CN105032176A - Waste gas treatment device - Google Patents
Waste gas treatment device Download PDFInfo
- Publication number
- CN105032176A CN105032176A CN201510322943.0A CN201510322943A CN105032176A CN 105032176 A CN105032176 A CN 105032176A CN 201510322943 A CN201510322943 A CN 201510322943A CN 105032176 A CN105032176 A CN 105032176A
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- Prior art keywords
- shower
- communicated
- combustion chamber
- wall
- settling tank
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002912 waste gas Substances 0.000 title abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 238000002485 combustion reaction Methods 0.000 claims abstract description 36
- 239000007921 spray Substances 0.000 claims abstract description 33
- 239000010410 layer Substances 0.000 claims abstract description 28
- 239000011229 interlayer Substances 0.000 claims abstract description 6
- 239000003054 catalyst Substances 0.000 claims description 14
- 210000005239 tubule Anatomy 0.000 claims description 12
- 238000000746 purification Methods 0.000 claims description 9
- 230000002265 prevention Effects 0.000 claims description 8
- 239000011247 coating layer Substances 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 241001466460 Alveolata Species 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 3
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 3
- 230000009970 fire resistant effect Effects 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 3
- 238000004062 sedimentation Methods 0.000 abstract 3
- 239000007789 gas Substances 0.000 description 24
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 235000002918 Fraxinus excelsior Nutrition 0.000 description 3
- 239000002956 ash Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229920006926 PFC Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
The invention discloses a waste gas treatment device which comprises a combustion chamber, a first spray pipe and a first sedimentation pond, wherein the combustion chamber is a hollow cylindrical barrel, the outer wall of the combustion chamber is a thermal insulating layer, and the inner wall of the combustion chamber is a fire-proof heat conducting layer; an interlayer with a definite space is formed between the inner wall and the outer wall; the upper part and lower part of the outer wall are respectively provided with a first water outlet and a first water inlet, one end of the first spray pipe is connected with a first air outlet, the first spray pipe is of a hollow cylindrical barrel, and the middle of the first spray pipe is provided with a cross-shaped spray branch pipe; the spray branch pipe comprises two parallel horizontal pipes and longitudinal pipes, the horizontal pipes are vertical to the longitudinal pipes and are communicated with the longitudinal pipes, and multiple through holes are distributed between the lower parts of the horizontal and longitudinal pipes of the spray branch pipe at intervals; the outer wall of the first spray pipe is provided with a second water inlet connected with a control valve, the second water inlet is communicated with the spray branch pipe, and the first sedimentation pond is positioned on the lower side of the first spray pipe, and the first sedimentation pond is communicated with the other end of the first spray pipe. The waste gas treatment device is capable of reducing the unnecessary energy loss, and the waste gas treatment capability is high.
Description
Technical field
The present invention relates to a kind of emission-control equipment.More particularly, the present invention relates to a kind of emission-control equipment of the waste gas for the treatment of producing in semiconductor fabrication process.
Background technology
In semiconductor fabrication process, need to use multiple special gas and a large amount of acid or alkali, use in the different process of semiconductor manufacturing and produce a large amount of waste gas, these waste gas are collected by exhaust system and are processed, to prevent the healthy serious consequence caused of directly discharging environment and people.
The waste gas produced in semiconductor fabrication process generally takes washing, burning, absorption, the method such as to dissociate, but the method for burning rinsing type removal waste gas effectively can process the main discarded object PFCs in waste gas, the waste gas of large discharge can be processed, remove various flammable pollutant simultaneously, environmental pollution is less, but waste gas can produce carbon monoxide and nitrogen oxide after burning, wherein carbon monoxide is pernicious gas, direct discharge can cause harmful effect to the health of neighbouring resident, in addition, combustion chambers burn waste gas needs the energy of at substantial, the waste gas generally collected by exhaust system also has many moisture, be unfavorable for combustion chamber combustion, thus expending of the energy can be increased, the dust that the gas of discharging in combustion chamber carries or ashes can be adsorbed in connecting pipe, result in blockage, thus reduce the disposal ability of exhaust device.
Summary of the invention
An object of the present invention is to solve at least the problems referred to above and/or defect, and the advantage will illustrated at least is below provided.
A further object of the invention is to provide a kind of emission-control equipment, by arranging interlayer in combustion chamber, the heat produced to make burning makes full use of, as the water source of the second shower, catalyst plates is set in the middle part of the second shower simultaneously, makes waste gas when by the second shower, in hot water and catalyst plates catalyst effect under, abundant reaction, the carbon monoxide produce waste gas after burning and oxynitrides fully remove, and greatly reduce the pollution of emission gases to environment.
