CN206416029U - A kind of automatic irrational number rotating ratio polished machine - Google Patents
A kind of automatic irrational number rotating ratio polished machine Download PDFInfo
- Publication number
- CN206416029U CN206416029U CN201621488190.7U CN201621488190U CN206416029U CN 206416029 U CN206416029 U CN 206416029U CN 201621488190 U CN201621488190 U CN 201621488190U CN 206416029 U CN206416029 U CN 206416029U
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- axis
- mobile slide
- motor
- axis mobile
- connecting seat
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Abstract
The utility model discloses a kind of automatic irrational number rotating ratio polished machine, including traditional grinder, connecting seat, X-axis Mobile Slide, Y-axis Mobile Slide, Z axis Mobile Slide, active rotation motor, active synchronization belt wheel, passive and synchronous belt wheel, motor moving axis, driving shaft, upper grinding and polishing disk, lower grinding and polishing disk and portable plate, the utility model carries out irrational number rotation by active rotation motor, driving shaft is controlled to carry out irrational number rotation, above and below can realizing between grinding and polishing disk irrational number rotating ratio requirement, so as to solve the problem of grinding track of the abrasive particle on workpiece is repeated under rational rotating ratio, improve the surface quality of plane lapping processing, realize the processing of the low damage of workpiece surface ultra-smooth；Bar hole in motor moving axis can effectively prevent upper lower millstone main shaft locking when the amount of feeding is excessive, improve the security of grinding and polishing.
Description
Technical field
The utility model is related to hypercompact close grinding and polishing processing technique field, in particular, more particularly to a kind of automatic
Irrational number rotating ratio polished machine.
Background technology
Current Ultraprecision Machining, premised on not changing workpiece material physical characteristic, to obtain very high shape
Shape precision, dimensional accuracy, surface roughness and surface integrity (the few not damaged in surface, including residual stress, tissue change,
The defects such as micro-crack) it is target, it is the important support of the sophisticated technology industries such as Aero-Space, weapon national defence, optoelectronic information.Grinding
The important means as Ultra-precision Turning is polished, it is using fine abrasive grains as machining medium.Before grinding is usually as polishing
Process, it is therefore an objective to improve the surface figure accuracy of workpiece and reduce the surface roughness of workpiece to a certain extent, polishing will enter one
Step reduces workpiece surface roughness, improves the surface integrity (it is generally acknowledged that polishing can not improve surface figure accuracy) of workpiece.
Traditional plane lapping polishing is typically all to be ground polishing using rational rotating ratio track, and it is present
Grinding track when processing workpiece due to abrasive particle on workpiece is repeated, and is easily caused roughness decline, the polishing table of workpiece surface
Face forms the defect such as ripple and orange peel.Therefore, plane lapping working motion method is innovated, the table of plane lapping processing is improved
Face quality, steps up the high accuracy control shape technical merit of the process, the abrasive machining for enriching the low injured surface of ultra-smooth is managed
By with important theory significance and scientific value.
Utility model content
The purpose of this utility model is that it is typically all to use rational rotating ratio rail to solve traditional plane lapping polishing
Mark is ground polishing, and grinding track when it has processing workpiece due to abrasive particle on workpiece is repeated, and is easily caused work
The roughness on part surface declines, there is provided a kind of automatic irrational number rotating speed for the polished surface formation defect such as ripple and orange peel
Than polished machine, rotated by surd, solve the problem of abrasive particle track is repeated, it is ensured that obtain uniform on processing workpiece surface
, grinding track without dominant direction.
The utility model is achieved through the following technical solutions above-mentioned purpose：A kind of automatic irrational number rotating ratio grinding and polishing
Machine, including traditional grinder, connecting seat, X-axis Mobile Slide, Y-axis Mobile Slide, Z axis Mobile Slide, active rotation motor,
Active synchronization belt wheel, passive and synchronous belt wheel, motor moving axis, driving shaft, upper grinding and polishing disk, lower grinding and polishing disk and portable plate, the company
The mode that joint chair is connected by screw is fixed on the side wall of traditional grinder, and Y-axis Mobile Slide is arranged on connecting seat, X
Axle Mobile Slide is arranged on the sliding block of Y-axis Mobile Slide, and connecting seat is fixed on the sliding block of X-axis Mobile Slide, and Z axis movement is slided
Platform is fixed on connecting seat vertically, and active rotation motor is fixed on connecting seat and positioned at the top of Z axis Mobile Slide, the master
Dynamic electric rotating machine carries out that active synchronization belt wheel is housed on irrational number rotation, the motor head of active rotation motor, and the motor drives
The upper end of axle is provided with passive and synchronous belt wheel, and the active synchronization belt wheel is connected with passive and synchronous belt wheel by timing belt；It is described
Motor moving axis is fixed on connecting seat by bearing；The portable plate is arranged on the sliding block of Z axis Mobile Slide, and driving shaft leads to
Bearing is crossed on portable plate, the lower end of motor moving axis is provided with the slotted eye being engaged with driving shaft, the side of slotted eye is set
There is bar hole, the upper end of driving shaft is sleeved in the slotted eye of motor moving axis, be further fixed on driving shaft and bar shaped hole width phase
The limited block of cooperation, drives driving shaft to be moved up and down along the slotted eye of motor moving axis, its shift motion when Z axis Mobile Slide is moved
In the length range of bar hole；The lower grinding and polishing disk is arranged on inside traditional grinder, and the upper grinding and polishing disk is fixed on master
The bottom of moving axis and above the traditional grinder.
Further, the X-axis Mobile Slide, Y-axis Mobile Slide, Z axis Mobile Slide are leading screw driving slide unit, X-axis
Mobile Slide is driven by X-axis motor, and Y-axis Mobile Slide is driven by Y-axis motor, and Z axis Mobile Slide passes through Z axis
Motor drives, and the X-axis motor, Y-axis motor and Z axis motor are servomotor.
Further, the X-axis Mobile Slide, Y-axis Mobile Slide, Z axis Mobile Slide are Pneumatic slid platform.
Further, it is further fixed on protective cover on the connecting seat, protective cover is by the motor head of active rotation motor, active
Synchronous pulley, timing belt and passive and synchronous belt wheel are covered.
Further, the motor moving axis is fixed on connecting seat by taper roll bearing, and the driving shaft passes through
Taper roll bearing is arranged on portable plate.
The beneficial effects of the utility model are：The utility model carries out irrational number rotation, control by active rotation motor
Driving shaft processed carries out irrational number rotation, can realize above and below between grinding and polishing disk irrational number rotating ratio requirement, so as to solve
The problem of grinding track of the abrasive particle on workpiece is repeated under reason number rotating ratio, improves the surface quality of plane lapping processing, real
The processing of the low damage of workpiece surface ultra-smooth is showed；Bar hole in motor moving axis can be prevented effectively on when the amount of feeding is excessive
Lower millstone main shaft locking, improves the security of grinding and polishing；Optional position can be realized by the Mobile Slide in three directions
Grinding and polishing, improves the accuracy of polishing；Motor moving axis and driving shaft are separated, when upper polishing disk is polished actively
Axle can play a certain degree of floating, improve the stability of polishing, and improve the surface quality of plane lapping processing, realize
The processing of the low damage of workpiece surface ultra-smooth.
Brief description of the drawings
Fig. 1 is a kind of axonometric drawing of automatic irrational number rotating ratio polished machine of the utility model.
Fig. 2 is a kind of front view of automatic irrational number rotating ratio polished machine of the utility model.
Fig. 3 is a kind of left view of automatic irrational number rotating ratio polished machine of the utility model.
Fig. 4 is a kind of top view of automatic irrational number rotating ratio polished machine of the utility model.
The connection diagram of Fig. 5 the utility model upthrow optical disc apparatus.
In figure, grinder traditional 1-, 2- connecting seats, 3-X axle Mobile Slides, 4-Z axle motors, 5- active rotations electricity
Grinding and polishing disk under machine, 6- active synchronization belt wheels, 7- motor moving axis, 8- driving shafts, the upper grinding and polishing disks of 9-, 10-, 11-Y axles driving electricity
Machine, 12-Y axle Mobile Slides, 13-X axle motors, 14- protective covers, 15- limited blocks, 16-Z axles Mobile Slide, 17- activities
Plate.
Embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
As shown in Fig. 1~5, a kind of automatic irrational number rotating ratio polished machine, including traditional grinder 1, connecting seat 2, X
It is axle Mobile Slide 3, Y-axis Mobile Slide 12, Z axis Mobile Slide 16, active rotation motor 5, active synchronization belt wheel 6, passive and synchronous
Belt wheel, motor moving axis 7, driving shaft 8, upper grinding and polishing disk 9, lower grinding and polishing disk 10 and portable plate 17, the connecting seat 2 is connected by screw
The mode connect is fixed on the side wall of traditional grinder 1, and Y-axis Mobile Slide 12 is arranged on connecting seat 2, X-axis Mobile Slide 3
On the sliding block of Y-axis Mobile Slide 12, connecting seat 2 is fixed on the sliding block of X-axis Mobile Slide 3, and Z axis Mobile Slide 16 is erected
Directly it is fixed on connecting seat 2, active rotation motor 5 is fixed on connecting seat 2 and positioned at the top of Z axis Mobile Slide 16, described
Active rotation motor 5 carries out that active synchronization belt wheel 6, the motor are housed on irrational number rotation, the motor head of active rotation motor 5
Upper end with moving axis 7 is provided with passive and synchronous belt wheel, and the active synchronization belt wheel 6 is connected with passive and synchronous belt wheel by timing belt
Connect；The motor moving axis 7 is fixed on connecting seat 2 by bearing；The portable plate 17 is arranged on the cunning of Z axis Mobile Slide 16
On block, driving shaft 8 is arranged on portable plate 17 by bearing, and the lower end of motor moving axis 7 is provided with the groove being engaged with driving shaft 8
Hole, the side of slotted eye is provided with bar hole, and the upper end of driving shaft 8 is sleeved in the slotted eye of motor moving axis 7, on driving shaft 8 also
The limited block 15 being engaged with bar shaped hole width is fixed with, driving shaft 8 is driven when Z axis Mobile Slide 16 is moved along motor moving axis
7 slotted eye is moved up and down, and its shift motion is in the length range of bar hole；The lower grinding and polishing disk 10 is arranged on traditional grinding
Inside machine 1, the upper grinding and polishing disk 9 is fixed on the bottom of driving shaft 8 and positioned at traditional top of grinder 1.
The X-axis Mobile Slide 3, Y-axis Mobile Slide 12, the major control straight-line feed of Z axis Mobile Slide 16, therefore have two
Plant set-up mode：
The first：The X-axis Mobile Slide 3, Y-axis Mobile Slide 12, Z axis Mobile Slide 16 are leading screw driving slide unit, X
Axle Mobile Slide 3 is driven by X-axis motor 13, and Y-axis Mobile Slide 12 is driven by Y-axis motor 11, and Z axis movement is slided
Platform 16 is driven by Z axis motor 4, and the X-axis motor 13, Y-axis motor 11 and Z axis motor 4 are to watch
Take motor.
Second：The X-axis Mobile Slide 3, Y-axis Mobile Slide 12, Z axis Mobile Slide 16 are Pneumatic slid platform.
It is further fixed on protective cover 14 on the connecting seat 2, protective cover 14 is by the motor head of active rotation motor 5, actively same
Step belt wheel 6, timing belt and passive and synchronous belt wheel are covered.
The motor moving axis 7 is fixed on connecting seat 2 by taper roll bearing, and the driving shaft 8 is rolled by circular cone
Sub- bearing is arranged on portable plate 17.
During specific works, active rotation motor 5 starts, and passes through active synchronization belt wheel 6, motor moving axis 7 and the band of driving shaft 8
Dynamic upper grinding and polishing disk 9 is rotated, by the nothing that grinding and polishing disk 9 and lower grinding and polishing disk 10 in speed regulation, realization are carried out to active rotation motor 5
Manage the requirement of number rotating ratio.X-axis Mobile Slide 3, Y-axis Mobile Slide 12 and Z axis Mobile Slide 16 realize upper grinding and polishing disk 9 X, Y,
The straight-line feed of Z-direction, so that upper grinding and polishing disk 9 is moved into optional position, can thus be realized to the workpiece processed
Automatic grind polishing under irrational number rotating ratio.
Above-described embodiment is preferred embodiment of the present utility model, is not the limit to technical solutions of the utility model
System, as long as the technical scheme that can be realized without creative work on the basis of above-described embodiment, is regarded as falling into
In the rights protection scope of the utility model patent.
Claims (5)
1. a kind of automatic irrational number rotating ratio polished machine, it is characterised in that：Including traditional grinder (1), connecting seat (2), X
Axle Mobile Slide (3), Y-axis Mobile Slide (12), Z axis Mobile Slide (16), active rotation motor (5), active synchronization belt wheel
(6), passive and synchronous belt wheel, motor moving axis (7), driving shaft (8), upper grinding and polishing disk (9), lower grinding and polishing disk (10) and portable plate
(17) mode that, the connecting seat (2) is connected by screw is fixed on the side wall of traditional grinder (1), Y-axis Mobile Slide
(12) it is arranged on connecting seat (2), X-axis Mobile Slide (3) is arranged on the sliding block of Y-axis Mobile Slide (12), connecting seat (2) is solid
On the sliding block for being scheduled on X-axis Mobile Slide (3), Z axis Mobile Slide (16) is fixed on connecting seat (2) vertically, active rotation motor
(5) it is fixed on connecting seat (2) and positioned at the top of Z axis Mobile Slide (16), the active rotation motor (5) carries out irrational number
Rotate, active synchronization belt wheel (6) is housed on the motor head of active rotation motor (5), the upper end of the motor moving axis (7) is installed
There is passive and synchronous belt wheel, the active synchronization belt wheel (6) is connected with passive and synchronous belt wheel by timing belt；The motor moving axis
(7) it is fixed on by bearing on connecting seat (2)；The portable plate (17) is arranged on the sliding block of Z axis Mobile Slide (16), actively
Axle (8) is arranged on portable plate (17) by bearing, and the lower end of motor moving axis (7) is provided with the groove being engaged with driving shaft (8)
Hole, the side of slotted eye is provided with bar hole, and the upper end of driving shaft (8) is sleeved in the slotted eye of motor moving axis (7), driving shaft
(8) limited block (15) being engaged with bar shaped hole width is further fixed on, Z axis Mobile Slide (16) drives driving shaft when moving
(8) moved up and down along the slotted eye of motor moving axis (7), its shift motion is in the length range of bar hole；The lower grinding and polishing disk
(10) it is arranged on traditional grinder (1) internal, the upper grinding and polishing disk (9) is fixed on the bottom of driving shaft (8) and positioned at described
Above traditional grinder (1).
2. a kind of automatic irrational number rotating ratio polished machine according to claim 1, it is characterised in that：The X-axis movement
Slide unit (3), Y-axis Mobile Slide (12), Z axis Mobile Slide (16) are leading screw driving slide unit, and X-axis Mobile Slide (3) passes through X-axis
Motor (13) is driven, and Y-axis Mobile Slide (12) is driven by Y-axis motor (11), and Z axis Mobile Slide (16) passes through Z
Axle motor (4) drives, and the X-axis motor (13), Y-axis motor (11) and Z axis motor (4) are servo
Motor.
3. a kind of automatic irrational number rotating ratio polished machine according to claim 1, it is characterised in that：The X-axis movement
Slide unit (3), Y-axis Mobile Slide (12), Z axis Mobile Slide (16) are Pneumatic slid platform.
4. a kind of automatic irrational number rotating ratio polished machine according to any one in claim 1 or 2 or 3, its feature
It is：It is further fixed on protective cover (14) on the connecting seat (2), protective cover (14) is by the motor head of active rotation motor (5), master
Dynamic synchronous pulley (6), timing belt and passive and synchronous belt wheel are covered.
5. a kind of automatic irrational number rotating ratio polished machine according to any one in claim 1 or 2 or 3, its feature
It is：The motor moving axis (7) is fixed on connecting seat (2) by taper roll bearing, and the driving shaft (8) passes through circular cone
Roller bearing is arranged on portable plate (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621488190.7U CN206416029U (en) | 2016-12-30 | 2016-12-30 | A kind of automatic irrational number rotating ratio polished machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621488190.7U CN206416029U (en) | 2016-12-30 | 2016-12-30 | A kind of automatic irrational number rotating ratio polished machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206416029U true CN206416029U (en) | 2017-08-18 |
Family
ID=59574350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621488190.7U Withdrawn - After Issue CN206416029U (en) | 2016-12-30 | 2016-12-30 | A kind of automatic irrational number rotating ratio polished machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206416029U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106737127A (en) * | 2016-12-30 | 2017-05-31 | 浙江工业大学 | A kind of automatic irrational number rotating ratio polished machine |
| TWI774521B (en) * | 2021-08-19 | 2022-08-11 | 環球晶圓股份有限公司 | Wafer polishing apparatus and wafer polishing method |
-
2016
- 2016-12-30 CN CN201621488190.7U patent/CN206416029U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106737127A (en) * | 2016-12-30 | 2017-05-31 | 浙江工业大学 | A kind of automatic irrational number rotating ratio polished machine |
| CN106737127B (en) * | 2016-12-30 | 2019-11-12 | 浙江工业大学 | A kind of automatic irrational number rotating ratio polished machine |
| TWI774521B (en) * | 2021-08-19 | 2022-08-11 | 環球晶圓股份有限公司 | Wafer polishing apparatus and wafer polishing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170818 Effective date of abandoning: 20191112 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20170818 Effective date of abandoning: 20191112 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |