 33, and probe base 31 is arranged on the bottom in protection cabinet 1 and just to beam exposure apparatus 23, two position tuning probes 33 are equipped with on the top of probe base 31; In the middle of probe base, place objective table 32, objective table 32 is placed high aspect ratio structure electret sample 4 to be polarized; The sidewall that two of high aspect ratio structure electret sample 4 are relative is two electret surfaces to be polarized, opposing is respective back electrode 5, two position tuning probes contact two back electrodes 5 respectively, and are connected to high-pressure side and the earth terminal of the HVB high voltage bias power supply 6 outside protection cabinet respectively by wire; Transmitted intensity fountain-pen dosimeter and intelligent alarm 7 are arranged on the outer wall of protection cabinet 1.
It is finally noted that, the object publicizing and implementing mode is to help to understand the present invention further, but it will be appreciated by those skilled in the art that: without departing from the spirit and scope of the invention and the appended claims, various substitutions and modifications are all possible.Therefore, the present invention should not be limited to the content disclosed in embodiment, and the scope that the scope of protection of present invention defines with claims is as the criterion.
Claims (6)
1. a ray polarization device for high aspect ratio structure electret, is characterized in that, described ray polarization device comprises: protection cabinet, ray generator, probe station assembly and HVB high voltage bias power supply; Wherein, described protection cabinet is the metal cabinet structure with radiation protection function; Described ray generator comprises the ray electric supply installation and the coupled ray generating device being arranged on the top in protection cabinet and beam exposure apparatus that are placed on protection cabinet outside; Described probe station assembly comprises the probe base of insulation, the objective table of insulation and position tuning probe, and probe base is arranged on the bottom in protection cabinet and just to beam exposure apparatus, two position tuning probes are equipped with on the top of probe base; In the middle of probe base, place objective table, objective table is placed high aspect ratio structure electret sample to be polarized, the sidewall that two of described high aspect ratio structure electret sample are relative is two electret surfaces to be polarized, and opposing is respective back electrode; Two position tuning probes contact two back electrodes respectively, and are connected to high-pressure side and the earth terminal of the HVB high voltage bias power supply outside protection cabinet respectively by wire.
2. ray polarization device as claimed in claim 1, it is characterized in that, the metal shell thickness of described protection cabinet is greater than 5mm; The thickness of described plastic insulating material is between 2 ~ 5cm.
3. ray polarization device as claimed in claim 1, is characterized in that, described ray generator is the one in the adjustable alpha ray source of intensity, beta ray source, gamma ray projector and x-ray source.
4. ray polarization device as claimed in claim 1, it is characterized in that, also comprise transmitted intensity fountain-pen dosimeter and intelligent alarm, be arranged on the outer wall of protection cabinet respectively, described transmitted intensity fountain-pen dosimeter is connected to intelligent alarm, and described intelligent alarm is connected to ray electric supply installation.
5. a ray polarization method for high aspect ratio structure electret, is characterized in that, described ray polarization method comprises the following steps:
1) high aspect ratio structure electret sample is placed on objective table, and two relative sidewalls are two electret surfaces to be polarized, and opposing is respective back electrode;
2) two position tuning probes contact two back electrodes respectively, and two position tuning probes are connected to the high-pressure side of the HVB high voltage bias power supply outside protection cabinet and ground end respectively by wire simultaneously;
3) ray generating device excites radioactive source, by beam exposure apparatus to high aspect ratio structure electret electromagnetic radiation ray, produces plasma in the region that ray covers;
4) air between the electret surface that two of the high aspect ratio structure electret sample in ray overlay area are to be polarized is ionized, and is full of plasma;
5) HVB high voltage bias power supply is opened, connect between two of HVB high voltage bias power supply electret surface to be polarized and produce HVB high voltage bias electric field, if transmitted intensity fountain-pen dosimeter measures transmitted intensity do not exceed secure threshold, then normal work enters step 6), otherwise, if transmitted intensity exceedes secure threshold, intelligent alarm is reported to the police and is controlled ray electric supply installation immediately and quits work;
6) positive charge in plasma and negative electrical charge are separated and move in the opposite direction under the effect of HVB high voltage bias electric field, thus realize positive charge and negative electrical charge and be attracted to two of high aspect ratio structure electret sample electret surface to be polarized respectively;
7) electric charge adsorbed on the electret surface that two of high aspect ratio structure electret sample are to be polarized is tending towards saturation state, and polarization terminates.