A further object of the invention is by being provided with fire prevention water accepting layer in the first air inlet pipe inside, can reducing the moisture in waste gas, to reduce the energy provided required for combustion chamber, reduces unnecessary energy loss.
A further object of the invention is by arranging filter in the second exhaust port of the first settling tank, the dust that gas carries from combustion chamber is reduced when entering the second settling tank to make gas, to improve the disposal ability of the second shower to gas, reduce the burden of the second settling tank simultaneously, in order to avoid often change the liquid in the first settling tank and the second settling tank, to this reduce the amount of labour, reduce the connecting pipe fouling between the first settling tank and the second settling tank simultaneously, even block, thus improve the disposal ability of emission-control equipment.
In order to realize, according to these objects of the present invention and other advantage, providing a kind of emission-control equipment, comprising:
Combustion chamber, it is the cylindrical tube of hollow, the top of described combustion chamber is provided with the first air inlet, and it is communicated with the first air inlet pipe, and its underpart is provided with first row gas port, wherein, described combustion chamber comprises outer wall and inwall, and described outer wall is thermal insulation layer, and its inwall is fire-resistant heat-conducting layer, form the interlayer with certain space between described inwall and outer wall, the upper and lower of described outer wall is respectively equipped with the first delivery port and the first water inlet;
First shower, it is arranged on the below of described combustion chamber, one end of described first shower connects described first row gas port, described first shower is the cylindrical tube of hollow, the middle part of described first shower is provided with a spray arm in intersecting parallels, it comprises two transverse tubes be arranged in parallel, and and the longitudinal tubule (L tubule) that be communicated with mutually vertical with described transverse tube, the described transverse tube of spray arm and the bottom of longitudinal tubule (L tubule) are intervally distributed with multiple through hole, the outer wall of described first shower is provided with the second water inlet of a connection control valve, and it is communicated with described spray arm;
First settling tank, it is positioned at the below of described first shower, and be communicated with the other end of described first shower, described first settling tank is the cylindrical tube of hollow, the top of its sidewall is provided with second exhaust port, and the position of its sidewall bottom described first settling tank is provided with the second delivery port of band control valve.
Preferably, described emission-control equipment, described in described first air inlet pipe inner distance, the position of the first air inlet certain distance is provided with fire prevention water accepting layer, and it is fibrous reticular structure, and described fire prevention water accepting layer is followed successively by water accepting layer and fireprotection layer along airintake direction.
Preferably, described emission-control equipment, also comprises:
Second settling tank, the top of its sidewall is provided with the second air inlet, described second air inlet is communicated with described second exhaust port by a conduit, the top of described second settling tank is provided with the 3rd exhaust outlet, the position of sidewall bottom described second settling tank of described second settling tank is provided with the 3rd delivery port of band control valve, wherein, described second exhaust port place is provided with removable filter device;
Second shower, its one end is communicated with described 3rd exhaust outlet, and the other end is communicated with air.
Preferably, described emission-control equipment, wherein, described second shower is the cylindrical tube of hollow, it comprises upper and lower two dismountable upper part and lower part, described upper part and described lower part inside are respectively equipped with two described spray arms in intersecting parallels, the described upper part position that be communicated with two described spray arms corresponding on the outer wall of described lower part is respectively equipped with the 3rd water inlet and the 4th water inlet of being with control valve, and described 3rd water inlet is all communicated with described first delivery port of described combustion chamber by conduit with described 4th water inlet.
Preferably, described emission-control equipment, the purification plate of bearing catalyst is also removably provided with between two in the described second shower described spray arms in intersecting parallels, it is inner that described purification plate is inclined at described second shower, is 45-60 ° with described second shower inwall.
Preferably, described emission-control equipment, described purification plate is made up of aluminum oxide coating layer, cerium oxide, supporting layer and aluminum oxide coating layer from top to bottom successively, and described supporting layer is the carrier of alveolate texture, and its internal load has copper powder, iron powder and palladium powder.
Preferably, described emission-control equipment, the internal diameter of described first shower is the 3/5-4/5 of the internal diameter of described combustion chamber, and the internal diameter of described first settling tank is 1.2-1.5 times of the internal diameter of described first shower.
