CN104880148B - A kind of method of deviation between measurement object - Google Patents
A kind of method of deviation between measurement object Download PDFInfo
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- CN104880148B CN104880148B CN201410070827.XA CN201410070827A CN104880148B CN 104880148 B CN104880148 B CN 104880148B CN 201410070827 A CN201410070827 A CN 201410070827A CN 104880148 B CN104880148 B CN 104880148B
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Abstract
The present invention relates to a kind of method of deviation between measurement object, it is characterised in that has following steps：（a）Utilize the curve of light distribution that light beam of the detector array measurement from light source that multiple bit detectors form is arranged in X-axis；（b）According in step（a）In the obtained curve of light distribution, obtain the curve of light distribution and closed curve that X-axis is surrounded is in the selected reference point i.e. difference of the luminous flux of the both sides of 0 point of X-axis, thus, the deviation between beam center and the reference point of the detector array is determined.
Description
Technical field
The present invention relates to a kind of method of deviation between measurement object, light beam and homalographic line principle is more particularly to utilized to measure
The method of deviation between object.
Background technology
In the past, in many cases, the deviation between object and object was difficult accurately to measure.Accordingly, there exist people
For the problem of measurement difficulty is big, poor real and precision are low.Therefore, current one kind of being badly in need of is according to detecting object（For example, object
A）Intensity distribution calculate the center of object A intensity and detector reference point（For example, object B, and detector is fixed on thing
On body B）Deviation distance method.
The content of the invention
The present invention proposes that its object is to provide one kind using light beam and homalographic line in order to solve above-mentioned problem
The method of deviation between principle measurement object.
In order to achieve the above object, the method that the present invention provides deviation between a kind of measurement object, it is characterised in that have such as
Lower step：
（a）Using arranging light beam of the detector array measurement from light source that multiple bit detectors form in X-axis
The curve of light distribution；
（b）According in step（a）In the obtained curve of light distribution, obtain the curve of light distribution and surrounded with X-axis
Closed curve in selected reference point be 0 point of X-axis both sides luminous flux difference, thus, determine beam center with it is described
Deviation between the reference point of detector array.
In addition, between the measurement object of the present invention in the method for deviation,
In the step（b）In, for M and select N units in the bit detector quantity of the detector array
Detector and N+1 bit detectors along the center line of the line in X-direction and the intersection point of X-axis as the reference point
In the case of,
The luminous flux of the side of the reference point is, the light of the opposite side of the reference point
Flux is,
Wherein, X is thickness of the unit detector along X-direction；H is the width of unit detector；For kth unit
The intensity for the light that detector detects in X*H areas,
It is beam center and the detector array in the light intensity and d for setting h and being detected as N+1 bit detectors
During deviation between the reference point, d is obtained by equation below,
。
And then above-mentioned formula is simplified, equation below can be obtained,
,
Wherein, Sa is area of the closed curve in the side of the reference point, and Sb is the closed curve described
The area of the opposite side of reference point.
According to the method for the present application, can make vibration etc. measurement have it is simple and convenient and approximate in a small range
Spend the characteristics of high.In addition, the principle of the method according to the invention, in the center intensity such as light beam that can determine physical field
Center of the heart, the center of power or fluid etc..
Brief description of the drawings
Fig. 1 is the figure for the hypothesis homalographic line principle for being shown as premise technology of the present invention.
Fig. 2 is the model schematic for showing the light main beam deviation in the present invention.
Fig. 3（a）It is the situation map of deviation when showing static state between detector and light source,（b）It is to show that detector moves
When and light source between dynamic deviation situation map.
Embodiment
Hereinafter, the present invention will be described in detail referring to the drawings.
First, the hypothesis homalographic line principle of the premise technology as the present invention is illustrated.Fig. 1 is to be shown as this
The hypothesis homalographic line schematic diagram of the premise technology of invention.
Arbitrary figure has a centre of form, and the centre of form of symmetric figure is necessarily on centerline.By a full graphics along necessarily
The line that direction is divided into two equal areas is referred to as the homalographic line in this direction.
