CN104988466A - Method for preparing alpha-Al2O3 coating by using double-glow plasma diffusion metalizing technology at low temperature - Google Patents
Method for preparing alpha-Al2O3 coating by using double-glow plasma diffusion metalizing technology at low temperature Download PDFInfo
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- CN104988466A CN104988466A CN201510293063.5A CN201510293063A CN104988466A CN 104988466 A CN104988466 A CN 104988466A CN 201510293063 A CN201510293063 A CN 201510293063A CN 104988466 A CN104988466 A CN 104988466A
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Abstract
The invention relates to a new method for preparing an alpha-Al2O3 coating by using a double-glow plasma diffusion metalizing technology at a low temperature. Firstly, a rare earth element Y and an alpha-Al2O3 seed crystal are added in an Al target, and an Al coating which is formed by doping of Y and alpha-Al2O3 seed crystal is prepared on a 316L stainless steel surface with the double-glow plasma diffusion metalizing technology; and then, under the low temperature of 580 DEG C, the coating is oxidized by plasmas, so that the coating with a high content of alpha-Al2O3 on the surface is obtained. The invention provides the new method for preparing the coating with the high content of alpha-Al2O3 on the 316L stainless steel surface at the low temperature; and the coating can be widely applied to the fields such as corrosion resistance, oxidation resistance and tritium resistance of stainless steel metals and the like.
Description
Technical field
The present invention relates to one and utilize double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the novel method of coating, belongs to technical field of surface coating.
Background technology
α-Al
2o
3there is thermodynamic stability, even if at high temperature also have good insulativity, excellent chemical stability, and high, the anti-tritium-permeation of hardness is strong and have the advantages such as good selfreparing, therefore, has a wide range of applications in fields such as electronic devices and components, optical field and machineries.Current preparation α-Al
2o
3the method of coating can be divided into step deposition and a Combined Processing method (first preparing the process of aluminium lamination rear oxidation) by preparation section.One step sedimentation mainly contains physical vapor deposition, chemical vapour deposition and plasma spraying etc.Traditional chemical Vapor deposition process, generally will be heated to 1000 matrix
omore than C just can make the Al of metastable phase
2o
3change and form stable α-Al
2o
3.But thermal expansion mismatch can produce unrelieved stress, and the crackle that unrelieved stress produces can have a negative impact to the sticking power between film and matrix.Chemical Vapor deposition process is not suitable in the upper deposition of rapid steel (HSS), and which limits the selection of matrix, too high preparation temperature can cause damage to matrix and affect its stuctures and properties.Physical vaporous deposition provides the low temperature deposition methods of feasible replacement high temperature, and these methods are normally used for the Al of depositing either amorphous at low temperatures
2o
3coating.But, in order to obtain α phase, noncrystal membrane will stand anneal in post synthesis, and its temperature is generally 750
oc or higher.Therefore, the how high-quality α of low-temperature growth-Al
2o
3coating tool is of great significance.
αphase transformation is the process of a nucleation and growing, and the major part of wherein phase transformation institute energy requirement is used for overcoming nucleation barrier.Unformed Al
2o
3→ γ phase belongs to non-lattice rebuilding type and changes, a small amount of energy is only needed to complete, and the transformation of θ phase → α phase belongs to the transformation of lattice rebuilding type, follow forming core → growth mechanism, namely in θ phase, α nucleus is first generated, exceed critical grain size by crystal boundary passing and complete phase transformation, need higher phase transformation intensity of activation, most of energy expenditure is in nucleation process.Therefore, need higher temperature to provide the nucleating potential barrier of α.At corrosion science and guard technology periodical 2000, the research such as 12 (1) interim Li Mei bolts finds, aluminising coating is in common thermal oxidation process, and starting stage surface forms metastable phase.Thereafter, α-Al
2o
3at metastable phase Al
2o
3/ alloy interface forming core, stop metastable phase growth, and the metastable phase initially formed starts to α phase in version.Therefore, stable state α-Al is promoted
2o
3preferentially forming and reduce crystal conversion temperature can by increasing Enhancing Nucleation Density and high-energy ion bombardment to overcome α-Al
2o
3nucleating potential barrier realize.
