CN109799607A - Back drives transmission-type MEMS chip, MEMS lighting system and automobile - Google Patents
Back drives transmission-type MEMS chip, MEMS lighting system and automobile Download PDFInfo
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- CN109799607A CN109799607A CN201910263831.0A CN201910263831A CN109799607A CN 109799607 A CN109799607 A CN 109799607A CN 201910263831 A CN201910263831 A CN 201910263831A CN 109799607 A CN109799607 A CN 109799607A
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Abstract
This application discloses a kind of back to drive transmission-type MEMS chip, MEMS lighting system and automobile, is related to the technical field of intelligent lighting, to solve the bad technical problem of lighting effect in the prior art.It includes packaging frame and driving mechanism that the back of the application, which opens transmission-type MEMS chip, packaging frame is equipped with light transmission passage and micro- light-blocking chip arrays, micro- light-blocking chip arrays include at least first micro- light barrier group and second micro- light barrier group, wherein, when first micro- light barrier group and second micro- light barrier group are in straightened condition, micro- light barrier in micro- light barrier and second micro- light barrier group in first micro- light barrier group has upper and lower overlapping part；When first micro- light barrier group and second micro- light barrier group are in bending state, the curved end and second micro- light barrier group curved end of first micro- light barrier group are located at the two sides of packaging frame top surface.Therefore the application has the advantages that lighting effect is good.
Description
Technical field
This application involves the technical fields of lighting fixture, open transmission-type MEMS chip, MEMS in particular to a kind of back
Lighting system and automobile.
Background technique
MEMS, that is, MEMS (full name in English: Micro Electromechanical System), it refers to by half
Conductor material or other controllable micro mechanical structure systems constituted suitable for micro-machined material.It is a kind of size in several millis
The smaller high-tech device of meter Nai Zhi, internal structure are generally an independent intelligence systems in micron even nanometer scale.
Currently, the MEMS chip that illumination uses is with the saturating of DLP (Digital Light Processing, digital light processing)
Penetrating formula scheme is mainstream, also there is that individually micro- light barrier does the scheme scanned by twin shaft.These schemes have its limitation: DLP
Optical system it is complicated, the utilization rate of light source is low；The scheme of single mirror twin shaft scanning can make integral illumination if it is progressive scan
Intensity is lower；If it is appropriate scanning, the resolution ratio of imaging is just limited, is not suitable for the illumination of whole area source.Transmission-type
MEMS chip be able to solve above-mentioned limitation, simple optical system can be used, accomplish high light source utilization rate, and its
The scheme of array is very suitable to the illumination of whole area source.
In the prior art, in micro- light-blocking chip arrays of the MEMS chip of transmission-type, in micro- light-blocking chip arrays, adjacent rows it
Between spacing it is equal, and in existing micro- light-blocking chip arrays each micro- light barrier bending direction, that is, opening direction it is identical and each
There are gaps between a micro- light barrier, and light leakage phenomena can occur after light transmission crosses micro- light-blocking chip arrays, generate bright line
Apparent "cut-off"line is seen, so that lighting effect is bad.
Summary of the invention
A kind of carry on the back that be designed to provide of the application opens transmission-type MEMS chip, to solve lighting effect in the prior art
Bad technical problem.
The another object of the application is to provide a kind of MEMS lighting system, to solve lighting effect in the prior art not
Good technical problem.
The another object of the application is to provide a kind of automobile, to solve the bad technology of lighting effect in the prior art
Problem.
The above-mentioned technical problem of the application is mainly to be addressed by following technical proposals:
A kind of back opens transmission-type MEMS chip, including packaging frame and driving mechanism, opens on the top surface of the packaging frame
Equipped with light transmission passage, micro- light-blocking chip arrays for opening or closing light transmission passage are connected on the packaging frame, it is described micro-
Light-blocking chip arrays include micro- light barrier of multiple array arrangements, and the driving mechanism is connect with micro- light-blocking chip arrays, and
For driving each micro- light barrier bending；
The both ends of each micro- light barrier are respectively fixing end and free end, and the fixing end is fixed on the packaging frame
On, the free end can form curved end after driving mechanism driving micro- light barrier bending；
Micro- light-blocking chip arrays include at least first micro- light barrier group and second micro- light barrier group, wherein in institute
First micro- light barrier group is stated and when second micro- light barrier group is in straightened condition, in first micro- light barrier group
Micro- light barrier there is upper and lower overlapping part with micro- light barrier in described second micro- light barrier group；
When described first micro- light barrier group and second micro- light barrier group are in bending state, described first
The curved end of micro- light barrier group and second micro- light barrier group curved end are located at the two sides of the packaging frame top surface.
The mirror surface that driving mechanism is used to enable movable micro- light barrier rotates or is translatable, to reach using micro- light-blocking
Chip arrays open or close the effect of light transmission passage.And the driving method of driving mechanism includes but is not limited to electrostatic, magnetic force, electricity
Stream, electric heating, piezoelectricity or temperature.Driving mechanism is individually to be controlled each micro- light barrier, it can be achieved that at single pixel point
The independent control of light transmission state to neatly adjust illumination light type, and realizes that the illumination of high pixel is shown.Wherein, first
Two micro- light barriers are included at least in a micro- light barrier group.Two micro- light barriers are included at least in second micro- light barrier group.
The state that bending state, that is, each micro- curved state of light barrier, i.e. pixel are opened.Therefore when the generation of micro- light barrier is curved
After bent, rotation or translation, then micro- light-blocking chip arrays achieve the effect that open light transmission passage at warped state, and this back opens transmission
Micro- light-blocking chip arrays of formula MEMS chip are at least provided with two groups of micro- light barrier group, then enable first micro- light barrier group and second
Back to opening, micro- light-blocking chip arrays of light transmission passage and warped state form optical transmission window for micro- light barrier in micro- light barrier group,
The light that light source issues is projected through the optical transmission window.And two groups of micro- light barriers are back to opening, it can be micro- light-blocking to avoid two adjacent groups
Piece collides during bending, to avoid influencing due to the micro- light barrier of two adjacent groups mutually avoids the reason of to each micro-
The control program of light barrier bending deformation quantity avoids influencing lighting effect.
