CN104865760B - Mems switch device, array base palte and preparation method thereof and display device - Google Patents
Mems switch device, array base palte and preparation method thereof and display device Download PDFInfo
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- CN104865760B CN104865760B CN201510346535.9A CN201510346535A CN104865760B CN 104865760 B CN104865760 B CN 104865760B CN 201510346535 A CN201510346535 A CN 201510346535A CN 104865760 B CN104865760 B CN 104865760B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
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- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses the driving method of a kind of mems switch device, array base palte and preparation method thereof, display device and mems switch device, display device can flexibly switch in transmission mode, reflective-mode and semi-transparent semi-reflecting pattern, to meet the display demand of different scenes.Mems switch device includes light valve component and switch element, and light valve component includes：The first induction electrode perpendicular to light transmission direction；Parallel to second induction electrode in light transmission direction；It is covered in the first induction electrode and the second induction electrode, and the insulating barrier that the first induction electrode and the second induction electrode are dielectrically separated from；Positioned at the first induction electrode and the anchor portion of the second induction electrode intersection；The moving grating being connected with anchor portion, moving grating can reflection environment light or front located light source are sent when having angle with the second induction electrode light；When applying voltage of electric field to light valve component, light valve component works in transmission mode, reflective-mode or semi-transparent semi-reflecting pattern.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of MEMS (Micro-electromechanical
System, microelectromechanical systems) switching device, array base palte and preparation method thereof, display device and mems switch device
Driving method.
Background technology
Liquid crystal display device is different according to the light source of use, can be divided into transmission-type, reflective and Transflective.Wherein,
For transmission liquid crystal display device using backlight as light source, advantage is that bright image can be shown under dark environment, but is lacked
Point be permeable light account for backlight transmitting light ratio it is smaller, power consumption is higher；Reflective LCD device is with preposition
Light source or environment light source use metal or other material layers with good reflection characteristic as light source on its array base palte
As echo area, so as to which the reflection of the light of front located light source or environment light source is come into display image, its advantage is to utilize
As light source, power consumption is relatively low for front located light source or environment light source, but shortcoming be due to can not to the dependence of external light source
Display image in the dark；Semitransparent semi-reflective liquid crystal display device can then be considered as transmission liquid crystal display device and reflection type liquid crystal
The combination of display device, echo area is both provided with array base palte, is provided with transmission area again, can simultaneously using backlight with
And external light source is shown.
With the development of MEMS technology, show at present in product and have started to replace liquid crystal layer using mems switch device, lead to
Mems switch device is crossed to control the transmission of backlight.Compared to traditional liquid crystal display device, this display device can be carried significantly
Bloom efficiency, so as to reduce the power consumption of display device and manufacturing cost.
In current MEMS display fields, it is aobvious not occur three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern also
Show the display device that pattern can flexibly switch.
The content of the invention
The purpose of the embodiment of the present invention is to provide a kind of mems switch device, array base palte and preparation method thereof, display dress
The driving method with mems switch device is put, display device can be in three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern
Flexibly switch under display pattern, to meet the display demand of different scenes.
The embodiments of the invention provide a kind of mems switch device, including light valve component and switch element, wherein：
The light valve component includes：The first induction electrode perpendicular to light transmission direction；Parallel to the of light transmission direction
Two induction electrodes；First induction electrode and the second induction electrode are covered in, and first induction electrode and second are felt
The insulating barrier for answering electrode insulation to isolate；Positioned at first induction electrode and the anchor portion of the second induction electrode intersection；With institute
State anchor portion connection moving grating, the moving grating can when there is angle with the second induction electrode reflection environment light or preceding
Put the light that light source is sent；
When circuit system applies voltage of electric field by the switch element to the light valve component, the light valve component work
Make in transmission mode, reflective-mode or semi-transparent semi-reflecting pattern.
