CN104898375A - Photoresist blowing and coating device - Google Patents
Photoresist blowing and coating device Download PDFInfo
- Publication number
- CN104898375A CN104898375A CN201510319642.2A CN201510319642A CN104898375A CN 104898375 A CN104898375 A CN 104898375A CN 201510319642 A CN201510319642 A CN 201510319642A CN 104898375 A CN104898375 A CN 104898375A
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- China
- Prior art keywords
- linear motion
- glue
- direction linear
- motion axis
- photoresist
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- 238000007664 blowing Methods 0.000 title claims abstract description 49
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 46
- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 239000003292 glue Substances 0.000 claims description 92
- 239000011888 foil Substances 0.000 claims description 7
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 8
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
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- Coating Apparatus (AREA)
- Nozzles (AREA)
Abstract
The invention provides a photoresist blowing and coating device which comprises two sets of two-dimensional linear driving units, a horizontal rectilinear motion shaft, and a vertical rectilinear motion shaft, and further comprises a rotary motor, a photoresist extruding mechanism, a photoresist dripping device, a deflection motor, a compressed air nozzle, an air compressor unit and a photoresist melting tank, wherein one set of the two-dimensional linear driving units is used for driving the horizontal rectilinear motion shaft and the vertical rectilinear motion shaft, so as to ensure that the photoresist dripping device is right above a workpiece; the rotary motor is used for driving the photoresist extruding mechanism to drip photoresist onto the surface of the workpiece; the other set of the two-dimensional linear driving units is used for driving the compressed air nozzle to move to a position right above the workpiece in the same manner, so that when the air compressor unit is started, compressed air is blown onto the surface of a photoresist layer; the deflection motor is used for driving the compressed air nozzle to rotate so as to adjust the airflow direction; outlet pressure is adjusted through a reducing valve. The photoresist blowing and coating device is suitable for dripping photoresist onto the surface of the workpiece, and controlling the thickness of the photoresist layer through blowing of compressed air, and has the advantage that photoresist coating on a plane or a complex surface can be realized, so that the function is strong, and the application range is wide.
Description
Technical field
The invention belongs to photoresist coating field, be specifically related to a kind of photoresist and blow coating device.
Background technology
In photoresist coating field, photoresist spinner is generally taked to carry out photoresist coating, such device need by substrate clamping on the rotary main shaft of photoresist spinner, and in substrate, put into appropriate photoresist, produce the High Rotation Speed around center after opening photoresist spinner, the centrifugal force utilizing turning axle to produce evenly applies one deck photoresist in substrate.This traditional whirl coating equipment is applicable to planar technology, for the three-dimensional substrates with complex-curved structure, because the substrate size that glue-line is stressed everywhere, direction are inconsistent, traditional photoresist spinner can not realize the even coating of photoresist, limits photoetching process and has the use in complex-curved three-dimensional structure.
Summary of the invention
In order to realize the uniform gluing with complex-curved structure three-dimensional substrate, being also applicable to the photoresist coating of planar substrates simultaneously, the invention provides a kind of photoresist and blow coating device.
