CN104952680A - Fine adjustment device for objective lens diaphragm lever - Google Patents
Fine adjustment device for objective lens diaphragm lever Download PDFInfo
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- CN104952680A CN104952680A CN201510369852.2A CN201510369852A CN104952680A CN 104952680 A CN104952680 A CN 104952680A CN 201510369852 A CN201510369852 A CN 201510369852A CN 104952680 A CN104952680 A CN 104952680A
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Abstract
The invention discloses a fine adjustment device for an objective lens diaphragm lever. A first guiding structure and a second guiding structure cooperate with each other in a pre-tightened manner, so that the second guiding structure does not deflect or shift when moving under the action of external force and can be relatively fixed by the pre-tightening force after being not stressed, and the position of the diaphragm lever is stable; the feed accuracy is improved by the aid of a feed assembly adopting a differential structure; the clearance error in the feed process is eliminated through a compensation assembly; a propping bead is arranged at an extending end of a movable propping rod to eliminate the contact error; the rotation error of an adjusting screw rod in the adjustment process is eliminated through a bearing; abrasion losses of the movable propping rod and all contact surfaces are reduced through a linear guiding groove and a fixing pin, and the movable propping rod moves more stably; errors which can be produced by various parts in the fine adjustment device for the objective lens diaphragm lever are eliminated or reduced from multiple angles, so that the adjustment accuracy and stability of the objective lens diaphragm lever are improved comprehensively.
Description
Technical field
The present invention relates to a kind of lens isis bar micromatic setting, belong to device for precisely regulating technical field.
Background technology
ESEM is a kind of electronic optical instrument, is to utilize focused beam to line by line scan sample surfaces Zhong is capable, makes beam bombardment sample surfaces produce secondary electron, utilizes above-mentioned secondary electron to present the device of sample surfaces form.The resolution of scanning electron microscope image can reach nanoscale and even be better than 1.0 nanometers, is widely used in fields such as new material, new forms of energy, national defence, scientific researches.Above-mentioned electron beam is transmitted into sample surfaces by the electron gun on ESEM, and the path of electron beam is referred to as light path, and the axis of light path is referred to as optical axis.In practical work process, the necessary condition that ESEM can show picture rich in detail is: for the axis needs of all parts of imaging and the strict sympodium of described optical axis in ESEM, otherwise will cause occurring astigmatism and aberration, the resolution of serious lowering apparatus.Wherein, the sympodium of lens isis bar is a kind of important step of ESEM sympodium, particularly, staff needs the position regulating object lens diaphragm rod, make the lens isis central shaft on lens isis bar and optical axis coincidence, general lens isis sympodium error is when micron order, and ESEM just can present image clearly, therefore high to regulating the degree of regulation of the micromatic setting of lens isis bar to require.
Existing diaphragm rod micromatic setting generally adopts high-precision screw Zhong in screw thread to move to promoting lens isis bar, thus regulates the radial position of diaphragm.There is following defect in this lens isis post adjustment mechanism: there is not the locating part to the capable restriction of diaphragm rod Zhong in existing diaphragm rod micromatic setting, in adjustment process, the position of diaphragm rod is not fixed, and causes its less stable, is unfavorable for the imaging of object lens; When adopting aforesaid way adjustment capable of lens isis bar Zhong, gap error is there is between screw rod and screw thread, this kind of error cause screw rod can not according to the predetermined capable Zhong of design Zhong to, thus make screw rod accurately can not promote diaphragm rod, staff is difficult to accurately regulate make lens isis sympodium by this adjusting device, adjustment result is not accurate enough, and ESEM imaging effect is poor.
Summary of the invention
Therefore, the technical problem to be solved in the present invention is, the technological deficiency that existing lens isis bar micromatic setting degree of regulation is poor, poor stability causes ESEM imaging effect difference, thus provide a kind of degree of regulation the high lens isis bar micromatic setting being of value to ESEM blur-free imaging.
To achieve these goals, the invention provides a kind of lens isis bar micromatic setting, comprising:
First guide frame, is horizontally disposed with;
Second guide frame, with the pre-tight fit of the first guide frame, for being fixedly connected with diaphragm rod, and drives the setting direction along described first guide frame to move by external force;
Zhong to assembly, for being given as described second guide frame provides the active force of movement by Zhong;
Compensation assembly, for described Zhong provides extruding elastic force to assembly, to eliminate Zhong to the Zhong of assembly to error.
