CN104852116B - A kind of surface phasmon directional coupler and its control method independent of polarization - Google Patents

A kind of surface phasmon directional coupler and its control method independent of polarization Download PDF

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CN104852116B
CN104852116B CN201510256468.1A CN201510256468A CN104852116B CN 104852116 B CN104852116 B CN 104852116B CN 201510256468 A CN201510256468 A CN 201510256468A CN 104852116 B CN104852116 B CN 104852116B
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polarization
ridge waveguide
nano particle
incident light
spp mode
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CN104852116A (en
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陈建军
孙成伟
容科秀
李洪云
龚旗煌
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Peking University
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Peking University
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Abstract

The invention discloses a kind of surface phasmon directional coupler and its control method independent of polarization.Asymmetric defective small structure is processed in present invention proposition on the ridge waveguide of sub-wavelength, and realization p-polarization and s polarized incident light directional couples go out SPP mode;Ridge waveguide only supports single pattern;Due to the influence of defect, the incident light of p-polarization and s polarizations can directionally be coupled out the SPP mode propagated along ridge waveguide;By adjusting the geometric parameter of defect, the SPP mode that the incident light that p-polarization and s are polarized is coupled out both can also be propagated in opposite direction along identical;In the case where propagating in same direction, the intensity of the SPP mode being coupled out of the incident beam modulated of s polarizations always can be made full use of;In the case where propagating in opposite direction, the information of the incident light of polarization encoder is just retained, it is achieved thereby that the coupling process of SPP mode is independent of polarization.

Description

A kind of surface phasmon directional coupler and its control method independent of polarization
Technical field
The present invention relates to nanophotonics field, more particularly to a kind of surface phasmon directional couple independent of polarization Device and its control method.
Background technology
Surface phasmon SPPs is the horizontal magnetic TM mode of electromagnetic waves being strapped on metal-dielectric interface.Because its is excellent Sub-wavelength field containment and strong field enhancement effect, SPPs is considered as potential of future generation information carrier.Free space optical It is coupled to SPPs most important to the performance for studying phasmon device.In terms of this has expedited the emergence of out many SPP unidirectional couplings devices Research.Free space optical can be efficiently coupled on metal flat or ridged waveguide structure by unidirectional couplings device, Along the SPPs specified or direction interested is propagated.However, the polarization independent characteristic (TM polarizations) due to SPPs in itself, only The incident light of p-polarization (magnetic direction of the magnetic vector parallel to SPPs) can be coupled into SPPs.So (magnetic vector hangs down s polarizations Directly in SPPs magnetic direction) carry energy and information just lost completely.Recently, having been reported that can with the incident light of circular polarization To overcome the dependence in SPPs coupling process to polarization to a certain extent.Because the incident light of any polarization can be decomposed Into two mutually perpendicular linear polarization compositions, this can for explain many optical phenomenas and effect (including optical Kerr effect, Optical birefringence, electrooptic effect).So, going out SPPs with p-polarization or s the incident light directional couple polarized may be with more real Border meaning.But due to SPPs p-polarization dependency characteristic, the incident light directional couple polarized with s, which goes out SPPs and is one, severe chooses War.
The content of the invention
The problem of existing for above prior art, the present invention is proposed a kind of to be machined with the ridge waveguide of sub-wavelength The small structure of defect, realize p-polarization and s polarized incident lights can directional couple go out SPPs so that it is inclined to solve SPP directional couples Shake dependence the problem of.
It is an object of the present invention to provide a kind of surface phasmon directional coupler independent of polarization.
The surface phasmon directional coupler of the present invention includes:Metallic film, aperture, ridge waveguide and projection nanometer Grain;Wherein, aperture is provided with metallic film;On metallic film and positioned at aperture two ends positional symmetry set two The width of ridge waveguide, ridge waveguide width and aperture, by adjusting the width w and height h of ridge waveguide, can be made with inconsistent Obtain ridge waveguide and only support single SPP mode;Projection nano particle, projection are set on metallic film and positioned at the side of aperture The edge of the endless all standing aperture of nano particle, forms defective small structure;Incident light is defective small from back side illuminaton Pore structure, electric charge is accumulated in the corner region of defective small structure and forms focus (hot spots);For p-polarization Incident light, electric charge is accumulated in the corner region of ridge waveguide and forms focus, and the radiation field of focus is coupled into along ridge waveguide The SPP mode of propagation, so that the incident light of p-polarization is coupled into the SPP mode propagated along ridge waveguide;The incidence polarized for s Light, electric charge is accumulated in the corner region of projection nano particle and forms focus, and the radiation field of focus is coupled into along ridge waveguide The SPP mode of propagation, so that the incident light of s polarizations can also be coupled into along ridge waveguide and propagate SPP mode, is realized independent of polarization Surface phasmon coupler.