In the technical scheme of the embodiment of the present invention, when circuit system is different to light valve component application by switch element
During voltage of electric field, the moving grating of light valve component is also corresponding to the angle of the first induction electrode to be changed, so as to so that light valve is first
Part works in transmission mode, reflective-mode or semi-transparent semi-reflecting pattern.The design of the mems switch device is applied to display device
And appropriate SECO is given, display device can be made in three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern displays
Flexibly switch under pattern, to meet the display demand of different scenes.In addition, the light-emitting window of the mems switch device of the structure design
Area is larger, and therefore, the display effect of display device is also preferable.In addition, display device sets liquid crystal to control without other
Light-operated amount, cost are relatively low.
Optionally, the anchor portion is pivot, and the moving grating is pivotally connected with the pivot；Or the anchor portion is
Spring, the moving grating are fixedly connected with one end of the spring.Both structure types are simple, reliable.
Preferably, the switch element includes two set by corresponding first induction electrode and the second induction electrode respectively
Thin film transistor (TFT).
Optionally, the material of first induction electrode is that transparent conductive metal or electrically conducting transparent are nonmetallic, described second
The material of induction electrode and moving grating is opaque conducting metal or opaque conductive non-metals.
The embodiment of the present invention additionally provides a kind of MEMS array substrate, including：Underlay substrate, and positioned at underlay substrate it
Multiple mems switch devices as described in foregoing any technical scheme that are upper and being arranged in array.By the MEMS array substrate application
In display device and appropriate SECO is given, display device can be in transmission mode, reflective-mode and semi-transparent semi-reflecting pattern
Flexibly switch under three kinds of display patterns, to meet the display demand of different scenes.
The embodiment of the present invention additionally provides a kind of display device, including back lighting device, on front side of the back lighting device
MEMS array substrate as described in preceding solution, and the color membrane substrates on front side of the MEMS array substrate.Display
Device can flexibly switch under three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern display patterns, to meet different fields
The display demand of scape, and display effect is also preferable.
The embodiment of the present invention additionally provides a kind of method for making MEMS array substrate, is included on underlay substrate and makes
Light valve component and switch element, wherein, the light valve component that made on underlay substrate comprises the following steps：
The first induction electrode perpendicular to light transmission direction is formed on underlay substrate；
The first insulating barrier is formed on the figure layer of the first induction electrode；
Second induction electrode in light transmission direction is formed in parallel with the first insulating barrier；
The second insulating barrier is formed on the figure layer of the second induction electrode；
Anchor portion is assembled in the intersection of the first induction electrode and the second induction electrode；
The moving grating being connected with anchor portion is formed on the second insulating barrier.
The MEMS array substrate that will be made using this method is applied to display device and give appropriate SECO, can be with
Display device is set flexibly to switch under three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern display patterns, to meet difference
The display demand of scene.
Optionally, the material of first induction electrode is that transparent conductive metal or electrically conducting transparent are nonmetallic, described second
The material of induction electrode and moving grating is opaque conducting metal or opaque conductive non-metals.
The embodiment of the present invention additionally provides a kind of driving method of mems switch device, including：
To the second induction electrode apply the first bias voltage, to moving grating apply ground voltage or with the first bias voltage
Opposite polarity second bias voltage, makes the light valve component work in transmission mode；Or
To the first induction electrode apply the first bias voltage, to moving grating apply ground voltage or with the first bias voltage
Opposite polarity second bias voltage, makes the light valve component work in reflective-mode；Or
Apply the 3rd bias voltage to the first induction electrode or the second induction electrode, to moving grating apply ground voltage or
Second bias voltage opposite with the 3rd bias voltage polarity, the light valve component is set to work in semi-transparent semi-reflecting pattern, described
Three bias voltages are less than first bias voltage.
Preferably, first bias voltage is 5V, the 3rd bias voltage is 2V.
It can be seen that need to only change the voltage of electric field applied to light valve component, the mode of operation of light valve component can be switched, carried out
Luminous flux controls.
