CN104976965A - Convergent light polarization interference surface deviation detection device and method thereof - Google Patents
Convergent light polarization interference surface deviation detection device and method thereof Download PDFInfo
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- CN104976965A CN104976965A CN201510371432.8A CN201510371432A CN104976965A CN 104976965 A CN104976965 A CN 104976965A CN 201510371432 A CN201510371432 A CN 201510371432A CN 104976965 A CN104976965 A CN 104976965A
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Abstract
The invention relates to a convergent light polarization interference surface deviation detection device and a method thereof. The device comprises a polarization beam splitter, a light converging standard lens, a laser beam expander and a laser light source which are fixed just below the polarization beam splitter, a polarizer arranged between the polarization beam splitter and the detection laser light source, a first 1/4 wave plate and a lens to be tested which are sequentially fixed just at the right side of the polarization beam splitter, a receiving screen which is positioned and fixed just at the left side of the polarization beam splitter, an analyzer arranged just at the left side of the polarization beam splitter, as well as a second 1/4 wave plate and an optical sample plate which are positioned and fixed just above the polarization beam splitter. With the polarization interference method in which the above device is utilized adopted, two coherent light beams have approximately-equal light intensity, and the brightness of fringes can be adjusted, the influences of optical noises such as stray light can be inhibited, and high-contrast interference fringes can be obtained, and errors of later-stage image processing can be decreased, and the accuracy of lens detection can be improved, and light energy can be utilized maximally, and background stray light can be eliminated, and the contrast of the interference fringes can be improved.
Description
Technical field
The present invention relates to the object of the invention to be to overcome above-mentioned defect, a kind of Path of Convergent Rays polarization interference face type deviation detecting method is provided, is specially adapted to the detection method of nondestructive test spheric glass Curvature Radius Deviation, astigmatism deviation, partial deviations.
Background technology
At present, the optical element surface form deviation after inspection polishing adopts testplate or interferometer to detect usually, and the method for inspection is all the principle of interference according to light, and at the surface form deviation of optical workshop inspection optical element, conventional method has interference pattern method and shadowing method.Interference pattern method can be divided into contact method (i.e. template method) and eyes with non-contact method (i.e. interferometer mode).
Detect at optical workshop optical mirror slip surface form deviation and usually adopt testplate method, and the inspection at end before dispatching from the factory after eyeglass lower wall adopts interferometer detection method.The two is all principle of interference according to light, is determined the surface form deviation of eyeglass by the number of the interference fringe observed, shape, variable condition and color.Template method detects needs eyeglass to be measured directly to contact with testplate, pressurization is observed, this detection method not only causes destruction to a certain degree to the surface smoothness of eyeglass, repetitive measurement also can make testplate wear and tear, bring error to measurement result, causing does over again repeatedly even scraps, greatly reduce production efficiency, add production cost.Interferometer (for U.S. zego) belongs to Non-contact nondestructive and detects, measuring accuracy is high, but it is expensive, and measurement range is subject to standard lens and is correlated with the restriction in aperture, need the standard lens of plurality of specifications, and need the guide rail of certain length to move to the centre of sphere realizing reference field from the sphere summit of lens to be measured to overlap with the centre of sphere of tested surface, obtained the radius-of-curvature of lens to be measured by the distance measuring movement.Interferogram can not reflect the deviation of the relative nominal value of radius-of-curvature, is not suitable for the on-line checkingi in workshop.
Number of patent application CN201010550796 " detecting device for deviation of lens surface shape and method thereof " discloses a kind of small-sized sphericity interferometer, this interferometer uses the Amici prism (faying face is coated with part reflective semitransparent film) of two identical equilateral right-angle prism gummeds, detection light beam is divided into transmittance and reflectance two-beam, be radiated at respectively eyeglass to be measured and testplate be reflected on receiving screen and form interference fringe, it is for nondestructive test spheric glass deviation.But this method cannot eliminate speck and the parasitic light of light source, and the intetference-fit strengthening collected is poor; And with directional light as detection light, require that each optical element bore of pick-up unit is comparatively large, and the efficiency of light energy utilization is lower, reasons for its use noise is comparatively large, has a strong impact on picture quality, makes the error of later image process become large.
Patent of invention 200310122011.9 " improved Mechelson interferometer " discloses a kind of optical splitter, this optical splitter is the Amici prism glued together by the identical equilateral right-angle prism of two panels, and on cemented surface, being coated with the semi-transparent semi-reflecting film of one deck, it can realize lens and the reflection of light beam.It is for the mensuration of wavelength, and the surface form deviation not being applied to lens detects.
Summary of the invention
The present invention improves the problems referred to above, and namely the technical problem to be solved in the present invention is a kind of detection method being applicable to nondestructive test spheric glass Curvature Radius Deviation, astigmatism deviation, partial deviations of design.
First specific embodiments of the present invention is: a kind of Path of Convergent Rays polarization interference face type error measuring means, comprise polarization beam apparatus, location immediately below described polarization beam apparatus is fixed with optically focused standard mirror, location immediately below described optically focused standard mirror is fixed with laser beam expanding lens, location immediately below laser beam expanding lens is fixed with LASER Light Source, the polarizer is provided with between polarization beam apparatus and detection laser light source, the first quarter wave plate and eyeglass to be measured is fixed with in the order of described polarization beam apparatus front-right, the location of polarization beam apparatus front-left is fixed with receiving screen, polarization beam apparatus front-left is provided with analyzer, location directly over polarization beam apparatus is fixed with the second quarter wave plate, testplate is provided with directly over second quarter wave plate, the central axis of described laser beam expanding lens and testplate optical axis intersect at the cemented surface center of polarization beam apparatus, receiving screen is perpendicular to the optical axis of testplate.
Further, described polarization beam apparatus is formed by the inclined-plane gummed of two pieces of equilateral right-angle prisms, and wherein the cemented surface of one piece of equilateral right-angle prism is coated with polarization spectro deielectric-coating.
Second specific embodiments of the present invention is: a kind of based on polarization interference technological side type deviation detecting method, utilizes above-mentioned one based on polarization interference technological side type error measuring means, comprises the following steps:
(1) rotate polarizer optical axis direction, make beam splitter reflection identical with the two-beam light intensity of transmission; Regulate testplate, make the optical axis of testplate and the central axes of transmitted light beam, and the center of curvature of testplate overlaps with the back focus of optically focused standard mirror; Regulate eyeglass to be measured, make the optical axis of testplate and the central axes of folded light beam; Distinguish the optical axis direction of the quarter wave plate before rotary optical model and eyeglass to be measured, make the light intensity of the two-beam being reflected back receiving screen maximum; Rotate analyzer optical axis direction, make the light intensity of two-beam identical.
(2) move forward and backward eyeglass to be measured in the central axial direction of light beam, observe interference fringe, when interference fringe number is minimum, gather interference pattern.
(3) characteristics of image of the interference fringe observed and the radius-of-curvature of the reference field of testplate accurately measured with instruments such as spherometers are calculated by analysis, just can obtain the radial misalignment of the tested surface of lens to be measured, astigmatism deviation, partial deviations.
(4) radius-of-curvature of the reference field of the testplate accurately measured with instruments such as spherometers, through calculating the radius-of-curvature that can obtain the tested surface of lens to be measured.The calculating of the radius-of-curvature of the tested surface to lens to be measured can be realized.
Compared with prior art, the present invention has following beneficial effect: the method 1, adopting polarization interference, two coherent light beams are made to have approximately equalised light intensity, striped brightness can regulate, the impact of the optical noises such as parasitic light can be suppressed, obtain the interference fringe that contrast is high, reduce the error of later image process, improve the precision that eyeglass detects.
2, when polarization beam apparatus, polaroid, wave plate bore are certain, adopt convergent beam as detection light beam, compared to parallel light path, can expand and detect bore (as shown in Figure 4).
The detection radius RP of directional light and eyeglass to be measured are from the relational expression of the distance b of prism:
The detection radius RH of converging light and eyeglass to be measured are from the relational expression of the distance b of prism:
Wherein a is the size of prism, and r is the radius-of-curvature of eyeglass to be measured, and K9 glass refraction is 1.5.Relatively above function curve, it is larger that provable employing convergent beam detects bore than parallel beam.
When 3, adopting the eyeglass of convergent beam to convex surface and small curvature radius to detect, can control beams converge in the centre of sphere place of detection faces, light beam reflects along former road, and luminous energy is utilized to greatest extent, eliminate background stray light, improve the contrast of interference fringe.
4, without long guideway, instrument miniaturization is made.
5, the calculating of the radius-of-curvature of the tested surface to lens to be measured can be realized.
Accompanying drawing explanation
Fig. 1 is the safe graceful principle of interference figure of prior art.
Fig. 2 is that parallel beam and convergent beam contrast sketch.
Fig. 3 is light path schematic diagram of the present invention.
Fig. 4 be polarization beam apparatus of the present invention, polaroid, wave plate bore certain when, adopt convergent beam as detection light beam, compared to parallel light path, detect bore situation contrast schematic diagram.
1. polarization beam apparatus in figure, 2. the first quarter wave plate, 3. eyeglass to be measured, the reference field of 3a. eyeglass 3 to be measured, the 4. polarizer, 5. optically focused standard mirror, 6. laser beam expanding lens, 7. LASER Light Source, 8. analyzer, 9. receiving screen, 10. the second quarter wave plate, 11. testplatees, the reference field of 11a. testplate 11,101. tested spheres, 102. standard spheres, 103. condensers, 104. beam splitter prisms, 105. safe graceful interference experiment receiving screens.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
As shown in Fig. 1 ~ 4, the inventive method scheme is that the polarization beam apparatus 1(cemented surface that device that detection method uses is glued together by the inclined-plane of two pieces of equilateral right-angle prisms is coated with polarization spectro deielectric-coating), the optically focused standard mirror 5 that the location arranged immediately below polarization beam apparatus 1 is fixing, the laser beam expanding lens 6 that location immediately below optically focused standard mirror 5 is fixing, the polarizer 4 is arranged between polarization beam apparatus 1 and detection laser light source 7, the LASER Light Source 7 that location immediately below laser beam expanding lens 6 is fixing, the first quarter wave plate 2 that the location of polarization beam apparatus 1 front-right is fixing, the eyeglass to be measured 3 moved forward and backward of the first quarter wave plate 2 front-right, the receiving screen 9 that the location of polarization beam apparatus 1 front-left is fixing, analyzer 8 is arranged on any position of polarization beam apparatus 1 front-left, the second quarter wave plate 10 that location directly over polarization beam apparatus 1 is fixing, testplate 11 directly over second quarter wave plate 10, the central axis of laser beam expanding lens 6 and the optical axis of testplate 3 intersect at the cemented surface center of polarization beam apparatus 1, receiving screen 9 is perpendicular to the optical axis of eyeglass 3 to be measured.
Laser beam expanding lens 6 is incided from the light beam of LASER Light Source 7 outgoing, beam diameter expands by laser beam expanding lens 6, and be adjusted to directional light, light beam after shaping is focused at the center of curvature of testplate 11 by optically focused standard mirror 5, enter analyzer 4 through the light beam of optically focused standard mirror 5 and become linearly polarized light, incident perpendicular to polarization beam apparatus 1 lower, planar afterwards, the a branch of folded light beam of through Beam bundle is divided at cemented surface, transmitted light beam with the top in-plane perpendicular to polarization beam apparatus 1 through the second quarter wave plate 10, the reference field 11a of directive testplate 11, return along original optical path after reflection, again through the second quarter wave plate 10, then reflect through cemented surface with the direction perpendicular to left plane, through analyzer 8 directive receiving screen 9, form reference wavefront, folded light beam with the direction perpendicular to right plane through the first quarter wave plate 2, the reference field 3a of directive eyeglass 3 to be measured, return along original optical path after reflection, again through the first quarter wave plate 2, transmitted through cemented surface with the direction perpendicular to left plane, through analyzer 8 directive receiving screen 9, form test wavefront.Reference wavefront and test wavefront are converged rear formation and are interfered, and before and after eyeglass 3 optical axis direction to be measured, regulate eyeglass 3 to be measured, at receiving screen 9, place can observe interference fringe.
Can also by installing piezoelectric phase-shifter on testplate 11, testplate 11 is driven to make it produce the change in optical path length of part wavelength magnitude, make the interference pattern that interference field changes, by the process to interference pattern, automatically eliminate the steady noise in interference field.
Polarization interference face, the optically focused road type error measuring means adopted in the present invention, immediately below laser beam expanding lens, detection laser light source, optically focused standard mirror, the polarizer, directly over the second quarter wave plate, testplate, first quarter wave plate of front-right, the analyzer of eyeglass to be measured and front-left, receiving screen is illustratively with reference to explanation with this Figure of description, by immediately below device and directly over device position correspondence exchange, the device of front-left and the device position correspondence of front-right are exchanged and are not affected its usability and testing result when not affecting light path simultaneously.
The foregoing is only preferred embodiment of the present invention, all equalizations done according to the present patent application the scope of the claims change and modify, and all should belong to covering scope of the present invention.
Claims (3)
1. Path of Convergent Rays polarization interference face type error measuring means, it is characterized in that, comprise polarization beam apparatus, location immediately below described polarization beam apparatus is fixed with optically focused standard mirror, location immediately below described optically focused standard mirror is fixed with laser beam expanding lens, location immediately below laser beam expanding lens is fixed with LASER Light Source, the polarizer is provided with between polarization beam apparatus and detection laser light source, the first quarter wave plate and eyeglass to be measured is fixed with in the order of described polarization beam apparatus front-right, the location of polarization beam apparatus front-left is fixed with receiving screen, polarization beam apparatus front-left is provided with analyzer, location directly over polarization beam apparatus is fixed with the second quarter wave plate, testplate is provided with directly over second quarter wave plate, the central axis of described laser beam expanding lens and testplate optical axis intersect at the cemented surface center of polarization beam apparatus, receiving screen is perpendicular to the optical axis of testplate.
2. a kind of Path of Convergent Rays polarization interference face according to claim 1 type error measuring means, it is characterized in that, described polarization beam apparatus is formed by the inclined-plane gummed of two pieces of equilateral right-angle prisms, and wherein the cemented surface of one piece of equilateral right-angle prism is coated with polarization spectro deielectric-coating.
3., based on a polarization interference technological side type deviation detecting method, utilize as claimed in claim 2 a kind of based on polarization interference technological side type error measuring means, it is characterized in that, comprise the following steps:
(1) rotate polarizer optical axis direction, make beam splitter reflection identical with the two-beam light intensity of transmission; Regulate testplate, make the optical axis of testplate and the central axes of transmitted light beam, and the center of curvature of testplate overlaps with the back focus of optically focused standard mirror; Regulate eyeglass to be measured, make the optical axis of testplate and the central axes of folded light beam; Distinguish the optical axis direction of the quarter wave plate before rotary optical model and eyeglass to be measured, make the light intensity of the two-beam being reflected back receiving screen maximum; Rotate analyzer optical axis direction, make the light intensity of two-beam identical;
(2) move forward and backward eyeglass to be measured in the central axial direction of light beam, observe interference fringe, when interference fringe number is minimum, gather interference pattern;
(3) characteristics of image of the interference fringe observed and the radius-of-curvature of the reference field of testplate accurately measured with instruments such as spherometers are calculated by analysis, just can obtain the radial misalignment of the tested surface of lens to be measured, astigmatism deviation, partial deviations;
(4) radius-of-curvature of the reference field of the testplate accurately measured with instruments such as spherometers, through calculating the radius-of-curvature that can obtain the tested surface of lens to be measured.
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Cited By (4)
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| CN105806216A (en) * | 2016-03-16 | 2016-07-27 | 福建师范大学 | Method for detecting facial form deviation based on synchronous phase shift and polarization interference technology |
| CN105806260A (en) * | 2016-03-16 | 2016-07-27 | 福建师范大学 | Surface deviation detection method based on converging light path simultaneous phase-shifting polarization interference technology |
| CN107085338A (en) * | 2017-05-25 | 2017-08-22 | 菏泽学院 | A kind of adaptive adjustment method of blue phase liquid crystal lenticule and its system used |
| CN111197967A (en) * | 2020-01-13 | 2020-05-26 | 苏州大学 | Center deviation measuring device and method based on liquid lens |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806216A (en) * | 2016-03-16 | 2016-07-27 | 福建师范大学 | Method for detecting facial form deviation based on synchronous phase shift and polarization interference technology |
| CN105806260A (en) * | 2016-03-16 | 2016-07-27 | 福建师范大学 | Surface deviation detection method based on converging light path simultaneous phase-shifting polarization interference technology |
| CN107085338A (en) * | 2017-05-25 | 2017-08-22 | 菏泽学院 | A kind of adaptive adjustment method of blue phase liquid crystal lenticule and its system used |
| CN111197967A (en) * | 2020-01-13 | 2020-05-26 | 苏州大学 | Center deviation measuring device and method based on liquid lens |
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| CN104976965B (en) | 2017-11-10 |
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Effective date of registration: 20221101 Address after: No. 8, No.7 Road, Phase II, Tieling Industrial Concentration Zone, Minhou County, Fuzhou City, Fujian Province, 350199 Patentee after: FOCTEK PHOTONICS, Inc. Address before: 350007 No. three, No. 8, Cangshan District, Fujian, Fuzhou Patentee before: Fujian Normal University |
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