CN104913865A - Multi-dimensional force/torque sensor - Google Patents
Multi-dimensional force/torque sensor Download PDFInfo
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- CN104913865A CN104913865A CN201410088883.6A CN201410088883A CN104913865A CN 104913865 A CN104913865 A CN 104913865A CN 201410088883 A CN201410088883 A CN 201410088883A CN 104913865 A CN104913865 A CN 104913865A
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Abstract
The invention relates to a multi-dimensional force/torque sensor. The multi-dimensional force/torque sensor comprises a mounting assembly and a conduction assembly which is accommodated in and abuts against the mounting assembly; the mounting assembly includes an upper cover and a lower cover which are fixed to each other; the upper cover and a lower cover are respectively provided with a first end surface; the first end surfaces of the upper cover and the lower cover are opposite to each other; a cavity and four recessed portions communicated with the cavity are formed in the first end surface of the upper cover and the first end surface of the lower cover respectively; the conduction assembly includes a cross frame and a plurality of pressure induction components attached to the cross frame; the cross frame includes four arms which form a cross; each arm includes four side surfaces which are not perpendicular to a plane formed by the central axis of the cross frame; one induction component is attached to the four side surfaces respectively; the cross frame is accommodated in the cavity of the upper cover and the cavity of the lower cover; each arm is accommodated in a corresponding recessed portion; when the cross frame is stressed, the cross frame tends to move relative to the upper cover and the lower cover; and the upper cover and the lower cover block the cross frame, so that the cross frame can be prevented from moving relative to the upper cover and the lower cover, and will apply stress to the induction components attached to the cross frame.
Description
Technical field
The present invention relates to a kind of power/torque sensor be installed in robot, particularly relate to a kind of multiple dimension force/moment sensor.
Background technology
Multiple dimension force/moment sensor is widely used in mechanical arm, and in manipulator clamping actuating station in workpiece assembling or process, mechanical arm performs the assembling of repeatability for a long time or adds man-hour, and assembling or Working position deviation occur occasional.By power/moment information in multiple dimension force/moment sensor sensing actuating station, calculate the amount of deflection, utilize the site error of the micro-motion compensation assembled workpiece of robot, thus realize mechanical arm assembled with high precision or processing are carried out to workpiece.
At present, the multiple dimension force/moment sensor of normal employing comprises right-angled intersection frame and a set collar, right-angled intersection frame is fixed on set collar, right-angled intersection frame comprises four arms, each arm is rectangular-shaped, and wherein a surface and the axis being parallel of set collar in the adjacently situated surfaces of each rectangular parallelepiped arm, axes normal of another surface and set collar.One end of each rectangular parallelepiped arm offers the first through hole, its other end offers orthogonal second through hole with the first through hole.Each first through hole and each the second through hole surface mount have four stress gauges (Strain Gauge) to form bridge circuit.When being under pressure in one direction, strainometer reacts the size of its resistance value by distortion, then records the size of the party's power upwards in conjunction with bridge circuit.
But will consider the size of each first through hole and the second through hole during said apparatus design, the device volume of its design is larger; The processing procedure that each first through hole of said apparatus and the second through hole are pasting four stress gauges is comparatively complicated, and the operation changing strainometer when a strainometer goes wrong is comparatively loaded down with trivial details, and the manufacturing cost of this strainometer is high; When said apparatus produces distortion in the power be subject in a direction, other direction also can produce deformation, normally the distortion on other directions is ignored the size with computing power at present, causes the power precision that records not high.
Summary of the invention
In view of above-mentioned condition, be necessary to provide that a kind of dynamometry/torque accuracy is high, the simple multiple dimension force/moment sensor of structure.
A kind of multiple dimension force/moment sensor, comprise installation component and collecting and be held in the conducting subassembly of this installation component, this installation component comprises the upper cover and lower cover that interfix, this upper cover and this lower cover comprise the first relative end face, first end face of this upper cover and the first end face of this lower cover all offer cavity and four depressed parts with this cavity connects, this conducting subassembly comprises cross and is attached at the multiple pressure sensitive parts on this cross, this cross comprises four arms arranged in right-angled intersection, each this arm comprises four sides, the plane that the central axis that these four sides are all not orthogonal to these four arms is formed, four sides of each this arm are pasted with an induction pieces respectively, this cross is contained in the cavity of this upper cover and the cavity of this lower cover, each this arm is contained in corresponding depressed part, when this cross is stressed, this cross is relative to this upper cover and the trend being stamped relative motion under this, this upper cover and this lower cover are because stopping that this cross avoids its this upper cover relative and this lower cover to move and produce pressure to the induction pieces that this cross attaches.
Without the need to perforate on each arm of multiple dimension force/moment sensor of the present invention, without the need to considering the size of hole design, therefore multiple dimension force/moment sensor overall volume of the present invention is less; Each arm in multiple dimension force/moment sensor of the present invention only need attach four induction pieces, has saved production cost; Multiple dimension force/moment sensor of the present invention adopts the power/moment be subject to by each induction pieces all to decompose in the X, Y, Z axis in three-dimensional system of coordinate in dynamometry process, then the superposition power in X, Y, Z axis being carried out to vector is with the size of the power recording processing jig and to assemble workpiece or process, do not ignore the power on any direction, make measurement more accurate.
Accompanying drawing explanation
Fig. 1 is the solid assembling schematic diagram of the multiple dimension force/moment sensor in present embodiment.
Fig. 2 is the decomposed schematic diagram of multiple dimension force/moment sensor shown in Fig. 1.
Fig. 3 is the three-dimensional exploded view of multiple dimension force/moment sensor shown in Fig. 1.
Fig. 4 is the three-dimensional exploded view at another visual angle of multiple dimension force/moment sensor shown in Fig. 2.
Main element symbol description
| Multiple dimension force/moment sensor | 100 |
| Installation component | 10 |
| Upper cover | 11 |
| Lower cover | 13 |
| Through hole | 111,131 |
| First end face | 112,132 |
| Second end face | 113,133 |
| Cavity | 114,134 |
| Inner ring surface | 1141,1341 |
| Bottom surface | 1142,1342 |
| Depressed part | 115,135 |
| First surface | 1151,1351 |
| Second | 1152,1352 |
| Mounting hole | 116,136 |
| Fixed orifice | 117,137 |
| Accommodating member | 15 |
| Holding part | 151 |
| Accommodation space | 1511 |
| Lid | 153 |
| Conducting subassembly | 30 |
| Cross | 31 |
| Body | 311 |
| Through hole | 3111 |
| Arm | 313 |
| Side | 3131 |
| End face | 3133 |
| Induction pieces | 33 |
Following embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Embodiment
Refer to Fig. 1 and Fig. 2, the multiple dimension force/moment sensor 100 in present embodiment, for fixing on a robotic arm, is assembling or is adding with the actuating station sensing mechanical arm the power/moment applied man-hour to workpiece.Multiple dimension force/moment sensor 100 comprises installation component 10 and conducting subassembly 30.Conducting subassembly 30 is contained in installation component 10.
Please refer to Fig. 3 and Fig. 4, installation component 10 comprises structure upper cover similar and fixed with each other 11 and lower cover 13, and is fixed on the accommodating member 15 on lower cover 13 excircle.Upper cover 11 is roughly in the form of annular discs.Upper cover 11 offers pass through aperture 111 along its axis direction runs through.Upper cover 11 comprise the first end face 112 and with parallel the second relative end face 113 of the first end face 112.First end face 112 has been recessed to form inner ring surface 1141 and bottom surface 1142 towards the second end face 113.Inner ring surface 1141 and bottom surface 1142 form a cavity 114 jointly, and cavity 114 is coaxial with through hole 111.On first end face 112, uniform intervals offers four V-type depressed parts, 115, four V-type depressed parts 115 and is all connected with cavity 114.Each V-type depressed part 115 comprises first surface 1151 and second face 1152 connected vertically with first surface 1151, first surface 1151 and the second face 1152 each other away from one end be connected with the first end face 112 respectively.Second end face 113 of upper cover 11 runs through along the axis direction being parallel to upper cover 11 between corresponding every two adjacent V-type depressed parts 115 and offers a mounting hole 116 and two fixed orifices 117.Four mounting holes 116 and eight fixed orifices 117 are all positioned at circumferentially same, and each mounting hole 116 is between corresponding two fixed orifices 117.
Lower cover 13 is similar to the structure of upper cover 11, its equally in the axial direction on offer pass through aperture 131, and its comprise equally same position relation the first end face 132 and with parallel the second relative end face 133 of the first end face 132.First end face 132 has been recessed to form inner ring surface 1341 and bottom surface 1342 towards the second end face 133.Inner ring surface 1341 and bottom surface 1342 form a cavity 134 jointly, and cavity 134 is coaxial with through hole 131.On first end face 132, uniform intervals offers four V-type depressed parts, 135, four V-type depressed parts 135 and is all connected with cavity 134.Each V-type depressed part 135 comprises first surface 1351 and second face 1352 connected vertically with first surface 1351, first surface 1351 and the second face 1352 each other away from one end be connected with the first end face 132 respectively.Second end face 133 of lower cover 13 runs through along the axis direction being parallel to lower cover 13 between corresponding every two adjacent V-type depressed parts 135 and offers a mounting hole 136 and two fixed orifices 137.Four mounting holes 136 and eight fixed orifices 137 are all positioned at circumferentially same, and each mounting hole 136 is between corresponding two fixed orifices 137.First end face 132 of lower cover 13 is oppositely arranged with the first end face 112 of upper cover 11 and supports.The dead in line of the mounting hole 116 that the mounting hole 136 on lower cover 13 and fixed orifice 137 are corresponding on upper cover 11 respectively and fixed orifice 117.Four V-type depressed parts 115 of the corresponding upper cover 11 of four V-type depressed parts 135 of lower cover 13.
Accommodating member 15 is fixed on the excircle of lower cover 13.The lid 153 that accommodating member 15 comprises holding part 151 and matches with holding part 151.The elements such as holding part 151 offers an accommodation space 1511, the circuit board that accommodation space 1511 is electrically connected in order to the controller of accommodating conducting subassembly 30 and mechanical arm, lid 153 is covered on accommodation space 1511, exposes to avoid circuit board etc.
Conducting subassembly 30 comprises cross 31 and several are attached at induction pieces 33 on cross 31.Cross 31 comprises a body 311 and four uniform intervals and is fixed on arm 313 on the side of body 311.Induction pieces 33 is attached on each arm 313 side away from one end of body 311.Body 311 and each arm 313 are contained in cavity 114 near one end of body 311, in 134, each arm 313 is contained in corresponding V-type depressed part 115 away from one end of body 311, in 135, the induction pieces 33 that the side of each arm 313 attaches supports at corresponding first surface 1151,1351 and second face 1152, on 1352.
Body 311 is roughly in hollow cylindrical.Body 311 offers a through hole 3111 along its axis direction runs through, and the dead in line of the axis of through hole 3111 and through hole 111.One end of each arm 313 is fixed on the excircle of body 311.Each arm 313 is roughly rectangular-shaped in hollow, and it comprises mutually vertical four sides 3131 of being connected and one and four all vertical end faces 3133 be connected in side 3131.End face 3133 is square, and the plane that the four edges of end face 3133 is all formed with the central axis of four arms 313 is 45 ° of angles.Each arm 313 is contained in corresponding V-type depressed part 115, in 135 away from one end of body 311.Four sides 3131 of each arm 313 are pasted with an induction pieces 33 respectively.Inductor 33 on four sides 3131 supports with the first surface 1351 of the first surface 1151 of upper cover 11 and the second face 1152, lower cover 13 and the second face 1353 respectively.In the present embodiment, the quantity of induction pieces 33 is 16, and the FlexiForce pressure transducer that induction pieces 33 is produced for Tekscan company; Angle between the plane that the central axis of each side 3131 and four arms 313 is formed is 45 °.Understandably, when needed, induction pieces 33 can be the pressure transducer of other types.