Surface mass can be promoted to accelerate by high-energy ion bombardment mobile, ion bombardment simultaneously also can make crystal formation defect.The lattice defect that ion bombardment produces also can to promotion stable state α-Al
2o
3preferentially formed and produce material impact.Because ion bombardment is a kind of reactivation process, can produce a lot of lattice defect in this process, these defects have laid in certain energy, and fault offset at a certain temperature can offset partial reaction energy barrier, promote stable state α-Al
2o
3formation.Add and there is the alloying element of " catalytic effect " or nanocrystalline meeting has influence on stable state α-Al
2o
3preferentially formed because crystal conversion this again in forming core, the process of growing up, existence that is nanocrystalline or alloying element adds the formation of crystal boundary, and this provides rapid diffusion passage for aluminium and oxygen, is also Al simultaneously
2o
3the transformation of crystal formation provides more forming core particle, when nucleus depend on these particles in its surface forming core time, nucleating surface can reduce, thus forming core is more easily carried out, and is macroscopically then showing as α-Al
2o
3the reduction of transformation temperature.In addition, in the preparation process of material, mix the alloying element (yttrium, cerium etc.) with catalytic effect and can promote α-Al
2o
3growth.On Surface and Coatings Technology periodical 202 phases in 2008, the people such as Rovere studies and finds that the doping of a small amount of Y can enter into metastable phase Al
2o
3defect in go, because adding of Y impels negative ions room compound and structural rearrangement releases energy, thus can metastable phase Al be promoted
2o
3to α-Al
2o
3transformation.Meanwhile, Y add the antioxidant property also greatly improving Cr-Al-N coating.
Under plasma bombardment, by adding rare earth element y and α-Al
2o
3crystal seed promotes stable state α-Al
2o
3low temperature formed, this technology has important theory significance and using value in resistance tritium coating, low-temperature oxidation and metal protection coatings art.
Summary of the invention
The object of the invention is to open one and utilize double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the novel method of coating.Prepare temperature required low, do not affect substrate performance, enhance coating.In the preparation of 316L stainless steel surface containing α-Al
2o
3the aluminide coating of crystal seed and rare earth element y, the Fe-Al transition layer formed in deposition process can improve the bonding strength of coating and matrix.Meanwhile, by introducing α-Al
2o
3crystal seed and rare earth element y reduce α-Al
2o
3the formation temperature of coating.
Technical solution of the present invention is: in double glow discharge alloying process technology, and in the initial depositional phase, sputtering and heavily sputtering and deposition process exist simultaneously, and this makes FeAl and Fe
3the easier interface at coating and matrix of Al phase is formed, along with the carrying out of sputtering, because the voltage of the voltage ratio matrix of target is more negative, the Al particle sputtered out from target is far longer than the Fe particle sputtered out from matrix, deposition occupies dominant position, make Fe and Al distribution in deposited coatings form concentration gradient, and then impel Al to spread to matrix direction.And Fe spreads to coatingsurface, cause mutually to be diffused in subsequent deposition process be more conducive to carrying out because bombardment defines a large amount of defects, define Fe-Al phase diffusion layer, thus obtain rich surface Al and inside is the aluminising coating of FeAl metallurgical binding.By plasma bombardment, interpolation α-Al in oxidising process
2o
3low-temperature growth high content of alpha-Al is realized under the coupling of crystal seed and rare earth element y
2o
3coating.
Ultimate principle of the present invention is: α-Al
2o
3the granularity of crystal seed is very little, and its crystalline structure and α-Al
2o
3nucleus is the same.At α-Al
2o
3also the process of forming core-growth is followed in process of growth.At oxidation stage subsequently, α-Al in the coating
2o
3crystal seed is to α-Al
2o
3be formed with inducing action, the Al near crystal seed to be attached on crystal seed thus to reduce forming core energy; Meanwhile, the promoter action of Y to metastable phase depends on the heterogeneous forming core of microtexture and hinders its grain growth; Research finds, can promote when only having Y content lower that metastable phase is to the transformation of α phase, the Y that content is high then hinders the formation of α phase.Meanwhile, rare earth element radius ratio is comparatively large, can eliminate lattice vacancy, room can be stoped to be formed at alloy/interfacial oxide film, improves bonding force and compactness.