In above-mentioned lens isis bar micromatic setting, described Zhong is difference structure to assembly, comprise the first screw thread pair and the second screw thread pair, described first screw thread pair and described second screw thread pair interlock are arranged, when described first screw thread pair occur Zhong to time, relatively described first screw thread pair of described second screw thread pair occur reverse Zhong to;
The helical pitch of described first screw thread pair is t1, and the helical pitch of described second screw thread pair is t2, | t1-t2|<t2, and | t1-t2| ≠ 0.
In above-mentioned lens isis bar micromatic setting, described first screw thread pair comprises the adjusting nut be fixedly installed, and the adjusting screw(rod) to be threaded with described adjusting nut, described adjusting screw(rod) has and the first thread segment that described adjusting nut coordinates and second thread segment different with described first thread segment helical pitch;
Described second screw thread pair comprises movable push rod, and described movable push rod and described second thread segment are connected, and described movable push rod is used for contacting with described second guide frame.
In above-mentioned lens isis bar micromatic setting, described adjusting screw(rod) has installation cavity, and described movable push rod Pinch enters the interior also one end of described installation cavity and stretches out described installation cavity; Described second thread segment is arranged on the inwall of described installation cavity; Described first thread segment is arranged on the outer wall of described adjusting screw(rod).
In above-mentioned lens isis bar micromatic setting, the inwall of described adjusting nut arranges groove, and described groove is communicated with the one end open of described adjusting nut, is provided with bearing in described groove, and adjusting screw(rod) is through described bearing.
In above-mentioned lens isis bar micromatic setting, the outer wall of described moveable combination of guide rod is provided with line channel vertically, also comprises the steady pin be fixedly installed, described Gu is Dinged Xiao Pinch and is entered in described line channel, rotates to stop described moveable combination of guide rod.
In above-mentioned lens isis bar micromatic setting, the end of stretching out described installation cavity of described moveable combination of guide rod is provided with opening, is provided with the decorative pearl on top of an official cap in described opening.
In above-mentioned lens isis bar micromatic setting, described compensation assembly comprises the first compensation assembly for eliminating threaded engagement error between the first screw thread pair, and for eliminating the second compensation assembly of threaded engagement error between the second screw thread pair.
In above-mentioned lens isis bar micromatic setting, described first compensation assembly comprises the first elastic component between end and described adjusting nut being arranged on described adjusting screw(rod), and described first elastic component is by applying to adjusting nut the threaded engagement error eliminating described first screw thread pair with Zhong to the Zhong of assembly to direction resilient pressing force in the same way.
In above-mentioned lens isis bar micromatic setting, described second compensation assembly comprises the supporting seat be fixedly installed and the second elastic component be connected on described supporting seat, and described second elastic component is by providing the threaded engagement error eliminating described second screw thread pair with Zhong to the Zhong of assembly to the resilient pressing force that direction is reverse to described second guide frame.
In above-mentioned lens isis bar micromatic setting, described second compensation assembly also comprises the lead being connected to described second elastic component free end, described second elastic component is spring, described lead is provided with radial flange, the Yi Duan Pinch of described lead to enter in described spring and makes described spring be resisted against on described radial flange, and the other end of described lead contacts with described second guide frame.
In above-mentioned lens isis bar micromatic setting, also comprise adjusting seat, two vertical portions that adjusting seat comprises horizontal component and is oppositely arranged, described horizontal component and two described vertical portions form installing space, described first guide frame is positioned at described installing space and is arranged on horizontal component, described second guide frame is positioned at described installing space, and described Zhong is arranged in two vertical portions to assembly and described compensation assembly.
Technique scheme of the present invention has the following advantages compared to existing technology:
1, in lens isis bar micromatic setting of the present invention, the first guide frame and the second guide frame is adopted to cooperatively interact, first guide frame limits the degree of freedom of the second guide frame, it is only allowed to slide along the first guide frame bearing of trend, make the second guide frame when being subject to External Force Acting motion, do not deflect or offset, improve Zhong to the Zhong of assembly to precision; Adopt compensation assembly to eliminate Zhong to the gap error in process, degree of regulation is high, be of value to ESEM blur-free imaging.
2, in lens isis bar micromatic setting of the present invention, the external part of employing activity push rod arranges the decorative pearl on top of an official cap to eliminate the Touch error between movable push rod and the second guide frame; Bearing is adopted to eliminate the rotation error of adjusting screw(rod) in adjustment process; Employing line channel and steady pin reduce the wear extent between movable push rod and each contact-making surface, and it is more stable that movable push rod is moved; The issuable error of all parts lens isis bar micromatic setting is eliminate or reduced from multiple angle, thus the General Promotion degree of regulation of lens isis bar.
Accompanying drawing explanation
In order to make content of the present invention more clearly be managed, below in conjunction with accompanying drawing, Zhong mono-step detailed description is done to the present invention, wherein,
Fig. 1 is the cross-sectional schematic of lens isis bar micromatic setting of the present invention;
Fig. 2 be in the embodiment of the present invention 2 Zhong to the cross-sectional schematic of assembly.
Description of reference numerals
10-second guide frame; 50-first guide frame; 20-Zhong is to assembly; 30-compensation assembly; 21,21a-adjusting nut; 22,22a-adjusting screw(rod); 221,221a-first thread segment; 222,222a-second thread segment; 23,23a-push rod; 223-bearing; 231-line channel; 232-steady pin; 31-supporting seat; 32-second elastic component; 33-first elastic component; 34-lead; 40-adjusting seat; 41-horizontal component; 42-vertical portion.
Embodiment
Below with reference to accompanying drawing to the introduction of a kind of lens isis bar micromatic setting Zhong of the present invention capable Zhong mono-step, it should be noted that at this, the explanation for following execution mode understands the present invention for helping, but does not form limitation of the invention.In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can be combined with each other.
The present embodiment provides a kind of lens isis bar micromatic setting, comprising: the first guide frame 50, second guide frame 10, Zhong are to assembly and compensation assembly 30.Wherein, the first guide frame 50 extends along horizontal direction; Second guide frame 10 is arranged on the first guide frame 50 in advance tightly, for being fixedly connected with diaphragm rod, when external force drives the second guide frame 10, second guide frame 10 moves along the bearing of trend of the first guide frame 50, thus drive diaphragm rod move, Zhong and realize lens isis bar sympodium operation; Zhong is used for for the second guide frame 10 provides the described external force needed for moving to assembly; Compensation assembly 30 provides extruding elastic force to assembly, for eliminating Zhong to the Zhong of assembly to error for described Zhong.
In above-mentioned lens isis bar micromatic setting, the first guide frame 50 and the second guide frame 10 is adopted to cooperatively interact, first guide frame 50 limits the degree of freedom of the second guide frame 10, it is only allowed to slide along the first guide frame 50 bearing of trend, make the second guide frame when 10 are subject to External Force Acting motion, do not deflect or offset, improve Zhong to the Zhong of assembly to precision; Adopt compensation assembly to eliminate Zhong to the gap error in process, degree of regulation is high, be of value to ESEM blur-free imaging.Simultaneously, there is pretension relation between first guide frame 50 and the second guide frame 10, after such second guide frame 10 is adjusted to any position on the first guide frame 50, can locate voluntarily, make diaphragm rod position comparatively problem, thus easily obtain object lens imaging more clearly.
Particularly, first guide frame 50 can be slide rail, second guide frame 10 can be the slide block be arranged on slide rail, and the second guide frame 10 also comprises and to be integrally formed with slide block or to be fixedly installed on the fixed cover on slide block, is fixedly connected with diaphragm rod by fixed cover.
Second guide frame 10 and the first guide frame 50 cooperatively interact, second guide frame 10 can be moved along the bearing of trend of the first guide frame 50, such second guide frame 10 is when being subject to External Force Acting motion, do not deflect or offset, Zhong mono-step mentions the degree of regulation of the sympodium of lens isis bar.
Zhong is described in detail to the concrete set-up mode of the one of assembly 20 below in conjunction with Fig. 1:
As shown in Figure 1, Zhong is difference structure to assembly 20, comprises the first screw thread pair and the second screw thread pair, and described first screw thread pair and described second screw thread pair interlock are arranged, when described first screw thread pair occur Zhong to time, described second screw thread pair relative to the first screw thread pair occur reverse Zhong to; The helical pitch of described first screw thread pair is t1, and the helical pitch of described second screw thread pair is t2, | t1-t2|<t2, and | t1-t2| ≠ 0.Under existing fabrication process condition, the Zhong that screw thread pair can reach is fixing to precision, in present embodiment, due to | t1-t2|<t2, and | t1-t2| ≠ 0, after such driving first screw thread pair rotates a circle Zhong to helical pitch compared to separately through the second screw thread pair or the capable Zhong of the first screw thread pair Zhong to helical pitch less, make Zhong each time to amplitude can accomplish meticulousr, thus improve the degree of regulation of lens isis bar sympodium by difference structure Zhong mono-step.
Particularly, with reference to figure 1, first screw thread pair comprises the adjusting nut 21 be fixedly installed, and the adjusting screw(rod) 22 to be threaded with described adjusting nut 21, described adjusting screw(rod) 22 has the first thread segment 221 coordinated with described adjusting nut 21, and second thread segment 222 different from described first thread segment helical pitch; Second screw thread pair comprises movable push rod 23 and described second thread segment 222, and described movable push rod 23 is connected with described second thread segment 222 threaded engagement, and described movable push rod 23 is for contacting with described second guide frame 10.
As preferred embodiment, described first thread segment 221 and the second thread segment 222 adopt the inside and outside set-up mode arranged, particularly, the front end of adjusting screw(rod) 22 is provided with installation cavity, the inwall of installation cavity is arranged described second end screw thread 222, described first thread segment 221 is arranged on the outer wall of described adjusting screw(rod) 22, described first thread segment 221 and adjustment threaded engagement, described second thread segment 222 and movable push rod 23 threaded engagement, and movable push rod 23 stretches out described installation cavity.This kind first thread segment 221 and the inside and outside set-up mode arranged of the second thread segment 222, make micromatic setting size in the axial direction compacter; Further, movable push rod 23 is arranged in installation cavity, makes micromatic setting size in the axial direction compacter; In addition, utilize rotate adjusting screw(rod) 22 just can realize differential Zhong to, precision is high.
The inwall of adjusting nut 21 arranges groove, described groove is communicated with the one end open of described adjusting nut 21, bearing 223 is provided with in described groove, adjusting screw(rod) 22 is through described bearing 223, and the inner ring of described bearing 223 and adjusting screw(rod) 22 tight fit, its role is to, when rotating adjusting screw(rod) 22, due to the existence of bearing 223, adjusting screw(rod) 22 viscous can not occur or card stops, and avoids the rotation error of adjusting screw(rod) 22 when being operated.Such as: when there is no bearing 223, when staff wishes adjusting screw(rod) 22 half rotation, occur if viscous or card stop feelings Saeka, adjusting screw(rod) 22 can not accurate half rotation, this rotation error will cause the Zhong of moveable combination of guide rod 23 to amount inaccuracy, thus affecting the degree of regulation of object lens diaphragm rod sympodium, arranging of described bearing 223 is just a cancellation above-mentioned impact.
As preferred embodiment, for making moveable combination of guide rod 23 only linear telescopic occur and not rotating motion, the outer wall of moveable combination of guide rod 23 is provided with line channel 231 vertically, also comprise the steady pin 232 be fixedly installed, described steady pin 232 Pinch enters in described line channel 231, and to stop described moveable combination of guide rod 23 to rotate, so movable push rod 23 moves more stable, so that there is accurate Zhong to motion, the wear extent between the push rod of reduction activity simultaneously 23 and each contact-making surface.
As preferred embodiment, in the process of promotion second guide frame 10, reduce error for making moveable combination of guide rod 23 as far as possible, the end of stretching out described installation cavity of the moveable combination of guide rod 23 of the present embodiment is provided with opening, the decorative pearl on top of an official cap is provided with in described opening, the effect of the described decorative pearl on top of an official cap is the face between script moveable combination of guide rod 23 with the second guide frame to contact, become the point cantact between the decorative pearl on top of an official cap and the second guide frame, point cantact has following advantage compared to face contact: decorative pearl on top of an official cap regular shape is stablized, be not easy deformation under force, thus reduce; Be point cantact between the decorative pearl on top of an official cap and the second guide frame 10, be not easy to occur offset error or wear error between such decorative pearl on top of an official cap and the second guide frame 10.
The set-up mode of compensation assembly 30 in the present embodiment is introduced in detail below in conjunction with Fig. 1:
In the present embodiment, compensation assembly 30 comprises the first compensation assembly and the second compensation assembly, and wherein, the first compensation assembly is for eliminating threaded engagement error between the first screw thread pair, and the second compensation assembly is for eliminating threaded engagement error between the second screw thread pair.First compensation assembly comprises the first elastic component 33 between end and described adjusting nut 21 being arranged on described adjusting screw(rod) 22, and described first elastic component 33 is by applying to adjusting nut 21 the threaded engagement error eliminating described first screw thread pair with Zhong to the Zhong of assembly to direction resilient pressing force in the same way.Second compensation assembly 30 comprises the supporting seat 31 be fixedly installed and the second elastic component 32 be connected on described supporting seat 31, and described second elastic component 32 is by providing the threaded engagement error eliminating described second screw thread pair with Zhong to the Zhong of assembly to the resilient pressing force that direction is reverse to described second guide frame 10.Particularly, described first elastic component 33 and the second elastic component 32 are respectively spring.
As preferred embodiment, described second compensation assembly 30 also comprises the lead 34 being connected to described second elastic component 32 free end, described lead 34 is provided with radial flange, the Yi Duan Pinch of described lead 34 to enter in described spring and makes described spring submit on described radial flange, and the other end of described lead contacts with described second guide frame 10.
In above-mentioned execution mode, Zhong is applied on the second guide frame 10 to the active force of assembly, the extruding elastic force of the second compensation assembly 30 is also applied on the second guide frame 10, under this setup, the extruding elastic force of the second compensation assembly 30 also possesses when Zhong bounces back to assembly, allows the effect of lens isis bar return.
As preferred embodiment, above-mentioned micromatic setting also comprises adjusting seat 40, two vertical portions 42 that adjusting seat 40 comprises horizontal component 41 and is oppositely arranged, described horizontal component 41 and two described vertical portions 42 form installing space, described first guide frame 50 is positioned at described installing space and is arranged on horizontal component 41, described second guide frame 10 is positioned at described installing space, and described Zhong is arranged in two vertical portions 42 to assembly 20 and described compensation assembly 30.This concrete execution mode makes whole mechanism compacter, stable.
In the lens isis bar micromatic setting of the present embodiment, adopt the first guide frame 50 and the second guide frame 10 to cooperatively interact, making the second guide frame 10 when being subject to External Force Acting motion, not deflecting or offseting; The Zhong of difference structure is adopted to improve Zhong to precision to assembly 20; Compensation assembly 30 is adopted to eliminate Zhong to the gap error in process; The external part of employing activity push rod 23 arranges the decorative pearl on top of an official cap to eliminate Touch error; Bearing 223 is adopted to eliminate the rotation error of adjusting screw(rod) 22 in adjustment process; Employing line channel 231 and steady pin 232 reduce the wear extent between movable push rod 23 and each contact-making surface, and make movable push rod 23 move more stable; The issuable error of all parts the lens isis bar micromatic setting of the present embodiment is eliminate or reduced from multiple angle, thus the General Promotion degree of regulation of lens isis bar.
Below with reference to Fig. 1, suppose that the helical pitch of the first screw thread pair is 1.25mm, the helical pitch of the second screw thread pair is 1mm, rotates adjusting screw(rod) 22 1 weeks, describes the course of work of the lens isis bar micromatic setting of the present embodiment in detail:
Rotate adjusting screw(rod) 22 1 weeks, adjusting screw(rod) 22 to the left side Zhong shown in Fig. 1 to 1.25mm; Now, the second thread segment 222 in adjusting screw(rod) 22 rotates one week relative to movable push rod 23, movable push rod 23 by relative to adjusting screw(rod) 22 to the right side Zhong shown in Fig. 1 to 1mm; In the process, due to movable push rod 23 be fixed pin 232 limit rotate, therefore only there is translational motion in movable push rod 23, thus make Zhong give 0.25mm to the overall Zhong of assembly 20, and movable push rod 23 Zhong mono-step promotes the second guide frame and is moved to drive diaphragm rod.Known machine work is difficult to the screw thread producing below micron order, and the micromatic setting of the present embodiment achieves the fine setting of the following precision of micron order, obviously, when machine work can produce more accurate thread time, equally can just with the micromatic setting of the present embodiment come Zhong mono-step improve precision.
Introduce the course of work of compensation assembly 30 in above-mentioned adjustment process below in detail:
In the process rotating adjusting screw(rod) 22, first compensation assembly promotes adjusting screw(rod) 22 near adjusting nut 21, thus make the first thread segment on adjusting screw(rod) 22 near the screw thread on adjusting nut 21, because this elastic force is continuous action, therefore, in whole rotary course, the gap of screw thread on elimination first thread segment and adjusting nut 21 can be ensured; Simultaneously, the active force of the second compensation assembly is applied on the second guide frame 10, make the second guide frame 10 along the left direction promotion activity push rod 23 shown in Fig. 1, make screw thread on movable push rod 23 near the second thread segment on adjusting screw(rod) 22, thus screw thread on elimination activity push rod 23 and the gap between the second thread segment.
In aforesaid operations process, the second guide frame 10 only can move along the bearing of trend of the first guide frame 50, thus ensure that the reliability that the lens isis bar micromatic setting of the present embodiment regulates.
It should be noted that, the first thread segment 221 should be consistent with the rotation direction of the second thread segment 222, thus the counter motion of realization activity push rod 23 and adjusting screw(rod) 22.When the helical pitch of the first thread segment 221 is less than the second thread segment 222 helical pitch, operate adjusting screw(rod) 22 by the rotation direction contrary with above-mentioned regulative mode, do not do at this and launch to explain.
Embodiment 2
The present embodiment is the variant embodiment on embodiment 1 basis, with reference to figure 2, Zhong in the present embodiment comprises a fixing adjusting nut 21a to assembly 20, be arranged on the adjusting screw(rod) 22a in described adjusting nut 21a, described adjusting screw(rod) 22a is provided with the first thread segment 221a and the second thread segment 222a, first thread segment 221a coordinates with described adjusting nut 21a, also comprises the movable push rod 23a be threaded with the second thread segment 222a of described adjusting screw(rod) 22a front end.In the present embodiment, adjusting screw(rod) 22a is two-piece design, respectively two sections of bars thereon processes first paragraph section screw thread 221a and the second thread segment 222a.
The Zhong of the present embodiment is compact to assembly 20 not as Zhong in embodiment 1 in structural design to assembly 20, and the second thread segment 222a in embodiment 1 is the internal thread on adjusting screw(rod) 22a, and so movable push rod 23 can be set to less than adjusting screw(rod) 22 diameter; Simultaneously also due to the second thread segment 222 can with the first space of thread segment 221 on shared axial length, in the embodiment 1 also made Zhong to assembly 20 can design shorter and smaller, thus be applicable to being applied in the micromatic setting of the present embodiment.
Obviously, above-described embodiment is only for clearly example being described, the restriction not to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all execution modes.And thus the apparent change of extending out or variation be still among the protection range of the invention.
Claims (12)
1. a lens isis bar micromatic setting, is characterized in that, comprising:
First guide frame (50), is horizontally disposed with;
Second guide frame (10), tight fit pre-with the first guide frame (50), for being fixedly connected with diaphragm rod, and drives the setting direction along described first guide frame to move by external force;
Zhong, to assembly (20), is the active force that described second guide frame (10) provides movement for being given by Zhong;
Compensation assembly (30), for described Zhong provides extruding elastic force to assembly, to eliminate Zhong to the Zhong of assembly to error.
2. lens isis bar micromatic setting according to claim 1, it is characterized in that: described Zhong is difference structure to assembly (20), comprise the first screw thread pair and the second screw thread pair, described first screw thread pair and described second screw thread pair interlock are arranged, when described first screw thread pair occur Zhong to time, relatively described first screw thread pair of described second screw thread pair occur reverse Zhong to;
The helical pitch of described first screw thread pair is t1, and the helical pitch of described second screw thread pair is t2, | t1-t2|<t2, and | t1-t2| ≠ 0.
3. lens isis bar micromatic setting according to claim 2, is characterized in that:
Described first screw thread pair comprises the adjusting nut (21) be fixedly installed, and the adjusting screw(rod) (22) to be threaded with described adjusting nut (21), the first thread segment (221) that described adjusting screw(rod) (22) has from described adjusting nut (21) coordinates and second thread segment (222) different with described first thread segment (221) helical pitch;
Described second screw thread pair comprises movable push rod (23), described movable push rod (23) and described second thread segment (222) are connected, and described movable push rod (23) is for contacting with described second guide frame (10).
4. lens isis bar micromatic setting according to claim 3, is characterized in that: described adjusting screw(rod) (22) has installation cavity, and described movable push rod (23) Pinch enters the interior also one end of described installation cavity and stretches out described installation cavity; Described second thread segment (222) is arranged on the inwall of described installation cavity; Described first thread segment (221) is arranged on the outer wall of described adjusting screw(rod) (22).
5. the lens isis bar micromatic setting according to claim 3 or 4, it is characterized in that: the inwall of described adjusting nut (21) arranges groove, described groove is communicated with the one end open of described adjusting nut (21), be provided with bearing (223) in described groove, adjusting screw(rod) (22) is through described bearing (223).
6. the lens isis bar micromatic setting according to any one of claim 3-5, it is characterized in that: the outer wall of described moveable combination of guide rod (23) is provided with vertically line channel (231), also comprise the steady pin (232) be fixedly installed, (232) Pinch enter in described line channel (231) described steady pin, rotate to stop described moveable combination of guide rod (23).
7. the lens isis bar micromatic setting according to any one of claim 3-5, is characterized in that: the end of stretching out described installation cavity of described moveable combination of guide rod (23) is provided with opening, is provided with the decorative pearl on top of an official cap in described opening.
8. the lens isis bar micromatic setting according to any one of claim 2-7, it is characterized in that: described compensation assembly (30) comprises the first compensation assembly for eliminating threaded engagement error between the first screw thread pair, and for eliminating the second compensation assembly of threaded engagement error between the second screw thread pair.
9. lens isis bar micromatic setting according to claim 8, it is characterized in that: described first compensation assembly comprises the first elastic component (33) between end and described adjusting nut (21) being arranged on described adjusting screw(rod) (22), described first elastic component (33) is by applying to adjusting nut (21) the threaded engagement error eliminating described first screw thread pair with Zhong to the Zhong of assembly to direction resilient pressing force in the same way.
10. lens isis bar micromatic setting according to claim 8 or claim 9, it is characterized in that: described second compensation assembly (30) comprises the supporting seat (31) be fixedly installed and the second elastic component (32) be connected on described supporting seat (31), described second elastic component (32) is by providing to described second guide frame (10) the threaded engagement error eliminating described second screw thread pair with Zhong to the Zhong of assembly to the resilient pressing force that direction is reverse.
11. lens isis bar micromatic settings according to claim 10, it is characterized in that: described second compensation assembly (30) also comprises the lead (34) being connected to described second elastic component (32) free end, described second elastic component (32) is spring, (34) are provided with radial flange to described lead, the Yi Duan Pinch of described lead (34) to enter in described spring and makes described spring be resisted against on described radial flange, and the other end of described lead contacts with described second guide frame (10).
12. lens isis bar micromatic settings according to any one of claim 1-11, it is characterized in that: also comprise adjusting seat (40), two vertical portions (42) that adjusting seat (40) comprises horizontal component (41) and is oppositely arranged, described horizontal component (41) and two described vertical portions (42) form installing space, described first guide frame is positioned at described installing space and is arranged on horizontal component (41), described second guide frame is positioned at described installing space, described Zhong is arranged on two vertical portions (42) to assembly (20) and described compensation assembly (30).
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| CN201510369852.2A CN104952680B (en) | 2015-06-29 | 2015-06-29 | Fine adjustment device for objective lens diaphragm lever |
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| CN201510369852.2A CN104952680B (en) | 2015-06-29 | 2015-06-29 | Fine adjustment device for objective lens diaphragm lever |
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| CN2629010Y (en) * | 2003-06-02 | 2004-07-28 | 中国科学院安徽光学精密机械研究所 | Two-beam parallel light path regulator |
| JP2005276639A (en) * | 2004-03-25 | 2005-10-06 | Jeol Ltd | Position adjusting method for objective lens diaphragm of scanning type electron beam device |
| CN102169219A (en) * | 2010-02-26 | 2011-08-31 | 上海微电子装备有限公司 | Radial adjustment device for optical system |
| JP2012150906A (en) * | 2011-01-17 | 2012-08-09 | Shin Nippon Denko Kk | Movable diaphragm device |
| CN103424858A (en) * | 2013-07-24 | 2013-12-04 | 麦克奥迪实业集团有限公司 | High-contrast coaxial illumination microscope |
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