Homalographic line has the property that：（1）Homalographic line is relevant with direction, if direction determines, then homalographic line
There is uniqueness in this direction；（2）Beeline between homalographic line and the centre of form that direction determines is constant, that is,
Say there is uniqueness as the centre of form, also, its uniqueness is only relevant with the shape of figure；（3）Compared with the calculating of the centre of form,
The calculating simple and fast of homalographic line, also, homalographic line has the characteristics of constant distance with the centre of form, therefore, homalographic line
Change can represent the change of the centre of form.
In this manual, described homalographic line refers both to the homalographic line of specific direction below.
As shown in figure 1, homalographic line graph is made up of the figure Sa and Sb of two equal areas, then area Sa=Sb.Phase
Instead, on assume homalographic line two graphics area Sa ≠ Sb, then it is assumed that homalographic line must with it is real
Homalographic line has a distance i.e. offset distance d, also, offset distance d can be by formula d in the range of an error allows
≈ (Sa-Sb)/2h is obtained, wherein, h is the maximum height value of homalographic line, and graph function is continuous function.As offset distance d
The positive and negative decision for having d=(Sa-Sb)/2h, d when being substantially equal to intrinsic homalographic line assumes homalographic line skew homalographic line
Direction.For example, special case such as rectangle, it is assumed that homalographic line all the time in rectangular internal when, have d=(Sa- all the time
Sb)/2h。
In addition, Fig. 2 is the schematic diagram for the model for showing the light main beam deviation in the present invention.As shown in Fig. 2 with light master
The example that is defined as of beam deviation illustrates to the method for the present invention.Herein, light main beam refers to the maximum point of light intensity.
In fig. 2, for an area source, the light from the area source necessarily may be used after being corrected by a narrow slit
So that all light beams into the narrow slit all fall on the detector array being configured on rear side of the narrow slit, detector array is multiple
Bit detector forms along X-axis arrangement, and each bit detector of detector array receives the light by above-mentioned narrow slit
Beam simultaneously carries out light intensity measure, so as to obtain one in the bounded above main beam light intensity section of X-axis.Also, as shown in Figure 2, this
Individual main beam light intensity section has following feature：
（1）This section has the maximum in Y-axis（The center of beam cross section）, also, decay near beam center
It is slower（The desired positions of approximate calculation）, in XOY reference axis, top is high, both sides 0, has closing area；
（2）This closing area has equivalance area line y ', also, homalographic line one is scheduled on the approximate centerline of light beam,
I.e. the distance of Y ' axles and the centre of form has constancy, and therefore, homalographic line can be considered as light beam approximated centerlines；
（3）This model has high real-time, only relevant with the conversion time of detector array.
In addition, true homalographic line y ' position be light distribution inherently, be unmodifiable.It is assumed that homalographic
Line y position is selected, to be syncopated as area Sa and Sb, that is to say, that 0 point of X-axis can be selected in X-axis（Visiting
The datum mark of the measurement detector and beam center offset distance chosen is surveyed on device array）.So as to by calculating 0 point of X-axis（It is false
Determine homalographic line）The difference of the luminous flux of both sides determines 0 point of X-axis and beam center（True homalographic line）Distance.
Herein, the determination of 0 point of the X-axis of detector array is illustrated.
For example, there are 100 to form detector along X-axis arrangement along the thickness in X-direction for 1mm bit detector
Array, also, be 1 to 100 to bit detector number consecutively.If the intensity distribution of light is in 20 to the 60th bit detectors
On, and peak value is on No. 35 bit detectors, then and the beam center one of this Computing Principle is scheduled on and detector array axle
（That is, X-axis）Vertically and uniquely can be by the line of light intensity curve decile.Due to the maximum that is set to h on light intensity curve and
Bit detector has thickness（That is, the thickness in X-direction）, therefore can for example choose 34 and No. 35 the two bit detectors
Along the line in X-direction center line and X-axis intersection point as calculate reference point（0 point of X-axis）.So, due to reference
Point is selected, and bit detector is along moving for X-axis namely moving for 0 point of X-axis, still, distribution of the light intensity in whole X-axis
Do not change with shape.So during whole measurement, it is only necessary to by calculate 0 both sides of X-axis luminous flux it
Difference just can determine 0 point of distance d apart from beam center of X-axis.