The method comprises following concrete steps:
(1) by 10 wt% Y, 10 wt% α-Al
2o
3crystal seed and 80 wt% Al powder carry out even ball milling mixing on planetary ball mill, utilize on small-sized chilling press and are pressed into disk, then carry out sintering obtained Al/Y/ α-Al in vacuum hotpressing stove
2o
3target;
(2) doped alpha-Al is prepared by double glow plasma surface alloying technology at 316L stainless steel surface
2o
3the Al coating of crystal seed and rare earth element y.Experiment parameter is: vacuum tightness, 2 × 10
-4pa; Source voltage ,-700 V, matrix voltage ,-300 V, interpole gap, 15 mm; Air pressure, 30 Pa; Sputtering time, 3h; Sputter temperature, 580
oc;
(3) mode of plasma oxidation is adopted to contain Y and α-Al to obtained
2o
3the Al coating of crystal seed codoped is heat-treated.Oxidizing temperature is 580
oc, argon flow amount 40 sccm, air pressure 40 Pa, oxidization time 1h, by changing the size of single factor test oxygen flow, prepare satisfactory coating, oxygen flow is 0.5 ~ 4sccm.
The technical progress that the present invention obtains is: 1) this α-Al
2o
3coating adopts codoped α-Al
2o
3the Al target of crystal seed and rare earth element y, utilizes double glow plasma surface alloying technology to ooze altogether at stainless steel surface, (ion bombardment, interpolation α-Al under achieving three factor couplings
2o
3crystal seed and rare earth element y) low temperature 580
ohigh content of alpha-Al is prepared under C
2o
3coating.2) double glow plasma surface alloying technology is utilized to make preparation α-Al
2o
3the temperature of coating reduces, and prevents the performance of matrix to be subject to temperatures involved.3) defects such as the aluminum coating surfacing of preparing is fine and close, non-microcracked and Microfocus X-ray tube, and matrix combines good, continuously, interface without hole and crackle, aluminium element percentage composition in interface distribution gradient, this α-Al
2o
3coating is improved to the stainless performance such as corrosion-resistant and anti-oxidant of 316L.
Accompanying drawing explanation
Fig. 1 is that schematic diagram is arranged in source electrode and workpiece pole;
Fig. 2 is the GAXRD collection of illustrative plates of sample 1-4;
The surface topography that Fig. 3 (a) (b) (c) (d) is sample 1-4;
Fig. 4 is the cut curve that (a) (b) (c) (d) is sample 1-4;
Fig. 5 is the polarization curve of sample 1-4 in 3.5%NaCl solution.
Embodiment
Below in conjunction with specific embodiments and the drawings, the invention will be further described.
In double glow plasma surface alloying process, we adopt hollow cathode effect to carry out heated substrate, and its electrode structure as shown in Figure 1.Argon gas is filled with after body of heater is evacuated to vacuum, switch on power and will produce glow discharge between source electrode 1 and workpiece pole 2, the argon ion bombardment target 3 utilizing glow discharge to produce, alloying element can be made on the one hand to be sputtered out from source electrode target, to transport the surface of arrival workpiece 5 by space and adsorbed by workpiece surface.Meanwhile, argon ion bombardment workpiece makes it be heated to high temperature, is measured the temperature in stove by thermopair 4.Because the fusing point of Al is only 660.4
oC, in double glow plasma surface alloying technique, when temperature too high meeting, aluminum portions region melted and ooze out aluminium liquid thus make localised glow enhancing generation beat arc phenomenon, in order to avoid this phenomenon, the needs (580 of substrate temperature can be met again simultaneously
oc), adopt two pieces of stainless steel plates 6 to form hollow cathode effect and carry out heated parts 5.
Embodiment 1
(1) by 10 wt% Y, 10 wt% α-Al
2o
3crystal seed and 80 wt% Al powder carry out even ball milling mixing on planetary ball mill, utilize on small-sized chilling press and are pressed into disk, then carry out sintering obtained Al/Y/ α-Al in vacuum hotpressing stove
2o
3target;
(2) doped alpha-Al is prepared by double glow plasma surface alloying technology at 316L stainless steel surface
2o
3the Al coating of crystal seed and rare earth element y.Experiment parameter is: vacuum tightness, 2 × 10
-4pa; Source voltage ,-700 V, matrix voltage ,-300 V, interpole gap, 15 mm; Air pressure, 30 Pa; Sputtering time, 3h; Sputter temperature, 580
oc;
(3) mode of plasma oxidation is adopted to contain Y and α-Al to obtained
2o
3the Al coating of crystal seed codoped is heat-treated.Oxidizing temperature is 580
oc, argon flow amount 40 sccm, air pressure 40 Pa, oxidization time 1h, by changing the size of single factor test oxygen flow, prepare satisfactory coating, oxygen flow is 0.5sccm.