During assembling, first accommodating member 15 is fixed on the excircle of lower cover 13, induction pieces 33 is attached on four sides 3131 of each arm 313 away from one end of body 311.Again cross 31 is positioned in the cavity 134 of lower cover 13, and make the axis of through hole 3111 and the dead in line of through hole 131, each arm 313 is contained in the corresponding V-type depressed part 135 of lower cover 13 away from one end of body 311, and the induction pieces 33 that the side 3131 of arm 313 attaches supports with first surface 1351 and the second face 1352 respectively.Then, upper cover 11 is positioned on lower cover 13, and make each arm 313 be contained in the corresponding V-type depressed part 115 of upper cover 11 away from one end of body 311, make the axis of through hole 111 and the dead in line of through hole 3111, and the induction pieces 33 that the side 3131 of arm 313 attaches supports with first surface 1151 and the second face 1152 respectively simultaneously.Finally upper cover 11 and lower cover 13 are fixed through fixed orifice 117 and corresponding fixed orifice 137 by screw.
During use, screw is utilized to pass mounting hole 116, multiple dimension force/moment sensor 100 is fixed on the mechanical arm of robot by 136, and is set on the processing jig of actuating station, and the induction pieces 33 in multiple dimension force/moment sensor 100 is electrically connected with the controller of mechanical arm.Processing jig is being assembled workpiece or is adding the effect being subject to power man-hour, this power can act on the cross 31 in the multiple dimension force/moment sensor 100 be set on processing jig, cross 31 is made to have the trend of relative motion relative to installation component 10, because cross 31 is positioned between upper cover 11 and lower cover 13, upper cover 11 and lower cover 13 produce pressure because stopping cross 31 to avoid its relative upper cover 11 and lower cover 13 to move to the induction pieces 33 that cross 31 attaches.The pressure that the induction pieces 33 that each is extruded is subject to is all perpendicular to corresponding side 3131.
The induction pieces 33 of each pressurized is because being made the electric signal of the controller exporting robot to change by the extruding of first surface 1151,1351 and the second face 1152,1352 of corresponding V-type depressed part 115,135.In present embodiment, induction pieces 33 is resistance strain type pressure sensor, namely there is deformation because being under pressure in induction pieces 33, the resistance of induction pieces 33 is changed, and above-mentioned controller can determine the size of the pressure suffered by induction pieces 33 by the detecting change in voltage that causes because of resistance variations of induction pieces 33.
Multiple dimension force/moment sensor 100 senses in the process of power/moment, robot with the initial point of the central point of cross 31 definition three-dimensional coordinate system, and defines X-axis, Y-axis, the Z axis (as shown in Figure 3) of three-dimensional coordinate system respectively with the central axis of the central axis of two adjacent arm portion 313 and body 311.The signal that the induction pieces 33 of each pressurized is fed back to controller by the signal processing unit of controller carries out low-pass filtering and after amplifying, by A/D converter at a high speed, signal is converted to digital signal, and digital signal is sent to the computing unit of the controller of robot.In present embodiment, pressure induction pieces 33 being subject to by the design of circuit and its resistance value linearly change.The computing unit of controller calculates the pressure suffered by induction pieces 33 of pressurized according to the signal that the induction pieces 33 of pressurized produces.The pressure perpendicular detected due to induction pieces 33 is in the side 3131 of arm 313, so the pressure that detects of induction pieces 33 and above-mentioned X-axis, Y-axis, angle between Z axis are 45 degree or 90 degree.Angle between the pressure that the stress point of induction pieces 33 detects apart from the angle between the distance of the initial point of above-mentioned coordinate system, the line between this stress point and initial point and above-mentioned X-axis, Y-axis, Z axis and induction pieces 33 and above-mentioned X-axis, Y-axis, Z axis is pre-stored within the controller of mechanical arm.This controller can calculate according to the above-mentioned pressure that detects and the above-mentioned information prestored the moment around X-axis, Y-axis, Z axis that described pressure produces along the component of X-axis, Y-axis, Z axis and this pressure.