Further, the center of projection nano particle is not on the center of aperture side, so as to form along ridged The asymmetric defective small structure of wave guide direction, the ridge waveguide of aperture one end is away from projection nano particle, and aperture The ridge waveguide of the other end is close to projection nano particle.For the incident light of p-polarization, electricity is accumulated in the corner region of ridge waveguide Lotus simultaneously forms focus (hot spots).And the focus formed on the ridge waveguide away from projection nano particle be more than by The focus number formed on the ridge waveguide of nearly projection nano particle, so that the main edge of SPP mode of the incident optical coupling of p-polarization The ridge waveguide away from projection nano particle to propagate;The incident light polarized for s, tires out in the corner region of projection nano particle Accumulated charge simultaneously forms focus, and the geometric structure diamete of projection nano particle can influence the radiation field direction of focus, so that s polarizations The SPP mode propagated along ridge waveguide that incident light can be directionally coupled into.Therefore using asymmetric defective small Pore structure, can realize the surface phasmon directional coupler independent of polarization in sub-wavelength waveguide.
The geometric structure diamete of projection nano particle can influence the field distribution of focus, therefore the geometry knot of projection nano particle Structure size influences the intensity of SPP mode.Due to the asymmetry of small structure, the intensity of the SPP mode of opposite direction is to differ Sample, therefore the intensity of SPP mode can be adjusted by adjusting the geometric structure diamete of projection nano particle.By adjusting projection The proportion of the intensity of the SPP mode of the geometric structure diamete of nano particle, regulation p-polarization and s polarization coupleds.
Further, the geometric parameter of projection nano particle is adjusted so that p-polarization and the SPP mode of s polarized incident optical couplings Propagated along equidirectional on ridge waveguide.Can be by rotating the angle of polarization of incident light hence for incident linearly polarized light Degree, it is easy to the intensity for the SPP mode that ground regulation is coupled out.The geometric parameter of projection nano particle includes:Cross section geometry And the position away from small hole center axle.
The thickness of metallic film is more than 300nm;The width and height of ridge waveguide are all higher than 50nm;The length of aperture exists Between 200nm~2 μm;The size of projection nano particle is more than 50nm.
It is another object of the present invention to provide a kind of control of the surface phasmon directional coupler independent of polarization Method processed.
The control method of the surface phasmon directional coupler of the present invention, comprises the following steps:
1) aperture is provided with metallic film, on metallic film and positioned at aperture two ends positional symmetry set two Individual ridge waveguide, the width of ridge waveguide is consistent with the width of aperture need not be consistent, by adjust ridge waveguide width w and Height h so that ridge waveguide only supports single SPP mode, projection is set on metallic film and positioned at the position of aperture side Nano particle, the edge of the endless all standing aperture of projection nano particle;
2) incident light is from the defective small structure of back side illuminaton, and electric charge tires out in the corner region of defective small structure Accumulate and form focus (hot spot);
3) for the incident light of p-polarization, electric charge is accumulated in the corner region of ridge waveguide and forms focus, the radiation of focus Field is coupled into the SPP mode propagated along ridge waveguide, so that the incident light of p-polarization is coupled into what is propagated along ridge waveguide SPP mode;
4) incident light polarized for s, electric charge is accumulated in the corner region of projection nano particle and forms focus, focus Radiation field is coupled into the SPP mode of ridge waveguide propagation, so that the incident light of s polarizations can also be coupled into what is propagated along ridge waveguide SPP mode, realizes that the surface phasmon independent of polarization is coupled.
The control method of the surface phasmon directional coupler of the present invention also includes, by adjusting projection nano particle The proportion of the intensity of the SPP mode of geometric parameter, regulation p-polarization and s polarization coupleds.
Further, the geometric parameter of projection nano particle is adjusted so that the SPP mode of p-polarization coupling is along identical side Propagated on ridge waveguide.Hence for incident linearly polarized light, coupling can be adjusted by rotating the polarization angle of incident light The intensity of the SPP mode closed out.
Advantages of the present invention:
The present invention is proposed to process asymmetric defective small structure on the ridge waveguide of sub-wavelength, realized inclined with p Shake and go out SPP mode with s polarized incident light directional couples;In view of the single mode operation condition in photon circuit, the ridged of sub-wavelength Waveguide has been optimized to only support single pattern;Due to the influence of defect, the incident light of p-polarization and s polarizations can be directionally It is coupled out the SPP mode propagated along ridge waveguide;By the incident optical coupling for adjusting the geometric parameter of defect, p-polarization and s polarizations The SPP mode gone out both can also be propagated in opposite direction along identical., can be abundant in the case where propagating in same direction The intensity of the SPP mode being coupled out of the incident beam modulated polarized using s always.In the case where propagating in opposite direction, polarization The information of the incident light of coding is just retained.So, in this extra small defective small structure, p-polarization and s The incident light of polarization is coupled into the SPP mode propagated along ridge waveguide with being directed, so the coupling process of SPP mode Being can be independent of polarization.
Brief description of the drawings
Fig. 1 is the structural representation of the surface phasmon directional coupler independent of polarization of the present invention, wherein, (a) For the schematic diagram of defective small structure, (b) is the profile of ridge waveguide, and (c) is the SPP mode that ridge waveguide is supported Field pattern, (d) schemes for the Scanning Electron microscope SEM of the sample of flawless small structure, and (e) is defective small The Scanning Electron microscope figure of the sample of pore structure;
Fig. 2 be incident light from back side illuminaton when, flawless small structure with the present invention defective small structure coupling The SPP mode comparison diagram of conjunction, wherein, (a) and (b) are respectively that the incident light of p-polarization and s polarizations is flawless small from back side illuminaton The distribution map of the electric field of pore structure, (c) and (d) is respectively that the incident light of p-polarization and s polarizations in experiment is defective from back side illuminaton The distribution map of the electric field of small structure, (e) and (f) are respectively that the incident light of theoretical calculation p-polarization and s polarizations has scarce from back side illuminaton The distribution map of the electric field of sunken small structure;
Fig. 3 is obtained p-polarization and the s polarization of the surface phasmon directional coupler independent of polarization of the present invention The interference pattern of the SPP mode of coupling, wherein, (a) is the linearly polarized light and ridged ripple that the incident light compositing that p-polarization and s are polarized is obtained 45 ° of angles are led, (b) is that the linearly polarized light that the incident light compositing that p-polarization and s are polarized is obtained has -45 ° of angles, (c) with ridge waveguide The field pattern obtained for the numerical computations of 45 ° of angles, the field pattern that (d) obtains for the numerical computations of -45 ° of angles, (e) line The intensity for the SPP mode that polarised light is coupled out and the relation of polarization direction, the intensity for the SPP mode that (f) linearly polarized light is coupled out With the relation of polarization direction;
Fig. 4 polarizes the electric field intensity map of the SPP mode of bidirectional couple for the p-polarization and s of embodiment two, wherein, (a) is embodiment Two Scanning Electron microscope figure, (b) and (c) is distributed as the electric field that incident light λ=780nm p-polarization and s polarization coupleds are obtained CCD schemes, and (d) and (e) is respectively the field pattern that numerical computations are obtained;
During Fig. 5 (a) to (c) is respectively embodiment three, change the structural parameters w of projection nano particledAnd Ld, numerical computations Obtained p-polarization and the intensity of the SPP mode of s polarization coupleds, Fig. 5 (d) to (f) is respectively that two defect sturctures are symmetrically disposed at Change the structural parameters w of projection nano particle during aperture both sidesdAnd Ld, p-polarization and the SPP of s polarization coupleds that numerical computations are obtained The intensity of pattern;
During Fig. 6 is embodiment one, SPP mode excites figure when incident light is circular polarization, wherein, (a) and (b) is several respectively Value calculate the incident light of obtained dextrorotation and Left-hand circular polarization from back side illuminaton sample when, the energy flow point above waveguide at 100nm Cloth, image when (c) and (d) is the dextrorotation that CCD is obtained and left-handed elliptical polarization incidence respectively, (e) and (f) is corresponding numerical value Calculate the energy flow distribution at 100nm in obtained waveguide;
Fig. 7 is the Spectral Extinction of the SPP mode in embodiment two, wherein, (a) and (b) are respectively the incident light that experiment is obtained The delustring collection of illustrative plates of SPP mode when being polarized for p-polarization and s, (c) and (d) is respectively that to calculate obtained incident light be p-polarization and s The Spectral Extinction of SPP mode during polarization;
Fig. 8 is the schematic diagram of p-polarization and s polarization coupled mechanism, wherein, (a) is the schematic diagram of focus, and (b) is p-polarization Field strength pattern, (c) is the field strength pattern that s is polarized;
Fig. 9 is the intensity map of SPP mode when two defect sturctures are symmetrically disposed at aperture both sides;
Figure 10 is analyzing analysis chart, wherein, (a) and (b) is that Glan-Taylor prism is p-polarization, and incident light is respectively p inclined Shake the image of CCD when being polarized with s, and (c) and (d) is that Glan-Taylor prism is s polarizations, and incident light is respectively p-polarization and s polarizations When CCD image.