The present invention at least comprises following beneficial effect:
1) interlayer is set in combustion chamber, the heat produced to make burning makes full use of, reduce energy waste, the liquid herein heated may be used for other equipment, also may be used for emission-control equipment of the present invention, as using the liquid after heating as the water source of the second shower, catalyst plates is set in the middle part of the second shower simultaneously, make waste gas when by the second shower, in hot water and catalyst plates catalyst effect under, abundant reaction, the carbon monoxide produce waste gas after burning and nitrogen oxide fully remove, greatly reduce the pollution of emission gases to environment,
2) by being provided with fire prevention water accepting layer in the first air inlet pipe inside, the moisture in waste gas can be reduced, to reduce the energy provided required for combustion chamber, reducing unnecessary energy loss;
3) by arranging filter in the second exhaust port of the first settling tank, the dust that gas carries from combustion chamber is reduced when entering the second settling tank to make gas, to improve the disposal ability of the second shower to gas, reduce the burden of the second settling tank simultaneously, in order to avoid often change the liquid in the first settling tank and the second settling tank, to this reduce the amount of labour;
4) spray arms run of the present invention becomes intersecting parallels, take full advantage of the inner space of the first shower and the second shower, add the liquid of spray and the contact surface of gas, improve the ability that liquid removes impurity or harmful components in gas, the intersecting parallels ashes do not affected in combustion chamber drop in the first settling tank simultaneously;
5) waste gas is behind combustion chamber, carbon monoxide and nitrogen oxide can be produced, the catalyst of carbon monoxide and nitrogen oxide in energy oxidizing gas is carried, to reduce the pollution of emission gases to environment, simultaneously by catalyst plates, catalyst plates is obliquely installed, the contact surface of itself and gas can be increased, make reaction more abundant, in addition, second shower can be dismantled, and is convenient to change catalyst plates;
6) internal diameter of described first shower is the 3/5-4/5 of the internal diameter of described combustion chamber, fully to make from the liquid comes into contact combustion chamber gas out and the first shower, the internal diameter of described first settling tank is 1.2-1.5 times of the internal diameter of described first shower, the surface that impurity or ashes stick to described first settling tank is carried to reduce gas, by increasing the liquid comes into contact in gas and the first shower, to improve gas cleaning rate.
Part is embodied by explanation below by other advantage of the present invention, target and feature, part also will by research and practice of the present invention by those skilled in the art is understood.
Accompanying drawing explanation
Fig. 1 is the structural representation of emission-control equipment of the present invention;
Fig. 2 is the structural representation of spray arm of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in further detail, can implement according to this with reference to description word to make those skilled in the art.
Should be appreciated that used hereinly such as " to have ", other element one or more do not allotted in " comprising " and " comprising " term or the existence of its combination or interpolation.
Fig. 1 shows according to a kind of way of realization of the present invention, and a kind of emission-control equipment, comprising:
Combustion chamber 1, it is the cylindrical tube of hollow, the top of described combustion chamber 1 is provided with the first air inlet, and it is communicated with the first air inlet pipe, and its underpart is provided with first row gas port, wherein, described combustion chamber 1 comprises outer wall and inwall, and described outer wall is thermal insulation layer, and its inwall is fire-resistant heat-conducting layer, form the interlayer 11 with certain space between described inwall and outer wall, the upper and lower of described outer wall is respectively equipped with the first delivery port and the first water inlet;
First shower 2, it is arranged on the below of described combustion chamber 1, one end of described first shower 2 connects described first row gas port, the cylindrical tube of described first shower 2 in hollow, the middle part of described first shower 2 is provided with a spray arm in intersecting parallels, it comprises two transverse tubes be arranged in parallel, and and the longitudinal tubule (L tubule) that be communicated with mutually vertical with described transverse tube, as shown in Figure 2, the described transverse tube of spray arm and the bottom of longitudinal tubule (L tubule) are intervally distributed with multiple through hole, the outer wall of described first shower is provided with the second water inlet of a connection control valve, it is communicated with described spray arm,
First settling tank 3, it is positioned at the below of described first shower 2, and be communicated with the other end of described first shower 2, described first settling tank is the cylindrical tube of hollow, the top of its sidewall is provided with second exhaust port, and its sidewall position of 3 at the bottom of described first settling tank is provided with the second delivery port of band control valve.
Described emission-control equipment, the position of the first air inlet certain distance described in described first air inlet pipe inner distance is provided with fire prevention water accepting layer 4, and it is fibrous reticular structure, and described fire prevention water accepting layer 4 is followed successively by water accepting layer and fireprotection layer along airintake direction.
Described emission-control equipment, also comprises:
Second settling tank 5, the top of its sidewall is provided with the second air inlet, described second air inlet is communicated with described second exhaust port by a conduit, the top of described second settling tank is provided with the 3rd exhaust outlet, the position of sidewall bottom described second settling tank 5 of described second settling tank is provided with the 3rd delivery port of band control valve, wherein, described second exhaust port place is provided with removable filter device 6;
Second shower 7, its one end is communicated with described 3rd exhaust outlet, and the other end is communicated with air.