6. ray polarization method as claimed in claim 5, is characterized in that, in step 7) in, after being greater than polarization in 10 seconds, the electric charge of two relative electret adsorptions is tending towards saturation state, and polarization terminates; Whether be tending towards saturated by the leakage current test feedback function observation leakage current of HVB high voltage bias power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510409014.3A CN105036064B (en) | 2015-07-13 | 2015-07-13 | Device and method for polarizing electrets with high-aspect-ratio structures based on rays |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510409014.3A CN105036064B (en) | 2015-07-13 | 2015-07-13 | Device and method for polarizing electrets with high-aspect-ratio structures based on rays |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105036064A true CN105036064A (en) | 2015-11-11 |
| CN105036064B CN105036064B (en) | 2017-02-01 |
Family
ID=54443118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510409014.3A Active CN105036064B (en) | 2015-07-13 | 2015-07-13 | Device and method for polarizing electrets with high-aspect-ratio structures based on rays |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105036064B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466291A (en) * | 2015-12-11 | 2016-04-06 | 北京理工大学 | Self-driven ignition device without external power supply and preparing method of self-driven ignition device |
| CN105509948A (en) * | 2015-11-30 | 2016-04-20 | 北京理工大学 | Electret-based passive impact mechanical sensor and testing method thereof |
| CN105566020A (en) * | 2015-12-16 | 2016-05-11 | 北京理工大学 | Self-driven electric detonator without external power supply and preparation method thereof |
| CN105652174A (en) * | 2015-12-30 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Probe station system for ray irradiation experiment and experimental method |
| CN106876579A (en) * | 2016-12-27 | 2017-06-20 | 王开安 | Macromolecule membrane polarization method and device, polarized film, electronic device |
| CN110165787A (en) * | 2019-05-27 | 2019-08-23 | 北京航空航天大学 | A kind of charging unit of electret machinery antenna |
| CN111554804A (en) * | 2020-05-26 | 2020-08-18 | 大连理工大学 | Synchronous polarization method for partitioned piezoelectric elements |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1947967A1 (en) * | 1969-09-23 | 1971-04-15 | Licentia Gmbh | Electrometer with an electret of polarizied - plastic for zero offset |
| CN202026457U (en) * | 2011-05-09 | 2011-11-02 | 东莞勤增实业有限公司 | Polarization device of electret |
| CN103675646A (en) * | 2013-08-20 | 2014-03-26 | 西交利物浦大学 | A real time on-line test system for MOS chip gamma ray radiation responses |
-
2015
- 2015-07-13 CN CN201510409014.3A patent/CN105036064B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1947967A1 (en) * | 1969-09-23 | 1971-04-15 | Licentia Gmbh | Electrometer with an electret of polarizied - plastic for zero offset |
| CN202026457U (en) * | 2011-05-09 | 2011-11-02 | 东莞勤增实业有限公司 | Polarization device of electret |
| CN103675646A (en) * | 2013-08-20 | 2014-03-26 | 西交利物浦大学 | A real time on-line test system for MOS chip gamma ray radiation responses |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509948A (en) * | 2015-11-30 | 2016-04-20 | 北京理工大学 | Electret-based passive impact mechanical sensor and testing method thereof |
| CN105509948B (en) * | 2015-11-30 | 2017-12-19 | 北京理工大学 | A kind of passive ballistics sensor and its method of testing based on electret |
| CN105466291A (en) * | 2015-12-11 | 2016-04-06 | 北京理工大学 | Self-driven ignition device without external power supply and preparing method of self-driven ignition device |
| CN105466291B (en) * | 2015-12-11 | 2017-01-25 | 北京理工大学 | Self-driven ignition device without external power supply and preparing method of self-driven ignition device |