The present invention solves the technical scheme that its technical matters takes:
Photoresist of the present invention blows coating device, be characterized in, described device contains a glue platform two dimension straight line actuating unit, drips glue plateau levels direction linear motion axis, a glue platform vertical direction linear motion axis, electric rotating machine, glue-squeezing mechanism, a glue device, the two-dimentional straight line actuating unit of blowing platform, blowing platform horizontal direction linear motion axis, blowing platform vertical direction linear motion axis, tracheae, reduction valve, compressed-air atomizer, deflection motor, air-compressor set, appearance Jiao Chi, base, wherein, glue-squeezing mechanism comprises pull bar, foil gauge.Its annexation is, described base profile is concavity, and the partial symmetry that base two side is protruded is arranged.The side that base protrudes is disposed with droplet glue plateau levels direction linear motion axis parallel with base end face, drip glue platform vertical direction linear motion axis, described drips glue plateau levels direction linear motion axis, drip outside glue platform vertical direction linear motion axis and be connected with the gear dripping glue platform two dimension straight line actuating unit, wherein drip glue platform two dimension straight line actuating unit by motor, bearing and gear composition, the central shaft dripping glue plateau levels direction linear motion axis is provided with pull bar, the top of pull bar is connected with foil gauge, drip glue device and be embedded in the termination, inner side of dripping glue plateau levels direction linear motion axis.A glue plateau levels direction linear motion axis is provided with the electric rotating machine for driving pull bar.The opposing party that base protrudes is disposed with the blowing platform horizontal direction linear motion axis parallel with base end face, blowing platform vertical direction linear motion axis, blowing platform horizontal direction linear motion axis, the outside of blowing platform vertical direction linear motion axis is connected with the gear of blowing platform two dimension straight line actuating unit, wherein blowing platform two dimension straight line actuating unit is by motor, bearing and gear composition, the termination, inner side of blowing platform horizontal direction linear motion axis is provided with compressed-air atomizer, the top of compressed-air atomizer is fixedly connected with deflection motor, below is provided with reduction valve.Described blowing platform horizontal direction linear motion axis with drip that glue plateau levels direction linear motion axis is corresponding arranges, termination is relative.Described air-compressor set is arranged in base, and air-compressor set is connected with compressed-air atomizer by tracheae.Be provided with at the recess of base and hold Jiao Chi, holding Jiao Chi is " W " type structure, and Rong Jiaochi center is provided with the bossing for installing workpiece, holds surrounding in glue pond and is provided with the recess for collecting the photoresist that is scattered.
A described glue plateau levels direction linear motion axis, blowing platform horizontal direction linear motion axis, pull bar are that concentric is arranged.
The glue device that drips in the present invention drips resist coating to surface of the work, and compressed-air atomizer, to photoresist surface compressed-air blows, controls bondline thickness.Dripping glue platform two dimension straight line actuating unit drives it to drive a glue device to move to target location.Electric rotating machine drives glue-squeezing mechanism to move in the horizontal direction, drives the extruding of glue-squeezing mechanism end to drip glue device outside, extrudes the photoresist being stored in and dripping glue device inside, be dropped in surface of the work.Blowing platform two dimension straight line actuating unit drives it to drive compressed-air atomizer to move to target location.Deflection motor drives compressed-air atomizer to rotate, and adjusts the direction in air port.Tracheae connects air-compressor set and compressed-air atomizer, and the reduction valve be arranged on compressed-air atomizer adjusts the air pressure in air port.
A glue device in the present invention carries out a glue of surface of the work, wherein drip glue platform two dimension straight line actuating unit to drive and drip a glue plateau levels direction linear running axle, drip a glue platform vertical direction linear motion axis and move in the two directions, drive and drip glue device arrival appointed area, drip glue device to be made up of soft material, internal reservoir photoresist, top seals, bottom perforate, it is outside that glue device is dripped in glue-squeezing mechanism compression, and photoresist, along dripping glue device lower through-hole place drippage, makes surface of the work cover one deck photoresist.There is uneven distribution in the photoresist thickness being coated in surface of the work by dripping glue device, the uneven distribution of thickness is by solving to film surface compressed-air blows.Blowing platform horizontal direction linear motion axis, blowing platform vertical direction linear motion axis is driven by blowing platform two dimension straight line actuating unit, drive compressed-air atomizer to appointed area, by tracheae, the pressure gas that air-compressor set produces is imported to compressed-air atomizer, the pressure gas realizing appointed area blows, and deflection motor rotary compression air port adjustment airflow direction is set, the gaseous tension that the reduction valve be connected with gas circuit adjusts gas port is set.
The present invention can realize the uniform gluing of plane, complex-curved structure three-dimensional substrate, has the features such as function is strong, applied range.
Accompanying drawing explanation
Fig. 1 is the front view that photoresist of the present invention blows coating device;
In figure, 1. glue platform two dimension straight line actuating unit 2. glue plateau levels direction linear motion axis 3. glue platform vertical direction linear motion axis 4. electric rotating machine 5. pull bars 6. glue device 7. blowing platform two dimension straight line actuating unit 8. blowing platform horizontal direction linear motion axis 9. blowing platform vertical direction linear motion axis 10. tracheae 11. reduction valve 12. compressed-air atomizer 13. deflection motor 14. air-compressor set 15. hold glue pond 16. base 17. foil gauge 18. workpiece.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described specifically.
