CN104907281A - Cleaning apparatus and cleaning method of ceramic dome - Google Patents
Cleaning apparatus and cleaning method of ceramic dome Download PDFInfo
- Publication number
- CN104907281A CN104907281A CN201510380967.1A CN201510380967A CN104907281A CN 104907281 A CN104907281 A CN 104907281A CN 201510380967 A CN201510380967 A CN 201510380967A CN 104907281 A CN104907281 A CN 104907281A
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- CN
- China
- Prior art keywords
- cleaning
- ceramic dome
- ultra
- pure water
- side wall
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Abstract
The invention relates to a cleaning apparatus of a ceramic dome. The cleaning apparatus comprises a cleaning box body, the cleaning box body is internally provided with a separator plate, the separator plate is parallel to the left side wall of the cleaning box body, the height of the separator plate is smaller than the height of the left side wall of the cleaning box body, and an overflow mouth is formed between the separator plate and the left side wall of the cleaning box body; and the bottom of the cleaning box body is provided with an ultrasonic machine, and the ultrasonic machine is disposed between the separator and the right side wall of the cleaning box body. The invention also disposes a cleaning method of a ceramic dome. The method can effectively remove impurities on the surface of the ceramic dome, accords with the production demand of a micrometer-grade integrated circuit, successfully develops a cleaning technology by use of ultrapure water, effectively removes micrometer-grade attachments and provides a high-quality ceramic dome.
Description
Technical field
The present invention relates to a kind of cleaning device and cleaning method of ceramic dome.
Background technology
The outward appearance of pottery dome (following general designation Do me) is a bowl-type moulding, wherein the inside of ceramic dome is coarse designs, product function catches to get, adhere to the foreign body produced in integrated circuit manufacture process, avoids foreign body to affect production equipment stability.
Do me material body is industrial ceramics.Ceramic material can be found to the similar bee slot shape of surface presentation via sending out sem observation large, is covered with many pores.The foreign body produced in integrated circuit manufacture process is by these pores, is adsorbed, catches and exempt from table by impurity, avoid affecting production equipment stability.
The conventional clean processing mode of pottery dome is for adopting lapping mode that impurity is worn, but integrated circuit manufacture process is across after the micrometer generation of road, and foreign body is also corresponding to be reduced.Lapping mode cannot effectively be brushed by the impurity of micron size, and then produces residual.These remain will have a strong impact on the stability of IC processing equipment.
Summary of the invention
Object of the present invention, exactly in order to solve above-mentioned prior art Problems existing, and a kind of cleaning device of ceramic dome is provided, effectively can remove ceramic dome surface impurity, meet micron grade integrated circuit Production requirement, successfully develop the clean technique of ultra-pure water, effectively remove micron grade attachment, the ceramic dome of fine quality is provided.
A kind of technical scheme realizing above-mentioned purpose is: a kind of cleaning device of ceramic dome, comprise cleaning casing, the inside of described cleaning casing arranges a dividing plate, the left sidewall of described dividing plate and described cleaning casing, and the height of described dividing plate is less than the height of the left side wall of described cleaning casing, between the left side wall of described dividing plate and described cleaning casing, form overfall;
The bottom of described cleaning casing arranges a supersonic machine, and described supersonic machine is between described dividing plate and the right side wall of described cleaning casing;
Described ceramic dome is placed in described cleaning casing, and between described dividing plate and the right side wall of described cleaning casing;
Be contained with ultra-pure water in described cleaning casing, and described ceramic dome is immersed in described ultra-pure water.
The cleaning device of above-mentioned a kind of ceramic dome, wherein, the frequency 40kHz of described supersonic machine, power 3000kW.
The cleaning device of above-mentioned a kind of ceramic dome, wherein, the specific impedance value of described ultra-pure water is at least 18M Ω .cm.
Another technical scheme provided by the invention is: a kind of cleaning method of ceramic dome, and it adopts the cleaning device of a kind of ceramic dome according to claim 1 to carry out, and comprises the following steps:
S1, in cleaning casing, inject ultra-pure water, the temperature of ultra-pure water controls at 40 DEG C;
S2, puts into the ultra-pure water of cleaning casing by ceramic dome;
S3, open supersonic machine, clean ceramic dome, scavenging period is at least 45 minutes.
The cleaning method of above-mentioned a kind of ceramic dome, wherein, the frequency of described supersonic machine is 40kHz, and power is 3000kW.
