CN104953886A - High-voltage pulse generation device - Google Patents
High-voltage pulse generation device Download PDFInfo
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- CN104953886A CN104953886A CN201510225335.8A CN201510225335A CN104953886A CN 104953886 A CN104953886 A CN 104953886A CN 201510225335 A CN201510225335 A CN 201510225335A CN 104953886 A CN104953886 A CN 104953886A
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Abstract
The invention provides a high-voltage pulse generation device. The high-voltage pulse generation device comprises a three-phase alternating current power supply (1), a rectification filtering circuit (2), a voltage adjusting circuit (3), a pulse generating circuit (4), a high-frequency transformer (5), a high-voltage side rectifying circuit (6) and a sampling outputting circuit (7) which are sequentially connected to one another, wherein alternating current inputted by the three-phase alternating current power supply (1) is converted into direct current via the rectification filtering circuit (2); the direct current can be regulated and controlled within a certain voltage range by the voltage adjusting circuit (3); the direct current, with adjustable and controllable voltage, of the pulse generating circuit (4) can be converted into high-frequency low-voltage alternating current; the high-frequency low-voltage alternating current is converted into high-frequency high-voltage alternating current by the high-frequency transformer (5) through a set parameter; and the high-frequency high-voltage alternating current is integrated into high-frequency high-voltage direct current through the high-voltage side rectifying circuit (6), and the high-frequency high-voltage direct current is outputted via a sampling outputting circuit (7). Voltage waves outputted from the device tend to be stable by real-time adjustment of outputting voltage and frequency, so that leakage reactance generated by over high frequency is reduced.
Description
Technical field
The present invention relates to the pulse power, be specifically related to a kind of high voltage pulse generation device.
Background technology
As a kind of DC power supply of break-make, the basic functional principle of the pulse power is: first make primary energy have enough energy through slow energy storage, then to intermediate energy storage and pulse forming system electric discharge (or flowing into energy), define the pulse power through storage, compression, the energy formed after the complex process such as pulse or conversion, the voltage pulse output waveform for the pulse power generally includes voltage pulse output amplitude (wanting high), output pulse front edge (wanting steep) and pulse repetition frequency (wanting high) three evaluation indexes.
The mode realizing the pulse power at present mainly comprises: (1) energy storage electric discharge: namely utilize the discharge and recharge of energy-storage travelling wave tube (as L, C) to realize pulse and export; (2) inversion method: namely utilize inversion by DC power conversion for pulse export and; (3) copped wave method: namely utilize DC chopped-wave principle voltage pulse output; Wherein:
Energy storage electric discharge structure is simple, and can obtain high voltage narrow pulse, but impulse waveform is wayward, pulse parameter not easily regulates; DC link and pulse signal are produced link and separate by copped wave method, and the impulse waveform of generation is good, but the harmonic components that the method produces is large, and switch original paper bears very high switching voltage, has the defect that switch life is short.In contrast, PWM combine with technique inversion method can obtain high-quality output voltage waveforms, and the method inhibits the higher order harmonics of lower number of times, reduce harmonic loss, expand speed adjustable range, simplify major loop, and manipulation is concentrated, is easy to automatic management.
As kind of the thing form of the 4th except solid, liquid, gas tri-state, plasma by electronics, ion, free radical and neutral particle form in electroneutral conducting fluid.Since invention, plasma technique is widely used in fields such as semi-conductor industry, thin polymer film, material antiseptic erosion, plasma electronics, plasma synthesis, plasma metallurgy, plasma Coal Chemical Industry and plasma three-protection design, and high-frequency and high-voltage power supply is as the energy source producing plasma, therefore the research of the high performance pulse power of high-frequency and high-voltage become one of guarantee plasma technology key being able to extensive use.
