CN104931654B - A kind of bionical micro structure for gas sensor surface - Google Patents
A kind of bionical micro structure for gas sensor surface Download PDFInfo
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- CN104931654B CN104931654B CN201510320368.0A CN201510320368A CN104931654B CN 104931654 B CN104931654 B CN 104931654B CN 201510320368 A CN201510320368 A CN 201510320368A CN 104931654 B CN104931654 B CN 104931654B
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Abstract
The invention discloses a kind of bionical micro structure for gas sensor surface, it is made up of sensor sensing layer substrate, protruding micro-and triangular prism shape ridge, wherein triangular prism shape ridge is evenly distributed in sensor sensing layer substrate, protruding micro-face is evenly distributed between adjacent two triangular prism shape ridges on the groove formed, and two sides of triangular prism shape ridge are provided with equally distributed micropore；The present invention is by imitating the microstructure design one gas sensor surface biomimetic micro structure on tang surface, gas is made to form turbulent flow when flowing through bionical micro-structure surface, improve the gas molecule quantity entering sensor sensing layer, thus improve the sensitivity of detection.
Description
Technical field
The present invention relates to a kind of biomimetic features, particularly to a kind of bionical micro-for gas sensor surface
Structure.
Background technology
Gasometry detection and analysis are in environmental conservation, chemical industry control, Household alarm, food fresh keeping, boat
Field important in inhibiting such as empty space flight and public security customs etc..Many research workers are at the material of gas sensor
Numerous studies have been done, it is intended in terms of improving material sensitivity, signal transmission etc., improve passing on material and technique
Sensor performance, improves Detection results, and have ignored the impact on its Detection results of the sensor surface micro structure.
In nature, the olfactory sensation of Serpentis is the sensitiveest, and research shows, tang surface distributed has micro-of projection,
And micropore and triangular prism shape ridge, these structures contribute to absorption and the transfer of chemical substance when Serpentis tells core.
The microstructure on tang surface promotes that Serpentis, to the absorption of scent molecule in air, is favorably improved the olfactory sensation of Serpentis
Sensitivity, is applied to this micro structure on sensor sensing layer surface, thus it is possible to vary sensor surface gas
The bionical micro structure of stream mode, reaches to improve the purpose of transducer sensitivity.
Summary of the invention
The invention aims to improve the sensitivity of gas sensor detection and provide a kind of for gas
The bionical micro structure of sensor surface, this bionical micro structure imitates the microstructure on tang surface, Ke Yigai
Changing the flow of QI-blood stream mode, increases the time of staying of air-flow, improves the gas molecule quantity entering sensor sensing layer,
Thus improve the sensitivity of detection.
The biomimetic features of the present invention comes from tang surface microstructure, and tang surface distributed has the micro-of projection
Face, and micropore and triangular prism shape ridge, these structures contribute to when Serpentis tells core chemical substance absorption and
Transfer.
The present invention is made up of sensor sensing layer substrate 1, protruding micro-face 2 and triangular prism shape ridge 3, its
Middle triangular prism shape ridge 3 is evenly distributed in sensor sensing layer substrate 1, and protruding micro-face 2 is uniformly distributed
On the groove formed between adjacent two triangular prism shape ridges 3, two sides of triangular prism shape ridge 4 set
It is equipped with equally distributed micropore 3.
Described protruding micro-face 2 is made up of sphere and cylindrical side, described protruding micro-face 2
The size of spherical radius R between 10 μm-200 μm, cylindrical side height H and the ratio of spherical radius R
Value H:R is 0.5 to 2.5.
Described micropore 4 is cylindrical hole, the size of radius r between 1 μm-50 μm, cylindrical side height
The ratio h:r of h and radius r is 10 to 20.
The shape of cross section of described triangular prism shape ridge 3 is equilateral triangle, and the size of length of side a exists
Between 100 μm-300 μm, the distance between two adjacent triangular prism shape ridges 3 between 60 μm-120 μm,
The number of the length of its longitudinal direction and laterally arrangement determines according to the size of gas sensor surface area.
The work process of the present invention and principle:
When airflow passes surface of the present invention, the bionical micro structure on gas sensor surface can change air-flow
State so that gas bionical micro-structure surface formed turbulent flow, increase air-flow the time of staying, improve into
Enter the gas molecule quantity of sensor sensing layer.
Beneficial effects of the present invention:
The present invention is by imitating the microstructure design one micro-knot of gas sensor surface biomimetic on tang surface
Structure so that gas forms turbulent flow when flowing through bionical micro-structure surface, improves entrance sensor sensing layer
Gas molecule quantity, thus improve the sensitivity of detection.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of the embodiment of the present invention.
Fig. 2 is the top view of the embodiment of the present invention.
Fig. 3 is micro-schematic diagram of the embodiment of the present invention.
Fig. 4 is the micropore schematic diagram of the embodiment of the present invention.
Fig. 5 is face, the rank street schematic diagram of the triangular prism shape ridge of the embodiment of the present invention.
Detailed description of the invention
Embodiment 1:
Refer to shown in Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, for the first embodiment of the present invention, be
It is made up of sensor sensing layer substrate 1, protruding micro-face 2 and triangular prism shape ridge 3, wherein triangular prism shape ridge
3 are evenly distributed in sensor sensing layer substrate 1, and protruding micro-face 2 is evenly distributed on adjacent two Rhizoma Sparganii
On the groove formed between column ridge 3, two sides of triangular prism shape ridge 4 are provided with equally distributed
Micropore 3.
