CN104949756B - Transverse shearing interferometer - Google Patents

Transverse shearing interferometer Download PDF

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Publication number
CN104949756B
CN104949756B CN201510304803.0A CN201510304803A CN104949756B CN 104949756 B CN104949756 B CN 104949756B CN 201510304803 A CN201510304803 A CN 201510304803A CN 104949756 B CN104949756 B CN 104949756B
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prism
roof
angle
plane
cube
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CN104949756A (en
Inventor
白清兰
李立波
邹纯博
李思远
孙剑
赵强
冯玉涛
闫鹏
胡炳樑
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention discloses a transverse shearing interferometer. The transverse shearing interferometer comprises two identical semi-cubic roof prisms. Each semi-cubic roof prism comprises a first prism and a second prism, wherein the first prism is a roof prism with two right-angle surfaces and a slope, and the two right-angle surfaces are ridge surfaces; the second prism is a right-angle prism with a first right-angle surface and a second right-angle surface; the slope of the first prism is arranged on the first right-angle surface, and a slope of the second prism is a beam splitting surface. The right-angle surfaces of one of the semi-cubic roof prisms are incident planes, and the right-angle surfaces of the other semi-cubic roof prism are emergence planes. The transverse shearing interferometer has the advantages that owing to principal sections in mutual perpendicularity, an alignment direction and a transverse shearing direction are not coplanar in an adhesion process, residual alignment errors cannot result in errors of shearing amount, and accordingly adhesion of the interferometer and adjustment of the shearing amount can be realized conveniently and accurately.

Description

A kind of lateral shear interferometer
Technical field
The present invention relates to a kind of lateral shear interferometer, more particularly, to a kind of prism lateral shear with orthogonal principal section Interferometer.
Background technology
High flux static state Fourier transformation imaging spectral technology is international study hotspot at present, this kind of imaging spectrometer One kind therein is achieved in that placing lateral shear interferometer in parallel light path realizes equal inclination interference imaging, this interferes into The implementation of picture is not restricted and is interfered domain and the coplanar all the time technical characterstic of imaging surface by optical system relative aperture, thus The highly sensitive interference spectrum of achievable object lens of large relative aperture detects.
Be usually used in this kind of light spectrum image-forming lateral shear interferometer many using have beam-splitting surface based on amplitude-splittine interference Mode is realized, and structural shape has the sagnac interferometer based on closed circuit, and the employing based on michelson interferometer is straight The interferometer of corner reflector (or right-angle reflecting prism) or three face corner cube mirrors (or prism of corner cube) and improved mach- Zehnder interferometer.
Sagnac interferometer based on closed circuit is because the technical characterstic of its common light path is thus can achieve stable interference Figure and be widely used in space remote sensing instrument, this interferometer beam splitting and the two-way light beam closing bundle are passed by identical path, Transmit twice beam-splitting surface from the two-beam of exit face is wherein a branch of, another light beam from beam-splitting surface two secondary reflection, therefore it is required that Beam-splitting surface will strictly realize light splitting when depolarization, and it is very tight that this makes the light splitting Film Design realizing wide spectrum light splitting realize Lattice, when depolarization difference can make two outgoing beam intensity unequal and therefore reduce interference spectroscopical effeciency for light splitting.
Corner cube mirror (or right-angle reflecting prism) based on michelson light path or three face corner cube mirrors (or pyramid Prism) lateral shear interferometer produce two-beam beam splitting with close bundle light path during respectively transmitted once and reflection one Secondary, thus two bundle emergent lights can achieve that equal strength is interfered, the requirement to light splitting membrane system is relatively low, and interference efficiency is high.When this interference Instrument has compact conformation, good stability using the prism mode of entity form when realizing, structural member clamps easy technical characterstic.
Light splitting realized by the beam splitter of the entity form based on michelson light path using corner cube prism, and reflecting mirror adopts Realizing lateral shear, the structural shape that will realize physical intervention instrument needs to carry out multiple glue corner cube prism (or prism of corner cube) Close, the lateral shear of this light path realizes direction and light path is moved towards all in principal section, the alignment direction of beam-splitting surface and shearing side To in the same direction, beam-splitting surface can bring the error of horizontal shear capacity when adjusting alignment error in gluing procedures, therefore, it is difficult to ensureing instrument The parameter request of device.
Content of the invention
In order to solve the problems, such as described in background technology, the present invention proposes a kind of improved prism lateral shear interferometer, The prism of this lateral shear interferometer has orthogonal principal section, and its glued alignment direction and lateral shear direction be not at one In plane.
Technical scheme is as follows:
The first technical scheme of the present invention:
Lateral shear interferometer, it is characterized in that
Including half cube of roof prism of two pieces of identicals;
Half cube of roof prism includes prism one and prism two;Prism one is roof prism, and roof prism includes two directly Edged surface and an inclined-plane, two right-angle surface are ridge face;Prism two is corner cube prism, and corner cube prism includes right-angle surface one and right angle Face two;The inclined-plane of described prism one is arranged in right-angle surface one, and the inclined-plane of prism two is beam-splitting surface, one and half cubes of roof prisms Right-angle surface two be the plane of incidence, the right-angle surface two of another half cube of roof prism is exit facet;
Two and half cubes of roof prisms are glued along beam-splitting surface, the inclined-plane of the prism one of corresponding two and half cubes of roof prisms Vertically;
The corresponding another piece of half cube of roof prism of one of half cube of roof prism is along perpendicular to ridge rib and parallel There is dislocation in the direction of beam-splitting surface;
Two and half cubes of roof prisms are respectively the first prism and the second prism, prism two in incident illumination is by the first prism Right-angle surface two when being incident to beam-splitting surface, a part for incident illumination reflects to form reflected light, another part through beam splitting through beam-splitting surface Face transmission forms transmitted light;
Reflected light is incident to the ridge face of prism one in the first prism, then is reflexed to beam splitting by the ridge face of this prism one Behind face, by right-angle surface two outgoing of the second prism;
Transmitted light is incident to the ridge face of prism one in the second prism, then is reflexed to beam splitting by the ridge face of this prism one Behind face, by right-angle surface two outgoing of the second prism.
Above-mentioned prism two is isosceles right-angle prism.
The inclined-plane of prism one is congruent with the right-angle surface of prism two.
Prism one and prism two are one.
Half cube of roof prism clear aperture is d, and the thickness of prism one is c, and the right-angle surface of prism two is for the length of side for a just Square, a height of h of half cube of roof prism;
A, c and d meet: a=c=d, h=3/2a.
The first technical scheme of the present invention:
Lateral shear interferometer, it is characterized in that
Including half cube of roof prism of two pieces of identicals;
Half cube of roof prism includes prism one and prism two;Prism one is roof prism, and roof prism includes two directly Edged surface and an inclined-plane, two right-angle surface are ridge face;Prism two is corner cube prism, and corner cube prism includes right-angle surface one and right angle Face two;The inclined-plane of described prism one is arranged in right-angle surface one, and the inclined-plane of prism two is beam-splitting surface, one and half cubes of roof prisms Right-angle surface two be the plane of incidence, the right-angle surface two of another half cube of roof prism is exit facet;
Two and half cubes of roof prisms are glued along beam-splitting surface, the inclined-plane of the prism one of corresponding two and half cubes of roof prisms Vertically;
One of prism one is along perpendicular to itself right-angled edge and the direction parallel with the face that this prism two contacts is deposited In dislocation;
Two and half cubes of roof prisms are respectively the first prism and the second prism, prism two in incident illumination is by the first prism Right-angle surface two when being incident to beam-splitting surface, a part for incident illumination reflects to form reflected light, another part through beam splitting through beam-splitting surface Face transmission forms transmitted light;
Reflected light is incident to the ridge face of prism one in the first prism, then is reflexed to beam splitting by the ridge face of this prism one Behind face, by right-angle surface two outgoing of the second prism;
Transmitted light is incident to the ridge face of prism one in the second prism, then is reflexed to beam splitting by the ridge face of this prism one Behind face, by right-angle surface two outgoing of the second prism.
Above-mentioned prism two is isosceles right-angle prism.
The inclined-plane of prism one is congruent with the right-angle surface of prism two.
Prism one and prism two are splits, and the inclined-plane of prism one is glued in the right-angle surface of prism two.
Half cube of roof prism clear aperture is d, and the longitudinal section of prism one is isosceles triangle, and described isosceles triangle is straight The length of side of the arm of angle is c, and the thickness of prism one is h, and the right-angle surface of prism two is the square of a for the length of side, half cube of roof prism A height of h;
A, b, c and d meet: a=b=h=d,
The present invention has following technical effect that
Present invention improves over right angle roof prism, define a kind of half cube of roof prism, this prism has interaction and hangs down Straight principal section, its gluing procedures alignment direction and lateral shear direction not in a plane, the residual alignment error of generation The error of shearing displacement will not be brought, thus can easily and accurately realize the gluing of interferometer and the adjustment of shearing displacement.
The know-why of the present invention simultaneously can with two groups two-by-two identical corner cube prism mode realize, thus can be convenient Realize simpler processing technique.
Brief description
Fig. 1 is half cube of roof prism schematic diagram;
Fig. 2 is the lateral shear interferometer schematic diagram being made up of two and half cubes of roof prisms;
Fig. 3 is the interferometer schematic diagram with orthogonal principal section using corner cube prism mode;
Fig. 4 is that (one of reflecting prism moves along perpendicular to right-angled edge parallel to the direction of beam-splitting surface for the left side view of Fig. 3 The schematic diagram of a dynamic amount d);
Reference: 1- prism one, 2- prism two.
Specific embodiment
The invention provides a kind of lateral shear interferometer, including half cube of roof prism of two pieces of identicals;Half cube of room Ridge prism includes prism 1 and prism 22, and half cube of roof prism is the right angle roof prism with two orthogonal principal sections, In the right-angle surface that ridge face is located therein, light splitting surface is located at inclined-plane, and the angle and a right-angle surface between is 45 °, and room Ridge rib is in 90 ° of arrangements.
Wherein, prism two can be corner cube prism, or is isosceles right-angle prism;The inclined-plane of prism one and the right angle of prism two Face can be congruent.When prism two is corner cube prism, including right-angle surface one and right-angle surface two, the inclined-plane of roof prism is arranged on In right-angle surface one.
Prism one and prism two can be one or split, if prism one and prism two are one, The corresponding another piece of half cube of roof prism of one of half cube of roof prism is along perpendicular to ridge rib and parallel to beam-splitting surface Direction exist dislocation;If prism one and prism two are splits, one of prism one along perpendicular to itself right-angled edge, And there is dislocation in the direction parallel with the face that this prism two contacts.
Two and half cubes of roof prisms are respectively the first prism and the second prism, prism two in incident illumination is by the first prism Right-angle surface two when being incident to light splitting surface, a part for incident illumination reflects to form reflected light, another part through light splitting through light splitting surface Face transmission forms transmitted light;
Reflected light is incident to the ridge face of prism one in the first prism, then is reflexed to light splitting by the ridge face of this prism one Behind face, by right-angle surface two outgoing of the second prism;
Transmitted light is incident to the ridge face of prism one in the second prism, then is reflexed to light splitting by the ridge face of this prism one Behind face, by right-angle surface two outgoing of the second prism.
The first implementation of the present invention, as depicted in figs. 1 and 2, prism one and prism two are one.
The concrete structure of half cube of roof prism is: prism one is roof prism, and roof prism prism includes two right angles Face and an inclined-plane, two right-angle surface are ridge face, and two ridge faces intersection is ridge rib, and prism two is provided with light splitting surface; Two and half cubes of roof prisms are glued along light splitting surface, and the inclined-plane of the prism one of corresponding two and half cubes of roof prisms is vertical, and two Half cube of roof prism of block is symmetrical along light splitting surface.
If the corresponding another piece of half cube of roof prism of one of half cube of roof prism is along perpendicular to ridge rib and put down When the direction of beam-splitting surface has magnitude of misalignment d, then outgoing corrugated produces the horizontal shear capacity s of twice to row, has s=2d to close and is tied to form Vertical.
If half cube of roof prism clear aperture is d, the thickness of prism one is c, and the right-angle surface of prism two is a's for the length of side Square, a height of h of half cube of roof prism;
Then a, c and d meet: a=c=d, h=3/2a.
The second implementation of the present invention, as shown in Figure 3 and Figure 4, based on the first implementation of the present invention, prism One and prism two be split.
Particularly as follows: the inclined-plane of prism 1 is glued in the right-angle surface of prism 22.
As Fig. 3 and Fig. 4, the beam splitter prism of the present invention composes cube edge using two pieces of identical corner cube prism e, f Mirror beam splitter, the reflecting prism of the present invention is glued at corner cube prism using two pieces of identical corner cube prism m, n respectively in 90 ° In two right-angle surface of e, f, corner cube prism e, f are equivalent to the prism two in the first implementation of the present invention, corner cube prism m, n phase When the prism one in the first implementation of the present invention.The principal section of reflecting prism is perpendicular to the principal section of beam splitter prism, light Bundle the direction of propagation in the principal section of beam splitter prism, the direction realizing lateral shear perpendicular to beam splitter prism principal section, in reality The change of shearing displacement will not be brought during the adjustment of existing beam-splitting surface gluing aplanatism alignment.When reflecting prism full symmetric in point When bundle face is placed, prism does not produce lateral shear, if by one of reflecting prism edge perpendicular to right-angled edge parallel to beam-splitting surface The mobile amount in direction when, then produce the horizontal shear capacity of twice.
Such as, when one of prism one is along perpendicular to the right-angled edge and parallel with the face that this prism two contacts of itself Direction when there is magnitude of misalignment d, in other words, that is, when one of reflecting prism along perpendicular to the right-angled edge of itself parallel to point When the direction in bundle face has magnitude of misalignment d, then produce the horizontal shear capacity s of twice, have s=2d relation to set up.
If half cube of roof prism clear aperture is d, the longitudinal section of prism one is isosceles triangle, isosceles triangle right angle The length of side on side is c, and the thickness of prism one is h, and the right-angle surface of prism two is the square of a for the length of side, half cube of roof prism A height of h;
Then a, b, c and d meet: a=b=h=d,

Claims (10)

1. lateral shear interferometer it is characterised in that:
Including half cube of roof prism of two pieces of identicals;
Half cube of roof prism includes prism one and prism two;Prism one is roof prism, and roof prism includes two right-angle surface With an inclined-plane, two right-angle surface are ridge face;Prism two is corner cube prism, and corner cube prism includes right-angle surface one and right-angle surface Two;The inclined-plane of described prism one is arranged in right-angle surface one, and the inclined-plane of prism two is beam-splitting surface, one and half cubes of roof prisms Right-angle surface two is the plane of incidence, and the right-angle surface two of another half cube of roof prism is exit facet;
Two and half cubes of roof prisms are glued along beam-splitting surface, and the inclined-plane of the prism one of corresponding two and half cubes of roof prisms hangs down Directly;
The corresponding another piece of half cube of roof prism of one of half cube of roof prism along perpendicular to ridge rib and parallel to point There is dislocation in the direction in bundle face;
Two and half cubes of roof prisms are respectively the first prism and the second prism, and in incident illumination is by the first prism, prism two is straight When edged surface two is incident to beam-splitting surface, it is saturating through beam-splitting surface that the part of incident illumination reflects to form reflected light, another part through beam-splitting surface Penetrate formation transmitted light;
Reflected light is incident to the ridge face of prism one in the first prism, then is reflexed to beam-splitting surface by the ridge face of this prism one Afterwards, by right-angle surface two outgoing of the second prism;
Transmitted light is incident to the ridge face of prism one in the second prism, then is reflexed to beam-splitting surface by the ridge face of this prism one Afterwards, by right-angle surface two outgoing of the second prism.
2. lateral shear interferometer according to claim 1 it is characterised in that: described prism two be isosceles right-angle prism.
3. lateral shear interferometer according to claim 2 it is characterised in that: the right angle of the inclined-plane of prism one and prism two Face is congruent.
4. lateral shear interferometer according to claim 3 it is characterised in that: prism one and prism two are one.
5. lateral shear interferometer according to claim 4 it is characterised in that: half cube of roof prism clear aperture is d, The thickness of prism one is c, and the right-angle surface of prism two is the square of a for the length of side, a height of h of half cube of roof prism;
A, c and d meet: a=c=d, h=3/2a.
6. lateral shear interferometer it is characterised in that:
Including half cube of roof prism of two pieces of identicals;
Half cube of roof prism includes prism one and prism two;Prism one is roof prism, and roof prism includes two right-angle surface With an inclined-plane, two right-angle surface are ridge face;Prism two is corner cube prism, and corner cube prism includes right-angle surface one and right-angle surface Two;The inclined-plane of described prism one is arranged in right-angle surface one, and the inclined-plane of prism two is beam-splitting surface, one and half cubes of roof prisms Right-angle surface two is the plane of incidence, and the right-angle surface two of another half cube of roof prism is exit facet;
Two and half cubes of roof prisms are glued along beam-splitting surface, and the inclined-plane of the prism one of corresponding two and half cubes of roof prisms hangs down Directly;
One of prism one along perpendicular to itself right-angled edge and the direction parallel with the face that this prism two contacts exist wrong Position;
Two and half cubes of roof prisms are respectively the first prism and the second prism, and in incident illumination is by the first prism, prism two is straight When edged surface two is incident to beam-splitting surface, it is saturating through beam-splitting surface that the part of incident illumination reflects to form reflected light, another part through beam-splitting surface Penetrate formation transmitted light;
Reflected light is incident to the ridge face of prism one in the first prism, then is reflexed to beam-splitting surface by the ridge face of this prism one Afterwards, by right-angle surface two outgoing of the second prism;
Transmitted light is incident to the ridge face of prism one in the second prism, then is reflexed to beam-splitting surface by the ridge face of this prism one Afterwards, by right-angle surface two outgoing of the second prism.
7. lateral shear interferometer according to claim 6 it is characterised in that: described prism two be isosceles right-angle prism.
8. lateral shear interferometer according to claim 7 it is characterised in that: the right angle of the inclined-plane of prism one and prism two Face is congruent.
9. lateral shear interferometer according to claim 8 it is characterised in that: prism one and prism two are splits, rib The inclined-plane of mirror one is glued in the right-angle surface of prism two.
10. lateral shear interferometer according to claim 9 it is characterised in that:
Half cube of roof prism clear aperture is d, and the longitudinal section of prism one is isosceles triangle, described isosceles triangle right-angle side The length of side be c, the thickness of prism one is h, and the right-angle surface of prism two is the square for a for the length of side, the height of half cube of roof prism For h;
A, b, c and d meet: a=b=h=d,
CN201510304803.0A 2015-06-05 2015-06-05 Transverse shearing interferometer Expired - Fee Related CN104949756B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107462210B (en) * 2017-07-19 2019-10-18 中国科学院上海光学精密机械研究所 The rolling angle measurement device of linear guide
CN110530297B (en) * 2018-05-23 2020-11-03 中国科学院长春光学精密机械与物理研究所 Method for judging laser beam collimation and shearing interferometer adopting same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0324428A (en) * 1989-06-06 1991-02-01 Aerospat Soc Natl Ind Interferometer equipment of proceed system particularly by multiple fourier transform and spectral imagescope composed of the same
JP2003083811A (en) * 2001-09-13 2003-03-19 Nippon Telegr & Teleph Corp <Ntt> Image spectrometry device
CN2704831Y (en) * 2003-12-25 2005-06-15 中国科学院西安光学精密机械研究所 Transverse cutting interferometers
CN204788664U (en) * 2015-06-05 2015-11-18 中国科学院西安光学精密机械研究所 Lateral shear interferometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0324428A (en) * 1989-06-06 1991-02-01 Aerospat Soc Natl Ind Interferometer equipment of proceed system particularly by multiple fourier transform and spectral imagescope composed of the same
JP2003083811A (en) * 2001-09-13 2003-03-19 Nippon Telegr & Teleph Corp <Ntt> Image spectrometry device
CN2704831Y (en) * 2003-12-25 2005-06-15 中国科学院西安光学精密机械研究所 Transverse cutting interferometers
CN204788664U (en) * 2015-06-05 2015-11-18 中国科学院西安光学精密机械研究所 Lateral shear interferometer

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