Described emission-control equipment, wherein, the cylindrical tube of described second shower 7 in hollow, it comprises upper and lower two dismountable upper part 71 and lower part 72, be convenient to change catalyst plates, and check whether spray arm blocks, described upper part 71 and described lower part 72 inside are respectively equipped with two described spray arms in intersecting parallels, described upper part 71 is respectively equipped with the corresponding position being communicated with two described spray arms on the outer wall of described lower part 72 the 3rd water inlet and the 4th water inlet of being with control valve, described 3rd water inlet is all communicated with described first delivery port of described combustion chamber by conduit with described 4th water inlet.
Described emission-control equipment, the purification plate 8 of bearing catalyst is also removably provided with between two in the described second shower 7 described spray arms in intersecting parallels, it is inner that described purification plate 8 is inclined at described second shower 7, is 45-60 ° with described second shower 7 inwall.
Described emission-control equipment, described purification plate 8 is made up of aluminum oxide coating layer, cerium oxide, supporting layer and aluminum oxide coating layer from top to bottom successively, and described supporting layer is the carrier of alveolate texture, and its internal load has copper powder, iron powder and palladium powder.
Described emission-control equipment, the internal diameter of described first shower 2 is the 3/5-4/5 of the internal diameter of described combustion chamber 1, and the internal diameter of described first settling tank 3 is 1.2-1.5 times of the internal diameter of described first shower 1.
Although embodiment of the present invention are open as above, it is not restricted to listed in description and embodiment utilization.It can be applied to various applicable the field of the invention completely.For those skilled in the art, can easily realize other amendment.Therefore do not deviating under the universal that claim and equivalency range limit, the present invention is not limited to specific details and illustrates here and the legend described.
Claims (7)
1. an emission-control equipment, is characterized in that, comprising:
Combustion chamber, it is the cylindrical tube of hollow, the top of described combustion chamber is provided with the first air inlet, and it is communicated with the first air inlet pipe, and its underpart is provided with first row gas port, wherein, described combustion chamber comprises outer wall and inwall, and described outer wall is thermal insulation layer, and its inwall is fire-resistant heat-conducting layer, form the interlayer with certain space between described inwall and outer wall, the upper and lower of described outer wall is respectively equipped with the first delivery port and the first water inlet;
First shower, it is arranged on the below of described combustion chamber, one end of described first shower connects described first row gas port, described first shower is the cylindrical tube of hollow, the middle part of described first shower is provided with a spray arm in intersecting parallels, it comprises two transverse tubes be arranged in parallel, and and the longitudinal tubule (L tubule) that be communicated with mutually vertical with described transverse tube, the described transverse tube of spray arm and the bottom of longitudinal tubule (L tubule) are intervally distributed with multiple through hole, the outer wall of described first shower is provided with the second water inlet of a connection control valve, and it is communicated with described spray arm;
First settling tank, it is positioned at the below of described first shower, and be communicated with the other end of described first shower, described first settling tank is the cylindrical tube of hollow, the top of its sidewall is provided with second exhaust port, and the position of its sidewall bottom described first settling tank is provided with the second delivery port of band control valve.
2. emission-control equipment as claimed in claim 1, it is characterized in that, described in described first air inlet pipe inner distance, the position of the first air inlet certain distance is provided with fire prevention water accepting layer, and it is fibrous reticular structure, and described fire prevention water accepting layer is followed successively by water accepting layer and fireprotection layer along airintake direction.
3. emission-control equipment as claimed in claim 2, is characterized in that, also comprise:
Second settling tank, the top of its sidewall is provided with the second air inlet, described second air inlet is communicated with described second exhaust port by a conduit, the top of described second settling tank is provided with the 3rd exhaust outlet, the position of sidewall bottom described second settling tank of described second settling tank is provided with the 3rd delivery port of band control valve, wherein, described second exhaust port place is provided with removable filter device;
Second shower, its one end is communicated with described 3rd exhaust outlet, and the other end is communicated with air.
4. emission-control equipment as claimed in claim 3, it is characterized in that, wherein, described second shower is the cylindrical tube of hollow, it comprises upper and lower two dismountable upper part and lower part, described upper part and described lower part inside are respectively equipped with two described spray arms in intersecting parallels, the described upper part position that be communicated with two described spray arms corresponding on the outer wall of described lower part is respectively equipped with the 3rd water inlet and the 4th water inlet of being with control valve, described 3rd water inlet is all communicated with described first delivery port of described combustion chamber by conduit with described 4th water inlet.
