CN104959908B - A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process - Google Patents

A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process Download PDF

Info

Publication number
CN104959908B
CN104959908B CN201510276478.1A CN201510276478A CN104959908B CN 104959908 B CN104959908 B CN 104959908B CN 201510276478 A CN201510276478 A CN 201510276478A CN 104959908 B CN104959908 B CN 104959908B
Authority
CN
China
Prior art keywords
lithium niobate
niobate crystal
optical fiber
crystal chip
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510276478.1A
Other languages
Chinese (zh)
Other versions
CN104959908A (en
Inventor
李慧鹏
张轩
宋凝芳
高爽
朱伟伟
郑晓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beihang University
Original Assignee
Beihang University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beihang University filed Critical Beihang University
Priority to CN201510276478.1A priority Critical patent/CN104959908B/en
Publication of CN104959908A publication Critical patent/CN104959908A/en
Application granted granted Critical
Publication of CN104959908B publication Critical patent/CN104959908B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories

Abstract

The present invention discloses a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, including three-dimensional fix device, pneumatic means and clamping device.Pneumatic means is connected on the z-axis travel mechanism pinboard of three-dimensional fix device, clamping device is installed on pneumatic means.Optical fiber lithium niobate crystal chip is accommodated by clamping device, and is connected with cylinder piston rod by adjusting slide bar, beam type force snesor.Three-dimensional fix device can realize being accurately positioned and grinding Fine Feed for lithium niobate crystal chip clamping device;Pneumatic means can realize that the change of grinding pressure is a progressive formation, and lithium niobate crystal chip clamping device can stably, rapidly realize the clamping of lithium niobate crystal chip.The present invention is for realizing in the process of lapping of optical fiber lithium niobate crystal chip that grinding pressure is invariable, grinding pressure change procedure is progressive formation, ensure the steady reliability of end face quality and process of lapping after grinding, while convenient be observed to the fiber end face in the lithium niobate crystal chip after grinding.