Embodiment
Below in conjunction with the accompanying drawings, by embodiment, the present invention will be further described.
Embodiment one
As shown in figure 1, the metallic film of the present embodiment, aperture, ridge waveguide and projection nano particle;Wherein, metal foil The thickness of film is t, and aperture is provided with metallic film;On metallic film and positioned at aperture two ends positional symmetry set Two ridge waveguides, the width of ridge waveguide and the width of aperture can be with inconsistent, by the width w and height that adjust ridge waveguide Spend h so that ridge waveguide only supports single SPP mode;Projection nanometer is set on metallic film and positioned at the side of aperture Grain;The edge of the endless all standing aperture of projection nano particle, forms defective small structure.
First, ridge waveguide, w=290nm, h=300nm are set on metallic film, and metallic film uses golden film, ridged Shown in the field distribution such as Fig. 1 (c) for the SPP mode that waveguide is supported.Now, lambda1-wavelength λ=780nm, corresponding golden dielectric Constant is εAu=-22.5+1.4i30.It can be seen that, electromagnetic field is held onto well, and electric field is mainly vertical metal Surface, explanation is TM polarizations.In order in incident light from back side illuminaton in the case of be coupled out SPP mode, set on metallic film A rectangular apertures are put, the edge for being close to aperture sets projection nano particle, shown in such as Fig. 1 (a).Wherein rectangular apertures Length is L, and the width and length of projection nano particle are respectively wdAnd Ld.In order to sample process convenience, projection nano particle and The overlapping Δ L distance of ridge waveguide.Due to the influence of projection nano particle, the incident light of p-polarization and s polarizations can be oriented Ground is coupled out the SPP mode propagated along ridge waveguide.
Experimentally, with focused ion beam FIB in the thick golden films of 450nm (deposition on the glass substrate, and centre has one Titanium adhesion layer thick layer 30nm) it machined defective small structure.Fig. 1 (d) and (e) are that the Scanning Electron of sample is micro- respectively Mirror SEM image, wherein Fig. 1 (d) are the common apertures on ridged waveguide structure, and Fig. 1 (e) is defective small on ridge waveguide Pore structure.The flawless small structure that also machined no defect sturcture simultaneously is used as reference sample.Defective aperture knot The details of structure is shown in Fig. 1 (e) right half part.During FIB is processed, a ridge waveguide, ripple are first machined in golden film The width led is w.In order to process projection nano particle, a small rectangular area has been stayed not during ridge waveguide is processed Processing.Then, the position that projection nano particle is close on ridge waveguide processes the aperture of a rectangle.According to the knot of measurement Really, the structural parameters of total are approximately as w=290nm, L=600nm, wd=300nm, Ld=360nm, and Δ L= 60nm, the cross section of ridge waveguide is 290 × 300nm2Rectangle.So the area of total is about 0.28 μm2(<λ2/ 2).Facilitate far field detection in order to which SPP mode is scattered into free space, machined 6 μm long respectively in the both sides of ridge waveguide Grating (cycle 800nm, 31.2 μm of spacing).