The cleaning method of above-mentioned a kind of ceramic dome, wherein, the specific impedance value of described ultra-pure water is at least 18M Ω .cm.
The technical scheme of the technical scheme of the cleaning device of ceramic dome of the present invention and the cleaning method of ceramic dome, beneficial effect is compared with prior art:
(1) wash clean process adopts ultra-pure water to clean, and utilizes the water quality of high-cleanness, high to clean, provides more excellent quality;
(2) get rid of traditional grinding and clean mode, reduce abrasive action and effectively can reduce ceramic dome because grinding the loss that brings, effectively can extend part service life, in the buying and maintenance cost of part, bring the saving of essence to client.
Accompanying drawing explanation
Fig. 1 is the structural representation of the cleaning device of ceramic dome of the present invention.
Detailed description of the invention
In order to make those skilled in the art can understand technical scheme of the present invention better, below in conjunction with accompanying drawing, the invention will be further described.
Refer to Fig. 1, embodiments of the invention, a kind of cleaning device of ceramic dome 10, comprise cleaning casing 1, the inside of cleaning casing 1 arranges a dividing plate 2, dividing plate 2 is parallel with the left side wall 11 of cleaning casing 1, and the height of dividing plate 2 is less than the height of the left side wall 11 of cleaning casing 1, forms overfall 3 between the left side wall 11 of dividing plate 1 and cleaning casing 1; The bottom of cleaning casing 1 arranges a supersonic machine 4, and supersonic machine 4 is between dividing plate 2 and the right side wall 12 of cleaning casing 1, and the frequency of supersonic machine 4 is 40kHz, and power is 3000kW; Pottery dome 10 is placed in cleaning casing 1, and between dividing plate 2 and the right side wall 12 of cleaning casing 1; Be contained with ultra-pure water (not shown) in cleaning casing 1, and ceramic dome 10 is immersed in ultra-pure water, the specific impedance value of ultra-pure water is at least 18M Ω .cm.
A cleaning method for ceramic dome, it adopts the cleaning device of a kind of ceramic dome of the present invention to carry out, and comprises the following steps:
S1, in cleaning casing 1, inject ultra-pure water, the temperature of ultra-pure water controls at 40 DEG C, and the specific impedance value of ultra-pure water is at least 18M Ω .cm;
S2, puts into the ultra-pure water of cleaning casing 1 by ceramic dome 10;
S3, open supersonic machine 4, clean ceramic dome 10, scavenging period is at least 45 minutes; The frequency 40kHz of supersonic machine 4, power 3000kW.
The cleaning performance testing process of the cleaning method of ceramic dome of the present invention is:
Open supersonic machine 4, when cleaning ceramic dome 10, often clean after 5 minutes, carry out micro dust particle detection to ceramic dome 10, and record experimental data, it is as shown in the table for concrete outcome:
Table 1
Observed by the experimental data of table 1 and obtain:
(1). first 10 minutes, ceramic dome 10 surface was obviously unclean, and micro dust particle content measuring all exceeds capacity of equipment, cannot measure;
(2). the 15th minute to the 40th minute, the micronic dust particle subnumber under different-grain diameter, test value obviously declines, and ceramic dome 10 strides forward towards more and more cleaner direction;
(3). after the 45th minute, micro dust particle granule number to reach integrated circuit production grade, and remains stable.
The cleaning method of ceramic dome of the present invention, wash clean process adopts ultra-pure water to clean, and utilizes the water quality of high-cleanness, high to clean, provides more excellent quality; Get rid of traditional grinding and clean mode, reduce abrasive action and effectively can reduce ceramic dome because grinding the loss that brings, effectively can extend part service life, in the buying and maintenance cost of part, bring the saving of essence to client.
Above embodiment is used for illustrative purposes only, but not limitation of the present invention, person skilled in the relevant technique, without departing from the spirit and scope of the present invention, various conversion or modification can also be made, therefore all equivalent technical schemes also should belong to category of the present invention, should be limited by each claim.
Claims (6)
1. the cleaning device of a ceramic dome, it is characterized in that, comprise cleaning casing, the inside of described cleaning casing arranges a dividing plate, the left sidewall of described dividing plate and described cleaning casing, and the height of described dividing plate is less than the height of the left side wall of described cleaning casing, between the left side wall of described dividing plate and described cleaning casing, form overfall;
The bottom of described cleaning casing arranges a supersonic machine, and described supersonic machine is between described dividing plate and the right side wall of described cleaning casing;
Described ceramic dome is placed in described cleaning casing, and between described dividing plate and the right side wall of described cleaning casing;
Be contained with ultra-pure water in described cleaning casing, and described ceramic dome is immersed in described ultra-pure water.
2. the cleaning device of a kind of ceramic dome according to claim 1, is characterized in that, the frequency of described supersonic machine is 40kHz, and power is 3000kW.
3. the cleaning device of a kind of ceramic dome according to claim 1, is characterized in that, the specific impedance value of described ultra-pure water is at least 18 M Ω .cm.
4. a cleaning method for ceramic dome, it adopts the cleaning device of a kind of ceramic dome according to claim 1 to carry out, and it is characterized in that, comprise the following steps:
S1, in cleaning casing, inject ultra-pure water, the temperature of ultra-pure water controls at 40 DEG C;
S2, puts into the ultra-pure water of cleaning casing by ceramic dome;
S3, open supersonic machine, clean ceramic dome, scavenging period is at least 45 minutes.
5. the cleaning method of a kind of ceramic dome according to claim 4, is characterized in that, the frequency 40kHz of described supersonic machine, power 3000kW.
6. the cleaning method of a kind of ceramic dome according to claim 4, is characterized in that, the specific impedance value of described ultra-pure water is at least 18 M Ω .cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510380967.1A CN104907281A (en) | 2015-06-30 | 2015-06-30 | Cleaning apparatus and cleaning method of ceramic dome |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510380967.1A CN104907281A (en) | 2015-06-30 | 2015-06-30 | Cleaning apparatus and cleaning method of ceramic dome |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104907281A true CN104907281A (en) | 2015-09-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510380967.1A Pending CN104907281A (en) | 2015-06-30 | 2015-06-30 | Cleaning apparatus and cleaning method of ceramic dome |
Country Status (1)
| Country | Link |
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| CN (1) | CN104907281A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108212912A (en) * | 2016-12-15 | 2018-06-29 | 宁波江丰电子材料股份有限公司 | The cleaning method of glow discharge mass spectrometry equipment potsherd |
Citations (7)
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| DE3434128A1 (en) * | 1984-09-18 | 1986-03-20 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Process for the surface treatment of metal parts, glass parts or ceramic parts |
| CN1043656A (en) * | 1988-12-30 | 1990-07-11 | 机械电子工业部桂林电器科学研究所 | Emulsion gloves ceramic mould cleaning method and device |
| CN2133370Y (en) * | 1992-05-04 | 1993-05-19 | 潘宁 | Magnetic wave washing machine |
| CN2312770Y (en) * | 1997-12-19 | 1999-04-07 | 康金淼 | Supersonic washing tank |
| CN1385251A (en) * | 2002-04-16 | 2002-12-18 | 中国科学院上海技术物理研究所 | Method for cleaning deep inner pore canal of zirconium oxide ceramic contact pin |
| CN101152651A (en) * | 2006-09-28 | 2008-04-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for cleaning surface of ceramic parts |
| CN102513306A (en) * | 2011-12-30 | 2012-06-27 | 保定天威英利新能源有限公司 | Method for cleaning ceramic suction plates for handling solar cell slices |
-
2015
- 2015-06-30 CN CN201510380967.1A patent/CN104907281A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3434128A1 (en) * | 1984-09-18 | 1986-03-20 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Process for the surface treatment of metal parts, glass parts or ceramic parts |
| CN1043656A (en) * | 1988-12-30 | 1990-07-11 | 机械电子工业部桂林电器科学研究所 | Emulsion gloves ceramic mould cleaning method and device |
| CN2133370Y (en) * | 1992-05-04 | 1993-05-19 | 潘宁 | Magnetic wave washing machine |
| CN2312770Y (en) * | 1997-12-19 | 1999-04-07 | 康金淼 | Supersonic washing tank |
| CN1385251A (en) * | 2002-04-16 | 2002-12-18 | 中国科学院上海技术物理研究所 | Method for cleaning deep inner pore canal of zirconium oxide ceramic contact pin |
| CN101152651A (en) * | 2006-09-28 | 2008-04-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for cleaning surface of ceramic parts |
| CN102513306A (en) * | 2011-12-30 | 2012-06-27 | 保定天威英利新能源有限公司 | Method for cleaning ceramic suction plates for handling solar cell slices |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108212912A (en) * | 2016-12-15 | 2018-06-29 | 宁波江丰电子材料股份有限公司 | The cleaning method of glow discharge mass spectrometry equipment potsherd |
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Application publication date: 20150916 |
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