In addition, as described above, in fig. 2, the respective luminous flux in Sa and Sb sides is identified below,
The luminous flux of Sa sides is,
The luminous flux of Sb sides is,
In above-mentioned formula, X is thickness of the unit detector along X-direction；H is the width of unit detector（It is in fig. 2
Width in a direction perpendicular to the plane of the paper）；The intensity of the light detected for kth bit detector in X*H areas.This
Outside, if h is the light intensity that No. 35 bit detector detects.
Further, since the narrower in width of bit detector, then light beam is considered as one uniformly on bit detector
The smooth surface body of width.Had according to hypothesis homalographic line principle：
,
And then。
As described above, the distance d at 0 off-beams center of X-axis can be obtained.
（The principle of equal effects of light main beam deviation calculates with simplifying）
, the characteristics of main beam has top wider and be gentle, therefore, can be in area according to the analysis to the model shown in Fig. 2
Between the main beam section-top of reality is equivalent to rectangle on [a, b], equivalent principle is to be provided simultaneously with following 2 points：
（1）Area=equivalent rectangular area on section [a, b]；
（2）True light intensity homalographic line is not changed before and after equivalent.
Herein, using above-mentioned hypothesis homalographic line principle, the distance d of 0 point of true light intensity homalographic line of skew of X-axis coordinate
With equation below（1）Show,
d≈（Sa-Sb）/2h ………… （1）,
Wherein, the direction of d positive negative indication skew, in addition, h can be by obtaining the maximum intensity data value of beam cross section
Calculated in real time with the error range of permission.
（The error source of light main beam deviation computation model and advantage）
The source of calculation error mainly has：（1）Caused the product of areal calculation by the thickness effect of unit detector array
Divide error；（2）The rectangular caused real contour line and h difference selected influences in homalographic equivalent process.
In addition, mainly have the following advantages：Because the collection to light source is fast illuminated, so, it is not necessary within a certain period of time
Constant light source, light source is not required；Deviation calculating is only relevant with the conversion time of bit detector, therefore, if light source
The luminous energy sent at that time is measured intensity；Near main beam there is powerful calculating to disappear poor ability.
（Use the dynamic deviation situation of X-ray source checking optical light source and detector）
X ray on the mobile apparatus has transmitting and receives this two parts, and the two parts are difficult in moving process
It is about 5mm thickness with synchronization and detector, passes through the method for the present invention, when the transmitting and reception of X ray are not moved, main beam
Dynamic deviation with detector is ± 0.15mm, that is to say, that measurement error is ± 0. 15mm, upon displacement, main beam and detection
The dynamic deviation of device is ± 1.4mm, Fig. 3（a）It is the situation map of deviation when showing static state between detector and light source,（b）It is
The situation map of dynamic deviation when detector moves between light source is shown, in Fig. 3（a）And Fig. 3（b）In, transverse axis is the time（It is single
Position：2.5ms）, the longitudinal axis is offset amplitude（Unit：mm）.
Pass through the method for the present invention, it is easy to fine measurement is carried out by larger master scale.Mark in this example
Quasi- scale is the thickness of detector（5mm）, the value precision calculated is but ± 0.15mm.Because some that the present invention has are special
Advantage, so, it will be with a wide range of applications in fields such as the dynamic measurements such as vibration.
As described above, to using light beam and homalographic line principle come the reference point on measuring beam center and detector array
The situation of deviation distance be illustrated, still, the present invention is not limited thereto, also the method for the present invention can be applied into power
Center or fluid center etc. measurement.That is, as long as detector array measurement output or fluid can be utilized
Deng the distribution in the X-direction of detector array, it becomes possible to as described above using homalographic line principle obtain power or
The center of person's fluid.