In order to prove dependence of the coupling to polarization of SPP mode on ridged waveguide structure, first with λ=780nm p-polarization The laser of (magnetic vector is perpendicular to ridge waveguide) is from common aperture of the back side illuminaton as reference sample.Can be with after back side illuminaton Eliminate the noise that incident light is introduced.The SPP mode that the optical coupling of back surface incident goes out can be propagated along ridge waveguide, then by grating Scattering.With long reach object lens (Mitutoyo, 100 ×, NA=0.5) collect scattered light, and be imaged on CCD.Due to general Logical small structure is symmetrical, so the intensity of the light gone out from left side and right side grating scattering is essentially identical, such as shown in Fig. 2 (a). The polarization of incident light is rotated by 90 ° (s is polarized, and magnetic vector is parallel to ridge waveguide), any scattered light is now can't see at grating, SPP mode can not be coupled out by illustrating the incident light of s polarizations, shown in such as Fig. 2 (b).This phenomenon and the SPP mode reported before The dependence coupled to polarization is also what is be consistent.However, just different for defective small structure situation.Due to structure Symmetry is broken, as incident light λ=780nm, the incident light of p-polarization from back side illuminaton when, the grating in left side is substantially Dark, and the grating on right side then brightens, such as shown in Fig. 2 (c).The SPP mode that this explanation is coupled out is mainly along ridge waveguide (direction away from projection nano particle) is propagated to the right.Moreover, go out in defective small structure from right side grating scattering Light intensity is about 1.8 times of common sample, and this explanation is in defective small structure, and the intensity of SPP mode is added.It will enter The polarization for penetrating light is rotated by 90 ° (s polarizations), similar when phenomenon and the incident p-polarization shown in Fig. 2 (c), such as shown in Fig. 2 (d).This says Bright, in the structure shown here, the incident light of s polarizations can also be coupled out SPP mode.Further it can be seen that the area of scattering hot spot is remote Less than the area of scattered grating, dashed rectangle in such as Fig. 2 (a) to (d).What this two kinds of mutually perpendicular incident light of explanation was coupled out SPP mode is all strapped on ridge waveguide, rather than propagated along metal surface well.Numerical computations are obtained when p is inclined Shake incident light defective from the back side illuminaton small structure polarized with s when, distribution such as Fig. 2 (e) and (f) of electric field are shown.From It can see in this two width figure, the incident light of p-polarization and s polarizations can be coupled out the SPP mode propagated along specific direction, this With the experimental result as shown in Fig. 2 (c) and (d) meet it is fine.So, in defective small structure, SPP mode both may be used With with p-polarization, the incident optical coupling that can also be polarized with s, and the intensity for the SPP mode being coupled out can obtain with common aperture The intensity arrived is comparable.
Next, study in defective ridged waveguide structure, it is dry between the SPP mode that p-polarization and s polarization coupleds go out Relate to.Consider two kinds of special circumstances.As shown in arrow in Fig. 3 (a), when intensity identical p-polarization and the s incident light compositing polarized are obtained When having the linearly polarized light of 45 ° of angles to magnetic vector and ridge waveguide, SPP mode that the incident light of p-polarization is coupled out and s polarizations The SPP mode coherent subtraction that incident light is coupled out.So scattered light is there is no at grating, the CCD figures as shown in Fig. 3 (a) Picture.In Fig. 3 (b) shown in arrow, when the magnetic vector and ridge waveguide of the line polarisation of synthesis have -45 ° of angles, the incidence of p-polarization The SPP mode coherent phase that the incident light for SPP mode and the s polarization that optical coupling goes out is coupled out is long, so the intensity of SPP mode can increase Plus.This can significantly increase the intensity of scattered light at grating, and shown in such as Fig. 3 (b), now the intensity of scattered light is common aperture 5.2 times of scattered light intensity.Shown in field distribution such as Fig. 3 (c) and (d) that corresponding numerical computations are obtained, meet with experimental result Very well.So, the SPP intensity being coupled out can be effectively modulated using the s polarized components of incident light.And measure and calculate The intensity for the SPP mode that the linearly polarized light of same intensity is coupled out and the relation of polarization direction, as a result such as Fig. 3 (e) and (f) institute Show.It can be seen that, experiment [Fig. 3 (e)] and numerical computations [Fig. 3 (f)] result meet it is fine.It was found from Fig. 3 (e) and (f), By rotating the polarization angle of incident light, the intensity for the SPP mode being coupled out can be readily adjusted.In addition, rotatory polarization is incident When, the unidirectional couplings of SPP mode experimentally also demonstrate that, and with numerical result meet it is fine.
During Fig. 6 is embodiment one, SPP mode excites figure when incident light is circular polarization, wherein, (a) and (b) is several respectively Value calculate the incident light of obtained dextrorotation and Left-hand circular polarization from back side illuminaton sample when, the energy flow point above waveguide at 100nm Cloth, image when (c) and (d) is the dextrorotation that CCD is obtained and left-handed elliptical polarization incidence respectively, (e) and (f) is corresponding numerical value The energy flow distribution at 100nm in obtained waveguide is calculated, annular arrow represents electric vector, and dashed rectangle represents the position of scattered grating Put.
Embodiment two
By adjusting the structural parameters of projection nano particle, the SPP mode that p-polarization and s polarization coupleds are obtained can be divided Open and propagate in opposite direction.In the present embodiment, the width of projection nano particle is decreased to 60nm.Corresponding SEM image and Shown in detail view such as Fig. 4 (a).Other structural parameters of defective small structure are as follows:W=260nm, L=560nm, Ld =240nm, h=350nm, and Δ L=60nm.Electric field ccd image such as Fig. 4 (b) and (c) institute that incident light λ=780nm is obtained Show.From ccd image it can be seen that, the SPP mode that the incident light of p-polarization is coupled out mainly is propagated to the right along ridge waveguide, accordingly Extinction ratio be about (IR/IL)p≈ 5.1, so right side grating is illuminated, such as shown in Fig. 4 (b).And the incident optical coupling of s polarizations The SPP mode gone out is propagated to the left mainly along along ridge waveguide, and corresponding extinction ratio is about (IL/IR)s≈ 3.3, so left side light Grid are illuminated, such as shown in Fig. 4 (c).Herein, extinction ratio (IR/ILOr IL/IR) be defined as at two scattered grating scatterings The intensity ratio of light.Subscript R and L are represented to the right or to the left.The SPP mode propagated to the right that the incident light of p-polarization is coupled out Intensity be about s polarizations be coupled out twice of the SPP mode propagated to the left of incident light.What corresponding numerical computations were obtained Shown in field distribution such as Fig. 4 (d) and (e), and experimental result meet it is fine.So, in defective small structure, two kinds are partially The SPP mode that the mutually perpendicular incident light that shakes is coupled out can be sufficiently separated, and the information that incident light is carried is retained .Because the SPP mode that two mutually perpendicular linearly polarized lights are coupled out is propagated in opposite direction, so any polarization state Incident light can be coupled out the SPP mode propagated along ridge waveguide.Importantly, two mutually perpendicular linearly polarized lights are taken The information of band can be individually modulated in chip.
Fig. 7 is the Spectral Extinction of the SPP mode in embodiment two, wherein, (a) and (b) are respectively the incident light that experiment is obtained The delustring collection of illustrative plates of SPP mode when being polarized for p-polarization and s, (c) and (d) is respectively that to calculate obtained incident light be p-polarization and s The Spectral Extinction of SPP mode during polarization.
Embodiment three
In the present embodiment, defective small structure is calculated with COMSOL Multiphysics to SPP on ridge waveguide The influence of Mode Coupling.The structural parameters of calculating formula, ridge waveguide and aperture use sample shown in Fig. 1 experimentally to measure Obtained result, parameter is respectively w=290nm, L=600nm, h=300nm, Δ L=60nm.Change projection nano particle Structural parameters wdAnd LdShown in the intensity of obtained SPP mode such as Fig. 5 (a) to (c).It can be seen that, the incidence that p-polarization is polarized with s Dependence of the intensity of the SPP mode of optical coupling to structural parameters is different.
There is a wedge angle in defective small structure, shown in such as Fig. 1 (a), when incident light irradiation, electric charge easily exists These regions accumulate and form focus.To the incident light of p-polarization, three focuses are occurred in that altogether in the sharp corner of ridge waveguide, such as Shown in Fig. 8 (a).In addition, the ridge waveguide edge on the right is also very bright.The focus at the edge of these wedge angles and ridge waveguide it is strong Radiation field can be coupled into the SPP mode propagated along ridge waveguide, then interfere.It is right due to the influence of projection nano particle The hot spot region of the ridge waveguide at end is much larger than the ridge waveguide of left end, shown in such as Fig. 8 (b).So, the SPP moulds propagated to the right The intensity of formula is always greater than the SPP mode propagated to the left, and dotted line in such as Fig. 5 (a) to (c) and shown in solid illustrates coupling SPP mode is mainly propagated to the right along ridge waveguide.The incident light polarized to s, a very strong heat is occurred in that in the wedge angle of defect Shown in point, such as Fig. 8 (c).10 times of intensity of hot spots when now the intensity of focus is about p-polarization incidence.Moreover, the radiation of focus Field can be coupled to ridge waveguide up.Here it is the reason for incident light of s polarizations can couple SPP mode.Because aperture Central field it is most strong, so when the wedge angle of defect sturcture is nearer from the center of aperture, the intensity of focus is stronger.In addition, numerical value meter Calculate result and show that the width of projection nano particle can influence the field distribution of focus, so the width and length of projection nano particle The intensity of SPP mode can be influenceed, as shown in Fig. 5 (a) to (c) dotted line and chain-dotted line.Due to the asymmetry of structure, phase The intensity of the SPP mode of opposite direction is different, and its intensity can be adjusted by adjusting the parameter of projection nano particle Section.For example, when the parameter of projection nano particle is wd=100nm and LdDuring=260nm, the SPP moulds of the incident optical coupling of s polarizations Formula is mainly propagated to the left along ridge waveguide, as shown in the dotted line erected in Fig. 5 (a).When the parameter of defect sturcture is wd=300nm and LdDuring=360nm, the SPP mode of the incident optical coupling of s polarizations is mainly propagated to the right along ridge waveguide, the void erected in such as Fig. 5 (c) Shown in line.These numerical results and experimental result before all meet very well.It is further to calculate discovery, p-polarization and s The proportion for the SPP intensity that polarization coupled goes out can be adjusted by adjusting the structural parameters of defect sturcture.Wherein, IL PAnd IR PRespectively Represent the SPP mode to the left and to the right of the incident light of p-polarization, IL SAnd IR SRespectively represent s polarization incident light to the left and to Right SPP mode.
In order to support these analysis, SPP moulds when two defect sturctures are symmetrically disposed at aperture both sides are further study The intensity of formula.The incident light polarized to s, two defect sturctures can introduce two focuses, as shown in Figure 9.But the two are hot Point is inverting each other, so coupling obtained SPP mode coherent subtraction by this focus.Therefore, the incident light that now s is polarized SPP mode can not be coupled out, as shown in Fig. 5 (d) to (f) dotted line and chain-dotted line, this is consistent with analysis above.
Figure 10 is analyzing analysis chart, wherein, (a) and (b) is that Glan-Taylor prism is p-polarization, and incident light is respectively p inclined Shake the image of CCD when being polarized with s, and (c) and (d) is that Glan-Taylor prism is s polarizations, and incident light is respectively p-polarization and s polarizations When CCD image.
Sum it up, by processing defective small structure on the ridge waveguide of sub-wavelength, what p-polarization and s were polarized Incident light is coupled out the single SPP mode of ridge waveguide support in which can have direction.This overcomes free space optocoupler completely Close dependence of the SPP mode process to polarization.In the corner region of aperture, p-polarization and s polarizations can produce focus.Due to lacking The destruction of structural symmetry is fallen into, the radiation field of focus is coupled into SPP mode with being directed.By adjusting the parameter of defect, p The SPP mode that is coupled out of incident light of polarization and s polarizations is identical or opposite backpropagation can be realized along waveguide.It is shown, It is that polarization is unrelated to be coupled out along the SPP mode that ridge waveguide is propagated, and this has weight in following phasmon loop and system Apply.
It is finally noted that, the purpose for publicizing and implementing mode is that help further understands the present invention, but ability The technical staff in domain is appreciated that:Without departing from the spirit and scope of the invention and the appended claims, it is various replacement and Modification is all possible.Therefore, the present invention should not be limited to embodiment disclosure of that, the scope of protection of present invention with The scope that claims are defined is defined.

Claims (10)

1. a kind of surface phasmon directional coupler, it is characterised in that the directional coupler includes:Metallic film, aperture, Ridge waveguide and projection nano particle;Wherein, aperture is provided with metallic film;On metallic film and positioned at aperture two ends Positional symmetry two ridge waveguides are set, by the width w and height h that adjust ridge waveguide so that ridge waveguide is only propped up Hold single SPP mode;Projection nano particle is set on metallic film and positioned at the side of aperture, projection nano particle is incomplete The edge of aperture is covered, defective small structure is formed;Incident light is having from the defective small structure of back side illuminaton, electric charge The corner region of the small structure of defect is accumulated and forms focus;For the incident light of p-polarization, wedge angle of the electric charge in ridge waveguide Zone-accumulation simultaneously forms focus, the radiation field of focus is coupled into the SPP mode propagated along ridge waveguide, so that p-polarization enters Penetrate the SPP mode that optocoupler synthesis along ridge shape waveguide is propagated;The incident light polarized for s, wedge angle of the electric charge in projection nano particle Zone-accumulation simultaneously forms focus, and the radiation field of focus is coupled into the SPP mode propagated along ridge waveguide, thus s polarization enter Penetrate optocoupler synthesis along ridge shape waveguide and propagate SPP mode, realize the surface phasmon directional coupler independent of polarization.