Wherein, first micro- light barrier group is located at the top of second micro- light barrier group, and from the side, first micro- light-blocking
Micro- light barrier of piece group is to be bent upwards and micro- light barrier of first micro- light barrier group is to be bent downwardly, and is formed similar
The shape of " < " or the shape for forming similar " ㄣ " seem that the micro- light barrier of two rows is back to opening.
The state that straightened condition, that is, each micro- unbending state of light barrier, i.e. pixel are closed.Therefore when micro- light barrier is not sent out
After raw bending, rotation or translation, then micro- light-blocking chip arrays achieve the effect that close light transmission passage at straightened condition.And this back is opened
In transmission-type MEMS chip, micro- light barrier in first micro- light barrier group and second micro- light barrier group has upper and lower overlap
Point, which " can block " interval between two groups of micro- light barrier groups, and light transmission passage is by light-shielding structure and straight
Micro- light-blocking chip arrays of state are closed, and to mitigate the light leakage phenomena occurred after pixel is closed, the light that light source issues is by micro- gear
Filter Array blocks, then weakens bright line problem.
Optionally, the equal position of fixing end of the fixing end of described first micro- light barrier group and second micro- light barrier group
In on the same side wall of the light transmission passage,
Wherein, micro- light barrier in described first micro- light barrier group is arranged to a line, second micro- light barrier
Micro- light barrier in group is arranged to a line, and first micro- light barrier is mounted on the top of second micro- light barrier group,
First micro- light barrier group and second micro- light barrier group are to be interspersed, and described first micro- light-blocking
It is two neighboring in second micro- light barrier group there are the first interval between two neighboring micro- light barrier in piece group
There are the second intervals between micro- light barrier, and micro- light barrier and second in first micro- light barrier group is spaced relatively
It answers, micro- light barrier in second micro- light barrier group is corresponding with the first interval.
Light transmission passage can be through hole shape, and first micro- light barrier group is located at the top of second micro- light barrier group, first
Fixing end is directed toward the side that fixing end in the direction and second micro- light barrier group of free end is directed toward free end in a micro- light barrier group
To identical.
Micro- light barrier in first micro- light barrier group is rotated or is bent in the counterclockwise direction under the action of the driving mechanism,
Micro- light barrier in second micro- light barrier group is rotated in the clockwise direction or is bent under the action of the driving mechanism, from side
See, micro- light barrier of first micro- light barrier group be bent upwards and micro- light barrier of first micro- light barrier group be to
Lower bending forms the shape of similar " < ", that is, seems that the two micro- light barriers of row MEMS are back to opening.
Wherein, first micro- light barrier group and second micro- light barrier group are to be interspersed, i.e. first micro- light barrier group
Micro- light barrier be placed exactly in the corresponding position at the interval between two neighboring micro- light barrier in second micro- light barrier group, accordingly
, micro- light barrier of second micro- light barrier group is placed exactly between two neighboring micro- light barrier in first micro- light barrier group
Interval corresponding position.Wherein, the interval between two neighboring micro- light barrier in first micro- light barrier group, i.e., first micro-
Interval between the column and the column in light barrier group；The interval between two neighboring micro- light barrier in second micro- light barrier group,
That is the interval between the column and the column in second micro- light barrier group.Therefore first micro- light barrier group and second micro- light barrier group
Micro- light barrier side have upper and lower overlapping part.
Optionally, in micro- light-blocking chip arrays, first micro- light barrier group and second micro- light barrier group
A micro- light barrier series is constituted, and includes at least two micro- light barrier series in micro- light-blocking chip arrays, it is described two micro-
Light barrier series is respectively that first micro- light barrier series and second micro- light barrier are serial,
Wherein, the fixing end of the fixing end of described first micro- light barrier series and second micro- light barrier series point
It Wei Yu not be on the opposite two sidewalls of the light transmission passage；
The free end of first micro- light barrier series is close to described second micro- light barrier series setting described the
The free end of two micro- light barrier series is close to described first micro- light barrier series setting.
So set, no matter micro- light barrier is that alignment is set in first micro- light barrier series and second micro- light barrier series
It sets or is staggered, then from the side, the bending direction of two groups of micro- light barriers and second in first micro- light barrier series
The bending direction of two groups of micro- light barriers, then can be light-blocking to avoid occurring at being symmetrical arranged in micro- light barrier series, reaches light efficiency benefit
The effect improved with rate.
Wherein, first micro- light barrier group is located at the top of second micro- light barrier group, in first micro- light barrier series
Fixing end is directed toward fixing end in the direction and second micro- light barrier series of free end and is directed toward the contrary of free end.
In one embodiment, first micro- light barrier series is located at the left side of second micro- light barrier series, when first
The bending direction of two groups of micro- light barriers is similar " < " shape in micro- light barrier series, then in second micro- light barrier series two groups it is micro-
The bending direction of light barrier is similar " > " shape.
Optionally, described first micro- light barrier series and described second micro- light barrier series are arranged symmetrically.
So set, then from the side, it is micro- along two groups of width (column arrangement) direction alignment in two micro- light barrier series
There is difference in height, one group is to be bent upwards, and one group is to be bent downwardly between light barrier.And it is located in first micro- light barrier series
First micro- light barrier composition being located above in the micro- light barrier group of first of top and second micro- light barrier series is aligned
Setting, and be bent upwards；In first micro- light barrier series underlying second micro- light barrier group with second
Underlying second micro- light barrier composition alignment setting in micro- light barrier series, and be reclinate.
Further, to avoid interference with, micro- light barrier in first micro- light barrier series and second micro- light barrier series
The sum of length be less than the length of light transmission passage.That is top, that is, free end of micro- light barrier does not have in two micro- light barrier series
Upper and lower overlapping part.
Optionally, first micro- light barrier group in described first micro- light barrier series and second micro- light barrier
Second micro- light barrier composition alignment setting in series；Second micro- light barrier group in second micro- light barrier series
Setting is aligned with first micro- light barrier composition in described first micro- light barrier series.
So set, first micro- light barrier group being located above in first micro- light barrier series and second it is micro- light-blocking
The micro- light barrier composition of first be located above in piece series is staggered, and is bent upwards；First micro- light barrier
In series in underlying second micro- light barrier group and second micro- light barrier series underlying second it is micro- light-blocking
Piece composition is staggered, and is reclinate.It is then wrong to open first group of micro- light barrier, second group of micro- light barrier, third group
The motion profile of each micro- light barrier in micro- light barrier and the 4th group of micro- light barrier, to avoid the micro- light barrier of adjacent rows curved
It collides during bent, to avoid the reason of mutually avoiding for the micro- light barrier of adjacent rows and influence to each micro- light barrier
The control program of bending deformation quantity avoids influencing lighting effect.
Optionally, straightened condition is in described first micro- light barrier series and second micro- light barrier series
When, in first micro- light barrier series the free end of first micro- light barrier group in described second micro- light barrier series
The free end of second micro- light barrier group has upper and lower overlapping part；In second micro- light barrier series second it is micro- light-blocking
The free end of piece group and the free end of first micro- light barrier group in described first micro- light barrier series have upper and lower overlap
Point.
So set, then it is arranged and has two groups of micro- light barriers of difference in height in two micro- light barrier series for alignment,
Under straightened condition, top, that is, free end of two groups of micro- light barriers offsets and overlaps up and down, thus " blocking " two micro- light barrier systems
The interval of micro- light barrier between column, to guarantee that light leakage will not occur after pixel closing, it is ensured that the complete light of pixel closes, and avoids generating
Bright line.
Optionally, in described first micro- light barrier series, the width of single micro- light barrier in first micro- light barrier group
Spend the width less than micro- light barrier single in second micro- light barrier group；
In described second micro- light barrier series, the width of single micro- light barrier is less than the in second micro- light barrier group
The width of single micro- light barrier in one micro- light barrier group.
So set, then in first micro- light barrier series, the single micro- gear for first group of micro- light barrier being located above
The width of mating plate is small, and the width of single micro- light barrier of underlying second group of micro- light barrier is big；And it is micro- light-blocking at second
Exactly the opposite in piece series, the width of the single micro- light barrier for first group of micro- light barrier being located above is big, and underlying the
The width of single micro- light barrier of two groups of micro- light barriers is small；So as to avoid the movement interference problem between micro- light barrier, subtract
Light bright line problem.
Optionally, the fixing end of the fixing end of described first micro- light barrier group and second micro- light barrier group difference
On the two sidewalls opposite positioned at the light transmission passage；
The free end of first micro- light barrier group is to be arranged close to described second micro- light barrier group, described second
The free end of micro- light barrier group is close to described first micro- light barrier group setting；
And when described first micro- light barrier group and second micro- light barrier group are in straightened condition, described first
The free end of a micro- light barrier group and the free end of described second micro- light barrier group have upper and lower overlapping part；
Wherein, micro- light barrier in described first micro- light barrier group be arranged between the upper and lower every two rows, described second
Micro- light barrier in a micro- light barrier group be arranged between the upper and lower every two rows.
So set, fixing end is directed toward in the direction and second micro- light barrier group of free end in first micro- light barrier group
Fixing end is directed toward the contrary of free end.
In one embodiment, first micro- light barrier group is located at the left side of second micro- light barrier group, and first micro- light-blocking
The micro- light barrier of two rows in piece group is to be bent upwards, and the micro- light barrier of two rows in second micro- light barrier group is to be turned under
It is bent.Top, that is, free end of micro- light barrier has upper and lower overlap in first micro- light barrier group and second micro- light barrier group
Point, bright line problem can be mitigated.
Further, to avoid the movement interference between each micro- light barrier, the micro- gear of two rows of first micro- light barrier group
Each micro- light barrier in mating plate has interval, the micro- light barrier of two rows of second micro- light barrier group in width direction between each other
In each micro- light barrier there is interval between each other in width direction.
Optionally, upper frame and lower frame of the packaging frame with up and down are assembled, first micro- gear
Mating plate is mounted on the upper frame, and second micro- light barrier is mounted on the lower frame.
Only need to by upper frame and lower frame to weld, bolt is fixed, grafting, the connection types assembly such as buckle are fixed together
Complete packaging frame can be formed.Therefore first first micro- light barrier can be mounted on upper frame, second micro- light barrier
It is mounted on lower frame, then by being assembled together upper frame and lower frame to form complete chip.
Optionally, the driving mechanism is connect with each micro- light barrier, and it is curved to can control each micro- light barrier
Bent deflection is each in each micro- light barrier and second micro- light barrier group to adjust in described first micro- light barrier group
Between micro- light barrier there are gap size control the generation of "cut-off"line；
The length of each micro- light barrier in second micro- light barrier series is micro- light-blocking less than described first
The length of each micro- light barrier in piece series.
Wherein, driving mechanism adjusts each micro- light barrier mirror by the mirror curvature deflection of each micro- light barrier of control
The bending ratio in face, meanwhile, driving mechanism can also enable the mirror curvature deflection of each micro- light barrier different, and then control every
It is each in each micro- light barrier and second micro- light barrier group in first micro- light barrier group in the micro- light barrier series of serial MEMS
Between micro- light barrier there are gap size control the generation of "cut-off"line to control its luminous flux, convenient for light modulation.
Two serial micro- light-blocking leaf length are not identical, then the mirror curvature deformation of each micro- light barrier of driving mechanisms control
When amount, it is easy to so that the bending deformation quantity of first micro- light barrier group is greater than the bending deformation quantity of second micro- light barrier group,
The generation of control "cut-off"line easier to control.
