CN104966782A - Polymer solar cell cathode modification material and preparation method thereof - Google Patents
Polymer solar cell cathode modification material and preparation method thereof Download PDFInfo
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- CN104966782A CN104966782A CN201510232807.2A CN201510232807A CN104966782A CN 104966782 A CN104966782 A CN 104966782A CN 201510232807 A CN201510232807 A CN 201510232807A CN 104966782 A CN104966782 A CN 104966782A
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
- H10K30/15—Sensitised wide-bandgap semiconductor devices, e.g. dye-sensitised TiO2
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
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- H—ELECTRICITY
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
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- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/10—Transparent electrodes, e.g. using graphene
- H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
- H10K2102/103—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO] comprising indium oxides, e.g. ITO
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- Y02E10/549—Organic PV cells
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Abstract
The present invention belongs to the polymer solar cell technology field, in particular discloses a polymer solar cell cathode modification material and a preparation method thereof. The cathode modification material is tantalum (V) tetraethoxide pentanedionate, and a solution of the tantalum (V) tetraethoxide pentanedionate is spin-coated on a photoelectric activity layer, so that a cathode modification layer can be obtained. According to the present invention, a film made of the tantalum (V) tetraethoxide pentanedionate solution is used as the cathode modification layer to be introduced in a polymer solar cell, thereby realizing the efficient collection of the electrons. Compared with a TiO2 prepared by a conventional sol-gel method and a LiF of vacuum evaporation, the polymer solar cell cathode modification material and the preparation method thereof have the advantages of being high in photoelectric conversion efficiency, simple in technology, low in cost and good in experiment repeatability, being suitable for the large-scale industrial production, etc.
Description
Technical field
The invention belongs to polymer solar battery technical field, be specifically related to a kind of polymer solar battery cathodic modification material and preparation method thereof.
Background technology
As a kind of clean regenerative resource, the investigation and application of solar cell achieves huge development in the past few decades.Polymer solar battery to be generally clipped between the transparent positive pole of ITO and metal negative electrode to the blend film of body and fullerene derivate acceptor by conjugated polymer and to form, there is structure and preparation technology is simple, lightweight, cheap, easily prepare the advantages such as large area flexible device, be thus subject to extensive concern.
Poly-(3-hexyl) thiophene (P3HT) of compound with regular structure and solubility C
60derivative PCBM is that most is representational to body and receptor photovoltaic material.By the polymer donor material of optimal design synthesizing new and fullerene derivative receptor material and optimize in active layer to the micro phase separation structure of acceptor, body heterojunction polymer solar battery electricity conversion can be made more than 10%, close to the level of amorphous silicon battery.
In traditional body heterojunction polymer solar battery, the low work content active metal such as calcium, barium is commonly used to the negative electrode as polymer solar battery, in order to extraction and the collection of electronics.But the metal pair water of low work content, oxygen are responsive, in use procedure, resistance can be increased because of the oxidation of negative electrode, reduce negative electrode to the collection of electronics and extractability, thus cause the instability of cathode interface, finally affect the long-time stability of solar cell.Therefore active metal is replaced more and more to cause the concern of people with the cathodic modification layer of low work content air-stable.LiF decorative layer conventional at present needs vacuum evaporation, and effective thickness is at about 1nm, and operating process is extremely difficult to be controlled.And ZnO, TiO
2all need the method synthesis such as sol-gel etc. n-type semiconductor nano particle, add the overall time prepared by polymer solar battery.
Tetraethoxide acetylacetone,2,4-pentanedione tantalum is a kind of white powdery solids, and molecular weight is 460.30, and molecular formula is C
13h
27o
6ta, fusing point is 140 DEG C, stable under normal temperature and pressure.This material is dissolved in ethanol, environmental sound.Tetraethoxide acetylacetone,2,4-pentanedione tantalum is used for the cathodic modification layer making polymer solar battery by the present invention first.
Summary of the invention
The object of this invention is to provide a kind of polymer solar battery cathodic modification material and preparation method thereof.The technical scheme adopted is as follows:
A kind of polymer solar battery cathodic modification material, described cathodic modification material is tetraethoxide acetylacetone,2,4-pentanedione tantalum, and chemical constitution is:
A preparation method for polymer solar battery cathodic modification material, is spin-coated on photoelectric active layer by cathodic modification material tetraethoxide acetylacetone,2,4-pentanedione tantalum solution, obtains cathodic modification layer.
Preferably, the solvent of tetraethoxide acetylacetone,2,4-pentanedione tantalum solution is ethanol.
Preferably, the rotating speed of described spin coating is 2500-4000rpm, more preferably 3000rpm, does not need to carry out heating and can obtain cathodic modification layer after spin coating.
Preferably, the solvent of described tetraethoxide acetylacetone,2,4-pentanedione tantalum solution contains the acetic acid of volume ratio 10%.
Preferably, described tetraethoxide acetylacetone,2,4-pentanedione tantalum solution carries out spin coating again after stirring 3h.
Preferably, described spin-coating time is 10-60 second, more preferably 30 seconds.
Standing and drying 20min under nitrogen atmosphere after spin coating.
Beneficial effect of the present invention is: the film made by tetraethoxide acetylacetone,2,4-pentanedione tantalum solution is introduced in polymer solar battery as cathodic modification layer, achieves the Efficient Collection of electronics; The TiO prepared with existing sol-gal process
2compare with the LiF of vacuum evaporation, the present invention has that photoelectric conversion efficiency is high, technique is simple, with low cost, experimental repeatability is good, be suitable for the advantages such as large-scale industrial production.
Accompanying drawing explanation
Fig. 1 is polymer solar battery structural representation.
Fig. 2 is Glass/ITO/PEDOT:PSS/P3HT:PC
60the current-voltage characteristic curve of BM/Al.
Fig. 3 is Glass/ITO/PEDOT:PSS/P3HT:PC
60the current-voltage characteristic curve of BM/ tetraethoxide acetylacetone,2,4-pentanedione tantalum/Al.
Fig. 4 is Glass/ITO/PEDOT:PSS/P3HT:PC
60the current-voltage characteristic curve of BM/ tetraethoxide acetylacetone,2,4-pentanedione tantalum (10% acetic acid)/Al.
Fig. 5 is Glass/ITO/PEDOT:PSS/P141:PC
60the current-voltage characteristic curve of BM/ tetraethoxide acetylacetone,2,4-pentanedione tantalum/Al.
Embodiment
Below in conjunction with specific embodiment, the present invention is further detailed, but protection range not thereby limiting the invention.
Figure 1 shows that polymer solar battery structural representation, wherein, polymer solar cells is forward structure formula, and the meaning of each label representative is: 1-substrate; 2-transparent conductive metal oxide anode layer; 3-anode modification layer; 4-photoelectric active layer; 5-cathodic modification layer; 6-cathode layer; 7-load or testing apparatus; 8-plain conductor; 9-incident light.
Described forward structure polymer solar battery comprises the substrate 1 stacked gradually, transparent conductive metal oxide anode layer 2, anode modification layer 3, photoelectric active layer 4, cathodic modification layer 5, and low work function cathode layer 6, battery is connected with load or testing apparatus 7 with plain conductor 8, and incident light 9 is injected from substrate 1 direction.
Embodiment 1 (comparative example)
The transparent conducting glass of tin indium oxide (ITO) sputtering is had to use liquid detergent, running water, deionized water, acetone, isopropyl alcohol ultrasonic cleaning 2 times successively, nitrogen dries up, spin coating PEDOT:PSS solution under the rotating speed of 2000rpm, 150 DEG C of bake annealed 15 minutes, move in the glove box under nitrogen atmosphere immediately, naturally cool, obtain anode modification layer, thickness is 30nm ± 5nm.Then by P3HT and the PC of 20mg/mL
60the mixed solution of BM1:1 (mass ratio) is directly spun on above-mentioned anode modification layer, as photoelectric active layer under the rotating speed of 800rpm.Finally, 5 × 10
-5under handkerchief, the aluminium of vacuum evaporation 100nm makes negative electrode.Obtained device open circuit voltage under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates is 0.57 volt, and short circuit current is 9.62 milliamperes every square centimeter, and fill factor, curve factor is 0.52, and conversion efficiency is 2.87%.Fig. 2 gives the current-voltage curve of this device penetrating without illumination and under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates.
Embodiment 2 (forward structure polymer solar battery)
The transparent conducting glass of tin indium oxide (ITO) sputtering is had to use liquid detergent, running water, deionized water, acetone, isopropyl alcohol ultrasonic cleaning successively, nitrogen dries up, spin coating PEDOT:PSS under the rotating speed of 2000rpm, 150 DEG C are toasted 20 minutes, move in the glove box under nitrogen atmosphere immediately, naturally cool, obtain anode modification layer.By P3HT and the PC of 20mg/mL
60the mixed solution of BM1:1 (mass ratio) is directly spun on above-mentioned anode modification layer, as photoelectric active layer under the rotating speed of 800rpm.Then tetraethoxide acetylacetone,2,4-pentanedione tantalum is dissolved in ethanol, stirs 3h.Under the rotating speed of 2500rpm, this solution of spin coating is on photoelectric active layer, and spin-coating time is 60 seconds, and standing and drying 20min under nitrogen atmosphere obtains cathodic modification layer.Finally, 5 × 10
-5under handkerchief, the aluminium of vacuum evaporation 100nm makes electrode.Fig. 3 gives the current-voltage curve of this device penetrating without illumination and under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates.Obtained device open circuit voltage under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates is 0.62 volt, and short circuit current is 10.26 milliamperes every square centimeter, and fill factor, curve factor is 0.65, and conversion efficiency is 4.11%.
Embodiment 3 (forward structure polymer solar battery)
The transparent conducting glass of tin indium oxide (ITO) sputtering is had to use liquid detergent, running water, deionized water, acetone, isopropyl alcohol ultrasonic cleaning successively, nitrogen dries up, spin coating PEDOT:PSS under the rotating speed of 2000rpm, 150 DEG C are toasted 20 minutes, move in the glove box under nitrogen atmosphere immediately, naturally cool, obtain anode modification layer.By P3HT and the PC of 20mg/mL
60the mixed solution of BM1:1 (mass ratio) is directly spun on above-mentioned anode modification layer, as photoelectric active layer under the rotating speed of 800rpm.Then tetraethoxide acetylacetone,2,4-pentanedione tantalum is dissolved in ethanol, the acetic acid of volume ratio 10%, stirs 3h.Under the rotating speed of 4000rpm, this solution of spin coating is on photoelectric active layer, and spin-coating time is 10 seconds, and standing and drying 20min under nitrogen atmosphere obtains cathodic modification layer, finally, 5 × 10
-5under handkerchief, the aluminium of vacuum evaporation 100nm makes electrode.Fig. 4 gives the current-voltage curve of this device penetrating without illumination and under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates.Obtained device open circuit voltage under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates is 0.63 volt, and short circuit current is 9.28 milliamperes every square centimeter, and fill factor, curve factor is 0.67, and conversion efficiency is 3.93%.
Embodiment 4 (forward structure polymer solar battery)
The transparent conducting glass of tin indium oxide (ITO) sputtering is had to use liquid detergent, running water, deionized water, acetone, isopropyl alcohol ultrasonic cleaning successively, nitrogen dries up, spin coating PEDOT:PSS under the rotating speed of 2000rpm, 150 DEG C are toasted 20 minutes, move in the glove box under nitrogen atmosphere immediately, naturally cool, obtain anode modification layer.By PBDTBDD and the PC of 12.5mg/mL
60the mixed solution of BM1:1 (mass ratio) is directly spun on above-mentioned anode modification layer, as photoelectric active layer under the rotating speed of 1200rpm.Then tetraethoxide acetylacetone,2,4-pentanedione tantalum is dissolved in ethanol, stirs 3h.Under the rotating speed of 3000rpm, this solution of spin coating is on photoelectric active layer, and spin-coating time is 30 seconds, standing and drying 20min under nitrogen atmosphere after spin coating.To cathodic modification layer.Finally, 5 × 10
-5under handkerchief, the aluminium of vacuum evaporation 100nm makes electrode.Fig. 5 gives the current-voltage curve of this device penetrating without illumination and under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates.Obtained device open circuit voltage under the simulated solar irradiation of 100 milliwatt every square centimeter irradiates is 0.89 volt, and short circuit current is 12.02 milliamperes every square centimeter, and fill factor, curve factor is 0.72, and conversion efficiency is 7.70%.