Traditional high-power high voltage power supply uses Industrial Frequency Transformer boosting, circuit is simple but there is the defect that volume is large, frequency is low and discharge effect is very undesirable, and the Insulation Problems of transformer is more difficult under high-frequency and high-voltage, the impact that transformer distributed constant (leakage inductance and turn-to-turn distributed capacitance) causes also be can not ignore, and the higher leakage reactance of frequency is larger, therefore output power of power supply is restricted.In addition, early stage high-power high voltage power supply obtains high-tension pulse owing to adopting magnetic compression switch or rotating spark plug, thus mostly heavier, not only manipulate difficulty, maintenance is inconvenient, and switch life is short, reliability is in urgent need to be improved.
Summary of the invention
In view of this, the invention provides a kind of high voltage pulse generation device, aim to provide a kind of pulse power of the high-power for plasma generator.
The technical solution used in the present invention is specially:
A kind of high voltage pulse generation device, comprises three-phase alternating-current supply (1) connected successively, current rectifying and wave filtering circuit (2), regulating circuit (3), pulse generating circuit (4), high frequency transformer (5), high-pressure side rectification circuit (6) and sampling output circuit (7); Wherein: described current rectifying and wave filtering circuit (2) changes direct current into for the alternating current inputted by described three-phase alternating-current supply (1); Described regulating circuit (3) is for regulating and controlling the direct current changed through described current rectifying and wave filtering circuit (2) between certain voltage scope; Described pulse generating circuit (4) changes high frequency low voltage alternating current into for the direct current regulated and controled through described regulating circuit (3) by voltage; Described high frequency low voltage, by the parameter of setting, exchanges and changes high-frequency and high-voltage alternating current into by described high frequency transformer (5); Described high-pressure side rectification circuit (6) is for being integrated into high-frequency high-voltage direct-current electricity by described high-frequency and high-voltage alternating current; Be provided with sample resistance in described sampling output circuit (7), the voltage and current signal of the described high-frequency high-voltage direct-current of the output of described sampling output circuit (7) exports through sample resistance.
In above-mentioned high voltage pulse generation device, also comprise control circuit (8), described control circuit (8) and described regulating circuit (3), described pulse generating circuit (4) and described sampling output circuit (7) are electrically connected; Wherein: the signal of telecommunication that the sample resistance that described control circuit (8) receives described sampling output circuit (7) transmits; Described control circuit (8) transmits the signal of telecommunication to described regulating circuit (3), carries out real-time monitoring to the output voltage of the direct voltage of described regulating circuit (3); And transmit the signal of telecommunication to described pulse generating circuit (4), real-time monitoring is carried out to the frequency of the high-frequency alternating current of described pulse generating circuit (4).
In above-mentioned high voltage pulse generation device, also comprise display circuit (9), described display circuit (9) and described control circuit (8) are electrically connected; The signal of telecommunication that described display circuit (9) sends for showing described control circuit (8).
In above-mentioned high voltage pulse generation device, described regulating circuit (3) is electrically connected by voltage sensor and described control circuit (8).
In above-mentioned high voltage pulse generation device, described current rectifying and wave filtering circuit (2) adopts full-bridge rectifier filter device, and the alternating current for being inputted by described three-phase alternating-current supply (1) becomes the direct current of set point.
In above-mentioned high voltage pulse generation device, described pulse generating circuit (4) adopts PWM inverter circuit.
In above-mentioned high voltage pulse generation device, described pulse generating circuit (4) is electrically connected by IGBT and pwm circuit and described control circuit (8).
In above-mentioned high voltage pulse generation device, also comprise power cabinet (10), described three-phase alternating-current supply (1), described current rectifying and wave filtering circuit (2) and described regulating circuit (3) form low-pressure area (11), described pulse generating circuit (4) forms pulse generation district (12), described high frequency transformer (5), described high-pressure side rectification circuit (6) and described sampling output circuit (7) form higher-pressure region (13), control circuit (8) and display circuit (9) form display and control district (14), described low-pressure area (11), described pulse generation district (12), described higher-pressure region (13) and described display and control district (14) are arranged in power cabinet (10), described higher-pressure region (13) is separated by insulating cover and described low-pressure area (11), described pulse generation district (12) and described display and control district (14).
The beneficial effect that the present invention produces is:
High voltage pulse generation device of the present invention, owing to have employed regulating circuit in main circuit, makes frequency modulation and pressure regulation separately, changes a tradition dependence and heightens frequency to obtain high pressure method, thus reduce the leakage reactance because of the too high generation of frequency; The pulse generating circuit that have employed PWM inversion method can obtain high-quality output voltage waveforms, and inhibits the high order harmonic component of lower number of times, reduces harmonic loss, expands speed adjustable range, simplifies major loop;
By display and control district (control circuit and the display circuit) feedback information in time set up, achieve manipulation and concentrate and regulation and control integration; And control circuit can adjust output voltage in real time as required, manipulation is flexible, is conducive to the realization of automation;
In addition, in power cabinet, higher-pressure region and other district's insulating covers are separated, structure is simple, installation is integrated, convenient maintenance.
Accompanying drawing explanation
When considered in conjunction with the accompanying drawings, more completely the present invention can be understood better.Accompanying drawing described herein is used to provide a further understanding of the present invention, and embodiment and explanation thereof, for explaining the present invention, do not form inappropriate limitation of the present invention.
Fig. 1 is the electrical schematic diagram of a kind of high voltage pulse generation device of the present invention;
Fig. 2 is the structural representation of a kind of high voltage pulse generation device of the present invention;
Fig. 3 is the electrical connection frame diagram of a kind of high voltage pulse generation device of the present invention.
In figure:
1, three-phase alternating-current supply 2, current rectifying and wave filtering circuit 3, regulating circuit 4, pulse generating circuit 5, high frequency transformer 6, high-pressure side rectification circuit 7 sample output circuit 8, control circuit 9, display circuit 10, power cabinet 11, low-pressure area 12, pulse generation district 13, higher-pressure region 14, display and control district.
Embodiment
Below in conjunction with drawings and Examples, technical scheme of the present invention is described in further detail.
High voltage pulse generation device as shown in Figure 1-2, mainly comprises:
The three-phase alternating-current supply 1 be connected successively, current rectifying and wave filtering circuit 2, regulating circuit 3, pulse generating circuit 4, high frequency transformer 5, high-pressure side rectification circuit 6, sampling output circuit 7; And control circuit 8;
Control circuit 8, control circuit 8 and regulating circuit 3, pulse generating circuit 4 and sample output circuit 7 and be electrically connected respectively;
Also comprise display circuit 9, display circuit 9 and control circuit 8 are electrically connected.
Above-mentioned 1-9 is all arranged in power cabinet 10.
In the high voltage pulse generation device of the present embodiment:
Current rectifying and wave filtering circuit 2 adopts full-bridge rectifier filter device, and this circuit makes the alternating current of the 380V of input become the direct current of 510V, one termination three-phase alternating-current supply 1, another termination regulating circuit 3;
What regulating circuit 3 adopted is common DC boosting regulating circuit, this circuit makes the direct voltage of 510V can regulate and control between 510 ~ 1020V, except except current rectifying and wave filtering circuit 2 is connected respectively with pulse generating circuit 4, also realize being electrically connected by voltage sensor with control circuit 8;
Pulse generating circuit 4 adopts PWM inverter circuit, this circuit is used for changing the direct current (direct voltage that can regulate and control between 510 ~ 1020V) of certain voltage into high-frequency alternating current, by in conjunction with PWM pulsewidth frequency modulation technology and control circuit, the high frequency low voltage ac transmission pressure needed can be realized, except except regulating circuit 3 is connected respectively with high frequency transformer 5, also by IGBT (Insulated Gate Bipolar Transistor, insulated gate bipolar transistor) and PWM (Pulse Width Modulation, pulse-width modulation) circuit and control circuit 8 be electrically connected,
High frequency transformer 5 is by the parameter of setting, for the high frequency low voltage changed through pulse generating circuit 4 alternating current is further converted to high-frequency and high-voltage alternating current, high frequency transformer 5 and pulse generating circuit 4, high-pressure side rectification circuit 6 are electrically connected respectively, preferably, the side of high frequency transformer 5 also arranges radiator fan;
High-pressure side rectification circuit 6 adopts full-bridge type rectification circuit, and this circuit is used for high-frequency and high-voltage alternating current to be integrated into high-frequency high-voltage direct-current electricity, high-pressure side rectification circuit 6 and high frequency transformer 5, samples output circuit 7 and is electrically connected respectively; In addition, be provided with sample resistance in sampling output circuit 7, the voltage and current signal of this circuit output end passes to control circuit 8 by sample resistance, and output is directly connected with load;
Result is also sent to display circuit 9 by the signal of telecommunication of control circuit 8 one aspect process sample resistance transmission, on the other hand by the appropriate signal of telecommunication of the pwm circuit transmission of regulating circuit 3 and pulse generating circuit 4, realize the real-time monitoring of output voltage and frequency.
Can find out, high-pressure pulse device of the present invention makes output voltage ripple stablize by real-time regulation output voltage and frequency, thus reduces the leakage reactance produced because frequency is too high.
Further as shown in Figure 3, further power cabinet 10 is divided into comprise three-phase alternating-current supply 1, current rectifying and wave filtering circuit 2 and regulating circuit 3 low-pressure area 11, as pulse generation district 12 pulse generating circuit 4, comprise high frequency transformer 5, high-pressure side rectification circuit 6 and sampling output circuit 7 higher-pressure region 13 and be provided with the display and control district 14 of control circuit 8 and display circuit 9, wherein higher-pressure region 13 is provided with insulating cover, and is separated out by insulating cover and other.
Can find out, high-pressure pulse device structure of the present invention is simple, installation is integrated, has the obvious advantage of convenient maintenance.
Below explain embodiments of the invention by reference to the accompanying drawings, accompanying drawing is herein used to provide a further understanding of the present invention.Obviously; the foregoing is only the present invention's preferably embodiment; but protection scope of the present invention is not limited thereto; any be to one skilled in the art can expect easily, do not depart from change of the present invention or replacement in fact; and other do not deviate from Spirit Essence of the present invention with the modification under principle or combination, the substitute mode being equivalence is also all included within protection scope of the present invention.
Claims (8)
1. a high voltage pulse generation device, it is characterized in that, comprise three-phase alternating-current supply (1) connected successively, current rectifying and wave filtering circuit (2), regulating circuit (3), pulse generating circuit (4), high frequency transformer (5), high-pressure side rectification circuit (6) and sampling output circuit (7); Wherein:
Described current rectifying and wave filtering circuit (2) changes direct current into for the alternating current inputted by described three-phase alternating-current supply (1);
Described regulating circuit (3) is for regulating and controlling the direct current changed through described current rectifying and wave filtering circuit (2) between certain voltage scope;
Described pulse generating circuit (4) changes high frequency low voltage alternating current into for the direct current regulated and controled through described regulating circuit (3) by voltage;
Described high frequency low voltage, by the parameter of setting, exchanges and changes high-frequency and high-voltage alternating current into by described high frequency transformer (5);
Described high-pressure side rectification circuit (6) is for being integrated into high-frequency high-voltage direct-current electricity by described high-frequency and high-voltage alternating current;
Be provided with sample resistance in described sampling output circuit (7), the voltage and current signal of the described high-frequency high-voltage direct-current of the output of described sampling output circuit (7) exports through sample resistance.
2. high voltage pulse generation device according to claim 1, it is characterized in that, also comprise control circuit (8), described control circuit (8) and described regulating circuit (3), described pulse generating circuit (4) and described sampling output circuit (7) are electrically connected; Wherein:
The signal of telecommunication that the sample resistance that described control circuit (8) receives described sampling output circuit (7) transmits;
Described control circuit (8) transmits the signal of telecommunication to described regulating circuit (3), carries out real-time monitoring to the output voltage of the direct voltage of described regulating circuit (3); And transmit the signal of telecommunication to described pulse generating circuit (4), real-time monitoring is carried out to the frequency of the high-frequency alternating current of described pulse generating circuit (4).
3. high voltage pulse generation device according to claim 2, is characterized in that, also comprises display circuit (9), and described display circuit (9) and described control circuit (8) are electrically connected; The signal of telecommunication that described display circuit (9) sends for showing described control circuit (8).
4. high voltage pulse generation device according to claim 2, is characterized in that, described regulating circuit (3) is electrically connected by voltage sensor and described control circuit (8).
5. high voltage pulse generation device according to claim 1, it is characterized in that, described current rectifying and wave filtering circuit (2) adopts full-bridge rectifier filter device, and the alternating current for being inputted by described three-phase alternating-current supply (1) becomes the direct current of set point.
6. high voltage pulse generation device according to claim 1, is characterized in that, described pulse generating circuit (4) adopts PWM inverter circuit.
7. high voltage pulse generation device according to claim 1, is characterized in that, described pulse generating circuit (4) is electrically connected by IGBT and pwm circuit and described control circuit (8).
8. high voltage pulse generation device according to claim 1, it is characterized in that, , also comprise power cabinet (10), described three-phase alternating-current supply (1), described current rectifying and wave filtering circuit (2) and described regulating circuit (3) form low-pressure area (11), described pulse generating circuit (4) forms pulse generation district (12), described high frequency transformer (5), described high-pressure side rectification circuit (6) and described sampling output circuit (7) form higher-pressure region (13), control circuit (8) and display circuit (9) form display and control district (14), described low-pressure area (11), described pulse generation district (12), described higher-pressure region (13) and described display and control district (14) are arranged in power cabinet (10), described higher-pressure region (13) is separated by insulating cover and described low-pressure area (11), described pulse generation district (12) and described display and control district (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510225335.8A CN104953886A (en) | 2015-05-06 | 2015-05-06 | High-voltage pulse generation device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510225335.8A CN104953886A (en) | 2015-05-06 | 2015-05-06 | High-voltage pulse generation device |
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| CN104953886A true CN104953886A (en) | 2015-09-30 |
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| CN201510225335.8A Pending CN104953886A (en) | 2015-05-06 | 2015-05-06 | High-voltage pulse generation device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108448912A (en) * | 2018-01-30 | 2018-08-24 | 安徽省金屹电源科技有限公司 | A kind of air-cooled high-frequency and high-voltage power supply |
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| CN101043184A (en) * | 2006-11-14 | 2007-09-26 | 国电南京自动化股份有限公司 | Energy-saving amplitude modulation circuit and controll system |
| JP2010284709A (en) * | 2009-06-15 | 2010-12-24 | Daihen Corp | Power source device |
| CN201937476U (en) * | 2011-03-25 | 2011-08-17 | 盐城市贝思特电气有限公司 | Dry high-power high-frequency high-voltage pulse power supply |
| CN102510228A (en) * | 2011-11-14 | 2012-06-20 | 北方工业大学 | Digital high-frequency high-voltage power supply device of electron beam welding machine and control method thereof |
| CN204928618U (en) * | 2015-05-06 | 2015-12-30 | 北京源生恒通环保科技有限公司 | High -voltage pulse generating device |
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2015
- 2015-05-06 CN CN201510225335.8A patent/CN104953886A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101043184A (en) * | 2006-11-14 | 2007-09-26 | 国电南京自动化股份有限公司 | Energy-saving amplitude modulation circuit and controll system |
| JP2010284709A (en) * | 2009-06-15 | 2010-12-24 | Daihen Corp | Power source device |
| CN201937476U (en) * | 2011-03-25 | 2011-08-17 | 盐城市贝思特电气有限公司 | Dry high-power high-frequency high-voltage pulse power supply |
| CN102510228A (en) * | 2011-11-14 | 2012-06-20 | 北方工业大学 | Digital high-frequency high-voltage power supply device of electron beam welding machine and control method thereof |
| CN204928618U (en) * | 2015-05-06 | 2015-12-30 | 北京源生恒通环保科技有限公司 | High -voltage pulse generating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108448912A (en) * | 2018-01-30 | 2018-08-24 | 安徽省金屹电源科技有限公司 | A kind of air-cooled high-frequency and high-voltage power supply |
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Inventor after: Zhang Miaolei Inventor before: Zhang Kuanzhao |
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Application publication date: 20150930 |
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