Brief description of the drawings
Fig. 1 is that the MEMS array substrate of the embodiment of the present invention is in transmission mode schematic diagram；
Fig. 2 is that the MEMS array substrate of the embodiment of the present invention is in reflective-mode schematic diagram；
Fig. 3 is that the MEMS array substrate of the embodiment of the present invention is in semi-transparent semi-reflecting pattern diagram；
Fig. 4 is the electrical block diagram of the MEMS array substrate of the embodiment of the present invention；
Fig. 5 is that the display device of the embodiment of the present invention is in reflective-mode schematic diagram；
Fig. 6 is the preparation method schematic flow sheet of MEMS array substrate of the embodiment of the present invention.
Reference：
20-MEMS switching devices；
21- light valve components；
22- switch elements；
The induction electrodes of 211- first；
The induction electrodes of 212- second；
213- insulating barriers；
214- anchor portions；
215- moving gratings；
10- underlay substrates；
100- back lighting devices；
200-MEMS array base paltes；
300- color membrane substrates；
30- scan lines；
40- data wires.
Embodiment
In order to meet the display demand of different scenes, allow display device in transmission mode, reflective-mode and semi-transparent half
Flexibly switch under three kinds of display patterns of anti-pattern, the embodiments of the invention provide a kind of mems switch device, array base palte and its
The driving method of preparation method, display device and mems switch device.To make the object, technical solutions and advantages of the present invention more
It is clear, the present invention is described in further detail by the following examples.
As shown in Figures 1 to 4, mems switch device 20 provided in an embodiment of the present invention (Fig. 1 into Fig. 3, underlay substrate 10
Top only illustrates 4 mems switch devices), including light valve component 21 and switch element 22, wherein：
Light valve component 21 includes：The first induction electrode 211 perpendicular to light transmission direction；Parallel to the of light transmission direction
Two induction electrodes 212；It is covered in the first induction electrode 211 and the second induction electrode 212, and by the first induction electrode 211 and
The insulating barrier 213 that two induction electrodes 212 are dielectrically separated from；Positioned at the first induction electrode 211 and the intersection of the second induction electrode 212
Anchor portion 214；The moving grating 215 being connected with anchor portion 214, moving grating 215 can have folder with the second induction electrode 212
The light that reflection environment light or front located light source are sent during angle；
When circuit system (not shown) applies voltage of electric field by switch element 22 to light valve component 21, light valve member
Part 21 works in transmission mode, reflective-mode or semi-transparent semi-reflecting pattern.
Switch element 22 is specifically as follows thin film transistor (TFT).In mems switch device, thin film transistor (TFT) can be two,
Correspond to respectively set by the first induction electrode 211 and the second induction electrode 212.
Optionally, the material of the first induction electrode 211 is that transparent conductive metal or electrically conducting transparent are nonmetallic, such as can be adopted
With materials such as tin indium oxides, the material of the second induction electrode 212 and moving grating 215 is opaque conducting metal or opaque leads
Electricity is nonmetallic, such as can use the materials such as copper, silver.
As shown in figure 1, when applying the first bias voltage (such as 5V voltages) to the second induction electrode 212, to moving grating
When 215 application ground voltages or second bias voltage opposite with the first bias voltage polarity (such as -5V voltages), moving grating
215 under electric field driven, and it is in parallel to be that fixing end turns to the second induction electrode 212 with anchor portion 214, now transmitted light
Light valve component can be passed, light valve component works in transmission mode.
As shown in Fig. 2 when applying the first bias voltage (such as 5V voltages) to the first induction electrode 211, to moving grating
When 215 application ground voltages or second bias voltage opposite with the first bias voltage polarity (such as -5V voltages), moving grating
215 under electric field driven, and it is in parallel to be that fixing end turns to the first induction electrode 211 with anchor portion 214, now ambient light
Or the light that front located light source is sent can reflect in the upper surface of moving grating 215, light valve component works in reflective-mode.
As shown in figure 3, when applying the 3rd bias voltage to the first induction electrode 211 or the second induction electrode 212, (the 3rd is inclined
Put voltage and should be less than the first bias voltage, for example, 2V voltages), apply ground voltage to moving grating 215 or biased with the 3rd
During opposite the second bias voltage of polarity of voltage, moving grating 215 is fixing end rotation with anchor portion 214 under electric field driven
Certain angle, such as 45 degree of rotation, now, because moving grating 215 is in half-open half closed state, transmitted light can pass light valve
Element, and the light that ambient light or front located light source are sent can also reflect in the upper surface of moving grating 215, so that light valve is first
Part works in semi-transparent semi-reflecting pattern.
It can be seen that need to only change the voltage of electric field applied to light valve component, the mode of operation of light valve component can be switched, carried out
Luminous flux controls.
In embodiment provided by the present invention, moving grating 215 can be solid with anchor portion 214 under electric field driven
Fixed end is rotated, and the concrete structure of anchor portion 214 is unlimited, for example, anchor portion 214 is pivot, moving grating 215 is pivotally connected with pivot；
Or anchor portion 214 is spring, moving grating 215 is fixedly connected with one end of spring, and both structure types are simple, reliable.
In the technical scheme of the embodiment of the present invention, when circuit system is applied not by switch element 22 to light valve component 21
With voltage of electric field when, also corresponding change (can be with for the angle of the moving grating 215 of light valve component 21 and the first induction electrode 211
Understand, moving grating 215 corresponding can also change to the angle of the second induction electrode 212), so as to so that the work of light valve component 21
Make in transmission mode, reflective-mode or semi-transparent semi-reflecting pattern.The design of the mems switch device 20 is applied to display device simultaneously
Appropriate SECO is given, display device can be made in three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern display moulds
Flexibly switch under formula, to meet the display demand of different scenes.In addition, the light-emitting window of the mems switch device 20 of the structure design
Area is larger, and therefore, the display effect of display device is also preferable.In addition, display device sets liquid crystal to control without other
Light-operated amount, cost are relatively low.
Can be with continued reference to shown in Fig. 1 to Fig. 4, the embodiment of the present invention additionally provides a kind of MEMS array substrate, including：Substrate
Substrate 10, and on underlay substrate 10 and multiple mems switch devices as in the foregoing embodiment for being arranged in array
20.That is each MEMS opens the light a sub-pixel unit of the corresponding display device of device 20.It should be understood that on array base palte also
The one group of scan line 30 and one group of data wire 40 of the oriented transmission signal of switch element 22 are set.The circuit structure of the array base palte shows
It is intended to as shown in Figure 4.The MEMS array substrate is applied to display device and gives appropriate SECO, display device can be with
Flexibly switch under three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern display patterns, to meet the display of different scenes
Demand.
As shown in figure 5, the embodiment of the present invention additionally provides a kind of display device, including back lighting device 100, fill positioned at backlight
Put the MEMS array substrate 200 as in the foregoing embodiment of 100 front sides, and the coloured silk positioned at the front side of MEMS array substrate 200
Ilm substrate 300.
The light valve component of the mems switch device patten transformation control per minute for carrying out thousands of times on MEMS array substrate,
Controlled by the pulse sequence that patten transformation is carried out to mems switch device, the GTG that can carry out pixel controls and fills display
Transmission mode, reflective-mode or semi-transparent semi-reflecting pattern can be operated in by putting.For example, when control light valve component is in transmission mode
When state is more than reflective-mode state, display device is operated in transmission mode.When control light valve component is in the shape of reflective-mode
When state is more than transmission mode state, display device is operated in reflective-mode., can when controlling light valve component to be in semi-transparent semi-reflecting state
With the rotational angle progress fader control by controlling moving grating, so that display device is operated in semi-transparent semi-reflecting pattern.
It can be seen that the display device that the embodiment of the present invention is provided can be in transmission mode, reflective-mode and semi-transparent semi-reflecting mould
Flexibly switch under three kinds of display patterns of formula, to meet the display demand of different scenes, and display effect is also preferable.
The embodiment of the present invention additionally provides a kind of driving method of mems switch device, including：
To the second induction electrode apply the first bias voltage, to moving grating apply ground voltage or with the first bias voltage
Opposite polarity second bias voltage, makes light valve component work in transmission mode；Or
To the first induction electrode apply the first bias voltage, to moving grating apply ground voltage or with the first bias voltage
Opposite polarity second bias voltage, makes light valve component work in reflective-mode；Or
Apply the 3rd bias voltage to the first induction electrode or the second induction electrode, to moving grating apply ground voltage or
Second bias voltage opposite with the 3rd bias voltage polarity, light valve component is set to work in semi-transparent semi-reflecting pattern, the 3rd biased electrical
Pressure is less than the first bias voltage.
Preferably, the first bias voltage is 5V, the 3rd bias voltage is 2V.
It it can be seen that using this method, need to only change the voltage of electric field applied to light valve component, the work of light valve component can be switched
Operation mode, carry out luminous flux control.
As shown in fig. 6, the embodiment of the present invention additionally provides a kind of method for making MEMS array substrate, it is included in substrate base
Light valve component and switch element are made on plate, wherein, making light valve component comprises the following steps on underlay substrate：
Step 101, first induction electrode of the formation perpendicular to light transmission direction on underlay substrate；
Step 102, the first insulating barrier is formed on the figure layer of the first induction electrode；
Step 103, the second induction electrode for being formed in parallel with the first insulating barrier light transmission direction；
Step 104, the second insulating barrier is formed on the figure layer of the second induction electrode；
Step 105, the intersection of the first induction electrode and the second induction electrode assemble anchor portion；
Step 106, the moving grating being connected with anchor portion is formed on the second insulating barrier.
The step of making switch element (such as thin film transistor (TFT)), can be same as the prior art.Optionally, the first induced electricity
The material of pole is that transparent conductive metal or electrically conducting transparent are nonmetallic, and the material of the second induction electrode and moving grating is led to be opaque
Electric metal or opaque conductive non-metals.In the embodiment shown in Fig. 1 to Fig. 3, insulating barrier 213 has specifically included step 102
Formed in the first insulating barrier and the second insulating barrier formed in step 104.
The MEMS array substrate that will be made using this method is applied to display device and give appropriate SECO, can be with
Display device is set flexibly to switch under three kinds of transmission mode, reflective-mode and semi-transparent semi-reflecting pattern display patterns, to meet difference
The display demand of scene.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
- A kind of 1. mems switch device, it is characterised in that including light valve component and switch element, wherein：The light valve component includes：The first induction electrode perpendicular to light transmission direction；Parallel to second sense in light transmission direction Answer electrode；It is covered in first induction electrode and the second induction electrode, and by first induction electrode and the second induced electricity The insulating barrier that pole is dielectrically separated from；Positioned at first induction electrode and the anchor portion of the second induction electrode intersection；With the anchor Determine portion connection moving grating, the moving grating can when there is angle with the second induction electrode reflection environment light or preposition light The light that source is sent；When circuit system applies voltage of electric field by the switch element to the light valve component, the light valve component works in Transmission mode, reflective-mode or semi-transparent semi-reflecting pattern.
- 2. mems switch device as claimed in claim 1, it is characterised in that the anchor portion is pivot, the moving grating It is pivotally connected with the pivot；Or the anchor portion is spring, the moving grating is fixedly connected with one end of the spring.
- 3. mems switch device as claimed in claim 1, it is characterised in that the switch element includes corresponding to the first sense respectively Answer electrode and two thin film transistor (TFT)s set by the second induction electrode.
- 4. the mems switch device as described in any one of claims 1 to 3, it is characterised in that the material of first induction electrode Matter is that transparent conductive metal or electrically conducting transparent are nonmetallic, and the material of second induction electrode and moving grating is opaque conduction Metal or opaque conductive non-metals.
- A kind of 5. MEMS array substrate, it is characterised in that including：Underlay substrate, and on underlay substrate and be in array Multiple mems switch devices as described in any one of Claims 1 to 4 of arrangement.
- A kind of 6. display device, it is characterised in that including back lighting device and on front side of the back lighting device such as claim 5 Described MEMS array substrate, and the color membrane substrates on front side of the MEMS array substrate.
- A kind of 7. method for making MEMS array substrate as claimed in claim 5, it is characterised in that be included on underlay substrate Light valve component and switch element are made, wherein, the light valve component that made on underlay substrate comprises the following steps：The first induction electrode perpendicular to light transmission direction is formed on underlay substrate；The first insulating barrier is formed on the figure layer of the first induction electrode；Second induction electrode in light transmission direction is formed in parallel with the first insulating barrier；The second insulating barrier is formed on the figure layer of the second induction electrode；Anchor portion is assembled in the intersection of the first induction electrode and the second induction electrode；The moving grating being connected with anchor portion is formed on the second insulating barrier.
- 8. method as claimed in claim 7, it is characterised in that the material of first induction electrode be transparent conductive metal or Electrically conducting transparent is nonmetallic, and the material of second induction electrode and moving grating is non-for opaque conducting metal or opaque conduction Metal.
- A kind of 9. driving method of any one of Claims 1 to 4 mems switch device, it is characterised in that including：To the second induction electrode apply the first bias voltage, to moving grating apply ground voltage or with the first bias voltage polarity The second opposite bias voltage, makes the light valve component work in transmission mode；OrTo the first induction electrode apply the first bias voltage, to moving grating apply ground voltage or with the first bias voltage polarity The second opposite bias voltage, makes the light valve component work in reflective-mode；OrApply the 3rd bias voltage to the first induction electrode or the second induction electrode, apply ground voltage or with the to moving grating The second opposite bias voltage of three bias voltage polarities, makes the light valve component work in semi-transparent semi-reflecting pattern, the described 3rd is inclined Put voltage and be less than first bias voltage.
- 10. driving method as claimed in claim 9, it is characterised in that first bias voltage is 5V, the 3rd biasing Voltage is 2V.
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| CN105161022B (en) * | 2015-10-22 | 2018-02-06 | 厦门天马微电子有限公司 | Display and preparation method thereof |
| CN109073898A (en) | 2016-03-01 | 2018-12-21 | 奇跃公司 | For by the reflex switch equipment of the light input waveguide of different wave length |
| CN106125294B (en) * | 2016-08-30 | 2019-05-07 | 深圳市华星光电技术有限公司 | A kind of MEMS substrate, the display unit comprising MEMS substrate and intelligent display mirror |
| CN106292088B (en) * | 2016-09-07 | 2019-12-31 | 武汉华星光电技术有限公司 | Chroma control light valve and display panel |
| CN109799607A (en) * | 2019-04-02 | 2019-05-24 | 华域视觉科技(上海)有限公司 | Back drives transmission-type MEMS chip, MEMS lighting system and automobile |
| CN109814252A (en) * | 2019-04-02 | 2019-05-28 | 华域视觉科技(上海)有限公司 | Transmission-type MEMS chip, MEMS lighting system and automobile |
| CN114360385B (en) * | 2022-01-14 | 2023-10-31 | Oppo广东移动通信有限公司 | Display device, manufacturing method thereof, shell assembly and electronic equipment |
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| CN102246090A (en) * | 2008-12-12 | 2011-11-16 | 索尼爱立信移动通讯有限公司 | Transflective liquid crystal display with adjustable reflector |
| WO2014105823A1 (en) * | 2012-12-28 | 2014-07-03 | Pixtronix, Inc. | Electromechanical systems color transflective display apparatus |
| WO2015037651A1 (en) * | 2013-09-13 | 2015-03-19 | シャープ株式会社 | Light-diffusing member and display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1875316A (en) * | 2003-10-31 | 2006-12-06 | 索尼爱立信移动通讯股份有限公司 | Dual mode liquid crystal display comprising a switchable microelectromechanical mirror array |
| CN1725067A (en) * | 2004-07-23 | 2006-01-25 | 元太科技工业股份有限公司 | Micro-electromechanical structure display unit |
| CN102246090A (en) * | 2008-12-12 | 2011-11-16 | 索尼爱立信移动通讯有限公司 | Transflective liquid crystal display with adjustable reflector |
| WO2014105823A1 (en) * | 2012-12-28 | 2014-07-03 | Pixtronix, Inc. | Electromechanical systems color transflective display apparatus |
| WO2015037651A1 (en) * | 2013-09-13 | 2015-03-19 | シャープ株式会社 | Light-diffusing member and display device |
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