Description

A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process
Technical field
It is a kind of optical fiber and lithium niobate crystal specifically the present invention relates to optical fiber and lithium niobate crystal chip grinding technique field Piece Pneumatic Pressure grinding mechanism and Ginding process.
Background technology
Existing optic fiber polishing machine grind fiber stub and bare fibre when can be by end surface grinding into certain shape Enable to be coupled as much as possible by the optical signal of optical fiber, the end face flatness and roughness to lock pin and bare fibre carry Requirement higher is gone out.(foreign countries claim multifunctional unit light to the lithium niobate integrated optical phase modulator used in optical fibre gyro Learn chip, MFIOC) refer to the waveguide device containing Y shape beam splitter, polarizer and phase-modulator function, the device is by optical fiber On the same chip, its good characteristic ensure that good digital closed-loop fiber optic gyroscope to the integrated making of gyro multiple function element Realization.The input and output of Waveguide are realized by the direct-coupling with tail optical fiber end face, are damaged to obtain low optical coupling Consumption, need to do high-quality polishing to lithium niobate crystal chip and fiber end face.In the market not specifically designed for polarization maintaining optical fibre Lithium niobate crystal chip milling tool.
The manufacturing procedure of existing fiber stub or bare fibre is:Grinding abrasive paper is placed on abrasive disk, optical fiber is inserted Core or bare fibre are arranged on grinding abrasive paper, and grinder is driven to the fiber stub end face or naked light on abrasive disk by power set Fine end face is ground.Existing lapping device has two kinds of 8 font grinders and planetary-type grinding machine, planetary-type grinding machine structure It is complicated compared with 8 font grinders, but grinding track more crypto set.Existing grinding pressuring method is pressurizeed and corner pressurization using center Two ways, center pressurization can be divided into weight pressurization, Pneumatic Pressure and motor Fine Feed pressurization three by the difference of implementation Kind, corner pressuring method is realized using grinding coil motor Fine Feed, weight pressurization and Pneumatic Pressure two kinds of lapping modes it is scarce Point is also easy to produce bounce when being and grinding optical fiber or fiber stub, and Grinding Quality is difficult to ensure that, current internal optical fiber grinder manufacturer All use 8 font grinders and corner pressuring method.
The content of the invention
Some shortcomings it is an object of the invention to overcome optic fiber polishing machine in the market, propose that one kind being capable of special pin To the grinding mechanism and Ginding process of the lithium niobate crystal chip with polarization maintaining optical fibre.
Optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, including three-dimensional fix device, pneumatic means With clamping device.
Wherein, three-dimensional fix device is arranged on grinding plate.In three-dimensional fix device ZhongzZhou travel mechanisms Sliding block on pneumatic means is installed;Blessing mechanism is installed on pneumatic means.Pneumatic dress is realized by three-dimensional fix device Spatially interior any point is accurately positioned to put the clamping device 3 of installation, finally realizes pneumatic means;Mechanism is accommodated to be used for Accommodate lithium niobate crystal chip.
The pneumatic means includes spring press out type cylinder, cylinder pole, governor motion, z-axis travel mechanism pinboard, power Sensor and precision rotation platform.
Wherein, the cylinder body of spring press out type cylinder coordinates with mounting surface screw thread in cylinder mounting plate and fixes;Cylinder mounting plate For being connected with z-axis travel mechanism;Make the piston rod of spring press out type cylinder perpendicular to grinding plate;Spring press out type cylinder Piston rod is used for being connected with governor motion.
The governor motion has base plate, optical axis, top board, linear bearing and bearing holder (housing, cover).Wherein, optical axis is two, mutually It is arranged in parallel;Two one end of optical axis are connected with base plate, and the other end is connected with top board;Two optical axises were last to be cased with a linear axis Hold, two outer rings of linear bearing are logical to be fixedly mounted in bearing holder (housing, cover), and will be relative between two linear bearings by bearing holder (housing, cover) Position is fixed;Top board is vertically arranged with the piston rod axis of spring press out type cylinder;Bearing holder (housing, cover) connects with slide unit in z-axis travel mechanism Connect.
The force snesor fixing end is fixedly mounted on base plate bottom surface in governor motion, and power induction end installs precision rotation Platform;Precision rotation platform round end is installed with clamping device.
4th, for a kind of optical fiber described in claim 1 and the Ginding process of lithium niobate crystal chip Pneumatic Pressure grinding mechanism, its It is characterised by:Step is as follows:
Step 1:Two pieces of optical fiber lithium niobate crystal chips are gripped by clamping device;And with being required according to grinding, by adjusting Whole precision rotation platform makes the angle between optical fiber lithium niobate crystal chip face machined flat normal direction and grinder surface normal;
Step 2:Host computer controls three-dimensional fix device by motion controller, makes the lithium niobate crystal on clamping device Piece moves to planetary-type grinding machine top, it is ensured that the contact point of two pieces of optical fiber lithium niobate crystal chips and grinder to grinder main shaft away from From equal;Meanwhile, grinding abrasive paper is placed to grinder.