Embodiment 1
Fig. 1 is the front view that photoresist of the present invention blows coating device.In FIG, photoresist of the present invention blows coating device, containing the two-dimentional straight line actuating unit 1 of a glue platform, a glue plateau levels direction linear motion axis 2, a glue platform vertical direction linear motion axis 3, electric rotating machine 4, glue-squeezing mechanism, drip glue device 6, the two-dimentional straight line actuating unit 7 of blowing platform, blowing platform horizontal direction linear motion axis 8, blowing platform vertical direction linear motion axis 9, tracheae 10, reduction valve 11, compressed-air atomizer 12, deflection motor 13, air-compressor set 14, appearance glue pond 15, base 16, wherein, glue-squeezing mechanism comprises pull bar 5, foil gauge 17.Its annexation is, described base 16 profile is concavity, and the partial symmetry that base 16 liang side protrudes is arranged.The side that base 16 protrudes is disposed with droplet glue plateau levels direction linear motion axis 2 parallel with base 16 bottom surface, drips glue platform vertical direction linear motion axis 3, the described gear dripping glue plateau levels direction linear motion axis 2, drip straight line actuating unit 1 two-dimentional with a glue platform outside glue platform vertical direction linear motion axis 3 is connected, the central shaft dripping glue plateau levels direction linear motion axis 2 is provided with pull bar 5, the top of pull bar 5 is connected with foil gauge 17, drips glue device 6 and is embedded in the termination, inner side of dripping glue plateau levels direction linear motion axis 2.A glue plateau levels direction linear motion axis 2 is provided with the electric rotating machine 4 for driving pull bar 5.The opposing party that base 16 protrudes is disposed with the blowing platform horizontal direction linear motion axis 8 parallel with base 16 bottom surface, blowing platform vertical direction linear motion axis 9, the outside of blowing platform horizontal direction linear motion axis 8, blowing platform vertical direction linear motion axis 9 is connected with the gear of blowing platform two dimension straight line actuating unit 7, the termination, inner side of blowing platform horizontal direction linear motion axis 8 is provided with compressed-air atomizer 12, the top of compressed-air atomizer 12 is fixedly connected with deflection motor 13, and below is provided with reduction valve 11.Described blowing platform horizontal direction linear motion axis 8 with drip that glue plateau levels direction linear motion axis 2 is corresponding arranges, termination is relative.Described air-compressor set 14 is arranged in base 16, and air-compressor set 14 is connected with compressed-air atomizer 12 by tracheae 10.Be provided with at the recess of base 16 and hold glue pond 15, holding glue pond 15 is " W " type structure, and appearance Jiao Chi 15 center is provided with the bossing for installing workpiece 18, holds surrounding in glue pond 15 and is provided with the recess for collecting the photoresist that is scattered.
A described glue plateau levels direction linear motion axis 2, blowing platform horizontal direction linear motion axis 8, pull bar 5 are that concentric is arranged.Drip glue device 6 and drip resist coating to surface of the work, compressed-air atomizer 12, to photoresist surface compressed-air blows, controls bondline thickness.Dripping glue platform two dimension straight line actuating unit 1 drives it to drive a glue device 6 to move to target location.Electric rotating machine 4 drives pull bar 5 to move in the horizontal direction, drives the extruding of pull bar 5 end to drip glue device 6 outside, extrudes the photoresist being stored in and dripping glue device 6 inside, be dropped in surface of the work.Blowing platform two dimension straight line actuating unit 7 drives it to drive compressed-air atomizer 12 to move to target location.Deflection motor 13 drives compressed-air atomizer 12 to rotate, and adjusts the direction in air port.Tracheae 10 connects air-compressor set 14 and compressed-air atomizer 12, and the reduction valve 11 be arranged on compressed-air atomizer 12 adjusts the air pressure in air port.