Embodiment 2
(1) by 10 wt% Y, 10 wt% α-Al
2o
3crystal seed and 80 wt% Al powder carry out even ball milling mixing on planetary ball mill, utilize on small-sized chilling press and are pressed into disk, then carry out sintering obtained Al/Y/ α-Al in vacuum hotpressing stove
2o
3target;
(2) doped alpha-Al is prepared by double glow plasma surface alloying technology at 316L stainless steel surface
2o
3the Al coating of crystal seed and rare earth element y.Experiment parameter is: vacuum tightness, 2 × 10
-4pa; Source voltage ,-700 V, matrix voltage ,-300 V, interpole gap, 15 mm; Air pressure, 30 Pa; Sputtering time, 3h; Sputter temperature, 580
oc;
(3) mode of plasma oxidation is adopted to contain Y and α-Al to obtained
2o
3the Al coating of crystal seed codoped is heat-treated.Oxidizing temperature is 580
oc, argon flow amount 40 sccm, air pressure 40 Pa, oxidization time 1h, by changing the size of single factor test oxygen flow, prepare satisfactory coating, oxygen flow is 1sccm.
Embodiment 3
(1) by 10 wt% Y, 10 wt% α-Al
2o
3crystal seed and 80 wt% Al powder carry out even ball milling mixing on planetary ball mill, utilize on small-sized chilling press and are pressed into disk, then carry out sintering obtained Al/Y/ α-Al in vacuum hotpressing stove
2o
3target;
(2) doped alpha-Al is prepared by double glow plasma surface alloying technology at 316L stainless steel surface
2o
3the Al coating of crystal seed and rare earth element y.Experiment parameter is: vacuum tightness, 2 × 10
-4pa; Source voltage ,-700 V, matrix voltage ,-300 V, interpole gap, 15 mm; Air pressure, 30 Pa; Sputtering time, 3h; Sputter temperature, 580
oc;
(3) mode of plasma oxidation is adopted to contain Y and α-Al to obtained
2o
3the Al coating of crystal seed codoped is heat-treated.Oxidizing temperature is 580
oc, argon flow amount 40 sccm, air pressure 40 Pa, oxidization time 1h, by changing the size of single factor test oxygen flow, prepare satisfactory coating, oxygen flow is 2sccm.
Embodiment 4
(1) by 10 wt% Y, 10 wt% α-Al
2o
3crystal seed and 80 wt% Al powder carry out even ball milling mixing on planetary ball mill, utilize on small-sized chilling press and are pressed into disk, then carry out sintering obtained Al/Y/ α-Al in vacuum hotpressing stove
2o
3target;
(2) doped alpha-Al is prepared by double glow plasma surface alloying technology at 316L stainless steel surface
2o
3the Al coating of crystal seed and rare earth element y.Experiment parameter is: vacuum tightness, 2 × 10
-4pa; Source voltage ,-700 V, matrix voltage ,-300 V, interpole gap, 15 mm; Air pressure, 30 Pa; Sputtering time, 3h; Sputter temperature, 580
oc;
(3) mode of plasma oxidation is adopted to contain Y and α-Al to obtained
2o
3the Al coating of crystal seed codoped is heat-treated.Oxidizing temperature is 580
oc, argon flow amount 40 sccm, air pressure 40 Pa, oxidization time 1h, by changing the size of single factor test oxygen flow, prepare satisfactory coating, oxygen flow is 4sccm.
As follows to the performance analysis of sample:
1, the phase composite of coatingsurface:
Fig. 2 is the GAXRD collection of illustrative plates of sample 1-4.As seen from Figure 2, α-Al is all had in the zone of oxidation prepared under different oxygen flow
2o
3and Fe
2o
3diffraction peak.Along with the change of oxygen flow, the thing in coating is mutually different, when oxygen flow is 0.5sccm, still has FeAl and Fe in coating
2al
5the existence of phase, when this illustrates that oxygen is insufficient, the Fe-Al phase in coating is not substantially oxidized; When flow is 1sccm, Fe
2al
5disappear mutually, meanwhile, oxygen flow increases, α-Al in coating
2o
3diffraction peak grow, this illustrates O
2-the concentration of ion plays vital effect for the diffusion of oxonium ion, and oxygen concentration increases α-Al
2o
3be formed with promoter action; When oxygen flow continues to increase to 2-4sccm, not there is considerable change in the thing in coating mutually, just Fe
2o
3with α-Al
2o
3becoming of diffraction peak is more sharp-pointed, illustrates that oxygen flow increases, and makes more Fe-Al phase oxidized.Meanwhile, the Al of metastable phase crystal formation is not found in the coating
2o
3existing, may be rare earth element y and α-Al
2o
3adding of crystal seed facilitates metastable phase to α-Al
2o
3transformation.
