CN104992916B - A kind of etching liquid liquid feed device and the humidifying etching apparatus using the device - Google Patents
A kind of etching liquid liquid feed device and the humidifying etching apparatus using the device Download PDFInfo
- Publication number
- CN104992916B CN104992916B CN201510429608.0A CN201510429608A CN104992916B CN 104992916 B CN104992916 B CN 104992916B CN 201510429608 A CN201510429608 A CN 201510429608A CN 104992916 B CN104992916 B CN 104992916B
- Authority
- CN
- China
- Prior art keywords
- liquid
- bottle
- etching
- erosion
- pressure bottle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
Abstract
The invention discloses a kind of etching liquid liquid feed device, including erosion liquid bottle, the woven hose for exporting etching liquid for containing etching liquid, the erosion liquid bottle is externally provided with the pressure bottle of a sealing, described woven hose one end is in erosion liquid bottle, the other end stretches out the pressure bottle, the top of the erosion liquid bottle is provided with the air intake connected with pressure bottle, and the pressure bottle connects with a compressed air interface that can inject air and a relief valve respectively.The present invention applies certain pressure using compressed air to the liquid level in erosion liquid bottle, so that etching liquid uniformly flows out, and also comes erosion liquid bottle and being separately from other sections for liquid-supplying system, safeguards and use is quite convenient to.Level detection module further is additionally provided, staff can be reminded to change erosion liquid bottle in time.
Description
Technical field
The present invention relates to the etching liquid liquid supply pressure bottle in humidifying etching apparatus, more particularly to a kind of humidifying etching apparatus.
Background technology
ZnO is a kind of semiconductor material with wide forbidden band, and it is a kind of preferable transparent conductive film that film, which is prepared, by it,
Photovoltaic, LED industry have good application prospect.For convenience of the introducing of external cabling, ZnO film typically uses after the completion of preparing
Humidifying lithographic method, electrode is processed in its surface etch.Can etching liquid liquid-supplying system uniformly and stably convey etching liquid, right
Controllability, the uniformity of etching influence very big.Manufacturer is typically designed with reference to Venturi tube structure at present.And this design is present
Following deficiency and defect：
1st, it is too small using the liquid-supplying system liquid supply speed of Venturi tube structure because etching fluid viscosity is larger, it is poor in high level
In the case of not even feed flow, be unfavorable for the debugging of etching technics.
2nd, in etching process, etching liquid is constantly confessed, and liquid level constantly declines, using the liquid-supplying system of Venturi tube structure
Imbibition is more and more difficult, and liquid supply speed also decreases, and influences the uniform and stable property of technique.
Therefore, how to provide a kind of etching liquid liquid-supplying system that can uniformly, stably convey etching liquid be industry urgently
The technical problem of solution.
The content of the invention
The present invention proposes a kind of etching liquid liquid feed device to solve above-mentioned problem of the prior art, including for containing
Erosion liquid bottle, the woven hose for exporting etching liquid of etching liquid, the erosion liquid bottle are externally provided with the pressure bottle of a sealing, the transfusion
Pipe one end is in erosion liquid bottle, the other end stretches out the pressure bottle, and the top of the erosion liquid bottle is provided with the sky connected with pressure bottle
Gas entrance, the pressure bottle connect with a compressed air interface that can inject air and a relief valve respectively.
Preferably, the pressure bottle also connects with a pressure gauge.
Preferably, in addition to one is used to detect the level detection module for losing liquid level in liquid bottle.The side of the pressure bottle
Wall bottom is provided with one perpendicular to its axial opening siphunculus；The level detection module includes in siphunculus and pressure bottle is close
The sheath of envelope, the liquid level sensor being arranged in sheath, be connected with the outer periphery threads of siphunculus, for adjust sheath and sensor with
Lose the adjusting nut of liquid bottle distance.
Preferably, one end of the woven hose stretching pressure bottle is provided with spray head.