Step 3:Start the compressed air that definite value pressure is passed through in cylinder body of the air compressor machine to spring press out type cylinder, Jin Eryou Piston rod drives clamping device to move upwards;Now, two linear bearings are made to be located at optical axis middle part;And spring press out type cylinder Back-moving spring in cylinder body moves to the centre position of spring press out type cylinder stroke.
Step 4:Host computer makes clamping device by motion controller control three-dimensional fix device ZhongzZhou travel mechanisms Move downward, when reducing to force sensor measuring value, host computer controls three-dimensional fix device to stop by motion controller; Now, optical fiber lithium niobate crystal chip is contacted with grinder.
Step 5:Setting grinder parameter, including grinding rotating speed, milling time;Then, grinder is started.
Step 6:After milling time is reached, grinder is closed.
Step 7:Host computer makes clamping device by motion controller control three-dimensional fix device ZhongzZhou travel mechanisms Raise.
Step 8:Air compressor machine is closed, magnetic valve is closed, pressure-reducing valve is closed.
Step 9:The lithium niobate crystal chip for finishing will be ground by being removed on clamping device.
The advantage of the invention is that:
1st, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, grinding pressure can be by beam type power Sensor is accurately measured, and reads registration convenient;
2nd, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, beam type force snesor and three-dimensional Servomotor in space positioning apparatus constitutes closed-loop control system, it is ensured that grinding pressure it is constant;
3rd, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, adjust three-dimensional by host computer The feed rate of the z-axis servomotor in space positioning apparatus can change grinding pressure, simple to operate;
4th, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, introduce spring press out type cylinder And Pneumatic control circuit so that optical fiber and lithium niobate crystal chip grind start when, during, at the end of grinding pressure change Journey is a progressive formation, and the adjustment of grinding pressure is steadily reliable.
Brief description of the drawings
Fig. 1 is optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism overall structure diagram;
Fig. 2 is pneumatic means structural representation in optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism;
Fig. 3 is pneumatic means Structure explosion diagram in optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism;
Fig. 4 is clamping device overall structure diagram in optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism;
Fig. 5 is left pedestal right side schematic view in clamping device;
Fig. 6 is middle left pedestal leftschematic diagram;
Fig. 7 is Right socle leftschematic diagram in clamping device;
Fig. 8 is Right socle right side schematic view in clamping device;
Fig. 9 is optical fiber lithium niobate crystal chip set-up mode schematic diagram on left pedestal in clamping device;
Figure 10 is optical fiber lithium niobate crystal chip set-up mode schematic diagram in clamping device on Right socle;
Figure 11 is optical fiber lithium niobate crystal chip method of clamping schematic diagram on left pedestal in clamping device;
Figure 12 is pedestal holder structural representation in clamping device;
Figure 13 is mounting means schematic diagram between left pedestal and Right socle in clamping device;
Figure 14 is locking mechanism structure schematic diagram in clamping device;
Figure 15 is the locking mechanism structure schematic diagram locked with Right socle for left pedestal in clamping device.
In figure:
1- three-dimensional fix device 2- pneumatic means 3- clamping devices
4- grinding plate 5- grinder 101-x axles travel mechanism
102-y axles travel mechanism 103-z axles travel mechanism 104- pillars
201- spring press out type cylinder 202- governor motion 203-z axles travel mechanism pinboard
204- force snesor 205- precision rotation platform 206- cylinder mounting plates
203a- base plate 203b- optical axis 203c- top boards
The 203d- linear bearing 203e- bearing holder (housing, cover)s left pedestals of 301-
302- Right socle 303- pedestal holder 304- retaining mechanisms
305- base stand location shoulder 306- screw locating shoulder a- locating pieces
B- gripping block c- loading blocks d- fiber orientation grooves
E- wafer orientation groove f- raised structures g- recessed structures
H- optical fiber i- lithium niobate crystal chip j- manholes
K-- limited blocks
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
Optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, including three-dimensional fix device 1, pneumatic means 2 with clamping device 3, as shown in Figure 1.
The three-dimensional fix device 1 is arranged on grinding plate 4, is designed using door type, including two sets of x-axis movements Mechanism 101, a set of y-axis travel mechanism 102, a set of z-axis travel mechanism 103 and two pillars 104.X-axis travel mechanism 101, y-axis Travel mechanism 102 is identical with z-axis travel mechanism 103 structure, by erecting bed, slide rail, slide unit, ball-screw and motor structure Into.Wherein, two slide rails being parallel to each other are installed on erecting bed.Screw rod be arranged in parallel with two slide rails in ball-screw, spiral shell Bar two ends are arranged on erecting bed by support member, and are connected by bearing between installed part;Screw rod one end is defeated with motor Shaft is coaxially connected, by motor drive screw turns.Sliding block is arranged on two slide rails, is supported by two slide rails; Sliding block is fixed with nut in ball-screw, by rotating screw rod by by nut band movable slider together move axially along a screw.
The Liang Tao x-axis travel mechanism 101 of said structure is arranged in parallel on grinding plate 4;Two pillars 104 are vertical Set, bottom is separately mounted on the sliding block in Liang Tao x-axis travel mechanism 101.The two ends of y-axis travel mechanism 102 are fixed respectively to pacify Mounted in two tops of pillar 104, it is supported by pillar 104.The axis of z-axis travel mechanism 103 and the axle of y-axis travel mechanism 102 Line is vertically arranged, on the slide unit that erecting bed is fixed in y-axis travel mechanism 102 by adaptor.In z-axis travel mechanism 103 Pinboard is installed, for installing pneumatic means 2 on sliding block.Thus, control command is sent to motion controller by host computer, Drive Liang Tao x-axis travel mechanism 101 to be synchronized with the movement by motion controller, be capable of achieving movement of the pneumatic means 2 along x-axis;Drive y-axis Travel mechanism 102 moves, and is capable of achieving movement of the pneumatic means 2 along y-axis;Drive z-axis travel mechanism 103 to move, realize pneumatic dress Put 2 along z-axis movement.
It is any one in above-mentioned Liang Tao x-axis travel mechanism 101 to put, in y-axis travel mechanism 102 and z-axis travel mechanism 103 On be also equipped with encoder and grating scale.Wherein, encoder is coaxially fixed with the end of screw rod in ball-screw.Grating scale is got the bid Chi grating is fixedly mounted on erecting bed, and grating reading head is arranged on the nut in ball-screw.By encoder and grating Chi realize respectively ball screw turns angle measurement and pneumatic means 2 along the displacement on x, y, z axle measurement, and will Measurement structure feeds back to host computer for realizing, and feeds back to host computer.
Thus, the spatially interior any point of pneumatic means 2 can be realized by said mechanism three-dimensional fix device 1 It is accurately positioned, finally realizes that the clamping device 3 installed on pneumatic means 2 reaches default initial abrasion site and realizes grinding During Fine Feed;Start z-axis travel mechanism 103 afterwards, z-axis brushless servo motor is entered low-speed running state, servo Motor rotation speed and grinding pressure value into positive correlation, beam type force snesor, encoder, grating scale, servo-driver, servo electricity Machine, motion controller and host computer form closed loop servo-control system, ensure that the constant of servomotor exploitation speed and then Ensure the constant of grinding pressure.
The pneumatic means 2 include spring press out type cylinder 201, governor motion 202, z-axis travel mechanism pinboard 203, Force snesor 204 and precision rotation platform 205, as shown in Figure 2 and Figure 3.
Wherein, spring press out type cylinder 201 uses SMC C85N-10-25T types, by soundproof oil free air compressor by spring The front end of press out type cylinder 201 can move to compressed air, piston rod is passed through in cylinder body to cylinder body contract.Cylinder body is installed with cylinder Screw thread coordinates and fixes between the cylinder mounting holes opened up on mounting surface in plate 206;Cylinder mounting plate 206 also has vertical with mounting surface Joint face, for connecting the pinboard of z-axis travel mechanism 103, the pinboard of z-axis travel mechanism 103 is used for and z-axis travel mechanism The connection of slide unit in 103, and then the connection of spring press out type cylinder 201 and z-axis travel mechanism 103 is realized, and extrude spring The piston rod of type cylinder 201 is perpendicular to grinding plate 4.The piston rod of spring press out type cylinder 201 is used for and governor motion 202 It is connected.
The governor motion 202 has base plate 203a, optical axis 203b, top board 203c, linear bearing 203d and bearing holder (housing, cover) 203e;Wherein, optical axis 203b is two, arranged in parallel.Two one end of optical axis 203b are connected with base plate 203a, the other end It is connected with top board 203c;Two optical axis 203b were last to be cased with a linear bearing 203d, and two outer rings of linear bearing 203d lead to It is fixedly mounted in bearing holder (housing, cover) 203e, and is fixed the relative position between two linear bearing 203d by bearing holder (housing, cover) 203e;Two Individual linear bearing 203d ensure that two optical axis 203b are slided smoothly in the axial direction, and limit two optical axis 203b radially Motion.Be provided with connecting hole, the axis of connecting hole and two axis co-planars of optical axis 203b on above-mentioned top board 203c, and with two light Axle 203b axis spacing is equal.Top board 203c is vertically arranged with the piston rod axis of spring press out type cylinder 201, piston rod end Coordinate with connecting hole screw thread and fix, realize the positioning between governor motion 202 and spring press out type cylinder 201;Meanwhile, by bearing holder (housing, cover) 203e is connected with slide unit in z-axis travel mechanism 103, realizes the connection of governor motion 202 and z-axis travel mechanism 103.Thus, lead to Cross spring press out type cylinder 201 and drive optical axis 203b movements in its axial direction.
The force snesor 205 uses beam type force snesor, and maximum load is 2kg.The fixing end of force snesor 205 is fixed The base plate 203a bottom surfaces in governor motion 202, the power induction end of force snesor 205 is provided with pinboard, for installing essence Close turntable 206;The fixing end of the precision rotation platform 206 is fixedly mounted on pinboard, and round end is installed with clamping Mechanism 3, carries out stable holding to optical fiber lithium niobate crystal chip, and can control optical fiber by precision rotation platform 206 by clamping device 3 The rotary motion of lithium niobate crystal chip in the vertical direction, and then the grinding angular adjustment of optical fiber lithium niobate crystal chip can be accurately realized, Formula its reach default grinding angle.
The clamping device 3 includes optical fiber lithium niobate crystal holder for x-ray film of the present invention, including left pedestal 301, Right socle 302nd, pedestal holder 303 and retaining mechanism 304, as shown in Figure 4.
Wherein, left pedestal 301 is symmetrical set with Right socle 302, is locating piece a, gripping block b and loading blocks c structures Into one rectangular block shape structure, be made up of the stainless steels of annealing of AISI 321.