Above-mentioned exemplary embodiment to be described, to should not be construed as and limit the invention.Although disclosed multiple exemplary embodiment, those skilled in the art have been readily appreciated that various deformation possible in exemplary embodiment, and inherently do not depart from novel teachings of the present invention and advantage.Therefore, being included in as defined by the following claims in scope of the present invention of all these Amoebidas.
Claims (10)
1. a polymer solar battery cathodic modification material, is characterized in that, described cathodic modification material is tetraethoxide acetylacetone,2,4-pentanedione tantalum, and chemical constitution is:
2. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 1, is characterized in that, is spin-coated on photoelectric active layer, obtains cathodic modification layer by cathodic modification material tetraethoxide acetylacetone,2,4-pentanedione tantalum solution.
3. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, is characterized in that, the solvent of described tetraethoxide acetylacetone,2,4-pentanedione tantalum solution is ethanol.
4. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, is characterized in that, the rotating speed of described spin coating is 2500-4000rpm.
5. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 3, is characterized in that, the solvent of described tetraethoxide acetylacetone,2,4-pentanedione tantalum solution contains the acetic acid of volume ratio 10%.
6. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, is characterized in that, described tetraethoxide acetylacetone,2,4-pentanedione tantalum solution carries out spin coating again after stirring 3h.
7. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, is characterized in that, the rotating speed of described spin coating is 3000rpm.
8. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, is characterized in that, described spin-coating time is 10-60 second.
9. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, it is characterized in that, described spin-coating time is 30 seconds.
10. the preparation method of a kind of polymer solar battery cathodic modification material according to claim 2, is characterized in that, standing and drying 20min under nitrogen atmosphere after spin coating.
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CN105206752A (en) * | 2015-08-24 | 2015-12-30 | 华北电力大学 | Polymer solar cell cathode modification material and cell cathode modification method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090186281A1 (en) * | 2008-01-23 | 2009-07-23 | Tdk Corporation | Method for producing silicon-containing complex oxide sol, method for producing silicon-containing hologram recording material, and hologram recording medium |
US20100159151A1 (en) * | 2008-12-19 | 2010-06-24 | Glen Harold Kirby | Methods for making environmental barrier coatings and ceramic components having cmas mitigation capability |
US20100154422A1 (en) * | 2008-12-19 | 2010-06-24 | Glen Harold Kirby | Cmas mitigation compositions, environmental barrier coatings comprising the same, and ceramic components comprising the same |
CN104022224A (en) * | 2014-06-17 | 2014-09-03 | 华北电力大学 | Plane heterojunction perovskite solar cell capable of being processed through solutions and manufacturing method thereof |
CN104022167A (en) * | 2014-06-17 | 2014-09-03 | 华北电力大学 | Alcohol solubility polymer solar battery negative electrode modifying material and modifying method thereof |
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- 2015-05-08 CN CN201510232807.2A patent/CN104966782B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090186281A1 (en) * | 2008-01-23 | 2009-07-23 | Tdk Corporation | Method for producing silicon-containing complex oxide sol, method for producing silicon-containing hologram recording material, and hologram recording medium |
US20100159151A1 (en) * | 2008-12-19 | 2010-06-24 | Glen Harold Kirby | Methods for making environmental barrier coatings and ceramic components having cmas mitigation capability |
US20100154422A1 (en) * | 2008-12-19 | 2010-06-24 | Glen Harold Kirby | Cmas mitigation compositions, environmental barrier coatings comprising the same, and ceramic components comprising the same |
CN104022224A (en) * | 2014-06-17 | 2014-09-03 | 华北电力大学 | Plane heterojunction perovskite solar cell capable of being processed through solutions and manufacturing method thereof |
CN104022167A (en) * | 2014-06-17 | 2014-09-03 | 华北电力大学 | Alcohol solubility polymer solar battery negative electrode modifying material and modifying method thereof |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105206752A (en) * | 2015-08-24 | 2015-12-30 | 华北电力大学 | Polymer solar cell cathode modification material and cell cathode modification method |
CN105206752B (en) * | 2015-08-24 | 2017-11-28 | 华北电力大学 | A kind of polymer solar battery cathodic modification material and cell cathode method of modifying |
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