5. emission-control equipment as claimed in claim 4, it is characterized in that, the purification plate of bearing catalyst is also removably provided with between two in the described second shower described spray arms in intersecting parallels, it is inner that described purification plate is inclined at described second shower, is 45-60 ° with described second shower inwall.
6. emission-control equipment as claimed in claim 5, it is characterized in that, described purification plate is made up of aluminum oxide coating layer, cerium oxide, supporting layer and aluminum oxide coating layer from top to bottom successively, and described supporting layer is the carrier of alveolate texture, and its internal load has copper powder, iron powder and palladium powder.
7. emission-control equipment as claimed in claim 6, it is characterized in that, the internal diameter of described first shower is the 3/5-4/5 of the internal diameter of described combustion chamber, and the internal diameter of described first settling tank is 1.2-1.5 times of the internal diameter of described first shower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510322943.0A CN105032176B (en) | 2015-06-14 | 2015-06-14 | A kind of emission-control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510322943.0A CN105032176B (en) | 2015-06-14 | 2015-06-14 | A kind of emission-control equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105032176A true CN105032176A (en) | 2015-11-11 |
| CN105032176B CN105032176B (en) | 2017-08-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510322943.0A Expired - Fee Related CN105032176B (en) | 2015-06-14 | 2015-06-14 | A kind of emission-control equipment |
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| Country | Link |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004028472A (en) * | 2002-06-26 | 2004-01-29 | Nippon Sanso Corp | Combustion type detoxifying device |
| CN101255993A (en) * | 2007-07-30 | 2008-09-03 | 张文光 | Silicone hydride combustion tower |
| CN202521616U (en) * | 2012-04-27 | 2012-11-07 | 长沙矿山研究院有限责任公司 | Polluted-air purification device of steel structure component after spray painting |
| CN203052679U (en) * | 2012-12-05 | 2013-07-10 | 常州恒威净化设备有限公司 | Integrated tail gas combustion purifier |
| CN204337986U (en) * | 2014-12-22 | 2015-05-20 | 常州恒威净化设备有限公司 | A kind of compact exhaust purifier |
| CN105333444A (en) * | 2015-10-28 | 2016-02-17 | 苏州仕净环保科技股份有限公司 | Silane tail gas combusting dust removing and purifying system |
-
2015
- 2015-06-14 CN CN201510322943.0A patent/CN105032176B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004028472A (en) * | 2002-06-26 | 2004-01-29 | Nippon Sanso Corp | Combustion type detoxifying device |
| CN101255993A (en) * | 2007-07-30 | 2008-09-03 | 张文光 | Silicone hydride combustion tower |
| CN202521616U (en) * | 2012-04-27 | 2012-11-07 | 长沙矿山研究院有限责任公司 | Polluted-air purification device of steel structure component after spray painting |
| CN203052679U (en) * | 2012-12-05 | 2013-07-10 | 常州恒威净化设备有限公司 | Integrated tail gas combustion purifier |
| CN204337986U (en) * | 2014-12-22 | 2015-05-20 | 常州恒威净化设备有限公司 | A kind of compact exhaust purifier |
| CN105333444A (en) * | 2015-10-28 | 2016-02-17 | 苏州仕净环保科技股份有限公司 | Silane tail gas combusting dust removing and purifying system |
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| Publication number | Publication date |
|---|---|
| CN105032176B (en) | 2017-08-08 |
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Inventor after: Zhu Xinjie Inventor before: Huang Zhiqiang |
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Effective date of registration: 20170630 Address after: 530500 the Guangxi Zhuang Autonomous Region Longhu Shanglin County, Nanning city Longhu District Road No. 29 Applicant after: Zhu Xinjie Address before: 530500 the Guangxi Zhuang Autonomous Region Longhu Shanglin County, Nanning city Longhu District Road No. 29 Applicant before: Huang Zhiqiang |
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Effective date of registration: 20170803 Address after: 706, room 140, No. 510000, Zhongshan Avenue, Tianhe District, Guangdong, Guangzhou province (for office use only, not for workshop use) Patentee after: Guangzhou honest Yu Yu Environmental Protection Engineering Co., Ltd. Address before: 530500 the Guangxi Zhuang Autonomous Region Longhu Shanglin County, Nanning city Longhu District Road No. 29 Patentee before: Zhu Xinjie |
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Granted publication date: 20170808 Termination date: 20190614 |