Claims (2)
1. a kind of method of deviation between measurement object, it is characterised in that there are following steps：
（a）Utilize the light intensity that light beam of the detector array measurement from light source that multiple bit detectors form is arranged in X-axis
Distribution curve；
（b）According in step（a）In the obtained curve of light distribution, obtain the envelope that the curve of light distribution is surrounded with X-axis
Closed curve is the difference of the luminous flux of the both sides of 0 point of X-axis in selected reference point, thus, determines beam center and the detection
Deviation between the reference point of device array.
2. the method for deviation between object is measured as claimed in claim 1, it is characterised in that
In the step（b）In, for M and select the detection of N units in the bit detector quantity of the detector array
The feelings along the center line of the line in X-direction and the intersection point of X-axis as the reference point of device and N+1 bit detectors
Under condition,
The luminous flux of the side of the reference point is, the luminous flux of the opposite side of the reference point is,
Wherein, X is thickness of the unit detector along X-direction；H is the width of unit detector；For kth bit detector
The intensity of the light detected in X*H areas,
The light intensity and d for setting h and being detected as N+1 bit detectors be beam center with described in the detector array
During deviation between reference point, d is obtained by equation below,
。
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102023306A (en) * | 2009-09-11 | 2011-04-20 | 同方威视技术股份有限公司 | Accelerator dosage monitoring device, correction method and method for monitoring offset of accelerator target spot P |
| CN102073125A (en) * | 2009-11-24 | 2011-05-25 | 西安华科光电有限公司 | Method and system for applying linear array CCD (Charge Coupled Device) to laser focusing |
| CN102141373A (en) * | 2010-12-15 | 2011-08-03 | 中国科学院等离子体物理研究所 | Light spot center real-time detection system and detection method |
| CN102162718A (en) * | 2009-12-31 | 2011-08-24 | 中国工程物理研究院流体物理研究所 | Device and method for measuring spatial free attitude of rigid object, and method for analyzing data |
| CN103163741A (en) * | 2011-12-14 | 2013-06-19 | 上海微电子装备有限公司 | A measurement method for the optimum position of a variable gap of a lithographic machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0519599D0 (en) * | 2005-09-26 | 2005-11-02 | Imp College Innovations Ltd | Photovoltaic cells |
-
2014
- 2014-02-28 CN CN201410070827.XA patent/CN104880148B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102023306A (en) * | 2009-09-11 | 2011-04-20 | 同方威视技术股份有限公司 | Accelerator dosage monitoring device, correction method and method for monitoring offset of accelerator target spot P |
| CN102073125A (en) * | 2009-11-24 | 2011-05-25 | 西安华科光电有限公司 | Method and system for applying linear array CCD (Charge Coupled Device) to laser focusing |
| CN102162718A (en) * | 2009-12-31 | 2011-08-24 | 中国工程物理研究院流体物理研究所 | Device and method for measuring spatial free attitude of rigid object, and method for analyzing data |
| CN102141373A (en) * | 2010-12-15 | 2011-08-03 | 中国科学院等离子体物理研究所 | Light spot center real-time detection system and detection method |
| CN103163741A (en) * | 2011-12-14 | 2013-06-19 | 上海微电子装备有限公司 | A measurement method for the optimum position of a variable gap of a lithographic machine |
Non-Patent Citations (3)
| Title |
|---|
| 一种四象限光电定向装置的实现;徐晓英等;《大学物理实验》;19961231;第9卷(第4期);第46页第1-2段，第47页第1-10段，图2 * |
| 二维平面光电跟踪瞄准系统的设计;夏江涛等;《弹箭与制导学报》;20091031;第29卷(第5期);200-203 * |
| 激光光斑中心位置的探测;张强等;《北京机械工业学院学报》;19961231;第11卷(第2期);24-29 * |
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