2. directional coupler as claimed in claim 1, it is characterised in that further, the center of projection nano particle is not small On the center of hole side, so as to form the asymmetric defective small structure along ridge waveguide direction, aperture The ridge waveguide of one end is away from projection nano particle, and the ridge waveguide of the aperture other end is realized not close to projection nano particle Rely on the surface phasmon directional coupler of polarization.
3. directional coupler as claimed in claim 2, it is characterised in that for the incident light of p-polarization, in the ridge waveguide Corner region stored charge and form focus, and the focus formed on the ridge waveguide away from projection nano particle is more than The focus number formed on the ridge waveguide close to projection nano particle, so that the SPP mode master of the incident optical coupling of p-polarization To be propagated along the ridge waveguide away from projection nano particle.
4. directional coupler as claimed in claim 2, it is characterised in that the incident light polarized for s, in projection nano particle Corner region stored charge and form focus, the geometric structure diamete of projection nano particle influences the radiation field direction of focus, So as to which the s incident lights polarized are directionally coupled into the SPP mode propagated along ridge waveguide.
5. directional coupler as claimed in claim 1, it is characterised in that the geometric structure diamete shadow of the projection nano particle The intensity of SPP mode is rung, by the SPP for adjusting the geometric structure diamete of projection nano particle, regulation p-polarization and s polarization coupleds The proportion of the intensity of pattern.
6. directional coupler as claimed in claim 1, it is characterised in that the geometry chi of the adjustment projection nano particle It is very little so that p-polarization and the SPP mode of s polarized incident optical couplings are propagated along equidirectional on ridge waveguide, for incidence Linearly polarized light, by rotating the polarization angle of incident light, adjusts the intensity for the SPP mode being coupled out.
7. a kind of control method of surface phasmon directional coupler, it is characterised in that the control method includes following step Suddenly:
1) aperture is provided with metallic film, on metallic film and positioned at aperture two ends positional symmetry two ridges are set Shape waveguide, by the width w and height h that adjust ridge waveguide so that ridge waveguide only supports single SPP mode, in metal foil Projection nano particle, the edge of the endless all standing aperture of projection nano particle are set on film and positioned at the position of aperture side;
2) incident light is from the defective small structure of back side illuminaton, and electric charge is accumulated simultaneously in the corner region of defective small structure Form focus;
3) for the incident light of p-polarization, electric charge is accumulated in the corner region of ridge waveguide and forms focus, the radiation field coupling of focus The SPP mode propagated along ridge waveguide is synthesized, so that the incident light of p-polarization is coupled into the SPP moulds propagated along ridge waveguide Formula;
4) incident light polarized for s, electric charge is accumulated in the corner region of projection nano particle and forms focus, the radiation of focus Field is coupled into the SPP mode of ridge waveguide propagation, so that the incident light of s polarizations is coupled into the SPP mode propagated along ridge waveguide, Realize the surface phasmon directional couple independent of polarization.
8. control method as claimed in claim 7, it is characterised in that the center of the projection nano particle is not in aperture side Center on, so as to form the asymmetric defective small structure along ridge waveguide direction, aperture one end Ridge waveguide is away from projection nano particle, and the ridge waveguide of the aperture other end is close to projection nano particle.
9. control method as claimed in claim 8, it is characterised in that by the geometry chi for adjusting projection nano particle It is very little, the proportion of the intensity of the SPP mode of regulation p-polarization and s polarization coupleds.
10. control method as claimed in claim 8, it is characterised in that further, adjusts the geometry of projection nano particle Size so that p-polarization and the SPP mode of s polarization coupleds are propagated along identical direction on ridge waveguide, for incident line Polarised light, by rotating the polarization angle of incident light, adjusts the intensity for the SPP mode being coupled out.
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