Described protruding micro-face 2 is made up of sphere and cylindrical side, described protruding micro-face 2
The size of spherical radius R is 20 μm 1, cylindrical side height H and the ratio H:R of spherical radius R
It is 1.0.
Described micropore 4 is cylindrical hole, and the size of radius r is at 5 μm, cylindrical side height h and radius r
Ratio h:r be 12.
The shape of cross section of described triangular prism shape ridge 3 is equilateral triangle, the size of length of side a in 160 μm,
Distance between two adjacent triangular prism shape ridges 3 between 80 μm, the length of its longitudinal direction and laterally arrangement
Number determines according to the size of gas sensor surface area.
The work process of the present embodiment and principle:
When airflow passes surface of the present invention, the bionical micro structure on gas sensor surface can change air-flow
State so that gas bionical micro-structure surface formed turbulent flow, increase air-flow the time of staying, improve into
Enter the gas molecule quantity of sensor sensing layer.
Embodiment 2:
Refer to shown in Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, for the second embodiment of the present invention, be
It is made up of sensor sensing layer substrate 1, protruding micro-face 2 and triangular prism shape ridge 3, wherein triangular prism shape ridge
3 are evenly distributed in sensor sensing layer substrate 1, and protruding micro-face 2 is evenly distributed on adjacent two Rhizoma Sparganii
On the groove formed between column ridge 3, two sides of triangular prism shape ridge 4 are provided with equally distributed
Micropore 3.
Described protruding micro-face 2 is made up of sphere and cylindrical side, described protruding micro-face 2
The size of spherical radius R is 30 μm 1, cylindrical side height H and the ratio H:R of spherical radius R
It is 2.0.
Described micropore 4 is cylindrical hole, and the size of radius r is at 8 μm, cylindrical side height h and radius r
Ratio h:r be 15.
The shape of cross section of described triangular prism shape ridge 3 is equilateral triangle, the size of length of side a in 160 μm,
Distance between two adjacent triangular prism shape ridges 3 is between 100 μm, and the length of its longitudinal direction is arranged with horizontal
Number determine according to the size of gas sensor surface area.
The work process of the present embodiment and principle:
When airflow passes surface of the present invention, the bionical micro structure on gas sensor surface can change air-flow
State so that gas bionical micro-structure surface formed turbulent flow, increase air-flow the time of staying, improve into
Enter the gas molecule quantity of sensor sensing layer.
Claims (4)
1. the bionical micro structure for gas sensor surface, it is characterised in that: it is by sensor
Sensitive layer substrate (1), protruding micro-(2) and triangular prism shape ridge (3) composition, wherein triangular prism shape
Ridge (3) is evenly distributed on sensor sensing layer substrate (1), and protruding micro-(2) are evenly distributed on
On the groove formed between adjacent two triangular prism shape ridges (3), two sides of triangular prism shape ridge (4)
On be provided with equally distributed micropore (3).
A kind of bionical micro structure for gas sensor surface the most according to claim 1, its
It is characterised by: described micro-protruding (2) are made up of sphere and cylindrical side, described projection
The size of spherical radius R of micro-(2) between 10 μm-200 μm, cylindrical side height H and sphere
The ratio H:R of radius R is 0.5 to 2.5.
A kind of bionical micro structure for gas sensor surface the most according to claim 1, its
Being characterised by: described micropore (4) is cylindrical hole, the size of radius r is between 1 μm-50 μm, round
The ratio h:r of post profile height h and radius r is 10 to 20.
A kind of bionical micro structure for gas sensor surface the most according to claim 1,
It is characterized in that: the shape of cross section of described triangular prism shape ridge (3) is equilateral triangle, the chi of length of side a
Very little between 100 μm-300 μm, the distance between two adjacent triangular prism shape ridges (3) is in 60 μm-120 μm
Between.
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| CN105300898A (en) * | 2015-11-17 | 2016-02-03 | 吉林大学 | Device for measuring gas response reflection spectrum of butterfly wing scales |
| CN105738426A (en) * | 2016-04-06 | 2016-07-06 | 吉林大学 | Bionic gas sensor based on butterfly scale gas-sensing functional characteristics |
| CN106990025B (en) * | 2017-04-14 | 2019-06-04 | 吉林大学 | A kind of bionic surface structure capturing micro-nano granules |
| CN109813766B (en) * | 2019-03-26 | 2021-06-29 | 吉林大学 | Scorpion comb tooth-imitated gas sensor and preparation method thereof |
| CN112802913A (en) * | 2021-01-11 | 2021-05-14 | 浙江师范大学 | Surface-textured solar glass self-cleaning anti-reflection structure and method |
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| JP5112119B2 (en) * | 2008-03-11 | 2013-01-09 | 理研計器株式会社 | Gas detector |
| CN102590398A (en) * | 2012-03-23 | 2012-07-18 | 电子科技大学 | Miniature gas enricher with membranes on double surfaces |
| CN202794093U (en) * | 2012-07-27 | 2013-03-13 | 广东工业大学 | Device for fast detecting quality of baked food based on bionic olfaction |
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