2, the surface topography of coating
The surface topography of sample 1-4 is as shown in Fig. 3 (a) (b) (c) (d).As seen from Figure 3, coating is when oxygen flow is 0.5sccm oxidation, and the surface topography of sample 1 there is no obvious change; When oxygen flow be increased to 1sccm time, the coatingsurface of sample 2 becomes finer and close, has occurred the structure of island projection; When oxygen flow is 2sccm, oxide covering surface no significant defect, surfaceness increases, and coatingsurface island projection increases.Y is added in the growth that can suppress nanocrystal to a certain extent, although the coatingsurface of preparation is more coarse, the release of Y element, can improve the mechanical property of coating, increases the bonding force of coating.Along with oxygen flow increase to 4sccm further time, there is a large amount of hole and crackle in sample 4 floating coat skin, even the phenomenon of peeling off appears in local, and this may be because oxygen flow increases the Al causing being formed
2o
3coating is not mated thus the peeling phenomenon produced with the thermal expansivity of matrix.
3, the bonding force of coating
The cut curve that Fig. 4 (a) (b) (c) (d) is sample 1-4.As seen from Figure 4, the bonding force of coating is along with the increase first increases and then decreases of oxygen flow.As shown in Fig. 4 (a), when oxygen flow is 0.5sccm, the bonding force of sample 1 coating reaches 68N; Oxygen flow be 1 and 2sccm time, the bonding force of sample 2 and 3 coating all reaches more than 70N, research find Y can promote Al
2o
3the selective oxidation of coating, reduces alloy and forms Al
2o
3the critical Al content of coating; Meanwhile, rare earth element y or its oxide compound are present in alloy interface place, make oxide covering and alloy surface mortise; On the other hand, rare earth element radius is large, can eliminate lattice vacancy, stops room to be formed, improve bonding force at alloy/oxide covering interfacial energy; Along with the further increase of oxygen flow, the bonding force of sample 4 coating declines comparatively obvious, only has 50N, but still can be attached on matrix, and this may be that coatingsurface defines the aluminum oxide coating layer of fragility, therefore more easily peels off because oxygen flow increases.
In double glow plasma surface alloying technology, owing to defining the metallurgical binding of Fe-Al between coating and matrix, therefore can find out, the bonding force of coating is all better, research shows that the critical bonding force of coating reaches the operating mode application that 30N can meet actual skimming wear, this shows that prepared coating is all combined row better with matrix, is enough to the demand meeting practical application.
4, the corrosion resisting property of coating
Fig. 5 is the polarization curve of sample 1-4 in 3.5%NaCl solution.As shown in Figure 5, the coatings after oxidation goes out good corrosion resistance nature, and when oxygen flow is 2sccm, the corrosion potential of sample 3 coating is up to-0.130V, and corrosion current lowest order is 0.009 μ Acm
-2, than 316L stainless steel base, reduce nearly 3 orders of magnitude.Along with the increase of oxygen flow, the corrosion potential of coating first rises and then decreases.On the whole, adulterate Y and α-Al
2o
3the corrosive nature of the oxide covering of seed crystal improves, and this may be because of these Y
2o
3with α-Al
2o
3" physical barrier " or Rare Earth Y can be served as in the environment of corrosion
2o
3particle can be formed many " corrosion microbattery ", and wherein oxide particle serves as negative electrode and stainless steel base serves as anode; Meanwhile, entering of these particles has also been impelled grain refining thus the corrosive nature of matrix material is improved.
Embody rule approach of the present invention is a lot, and the above is only the preferred embodiment of the present invention, should be understood that; for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvement, these improvement also should be considered as protection scope of the present invention.