A kind of MEMS lighting system, including light source and back as described above open transmission-type MEMS chip, and the back opens transmission
Micro- light-blocking chip arrays of formula MEMS chip can form light inlet window with the light transmission passage after micro- light barrier bending
Mouthful, the light that the light source issues can be projected by the optical transmission window.
The MEMS lighting system with above-mentioned back open transmission-type MEMS chip possessed by advantage it is identical, details are not described herein.
A kind of automobile, including vehicle lamp assembly, the vehicle lamp assembly include MEMS lighting system as described above.
The automobile is identical as advantage possessed by above-mentioned MEMS lighting system, and details are not described herein.
Based on this, for the application compared with original technology, light leakage phenomena will not be occurred by having, and will not generate bright line, lighting effect
Good advantage.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Attached drawing 1 is that the application back opens the structural schematic diagram of the embodiment one of transmission-type MEMS chip in the bent state；
Attached drawing 2 is that the application back opens the cross-sectional view of transmission-type MEMS chip embodiment one in the bent state；
Attached drawing 3 is the portion the A enlarged drawing of attached drawing 2；
Attached drawing 4 is that the application back opens the structural schematic diagram of transmission-type MEMS chip embodiment two in the bent state；
Attached drawing 5 is that the application back opens the cross-sectional view of transmission-type MEMS chip embodiment two in the bent state；
Attached drawing 6 is that the application back opens the structural schematic diagram of transmission-type MEMS chip embodiment three in the bent state；
Attached drawing 7 is that the application back opens the top view of transmission-type MEMS chip embodiment three in the bent state；
Attached drawing 8 is the portion the B enlarged drawing of attached drawing 7；
Attached drawing 9 is that the application back opens the cross-sectional view of transmission-type MEMS chip example IV in a straightened condition；
Attached drawing 10 is that the application back opens the top view of transmission-type MEMS chip embodiment five in a straightened condition；
Attached drawing 11 is the portion the E enlarged drawing of attached drawing 10；
Attached drawing 12 is that the application back opens the cross-sectional view of transmission-type MEMS chip embodiment five in a straightened condition；
Attached drawing 13 is the portion the C enlarged drawing of attached drawing 12；
Attached drawing 14 is that the application back opens the top view of transmission-type MEMS chip embodiment six in a straightened condition；
Attached drawing 15 is the portion the D enlarged drawing of attached drawing 14；
Attached drawing 16 is that the application back opens the side view of transmission-type MEMS chip embodiment six in the bent state；
Attached drawing 17 is that the application back opens another side view of transmission-type MEMS chip embodiment six in the bent state；
Attached drawing 18 is that the application back opens the explosive view of transmission-type MEMS chip embodiment seven in the bent state.
Icon: 1- packaging frame；2- light transmission passage；31- first micro- light barrier group；Second micro- light barrier of 32-
Group；311- first is spaced；321- second is spaced；4- first micro- light barrier series；5- second micro- light barrier series；
61- fixing end；The free end 62-；621- curved end；7- or more overlapping part；The upper frame of 11-；12- lower frame.
Specific embodiment
It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation
Example is some embodiments of the present application, instead of all the embodiments.Based on the embodiment in the application, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall in the protection scope of this application.
In the description of the present application, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "front", "rear", "vertical",
The orientation or positional relationship of the instructions such as " liquid flat ", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for describe the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ",
" third " is used for description purposes only, and is not offered as arrangement serial number, can not be interpreted as indication or suggestion relative importance.
With reference to the accompanying drawing, it elaborates to some embodiments of the application.In the absence of conflict, following
Feature in embodiment and embodiment can be combined with each other.
Back opens the embodiment one of transmission-type MEMS chip:
Please refer to Fig. 1, Fig. 2, Fig. 3, a kind of back opens transmission-type MEMS chip, including packaging frame 1 and driving mechanism, encapsulates
Light transmission passage 2 is offered on the top surface of frame 1, is connected on packaging frame 1 for opening or closing the micro- light-blocking of light transmission passage 2
Chip arrays, micro- light-blocking chip arrays include micro- light barrier of multiple array arrangements, and driving mechanism is connect with micro- light-blocking chip arrays, and
For driving each micro- light barrier bending；
The both ends of each micro- light barrier are respectively fixing end 61 and free end 62, and fixing end 61 is fixed on packaging frame 1,
Free end 62 can form curved end 621 after driving mechanism drives micro- light barrier bending；
Micro- light-blocking chip arrays include at least first micro- light barrier group 31 and second micro- light barrier group 32, wherein the
Micro- gear when one micro- light barrier group 31 and second micro- light barrier group 32 are in straightened condition, in first micro- light barrier group 31
Micro- light barrier in mating plate and second micro- light barrier group 32 has upper and lower overlapping part 7；
When first micro- light barrier group 31 and second micro- light barrier group 32 are in bending state, first micro- light barrier
The curved end 621 and second micro- 32 curved end 621 of light barrier group of group 31 are located at the two sides of 1 top surface of packaging frame.
The mirror surface that driving mechanism is used to enable movable micro- light barrier rotates or is translatable, to reach using micro- light-blocking
Chip arrays open or close the effect of light transmission passage.And the driving method of driving mechanism includes but is not limited to electrostatic, magnetic force, electricity
Stream, electric heating, piezoelectricity or temperature.Driving mechanism is individually to be controlled each micro- light barrier, it can be achieved that at single pixel point
The independent control of light transmission state to neatly adjust illumination light type, and realizes that the illumination of high pixel is shown.Wherein, first
Two micro- light barriers are included at least in a micro- light barrier group.Two micro- light barriers are included at least in second micro- light barrier group.
The state that bending state, that is, each micro- curved state of light barrier, i.e. pixel are opened.Therefore when the generation of micro- light barrier is curved
After bent, rotation or translation, then micro- light-blocking chip arrays achieve the effect that open light transmission passage at warped state, and this back opens transmission
Micro- light-blocking chip arrays of formula MEMS chip are at least provided with two groups of micro- light barrier group, then enable first micro- light barrier group and second
Back to opening, micro- light-blocking chip arrays of light transmission passage and warped state form optical transmission window for micro- light barrier in micro- light barrier group,
The light that light source issues is projected through the optical transmission window.And two groups of micro- light barriers are back to opening, it can be micro- light-blocking to avoid two adjacent groups
Piece collides during bending, to avoid influencing due to the micro- light barrier of two adjacent groups mutually avoids the reason of to each micro-
The control program of light barrier bending deformation quantity avoids influencing lighting effect.
Wherein, first micro- light barrier group is located at the top of second micro- light barrier group, and from the side, first micro- light-blocking
Micro- light barrier of piece group is to be bent upwards and micro- light barrier of first micro- light barrier group is to be bent downwardly, and is formed similar
The shape of " < " or the shape for forming similar " ㄣ " seem that the micro- light barrier of two rows is back to opening.
The state that straightened condition, that is, each micro- unbending state of light barrier, i.e. pixel are closed.Therefore when micro- light barrier is not sent out
After raw bending, rotation or translation, then micro- light-blocking chip arrays achieve the effect that close light transmission passage at straightened condition.And this back is opened
In transmission-type MEMS chip, micro- light barrier in first micro- light barrier group and second micro- light barrier group has upper and lower overlap
Point, which " can block " interval between two groups of micro- light barrier groups, and light transmission passage is by light-shielding structure and straight
Micro- light-blocking chip arrays of state are closed, and to mitigate the light leakage phenomena occurred after pixel is closed, the light that light source issues is by micro- gear
Filter Array blocks, then weakens bright line problem.
Please refer to Fig. 1, the fixing end 61 of first micro- light barrier group 31 and the fixing end 61 of second micro- light barrier group 32
It is respectively positioned on the same side wall of light transmission passage 2,
Wherein, micro- light barrier in first micro- light barrier group 31 is arranged to a line, in second micro- light barrier group 32
Micro- light barrier be arranged to a line, first micro- light barrier group 31 is set to the top of second micro- light barrier group 32,
First micro- light barrier group 31 and second micro- light barrier group 32 are to be interspersed, in first micro- light barrier group 31
Two neighboring micro- light barrier between there are the first intervals 311, two neighboring micro- light barrier in second micro- light barrier group 32
Between there are the second interval 321, and micro- light barrier in first micro- light barrier group 31 be spaced with second it is 321 corresponding, second
Micro- light barrier in a micro- light barrier group 32 is corresponding with the first interval 311.
Light transmission passage can be through hole shape, and first micro- light barrier group is located at the top of second micro- light barrier group, first
Fixing end is directed toward the side that fixing end in the direction and second micro- light barrier group of free end is directed toward free end in a micro- light barrier group
To identical.
Micro- light barrier in first micro- light barrier group is rotated or is bent in the counterclockwise direction under the action of the driving mechanism,
Micro- light barrier in second micro- light barrier group is rotated in the clockwise direction or is bent under the action of the driving mechanism, from side
See, micro- light barrier of first micro- light barrier group be bent upwards and micro- light barrier of first micro- light barrier group be to
Lower bending forms the shape of similar " < ", that is, seems that the two micro- light barriers of row MEMS are back to opening.
Wherein, first micro- light barrier group and second micro- light barrier group are to be interspersed, i.e. first micro- light barrier group
Micro- light barrier be placed exactly in the corresponding position at the interval between two neighboring micro- light barrier in second micro- light barrier group, accordingly
, micro- light barrier of second micro- light barrier group is placed exactly between two neighboring micro- light barrier in first micro- light barrier group
Interval corresponding position.Wherein, the interval between two neighboring micro- light barrier in first micro- light barrier group, i.e., first micro-
Interval between the column and the column in light barrier group；The interval between two neighboring micro- light barrier in second micro- light barrier group,
That is the interval between the column and the column in second micro- light barrier group.Therefore first micro- light barrier group and second micro- light barrier group
Micro- light barrier side have upper and lower overlapping part.
In the present embodiment, the width of micro- light barrier of first micro- light barrier group is micro- light-blocking more than or equal to second
Spacing in piece group between two neighboring micro- light barrier；The width of micro- light barrier of second micro- light barrier group is more than or equal to
Spacing in first micro- light barrier group between two neighboring micro- light barrier.So set, can make micro- light-blocking from whole
In chip arrays between micro- light barrier along column arragement direction there is no interval, i.e. first micro- light barrier group and second it is micro- light-blocking
Piece group has overlapping place up and down in micro- light barrier width direction, so that first micro- second micro- gear of light barrier group " blocking "
The interval between two neighboring micro- light barrier in mating plate group, in second micro- micro- light barrier group of light barrier group " blocking " first
Two neighboring micro- light barrier between interval, then first micro- light barrier group can be in light through in second micro- light barrier group
Two neighboring micro- light barrier between interval when play the role of certain transmission, second micro- light barrier group can be penetrated in light
Play the role of certain transmission when interval between two neighboring micro- light barrier in first micro- light barrier group, it can be to avoid hair
Raw light leakage phenomena, to avoid generating bright line, to improve lighting effect.
Wherein, in the micro- light barrier group of spacing i.e. second in second micro- light barrier group between two neighboring micro- light barrier
Column pitch, the width of micro- light barrier of first micro- light barrier group i.e. its along the arragement direction of column length, therefore when first
When the width of micro- light barrier of micro- light barrier group is more than or equal to the column pitch in second micro- light barrier group, then first it is micro-
Micro- light barrier of light barrier group " can block " column pitch in second micro- light barrier group.Vice versa.
Need additional description, the size being spaced between two neighboring micro- light barrier in first micro- light barrier group and the
The size being spaced between two neighboring micro- light barrier in two micro- light barrier groups can be equal or unequal, i.e., first micro-
Column pitch in light barrier group can be equal or unequal with the column pitch in second micro- light barrier group.In the present embodiment,
Column pitch in first micro- light barrier group can be equal with the column pitch in second micro- light barrier group.
Back opens the embodiment two of transmission-type MEMS chip:
Referring to figure 4., Fig. 5 opens transmission-type MEMS core including the back that above-mentioned back opens the embodiment one of transmission-type MEMS chip
Piece.In micro- light-blocking chip arrays, first micro- light barrier group 31 and second micro- light barrier group 32 constitute a micro- light barrier series,
And two micro- light barrier series are included at least in micro- light-blocking chip arrays, two micro- light barrier series are respectively first micro- light barrier
Series 4 and second micro- light barrier series 5,
Wherein, the fixing end 61 of the fixing end 61 of first micro- light barrier series 4 and second micro- light barrier series 5 is distinguished
On the two sidewalls opposite positioned at light transmission passage 2；
The free end 62 of first micro- light barrier series 4 is to be arranged close to second micro- light barrier series 5, second micro- gear
The free end 62 of mating plate series 5 is to be arranged close to first micro- light barrier series 4.
In the present embodiment, first micro- light barrier series 4 and second micro- light barrier series 5 are arranged symmetrically.
In the present embodiment, to avoid interference with, micro- gear in first micro- light barrier series and second micro- light barrier series
The sum of length of mating plate is less than the length of light transmission passage.That is top, that is, free end of micro- light barrier is not in two micro- light barriers series
With upper and lower overlapping part.
So set, no matter micro- light barrier is that alignment is set in first micro- light barrier series and second micro- light barrier series
It sets or is staggered, then from the side, the bending direction of two groups of micro- light barriers and second in first micro- light barrier series
The bending direction of two groups of micro- light barriers, then can be light-blocking to avoid occurring at being symmetrical arranged in micro- light barrier series, reaches light efficiency benefit
The effect improved with rate.
Wherein, first micro- light barrier group is located at the top of second micro- light barrier group, in first micro- light barrier series
Fixing end is directed toward fixing end in the direction and second micro- light barrier series of free end and is directed toward the contrary of free end.
Referring to figure 5., in the present embodiment, first micro- light barrier series is located at a left side for second micro- light barrier series
Side, when the bending direction of two groups of micro- light barriers in first micro- light barrier series is similar " < " shape, then second micro- light barrier
The bending direction of two groups of micro- light barriers is similar " > " shape in series.
So set, then from the side, it is micro- along two groups of width (column arrangement) direction alignment in two micro- light barrier series
There is difference in height, one group is to be bent upwards, and one group is to be bent downwardly between light barrier.And it is located in first micro- light barrier series
First micro- light barrier composition being located above in the micro- light barrier group of first of top and second micro- light barrier series is aligned
Setting, and be bent upwards；In first micro- light barrier series underlying second micro- light barrier group with second
Underlying second micro- light barrier composition alignment setting in micro- light barrier series, and be reclinate.
Referring to figure 4., driving mechanism is connect with each micro- light barrier, and can control each micro- light barrier bending deformation quantity
It adjusts in first micro- light barrier group 31 and is stayed between each micro- light barrier in each micro- light barrier and second micro- light barrier group 32
Some gap sizes control the generation of "cut-off"line；
In less than first micro- light barrier series 4 of the length of each micro- light barrier in second micro- light barrier series 5
The length of each micro- light barrier.
Wherein, driving mechanism adjusts each micro- light barrier mirror by the mirror curvature deflection of each micro- light barrier of control
The bending ratio in face, meanwhile, driving mechanism can also enable the mirror curvature deflection of each micro- light barrier different, and then control every
It is each in each micro- light barrier and second micro- light barrier group in first micro- light barrier group in the micro- light barrier series of serial MEMS
Between micro- light barrier there are gap size control the generation of "cut-off"line to control its luminous flux, convenient for light modulation.
Micro- light-blocking leaf length of two micro- light barrier series is not identical, then the mirror surface of each micro- light barrier of driving mechanisms control
When bending deformation quantity, it is easy to so that the bending deformation quantity of first micro- light barrier group is greater than the bending of second micro- light barrier group
Deflection, the generation of control "cut-off"line easier to control.
Back opens the embodiment three of transmission-type MEMS chip:
Please refer to Fig. 6, Fig. 7, Fig. 8, first micro- light barrier group 31 in first micro- light barrier series 4 and second it is micro-
Second micro- light barrier group 32 in light barrier series 5 is arranged at alignment；Second micro- gear in second micro- light barrier series 5
Mating plate group 32 and first micro- light barrier group 31 in first micro- light barrier series 4 are at being aligned setting.Rest part is opened with back
The embodiment two of transmission-type MEMS chip is identical.
So set, first micro- light barrier group being located above in first micro- light barrier series and second it is micro- light-blocking
The micro- light barrier composition of first be located above in piece series is staggered, and is bent upwards；First micro- light barrier
In series in underlying second micro- light barrier group and second micro- light barrier series underlying second it is micro- light-blocking
Piece composition is staggered, and is reclinate.It is then wrong to open first group of micro- light barrier, second group of micro- light barrier, third group
The motion profile of each micro- light barrier in micro- light barrier and the 4th group of micro- light barrier, to avoid the micro- light barrier of adjacent rows curved
It collides during bent, to avoid the reason of mutually avoiding for the micro- light barrier of adjacent rows and influence to each micro- light barrier
The control program of bending deformation quantity avoids influencing lighting effect.
Back opens the example IV of transmission-type MEMS chip:
Fig. 9 is please referred to, when first micro- light barrier series 4 and second micro- light barrier series 5 are in straightened condition, the
In one micro- light barrier series 4 second in the free end 62 of first micro- light barrier group 31 and second micro- light barrier series 5
The free end 62 of micro- light barrier group 32 has upper and lower overlapping part 7；Second micro- light barrier group in second micro- light barrier series 5
The free end 62 of first micro- light barrier group 31 has upper and lower overlap in 32 free end 62 and first micro- light barrier series 4
Divide 7.To open the embodiment three of transmission-type MEMS chip identical with back for rest part.
So set, then it is arranged and has two groups of micro- light barriers of difference in height in two micro- light barrier series for alignment,
Under straightened condition, top, that is, free end of two groups of micro- light barriers offsets and overlaps up and down, thus " blocking " two micro- light barrier systems
Interval between column, to guarantee that light leakage will not occur after pixel closing, it is ensured that the complete light of pixel closes, and avoids generating bright line.
Back opens the embodiment five of transmission-type MEMS chip:
Figure 10, Figure 11, Figure 12, Figure 13 are please referred to, in first micro- light barrier series 4, first micro- light barrier group 31
In single micro- light barrier width less than micro- light barrier single in second micro- light barrier group 32 width；
In second micro- light barrier series 5, the width of single micro- light barrier is less than in second micro- light barrier group 32
The width of single micro- light barrier in one micro- light barrier group 31.Rest part opens the example IV phase of transmission-type MEMS chip with back
Together.
So set, then in first micro- light barrier series, the single micro- gear for first group of micro- light barrier being located above
The width of mating plate is small, and the width of single micro- light barrier of underlying second group of micro- light barrier is big；And it is micro- light-blocking at second
Exactly the opposite in piece series, the width of the single micro- light barrier for first group of micro- light barrier being located above is big, and underlying the
The width of single micro- light barrier of two groups of micro- light barriers is small；So as to avoid the movement interference problem between micro- light barrier, subtract
Light bright line problem.
Back opens the embodiment six of transmission-type MEMS chip:
Please refer to Figure 14, Figure 15, Figure 16, the fixing end 61 and second micro- light barrier group 32 of first micro- light barrier group 31
Fixing end 61 be located on the opposite two sidewalls of light transmission passage 2；
The free end 62 of first micro- light barrier group 31 is to be arranged close to second micro- light barrier group 32, and second micro- light-blocking
The free end 62 of piece group 32 is close to first micro- light barrier group setting；
And when first micro- light barrier group 31 and second micro- light barrier group 32 are in straightened condition, first micro- light-blocking
The free end 62 of piece group 31 and the free end 62 of second micro- light barrier group 32 have upper and lower overlapping part 7；
Wherein, micro- light barrier in first micro- light barrier group 31 be arranged between the upper and lower every two rows, second micro- gear
Micro- light barrier in mating plate group 32 be arranged between the upper and lower every two rows.Rest part and back open the implementation of transmission-type MEMS chip
Example one is identical.
So set, fixing end is directed toward in the direction and second micro- light barrier group of free end in first micro- light barrier group
Fixing end is directed toward the contrary of free end.
In the present embodiment, to avoid the movement interference between each micro- light barrier, two rows of first micro- light barrier group are micro-
Each micro- light barrier in light barrier has interval in width direction between each other, and two rows of second micro- light barrier group are micro- light-blocking
Each micro- light barrier in piece has interval in width direction between each other.
Figure 16 is please referred to, in one embodiment, first micro- light barrier group is located at the left side of second micro- light barrier group, the
The micro- light barrier of two rows in one micro- light barrier group is to be bent upwards, and the micro- light barrier of two rows in second micro- light barrier group is equal
To be bent downwardly.Top, that is, free end of micro- light barrier has up and down in first micro- light barrier group and second micro- light barrier group
Overlapping part can mitigate bright line problem.
Please refer to Figure 17, it is a kind of other feasibly in embodiment, first micro- light barrier group be located at second it is micro- light-blocking
The left side of piece group, the micro- light barrier of two rows one in first micro- light barrier group are bent upwards, and one is bent downwardly, and second micro-
The micro- light barrier of two rows one in light barrier group is bent upwards, and one is bent downwardly.First micro- light barrier group and second it is micro-
Top, that is, free end of micro- light barrier has upper and lower overlapping part in light barrier group, can mitigate bright line problem.
Back opens the embodiment seven of transmission-type MEMS chip:
Please refer to Figure 18, upper frame 11 and lower frame 12 of the packaging frame 1 with up and down are assembled, first micro- gear
Mating plate group 31 is set on upper frame 11, and second micro- light barrier group 32 is set on lower frame 12.Rest part and any of the above-described reality
It is identical to apply example.
Only need to by upper frame and lower frame to weld, bolt is fixed, grafting, the connection types assembly such as buckle are fixed together
Complete packaging frame can be formed.Therefore first first micro- light barrier can be mounted on upper frame, second micro- light barrier
It is mounted on lower frame, then by being assembled together upper frame and lower frame to form complete chip.
The embodiment one of MEMS lighting system:
A kind of MEMS lighting system, the back including light source and any of the above-described embodiment open transmission-type MEMS chip, and back is opened
Micro- light-blocking chip arrays of formula MEMS chip are penetrated after the bending of micro- light barrier, optical transmission window can be formed with light transmission passage 2, light source issues
Light can by optical transmission window project.
The MEMS lighting system with above-mentioned back open transmission-type MEMS chip possessed by advantage it is identical, details are not described herein.
The embodiment one of automobile:
A kind of automobile, including vehicle lamp assembly, vehicle lamp assembly include above-mentioned MEMS lighting system.
The automobile is identical as advantage possessed by above-mentioned MEMS lighting system, and details are not described herein.Finally, it should be noted that
The above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；Although referring to foregoing embodiments to this
Application is described in detail, those skilled in the art should understand that: it still can be to foregoing embodiments institute
The technical solution of record is modified, or equivalent substitution of some or all of the technical features；And these are modified
Or replacement, the range of each embodiment technical solution of the application that it does not separate the essence of the corresponding technical solution.
Claims (12)
1. a kind of back opens transmission-type MEMS chip, it is characterised in that: including packaging frame and driving mechanism, the packaging frame
Light transmission passage is offered on top surface, and micro- light barrier battle array for opening or closing light transmission passage is connected on the packaging frame
Column, micro- light-blocking chip arrays include micro- light barrier of multiple array arrangements, the driving mechanism and micro- light barrier battle array
Column connection, and for driving each micro- light barrier bending；
The both ends of each micro- light barrier are respectively fixing end and free end, and the fixing end is fixed on the packaging frame, institute
Curved end can be formed after driving mechanism driving micro- light barrier bending by stating free end；
Micro- light-blocking chip arrays include at least first micro- light barrier group and second micro- light barrier group,
Wherein, when described first micro- light barrier group and second micro- light barrier group are in straightened condition, described first
Micro- light barrier in a micro- light barrier group has upper and lower overlapping part with micro- light barrier in described second micro- light barrier group；
When described first micro- light barrier group and second micro- light barrier group are in bending state, first micro- gear
The curved end of mating plate group and second micro- light barrier group curved end are located at the two sides of the packaging frame top surface.
2. back according to claim 1 opens transmission-type MEMS chip, it is characterised in that: first micro- light barrier group
The fixing end of fixing end and second micro- light barrier group is respectively positioned on the same side wall of the light transmission passage,
Wherein, micro- light barrier in described first micro- light barrier group is arranged to a line, in second micro- light barrier group
Micro- light barrier be arranged to a line, first micro- light barrier is mounted on the top of second micro- light barrier group,
First micro- light barrier group and second micro- light barrier group are to be interspersed, first micro- light barrier group
In two neighboring micro- light barrier between there are the first interval, it is two neighboring described in second micro- light barrier group
There are the second intervals between micro- light barrier, and micro- light barrier in first micro- light barrier group is corresponding with the second interval,
Micro- light barrier in second micro- light barrier group is corresponding with the first interval.
3. back according to claim 2 opens transmission-type MEMS chip, it is characterised in that: in micro- light-blocking chip arrays, institute
It states first micro- light barrier group and second micro- light barrier group constitutes a micro- light barrier series, and micro- light barrier battle array
Include at least two micro- light barriers series in column, described two micro- light barrier series are respectively first micro- light barrier series and the
Two micro- light barrier series,
Wherein, the fixing end of the fixing end of described first micro- light barrier series and second micro- light barrier series distinguishes position
In on the opposite two sidewalls of the light transmission passage；
The free end of first micro- light barrier series is to be arranged close to described second micro- light barrier series, described second
The free end of micro- light barrier series is close to described first micro- light barrier series setting.
4. back according to claim 3 opens transmission-type MEMS chip, it is characterised in that: first micro- light barrier series
It is arranged symmetrically with described second micro- light barrier series.
5. back according to claim 3 opens transmission-type MEMS chip, it is characterised in that: first micro- light barrier series
In first micro- light barrier group be aligned setting with second micro- light barrier composition in described second micro- light barrier series；Institute
It states second micro- light barrier group in second micro- light barrier series and first in described first micro- light barrier series is micro-
Light barrier composition alignment setting.
6. back according to claim 5 opens transmission-type MEMS chip, it is characterised in that: in described first micro- light barrier system
Column and described second micro- light barrier series is when be in straightened condition, during first micro- light barrier is serial first it is micro- light-blocking
The free end of piece group and the free end of second micro- light barrier group in described second micro- light barrier series have upper and lower overlap
Point；In second micro- light barrier series in the free end and described first micro- light barrier series of second micro- light barrier group
The free end of first micro- light barrier group has upper and lower overlapping part.
7. back according to claim 6 opens transmission-type MEMS chip, it is characterised in that: in described first micro- light barrier system
In column, the width of single micro- light barrier is less than micro- light barrier single in second micro- light barrier group in first micro- light barrier group
Width；
In described second micro- light barrier series, the width of single micro- light barrier is less than first in second micro- light barrier group
The width of single micro- light barrier in micro- light barrier group.
8. back according to claim 1 opens transmission-type MEMS chip, it is characterised in that: first micro- light barrier group
The fixing end of fixing end and second micro- light barrier group is located on the opposite two sidewalls of the light transmission passage；
The free end of first micro- light barrier group is close to described second micro- light barrier group setting, second micro- gear
The free end of mating plate group is close to described first micro- light barrier group setting；
And when described first micro- light barrier group and second micro- light barrier group are in straightened condition, described first micro-
The free end of light barrier group and the free end of described second micro- light barrier group have upper and lower overlapping part；
Wherein, micro- light barrier in described first micro- light barrier group be arranged between the upper and lower every two rows, described second is micro-
Micro- light barrier in light barrier group be arranged between the upper and lower every two rows.
9. back according to claim 1 opens transmission-type MEMS chip, it is characterised in that: the packaging frame is with up and down
Upper frame and lower frame be assembled, first micro- light barrier is mounted on the upper frame, second micro- gear
Mating plate is mounted on the lower frame.
10. back according to claim 6 opens transmission-type MEMS chip, it is characterised in that: the driving mechanism and each institute
Micro- light barrier connection is stated, and can control each micro- light barrier bending deformation quantity to adjust in described first micro- light barrier group
In each micro- light barrier and second micro- light barrier group between each micro- light barrier there are gap size control light and shade
The generation of dead line；
The length of each micro- light barrier in second micro- light barrier series is less than described first micro- light barrier system
The length of each micro- light barrier in column.
11. a kind of MEMS lighting system, it is characterised in that: the back including light source and as described in any one of claims 1 to 10
Transmission-type MEMS chip is opened, the micro- light-blocking chip arrays for opening transmission-type MEMS chip of carrying on the back are in micro- light barrier bending
Afterwards, optical transmission window can be formed with the light transmission passage, the light that the light source issues can be projected by the optical transmission window.
12. a kind of automobile, it is characterised in that: including vehicle lamp assembly, the vehicle lamp assembly includes as claimed in claim 11
MEMS lighting system.
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Application publication date: 20190524 |