| CN105566020A (en) * | 2015-12-16 | 2016-05-11 | 北京理工大学 | Self-driven electric detonator without external power supply and preparation method thereof |
| CN105652174A (en) * | 2015-12-30 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Probe station system for ray irradiation experiment and experimental method |
| CN105652174B (en) * | 2015-12-30 | 2018-07-27 | 中国人民解放军国防科学技术大学 | Probe station system and experimental method for x ray irradiation x experiment |
| CN106876579A (en) * | 2016-12-27 | 2017-06-20 | 王开安 | Macromolecule membrane polarization method and device, polarized film, electronic device |
| CN106876579B (en) * | 2016-12-27 | 2021-03-09 | 王开安 | Method and apparatus for polarizing polymer film, polarizing film, and electronic device |
| CN110165787A (en) * | 2019-05-27 | 2019-08-23 | 北京航空航天大学 | A kind of charging unit of electret machinery antenna |
| CN111554804A (en) * | 2020-05-26 | 2020-08-18 | 大连理工大学 | Synchronous polarization method for partitioned piezoelectric elements |
| CN111554804B (en) * | 2020-05-26 | 2021-09-24 | 大连理工大学 | Synchronous polarization method for partitioned piezoelectric elements |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105036064B (en) | 2017-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105036064A (en) | Device and method for polarizing electrets with high-aspect-ratio structures based on rays | |
| Zhong et al. | Insulating properties and charge characteristics of natural ester fluid modified by TiO 2 semiconductive nanoparticles | |
| CN105036065B (en) | A kind of electret polarization device based on ray and polarization method thereof | |
| Bloess et al. | The triggered pseudo-spark chamber as a fast switch and as a high-intensity beam source | |
| CN102223102B (en) | Switch and capacitor integrated quick discharge unit | |
| Wu et al. | Simulation of space charge behavior in LDPE with a modified of bipolar charge transport model | |
| CN103826379B (en) | Nonequilibrium plasma generation device and particulate powder surface modification treatment system | |
| Cheng et al. | Variation in time lags of vacuum surface flashover utilizing a periodically grooved dielectric | |
| Wang et al. | Short-time X-ray Irradiation as a Non-contact Charge Dissipation Solution for Insulators in HVDC GIS/GIL | |
| CN102495300B (en) | Multifunctional high voltage electrode for measuring space charge | |
| Zhao et al. | Experimental investigation on the role of electrodes in solid dielectric breakdown under nanosecond pulses | |
| CA2908715A1 (en) | Device and process for the generation of electrical energy | |
| Vigouroux et al. | Surface processes occurring during breakdown of high-voltage devices | |
| Zhang et al. | Multiphysics coupled modelling in HVDC GILs: Critical re-examination of ion mobility selection | |
| CN103052250A (en) | Atmospheric pressure dispersion type cold plasma generation device | |
| RU187270U1 (en) | PULSE NEUTRON GENERATOR | |
| Min et al. | High‐Temperature Polymer Dielectrics for Aerospace Electrical Equipment | |
| Vu-Cong et al. | Numerical simulation of partial discharge current pulse: Comparison between SF6, Fluoronitrile-CO2 mixture and Fluoroketone-CO2 mixture | |
| Li et al. | Influence of trap depths on space charge formation and accumulation characteristics in low density polyethylene | |
| Yao et al. | Flashover strength improvement and particle suppression in vacuum using surface groove structure | |
| Wu et al. | Study on suppression mechanism of space charge accumulation in nano-doped LDPE | |
| Luo et al. | Surface Defect Detection of GIS Aramid Insulation Pull Rod via Photon Counting | |
| US20200295677A1 (en) | Power Receiver Including Faraday Cage for Extracting Power from Electric Field Energy in the Earth | |
| Tanaka et al. | High field light emission in LDPE/MgO nanocomposite | |
| Hirata et al. | Characteristics of N2/SF6 mixture gas in creeping discharge developing in narrow gap with backside electrode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |