CN104970788B - Flexible dry electrode and its manufacturing method and biopotential acquisition system - Google Patents

Flexible dry electrode and its manufacturing method and biopotential acquisition system Download PDF

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CN104970788B
CN104970788B CN201510427451.8A CN201510427451A CN104970788B CN 104970788 B CN104970788 B CN 104970788B CN 201510427451 A CN201510427451 A CN 201510427451A CN 104970788 B CN104970788 B CN 104970788B
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electrode
conductor
dry electrode
flexible
dry
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CN104970788A (en
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芮岳峰
张彦春
张涛
成工
董记平
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SHANGHAI DIYI TECHNOLOGY Co Ltd
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SHANGHAI DIYI TECHNOLOGY Co Ltd
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Abstract

Embodiment of the present disclosure provides a kind of flexible dry electrode and its manufacturing method and biopotential acquisition system.The flexible dry electrode includes flexible package layer and multiple electrodes conductor.The flexible package layer includes first surface and the second surface opposite with first surface, wherein multiple grooves are provided on first surface.Each electrode conductor is respectively arranged in corresponding groove, and wherein at least one electrode conductor is hollow out shape.By the way that electrode conductor is fabricated to hollow out shape so that electrode conductor is easier to deform, on the one hand, can reduce influence of the bending to electrode conductor, to increase the service life of dry electrode;On the other hand, electrode compactness can be improved, to increase wear comfort.

Description

Flexible dry electrode and its manufacturing method and biopotential acquisition system
Technical field
Each embodiment of the disclosure is related to biomedical engineering technology field, and relates more specifically to a kind of flexibility Dry electrode, the manufacturing method of flexible dry electrode and biopotential acquisition system.
Background technology
With the development that deepens continuously of medicine, Neuscience, cognitive psychology and artificial intelligence study, EEG signals are More and more it is applied to medicine detection, clinical diagnosis and emerging field of brain-computer interfaces.As central nervous system Direct exterior representations, brain electric energy reflect the active state of cerebral cortex different zones, can be used to detect the physiology of people, psychological shape The brain area interactive mode of state and different brain functions;Diagnosis letter can be provided for the brains state such as brainfag, headstroke, brain death Breath;It is electrolysed reading technology in combination with brain, completes the direct communication of brain and external equipment, realizes brain-computer interface system.
Currently, casualties caused by the fatigue driving caused by brainfag and headstroke etc. is more and more, pass through Brain-computer interface technology can efficiently identify out the state of personnel's brain, to timely to being carried out after this situation of personnel's generation Alarm, enabling take effective measures in time, to avoid the injures and deaths of personnel.Brain wave acquisition electrode is as brain-computer interface Bridge plays an important role in EEG measuring.EEG signals are a kind of faint voltage signals, in order to obtain Gao Pin The EEG signals of matter need electrode to have smaller impedance and noise, and have relatively stable electrode impedance.Due to brainfag, The detection of the information such as headstroke needs the long period, this also requires electrode system to have preferable comfort during wearing. Traditional wet electrode has a smaller electrode noise, however its to wear process cumbersome, and with the volatilization of moisture in conducting medium, Its impedance, which can become larger, causes electrode impedance unstable, is unfavorable for the acquisition of EEG signals.The dry electrode wearing side of traditional rigidity Just, but it can not adapt to the Curvature varying of head part, cause its effective contact area to reduce, impedance increases, and due to electrode Rigidity so that electrode becomes uneven to the pressure on head, and comfort level is poor, and wear even can influence wear one member for a long time Action behavior, be unfavorable for the acquisition of EEG signals.
Invention content
The purpose of embodiment of the disclosure includes that a kind of dry electrode of offer, the manufacturing method of dry electrode and biopotential are adopted Collecting system, at least partly to solve the above problem in the prior art.
According to one aspect of the disclosure, a kind of dry electrode, including flexible package layer and multiple electrodes conductor are provided.Institute It includes first surface and the second surface opposite with the first surface to state flexible package layer, wherein being arranged on the first surface There are multiple grooves.The multiple electrode conductor is respectively arranged in corresponding groove, wherein at least one electrode conductor is hollow out Shape.
According to the disclosure illustrative embodiments, the hollow out shape is paliform, helical form or latticed.
According to the disclosure illustrative embodiments, multiple pores are provided in the flexible package layer, each Pore extends from the first surface to the second surface and is in communication with the outside through the flexible package layer respectively.
According to the disclosure illustrative embodiments, it is provided between adjacent electrode conductor at least one described Pore.
According to the disclosure illustrative embodiments, the diameter of each pore is in the range of 0.1mm to 1mm.
According to the disclosure illustrative embodiments, the dry electrode further includes being bonded on the second surface The tissue layer made of absorbing sweat material.
According to the disclosure illustrative embodiments, the dry electrode further includes being formed on each electrode conductor , electrical-conductive nanometer coating for contact measured object.
According to the disclosure illustrative embodiments, the electrical-conductive nanometer coating includes Platinum Nanoparticles, nano silver or receives Meter Jin.
According to the disclosure illustrative embodiments, the material of the flexible package layer is polyimides, gathers to two Toluene or polyxylene siloxanes.
According to another aspect of the present disclosure, a kind of biopotential acquisition system is provided, including as described above any one The dry electrode of kind.
According to the another aspect of the disclosure, a kind of manufacturing method of dry electrode is provided, including:On flexible dielectric substrate The multiple electrodes conductor being separated from each other is formed, wherein at least one electrode conductor is hollow out shape.
According to the disclosure illustrative embodiments, the method further includes:It is encapsulated using flexible insulating material every A electrode conductor;And removal partially flexible insulating materials, so that each electrode conductor is sudden and violent from the flexible insulating material Dew.
According to the disclosure illustrative embodiments, the hollow out shape is paliform, helical form or latticed.
According to the disclosure illustrative embodiments, the method further includes:It is formed and is used on each electrode conductor In the electrical-conductive nanometer coating of contact measured object.
According to the disclosure illustrative embodiments, the method further includes:Through the flexible insulating material and The flexible dielectric substrate forms multiple pores.
According to the disclosure illustrative embodiments, the method further includes:Tissue layer is bonded to the flexibility On the surface of dielectric base, the tissue layer deviates from the electrode conductor.
In the technical solution of each embodiment of the disclosure, by using flexible dry electrode, not only electrode can paste Object to be measured (such as head of wearer) is closed, contact area is increased, to reduce impedance, and since electrode has preferably Flexibility can uniformly disperse the active force on head, so that each section footprint pressure is consistent, increases comfortable wearing Degree is conducive to acquisition and measurement for a long time to EEG signals.In addition, the technical solution of each embodiment in the disclosure In, electrode conductor can be fabricated to hollow out shape, make electrode conductor be easier to deform, on the one hand, Openworks shape enhances electrode and leads The flexibility of body can reduce influence of the bending to electrode conductor, to increase the service life of dry electrode;On the other hand, can Improve electrode compactness, to increase wear comfort.
In addition, in the inventive solutions, since hollow out shape is paliform or helical form, so, electrode is led The rigidity of body is minimum, it is easier to deform, in turn, the influence by bending to electrode is reduced to minimum, increases electrode life;Separately On the one hand, it can more improve electrode compactness, increase the comfort level of wearing.
In addition, in the technical solution of some embodiments of the disclosure, by the region for being not provided with electrode conductor It is middle that at least one pore that second surface is extended to from first surface is set, on the one hand, to make wearer the case where not perspiring Under, partial skin is contacted with air, increases gas permeability;On the other hand, in the case where wearer perspires, pass through the hair of pore Spy is exported with by sweat, so, by the way that pore is arranged, improve the comfort of long periods of wear, electrode paste on the skin saturating Gas will not cause hair follicle to block.
In addition, in further scheme, the dry electrode further include be bonded on the second surface by absorbing sweat material The tissue layer of making and the tissue layer connection pore, in the case where wearer perspires, sweat quilt derived from pore The tissue layer absorbs, and absorbing sweat is fast, is conducive to long periods of wear, improves comfort level.
In addition, in the technical solution of some embodiments of the disclosure, by being electroplated on the electrode conductor of dry electrode Electrical-conductive nanometer coating can increase the specific surface area of electrode conductor, advantageously reduce electrode impedance, so as to improve electrode letter It makes an uproar ratio.
Description of the drawings
When hereafter detailed description to exemplary embodiment is read in conjunction with the figure, these and other objects, feature It will become obvious with advantage, in the accompanying drawings:
Fig. 1 shows the schematic cross-section of dry electrode according to an exemplary embodiment of the present disclosure;
Fig. 2A to Fig. 2 D shows the structural schematic diagram of electrode conductor according to an exemplary embodiment of the present disclosure;
Fig. 3 A to Fig. 3 E show in cross section the manufacturing method of dry electrode in accordance with one embodiment of the present disclosure Process;And
Fig. 4 A to Fig. 4 F show in cross section the manufacturing method of the dry electrode of another embodiment according to the disclosure Process.
Specific implementation mode
Several illustrative embodiments in below with reference to the accompanying drawings describe the principle and method of the disclosure.It should manage Solution describes these embodiments just for the sake of making those skilled in the art can better understand that realize the disclosure in turn, and Not limit the scope of the present disclosure in any way.
In each embodiment of the disclosure, " dry electrode " refer to biomedical engineering technology field for acquiring The electrode of bioelectrical signals, for example, for acquiring the electrode (also referred to as EEG electrodes or electroencephalographic electrode) of EEG signals, using Electrode in acquisition electromyography signal or electrode etc. for acquiring electrocardiosignal.Dry electrode disclosed in present embodiment can be surveyed Measure electrocardio, myoelectricity and brain electricity.In the specific implementation mode of the disclosure, in order to make it easy to understand, for acquisition EEG signals Electrode is that example illustrates its structure, however the design of the present invention can be applied equally to other types of dry electrode.
Fig. 1 shows the schematic cross-section of dry electrode 10 according to an exemplary embodiment of the present disclosure, Fig. 2A to Fig. 2 D Show several structural schematic diagrams of electrode conductor 2 according to an exemplary embodiment of the present disclosure.
As shown in Figure 1, dry electrode 10 may include flexible package layer 1 and multiple electrodes conductor 2.Flexible package layer 1 includes First surface 11 and the second surface 12 opposite with first surface 11.Multiple grooves can be provided on first surface 11, and Each electrode conductor 2 is respectively arranged in corresponding groove, and there are one electrode conductors 2 for setting in a groove.In Fig. 1, only Three electrode conductors 2 are shown, however, the number of electrode conductor 2 can be two or more.In Fig. 1, first surface 11 On groove occupied via corresponding electrode conductor 2.At least one of multiple electrodes conductor 2 (such as one, a part or All electrode conductors of person 2) there can be hollow out shape.
For example, showing the electrode conductor 2 of paliform in Fig. 2A, spiral helicine electrode conductor 2, fence are shown in Fig. 2 B Shape and spiral helicine rigidity are minimum, and in turn, the influence by bending to electrode conductor 2 is reduced to minimum, can more improve electrode paste It is right.In other embodiments, hollow out shape can be latticed, and latticed electrode conductor 2 can also reduce bending to electricity The influence of pole conductor 2, only its effect there is no paliform or helical form good.It is shown in Fig. 2 C a kind of with regular pattern The electrode conductor 2 of the grid of rule (such as), showing in Fig. 2 D a kind of having irregular pattern (such as irregular grid) Electrode conductor 2.Those skilled in the art can obtain technical inspiration from Fig. 2 C and Fig. 2 D, and specific for electrode conductor 2 is engraved Null pattern is not defined, and can be various types of regular patterns, can also be various types of irregular patterns, with Reducing bending enhances the influence of electrode conductor flexible and improves subject to wearing comfort.
By the way that electrode conductor 2 is fabricated to the structure with hollow out shape, electrode conductor 2 can be made to be easier to deform, because And, on the one hand, influence of the bending to electrode conductor 2 can be reduced, to increase the service life of dry electrode;On the other hand, energy Enough improve electrode compactness, to increase wear comfort.
In the above-described embodiment, first surface 11 refers to (such as wearing with object to be measured when in use for dry electrode 10 The skin of wearer) contact surface, and second surface 12 refer to dry electrode 10 when in use not with object contact to be measured Surface.A variety of materials as known in the art may be used in electrode conductor 2, for example, such as metal of gold, silver, platinum etc, or Conductive rubber etc. to this and is not limited in each embodiment of the disclosure.
As shown in Figure 1, in further scheme, at least one pore is also provided in the flexible package layer 1 4, each pore 4 extends from first surface 11 to second surface and runs through the flexible package layer 1 respectively.Illustrate in Fig. 1 Show four pores 4 to property.By the way that the hair through flexible package layer 1 is arranged in the region for being not provided with electrode conductor 2 Pore 4, makes wearer in the case where not perspiring, and partial skin can be contacted with air, so as to increase gas permeability;It is wearing In the case that wearer perspires, since pore 4 runs through flexible package layer 1, so, sweat can be exported by the pore, be protected The dry and comfortable of skin has been held, has increased wear comfort, and be conducive to the stabilization of signal.
In addition, the sweat of the skin surface in order to absorb wearer, dry electrode 10 can also include being bonded to second surface The tissue layer 5 made of absorbing sweat material on 12, each pore 4 are connected to the tissue layer 5.The case where wearer perspires Under, sweat is discharged by the capillarity of pore 4, in order to be absorbed by tissue layer 5, hair follicle will not be caused to block, to have Conducive to long periods of wear, and improve comfort level.
In each embodiment of the disclosure, pore 4 can be according to need in the region for being not provided with electrode conductor 2 It wants and is arranged in different ways.For example, at least one pore, example can be provided between adjacent electrode conductor 2 It can be such as provided with the array of pore 4, so that pore 4 is evenly distributed on flexible package layer 1.
In some embodiments, the diameter of each pore 4 can be in the range of 0.1mm to 1mm, such as can be 0.1mm、0.2mm、0.3mm、0.4mm、0.5mm、0.6mm、0.7mm、0.8mm、0.8mm、1mm.In other embodiments, often The diameter of a pore 4 can be larger or smaller, such as can be 0.09mm or 1.1mm, and still, too conference makes dry electricity Pole strength is inadequate, too small and be unfavorable for exporting sweat, needs to reasonably select between absorbing sweat and intensity.
In each embodiment of the disclosure, electrode conductor 2 can pass through sputtering, vapor deposition, chemical plating or bonding Mode is formed in the flexible package layer 1.However, electrode conductor 2 is not limited to be formed through the above way, but can pass through Various available modes in this field are bound to flexible package layer 1.
In some embodiments, dry electrode 10 can also include be formed in it is on each electrode conductor 2, for contact wait for Survey the electrical-conductive nanometer coating 3 of object.For example, electrical-conductive nanometer coating 3 can be such as Platinum Nanoparticles, nano silver or nanogold etc Metal coating.Electrical-conductive nanometer coating 3 can be formed in by ultrasonic electroplating and/or pulse plating on each electrode conductor 2.Pass through Electrical-conductive nanometer coating 3 is electroplated on the electrode conductor 2 of dry electrode 10, the specific surface area of electrode conductor 2 can be increased, be conducive to drop Low electrode impedance, so as to improve electrode signal-to-noise ratio.
In each embodiment of the disclosure, the material of flexible package layer 1 can be such as polyimides, gather to diformazan The polymer of benzene or polyxylene siloxanes etc.However, the material of flexible package layer 1 is not limited to this, but may be used Available various flexible encapsulant materials in this field.Polyimides makes the flexible package layer 1 and the binding force of substrate good, will not Lead to the failure that falls off.The good biocompatibility of Parylene or polyxylene siloxanes will not lead to allergy etc..
Hereinbefore described flexible dry electrode 10 can be used for acquire biopotential (such as electrocardio, brain electricity or myoelectricity Deng).In addition, flexible dry electrode 10 can also with processing circuit (such as amplifying circuit, filter circuit etc. and cooperation it is corresponding calculate Method) biopotential acquisition system is formed together, such system can be used in car steering judging tired driver, be used for medicine Reference is provided for medical diagnosis on disease (disease of such as epilepsy etc).
Hereinafter, it will be described in the manufacturing method of dry electrode according to an exemplary embodiment of the present disclosure.
Fig. 3 A to Fig. 3 E show in cross section the manufacturing method of dry electrode in accordance with one embodiment of the present disclosure Process.
As shown in Figure 3A, the multiple electrodes conductor 2 being separated from each other is formed on flexible dielectric substrate 101, wherein at least One electrode conductor 2 is hollow out shape.Each electrode conductor 2 can be distinguished by way of sputtering, vapor deposition, chemical plating or bonding It is formed on flexible dielectric substrate 101.However, electrode conductor 2 is not limited to be formed through the above way, this field can be passed through In various available modes be formed in flexible dielectric substrate 101.Herein simultaneously for the specific pierced pattern of electrode conductor 2 Without limiting, it can be various types of regular patterns, can also be various types of irregular patterns, such as can be Above in conjunction with various pierced patterns described in Fig. 2A to Fig. 2 D.
As shown in Figure 3B, each electrode conductor 2 is encapsulated using flexible insulating material 102.Herein, flexible dielectric substrate 101 and flexible insulating material 102 can be identical material, material can also be different.For example, their material can be Polyimides, Parylene or polyxylene siloxanes as described above etc..
As shown in Figure 3 C, flexible insulating material 102 is thinned, so that each electrode conductor 2 is from flexible insulation material Exposure in material 102.At this point, flexible dielectric substrate 101 and flexible insulating material 102 are together formed above in conjunction with Fig. 1 institutes The flexible package layer 1 stated.
Has the advantages that aforementioned dry electrode by the dry electrode that the step shown in Fig. 3 A to Fig. 3 C obtains, for example, hollow out shape Shape can make electrode conductor 2 be easier to deform.Thus, on the one hand, influence of the bending to electrode conductor 2 can be reduced, to increase Add the service life of dry electrode;On the other hand, electrode compactness can be improved, to increase wear comfort.
Furthermore, it is possible to further be located to the dry electrode obtained in fig. 3 c by step shown in Fig. 3 D and Fig. 3 E Reason, to obtain further advantage.
For example, as shown in Figure 3D, being formed through flexible insulating material 102 and flexible dielectric substrate 101 multiple through described The pore 4 of flexible package layer.By forming pore 4, make electrode wearer in the case where not perspiring, partial skin can It is contacted with air, so as to increase gas permeability, in the case of perspiration, sweat can be exported by the pore, improved and worn Comfort and will not there is a situation where hair follicles to block.
As shown in FIGURE 3 E, the tissue layer 5 made of absorbing sweat material is bonded to being led away from electrode for flexible dielectric substrate 101 On the surface of body 2, each described pore is connected to the tissue layer 5.In the case where wearer perspires, sweat passes through pore 4 capillarity discharge to be conducive to long periods of wear, and improves comfortable in order to be absorbed by the tissue layer 5 after electrode Degree.
Fig. 4 A to Fig. 4 F show in cross section the manufacturing method of the dry electrode of another embodiment according to the disclosure Process.Step shown in wherein Fig. 4 A and Fig. 4 B is identical as the step shown in Fig. 3 A and Fig. 3 B respectively, will not be described in great detail herein. Hereinafter by only just different steps illustrates.
As shown in Figure 4 C, the part of removal flexible insulating material 102 being located on each electrode conductor 2, is respectively formed Corresponding opening 6, so that the exposure from flexible insulating material 102 of each electrode conductor 2.
As shown in Figure 4 D, the electrical-conductive nanometer coating 3 for contact measured object is formed on each electrode conductor 2.It is conductive Nano coating 3 can be the metal coating of such as Platinum Nanoparticles, nano silver or nanogold etc.Electrical-conductive nanometer coating 3 can pass through Ultrasonic electroplating and/or pulse plating are formed on each electrode conductor 2.It is led by being electroplated on the electrode conductor 2 of dry electrode 10 Electric nano coating 3 can increase the specific surface area of electrode conductor 2, advantageously reduce electrode impedance, so as to improve electrode letter It makes an uproar ratio.
As shown in Figure 4 E, multiple pores 4 are formed through flexible insulating material 102 and flexible dielectric substrate 101.Pass through shape At pore 4, make electrode wearer in the case where not perspiring, partial skin can be contacted with air, so as to increase Gas;In the case of perspiration, pore 4 can export sweat, improve wearing comfort and hair follicle blocking will not occur Situation.
As illustrated in figure 4f, the tissue layer 5 made of absorbing sweat material is bonded to being led away from electrode for flexible dielectric substrate 101 On the surface of body 2.In the case where wearer perspires, sweat is discharged by the capillarity of pore 4 to be absorbed by tissue layer 5, To be conducive to long periods of wear, and improve comfort level.
Given the specification of the disclosure for the purpose for showing and describing, but its be not intended to it is exhaustive or Person is limited to the invention of disclosed form.It may occur to persons skilled in the art that many modification and variation.Therefore, embodiment is In order to the principle of the disclosure, practical application is better described and make other staff in those skilled in the art it will be appreciated that with Lower content and select and describe, that is, under the premise of not departing from disclosure spirit, all modifications made and replacing will all be fallen Enter in the disclosure protection domain that appended claims define.

Claims (16)

1. a kind of dry electrode, including:
Flexible package layer, including first surface and the second surface opposite with the first surface, wherein on the first surface It is provided with multiple grooves;And
Multiple electrodes conductor is respectively arranged in corresponding groove, and wherein at least one electrode conductor is hollow out shape.
2. dry electrode according to claim 1, wherein the hollow out shape is paliform, helical form or latticed.
3. dry electrode according to claim 1, wherein the region setting of electrode conductor is not arranged in the flexible package layer Have multiple pores, each pore respectively from the first surface to second surface extend and through the flexible package layer with The external world communicates.
4. dry electrode according to claim 3, wherein be provided at least one hair between adjacent electrode conductor Pore.
5. dry electrode according to claim 3, wherein the diameter of each pore is in the range of 0.1mm to 1mm.
6. dry electrode according to claim 3, the dry electrode further include be bonded on the second surface by absorbing sweat Tissue layer made of material.
7. dry electrode according to claim 1, the dry electrode further include be formed in it is on each electrode conductor, for connecing Touch the electrical-conductive nanometer coating of object to be measured.
8. dry electrode according to claim 7, wherein the electrical-conductive nanometer coating includes Platinum Nanoparticles, nano silver or nanometer Gold.
9. dry electrode according to claim 1, wherein the material of the flexible package layer is polyimides, gathers to diformazan Benzene or polyxylene siloxanes.
10. a kind of biopotential acquisition system, including dry electrode according to any one of claim 1 to 9.
11. a kind of manufacturing method of dry electrode, including:
The multiple electrodes conductor being separated from each other is formed on flexible dielectric substrate, wherein at least one electrode conductor is hollow out shape Shape.
12. manufacturing method according to claim 11, further includes:
Each electrode conductor is encapsulated using flexible insulating material;And
Partially flexible insulating materials is removed, so that the exposure from the flexible insulating material of each electrode conductor.
13. manufacturing method according to claim 11, wherein the hollow out shape is paliform, helical form or latticed.
14. manufacturing method according to claim 11, further includes:
The electrical-conductive nanometer coating for contact measured object is formed on each electrode conductor.
15. manufacturing method according to claim 12, further includes:
Multiple pores are formed through the flexible insulating material and the flexible dielectric substrate.
16. manufacturing method according to claim 15, further includes:
The tissue layer made by absorbing sweat material is bonded on the surface of the flexible dielectric substrate, the tissue layer is away from described Electrode conductor.
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