Further, air intake of the invention has two kinds of embodiments, and a kind of is the bottleneck and pressure bottle of the erosion liquid bottle
Inner surface between be provided with a c-type jacking block as the air intake connected with pressure bottle.Another kind is the bottleneck of the erosion liquid bottle
Place is provided with a breach as the air intake connected with pressure bottle.
The invention also provides used such as the humidifying etching apparatus of above-mentioned etching liquid liquid feed device.
The present invention's provides certain pressure by compressed air, and etching liquid is at the uniform velocity extruded, reaches the mesh of uniform feed flow
's.The erosion liquid bottle equipped with etching liquid and pressure bottle and liquid level sensor etc. are isolated simultaneously, impurity is avoided and is mixed into etching
Liquid, etching reaction is not interfered with, while be finished erosion liquid bottle and just change, the miscellaneous part of liquid-supplying system can be in order to avoid clear
Wash, maintain easily.The etching liquid level sensing that the present invention is further set, can remind operator in etching liquid surplus deficiency
Member's supplement etching liquid, while ensure the sealing of pressure liquid-supplying system and the adjustability of liquid level sensor in time, it is easy to use,
Detection is accurate.
Brief description of the drawings
Fig. 1 is the stereogram of the present invention；
Fig. 2 is the sectional view of the present invention.
Embodiment
Below in conjunction with drawings and examples, the course of work of the invention is described in detail.
As shown in figure 1, the etching liquid liquid feed device of the present invention, the main erosion liquid bottle 2 for including being used to contain etching liquid, is set
Losing the pressure bottle 1 outside liquid bottle 2, liquid in the woven hose 3 and detection erosion liquid bottle 2 of the bottom of erosion liquid bottle 2 is inserted into through pressure bottle 1
The level detection module 4 of face height.
The pressure bottle 1 of the present invention is the canister of a sealing, including a body with bottleneck and carries out bottleneck
The flange top cover of sealing.Be mounted with flange one can injecting compressed air compressed air interface 5 and one and pressure release
The interface 6 of valve connection, the top for then losing liquid bottle 2 are provided with the air intake that is connected with pressure bottle 1, it is necessary to when exporting etching liquid,
Compressed air is injected from compressed air interface, erosion liquid bottle 2 is then entered to by the bottleneck of air intake from erosion liquid bottle 2
Interior, so as to etching liquid be promoted to be flowed out from woven hose, the exit of woven hose can also connect spray head, the quarter so sprayed
It is more uniform to lose liquid.This method can make size of the liquid supply speed not by liquid measure, and liquid supply speed can meet to require.Enter one
Step can also further install a pressure gauge connection 7 connected with pressure gauge on flange, so as to accurately control output to carve
Lose the amount of liquid.
Because the liquid measure size of the erosion liquid bottle 2 in pressure bottle 1 can not be observed intuitively, detected by level detection module
Liquid level is to certain altitude, it is possible to opens flange top cover, the erosion liquid bottle more renewed.The level detection module of the present invention includes sheath
8th, liquid level sensor 9 and adjusting nut 10.In order to install the level detection module, the sidewall bottom of pressure bottle 1 is provided with one and hung down
Directly in its axial opening siphunculus 11, the siphunculus 11 can cast shape with being connected inside pressure bottle 1 together with pressure bottle 1
Into an entirety, sheath 8 is just arranged in this siphunculus 11, and sheath 8 is adopted made of plastic, and its periphery is provided with annular groove, annular
Slightly protruding is provided with groove in the sealing ring 12 of slot opening, thus sheath 8 pressure bottle 1 will have been carried out in the siphunculus it is close
Seal, liquid level sensor 9 is then placed in sheath 8, liquid level sensor can use ultrasonic liquid level sensor to use electricity
Appearance formula liquid level sensor, the siphunculus of metal can avoid outer bound pair sensor from being disturbed, and sheath 8 can be avoided in pressure bottle
Pressure liquid level sensor is impacted, while also because its use plastic material, do not interfere with the work of sensor.Siphunculus
Periphery be provided with screw thread, adjusting nut 10 is threadedly coupled with siphunculus, while is also fixedly connected with sensor and sheath, rotation adjust
Save nut 10, it is possible to along the position for being adjusted axially sensor and sheath of siphunculus, can so be adjusted according to actual conditions
The distance of sensor and erosion liquid bottle, is easy to detect.When detecting that etching liquid is soon finished, it is possible to sound the alarm, carry
The erosion liquid bottle that awake staff more renews in time, it is very convenient.