Claims (6)
1. the invention discloses one and utilize double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the method of coating, is characterized in that: obtain Al/Y/ α-Al by the mode of hot pressed sintering
2o
3composite target material, adopts double glow plasma surface alloying technology to prepare containing Y and α-Al at 316L stainless steel surface
2o
3the Al coating of crystal seed codoped; Plasma oxidation method is utilized to obtain surperficial high content of alpha-Al
2o
3coating.
2. one as claimed in claim 1 utilizes double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the novel method of coating, is characterized in that the method comprises following concrete steps:
(1) by 10 wt% Y, 10 wt% α-Al
2o
3crystal seed and 80 wt% Al powder carry out even ball milling mixing on planetary ball mill, utilize on small-sized chilling press and are pressed into disk, then carry out sintering obtained Al/Y/ α-Al in vacuum hotpressing stove
2o
3target;
(2) doped alpha-Al is prepared by double glow plasma surface alloying technology at 316L stainless steel surface
2o
3the Al coating of crystal seed and rare earth element y; Experiment parameter is: vacuum tightness, 2 × 10
-4pa; Source voltage ,-700 V, matrix voltage ,-300 V, interpole gap, 15 mm; Air pressure, 30 Pa; Sputtering time, 3h; Sputter temperature, 580
oc;
(3) mode of plasma oxidation is adopted to contain Y and α-Al to obtained
2o
3the Al coating of crystal seed codoped is heat-treated, and oxidizing temperature is 580
oc, argon flow amount 40 sccm, air pressure 40 Pa, oxidization time 1h, by changing the size of single factor test oxygen flow, prepare satisfactory coating, oxygen flow is 0.5 ~ 4sccm.
3. one as claimed in claim 1 utilizes double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the method of coating, is characterized in that: this Al/Y/ α-Al
2o
3containing 10 wt% Y, 10 wt% α-Al in composite target material
2o
3crystal seed and 80 wt% Al powder.
4. one as claimed in claim 1 utilizes double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the method of coating, is characterized in that: adopt doped with rare-earth elements Y and α-Al
2o
3the coupling of crystal seed reduces α-Al
2o
3the formation temperature of coating.
5. one as claimed in claim 1 utilizes double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the method of coating, is characterized in that: make coating and matrix define metallurgical binding, difficult drop-off by double glow plasma surface alloying technology, can meet the application requiring of various operating mode completely.
6. one as claimed in claim 1 utilizes double glow plasma surface alloying technology low-temperature growth α-Al
2o
3the method of coating, is characterized in that: this coating can be applicable to corrosion-resistant, the anti-oxidant and field such as resistance tritium etc. of metal stainless steel.
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| CN105714244A (en) * | 2016-03-30 | 2016-06-29 | 青岛滨海学院 | Titanium alloy surface ceramic/metal gradient high-temperature composite coating and preparing method thereof |
| CN107641794A (en) * | 2017-09-30 | 2018-01-30 | 铜山县利国钢铁有限公司 | A kind of stable corrosion-resistant stainless steel part |
| CN108411262A (en) * | 2018-03-05 | 2018-08-17 | 华南理工大学 | A kind of low-temp reaction sputtering sedimentation nanometer α-Al2O3The method of coating |
| CN108796430A (en) * | 2018-05-22 | 2018-11-13 | 江苏容源电力设备有限公司 | Buried change electric appliance external surface treatment method |
| CN109987947A (en) * | 2019-04-19 | 2019-07-09 | 中国科学院上海硅酸盐研究所 | Utilize the thermally conductive method with mechanical property of in-situ stress induced transformation Synchronous fluorimetry aluminum oxide coating layer |
| CN109989044A (en) * | 2019-04-03 | 2019-07-09 | 华南理工大学 | A kind of AlCr+ α-Al2O3Sputtering target material and preparation and application |
| CN110073029A (en) * | 2017-03-15 | 2019-07-30 | 捷客斯金属株式会社 | Al2O3Sputtering target and its manufacturing method |
| CN113802094A (en) * | 2020-06-16 | 2021-12-17 | 中微半导体设备(上海)股份有限公司 | Coating method of corrosion-resistant coating, plasma etching part and reaction device |
| CN114196917A (en) * | 2021-11-05 | 2022-03-18 | 南华大学 | Al2O3Tritium-resistant coating and preparation method thereof |
| CN114807854A (en) * | 2022-04-14 | 2022-07-29 | 华南理工大学 | Method for depositing alpha-alumina dielectric film on surface of silicon substrate |
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