Workflow of the present invention is as follows:
A glue plateau levels direction linear motion axis 2 in the present invention, dripping glue platform vertical direction linear motion axis 3 is arranged on base 16, drip glue platform two dimension straight line actuating unit 1 and drive a glue plateau levels direction linear motion axis 2, dripping glue platform vertical direction linear motion axis 3 drives a glue device 6 to move, electric rotating machine 4, pull bar 5 and a glue device 6 are arranged on and drip on glue plateau levels direction linear motion axis 2, electric rotating machine 4 drives pull bar 5 to move in the horizontal direction, the extruding of pull bar 5 end is driven to drip glue device 6 outside, extrude the photoresist being stored in and dripping glue device 6 inside, be dropped in surface of the work, complete after dripping glue, drip the kinematic axis that glue platform two dimension straight line actuating unit 1 drives horizontal and vertical direction, a glue device 6 is driven to shift out directly over workpiece 18.Blowing platform two dimension straight line actuating unit 7 drives the horizontal direction linear motion axis 8 be arranged on base 16, blowing platform vertical direction linear motion axis 9, drive the compressed-air atomizer 12 be arranged on blowing platform horizontal direction linear motion axis 8, deflection motor 13 moves to directly over workpiece, deflection motor 13 drives compressed-air atomizer 12 to rotate, adjust the direction in air port, tracheae 10 connects air-compressor set 14 and compressed-air atomizer 12 to the surperficial compressed-air blows of workpiece 18, and the air pressure in air port is adjusted by the reduction valve 11 be arranged on compressed-air atomizer 12.Holding glue pond 15 to be arranged on base 16, there is " W " type structure, holding glue pond 15 central protuberance part for installing workpiece, holding glue pond 15 surrounding sunk part for collecting unnecessary photoresist.
Claims (2)
1. a photoresist blows coating device, it is characterized in that, described device contains glue platform two dimension straight line actuating unit (1), drip glue plateau levels direction linear motion axis (2), drip glue platform vertical direction linear motion axis (3), electric rotating machine (4), glue-squeezing mechanism, drip glue device (6), blowing platform two dimension straight line actuating unit (7), blowing platform horizontal direction linear motion axis (8), blowing platform vertical direction linear motion axis (9), tracheae (10), reduction valve (11), compressed-air atomizer (12), deflection motor (13), air-compressor set (14), hold Jiao Chi (15), base (16), wherein, glue-squeezing mechanism comprises pull bar (5), foil gauge (17), its annexation is, described base (16) profile is concavity, and the partial symmetry that base (16) two side is protruded is arranged, the side that base (16) protrudes is disposed with droplet glue plateau levels direction linear motion axis (2) parallel with base (16) bottom surface, drip glue platform vertical direction linear motion axis (3), described drips glue plateau levels direction linear motion axis (2), drip glue platform vertical direction linear motion axis (3) outside to be connected with glue platform two dimension straight line actuating unit (1), the central shaft dripping glue plateau levels direction linear motion axis (2) is provided with pull bar (5), the top of pull bar (5) is connected with foil gauge (17), drip glue device (6) and be embedded in the termination, inner side of dripping glue plateau levels direction linear motion axis (2), glue plateau levels direction linear motion axis (2) is provided with the electric rotating machine (4) for driving pull bar (5), the opposing party that base (16) protrudes is disposed with the blowing platform horizontal direction linear motion axis (8) parallel with base (16) bottom surface, blowing platform vertical direction linear motion axis (9), blowing platform horizontal direction linear motion axis (8), the outside of blowing platform vertical direction linear motion axis (9) is connected with blowing platform two dimension straight line actuating unit (7), the termination, inner side of blowing platform horizontal direction linear motion axis (8) is provided with compressed-air atomizer (12), the top of compressed-air atomizer (12) is fixedly connected with deflection motor (13), below is provided with reduction valve (11), described blowing platform horizontal direction linear motion axis (8) with drip that glue plateau levels direction linear motion axis (2) is corresponding arranges, termination is relative, described air-compressor set (14) is arranged in base (16), and air-compressor set (14) is connected with compressed-air atomizer (12) by tracheae (10), be provided with at the recess of base (16) and hold Jiao Chi (15), holding Jiao Chi (15) is " W " type structure, appearance Jiao Chi (15) center is provided with the bossing for installing workpiece (18), and appearance Jiao Chi (15) interior surrounding is provided with the recess for collecting the photoresist that is scattered.
2. blow coating device according to photoresist according to claim 1, it is characterized in that, described glue plateau levels direction linear motion axis (2), blowing platform horizontal direction linear motion axis (8), pull bar (5) are that concentric is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510319642.2A CN104898375A (en) | 2015-06-12 | 2015-06-12 | Photoresist blowing and coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510319642.2A CN104898375A (en) | 2015-06-12 | 2015-06-12 | Photoresist blowing and coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104898375A true CN104898375A (en) | 2015-09-09 |
Family
ID=54031108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510319642.2A Pending CN104898375A (en) | 2015-06-12 | 2015-06-12 | Photoresist blowing and coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104898375A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104267579A (en) * | 2014-09-17 | 2015-01-07 | 中国科学院上海光学精密机械研究所 | Meter-scale raster glass photoresist precision coating method |
| CN105929638A (en) * | 2016-06-30 | 2016-09-07 | 湖北泰晶电子科技股份有限公司 | Ultrasonic photoresist spraying device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10401A (en) * | 1996-06-17 | 1998-01-06 | Tokico Ltd | Coating apparatus |
| JPH10192764A (en) * | 1997-01-14 | 1998-07-28 | Dainippon Printing Co Ltd | Coating device |
| KR20080000986A (en) * | 2006-06-28 | 2008-01-03 | 엘지.필립스 엘시디 주식회사 | Apparatus for depositing photoresist |
| CN101804568A (en) * | 2010-03-19 | 2010-08-18 | 中国电子科技集团公司第二研究所 | Linear motor driven air suspension motion platform |
| CN102285628A (en) * | 2010-06-18 | 2011-12-21 | 王云翔 | Glue spraying device for micro processing of semiconductor and spray coating method for substrate |
| CN202854484U (en) * | 2012-11-02 | 2013-04-03 | 京东方科技集团股份有限公司 | Photoresist coating equipment |
| CN203316340U (en) * | 2013-07-01 | 2013-12-04 | 扬州三星塑胶有限公司 | Coating and air drying device for antistatic sheets |
| CN205038435U (en) * | 2015-06-12 | 2016-02-17 | 中国工程物理研究院激光聚变研究中心 | Photosensitive resist blows scribbles device |
-
2015
- 2015-06-12 CN CN201510319642.2A patent/CN104898375A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10401A (en) * | 1996-06-17 | 1998-01-06 | Tokico Ltd | Coating apparatus |
| JPH10192764A (en) * | 1997-01-14 | 1998-07-28 | Dainippon Printing Co Ltd | Coating device |
| KR20080000986A (en) * | 2006-06-28 | 2008-01-03 | 엘지.필립스 엘시디 주식회사 | Apparatus for depositing photoresist |
| CN101804568A (en) * | 2010-03-19 | 2010-08-18 | 中国电子科技集团公司第二研究所 | Linear motor driven air suspension motion platform |
| CN102285628A (en) * | 2010-06-18 | 2011-12-21 | 王云翔 | Glue spraying device for micro processing of semiconductor and spray coating method for substrate |
| CN202854484U (en) * | 2012-11-02 | 2013-04-03 | 京东方科技集团股份有限公司 | Photoresist coating equipment |
| CN203316340U (en) * | 2013-07-01 | 2013-12-04 | 扬州三星塑胶有限公司 | Coating and air drying device for antistatic sheets |
| CN205038435U (en) * | 2015-06-12 | 2016-02-17 | 中国工程物理研究院激光聚变研究中心 | Photosensitive resist blows scribbles device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104267579A (en) * | 2014-09-17 | 2015-01-07 | 中国科学院上海光学精密机械研究所 | Meter-scale raster glass photoresist precision coating method |
| CN105929638A (en) * | 2016-06-30 | 2016-09-07 | 湖北泰晶电子科技股份有限公司 | Ultrasonic photoresist spraying device |
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| PB01 | Publication | ||
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Application publication date: 20150909 |