The air intake of pressure bottle bottle mouth position of the present invention can use the bottleneck and pressure bottle flange top cover in erosion liquid bottle
One c-type jacking block 13 is set between inner surface, and compressed air enters in bottle from the indentation, there of c-type top cover from bottleneck, to etching liquid
Liquid level apply pressure, etching liquid is smoothly flowed out from woven hose, this mode isolates etching liquid with liquid supply pressure bottle, with
Avoid impurity from being mixed into etching liquid, influence etching reaction.Liquid-supplying system can maintain easily from cleaning simultaneously.Pressure bottle bottle mouth position
Air intake can also be bottle mouth position set a breach, although bottleneck upper end is in contact with the inner surface of blind flange,
Compressed air can enter from indentation, there, can also equally reach identical effect.
Equally also protection has used the humidifying etching of the etching liquid liquid feed device in any of the above-described one embodiment to the present invention
Equipment.
It should be appreciated that the above-mentioned description for specific embodiment is more detailed, therefore can not be considered to this
The limitation of invention patent protection scope, scope of patent protection of the invention should be determined by the appended claims.
Claims (7)
1. a kind of etching liquid liquid feed device, including for containing erosion liquid bottle, the woven hose for exporting etching liquid of etching liquid, its
It is characterised by, the erosion liquid bottle is externally provided with the pressure bottle of a sealing, and described woven hose one end is in erosion liquid bottle, the other end stretches out
The pressure bottle, the top of the erosion liquid bottle are provided with the air intake connected with pressure bottle, and the pressure bottle can be noted with one respectively
Enter compressed air interface and the relief valve connection of air；
Also include a level detection module for being used to detect liquid level in erosion liquid bottle；
The pressure bottle is made of metal；
The sidewall bottom of the pressure bottle is provided with one perpendicular to its axial opening siphunculus；The level detection module includes being located at
The sheath sealed in siphunculus and by pressure bottle, the liquid level sensor being arranged in sheath, is connected with the outer periphery threads of siphunculus, is used for
Adjust sheath and sensor and the adjusting nut of erosion liquid bottle distance.
2. etching liquid liquid feed device as claimed in claim 1, it is characterised in that the pressure bottle also connects with a pressure gauge.
3. etching liquid liquid feed device as claimed in claim 1, it is characterised in that the liquid level sensor passes for supersonic liquid level
Sensor or capacitance level transducer.
4. etching liquid liquid feed device as claimed in claim 1, it is characterised in that one end that the woven hose stretches out pressure bottle is set
There is spray head.
5. the etching liquid liquid feed device as described in Claims 1-4 any one, it is characterised in that the bottleneck of the erosion liquid bottle
A c-type jacking block is provided between the inner surface of pressure bottle as the air intake connected with pressure bottle.
6. the etching liquid liquid feed device as described in Claims 1-4 any one, it is characterised in that the bottleneck of the erosion liquid bottle
Place is provided with a breach as the air intake connected with pressure bottle.
7. the humidifying etching apparatus of the etching liquid liquid feed device as described in above-mentioned any claim is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510429608.0A CN104992916B (en) | 2015-07-21 | 2015-07-21 | A kind of etching liquid liquid feed device and the humidifying etching apparatus using the device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510429608.0A CN104992916B (en) | 2015-07-21 | 2015-07-21 | A kind of etching liquid liquid feed device and the humidifying etching apparatus using the device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104992916A CN104992916A (en) | 2015-10-21 |
| CN104992916B true CN104992916B (en) | 2018-02-23 |
Family
ID=54304705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510429608.0A Active CN104992916B (en) | 2015-07-21 | 2015-07-21 | A kind of etching liquid liquid feed device and the humidifying etching apparatus using the device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104992916B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201921800U (en) * | 2011-01-19 | 2011-08-10 | 沈阳芯源微电子设备有限公司 | Nitrogen pressure type photoresist supply system capable of preventing air bubbles |
| CN103041954A (en) * | 2011-10-13 | 2013-04-17 | 北大方正集团有限公司 | Liquid level alarm system for spin coating equipment |
| CN203767976U (en) * | 2014-02-27 | 2014-08-13 | 常州瑞择微电子科技有限公司 | Automatic liquid charging mechanism of SPM system |
| CN204946867U (en) * | 2015-07-21 | 2016-01-06 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of etching liquid liquid feed device and use the humidifying etching apparatus of this device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3032428B2 (en) * | 1994-07-28 | 2000-04-17 | 大日本スクリーン製造株式会社 | Liquid supply device |
-
2015
- 2015-07-21 CN CN201510429608.0A patent/CN104992916B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201921800U (en) * | 2011-01-19 | 2011-08-10 | 沈阳芯源微电子设备有限公司 | Nitrogen pressure type photoresist supply system capable of preventing air bubbles |
| CN103041954A (en) * | 2011-10-13 | 2013-04-17 | 北大方正集团有限公司 | Liquid level alarm system for spin coating equipment |
| CN203767976U (en) * | 2014-02-27 | 2014-08-13 | 常州瑞择微电子科技有限公司 | Automatic liquid charging mechanism of SPM system |
| CN204946867U (en) * | 2015-07-21 | 2016-01-06 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of etching liquid liquid feed device and use the humidifying etching apparatus of this device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104992916A (en) | 2015-10-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2016533309A5 (en) | ||
| CN104555870A (en) | Liquid quantitative supply device | |
| CN205796131U (en) | Celiac drainage flushing device | |
| CN204946867U (en) | A kind of etching liquid liquid feed device and use the humidifying etching apparatus of this device | |
| CN104992916B (en) | A kind of etching liquid liquid feed device and the humidifying etching apparatus using the device | |
| CN207843807U (en) | A kind of reagent spray bottle | |
| CN205323802U (en) | Rubber head burette | |
| CN211391782U (en) | Liquid filling device | |
| CN218236539U (en) | Flow monitoring mechanism | |
| CN204008239U (en) | Hyperchannel air sampler | |
| CN205886919U (en) | Accurate liquid taking device once | |
| CN216509251U (en) | Device that convenient regulation of nebula filling dosage | |
| CN211716247U (en) | Low-pressure gas constant-current device | |
| CN104671172B (en) | A kind of suction type dosing filling machine, packaging process | |
| CN109470420B (en) | Fluid system gas tightness smog leak hunting device | |
| CN211122726U (en) | A diffusion ware for soil alkaline hydrolysis nitrogen determination | |
| CN209194099U (en) | A kind of electroplating bath automatic feeding device | |
| CN106944998A (en) | A kind of tuning for Controllable Pitch Propeller blade center of gravity automatic marking device and its labeling method | |
| CN113318922A (en) | Dispensing machine | |
| CN205981564U (en) | Oil tank gas tightness detects gas supply system | |
| CN208253145U (en) | A kind of adjustable micro lubricating agent injection apparatus | |
| CN206874413U (en) | A kind of electronic fuel pump assembly | |
| CN106733291A (en) | A kind of plank viscose glue injection equipment | |
| CN206845917U (en) | Bolus injection adjustable valve | |
| CN216997627U (en) | Quantitative filling device for mineral water |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |