CN104934358A - Wire clamp free of frictional force - Google Patents
Wire clamp free of frictional force Download PDFInfo
- Publication number
- CN104934358A CN104934358A CN201510207848.6A CN201510207848A CN104934358A CN 104934358 A CN104934358 A CN 104934358A CN 201510207848 A CN201510207848 A CN 201510207848A CN 104934358 A CN104934358 A CN 104934358A
- Authority
- CN
- China
- Prior art keywords
- wire clamp
- swing arm
- fixed
- arm
- fixed arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
- H01L2224/78621—Holding means, e.g. wire clampers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
The invention discloses a wire clamp free of frictional force. The wire clamp comprises a fixed arm, a movable arm and a drive unit, and the wire clamp is characterized by also comprising an elastic pivot, wherein the fixed arm is connected with the movable arm via the elastic pivot so that the movable arm rotates around the elastic pivot, and the drive unit drives the movable arm to rotate so that the end portion of the fixed arm is connected with or disconnected from the end portion of the movable arm. The wire clamp overcomes the disadvantages of a traditional wire clamp, opening and closing of the wire clamp does not include frictional force, lubrication is not needed, and the wire clamp also has advantages of simple structure, long service life and high reliability. The opening/closing gap is adjustable, the clamping force is controllable, and the requirement of high-quality bonding is met.
Description
Technical field
The present invention relates to a kind of wire clamp, be specifically related to a kind of manufacture or wire clamp on the process equipment, particularly bonding apparatus of semiconductor chip or bonder.The invention belongs to mechanical manufacturing field.
Background technology
Bonding is the welding procedure that the metal lead wire frame of circuit exit metallized on circuit chip or electrode and assembling chip or shell extraction electrode line are connected one to one.As the one of bonding apparatus, bonder does complicated motion at a high speed in three dimensions by ceramic tubule (chopper) guide wire lead-in wire (gold thread, copper cash, aluminum steel etc.), forms the bank of various satisfied different packing forms needs.
Bonder mainly comprises: the parts such as XY workbench, bonding head, material grain-clamping table, handling equipment.Bonder in the course of the work, by the motor-driven bonding head of Z-direction, coordinates accurate XY motion platform, guide wire in the complicated motion at a high speed of three-dimensional space intercropping, to form the bank needed for various satisfied different chip package.Wire clamp is fixed on bonding head, is the critical component on bonding head, and it constantly opens with closed in bonding process, to realize breaking gold thread, starts the bonding technology of next cycle, completes chip bonding pad and be connected with the bonding of package pins.
In the last few years, the speed of bonder was accelerated gradually, and this just requires that the wire clamp coordinated with it also needs to have following typical feature:
Response speed quickly, has the ability controlling clamping force simultaneously, thus is unlikely to crush metal lead wire (gold thread, copper cash, aluminum steel etc.) in the process of bonding.
Because wire clamp is fixed on bonding head, along with bonding head does the Z-direction motion of up and down reciprocatingly high speed, high acceleration, therefore require that wire clamp quality is tried one's best light, static and dynamic Status all has high rigidity.Avoid producing vibration at the volley and affecting bonding quality.
Due to the raising of bonding speed, wire clamp clamping part needs the frequency of folding nearly more than 30 times per second, need have that structure is simple, folding resistance is little, wire clamp global reliability is high.
Wire clamp general at present, with reference to Fig. 1, comprise fixed arm 29, swing arm 35, intermediate plate 25, 26 etc., wire clamp adopts voice coil motor 34 to drive, fixed arm 29 is screwed on bonding head by screw hole 30, the intermediate plate 26 for clamping bond wire line 27 is equipped with in fixed arm 29 front end, the stationary part of voice coil motor 34 is housed by screw 31 fixed arm 29 other end, the intermediate plate 25 for clamping bond wire line 27 is equipped with in swing arm 35 end, swing arm 35 other end is equipped with the mover coil 33 of voice coil motor 34, fixed arm 29 and swing arm 35 are interconnected by pivot 36, extension spring 28 two ends are individually fixed in fixed arm 29 with on swing arm 35, between wire clamp bare terminal end and pivot 36, play the effect of be strained and fixed arm 29 and swing arm 35 on the one hand, play to wire clamp clamping bond wire line 27 1 pre-clamping forces on the other hand, wire clamp is allowed to be in normally off, voice coil motor 34 drive swing arm 35 be θ to pivotally 36 rotary motion, thus make swing arm 35 produce the opening and closing movement of θ ' in end, thus reach the function of unclamping with clamping bond wire line 27.The wire clamp of this structure adopts pivot 36 structure, although adopt the high-abrasive material of high rigidity, unavoidably still can not have frictional force, and in use constantly wear and tear, and along with the lengthening of service time, frictional force is also in change.In order to allow clamping bond wire line 27 obtain consistent clamping force, need the driving parameter of the adjustment voice coil motor 34 of not timing, this cable clamp structure is complicated simultaneously, brings hidden danger to the Stability and dependability of whole bonder.
Summary of the invention
For solving the deficiencies in the prior art, the object of the present invention is to provide a kind of zerofriction force wire clamp, to solve prior art wire clamp moving process, there is frictional force, cause chucking power to change, affect bonding quality, folding gap be non-adjustable, the uncontrollable technical problem of clamping force.
In order to realize above-mentioned target, the present invention adopts following technical scheme:
A kind of zerofriction force wire clamp, comprises fixed arm, swing arm, drive unit, it is characterized in that, also comprise: resilient pivot, is connected, swing arm is rotated around resilient pivot between fixed arm and swing arm by resilient pivot; Drive unit rotates around resilient pivot for driving swing arm, makes to produce opening and closing action between fixed arm end and swing arm end.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described resilient pivot, also for providing the pre-clamping force between fixed arm end and swing arm end, makes to be in normally off between fixed arm end and swing arm end.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described resilient pivot is reed.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described fixed arm is installed the first intermediate plate for clamping metal wire, swing arm is provided with the second intermediate plate for clamping metal wire.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described fixing arms is provided with the guide vane end stop for regulating wire clamp to open amplitude.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described swing arm is provided with the scotch for regulating wire clamp to open amplitude.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, also comprise extension spring, one end of described extension spring is fixed on fixed arm, and the other end is fixed on swing arm.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described drive unit is drive motors, and described drive motors comprises the first motor stator, the second motor stator, electric mover between the first motor stator and the second motor stator; First motor stator, the second motor stator are fixedly linked with fixed arm respectively; Electric mover and swing arm are fixedly linked.
Aforesaid a kind of zerofriction force wire clamp, is characterized in that, described drive unit is solenoid, and described solenoid comprises Part I and Part II, and described Part I is fixed on swing arm, and described Part II is fixed on fixed arm.
Aforesaid a kind of zerofriction force wire clamp, it is characterized in that, described drive unit is piezoelectric ceramic, one end and the fixed arm of described piezoelectric ceramic are fixedly linked, and the other end and the swing arm of described piezoelectric ceramic are fixedly linked.
Usefulness of the present invention is: the deficiency that instant invention overcomes traditional wire clamp, does not have frictional force during wire clamp folding, does not need lubrication, have that structure is simple, the long-life, high reliability.Folding gap is adjustable simultaneously, clamping force is controlled, meets high-quality bonding requirement.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing cable clamp structure
Fig. 2 is the schematic diagram of a kind of embodiment of the present invention;
Fig. 3 is the drive unit stereogram of the first embodiment of the present invention;
Fig. 4 is the drive unit explosive view of the first embodiment of the present invention;
Fig. 5 is the schematic diagram of the second embodiment of the present invention;
Fig. 6 is the schematic diagram of the third embodiment of the present invention;
Fig. 7 is the schematic diagram of the present invention's the 4th kind of embodiment.
The implication of Reference numeral in figure:
1, the first wire clamp intermediate plate, 2, bond wire line, the 3, second wire clamp intermediate plate, 4, fixed arm, 5, reed, 6, screw hole, 7, guide vane end stop, 8, scotch, 9, drive unit, 10, swing arm, 11, screw, 12, motor stator upper plate, 13, magnet, 14, motor stator lower plate, 15, coil, 16, extension spring, 17, regulate the device of pulling force, 18, solenoid, 19, Part I, 20, Part II, 21, piezoelectric ceramic.
Embodiment
Below in conjunction with the drawings and specific embodiments, concrete introduction is done to the present invention.
With reference to shown in Fig. 2, the present invention mainly for wire clamp folding change in resistance, thus causes chucking power to change, and affects this starting point of bonding quality, has invented a kind of trendy wire clamp without frictional resistance.Wire clamp of the present invention, comprises fixed arm and swing arm, and two are connected each other by reed.Reed plays resilient pivot, the power that drive unit provides swing arm to rotate around resilient pivot, and swing arm rotates around resilient pivot, and then makes fixed arm and swing arm end produce opening and closing action
Below in conjunction with accompanying drawing, the invention will be further described:
Shown in Figure 2, be the first embodiment of the present invention, the wire clamp fixed arm 4 that wire clamp comprises wire clamp swing arm 10, coordinates with wire clamp swing arm 10.First wire clamp second intermediate plate 1 is bonded on wire clamp swing arm 10, and the second wire clamp first intermediate plate 3 is bonded on wire clamp fixed arm 4, and wire clamp fixed arm 4 is connected with bonding head by screw hole 6 screw.Wire clamp swing arm 10 is connected with wire clamp fixed arm 4 by reed 5.Wire clamp fixed arm 4 is provided with wire clamp drive motors 9.
In the first embodiment, shown in composition graphs 3, Fig. 4, wire clamp drive unit 9 adopts voice coil motor, comprises the electric mover between the first motor stator, the second motor stator, the first motor stator, the second motor stator.Magnet 13 and motor stator upper plate 12 bond formation first motor stator, and magnet 13 and motor stator lower plate 14 bond formation second motor stator.Coil 15 and wire clamp swing arm 10 bond together, and coil 15 and wire clamp swing arm 10 form electric mover.First motor stator, the second motor stator are fixed on wire clamp fixed arm 4 respectively by screw 11.Under the effect of the power produced at coil 15 at wire clamp swing arm 10 like this, the rotation along θ direction of the pivot center produced around reed 5 can be produced, drive the first wire clamp second intermediate plate 1 along the swing in θ ' direction, thus the first wire clamp second intermediate plate 1 and the second wire clamp first intermediate plate 3 produce the action of opening with closed.Drive unit 9 has the ability of adjustment actuating force.
In the first embodiment, wire clamp second intermediate plate 1,3 clamps bond wire line 2, and reed 5 plays the effect of resilient pivot, and can produce pre-clamping force at two intermediate plate retained parts, such wire clamp will be in normally off.The action of opening power used is all produced by drive unit 9, and closed action is according to the difference of bonding technology, and power used is making a concerted effort of producing with pre-clamping force of drive unit 9.
In the first embodiment, fixed arm 4 is connected by reed 5 with swing arm 10, and reed plays the effect of resilient pivot, and reed adopts the material of high ratio of rigidity.
In the first embodiment, fixed arm 4 is installed the first intermediate plate 3 for clamping metal wire.First intermediate plate 3 adopts jewel, quartz or carbide alloy.Swing arm 10 is provided with the second intermediate plate 1 for clamping metal wire.Second intermediate plate 1 adopts jewel, quartz or carbide alloy.
In the first embodiment, fixing arms 4 is provided with the guide vane end stop 7 regulating wire clamp to open amplitude.
In the first embodiment, swing arm 10 is provided with the scotch 8 regulating wire clamp to open amplitude.
As shown in Figure 5, it is the second embodiment of the present invention, be exactly clamping between the part of bond wire line 2 and the reed 5 as resilient pivot from unique different of the first embodiment, add a two and be individually fixed in fixed arm 4 and the extension spring 16 on swing arm 10, fixed arm 4 side of extension spring 16, the device 17 regulating pulling force is installed, the effect of extension spring 16 produces pre-clamping force, to eliminate the deviation of the pre-clamping force due to installation reed generation, thus ensure the consistency of pre-clamping force.It is identical that opening force and first implements power, provided by drive unit 9, and the pre-clamping force that closing force is then produced by the pulling force of spring 16, reed 5, drive unit 9 provide jointly.
As shown in Figure 6, be the third embodiment of the present invention, what adopt unlike, drive unit with the second embodiment is solenoid.
In the third embodiment, as shown in Figure 6, the wire clamp wire clamp fixed arm 4 that comprises wire clamp swing arm 10, coordinate with wire clamp swing arm 10.First wire clamp second intermediate plate 1 is bonded on wire clamp swing arm 10, and the second wire clamp first intermediate plate 3 is bonded on wire clamp fixed arm 4, and wire clamp fixed arm 4 is connected with bonding head by screw hole 6 screw.Wire clamp swing arm 10 is connected with wire clamp fixed arm 4 by reed 5.Wire clamp fixed arm 4 is provided with wire clamp and drives solenoid 18.Two parts Part I 19 of solenoid 18, Part II 20 are individually fixed in wire clamp swing arm 10 with on wire clamp fixed arm 4, after solenoid 18 is energized, solenoidal two parts Part I 19, Part II 20 can produce and attract each other, thus make wire clamp swing arm 10 produce the rotation along θ direction of the pivot center produced around reed 5, drive wire clamp second intermediate plate 1 along the swing in θ ' direction, thus wire clamp second intermediate plate 1 and wire clamp first intermediate plate 3 produce the action of opening with closed.Between the part of clamping bond wire line 2 and the reed 5 as resilient pivot, add a two and be individually fixed in fixed arm 19 and the extension spring 20 on swing arm 18, fixed arm 19 side of extension spring 20, the device 17 regulating pulling force is installed, the present invention does not limit its concrete structure, the effect of extension spring 20 produces pre-clamping force, to eliminate the deviation of the pre-clamping force due to installation reed 5 generation, thus ensures the consistency of pre-clamping force.It is identical that opening force and first implements power, provided by drive unit, and the pre-clamping force that closing force is then produced by the pulling force of spring 20, reed 5, drive unit provide jointly.
As shown in Figure 7, be the 4th kind of embodiment of the present invention, what adopt unlike drive unit with the third embodiment is that piezoelectric ceramic 21 drives.
In 4th kind of embodiment, as shown in Figure 7, the wire clamp fixed arm 4 that wire clamp comprises wire clamp swing arm 10, coordinates with wire clamp swing arm 10.First wire clamp second intermediate plate 1 is bonded on wire clamp swing arm 10, and the second wire clamp first intermediate plate 3 is bonded on wire clamp fixed arm 4, and wire clamp fixed arm 4 is connected with bonding head by screw hole 6 screw.Wire clamp swing arm 10 is connected with wire clamp fixed arm 4 by reed 5.Wire clamp fixed arm 4 is provided with wire clamp and drives piezoelectric ceramic 21.Wire clamp swing arm 10 is fixed on on wire clamp fixed arm 4 in piezoelectric ceramic two ends, after piezoelectric ceramic 21 is energized, piezoelectric ceramic produces flexible deformation, thus make wire clamp swing arm 10 produce the rotation along θ direction of the pivot center produced around reed 5, drive wire clamp second intermediate plate 1 along the swing in θ ' direction, thus wire clamp second intermediate plate 1 and wire clamp first intermediate plate 3 produce the action of opening with closed.Wire clamp to open with closed power be all drive unit Piezoelectric Ceramic.
Visible, the invention provides a kind of guarantee wire clamp in the course of the work, opening and closing resistance does not change, does not have the line clamping device of frictional resistance.Wire clamp of the present invention overcomes the some shortcomings of traditional wire clamp, does not have frictional force when maximum feature is exactly wire clamp folding, does not need lubrication, have that structure is simple, the long-life, high reliability.Folding gap is adjustable simultaneously, clamping force is controlled, meets high-quality bonding requirement.
More than show and describe general principle of the present invention, principal character and advantage.The technical staff of the industry should understand, and above-described embodiment does not limit the present invention in any form, the technical scheme that the mode that all employings are equal to replacement or equivalent transformation obtains, and all drops in protection scope of the present invention.
Claims (10)
1. a zerofriction force wire clamp, comprises fixed arm, swing arm, drive unit, it is characterized in that, also comprise: resilient pivot, is connected, swing arm is rotated around resilient pivot between fixed arm and swing arm by resilient pivot; Drive unit rotates around resilient pivot for driving swing arm, makes to produce opening and closing action between fixed arm end and swing arm end.
2. a kind of zerofriction force wire clamp according to claim 1, is characterized in that, described resilient pivot, also for providing the pre-clamping force between fixed arm end and swing arm end, makes to be in normally off between fixed arm end and swing arm end.
3. a kind of zerofriction force wire clamp according to claim 2, is characterized in that, described resilient pivot is reed.
4. a kind of zerofriction force wire clamp according to claim 3, is characterized in that, described fixed arm is installed the first intermediate plate for clamping metal wire, swing arm is provided with the second intermediate plate for clamping metal wire.
5. a kind of zerofriction force wire clamp according to claim 4, is characterized in that, described fixing arms is provided with the guide vane end stop for regulating wire clamp to open amplitude.
6. a kind of zerofriction force wire clamp according to claim 4, is characterized in that, described swing arm is provided with the scotch for regulating wire clamp to open amplitude.
7. a kind of zerofriction force wire clamp according to any one of claim 1 to 6, is characterized in that, also comprise extension spring, one end of described extension spring is fixed on fixed arm, and the other end is fixed on swing arm.
8. a kind of zerofriction force wire clamp according to claim 7, it is characterized in that, described drive unit is drive motors, and described drive motors comprises the first motor stator, the second motor stator, the first motor stator, electric mover between the first motor stator and the second motor stator; First motor stator, the second motor stator are fixedly linked with fixed arm respectively; Electric mover and swing arm are fixedly linked.
9. a kind of zerofriction force wire clamp according to claim 7, is characterized in that, described drive unit is solenoid, and described solenoid comprises Part I and Part II, and described Part I is fixed on swing arm, and described Part II is fixed on fixed arm.
10. a kind of zerofriction force wire clamp according to claim 7, is characterized in that, described drive unit is piezoelectric ceramic, and one end and the fixed arm of described piezoelectric ceramic are fixedly linked, and the other end and the swing arm of described piezoelectric ceramic are fixedly linked.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510207848.6A CN104934358A (en) | 2015-04-29 | 2015-04-29 | Wire clamp free of frictional force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510207848.6A CN104934358A (en) | 2015-04-29 | 2015-04-29 | Wire clamp free of frictional force |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104934358A true CN104934358A (en) | 2015-09-23 |
Family
ID=54121465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510207848.6A Pending CN104934358A (en) | 2015-04-29 | 2015-04-29 | Wire clamp free of frictional force |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104934358A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110091266A (en) * | 2019-04-12 | 2019-08-06 | 武克学 | A kind of hand vice |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090200357A1 (en) * | 2008-02-12 | 2009-08-13 | Sung-Soo Lee | Wire clamp and wire bonding apparatus having the same |
| CN102343476A (en) * | 2010-08-02 | 2012-02-08 | 北京中电科电子装备有限公司 | Bonding head device |
| CN102810921A (en) * | 2011-06-02 | 2012-12-05 | 北京中电科电子装备有限公司 | Cooling device and cooling method for wire clamp driving motor of bonding machine, and bonding machine |
| CN103177980A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Bonding head device on full-automatic lead bonding equipment |
-
2015
- 2015-04-29 CN CN201510207848.6A patent/CN104934358A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090200357A1 (en) * | 2008-02-12 | 2009-08-13 | Sung-Soo Lee | Wire clamp and wire bonding apparatus having the same |
| CN102343476A (en) * | 2010-08-02 | 2012-02-08 | 北京中电科电子装备有限公司 | Bonding head device |
| CN102810921A (en) * | 2011-06-02 | 2012-12-05 | 北京中电科电子装备有限公司 | Cooling device and cooling method for wire clamp driving motor of bonding machine, and bonding machine |
| CN103177980A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Bonding head device on full-automatic lead bonding equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110091266A (en) * | 2019-04-12 | 2019-08-06 | 武克学 | A kind of hand vice |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0011979B1 (en) | Processor-controlled drive apparatus for a semiconductor-wire bonder and method of operating same | |
| CN103367183B (en) | Double-swing arm bonder Welding head mechanism and bonder | |
| CN102945813B (en) | A kind of bonding joint device on full-automatic lead bonding equipment | |
| CN209095280U (en) | A kind of reciprocating diamond wire saw machine | |
| US20200203307A1 (en) | Wire bonding apparatus and manufacturing method for semiconductor apparatus | |
| CN104934358A (en) | Wire clamp free of frictional force | |
| US6786392B2 (en) | Wire bonding device and wire bonding method | |
| US20040245314A1 (en) | Wire bonder | |
| JP2001144134A (en) | Method for supporting oscillator block at bonding head of bonding machine | |
| US20210057374A1 (en) | Full-automatic deep access ball bonding head device | |
| CN201393156Y (en) | Linkage head Z-direction motor | |
| CN102343476B (en) | Bonding head device | |
| CN203456421U (en) | Bonding head apparatus applied to full-automatic lead bonding device | |
| CN102437111A (en) | Method and device for quickly forming arc for leading wire by using wire clamp to manufacture salient points | |
| CN103579072B (en) | Clamping sheet mechanism buffer unit | |
| CN109142104B (en) | Digital material surface impact strengthening experiment testing device | |
| CN207244329U (en) | A kind of pre- tensioning equipment of intermittent steel wire rope for elevator | |
| CN103177980A (en) | Bonding head device on full-automatic lead bonding equipment | |
| JP2575066B2 (en) | Semiconductor assembly equipment | |
| KR102360298B1 (en) | Multiple actuator wire bonding apparatus | |
| CN210722747U (en) | Pipe clamping device of transformer winding machine | |
| CN103949736B (en) | A kind of wire feeder of wire cutting machine and method | |
| CN108551240B (en) | A kind of hand insertion stator core slot wedge grafting auxiliary device | |
| CN218004775U (en) | Quick response wire clamp based on piezoelectric actuator | |
| CN107671431B (en) | Wire clamping device with pneumatic clamping hand |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150923 |
|
| RJ01 | Rejection of invention patent application after publication |