Such as, the pressure F that the induction pieces 33 as the pressurized in Fig. 3 is subject to, pressure F are perpendicular to side 3131, and the angle between pressure F and above-mentioned Y-axis is 90 degree, and the size of component Fy that therefore pressure F decomposes in above-mentioned Y-axis is: Fy=F*cos90 °; The angle of pressure F and above-mentioned X-axis and Z axis is 45 degree, and the size of component Fx that therefore pressure F decomposes in above-mentioned X-axis is: the size of the component Fz that Fx=F*cos45 °, pressure F decompose on above-mentioned Z axis is: Fz=F*cos45 °.According to above-mentioned algorithm, the pressure that the induction pieces 33 that controller can calculate each pressurized is subject to decomposes to the component size on above-mentioned X-axis, Y-axis, Z axis, and then the computing unit of controller carries out the superposition of vector to obtain the component of Whole power on above-mentioned X-axis, Y-axis, Z axis to the power in above-mentioned X-axis, Y-axis, Z-direction respectively.In addition, controller is according to the distance size between the stress point of the induction pieces 33 of each pressurized be stored in controller and the initial point of above-mentioned coordinate system and the line between this stress point and the initial point of coordinate system and above-mentioned X-axis, Y-axis, angle calcu-lation between the Z axis distance gone out between the stress point of the induction pieces of pressurized and the initial point of above-mentioned coordinate system decomposes to above-mentioned X-axis, Y-axis, size on Z axis, and decompose to X-axis according to the pressure that the induction pieces 33 that Calculating Torque during Rotary formula obtains each pressurized is subject to, Y-axis, the moment size that component on Z axis produces, then controller is respectively to X-axis, Y-axis, the moment that power in Z-direction produces carries out the superposition of vector to obtain the moment of Whole power generation in X-axis, Y-axis, moment of components on Z axis.Robot is according to power/moment information, and corresponding adjustment is made, to realize high-precision assembling or processing in control internal drive member and the position of driving member to processing jig.
Without the need to perforate on each arm 313 of multiple dimension force/moment sensor 100 of the present invention, without the need to considering the size of hole design, therefore multiple dimension force/moment sensor 100 overall volume of the present invention is less; Each arm 313 in multiple dimension force/moment sensor 100 of the present invention need attach four induction pieces 33, and induction pieces 33 adopts the FlexiForce pressure transducer of low cost of manufacture, has saved production cost; Multiple dimension force/moment sensor 100 of the present invention adopts the power/moment be subject to by each induction pieces 33 all to decompose in the X, Y, Z axis in three-dimensional system of coordinate in dynamometry process, then the superposition power/moment in X, Y, Z axis being carried out to vector is with the size of the power/moment recording processing jig and to assemble workpiece or process, do not ignore the power on any direction, make measurement more accurate.
Can understand, in other embodiments, first end face 112 of the upper cover 11 in multiple dimension force/moment sensor 100 is not limited to supporting in present embodiment with the position relationship of the first end face 132 of lower cover 13, as long as the first end face 112 of upper cover 11 is oppositely arranged with the first end face 132 of lower cover 13, the induction pieces 33 now cross 31 attached is contained in corresponding depressed part 115,135.
Can understand, in other embodiments, induction pieces 33 in multiple dimension force/moment sensor 100 is not limited to and supports respective recesses portion 115 in present embodiment, the first surface 1151 of 1335, 1351 and second face 1152, 1352, induction pieces 33 also can with respective recesses portion 115, the first surface 1151 of 135, 1351 and second face 1152, 1352 interval predeterminable ranges, as long as when the power that cross 31 is subject to makes cross 31 have the trend of relative motion relative to installation component 10, upper cover 11 and lower cover 13 can produce pressure because stopping cross 31 to avoid its relative upper cover 11 and lower cover 13 to move to the induction pieces 33 that cross 31 attaches.
Can understand, in other embodiments, each arm 313 in multiple dimension force/moment sensor 100 can be solid, arm 313 can be quadrangular, end face 3133 can be any parallelogram, as long as four of each arm 313 planes that the central axis that side 3131 is all not orthogonal to four arms 313 is formed, now, each depressed part 115, the first surface 1151 of 135, 1351 and second end face 1152, 1352 can out of plumb, as long as make the induction pieces 33 that the side 3133 of each arm 313 attaches support first surface 1151, 1351 and second end face 1152, 1352, now, the pressure suffered by induction pieces 33 of each pressurized and the X-axis of three-dimensional coordinate system, Y-axis, the angle of the two sides adjacent with arm 313 of the angle between Z axis 3131 is relevant, as long as the angle of the adjacent two sides 3131 of arm 313 is determined, the pressure suffered by induction pieces 33 of each pressurized and the X-axis of three-dimensional coordinate system, Y-axis, angle between Z axis is just known quantity, be stored in the controller of mechanical arm.
Can understand, in other embodiments, the initial point of three-dimensional coordinate system that multiple dimension force/moment sensor 100 defines is not limited to the central point of cross 31 in present embodiment, as long as define X-axis, Y-axis, the Z axis of three-dimensional coordinate system respectively with the parallel lines of the central axis of the central axis of two adjacent arm portion 313 and body 311, now, the pressure suffered by induction pieces 33 of each pressurized and the X-axis of three-dimensional coordinate system, Y-axis, angle between Z axis is relevant with the position of the initial point of the three-dimensional coordinate system of definition, as long as the position of the initial point of three-dimensional coordinate system is determined, the pressure suffered by induction pieces 33 of each pressurized and the X-axis of three-dimensional coordinate system, Y-axis, angle between Z axis is just known quantity, and the line of initial point of distance size between the stress point of each induction pieces 33 and the initial point of three-dimensional coordinate system and this stress point and coordinate system and the X-axis of three-dimensional coordinate system, Y-axis, the angle of Z axis is also known quantity, above-mentioned known quantity is stored in controller.
Can understand, in other embodiments, the upper cover 11 of multiple dimension force/moment sensor 100 and adjacent two depressed parts 115 of lower cover 13, the quantity running through mounting hole 116, the 136 and fixed orifice 117,137 offered between 135 is not limited to present embodiment, mounting hole 116, the quantity of 136 can be greater than four in present embodiment, fixed orifice 117, and the quantity of 137 can be greater than eight in present embodiment; And mounting hole 116,136 is not limited to and is positioned at two fixed orifices 117, between 137, also fixed orifice 117 can be positioned at, outside 137; Mounting hole 116,137 and fixed orifice 117,137 be not limited in present embodiment be positioned at circumferentially same, mounting hole 116,136 and fixed orifice 117,137 can be positioned at two circumferentially different, be even positioned at multiple circumferentially different; As long as the mounting hole 116 of upper cover 11 and fixed orifice 117 are identical with the mounting hole 136 of lower cover 13 and the quantity of fixed orifice 137 respectively, and the dead in line of the mounting hole 116 of upper cover 11 mounting hole 136 corresponding to lower cover 13, the dead in line of the fixed orifice 137 that the fixed orifice 117 of upper cover 11 is corresponding to lower cover 13.
In addition, those skilled in the art also can do other change in spirit of the present invention, and certainly, these changes done according to the present invention's spirit, all should be included in the present invention's scope required for protection.
Claims (9)
1. a multiple dimension force/moment sensor, comprise installation component and collecting and be held in the conducting subassembly of this installation component, it is characterized in that: this installation component comprises the upper cover and lower cover that interfix, this upper cover and this lower cover comprise the first relative end face, first end face of this upper cover and the first end face of this lower cover all offer cavity and four depressed parts with this cavity connects, this conducting subassembly comprises cross and is attached at the multiple pressure sensitive parts on this cross, this cross comprises four arms arranged in right-angled intersection, each this arm comprises four sides, the plane that the central axis that these four sides are all not orthogonal to these four arms is formed, four sides of each this arm are pasted with an induction pieces respectively, this cross is contained in the cavity of this upper cover and the cavity of this lower cover, each this arm is contained in corresponding depressed part, when this cross is stressed, this cross is relative to this upper cover and the trend being stamped relative motion under this, this upper cover and this lower cover are because stopping that this cross avoids its this upper cover relative and this lower cover to move and produce pressure to the induction pieces that this cross attaches.
2. multiple dimension force/moment sensor as claimed in claim 1, it is characterized in that: this upper cover and this lower cover also include second end face that be oppositely arranged parallel with this corresponding first end face, this first end is facing to this second sunken end face and form inner ring surface and bottom surface, and this inner ring surface forms corresponding cavity jointly with this second end face.
3. multiple dimension force/moment sensor as claimed in claim 1, it is characterized in that: each this depressed part comprises first surface and second of being connected with first surface, this first surface and this second face each other away from one end connect respectively at this first end face of correspondence, the first surface of each depressed part of this upper cover and the second face support the induction pieces of collecting in corresponding depressed part, and the first surface of each depressed part of this lower cover and the second face support the induction pieces of collecting in corresponding depressed part.
4. multiple dimension force/moment sensor as claimed in claim 3, is characterized in that: vertical second of the first surface of each this depressed part.
5. multiple dimension force/moment sensor as claimed in claim 1, it is characterized in that: each this arm also comprises and four side end faces all connected vertically, this end face is square, and the plane that the four edges of this end face is all formed with the central axis of these four arms is 45 ° of angles.
6. multiple dimension force/moment sensor as claimed in claim 1, it is characterized in that: this cross also comprises body, these four arm uniform intervals are fixed on the excircle of this body.
7. multiple dimension force/moment sensor as claimed in claim 2, it is characterized in that: the second end face of this upper cover and this lower cover runs through respectively offering multiple mounting hole and multiple fixed orifice between corresponding every two adjacent these depressed parts along the axis direction being parallel to this upper cover and this lower cover, on the same line, the axis of the fixed orifice that the fixed orifice of this upper cover is corresponding with this lower cover on the same axis for the axis of the mounting hole that the mounting hole of this upper cover is corresponding with this lower cover.
8. multiple dimension force/moment sensor as claimed in claim 1, it is characterized in that: this upper cover and this its axis direction of lower cover rim all run through and offer pass through aperture, this body runs through along its axis direction and offers a through hole, and the dead in line of the axis of this through hole and this through hole.
9. multiple dimension force/moment sensor as claimed in claim 1, it is characterized in that: this installation component also comprises the accommodating member be fixed on this lower cover excircle, the lid that this accommodating member comprises holding part and matches with this holding part, this holding part offers an accommodation space, and this cover cap is located on this accommodation space.
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| CN201410088883.6A CN104913865A (en) | 2014-03-12 | 2014-03-12 | Multi-dimensional force/torque sensor |
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| CN201410088883.6A CN104913865A (en) | 2014-03-12 | 2014-03-12 | Multi-dimensional force/torque sensor |
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| CN105973521A (en) * | 2016-07-08 | 2016-09-28 | 中国电子科技集团公司第二十研究所 | 3D pressure transducer |
| CN105973521B (en) * | 2016-07-08 | 2019-03-08 | 中国电子科技集团公司第二十一研究所 | Three-dimensional pressure sensor |
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| CN109590767A (en) * | 2018-11-27 | 2019-04-09 | 西北工业大学 | Fixture with force measuring function |
| CN114227502A (en) * | 2021-11-15 | 2022-03-25 | 深圳市裕展精密科技有限公司 | Polishing fixing device, polishing equipment and method |
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