As shown in Figure 5, Figure 6, in left pedestal 301, locating piece a is designed with rectangle as non-deformed unit, on right flank and dashes forward F is played, is coordinated for the rectangular recessed g with design on locating piece a left surfaces in Right socle 302, realize left pedestal 301 and Right socle Positioning between 302.Used as deformation unit, trailing flank top connects gripping block b with the leading flank top of locating piece a, and makes clamping Block b trailing flanks have gap with locating piece a leading flanks.Gripping block b bottoms have the loading blocks c for only connecting gripping block b leading flanks Cavity is set, for setting loading blocks c.Loading blocks c is used as non-deformed unit, trailing flank bottom and locating piece a leading flanks bottom Connect.The fiber orientation groove d of insertion locating piece a upper and lower sides is designed with the right flank of above-mentioned locating piece a, for setting optical fiber h;The side of fiber orientation groove d communicates with locating piece a leading flanks, then form ladder in the front side edge position of locating piece a right flanks Structure;Meanwhile, lithium niobate crystal chip i locating slot e are also provided with one end of fiber orientation groove d, positioned at the bottom of locating piece a, it is used for Lithium niobate crystal chip i is set, as shown in Figure 9.
As shown in Figure 7, Figure 8, in Right socle 302, locating piece a is designed with recessed knot as non-deformed unit, on left surface Raised structures f on structure g, with left pedestal 301 coordinates.Gripping block b as deformation unit, before trailing flank top and locating piece a Side top connects, and gripping block b trailing flanks is had gap with locating piece a leading flanks.There is only insertion to step up for gripping block b bottoms The loading blocks c of block leading flank sets cavity, for setting loading blocks c, loading blocks c as non-deformed unit, trailing flank bottom with Locating piece a leading flank bottom connections.The optical fiber that connection locating piece a upper and lower sides are designed with the right flank of above-mentioned locating piece a is determined Position groove d, for setting optical fiber h;The side of fiber orientation groove d communicates with locating piece a leading flanks, then in locating piece a right flanks Front side edge position forms hierarchic structure;Meanwhile, wafer orientation groove e is also provided with one end of fiber orientation groove d, positioned at locating piece a Bottom, for setting lithium niobate crystal chip i, as shown in Figure 10.
In the left pedestal 301 and Right socle 302 of said structure, insertion loading blocks c front and back sides are had on loading blocks c Left-hand thread hole and right-hand thread hole, coordinate with pinching screw screw thread, by tightening pinching screw, pinching screw end is passed through spiral shell Nail is contacted with gripping block b lower fronts, as shown in figure 11;It is connected due to only having top between gripping block b and locating piece a, and it Between leave gap, thus, by tightening pinching screw, promote gripping block b bottoms backward by pinching screw, and then by clamping Be clamped in lithium niobate crystal chip i in wafer orientation groove e by block b trailing flanks.On above-mentioned left pedestal 301 and Right socle 302, near positioning Block and gripping block joint, are provided with insertion locating piece simultaneously and the manhole j of gripping block left and right side, make locating piece a with folder Tight block b joints form domes, and the circular arc shaped portion of arch form power can be transmitted to during arch stress, are uniformly dispersed to surrounding Come, can effectively reduce locating piece a and receive force intensity with gripping block b joints so that step up in left pedestal 301 and Right socle 302 Position can be used for multiple times, the phenomenon without producing stress concentrations and locating piece a and gripping block b joints Strength Failure.
Left pedestal 301 is accommodated with Right socle 302 by pedestal holder 303, pedestal holder 303 be with two side arms with The U-shape structure that back timber is constituted, as shown in figure 12, correspondence position is had in through hole and screwed hole, and two side arms in two side arms Correspondence position is designed with base stand location shoulder 305 on wall.As shown in figure 13, left pedestal 301 passes through rectangular protrusions f and Right socle 302 rectangular recessed g coordinate relative positioning, now by bolt through locating piece a in left pedestal 301 and positioning in Right socle 302 With Right socle 302 be fixed as one left pedestal 301 by the screw opened up on block a, now the right flank of left pedestal 301 and Right socle 302 left surfaces are fitted, and form overall base, between being arranged on the two side arms of pedestal holder 303, make locating piece a in left pedestal 301 Left surface is fitted with the left surface inwall of pedestal holder 303, and realizes determining for left pedestal 301 by base stand location shoulder 305 Position;Similarly, the right flank of locating piece a in Right socle 302 is made to be fitted with the right flank inwall of pedestal holder 303, and by pedestal Locating shoulder 305 realizes the positioning of Right socle 302.After being passed through by the through hole on a side arm by pinching screw with another side arm on Screwed hole threaded connection, by tightening pinching screw, relatively move two side arms, left pedestal 301 is clamped with Right socle 302 It is fixed, as shown in Figure 1.
The retaining mechanism 304 has 3, respectively left pedestal retaining mechanism, Right socle retaining mechanism and clamping device Retaining mechanism, is respectively intended to realize that left pedestal 301, Right socle 302 are locked with the pinching screw in pedestal clamping device 3.3 locks Tight mechanism 304 is U-shape structure, and as shown in figure 14, correspondence position has through hole and screwed hole, and bending position on two sides Put as screw positioning port, screw locating shoulder 306 is designed with inwall circumference, for locking screw.Thus, will clamp After screw passes through screw positioning port, positioned after the nut of screw is fitted with screw locating shoulder 306;Then, by pinching screw Through after the through hole on one side, it is connected with the screwed hole matching thread on another side, by tightening pinching screw, makes locking The both sides interplanar distance of mechanism 304 reduces, and then reduces Positioning screw mouthful bore, and most pinching screw is clamped at last.By rotation lock Tight mechanism 304 just can realize the rotation of pinching screw, be easy to the precession of pinching screw.
Because optical fiber h Mohs' hardness is 7, lithium niobate crystal chip i Mohs' hardness is 5, and both belong to hard brittle material, and on a left side In pedestal 301 and Right socle 302, when tightening pinching screw manually and being clamped lithium niobate crystal chip i, when pinching screw excessively revolves When tight, it is easy to cause lithium niobate crystal chip i to damage.Therefore precise control screw precession distance is needed, and in the present invention, in left base Limited block is designed with seat retaining mechanism and side in Right socle retaining mechanism 304, as shown in figure 15;Meanwhile, need to ensure on a left side After the screwed hole that pedestal 301 is screwed on loading blocks c with pinching screw in Right socle 302 makes end be passed by screwed hole, with clamping When block b leading flanks are contacted, by 45 ° of the left pedestal retaining mechanism of further turn to the left, limited block connects with the left surface of left pedestal 301 Touch, now loading blocks c trailing flanks clamp the lithium niobate crystal chip i on left pedestal 301;Locked by further turn Right socle to the right Tight 45 ° of mechanism, limited block is contacted with the right flank of Right socle 302, and now loading blocks c trailing flanks are by the lithium niobate on Right socle 302 Chip i is clamped, as shown in figure 13.
For said structure optical fiber and the Ginding process of lithium niobate crystal chip Pneumatic Pressure grinding mechanism, comprise the following steps that:
Step 1:Two pieces of lithium niobate crystal chip i are gripped by clamping device, and by adjustment precision turntable.Optical fiber Lithium niobate crystal chip need to ensure that optical fiber axial direction grinds to form 15 degree with fiber end face normal direction, meet grinding and require, be effectively reduced and Y ripples Lead back-reflection during coupling.
Step 2:Host computer controls three-dimensional fix device 1 by motion controller, makes the lithium niobate on clamping device 3 Chip i is moved at 1~2mm of the top of planetary-type grinding machine 5, and adjusts the position in x, y direction of three-dimensional fix device, is protected The central point of the optical fiber h that card is bonded with two pieces of lithium niobate crystal chip i phases is with the central point of the main shaft of grinder 5 apart from equal.Meanwhile, Grinding abrasive paper is placed to grinder 5.
Step 3:Start air compressor machine, open magnetic valve, regulation pressure-reducing valve to certain value;By starting soundproof oil free air compressor The compressed air of definite value pressure is passed through in cylinder body to spring press out type cylinder 201, under the pressure effect of compressed air, and then Clamping device 3 is driven to move upwards by piston rod;Now, two linear bearing 203d is located at optical axis 203b middle parts, prevent light There is the excessive situation in position in axle 203b and linear bearing 203d;And the back-moving spring fortune in the cylinder body of spring press out type cylinder 201 Move to the centre position of the stroke of spring press out type cylinder 201, be lithium niobate crystal chip i grinding pressures appearance change suddenly in process of lapping When dynamic, there is provided be allowed to the equilibrant force of gradual change, it is ensured that the change of grinding pressure is a process for gradually changing, and prevents grinding pressure Lithium niobate crystal chip i's or optical fiber h breaks caused by excessive.Above-mentioned piston rod is subject to downward spring restoring force and piston rod to export The connected mass body gravity in end, force value size is equal with the cylinder interior pressure of spring press out type cylinder 201.
Step 4:Host computer controls the brushless of ZhongzZhou travel mechanisms of three-dimensional fix device 1 to watch by motion controller Motor into low-speed running state is taken, clamping device 3 is moved downward, lithium niobate crystal chip i is contacted with grinder.
Due to when lithium niobate crystal chip i is not in contact with grinder, the power measured by force snesor 205 is only and force snesor 205 mass bodies being connected (including pinboard, precision rotation platform 206 and the clamping device that the power induction end of force snesor 205 is installed 3) gravity, and when lithium niobate crystal chip i starts contact grinder 5, the upward pressure that grinder 5 can be subject to apply, the pressure The gravity of part mass body can be offset, reduces the measured value of force snesor 205.Thus, when the measured value of force snesor 205 reduces When, show that optical fiber lithium niobate crystal chip i has contacted grinder 5, now, host computer controls three-dimensional fix by motion controller The brushless servo motor of the ZhongzZhou travel mechanisms of device 1 shuts down.
Step 5:By grinding requirement setting grinder parameter, including grinding rotating speed, milling time;Then, grinder is started 5, grinding rotating speed is stepped up to setting value by zero, it is ensured that optical fiber and lithium niobate crystal chip i are difficult because of motor in process of lapping Larger grinding pressure causes optical fiber and lithium niobate crystal chip i brittle fractures caused by speed increase suddenly, it is ensured that process of lapping Steadily.
Step 6:After milling time is reached, grinder is closed.
Step 7:Host computer controls the brushless of ZhongzZhou travel mechanisms of three-dimensional fix device 1 to watch by motion controller Motor rotation is taken, clamping device is raised.
Step 8:Air compressor machine is closed, magnetic valve is closed, pressure-reducing valve is closed.
Step 9:The lithium niobate crystal chip i for finishing will be ground by being removed on clamping device 3.

Claims (5)

1. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, it is characterised in that:Including three-dimensional fix device, gas Dynamic device and clamping device;
Wherein, three-dimensional fix device is arranged on grinding plate;Cunning in three-dimensional fix device ZhongzZhou travel mechanisms Pneumatic means is installed on block;Clamping device is installed on pneumatic means;Realized on pneumatic means by three-dimensional fix device The positioning at the clamping device of installation spatially interior any point;Clamping device is used for grip optical fiber and lithium niobate crystal chip;
The pneumatic means includes spring press out type cylinder, cylinder pole, governor motion, z-axis travel mechanism pinboard, power sensing Device and precision rotation platform;
Wherein, the cylinder body of spring press out type cylinder coordinates with mounting surface screw thread in cylinder mounting plate and fixes;Cylinder mounting plate is used for Travel mechanism is connected with z-axis;Make the piston rod of spring press out type cylinder perpendicular to grinding plate;The piston of spring press out type cylinder Bar is used for being connected with governor motion;
The governor motion has base plate, optical axis, top board, linear bearing and bearing holder (housing, cover);Wherein, optical axis is two, is parallel to each other Set;Two one end of optical axis are connected with base plate, and the other end is connected with top board;A linear bearing is respectively cased with two optical axises, The outer ring of two linear bearings is fixedly mounted in bearing holder (housing, cover), and is consolidated the relative position between two linear bearings by bearing holder (housing, cover) It is fixed;Top board is vertically arranged with the piston rod axis of spring press out type cylinder;Bearing holder (housing, cover) is connected with slide unit in z-axis travel mechanism;
The force snesor fixing end is fixedly mounted on base plate bottom surface in governor motion, and power induction end installs precision rotation platform;Essence Close turntable round end is installed with clamping device.
2. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism as claimed in claim 1, it is characterised in that:The three-dimensional Space positioning apparatus are designed using door type, including Liang Tao x-axis travel mechanism, a set of y-axis travel mechanism, a set of z-axis moving machine Structure and two pillars;X-axis travel mechanism, y-axis travel mechanism are identical with z-axis travel mechanism structure, by erecting bed, slide rail, cunning Platform, ball-screw and motor are constituted;Wherein, two slide rails being parallel to each other are installed on erecting bed;Spiral shell in ball-screw Bar is be arranged in parallel with two slide rails, and screw rod two ends are arranged on erecting bed by support member, and is connected by bearing between installed part Connect;Screw rod one end is coaxially connected with driving motor output shaft, by motor drive screw turns;Sliding block is arranged on two cunnings On rail, supported by two slide rails;Sliding block is fixed with nut in ball-screw;Above-mentioned Liang Tao x-axis travel mechanism is parallel to each other and sets Put;Two pillars are vertically arranged, and bottom is separately mounted on the sliding block in Liang Tao x-axis travel mechanism;Y-axis travel mechanism two ends point Two pillar tops are not fixedly mounted on, are supported by pillar;Z-axis travel mechanism axis hangs down with y-axis travel mechanism axis It is straight to set, on the slide unit that erecting bed is fixed in y-axis travel mechanism by adaptor.
3. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism as claimed in claim 2, it is characterised in that:Described two sets It is any one in x-axis travel mechanism to put, encoder and grating scale are also equipped with y-axis travel mechanism and in z-axis travel mechanism; Wherein, encoder is coaxially fixed with the end of screw rod in ball-screw;Scale grating is fixedly mounted on erecting bed in grating scale, Grating reading head is arranged on the nut in ball-screw.
4. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism as claimed in claim 1, it is characterised in that:The power is passed Sensor uses beam type force snesor.
5., for a kind of optical fiber and the Ginding process of lithium niobate crystal chip Pneumatic Pressure grinding mechanism described in claim 1, it is special Levy and be:Step is as follows:
Step 1:Two blocks of optical fiber and lithium niobate crystal chip are gripped by clamping device;And required according to grinding, by adjustment Precision rotation platform adjusts optical fiber and the angle between lithium niobate crystal chip face machined flat normal direction and grinder surface normal;
Step 2:Host computer controls three-dimensional fix device by motion controller, makes the optical fiber and lithium niobate on clamping device Chip moves to grinder top;Meanwhile, grinding abrasive paper is placed to grinder;
Step 3:Start the compressed air that definite value pressure is passed through in cylinder body of the air compressor machine to spring press out type cylinder, and then by piston Bar drives clamping device to move upwards;Now, two linear bearings are made to be located at optical axis middle part;And in spring press out type cylinder block Back-moving spring move to the centre position of spring press out type cylinder stroke;
Step 4:Host computer makes clamping device downward by motion controller control three-dimensional fix device ZhongzZhou travel mechanisms Motion, when reducing to force sensor measuring value, host computer controls three-dimensional fix device to stop by motion controller;This When, optical fiber and lithium niobate crystal chip are contacted with grinder;
Step 5:Setting grinder parameter, including grinding rotating speed, milling time;Then, grinder is started;
Step 6:After milling time is reached, grinder is closed;
Step 7:Host computer lifts clamping device by motion controller control three-dimensional fix device ZhongzZhou travel mechanisms It is high;
Step 8:Air compressor machine is closed, magnetic valve is closed, pressure-reducing valve is closed;
Step 9:The optical fiber and lithium niobate crystal chip that finish will be ground by being removed on clamping device.
CN201510276478.1A 2015-05-26 2015-05-26 A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process Expired - Fee Related CN104959908B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510276478.1A CN104959908B (en) 2015-05-26 2015-05-26 A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510276478.1A CN104959908B (en) 2015-05-26 2015-05-26 A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process

Publications (2)

Publication Number Publication Date
CN104959908A CN104959908A (en) 2015-10-07
CN104959908B true CN104959908B (en) 2017-06-06

Family

ID=54214079

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510276478.1A Expired - Fee Related CN104959908B (en) 2015-05-26 2015-05-26 A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process

Country Status (1)

Country Link
CN (1) CN104959908B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105150687B (en) * 2015-10-08 2018-03-09 海捷数码技术(苏州)有限公司 A kind of calibration method of calibration method, calibrating installation and printing machine shower nozzle
CN105834889A (en) * 2016-05-12 2016-08-10 苏州市展进机电设备有限公司 Automatic grinding device for silicon wafer
CN107350961B (en) * 2016-12-20 2019-09-13 北京航空航天大学 A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp
CN106493633A (en) * 2016-12-28 2017-03-15 青岛奥美克医疗科技有限公司 A kind of apparatus and method of lighting fiber optical cable automatic grind polishing
CN208231546U (en) * 2018-01-31 2018-12-14 江苏法尔胜光电科技有限公司 Grinding clamp suitable for fiber optic bundle end face
CN109807744A (en) * 2019-03-26 2019-05-28 四川工程职业技术学院 Floating installation and its relocation mechanism for polishing
CN112558254B (en) * 2020-12-08 2023-05-02 北京信息科技大学 Be used for planting optic fibre flexible material sensor fixed knot to construct
CN113910019B (en) * 2021-09-24 2022-06-24 杭州电子科技大学 Conical optical fiber automatic grinding machine based on cone angle fine adjustment mechanism and grinding method thereof
CN114211388A (en) * 2021-12-14 2022-03-22 翔实光电科技(昆山)有限公司 A grinder that is used for AG glass to pass through some grinding

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2366229Y (en) * 1999-04-13 2000-03-01 台精科技股份有限公司 Fibre-optical lapping machine
JP2003094325A (en) * 2001-09-19 2003-04-03 Speedfam Co Ltd Single-face polishing device
JP2006082139A (en) * 2004-09-14 2006-03-30 Matsushita Electric Ind Co Ltd Dry polishing device and dry polish method
CN201432225Y (en) * 2009-08-18 2010-03-31 黄超凡 Pneumatic pressurizing rotary mechanism of optical fiber polishing machine
CN201471286U (en) * 2009-07-10 2010-05-19 兰州瑞德实业集团有限公司 Numerical control precision grinding polishing machine

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2366229Y (en) * 1999-04-13 2000-03-01 台精科技股份有限公司 Fibre-optical lapping machine
JP2003094325A (en) * 2001-09-19 2003-04-03 Speedfam Co Ltd Single-face polishing device
JP2006082139A (en) * 2004-09-14 2006-03-30 Matsushita Electric Ind Co Ltd Dry polishing device and dry polish method
CN201471286U (en) * 2009-07-10 2010-05-19 兰州瑞德实业集团有限公司 Numerical control precision grinding polishing machine
CN201432225Y (en) * 2009-08-18 2010-03-31 黄超凡 Pneumatic pressurizing rotary mechanism of optical fiber polishing machine

Also Published As

Publication number Publication date
CN104959908A (en) 2015-10-07

Similar Documents

Publication Publication Date Title
CN104959908B (en) A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process
CN105033839B (en) A kind of lithium niobate crystal chip lapping device and Ginding process with grinding pressure adjusting apparatus
CN102922389B (en) Polishing device and polishing method of aspheric optical element
CN102615556B (en) A kind of five axle cutter sharpeners
CN103072047B (en) Small-caliber non-spherical permanent magnet magnetorheological polishing processing machine tool
CN106826474B (en) Small size thin wall complex structure part superfine grinding lathe
CN102161168B (en) Small-caliber aspherical composite precise processing machine tool
CN102161169B (en) Small-caliber aspherical composite precise processing method
CN106826403A (en) A kind of automatic fine grinding device in shaft-like workpiece outer surface
CN103128645A (en) Active compliance robot grinding system with controlled pressure and changeable speed and method
CN101204786A (en) High accuracy ball double autorotation grinding tray high-efficiency grinding device
CN104493662B (en) Machining device for curvature radius-adjustable aspheric concave lens
CN103302567A (en) Eyeglass lens processing apparatus
CN107598722A (en) Teaching type is cylindrical, plane dual-purpose grinding machine
Liu et al. Configuration design and accuracy analysis of a novel magnetorheological finishing machine tool for concave surfaces with small radius of curvature
CN102102986B (en) Roundness/cylindricality measurement workbench capable of automatically regulating center and inclination
CN108188864A (en) A kind of aspherical optical element automation polishing system and method
CN105522472B (en) A kind of Superfinishing machine
CN213828500U (en) Multi-station grinding machine fine adjustment mechanism
CN105290915A (en) Large-aperture ultra-precise grinding machine integrated system
CN208528684U (en) Aperture numerical control inner conical surface grinding machine
JP2006320970A (en) Machining device
CN206416029U (en) A kind of automatic irrational number rotating ratio polished machine
CN2858178Y (en) Cutting, grinding and polishing machine of crystal and gemstone
CN205342678U (en) Liquid hydrodynamic float burnishing device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170606

Termination date: 20200526